CN109879247A - A kind of manufacturing method of the large area in any substrate, diversified organic formwork - Google Patents
A kind of manufacturing method of the large area in any substrate, diversified organic formwork Download PDFInfo
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- CN109879247A CN109879247A CN201910122379.6A CN201910122379A CN109879247A CN 109879247 A CN109879247 A CN 109879247A CN 201910122379 A CN201910122379 A CN 201910122379A CN 109879247 A CN109879247 A CN 109879247A
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Abstract
The manufacturing method of large area that the invention discloses a kind of in any substrate, diversified organic formwork produces spherical non-solid matter organic colloid template by the method for plasma bombardment；By being heat-treated the method combined with plasma bombardment, the non-solid matter organic colloid template of hexagon is produced；The strategy combined by template transfer-overlapping with plasma bombardment produces the double-deck non-solid matter organic colloid template；Three kinds of synthesized organic colloid templates are transferred in any specified substrate by the method for lossless transfer.Nano-device can be constructed for on-demand (design) and required template is provided.
Description
Technical field
The present invention relates to a kind of manufacturing methods of organic formwork, more particularly to one kind large area, multiplicity in any substrate
Change the manufacturing method of organic formwork.
Background technique
Diversified template mainly includes spherical non-solid matter template, the non-solid matter template of hexagon, the double-deck non-solid matter mould of binary
Plate.These templates provide possibility for the synthesis of more nano-structure arrays, meanwhile, it may be implemented in any substrate
Manufacture.
The nano particle being typically prepared is random distribution, it is lined up in a specific manner in specified substrate,
It may make up ordered nano-structure array, this is one of the important aspect for constructing nano-device.Although tradition such as electron beam, ion beams
Lithographic technique may be implemented certain arrays and construct with device, but implement in the substrate being arbitrarily designated efficient and convenient on-demand
It constructs and batch micro operations, is the problem of challenge.
Applicant early period it was verified that constructing based on organic colloid template, is the effective way for solving the problem.But
Existing main bottleneck problem is that organic formwork used is excessively single, seriously constrains the more of final ordered nano-structure array
Shape preparation.Therefore, it is necessary to develop a kind of method, the manufacturer of large area, diversified organic formwork is constructed in any substrate
Method is extremely important.
Summary of the invention
The manufacturing method of large area that the object of the present invention is to provide a kind of in any substrate, diversified organic formwork.
The purpose of the present invention is what is be achieved through the following technical solutions:
Large area, the manufacturing method of diversified organic formwork in any substrate of the invention, comprising:
By the method for plasma bombardment, spherical non-solid matter organic colloid template is produced；
By being heat-treated the method combined with plasma bombardment, the non-solid matter organic colloid template of hexagon is produced；
The strategy combined by template transfer-overlapping with plasma bombardment produces the double-deck non-solid matter organic colloid
Template；
Above-mentioned three kinds of synthesized organic colloid templates are transferred to any specified substrate by the method for lossless transfer
On.
As seen from the above technical solution provided by the invention, face big in any substrate provided in an embodiment of the present invention
The manufacturing method of product, diversified organic formwork can construct large area, diversified organic formwork in any substrate, be on-demand
(design) constructs nano-device and provides required template.
Detailed description of the invention
Fig. 1 is the stereoscan photograph of spherical non-solid matter PS template in the embodiment of the present invention.
Fig. 2 is the stereoscan photograph of the non-solid matter PS template of hexagon in the embodiment of the present invention.
Fig. 3 is the stereoscan photograph of the double-deck non-solid matter PS template in the embodiment of the present invention.
Specific embodiment
The embodiment of the present invention will be described in further detail below.What is be not described in detail in the embodiment of the present invention is interior
Appearance belongs to the prior art well known to professional and technical personnel in the field.
Large area, the manufacturing method of diversified organic formwork in any substrate of the invention, is preferably embodied
Mode is:
Include:
By the method for plasma bombardment, spherical non-solid matter organic colloid template is produced；
By being heat-treated the method combined with plasma bombardment, the non-solid matter organic colloid template of hexagon is produced；
The strategy combined by template transfer-overlapping with plasma bombardment produces the double-deck non-solid matter organic colloid
Template；
Above-mentioned three kinds of synthesized organic colloid templates are transferred to any specified substrate by the method for lossless transfer
On.
