CN109860090A - A kind of turntable material fetching mechanism for semiconductor chip detection - Google Patents
A kind of turntable material fetching mechanism for semiconductor chip detection Download PDFInfo
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- CN109860090A CN109860090A CN201910158710.XA CN201910158710A CN109860090A CN 109860090 A CN109860090 A CN 109860090A CN 201910158710 A CN201910158710 A CN 201910158710A CN 109860090 A CN109860090 A CN 109860090A
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- turntable
- detection
- feeding
- semiconductor chip
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
Abstract
The present invention relates to a kind of turntable material fetching mechanisms for semiconductor chip detection, it includes rack, distribution control box and operating display, middle part turntable detection device and side turntable detection device are provided in rack, middle part turntable detection device includes middle part shaft, middle part shaft is socketed with middle part detection turntable and middle part installation turntable, detection hole is offered on middle part detection turntable, and the feeding device for being pierced by detection hole is installed on middle part installation turntable, side turntable detection device includes the side shaft connecting with side rotary electric machine, side turntable is socketed in the shaft of side, the carrier with semiconductor chip cooperation is provided on the turntable of side, side turntable is located at the lower part of middle part turntable, a carrier on the turntable of side is docked with a feeding device for passing through middle part turntable；The present invention is cooperated by middle part turntable detection device and side turntable detection device, is realized that multiple detection integrated processes of semiconductor chip carry out, is greatly improved the efficiency of detection, reduce detection working hour.
Description
Original bill application number: 2016112203928
Original bill applicant: Dongguan City Rong's work automates Science and Technology Ltd.
The original bill applying date: on December 26th, 2016
A kind of original bill application title: full-automatic detector of semiconductor chip.
Technical field
The present invention relates to the processing equipment field of electronic component more particularly to a kind of turntables for semiconductor chip detection
Material fetching mechanism.
Background technique
With the high speed development of electronic engineering, the application of various electronic components is more and more wider, and chip is a kind of common
Electronic component, wherein in chip again being most widely used with semiconductor chip.
In the process of semiconductor chip, needing to detect the chip processed, the comparison of item of detection is more,
Including Photoelectric Detection (photoelectric conversion efficiency of product), resistance detection, Resistivity testing (repeated detection is needed to average), view
Feel detection (CCD camera carry out appearance detection) and it is various under the conditions of (such as high temperature, radiation, strong light condition) conductivity detection,
And what existing semiconductor chip detection was all detected using multiple devices operation break-down mostly, wherein Resistivity testing is set at one
Standby upper progress repeated detection is averaged, and overall detection efficiencies are low, and time-consuming.
Summary of the invention
The object of the present invention is to provide a kind of turntable material fetching mechanisms for semiconductor chip detection, are examined by middle part turntable
It surveys device and side turntable detection device cooperates, realize that multiple detection integrated processes of semiconductor chip carry out, greatly
The efficiency for improving detection, reduce detection working hour.
In order to achieve the goal above, the technical solution adopted by the present invention are as follows: a kind of turntable for semiconductor chip detection
Material fetching mechanism, it includes rack (1), distribution control box (2) and operating display (3), is provided in the rack (1) mutually
The middle part turntable detection device (6) and side turntable detection device (7) of cooperation, the middle part turntable detection device (6) include
The middle part shaft (11) rotated counterclockwise connecting with middle part rotary electric machine, the middle part shaft (11) successively cover from bottom to up
It is connected to middle part detection turntable (12) and middle part installation turntable (13), uniformly offers inspection in middle part detection turntable (12)
Gaging hole, and the feeding device (14) for being pierced by detection hole is installed in middle part installation turntable (13), turntable is detected at the middle part
(12) it is disposed with below and is examined with photoelectric detection system (15), the resistance of the semiconductor chip cooperation on feeding device (14)
Survey device (16), resistivity detecting device (17) and top vision inspection apparatus (18), the resistivity detecting device (17)
Number be no less than three, the side turntable detection device (7) includes the side shaft connecting with side rotary electric machine
(33), it is socketed with side turntable (34) in the side shaft (33), is provided on the side turntable (34) and partly leads
The carrier of body chip cooperation, the side turntable (34) are located at the lower part of middle part detection turntable (12), and side turntable (34)
When with middle part detection turntable (12) cooperation, a carrier on side turntable (34) detects one of turntable (12) with across middle part
Feeding device (14) docking, the upper periphery of the side turntable (34) are provided with and the semiconductor chip cooperation on carrier
Conductive detector (36) and lower part vision inspection apparatus (37), the number of the conductive detector are no less than three, and each
Conductive detector (36) is combined with a condition regulating device (35), the middle part rotary electric machine, side rotary electric machine, feeding
Device (14), photoelectric detection system (15), resistor detecting device (16), resistivity detecting device (17), top vision-based detection dress
It sets (18), conductive detector (36), condition regulating device (35) and lower part vision inspection apparatus (37) and is connected to distribution control box
(2).
