CN109879477A - A kind of method for treating arsenic-containing wastewater - Google Patents

A kind of method for treating arsenic-containing wastewater Download PDF

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Publication number
CN109879477A
CN109879477A CN201910179544.1A CN201910179544A CN109879477A CN 109879477 A CN109879477 A CN 109879477A CN 201910179544 A CN201910179544 A CN 201910179544A CN 109879477 A CN109879477 A CN 109879477A
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arsenic
added
removal
mixed liquor
containing wastewater
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CN109879477B (en
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田宇鸣
熊江磊
陆晟星
周笈
董全宇
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China Electronics Innovation Environmental Technology Co Ltd
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Abstract

The present invention provides a kind of method for treating arsenic-containing wastewater, and effect of removing arsenic is good, can satisfy increasingly strict arsenic discharge standard.Trivalent arsenic is oxidized to pentavalent arsenic by adding oxidant the following steps are included: adjusting pH by addition acid, alkali medicament after one, wastewater collection by it;Two, the mixed liquor that step 1 is handled by addition iron salt coagulant coagulating and is adjusted into pH;Three, the mixed liquor for handling step 2 is passed through concentration basin, arsenic removal medicament is added in concentration basin, and remove insoluble particulates by tube microfiltration membrane system;Four, molysite is added into the mixed liquor that step 3 is handled, further decreases arsenic concentration by being catalyzed arsenic removal tower;Five, reducing agent is added into the mixed liquor that step 4 is handled makes oxidation-reduction potential ORP < 300mV, and adjusts after pH is 5 ~ 6, is discharged after carrying out deeply removing arsenic by arsenic removal resin or arsenic removal filtrate.

Description

A kind of method for treating arsenic-containing wastewater
Technical field
The present invention relates to technical field of waste water processing, specially a kind of method for treating arsenic-containing wastewater.
Background technique
The arsenic-containing waste water of semicon industry is typically derived from two parts, and a part derives from chip production process, such as clear It washes, remove, etching, the processes such as grinding and polishing and chip cutting;Another part is originated from containing for gallium arsenide epitaxy exhaust-gas treatment generation Arsenic, phosphorus-containing wastewater.Arsenic is discharged as a class of pollutant by stringent control, at " integrated wastewater discharge standard " (GB8978-1996) arsenic < 0.5mg/L is required in table 1." electronics industry pollutant emission standard " (secondary exposure draft) table 2 In require arsenic < 0.1mg/L;A class standard is arsenic in Shanghai City " semicon industry pollutant emission standard " (DB31-2006) table 1 < 0.05mg/L;Special discharge standard is arsenic < 0.05mg/L.However, component environment capacity is smaller or the discharge of arsenic is by total amount Control, discharge arsenic concentration even require 2 μ g/L of <.Industrial common dearsenicating method has chemical precipitation, arsenic removal resin or absorption Agent absorption, reverse osmosis and evaporating and concentrating process etc..
Arsenic-containing waste water is handled frequently with chemical precipitation method in Practical Project case, this method technical maturity is easy to operate, can make It is discharged arsenic concentration < 0.5mg/L.As disclosed a kind of method for treating arsenic-containing wastewater in Chinese patent CN103408162A, use The technique for adding iron, two-stage chemical precipitation filtering, has preferable treatment effect to the arsenic-containing waste water of various concentration.But this method Chemical reagent is added dependent on excessive, therefore easily causes sludge quantity big, is discharged the higher problem of soluble solid.The technique is only capable of Arsenic-containing waste water is handled and is unable to satisfy increasingly strict discharge standard to < 0.5mg/L.
In the case that maximum discharge requires, the removal technique of coagulation binding resin, such as Chinese patent are often used A kind of acidic arsenic-containing waste water treatment process is disclosed in CN106517577A, and two-stage coagulating sedimentation binding resin is used to adsorb Technique, for different influent concentrations, water outlet can reach arsenic < 0.05mg/L.But the technique uses two-stage coagulating sedimentation, if It applies and takes up a large area;Simultaneously as water outlet arsenic is relatively high out after coagulation, it is also unable to satisfy increasingly strict discharge standard.
Increasingly more stringent requirements are proposed for treatment process of the stringent water quality management standard to arsenic-containing waste water, needs to seek low Honest and clean, efficient stable, and it is applicable in the processing method of the arsenic-containing waste water of maximum discharge standard.