The spherical non-solid matter organic formwork of manufacture, key step are as follows:
Using the method for gas-liquid interface self assembly, the list of compact arranged PS ball self assembly is prepared in clean substrate surface
Tunic；
The method shifted using liquid phase surface, is transferred to any cleaning base for the monofilm of compact arranged PS ball self assembly
The surface at bottom；
Using the method for plasma etching, argon gas is etching gas, is that PS ball performs etching to surface, obtains array junctions
Structure.
Manufacture the non-solid matter organic formwork of hexagon, key step are as follows:
Using the method for gas-liquid interface self assembly, the list of compact arranged PS ball self assembly is prepared in clean substrate surface
Tunic；
The method shifted using liquid phase surface, is transferred to any cleaning base for the monofilm of compact arranged PS ball self assembly
The surface at bottom；
It is put into the baking oven that temperature is 110 DEG C, is heat-treated, the time is related with PS ball size；
Using the method for plasma etching, argon gas is etching gas, is that PS ball performs etching to surface, obtains array junctions
Structure.
Manufacture the double-deck non-solid matter organic formwork of binary, key step are as follows:
Using the method for gas-liquid interface self assembly, the list of compact arranged PS ball self assembly is prepared in clean substrate surface
Tunic；
The method shifted using liquid phase surface, is transferred to any cleaning base for the monofilm of compact arranged PS ball self assembly
The surface at bottom；
It is put into the baking oven that temperature is 110 DEG C, is heat-treated, the time is related with PS ball size；
The method shifted using liquid phase surface, on the surface of above-mentioned solid matter template, in the superposition compact arranged PS of the second layer
Ball；
Using the method for plasma etching, argon gas is etching gas, is that PS ball performs etching to surface, obtains array junctions
Structure.
Large area, the manufacturing method of the non-solid matter organic formwork of diversification in any substrate of the invention, will be synthesized
Solid matter spherical shape organic colloid template is transferred in any specified substrate by the method for lossless transfer.On this basis, pass through
The method of plasma bombardment produces spherical non-solid matter organic colloid template；It is mutually tied by being heat-treated with plasma bombardment
The method of conjunction produces the non-solid matter organic colloid template of hexagon；It is combined by template transfer-overlapping with plasma bombardment
Strategy, produce the double-deck non-solid matter organic colloid template.This invention constructs nano-device for on-demand (design) and provides institute
The template needed.
Specific embodiment:
Include:
1, the spherical non-solid matter template of manufacture, key step are as follows:
(1) method for utilizing gas-liquid interface self assembly prepares compact arranged PS ball self assembly in clean substrate surface
Monofilm.
Specific PS ball (120~1000nm of diameter) is selected first, and ultrasound after being dispersed in deionized water and ethyl alcohol is allowed to
It is evenly dispersed.Finely dispersed PS globule is then added in the clean slide surface that surface adds water, is allowed to form monofilm.
After dry a period of time, coverslip is transferred in the beaker of full water, at this point, PS ball monofilm will swim in the surface of water.
The PS ball array of water surface is picked up using the clean substrate (can be silicon, glass, polytetrafluoroethylene (PTFE), PE film etc.) of 1cm × 1cm
Come, that is, is transferred to the surface of any clean substrate, compact arranged PS ball single layer membrane array can be obtained in any substrate.
(2) using the method for argon plasma etching, the substrate of PS ball array is performed etching, the PS ball of non-solid matter is obtained
Array structure.Specific experiment parameter are as follows: the flow velocity 10sccm of argon gas, power 30w, etch period are 1min~15min.
Final to obtain spherical non-solid matter organic colloid template, scanning electron microscope result is as shown in Figure 1.
2, the non-solid matter template of hexagon, key step are manufactured are as follows:
(1) method for utilizing gas-liquid interface self assembly prepares compact arranged PS ball self assembly in clean substrate surface
Monofilm.
