CN109870132A - It is a kind of for the measurement of planeness when altimetric compensation method - Google Patents

It is a kind of for the measurement of planeness when altimetric compensation method Download PDF

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Publication number
CN109870132A
CN109870132A CN201711257692.8A CN201711257692A CN109870132A CN 109870132 A CN109870132 A CN 109870132A CN 201711257692 A CN201711257692 A CN 201711257692A CN 109870132 A CN109870132 A CN 109870132A
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China
Prior art keywords
measuring head
measured
point
platform
product
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Pending
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CN201711257692.8A
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Chinese (zh)
Inventor
班猛飞
张晋
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SHENZHEN SHENGSHI INTELLIGENT EQUIPMENT Co Ltd
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SHENZHEN SHENGSHI INTELLIGENT EQUIPMENT Co Ltd
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Priority to CN201711257692.8A priority Critical patent/CN109870132A/en
Publication of CN109870132A publication Critical patent/CN109870132A/en
Pending legal-status Critical Current

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Abstract

It is a kind of for the measurement of planeness when altimetric compensation method, for the compensation in plane survey to the flatness of itself of measuring device, the measuring device includes X-axis, Y-axis, measuring head, marble platform, the X-axis and Y-axis form cross slid platform, measuring head is fixed on cross slid platform, specific measurement method are as follows: marble platform is placed in immediately below measuring head by a., and cross slid platform takes n point (n >=2) with measuring head in marble platform, obtain the distance of n point in measuring head to marble platform, its distance value is X1, X2 ... ... Xn;B. marble platform is taken away, immediately below product to be measured, cross slid platform takes n point (n >=2) with measuring head on product to be measured, obtains the distance of n point in measuring head to product to be measured, distance value Y1, Y2 ... ... Yn;C. the value measured twice is carried out asking poor, obtains difference X1-Y1, X2-Y2 ... ... Xn-Yn;D. the flatness of product to be measured is acquired with least square method to acquisition difference.

