CN105509660A - Flatness measurement method - Google Patents
Flatness measurement method Download PDFInfo
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- CN105509660A CN105509660A CN201510864703.3A CN201510864703A CN105509660A CN 105509660 A CN105509660 A CN 105509660A CN 201510864703 A CN201510864703 A CN 201510864703A CN 105509660 A CN105509660 A CN 105509660A
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- measuring
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- flatness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention relates to a flatness measurement method. The method comprises the following steps: obtaining the distances A1, A2,...,An from a plurality of preset points in a preset moving plane to a reference plane, wherein n is a natural number and greater than 2; placing a to-be-measured workpiece on a measurement platform, enabling the surface of the to-be-measured workpiece to face a first measurement probe, wherein the first measurement probe moves in the preset moving plane, and collects the distancesB1, N2,...,Bn from the plurality of preset points to a to-be-measured surface; calculating the difference Cn=Bn-An, obtaining the flatness value C of the to-be-measured surface according to a formula C=Cmax-Cmin, wherein Cmax is the maximum value of Cn, and Cmin is the minimum value of Cn. The method is high in measurement efficiency, and is higher in precision.
Description
Technical field
The present invention relates to a kind of measuring method, particularly relate to a kind of method measuring flatness.
Background technology
In the manufacturing process of mobile terminal as mobile phone, after the workpiece such as mobile phone being carried out to DDG (double-diskgrinding, double plate face grind) plane lapping, need to measure morpheme parameters such as the flatnesses of workpiece for measurement.Generally in time measuring, need manually ceaselessly to measure workpiece for measurement with milscale and clearance gauge, its labour intensity greatly, makes the production efficiency of this measuring method lower, and varies with each individual due to the measuring accuracy of hand dipping, and its accuracy of measurement is not high.
Summary of the invention
Based on this, be necessary to provide a kind of and measure the high and method measuring flatness that accuracy is high of efficiency.
A kind of method measuring flatness, for adopting a measuring equipment to measure the flatness on the surface to be measured of workpiece for measurement, described measuring equipment comprises measuring table, reference block and the first measuring sonde, described reference block is placed on described measuring table, it is formed with reference field, described first measuring sonde and described measuring table interval arrange and can move in default plane of motion, and described method measuring flatness comprises the following steps:
Obtain distance A1, the A2 between position, multiple preset in described default plane of motion and described reference field ... An, wherein n is the natural number of more than 2;
Described workpiece for measurement is positioned on described measuring table, and by described surface to be measured towards described first measuring sonde, described first measuring sonde moves and gathers distance B1, the B2 between described position, multiple preset and described surface to be measured in described default plane of motion ... Bn; And
Calculated difference Cn=Bn-An, and the Planeness value C obtaining described surface to be measured according to calculating formula C=Cmax-Cmin, wherein Cmax is the maximal value in Cn, and Cmin is the minimum value in Cn.
Wherein in an embodiment, obtain distance A1, the A2 between position, multiple preset in described default plane of motion and described reference field ... the step of An comprises:
Described reference block is positioned on described measuring table, and by described reference field towards described first measuring sonde; And
Described first measuring sonde is made to move in described default plane of motion and gather reference range A1, the A2 between described position, multiple preset and described reference field ... An.
Wherein in an embodiment, obtain distance A1, the A2 between position, multiple preset in described default plane of motion and described reference field ... the step of An is:
Transfer distance A1, the A2 between position, multiple preset in described default plane of motion and described reference field ... An.
Wherein in an embodiment, described default plane of motion and described measuring table relative tilt are arranged, and the corresponding described reference field in position, described multiple preset is pressed line-column matrix and arranged.
Wherein in an embodiment, described first measuring sonde is laser probe.
