CN109861079B - Microstructure laser-based one-dimensional radar scanning and transmitting device and preparation method - Google Patents
Microstructure laser-based one-dimensional radar scanning and transmitting device and preparation method Download PDFInfo
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- CN109861079B CN109861079B CN201910115264.4A CN201910115264A CN109861079B CN 109861079 B CN109861079 B CN 109861079B CN 201910115264 A CN201910115264 A CN 201910115264A CN 109861079 B CN109861079 B CN 109861079B
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Abstract
The invention discloses a one-dimensional radar scanning and transmitting device based on a microstructure laser and a preparation method thereof, wherein the method comprises the following steps: a substrate; the multiple paths of lasers are arranged on the substrate in an array mode, the emergent angles of the lasers are different, the emergent angles are included angles formed by the emergent lasers of the lasers and the plane of the substrate, and the multiple paths of variable-inclination-angle low-divergence-angle microstructure lasers are achieved; and a circuit board including a plurality of electric control switches controlled by the shift register connected to the plurality of pins, the lasers respectively connected to the pins being powered by controlling the electric control switches. The invention is mainly characterized in that each path of laser emits nearly parallel laser beams according to a specific angle by adjusting the distribution and the size of the microstructure of each path of laser, the laser beams scan an object in a certain distance, and the position is determined by the reflection of the object, so that higher power output can be realized, the volume is small, and the integration level is high.
Description
Technical Field
The invention relates to the technical field of design of photon and photoelectronic devices, automatic driving, unmanned aerial vehicles, robots and other artificial intelligence fields, in particular to a one-dimensional radar scanning and transmitting device based on a microstructure laser and a preparation method thereof.
Background
Lidar is a radar operating in the optical frequency band. Similar to the working principle of microwave radar, the method utilizes electromagnetic waves in optical frequency wave bands to transmit detection signals to a target, and then compares received co-wave signals with the transmission signals, so as to obtain information such as the position (distance, azimuth and height), the motion state (speed and attitude) and the like of the target, and realize the detection, tracking and identification of the targets such as airplanes, missiles and the like.
The near-infrared laser radar has the characteristics of high resolution, safety of human eyes, strong penetrating power, easiness in integration, full solid state and high scanning speed, and has extremely important application prospect in civil fields such as unmanned driving, robots, unmanned planes, intelligent education, intelligent medical treatment and digital cities. Meanwhile, the method has important national defense application in the aspects of accurate guidance, concealed object reconnaissance, air route guidance, target aiming and the like.
The space scanning method of the laser radar can be divided into a non-scanning system and a scanning system, wherein the scanning system can select modes such as mechanical scanning, electrical scanning, binary optical scanning and the like. The non-scanning imaging system adopts a multi-element detector, the working distance is long, the detection of the detection body is different from that of the scanning imaging unit, the size and the weight of equipment can be reduced, and the scanning working system is mostly adopted at present.
Semiconductor diode lasers are preferred light sources for small lidar based on their small size, light weight, ruggedness and reliability, high efficiency (up to over 50%), high repetition rate and potentially low cost, and the ability to use uncooled high sensitivity APD detectors.
Common solid-state laser radars generally have several modes, namely a MEMS-based micromechanical scanning mode, a phased array laser radar and a 3D radar based on CCD pixel-level time-of-flight measurement.
Compared with the conventional radar, the one-dimensional radar scanning and transmitting device based on the microstructure laser is different from the conventional radar in that the self transmitting unit is a laser unit array with a special transmitting mode, the transmitting directions of all units are different, the one-dimensional radar scanning and transmitting device has an extremely low divergence angle and is realized in a single-chip integration mode without complex optical path combination.
Disclosure of Invention
The invention discloses a one-dimensional radar scanning and transmitting device based on a microstructure laser, which is applied to the fields of automatic driving, unmanned aerial vehicles, robots, other artificial intelligence and the like, and achieves the purposes of lower cost and higher efficiency.