Description

It is a kind of for the measurement of planeness when altimetric compensation method
Technical field
The invention belongs to measurement of planeness fields, a kind of compensation method when being specifically the measurement of planeness.
Background technique
Traditional measurement of planeness mostly uses following measurement method:
Measuring head on measuring device takes n point (n >=2) on product to be measured, obtains in measuring head to product to be measured n point Distance, distance value Y1, Y2 ... ... Yn;The flatness of product to be measured is acquired with least square method to acquisition Y value.
Using this measurement method to the planarity requirements of the cross slid platform of X-axis and Y-axis composition in test equipment itself Very high, the cost of measuring device entire in this way can be very high, cross slid platform such as bad according to flatness itself, then obtain to The value of flatness and the true value of product itself flatness for surveying product have a long way to go.
Summary of the invention
In order to solve traditional measurement mode it is excessively high to cross slid platform planarity requirements and reduce cross slid platform flatness itself Influence to measurement result, the present invention provides the following technical solutions:
It is a kind of for the measurement of planeness when altimetric compensation method, in plane survey to itself flat of measuring device The compensation of face degree, the measuring device include X-axis 2, and Y-axis 3, measuring head 4, the X-axis 2 and Y-axis 3 form cross slid platform 6, measurement First 4 are fixed on cross slid platform 6, further include marble platform 1, specific measurement method are as follows: marble platform 1 is placed in by a. Immediately below measuring head 4, cross slid platform 6 takes n point (n >=2) with measuring head 4 in marble platform 1, acquisition measuring head 4 to The distance of n point in marble platform 1, distance value X1, X2 ... ... Xn;B. marble platform 1 is taken away, by product 5 to be measured Underface, cross slid platform 6 take n point n >=2 on product 5 to be measured with measuring head 4, obtain n in measuring head 4 to product 5 to be measured The distance of a point, distance value Y1, Y2 ... ... Yn;C. the value measured twice is carried out asking poor, obtains difference X1-Y1, X2- Y2 ... ... Xn-Yn;D. the flatness of product 5 to be measured is acquired with least square method to acquisition difference.
N point is identical in n point and measuring head 4 to product 5 to be measured in the measuring head 4 to marble platform 1 Point.
By above scheme, the invention has the benefit that
1, after being compensated using this method, the flatness result that measures is closer to true value;
2, not high to the planarity requirements of X-axis and Y-axis itself using this compensation method, reduce the cost of entire measuring system.
3, this method facilitates debugging, the flatness of the corrected X that compares axis and Y-axis, can quickly reach more preferably Effect.
Detailed description of the invention
Fig. 1 is that the present invention matches marble platform structural schematic diagram;
Fig. 2 is the structural schematic diagram that the present invention matches product to be measured;
Marble platform 1, X-axis 2, Y-axis 3, measuring head 4, product 5 to be measured, cross slid platform 6.
Specific embodiment
In order to better understand the present invention, it will be made below description more fully.
It is a kind of for the measurement of planeness when altimetric compensation method, in plane survey to measuring device itself The compensation of flatness, the measuring device include marble platform 1, and X-axis 2, Y-axis 3, measuring head 4, the X-axis 2 and Y-axis 3 form Cross slid platform 6, measuring head 4 are fixed on cross slid platform 6.
Specific measurement method are as follows: marble platform 1 is placed in immediately below measuring head 4 by a., and cross slid platform 6 is with measuring head 4 take n point (n >=2) in marble platform 1, obtain the distance of n point in measuring head 4 to marble platform 1, distance value For X1, X2 ... ... Xn;B. marble platform 1 is taken away, immediately below product 5 to be measured, cross slid platform 6 is with measuring head 4 to be measured N point is taken on product 5, these put (n >=2) identical with the point in step a, n point in acquisition measuring head 4 to product 5 to be measured Distance, distance value Y1, Y2 ... ... Yn;C. the value measured twice is carried out asking poor, obtains difference X1-Y1, X2-Y2 ... ... Xn-Yn;D. the flatness of product 5 to be measured is acquired with least square method to acquisition difference.
Traditional measurement method are as follows: a. is by immediately below product 5 to be measured, and cross slid platform 6 is with measuring head 4 in product 5 to be measured On take n point (n >=2), obtain the distance of n point in measuring head 4 to product 5 to be measured, distance value Y1, Y2 ... ... Yn;b. The flatness of product 5 to be measured is acquired to acquisition Y value least square method.
Similarly, we are according to the distance of n point in measuring head 4 to marble platform 1, both distance value X1, X2 ... ... Xn, Obtain the Planeness value m of cross slid platform 6 itself.
Meanwhile the Planeness value that method of the invention measures is m1, the flatness for using conventional method to measure is m2, with this Method obtains Planeness value m1 closer to the Planeness value of product 5 to be measured itself, and the Planeness value measured using conventional method For m2 between (m1+m) and the absolute value of (m1-m), obtaining Planeness value using traditional measurement method will receive cross slid platform 6 Influence, can it is bigger than normal or less than normal, after applying the present invention, just accurate Planeness value can be measured.

Claims (2)

1. it is a kind of for the measurement of planeness when altimetric compensation method, in plane survey to itself flat of measuring device The compensation of face degree, the measuring device include X-axis (2), and Y-axis (3), measuring head (4), the X-axis (2) and Y-axis (3) form cross Slide unit (6), measuring head (4) are fixed on cross slid platform (6), it is characterised in that: and it further include marble platform (1), it is specific Measurement method are as follows: marble platform (1) is placed in immediately below measuring head (4) by a., and cross slid platform (6) is with measuring head (4) big N point (n >=2) is taken on fibrous gypsum platform (1), obtains the distance of n point on measuring head (4) to marble platform (1), distance value For X1, X2 ... ... Xn;B. marble platform (1) is taken away, by immediately below product to be measured (5), cross slid platform (6) is with measuring head (4) n point (n >=2) is taken on product to be measured (5), obtains the distance of n point on measuring head (4) to product to be measured (5), away from It is Y1, Y2 ... ... Yn from value;C. the value measured twice is carried out asking poor, obtains difference X1-Y1, X2-Y2 ... ... Xn-Yn;d. The flatness of product to be measured (5) is acquired with least square method to acquisition difference.
2. it is as described in claim 1 it is a kind of for the measurement of planeness when altimetric compensation method, it is characterised in that the survey Measure on head (4) to marble platform (1) that n point is identical point on n point and measuring head (4) to product to be measured (5).
CN201711257692.8A 2017-12-04 2017-12-04 It is a kind of for the measurement of planeness when altimetric compensation method Pending CN109870132A (en)