Summary of the invention
For the maximum discharge typical problem of current arsenic-containing waste water, the present invention provides a kind of method for treating arsenic-containing wastewater, Effect of removing arsenic is good, can satisfy increasingly strict arsenic discharge standard.
Its technical solution is such that a kind of method for treating arsenic-containing wastewater comprising following steps:
A kind of method for treating arsenic-containing wastewater comprising following steps:
One, pH is adjusted by addition acid, alkali medicament after wastewater collection and trivalent arsenic is oxidized to pentavalent arsenic by adding oxidant;
Two, the mixed liquor that step 1 is handled by addition iron salt coagulant coagulating and is adjusted into pH;
It is characterized by: its is further comprising the steps of:
Three, the mixed liquor for handling step 2 is passed through concentration basin, arsenic removal medicament is added in concentration basin, and micro- by tubular type Filter membrane system removes insoluble particulates;
Four, molysite is added into the mixed liquor that step 3 is handled, further decreases arsenic concentration by being catalyzed arsenic removal tower;
Five, reducing agent is added into the mixed liquor that step 4 is handled makes oxidation-reduction potential be less than 300mV, and adjusts pH Afterwards, it is discharged after carrying out deeply removing arsenic by arsenic removal resin or arsenic removal filtrate.
It is further characterized by:
In step 1, adjusting pH is 6 ~ 9, adds oxidant, controls ORP > 400mV;
In step 2, iron salt coagulant contains ferric iron, makes iron arsenic molar ratio 2:1 ~ 10:1 in solution;
In step 2, iron salt coagulant is added, dosage is that iron phosphorus molar ratio is 1:1 ~ 3:1, and basic agent is added, by pH tune Section is 6.5 ~ 9.5, reacts 30 ~ 60min;
In step 3, arsenic removal medicament, which is added, makes iron arsenic molar ratio 1:1 ~ 10:1 in solution;The production method of arsenic removal medicament are as follows: Every 10 ~ 20g active carbon powder is added in the ferric chloride solution of 200 mL, 0.25 mol/L, stirs 30 ~ 120min, ultrasonic wave shake 40 ~ 90min is swung, the sodium hydroxide solution of 1mol/L is added in mixed liquor with the speed of 1 ~ 5 mL/min, until pH 6.5 ~ 8.0, room Temperature ageing for 24 hours, filtering, pure water clean it is colourless to supernatant, and 60 DEG C be dried;
In step 4, the filtrate of the catalysis arsenic removal tower is for manganese sand or containing manganese bioxide coated medium;
In step 4, the molysite is iron composite drug, and ferric ion and ferrous ion molar ratio are 0.5:1 ~ 2:1, is made Iron arsenic molar ratio in solution is 10:1 ~ 50:1, and arsenic removal tower intakes flow velocity as 10 ~ 25bv/h;
In step 5, the water inlet flow velocity of deeply removing arsenic device is 10 ~ 30bv/h, and adsorbent material is the oxidation of reproducible load hydroxyl The strong-base anion-exchange resin of iron or non-renewable titanium-based, FeOOH arsenic removal filtrate;
In step 5, before carrying out deeply removing arsenic by arsenic removal resin or arsenic removal filtrate, adjusts pH first as 5 ~ 9 and pass through dephosphorization again Resin simultaneously adjusts pH value, for waste water dephosphorization.
Method for treating arsenic-containing wastewater disclosed by the invention, there are following advantages:
(1) tube microfiltration membrane filtering replaces traditional filter tank, saves space and under the action of thickener, improves medicament and uses effect Rate improves effect of removing arsenic.
(2) arsenic removal filter can remove remaining 90% arsenic after chemical precipitation, extend terminal arsenic removal resin/filtrate and use week Phase, and it applies manganese sand and manganese bioxide coated filtrate, is not necessarily to chemical regeneration, improves and remove while having saved application cost Arsenic effect.
(3) competitive Adsorption for fully considering phosphate and arsenic when arsenic removal resin/filtrate uses is removed caused by avoiding phosphorus from existing Arsenic effect instability problem, to further promote effect of removing arsenic.
(4) after adopting this method, water outlet has extremely low arsenic concentration, is able to achieve arsenic less than 2 μ g/L.
Detailed description of the invention
Fig. 1 is flow chart of the present invention.