In view of the above, an aspect of the present invention provides a one-dimensional radar scanning and transmitting apparatus based on a microstructure laser, including:
a substrate;
further, the substrate comprises from bottom to top:
the heat sink is made of AlN, oxygen-free copper or tungsten copper;
the lower metal layer is made of gold-germanium-nickel alloy and indium or gold-tin alloy;
the substrate is made of N-type or P-type GaAs or InP and has the thickness of 80-200 microns;
the lower cover layer is made of GaAs or InP and has the thickness of 1-3 microns.
The multiple lasers are arranged on the substrate in an array mode, the emergent angles of the lasers are different, and the emergent angles are included angles formed by the emergent lasers of the lasers and the plane of the substrate;
further, the laser includes, from the substrate upward:
a lower waveguide layer;
the active layer is made of InGaAs/AlGaAs, InAlGaAs/InGaAsP quantum wells or quantum dots;
an upper waveguide layer;
the upper cover layer is made of InP or GaAs material;
the upper contact layer is made of InGaAs or GaAs material;
and the upper metal layer is made of gold-germanium-nickel alloy and indium or gold-tin alloy.
Further, the laser behaves as:
the emitting end of each laser is provided with a micro-groove structure, and at least one of the period, the width and the depth of the micro-groove structure among the lasers is different;
the non-emitting end of each laser is plated with a total reflection film or a protective film;
wherein the period of the micro-groove structure is 2-20 microns;
the emitting angle range of each laser is from horizontal to downward deflection by 85 degrees;
the number of the laser paths is 1 path to 200 paths, wherein each path of laser is in a ridge shape and a strip shape, the ridge width is 3 to 100 micrometers, the ridge height is 2 to 10 micrometers, and the distance between the laser paths is 10 to 150 micrometers.
The circuit board comprises a plurality of electric control switches controlled by the shift register, a plurality of pins and a plurality of control units, wherein the electric control switches are connected with the pins and are controlled to supply power to the lasers respectively connected to the pins;
specifically, each laser is connected with a pin on the circuit board through a gold wire lead.
The invention also provides a preparation method of the one-dimensional radar scanning and transmitting device based on the microstructure laser, which comprises the following steps:
growing a lower cover layer, a lower waveguide layer, an active layer, an upper waveguide layer, an upper cover layer and an upper contact layer on a substrate to be used as an epitaxial wafer;
dry etching the epitaxial wafer to the lower cover layer to obtain a multi-path ridge stripe laser structure;
etching a micro-groove structure at one end of each ridge-shaped strip laser, wherein the micro-groove structures on the ridge-shaped strip lasers are different from each other;
covering the ridge-shaped strip laser structure with silicon dioxide or silicon nitride;
etching off silicon dioxide or silicon nitride covering the ridge-shaped strip laser to expose the upper contact layer;
forming an upper metal layer on the upper contact layer covering metal layer;
photoetching and etching the upper metal layer to form an isolation groove, and isolating each ridge stripe so as to enable the ridge stripe to be capable of independently injecting current;
thinning the substrate, growing metal at the bottom of the substrate, and manufacturing a lower metal layer;
applying high temperature to the formed laser chip under the mixed gas of nitrogen and hydrogen to perform alloying, and then cleaving the laser chip to obtain an array chip;
sintering and packaging the array chip after cleavage on a heat sink;
and fixing the chip with the heat sink on the driving circuit board through heat conducting glue, and connecting each laser with pins on the circuit board through gold wire leads, thereby completing the preparation of the one-dimensional radar scanning and transmitting device based on the microstructure laser.
Aiming at the device, the invention has the following beneficial effects:
the one-dimensional radar scanning and transmitting device based on the microstructure laser is characterized in that a plurality of paths of lasers arranged in an array mode on a substrate form a plurality of paths of microstructure lasers with variable inclination angles and low divergence angles. Compared with radars based on silicon-based phased arrays and vertical cavity surface emitting arrays, the invention can realize higher power output, small volume and high integration level.