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CN201711257692.8A CN109870132A (en) 2017-12-04 2017-12-04 It is a kind of for the measurement of planeness when altimetric compensation method

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Application Number Priority Date Filing Date Title
CN201711257692.8A CN109870132A (en) 2017-12-04 2017-12-04 It is a kind of for the measurement of planeness when altimetric compensation method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110541475A (en) * 2019-08-23 2019-12-06 中建科技(福州)有限公司 Device and method for adjusting flatness and height of precast concrete column

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1031892A (en) * 1988-08-18 1989-03-22 清华大学 Six-contact type high-precision planeness-measuring method and device
JPH0283404A (en) * 1988-09-21 1990-03-23 Anritsu Corp Flatness measuring method
FR2695049A1 (en) * 1992-09-03 1994-03-04 Lorraine Laminage Evaluation of flatness in strip - and its application in rolling mills.
CN1584496A (en) * 2004-06-14 2005-02-23 渤海船舶重工有限责任公司 Platform and planeness measuring method
CN2694226Y (en) * 2004-04-23 2005-04-20 广东鸿图科技股份有限公司 High precision flatness measuring instrument
CN202719973U (en) * 2012-07-24 2013-02-06 长沙韶光铬版有限公司 Substrate flatness measuring device
CN203812045U (en) * 2014-04-17 2014-09-03 无锡科技职业学院 Numerical control fault diagnosis device
CN105509660A (en) * 2015-11-30 2016-04-20 广东长盈精密技术有限公司 Flatness measurement method
CN106052600A (en) * 2016-06-30 2016-10-26 佛山科学技术学院 Method for measuring flatness of protective screen of window
CN205915008U (en) * 2016-06-23 2017-02-01 深圳市盛世智能装备有限公司 Sliding mechanism

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1031892A (en) * 1988-08-18 1989-03-22 清华大学 Six-contact type high-precision planeness-measuring method and device
JPH0283404A (en) * 1988-09-21 1990-03-23 Anritsu Corp Flatness measuring method
FR2695049A1 (en) * 1992-09-03 1994-03-04 Lorraine Laminage Evaluation of flatness in strip - and its application in rolling mills.
CN2694226Y (en) * 2004-04-23 2005-04-20 广东鸿图科技股份有限公司 High precision flatness measuring instrument
CN1584496A (en) * 2004-06-14 2005-02-23 渤海船舶重工有限责任公司 Platform and planeness measuring method
CN202719973U (en) * 2012-07-24 2013-02-06 长沙韶光铬版有限公司 Substrate flatness measuring device
CN203812045U (en) * 2014-04-17 2014-09-03 无锡科技职业学院 Numerical control fault diagnosis device
CN105509660A (en) * 2015-11-30 2016-04-20 广东长盈精密技术有限公司 Flatness measurement method
CN205915008U (en) * 2016-06-23 2017-02-01 深圳市盛世智能装备有限公司 Sliding mechanism
CN106052600A (en) * 2016-06-30 2016-10-26 佛山科学技术学院 Method for measuring flatness of protective screen of window

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110541475A (en) * 2019-08-23 2019-12-06 中建科技(福州)有限公司 Device and method for adjusting flatness and height of precast concrete column
CN110541475B (en) * 2019-08-23 2020-12-08 中建科技(福州)有限公司 Device and method for adjusting flatness and height of precast concrete column

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