Specific embodiment
A kind of method for treating arsenic-containing wastewater as shown in Figure 1 comprising following steps:
One, adjusting pH by addition acid, alkali medicament after wastewater collection is 6 ~ 9, and by adding oxidant, trivalent arsenic is oxidized to five Valence arsenic, oxidant such as hypochlorite, ozone, ferrate, permanganate etc. make oxidation-reduction potential ORP be greater than 400mV;
Two, the mixed liquor for handling step 1 is adjusted by addition iron salt coagulant coagulating, 15 ~ 30min of reaction time Saving pH is 6.5 ~ 9.5, reaction time 15-30min, wherein iron salt coagulant is trivalent iron salt coagulant, makes the iron arsenic in solution Molar ratio is 2:1 ~ 10:1;If containing phosphate in water, iron salt coagulant is added, dosage is that iron phosphorus molar ratio is 1:1 ~ 3: 1, it is added basic agent (sodium hydroxide, potassium hydroxide), pH is adjusted to 6.5 ~ 9.5, reacts 30 ~ 60min;
Three, the mixed liquor for handling step 2 is passed through concentration basin, and being added with arsenic removal medicament in concentration basin makes the iron in solution Arsenic molar ratio is 1:1 ~ 10:1, and removes insoluble particulates by tube microfiltration membrane system, and filtrate enters relaying pond, concentrate Return to concentration basin;The regular spoil disposal of concentration basin;The production method of arsenic removal medicament are as follows: every 10 ~ 20g, 200 mesh active carbon powder is added In the ferric chloride solution of 200 mL, 0.25 mol/L, 30 ~ 120min, the hydrogen-oxygen of ultrasonic oscillation 40 ~ 90min, 1mol/L are stirred Change sodium solution to be added in mixed liquor with the speed of 1 ~ 5 mL/min, until pH 6.5 ~ 8.0, room temperature is aged filtering for 24 hours, pure water cleaning It is colourless to supernatant, and be dried at 60 DEG C;
Four, molysite is added into the mixed liquor that step 3 is handled, the molysite is iron composite drug, ferric ion and two Valence iron ion molar ratio is 0.5:1 ~ 2:1, makes iron arsenic molar ratio 10:1 ~ 50:1 in solution, arsenic removal tower intake flow velocity for 10 ~ 25bv/h;Again by filtrate be manganese sand catalysis arsenic removal tower carry out catalysis co-precipitation arsenic removal, further decrease arsenic concentration, reduce into Enter the influent load of deeply removing arsenic device, produces water and enter second level relaying pond;
Five, reducing agent is added into the mixed liquor that step 4 is handled makes oxidation-reduction potential ORP < 300mV, and is adjusted to After pH is 5-9, dephosphorization is carried out by dephosphorization resin, is discharged, removes after carrying out depth absorption arsenic removal by arsenic removal resin after adjusting PH Arsenic resin is the strong-base anion-exchange resin for being placed in the reproducible load FeOOH of resin tower, or is placed in filtrate The water inlet flow velocity of the non-renewable titanium-based of tank, FeOOH arsenic removal filtrate, resin tower or filtrate tank is 10 ~ 30bv/h.
Effect of removing arsenic is proved with reference to embodiments:
Embodiment 1: certain gallium arsenide semiconductor enterprise arsenic-containing waste water water quality: there are the arsenic-containing waste waters of two kinds of various concentrations for the enterprise: (1) alkali waste water containing arsenic acid: pH 3 ~ 9.5, arsenic in waste water content TAs < 100mg/L, suspension content SS < 10mg/L in waste water, Discharge amount 120m3/d;(2) abrasive waste water containing arsenic: pH 3 ~ 9.5, TAs < 100mg/L, SS < 300mg/L, discharge amount 120m3/ d.Two kinds of waste water collected boths to conditioning tank post-processes, and the present embodiment comprises the steps of:
Step 1: the arsenic-containing waste water pH of collection is adjusted to 6.5 ~ 7.5, reaction time 30min;Thereafter 10% sodium hypochlorite is added, Maintain ORP > 400mV, reaction time 30min;
Step 2: 20% iron chloride is added, pH is adjusted to 7.5 ~ 9.5, coagulating 30min by flow 60L/h.Then enter dense Contracting pond;
Step 3: arsenic removal medicament 20g/h is added in concentration basin, water outlet enters DF film, inlet pressure 0.2MPa, average feed water flow 82t/h is measured, average water yield is 12t/h;
Wherein, arsenic removal pharmaceutical production method: the iron chloride of 200 mL, 0.25 mol/L is added in every 200 mesh active carbon powder of 10g In solution, 30 ~ 120min is stirred, slowly (1 ~ 5 mL/min) mixing is added in the NaOH of ultrasonic oscillation 40 ~ 90min, 1mol/L In liquid, until pH 6.5 ~ 8.0, room temperature is aged for 24 hours, and filtering, pure water cleans, 60 DEG C dryings colourless to supernatant.