Further, the feeding device include setting middle part installation turntable (13) on feeding mounting base (19) and
Feeding lifting cylinder (20), the feeding lifting cylinder (20) and feeding mounting base (19) interior feeding elevating lever (21) installed
Connection, the feeding elevating lever (21) are pierced by the detection hole in middle part detection turntable (12), and under feeding elevating lever (21)
Side is provided with the feeding sucker (22) with semiconductor product cooperation, and the feeding lifting cylinder (20) and feeding sucker (22) are even
It is connected to distribution control box (2).
Further, the position that middle part detection turntable (12) is located at detection hole is provided with and feeding elevating lever (21)
The feeding limited block (23) of cooperation is provided with feeding damping spring (24) on the feeding elevating lever (21).
Further, the photoelectric detection system (15) includes the Photoelectric Detection seat (25) being arranged on rack (1), institute
Mutually matched Photoelectric Detection lifting cylinder (26) and photoelectric detector (27), and light are provided on the Photoelectric Detection seat (25) stated
It is provided with above photodetector (27) Photoelectric Detection detection block (28), the Photoelectric Detection lifting cylinder (26) and photoelectricity inspection
It surveys device (27) and is connected to distribution control box (2).
Further, the resistor detecting device (16) includes resistance detection seat (29), the resistance detection seat
(29) it is provided on resistance detector (31), the two sides of the resistance detector (31) are provided with resistance detection engaged therewith
Fixture block (32), the resistance detection fixture block (32) are combined with resistance detection gripper cylinder (30), the resistance detector
(31) and resistance detection gripper cylinder (30) is connected to distribution control box (2).
Further, the lower part vision inspection apparatus (37) includes lower part design testing stand (38), the lower part
It is provided on vision-based detection frame (39) CCD camera (39), is provided with mutual cooperation on the lower part vision-based detection frame (39)
Up and down adjustment sliding rail (40) and up and down adjustment sliding block (41), and be adjusted by up and down adjustment handle (44), described is upper
The coverage stop block (43) with CCD camera (39) cooperation, the CCD camera are provided on lower adjusting slider (41)
(39) distribution control box (2) are connected to.
Further, the vibration feeding disc (4) with semiconductor chip cooperation is provided in the rack (1), it is described
The chute feeder (5) being arranged on vibration feeding disc (4) and rack (1) cooperates, and turntable is installed at the other end of chute feeder (5) and middle part
(13) feeding device (14) cooperation on, the vibration feeding disc (4) are connected to distribution control box (2).
Further, the collection device with middle part turntable detection device (6) cooperation is additionally provided in the rack (1)
(8), the collection device (8) includes the collecting frame (49) being arranged on rack (1), and the collecting frame is provided on (49)
Conduction band cylinder (54), the conduction band cylinder (54) is combined with splicing tep reel (55) and machine reel (59), and splicing band is located at collecting frame
(49) position above is that horizontally disposed, described machine reel (59) is connected with winding motor, and the winding motor is connected to
Distribution control box (2).
Further, the film pressing device (50) with splicing band cooperation thereon, institute are provided on the collecting frame (49)
The film pressing device (50) stated includes the film feeding disk (57) being arranged on collecting frame (49), and the film on the film feeding disk (57) passes through
Guided membrane cylinder (56) and press mold axis (60) are connected on the winder cylinder (58) on collecting frame (49), and winder cylinder (58) is connected with winder
Motor, the press mold axis (60) are arranged on press mold pivoted arm (52), and the press mold pivoted arm (52) is mounted on collecting frame (49)
On press mold rotary electric machine (51) on, and press mold axis (60) and splicing band cooperate, the winder motor and press mold rotary electric machine
(51) distribution control box (2) are connected to.
Further, be provided on the collecting frame (49) pull motor (53), the pulling motor (53) it is defeated
The pulling wheel (61) with splicing leukorrhagia surface engagement, and the pulling for pulling wheel (61) to be uniformly arranged by outside are provided on shaft
Column and splicing band cooperate, and the pulling motor (53) is connected to distribution control box (2).
Further, it is provided with pressed seat (62) on the collecting frame (49), the pressed seat is provided on (62)
With the contact roller (63) for pulling wheel (61) cooperation.
The invention has the benefit that
1, it is cooperated by middle part turntable detection device and side turntable detection device, realizes multiple detections of semiconductor chip
Integrated process carries out, and can use detect to a resistivity detecting device to resistivity and average, Ke Yibian
It changes the factors such as a variety of ambient temperatures, light and radiation and carries out conductivity detection, CCD camera appearance can also be carried out to upper and lower surface
Detection, greatly improves the efficiency of detection, reduces detection working hour.
2, the structure of feeding device is simple, easy to operate, greatly facilitates the pick-and-place of semiconductor chip, and then can be more
The cooperation of turntable detection device and side turntable detection device in the middle part of good realization.