Drawings
FIG. 1 is a three-dimensional structure diagram of a one-dimensional radar scanning and transmitting device based on a microstructure laser in an embodiment of the invention;
fig. 2 is a cross-sectional view of a one-dimensional radar scanning and transmitting device based on a microstructure laser in the embodiment of the invention.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
An embodiment of the present invention provides a one-dimensional radar scanning and transmitting device based on a microstructure laser, please refer to fig. 1 and fig. 2 in combination, including:
a substrate;
the substrate comprises from bottom to top:
the heat sink 10 is made of AlN, oxygen-free copper or tungsten copper;
the lower metal layer 9 is positioned above the heat sink 10 and is made of gold-germanium-nickel-gold alloy and indium or gold-tin alloy;
a substrate 8, which is arranged on the lower metal layer 9, is made of N-type or P-type GaAs or InP materials and has the thickness of 80-200 microns;
and the lower cover layer 7 is positioned on the substrate layer 8, is made of GaAs, InP and other materials, and has the thickness of 1-3 microns.
This one-dimensional radar scanning emitter based on micro-structure laser still includes:
the laser device comprises a substrate, a plurality of lasers arranged on the substrate in an array mode, wherein the emitting angles of the lasers are different, and the emitting angles are included angles formed by the emitting lasers of the lasers and the plane of the substrate;
in some embodiments, the laser comprises, from the substrate upwards:
a lower waveguide layer;
the active layer is made of InGaAs/AlGaAs, InAlGaAs/InGaAsP quantum wells or quantum dots;
an upper waveguide layer;
the upper cover layer is made of InP or GaAs material;
the upper contact layer is made of InGaAs or GaAs material;
and the upper metal layer is made of gold-germanium-nickel alloy and indium or gold-tin alloy.
Furthermore, the one-dimensional radar scanning and transmitting device based on the microstructure laser has the following characteristics that:
the number of the laser devices arranged in the array is 1 to 200;
preferably, each laser is in a ridge shape and a strip shape, the ridge width is 3-100 micrometers, the ridge height is 2-10 micrometers, and the distance between the lasers is 10-150 micrometers;
in other embodiments, the lasers may also be ridge-like stripe, or even other shapes.
Particularly, a periodic micro-groove structure is distributed at one end, namely an emitting end, of each laser, and the period, the width and the depth of the micro-groove structure determine the divergence angle and the emergent angle of light beams. The cycle time varies from one pass to the next, ranging from 2 microns to 20 microns. The controlled exit angle is horizontal to 85 degrees of downward deflection. Each laser corresponds to a fixed deflection angle without any additional optical elements.
Meanwhile, the other end of each laser, namely the non-emitting end, is plated with a total reflection film or a protective film.
And the microstructure laser-based one-dimensional radar scanning and transmitting device further comprises:
a circuit board including a plurality of electric control switches controlled by the shift register connected to the plurality of pins, the electric control switches being controlled to supply power to the lasers respectively connected to the pins;
in some embodiments, each laser is connected to a pin on the circuit board by a gold wire lead.
Based on the above embodiment, in the one-dimensional radar scanning emission device based on the microstructure laser, the circuit board is communicated with the power supply to realize scanning control driving, and the main expression is that each path of laser is connected with the pins on the circuit board through gold wire leads. These pins are connected to electrical control switches on the circuit board. All the electric control switches are connected with the output end of a laser current source module. When the current source module works, the current source module is always in an opening state. And each electric switch connecting the lasers is programmed by a shift register.