Because this flatness method is measured workpiece for measurement without the need to manually adopting milscale and clearance gauge, therefore saving manpower and reducing hand labor intensity, measuring efficiency higher.And owing to have employed the first measuring sonde, workpiece for measurement is measured, thus improve measuring accuracy.In addition, when measurement plane is spent, owing to have employed the computing method of difference, because this eliminating not parallel the brought impact on measuring accuracy of default plane of motion because of measuring table and the first measuring sonde.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the method measuring flatness measurement plane of embodiment when spending.
Fig. 2 is the flow chart of steps of method measuring flatness shown in Fig. 1.
Fig. 3 is the flow chart of steps of the method for measuring thickness of an embodiment.
Fig. 4 is the schematic diagram of the acquisition of method for measuring thickness shown in Fig. 3 thickness compensation value.
Fig. 5 is the partial enlarged drawing at IV place in Fig. 4.
Fig. 6 is the schematic diagram during detect thickness of method for measuring thickness shown in Fig. 3.
Embodiment
For the ease of understanding the present invention, below with reference to relevant drawings, the present invention is described more fully.Better embodiment of the present invention is given in accompanying drawing.But the present invention can realize in many different forms, is not limited to embodiment described herein.On the contrary, provide the object of these embodiments be make to disclosure of the present invention understand more thorough comprehensively.
Refer to Fig. 1, the measuring equipment 100 that the method measuring flatness of an embodiment adopts comprises measuring table 10, reference block 30, first measuring sonde 50 and the second measuring sonde 70.Such as, measuring table 10 can be formed a measurement plane 11, reference block 30 for being placed on the rectangular blocks of the standard on measurement plane 11, it can be formed with reference field 31.Reference field 31 is parallel with measurement plane 11.First measuring sonde 50 and the second measuring sonde 70 be relatively arranged on measuring table 10 both sides and and measuring table 10 interval arrange.First measuring sonde 50 and the second measuring sonde 70 move respectively in default plane of motion P1, the P2 at two intervals that are parallel to each other.Such as, the first measuring sonde 50 and the second measuring sonde 70 are laser probe.
Due in actual production, the measurement plane 11 of measuring table 100 can not be parallel to the default plane of motion P1 of the first measuring sonde 50 completely, therefore, and measurement plane 11 and default plane of motion P1 relative tilt in Fig. 1.Workpiece for measurement 300 can be positioned on measuring table 10, it has to be measured surperficial 301.Such as, can move for making the first measuring sonde 50 and the second measuring sonde 70, measuring table 10 comprises XY mobile platform (not shown) and is arranged at the traversing carriage (not shown) on XY mobile platform, be provided with servo control mechanism in XY mobile platform to move to drive traversing carriage, the first measuring sonde 50 and the second measuring sonde 70 are installed on traversing carriage.
See also Fig. 2, the method measuring flatness of an embodiment, comprises the following steps:
In step S101, the position, multiple preset in the default plane of motion P1 of acquisition and distance A1, A2 between the reference field 31 of reference block 30 ... An;
Specifically comprise: in step S1011: reference block 30 is positioned on measuring table 10, and by the reference field 31 of reference block 30 towards the first measuring sonde 50; Such as, reference block 100 is positioned on measurement plane 11, is parallel to measurement plane 11 to make reference field 31.
In step S1012, the first measuring sonde 50 moves and gathers reference range A1, the A2 between position, multiple preset and reference field 31 in default plane of motion P1 ... An, wherein n is the natural number of more than 2; Such as, preset plane of motion P1 to arrange with measurement plane 11 relative tilt of measuring table 10.Line-column matrix setting can be pressed by corresponding reference field 31 in position, preset, also can be the some position arranged according to other rules, to cover the surface profile of reference field 31 as far as possible.
In step s 102, workpiece for measurement 300 is positioned on measuring table 10, and to move to be measured surperficial 301 of workpiece for measurement 300 in default plane of motion P1 and in gathering distance B1, B2 between described position, multiple preset and to be measured surperficial 301 towards the first measuring sonde 50, first measuring sonde 50 ... Bn; Such as, to be measured surperficial 301 are made to deviate from measurement plane 11 and be roughly parallel to measurement plane 11.