Step 4: 1.8 L/h of iron composite drug (Fe2+:Fe3+=1:2) is added in water outlet after relaying pond 1 is filtered, pH is adjusted After 7.5 ~ 9.0, into catalysis arsenic removal tower, flow velocity 15bv/h;
Step 5: relaying pond 2, which is discharged pH, is adjusted to 7,10% sodium hydrogensulfite is added and is restored, orp < 300mV is made.Into Deeply removing arsenic tower, is nonrecoverable version filtrate used in tower, and flow velocity 10bv/h is discharged 2 μ g/L of arsenic concentration <.
Embodiment 2: certain LED semiconductor production enterprise, enterprise's high-concentration arsenic-containing wastewater matter are as follows: 20 m3/ of designed displacement H, COD 10~150 mg/L, SS 0~400 mg/L, TAs 50~250 mg/L, TP 10~20 mg/L, pH 3 ~ 7.Transformation Preceding processing step is as follows:
Step 1: the arsenic-containing waste water pH of collection is adjusted to 6.5 ~ 7.5, reaction time 30min;Then enter oxidation trough, adds 10% sodium hypochlorite, maintains ORP > 400mV, reaction time 30min, and water outlet enters reactive tank;
Step 2: 20% iron chloride is added in reactive tank, flow 288L/h, pH are adjusted to 7.5 ~ 9.5, coagulating 60min, then PAM is added, 30min is reacted, into sedimentation basin.Sedimentation basin hydraulic detention time 4.5h, supernatant enter relaying pond, relay water Tank waterpower residence time 3h;
Step 3: the water outlet of relaying pond, into pH regulating tank, reaction time 20min, pH are adjusted to 7.5;Add bisulfite Sodium (10%), after making ORP < 300mV, into resin tower;Resin tower uses dedicated arsenic removal resin, and flow velocity 10bV/h is realized out The final 50 μ g/L of arsenic concentration < of water.
There are the following problems in operational process:
(1) not in time due to spoil disposal, sedimentation basin occur often sludge with water outlet enter subsequent workshop section the problem of, cause resin tower into Mouth plugged filter, shortens filter core service life;
(2) resin tower regeneration frequently, needs to regenerate arsenic removal resin for every 1 ~ 2 week;
(3) influent COD fluctuation is larger, and certain period water outlet COD are exceeded (COD > 100mg/L).
Using as follows after the technique of the application:
Step 1: the arsenic-containing waste water pH of collection is adjusted to 7, reaction time 30min;Thereafter enter oxidation trough, add 10% chlorine Sour sodium, maintains ORP > 400mV, reaction time 30min, and water outlet enters reactive tank;
Step 2: 20% iron chloride is added in reactive tank, flow 216L/h, pH are adjusted to 7, coagulating 30min, are concentrated into DF Pond;
Step 3: the arsenic removal medicament 50g/L into concentration basin waste water, then enters DF film and filters;After separation of solid and liquid, clarified solution into Enter to relay pond, average flow of inlet water is 164t/h, and average water yield is 24t/h;
7.5 are adjusted to step 4: being discharged after the filtering of relaying pond 1 and adding iron composite drug (Fe2+:Fe3+=1:2) 3.6L/h, pH After ~ 9.0, into catalysis arsenic removal tower, flow velocity 15bv/h;
Step 5: relaying pond 2, which is discharged pH, is adjusted to 6,10% sodium hydrogensulfite is added and is restored, makes orp < 300mV, then Into dephosphorization resin tower;Dephosphorization resin tower is discharged after pH is adjusted to 7.5 by pipe-line mixer, is entered through cartridge filter and is removed Arsenic resin adsorption filtrate tower, is dedicated arsenic removal resin used in tower, and flow velocity 20bv/h is discharged 2 μ g/L of arsenic concentration <;
Before transformation, there are following advantages:
(1) the problem of tube microfiltration membrane filtering water outlet is increased there is no SS, while active carbon can also remove part COD, water outlet is steady It is fixed up to standard;Tube microfiltration membrane combination arsenic removal medicament is utilized simultaneously, reduces 25% iron chloride consumption, and water outlet TDS reduces by 25% More than.