Based on the above embodiment device, another embodiment of the present invention further provides a method for manufacturing a one-dimensional radar scanning emission device based on a microstructure laser, which is also shown in fig. 1 and fig. 2, and the method includes the following specific implementation steps:
step 1: preparing a laser epitaxial wafer, wherein as shown in fig. 2, the epitaxial wafer is formed by sequentially growing a lower cover layer 7, a lower waveguide layer 6, an active layer 5, an upper waveguide layer 4, an upper cover layer 3 and an upper contact layer 2 upwards on a substrate 8 material layer by an MOCVD or MBE growth means, and the device is processed and manufactured based on the epitaxial wafer;
step 2: etching the upper surface of the laser epitaxial wafer to the lower cover layer by a dry method to obtain a multi-path straight ridge-shaped strip laser structure; and etching periodic micro-grooves (such as 11 in fig. 1) at one end of the laser, wherein the micro-groove period on each ridge stripe is different;
and step 3: the whole structure is covered with silicon dioxide or silicon nitride;
and 4, step 4: removing the silicon dioxide or silicon nitride covering the top end of the ridge-shaped strip to expose the upper contact layer and manufacture an electrode window;
and 5: forming an upper metal layer (as 1 in FIG. 2) by covering the metal layer;
step 6: photoetching and etching the upper metal layer to form an isolation groove, and isolating each ridge stripe so as to enable the ridge stripe to be capable of independently injecting current;
and 7: thinning the substrate material layer, growing metal at the bottom of the substrate material layer, and manufacturing a lower metal layer (a part of 9 in fig. 2);
and 8: applying high temperature to the formed wafer under the mixed gas of nitrogen and hydrogen to perform alloying, and then dividing the obtained laser chip into array device tube cores, namely performing cleavage;
and step 9: packaging the array chip after cleavage on an oxygen-free copper or tungsten copper heat sink (as 10 in fig. 2) by a sintering process;
step 10: the chip with the heat sink is fixed on the driving circuit board through heat conducting glue, and all the lasers are connected with pins on the circuit board through gold wire leads (12 in fig. 1 are leads).
Thus, the preparation of the one-dimensional radar scanning and transmitting device based on the microstructure laser is completed.
Finally, the power is applied to carry out the scanning test.
The invention provides a one-dimensional radar scanning and transmitting device based on a microstructure laser, which comprises: the substrate and the multiple paths of lasers arranged in an array form a multiple paths of microstructure lasers with variable inclination angles and low divergence angles, and the circuit board structure realizes scanning control driving. The substrate part is used for monolithically integrating the multi-channel microstructure light source; the multi-path variable inclination angle low-divergence angle microstructure laser is the most important characteristic of the invention. Each laser can emit nearly parallel laser beams according to a specific angle by adjusting the distribution and the size of the microstructure of the laser, and the beams can be used for scanning an object in a certain distance and realizing position determination through reflection of the object. Compared with radars based on silicon-based phased arrays and vertical cavity surface emitting arrays, the invention can realize higher power output, has small volume and high integration level, and can be widely applied to the fields of automatic driving, unmanned aerial vehicles, robots and other artificial intelligence.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A one-dimensional radar scanning emitter based on micro-structure laser is characterized by comprising:
a substrate;
the laser comprises a substrate, a plurality of lasers arranged on the substrate in an array mode, wherein the distance between every two lasers is 10-150 micrometers, the outgoing angles of the lasers are different, the outgoing angles are included angles formed by the outgoing lasers of the lasers and the plane of the substrate, and the lasers are in a straight ridge stripe laser structure;
the circuit board comprises a shift register, a plurality of electric control switches, a plurality of pins and a laser current source module output end, wherein the plurality of electric control switches controlled by the shift register are connected with the plurality of pins, the lasers respectively connected to the pins are powered by controlling the electric control switches, the plurality of electric control switches are simultaneously connected to the laser current source module output end, and the shift register is controlled by a program;
the laser comprises a circuit board, a current source module, a laser module and a power supply module, wherein the current source module is always in an open state in a working state, and each laser is connected with a pin on the circuit board through a gold wire lead;
the emitting end of each laser is provided with a micro-groove structure, the period, the width and the depth of the micro-groove structure determine the divergence angle and the emitting angle of an emitted laser beam, at least one of the period, the width and the depth of the micro-groove structure between the lasers is different, the emitting angle range of each laser is from horizontal to downward deflection of 85 degrees, the non-emitting end of each laser is plated with a full-reflection film or a protection film, each laser corresponds to a fixed deflection angle, and no other optical element is needed to be added.