In step s 103, calculated difference Cn=Bn-An, and the Planeness value C drawing to be measured surperficial 301 of workpiece for measurement 300 according to calculating formula C=Cmax-Cmin, Cmax is the maximal value in Cn, and Cmin is the minimum value in Cn.
Be appreciated that, when measuring second workpiece for measurement 300, because measuring equipment 100 has got parms A1, A2 ... An, therefore, step S101 can be, transfers distance A1, A2 between position, multiple preset in default plane of motion P1 and the reference field 31 of reference block 30 ... An.
See also Fig. 3 to Fig. 5, such as, in one embodiment, adopt the said equipment to carry out detect thickness, described method for measuring thickness comprises the following steps:
In step S401, reference block 30 is positioned on measuring table 10, first measuring sonde 50 is aimed at the second measuring sonde 70, and makes the first measuring sonde 50 and the second measuring sonde 70 measure distance D1, D2 between self two surfaces relative with reference block 30 respectively.
In step S402, the detect thickness E=L-D1-D2 of Calculation Basis block 30, and calculated thickness offset F=E-D, wherein L is the distance between the default plane of motion P1 of the first measuring sonde 50 and default plane of motion P2 of the second measuring sonde 70, and wherein D is the thickness true value of reference block 30.
Particularly, the default plane of motion of the first measuring sonde 50 and default distance L between plane of motion P1, P2 of the second measuring sonde 70 can preset or is measured by manual, the thickness true value D of the first reference block 30 can preset or by manual mensuration.
See also Fig. 6, in step S403, workpiece for measurement 300 is positioned on measuring table 10, first measuring sonde 50 is aimed at the second measuring sonde 70, and make the first measuring sonde 50 and the second measuring sonde 70 measure respectively self relative with workpiece for measurement 300 two surperficial between distance d1, d2.
In step s 404, the one-tenth-value thickness 1/10 d of workpiece for measurement 300 is calculated according to calculating formula d=L-d1-d2-F.
In fact, the degree of tilt of the measurement plane 301 of measuring table 300 is general very little, F is made to be a very little value, when workpiece for measurement 100 and reference block 30 thickness difference are within 2 millimeters or 3 millimeters, thickness compensation value F is also little, now, without the need to first calculated thickness offset F, namely step S401-S402 can omit, and the d=L-d1-d2-F d=L-d1-d2 of step S404 replaces.
Because this method measuring flatness is measured workpiece for measurement 300 without the need to manually adopting milscale and clearance gauge, therefore save manpower and reduce hand labor intensity, and owing to have employed the first measuring sonde 50 and the second measuring sonde 70 pairs of workpieces for measurement 300 are measured, improve measuring accuracy.In addition, when measurement plane is spent, have employed the computing method of difference, and during detect thickness value, take into account thickness compensation value, because this eliminating not parallel the brought impact on measuring accuracy of default plane of motion P1, P2 because of measuring table 300 and the first measuring sonde 50/ second measuring sonde 70.
Because flatness computing method adopt the maximal value of multiple spot ordered series of numbers to deduct minimum value, therefore be conducive to facilitating PLC (ProgrammableLogicController, programmable logic controller (PLC)) programming, measuring accuracy is less than or equal to 0.005 millimeter (texture and the roughness of product surface have a certain impact to measurement).Because XY mobile platform can adopt servo control mechanism, therefore its measuring speed is adjustable, makes the measurement point of each point be less than 1 second.In addition, for increasing substantially work efficiency, two can be arranged measure station on measuring table 100.