Specific PS ball (120~1000nm of diameter) is selected first, and ultrasound after being dispersed in deionized water and ethyl alcohol is allowed to
It is evenly dispersed.Finely dispersed PS globule is then added in the clean slide surface that surface adds water, is allowed to form monofilm.
After dry a period of time, coverslip is transferred in the beaker of full water, at this point, PS ball monofilm will swim in the surface of water.
The PS ball array of water surface is picked up using the clean substrate (can be silicon, glass, polytetrafluoroethylene (PTFE), PE film etc.) of 1cm × 1cm
Come, that is, is transferred to the surface of any clean substrate, compact arranged PS ball single layer membrane array can be obtained in any substrate.
(2) it by above-mentioned substrate, is put into the baking oven that temperature is 110 DEG C, heat treatment 15s~1min is (big according to PS ball size
Depending on small)
(3) using the method for argon plasma etching, the substrate of PS ball array is performed etching, obtains the non-solid matter of hexagon
PS spherical array array structure.Specific experiment parameter are as follows: the flow velocity 10sccm of argon gas, power 30w, etch period be 1min~
15min (depending on PS ball size).It is final to obtain the non-solid matter organic colloid template of hexagon, scanning electron microscope result such as Fig. 2 institute
Show.
3, the double-deck non-solid matter template of manufacture binary, key step are as follows:
(1) method for utilizing gas-liquid interface self assembly prepares compact arranged PS ball self assembly in clean substrate surface
Monofilm.
Specific PS ball (120~1000nm of diameter) is selected first, and ultrasound after being dispersed in deionized water and ethyl alcohol is allowed to
It is evenly dispersed.Finely dispersed PS globule is then added in the clean slide surface that surface adds water, is allowed to form monofilm.
After dry a period of time, coverslip is transferred in the beaker of full water, at this point, PS ball monofilm will swim in the surface of water.
The PS ball array of water surface is picked up using the clean substrate (can be silicon, glass, polytetrafluoroethylene (PTFE), PE film etc.) of 1cm × 1cm
Come, that is, is transferred to the surface of any clean substrate, compact arranged PS ball single layer membrane array can be obtained in any substrate.
(2) it by above-mentioned substrate, is put into the baking oven that temperature is 60 DEG C, is heat-treated 2min.
(3) step (1) is repeated, water is got the PS ball array of water surface, shift the PS ball array in step (2)
Surface.
(4) the double-deck PS ball is put into the baking oven that temperature is 60 DEG C, is heat-treated 2min.
(5) using the method for argon plasma etching, the substrate of PS ball array is performed etching, obtains the double-deck non-solid matter
PS spherical array array structure.Specific experiment parameter are as follows: the flow velocity 10sccm of argon gas, power 30w, etch period be 1min~
15min (depending on PS ball size).Final to obtain spherical non-solid matter organic colloid template, scanning electron microscope result is as shown in Figure 1.
Final to obtain the double-deck non-solid matter organic colloid template of binary, scanning electron microscope result is as shown in Figure 3.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Within the technical scope of the present disclosure, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims
Subject to enclosing.
Claims (4)
1. the manufacturing method of a kind of large area in any substrate, diversified organic formwork characterized by comprising
By the method for plasma bombardment, spherical non-solid matter organic colloid template is produced；
By being heat-treated the method combined with plasma bombardment, the non-solid matter organic colloid template of hexagon is produced；
The strategy combined by template transfer-overlapping with plasma bombardment produces the double-deck non-solid matter organic colloid template；
Above-mentioned three kinds of synthesized organic colloid templates are transferred in any specified substrate by the method for lossless transfer.
2. the manufacturing method of the large area according to claim 1 in any substrate, diversified organic formwork, feature exist
In, the spherical non-solid matter organic formwork of manufacture, key step are as follows:
Using the method for gas-liquid interface self assembly, the single layer of compact arranged PS ball self assembly is prepared in clean substrate surface
Film；
The method shifted using liquid phase surface, is transferred to any clean substrate for the monofilm of compact arranged PS ball self assembly
Surface；
Using the method for plasma etching, argon gas is etching gas, is that PS ball performs etching to surface, obtains array structure.