2. The microstructure laser based one-dimensional radar scanning transmission apparatus of claim 1, wherein the substrate comprises, from bottom to top:
the heat sink is made of AlN, oxygen-free copper or tungsten copper;
the lower metal layer is made of gold-germanium-nickel alloy and indium or gold-tin alloy;
the substrate is made of N-type or P-type GaAs or InP and has the thickness of 80-200 microns;
the lower cover layer is made of GaAs or InP and has the thickness of 1-3 microns.
3. The microstructure laser based one dimensional radar scanning launch device according to claim 1 wherein said laser comprises from base up:
a lower waveguide layer;
the active layer is made of InGaAs/AlGaAs, InAlGaAs/InGaAsP quantum wells or quantum dots;
an upper waveguide layer;
the upper cover layer is made of InP or GaAs material;
the upper contact layer is made of InGaAs or GaAs material;
and the upper metal layer is made of gold-germanium-nickel alloy and indium or gold-tin alloy.
4. The microstructure laser based one-dimensional radar scanning transmission device of claim 1, wherein the micro-groove structure has a period of 2-20 μm.
5. The one-dimensional radar scanning and transmitting device based on the microstructure laser as claimed in any one of claims 1 to 4, wherein the number of the laser paths is 1-200, each laser path is in the shape of a ridge and a strip, the ridge width is 3-100 microns, and the ridge height is 2-10 microns.
6. A preparation method of a one-dimensional radar scanning and transmitting device based on a microstructure laser comprises the following steps:
growing a lower cover layer, a lower waveguide layer, an active layer, an upper waveguide layer, an upper cover layer and an upper contact layer on a substrate to be used as an epitaxial wafer;
etching the epitaxial wafer to the lower cover layer by a dry method to obtain a plurality of paths of straight ridge-shaped strip-shaped laser structures, and ensuring the distance between each path of straight ridge-shaped strip-shaped laser structures to be 10-150 microns;
etching a micro-groove structure at one end of each ridge-shaped strip laser, wherein at least one of the period, the width and the depth of the micro-groove structure on each straight ridge-shaped strip laser is different from one another, the period, the width and the depth of the micro-groove structure determine the divergence angle and the emergent angle of an emergent laser beam, the emergent angle range of each laser is from horizontal to downward deflection of 85 degrees, a non-emitting end of each laser is plated with a total reflection film or a protective film, each laser corresponds to a fixed deflection angle, and other optical elements are not required to be added;
covering the straight ridge-shaped strip laser structure by using silicon dioxide or silicon nitride;
etching off silicon dioxide or silicon nitride covering the upper part of the straight ridge-shaped strip laser to expose the upper contact layer;
forming an upper metal layer on the upper contact layer covering metal layer;
photoetching and etching the upper metal layer to form an isolation groove, and isolating each ridge stripe so as to enable the ridge stripe to be capable of independently injecting current;
thinning the substrate, growing metal at the bottom of the substrate, and manufacturing a lower metal layer;
applying high temperature to the formed laser chip under the mixed gas of nitrogen and hydrogen to perform alloying, and then cleaving the laser chip to obtain an array chip;
sintering and packaging the array chip after cleavage on a heat sink;
the chip with the heat sink is fixed on a driving circuit board through heat conducting glue, each laser is connected with pins on the circuit board through gold wire leads, the circuit board comprises a shift register, a plurality of electric control switches, a plurality of pins and a laser current source module output end, wherein the plurality of electric control switches controlled by the shift register are connected with the plurality of pins, the lasers respectively connected to the pins are powered through controlling the electric control switches, the plurality of electric control switches are simultaneously connected to one laser current source module output end, the shift register is controlled through a program, and the current source module is always in an open state in a working state.
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| CN207134604U (en) * | 2017-08-03 | 2018-03-23 | 北京图来激光科技有限公司 | A kind of laser beam emitting device and its laser radar apparatus |
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| CN103199436A (en) * | 2013-02-19 | 2013-07-10 | 中国科学院半导体研究所 | Silicon waveguide output surface light source device based on sloping light beam edge emitting laser |
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