(2) the end arsenic removal resin regeneration period extended to 80 days from 1 week, reduced the 90% highly concentrated regeneration liquid waste containing arsenic Discharge amount;
(3) it is discharged 2 μ g/L of arsenic concentration <, water outlet arsenic concentration reduces 96% compared to originally.
In conclusion there are following advantages by the application;
1. application natural manganese sand catalysis co-precipitation arsenic removal, enhances suction-operated of the FeOOH to arsenic, increases substantially reaction The removal effect of arsenic in device.After FeOOH arsenic-adsorbing, in a device by filtrate retention, it can be gone by simple backwash It removes, is not necessarily to regenerated chemical agent.Iron remaining in water removal is synchronized, resin poison is prevented.
2. replacing traditional sedimentation basin with tube microfiltration membrane system, saved facility land occupation, be particularly suitable for place space by It limits, be discharged demanding project.And setting tube microfiltration membrane, since conventional sedimentation basin utilizes suspended matter in a liquid to sinking The time Shi Nengyu water flow that the time flows out sedimentation basin less than water flow of forming sediment separates, it is therefore desirable to use polyacrylamide polymeric retention aid Solidifying agent forms big and close wadding body, increases its subsidence velocity to capture tiny wadding body.Tube microfiltration membrane is (micro- with perforated membrane Hole filter membrane) it is filter medium, under pressure promotion, retain suspended matter in solution, fine particle and bacterium etc..There is no need to use Flocculation aid.To avoid the use of the macromolecule organic flocculating agents such as polyacrylamide, it effectively prevent such macromolecule organic pair The weakening of resin adsorption effect.
3. absorption arsenic removal material is limited by adsorption capacity, influent concentration height will lead to regeneration frequently, reduced service life.? After catalysis co-precipitation arsenic removal processing, the regeneration frequency of absorption arsenic removal material is greatly reduced, and service life extends 10 times or more.
4. being directed to phosphatic arsenic-containing waste water, by increasing dephosphorization resin, phosphate content is reduced, to avoid high concentration Phosphate generates competition to the absorption of arsenic.
5. a full set of process effect stability, easy to operate, water outlet arsenic concentration is stablized in 2 μ g/L hereinafter, meeting " Beijing Water pollution comprehensive discharge standard " the especially requirement of emission limit 0.04mg/L in (DB 11/307-2013), or even meet certain The maximum discharge standard for the 2 μ g/L of < that the more serious area of environmental pollution proposes.
More than, it is merely preferred embodiments of the present invention, but scope of protection of the present invention is not limited thereto, it is any It is familiar with the people of the technology within the technical scope disclosed by the invention, any changes or substitutions that can be easily thought of, should all cover at this Within the protection scope of invention.Therefore, protection scope of the present invention should be subject to the protection scope in claims.

Claims (9)

1. a kind of method for treating arsenic-containing wastewater comprising following steps:
One, pH is adjusted by addition acid, alkali medicament after wastewater collection and trivalent arsenic is oxidized to pentavalent arsenic by adding oxidant;
Two, the mixed liquor that step 1 is handled by addition iron salt coagulant coagulating and is adjusted into pH;
It is characterized by: its is further comprising the steps of:
Three, the mixed liquor for handling step 2 is passed through concentration basin, arsenic removal medicament is added in concentration basin, and micro- by tubular type Filter membrane system removes insoluble particulates;
Four, molysite is added into the mixed liquor that step 3 is handled, further decreases arsenic concentration by being catalyzed arsenic removal tower;
Five, reducing agent is added into the mixed liquor that step 4 is handled makes oxidation-reduction potential be less than 300mV, and adjusts pH Afterwards, it is discharged after carrying out deeply removing arsenic by arsenic removal resin or arsenic removal filtrate.
2. a kind of method for treating arsenic-containing wastewater according to claim 1, it is characterised in that: in step 1, adjust pH be 6 ~ 9, oxidant is added, ORP > 400mV is controlled.
3. a kind of method for treating arsenic-containing wastewater according to claim 1, it is characterised in that: in step 2, iron salt coagulant Containing ferric iron, make iron arsenic molar ratio 2:1 ~ 10:1 in solution.