Such as, the method measuring flatness that the mutual combination that other embodiments of method measuring flatness of the present invention also comprise the respective embodiments described above is formed.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (5)
1. a method measuring flatness, for adopting a measuring equipment to measure the flatness on the surface to be measured of workpiece for measurement, it is characterized in that, described measuring equipment comprises measuring table, reference block and the first measuring sonde, described reference block is placed on described measuring table, it is formed with reference field, and described first measuring sonde and described measuring table interval arrange and can move in default plane of motion, and described method measuring flatness comprises the following steps:
Obtain distance A1, the A2 between position, multiple preset in described default plane of motion and described reference field ... An, wherein n is the natural number of more than 2;
Described workpiece for measurement is positioned on described measuring table, and by described surface to be measured towards described first measuring sonde, described first measuring sonde moves and gathers distance B1, the B2 between described position, multiple preset and described surface to be measured in described default plane of motion ... Bn; And
Calculated difference Cn=Bn-An, and the Planeness value C obtaining described surface to be measured according to calculating formula C=Cmax-Cmin, wherein Cmax is the maximal value in Cn, and Cmin is the minimum value in Cn.
2. method measuring flatness as claimed in claim 1, is characterized in that, obtains distance A1, A2 between position, multiple preset in described default plane of motion and described reference field ... the step of An comprises:
Described reference block is positioned on described measuring table, and by described reference field towards described first measuring sonde; And
Described first measuring sonde is made to move in described default plane of motion and gather reference range A1, the A2 between described position, multiple preset and described reference field ... An.
3. method measuring flatness as claimed in claim 1, is characterized in that, obtains distance A1, A2 between position, multiple preset in described default plane of motion and described reference field ... the step of An is:
Transfer distance A1, the A2 between position, multiple preset in described default plane of motion and described reference field ... An.
4. method measuring flatness as claimed in claim 1, it is characterized in that, described default plane of motion and described measuring table relative tilt are arranged, and the corresponding described reference field in position, described multiple preset is pressed line-column matrix and arranged.
5. method measuring flatness as claimed in claim 1, it is characterized in that, described first measuring sonde is laser probe.
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| CN201510864703.3A CN105509660B (en) | 2015-11-30 | 2015-11-30 | Method measuring flatness |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106441168A (en) * | 2016-08-30 | 2017-02-22 | 南京理工大学 | Rolling linear guide rail pair slider profile accuracy measurement method |
| CN108240790A (en) * | 2016-12-27 | 2018-07-03 | 襄阳爱默思智能检测装备有限公司 | A kind of turbine blade plane degree method for fast measuring |
| CN109870132A (en) * | 2017-12-04 | 2019-06-11 | 深圳市盛世智能装备有限公司 | It is a kind of for the measurement of planeness when altimetric compensation method |
| CN111895936A (en) * | 2020-07-10 | 2020-11-06 | 同济大学 | Concrete superposed member roughness image detection standard plate and use method thereof |
| CN112082517A (en) * | 2020-08-21 | 2020-12-15 | 长江存储科技有限责任公司 | Defect detecting apparatus |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106441168A (en) * | 2016-08-30 | 2017-02-22 | 南京理工大学 | Rolling linear guide rail pair slider profile accuracy measurement method |
| CN106441168B (en) * | 2016-08-30 | 2019-01-04 | 南京理工大学 | The measurement method of linear rolling guide slider type face precision |
| CN108240790A (en) * | 2016-12-27 | 2018-07-03 | 襄阳爱默思智能检测装备有限公司 | A kind of turbine blade plane degree method for fast measuring |
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| CN111895936A (en) * | 2020-07-10 | 2020-11-06 | 同济大学 | Concrete superposed member roughness image detection standard plate and use method thereof |
| CN112082517A (en) * | 2020-08-21 | 2020-12-15 | 长江存储科技有限责任公司 | Defect detecting apparatus |
| CN112082517B (en) * | 2020-08-21 | 2022-07-05 | 长江存储科技有限责任公司 | Defect detecting apparatus |
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| CN105509660B (en) | 2019-02-12 |
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