3. the manufacturing method of the large area according to claim 1 in any substrate, diversified organic formwork, feature exist
In, the manufacture non-solid matter organic formwork of hexagon, key step are as follows:
Using the method for gas-liquid interface self assembly, the single layer of compact arranged PS ball self assembly is prepared in clean substrate surface
Film；
The method shifted using liquid phase surface, is transferred to any clean substrate for the monofilm of compact arranged PS ball self assembly
Surface；
It is put into the baking oven that temperature is 110 DEG C, is heat-treated, the time is related with PS ball size；
Using the method for plasma etching, argon gas is etching gas, is that PS ball performs etching to surface, obtains array structure.
4. the manufacturing method of the large area according to claim 1 in any substrate, diversified organic formwork, feature exist
In, the double-deck non-solid matter organic formwork of manufacture binary, key step are as follows:
Using the method for gas-liquid interface self assembly, the single layer of compact arranged PS ball self assembly is prepared in clean substrate surface
Film；
The method shifted using liquid phase surface, is transferred to any clean substrate for the monofilm of compact arranged PS ball self assembly
Surface；
It is put into the baking oven that temperature is 110 DEG C, is heat-treated, the time is related with PS ball size；
The method shifted using liquid phase surface, on the surface of above-mentioned solid matter template, in the superposition compact arranged PS ball of the second layer；
Using the method for plasma etching, argon gas is etching gas, is that PS ball performs etching to surface, obtains array structure.
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|---|---|---|---|
| CN201910122379.6A CN109879247A (en) | 2019-02-19 | 2019-02-19 | A kind of manufacturing method of the large area in any substrate, diversified organic formwork |
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| CN201910122379.6A CN109879247A (en) | 2019-02-19 | 2019-02-19 | A kind of manufacturing method of the large area in any substrate, diversified organic formwork |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1597335A (en) * | 2004-09-08 | 2005-03-23 | 吉林大学 | Method of performing micro contact printing using colloidal crystal as ink |
| US20050126470A1 (en) * | 2003-12-16 | 2005-06-16 | Herman Gregory S. | Template and methods for forming photonic crystals |
| CN103288359A (en) * | 2013-04-03 | 2013-09-11 | 中国科学院合肥物质科学研究院 | Preparation method for oxide micro/nano-structured ordered porous array through oxygen-plasma irradiation |
| US20140017614A1 (en) * | 2012-07-12 | 2014-01-16 | Transfer Devices, Inc. | Method of forming large-area masters for replication of transfer lithography templates |
| CN105084307A (en) * | 2015-07-15 | 2015-11-25 | 西安交通大学 | Preparation method of metal nanostructure with adjustable resonance peak positions |
-
2019
- 2019-02-19 CN CN201910122379.6A patent/CN109879247A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050126470A1 (en) * | 2003-12-16 | 2005-06-16 | Herman Gregory S. | Template and methods for forming photonic crystals |
| CN1597335A (en) * | 2004-09-08 | 2005-03-23 | 吉林大学 | Method of performing micro contact printing using colloidal crystal as ink |
| US20140017614A1 (en) * | 2012-07-12 | 2014-01-16 | Transfer Devices, Inc. | Method of forming large-area masters for replication of transfer lithography templates |
| CN103288359A (en) * | 2013-04-03 | 2013-09-11 | 中国科学院合肥物质科学研究院 | Preparation method for oxide micro/nano-structured ordered porous array through oxygen-plasma irradiation |
| CN105084307A (en) * | 2015-07-15 | 2015-11-25 | 西安交通大学 | Preparation method of metal nanostructure with adjustable resonance peak positions |
Non-Patent Citations (1)
| Title |
|---|
| FRANK BURMEISTER等: "Colloid Monolayers as Versatile Lithographic Masks", 《LANGMUIR》 * |
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Application publication date: 20190614 |