4. a kind of method for treating arsenic-containing wastewater according to claim 3, it is characterised in that: in step 2, it is mixed to add molysite Solidifying agent, dosage is that iron phosphorus molar ratio is 1:1 ~ 3:1, and basic agent is added, and pH is adjusted to 6.5 ~ 9.5, reaction 30 ~ 60min, the phosphate for going in water removal.
5. a kind of method for treating arsenic-containing wastewater according to claim 1, it is characterised in that: in step 3, arsenic removal medicine is added Agent makes iron arsenic molar ratio 1:1 ~ 10:1 in solution;The production method of arsenic removal medicament are as follows: every 10 ~ 20g active carbon powder is added In the ferric chloride solution of 200 mL, 0.25 mol/L, 30 ~ 120min, the hydrogen-oxygen of ultrasonic oscillation 40 ~ 90min, 1mol/L are stirred Change sodium solution to be added in mixed liquor with the speed of 1 ~ 5 mL/min, until pH 6.5 ~ 8.0, room temperature is aged filtering for 24 hours, pure water cleaning It is colourless to supernatant, and be dried at 60 DEG C.
6. a kind of method for treating arsenic-containing wastewater according to claim 1, it is characterised in that: in step 4, the catalysis is removed The filtrate of arsenic tower is for manganese sand or containing manganese bioxide coated medium.
7. a kind of method for treating arsenic-containing wastewater according to claim 1, it is characterised in that: in step 4, the molysite is Iron composite drug, ferric ion and ferrous ion molar ratio are 0.5:1 ~ 2:1, make the iron arsenic molar ratio 10:1 in solution ~ 50:1, arsenic removal tower intake flow velocity as 10 ~ 25bv/h.
8. a kind of method for treating arsenic-containing wastewater according to claim 1, it is characterised in that: in step 5, deeply removing arsenic dress The water inlet flow velocity set is 10 ~ 30bv/h, and adsorbent material is that the strong alkalinity anion of reproducible load FeOOH exchanges tree Rouge or non-renewable titanium-based, FeOOH arsenic removal filtrate.
9. -7 any a kind of method for treating arsenic-containing wastewater according to claim 1, it is characterised in that: in step 5, logical Before crossing arsenic removal resin or arsenic removal filtrate progress deeply removing arsenic, first adjusts pH and pass through dephosphorization resin again for 5 ~ 9 and adjust pH value, use In to waste water dephosphorization.
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CN112299588A (en) * 2019-07-25 2021-02-02 东泰高科装备科技有限公司 Method for treating industrial wastewater with high content of organic matters and arsenic
CN110592806A (en) * 2019-07-29 2019-12-20 同济大学 Double-nanometer functional core-loaded arsenic-removing nanofiber membrane and preparation method thereof
CN110642460A (en) * 2019-09-19 2020-01-03 济南大学 Method for removing nitrogen and phosphorus by ferrate enhanced denitrification phosphorus removal biological filter
CN110498644A (en) * 2019-09-26 2019-11-26 常熟理工学院 A kind of processing method of arsenic slag
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CN112678987A (en) * 2019-10-18 2021-04-20 中国石油化工股份有限公司 Treatment method and application of high-COD high-phosphorus heavy metal-containing sewage
CN113289573A (en) * 2020-02-21 2021-08-24 苏州崇越工程有限公司 Arsenic adsorbent, method for producing arsenic adsorbent, and system for treating arsenic-containing wastewater
CN113716775A (en) * 2021-08-31 2021-11-30 四川恒泰环境技术有限责任公司 Comprehensive treatment method for high-arsenic high-salt wastewater and arsenic-containing grinding wastewater of gallium arsenide chip
CN113716775B (en) * 2021-08-31 2022-05-03 四川恒泰环境技术有限责任公司 Comprehensive treatment method for high-arsenic high-salt wastewater and arsenic-containing grinding wastewater of gallium arsenide chip
CN115893698A (en) * 2021-09-30 2023-04-04 山东华光光电子股份有限公司 Treatment process of high-concentration arsenic-phosphorus-containing wastewater generated by III-V compound semiconductor epitaxial process
CN116282699A (en) * 2023-03-06 2023-06-23 武汉天源环保股份有限公司 Semiconductor wastewater treatment method and system
CN116282699B (en) * 2023-03-06 2023-12-05 武汉天源环保股份有限公司 Semiconductor wastewater treatment method and system

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