3, the design of damping spring, can prevent feeding elevating lever excessive velocities during lifting, and then can be to prevent
Only product is detached from feeding sucker.
4, the structure of photoelectric detection system and resistor detecting device is simple, easy to operate, and will not during detection
It shakes.
5, the structure of lower part vision inspection apparatus is simple, easy to operate, and the detection range of adjustable CCD camera,
And then better detection effect may be implemented.
6, the setting of vibration feeding disc and chute feeder, greatly facilitates the feeding of semiconductor chip, and then improves whole
The efficiency of a detection.
7, the design of collection device carries out splicing by the product after splicing band and detection, after greatly improving detection
Product collect be packaged efficiency.
8, the design of film pressing device, structure is simple, easy to operate, and can be to the upper of the splicing band equipped with semiconductor chip
Surface carries out pad pasting, and then may be implemented preferably to be packaged effect.
9, it pulls wheel and pulls the design of motor, material strip can be docked and play the role of feed, and then realize that substep pulls,
Splicing band is prevented to be broken.
10, the design of pressed seat and contact roller, it can be ensured that pull wheel to realize good pulling effect, prevent splicing from taking to
On float.
Detailed description of the invention
Fig. 1 is a kind of positive stereoscopic schematic diagram of turntable material fetching mechanism for semiconductor chip detection.
Fig. 2 is a kind of backward stereoscopic schematic diagram of turntable material fetching mechanism for semiconductor chip detection.
Fig. 3 is the positive stereoscopic schematic diagram of middle part turntable detection device.
Fig. 4 is the backward stereoscopic schematic diagram of middle part turntable detection device.
Fig. 5 is the stereoscopic schematic diagram of feeding device.
Fig. 6 is the stereoscopic schematic diagram of photoelectric detection system.
Fig. 7 is the stereoscopic schematic diagram of resistor detecting device.
Fig. 8 is the stereoscopic schematic diagram of side turntable detection device.
Fig. 9 is the stereoscopic schematic diagram of lower part vision inspection apparatus.
Figure 10 is the stereoscopic schematic diagram of collection device.
Figure 11 is the stereoscopic schematic diagram of film pressing device.
Label character as shown in the figure indicates are as follows: 1, rack；2, distribution control box；3, operating display；4, vibration feeding disc；
5, chute feeder；6, middle part turntable detection device；7, side turntable detection device；8, collection device；11, middle part shaft；12, middle part
Detect turntable；13, sabot is installed at middle part；14, feeding device；15, photoelectric detection system；16, resistor detecting device；17, resistance
Rate detection device；18, top vision inspection apparatus；19, feeding mounting base；20, feeding lifting cylinder；21, feeding elevating lever；
22, feeding sucker；23, feeding limited block；24, feeding damping spring；25, Photoelectric Detection seat；26, Photoelectric Detection lifting cylinder；
27, photoelectric detector；28, Photoelectric Detection grip block；29, resistance detection seat；30, resistance detection gripper cylinder；31, resistance detection
Device；32, resistance detection fixture block；33, side shaft；34, side turntable；35, condition regulating device；36, conductive detector；37,
Lower part vision inspection apparatus；38, lower part vision-based detection frame；39, CCD camera；40, up and down adjustment sliding rail；41, up and down adjustment is sliding
Block；43, coverage stop block；44, up and down adjustment handle；49, collecting frame；50, film pressing device；51, press mold rotary electric machine；
52, press mold pivoted arm；53, motor is pulled；54, conduction band cylinder；55, splicing tep reel；56, guided membrane cylinder；57, film feeding disk；58, winder cylinder；
59, machine reel；60, press mold axis；61, wheel is pulled；62, pressed seat；63, contact roller.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, with reference to the accompanying drawing to the present invention into
Row detailed description, the description of this part be only it is exemplary and explanatory, should not have any limitation to protection scope of the present invention
Effect.
As shown in Figure 1-Figure 11, a kind of specific structure of the invention are as follows: turntable material containing machine for semiconductor chip detection
Structure, it includes rack 1, distribution control box 2 and operating display 3, and mutually matched middle part turntable is provided in the rack 1
Detection device 6 and side turntable detection device 7, the middle part turntable detection device 6 includes connecting with middle part rotary electric machine
The middle part shaft 11 rotated counterclockwise, the middle part shaft 11 are successively socketed with middle part detection turntable 12 and middle part from bottom to up
Turntable 13 is installed, detection hole is uniformly offered on the middle part detection turntable 12, and be equipped on middle part installation turntable 13
It is pierced by the feeding device 14 of detection hole, the lower section of the middle part detection turntable 12 is disposed with and half in feeding device 14
Photoelectric detection system 15, resistor detecting device 16, resistivity detecting device 17 and the top vision-based detection dress of conductor chip cooperation
Set 18, the number of the resistivity detecting device 17 is no less than three, and the side turntable detection device 7 includes and side
The side shaft 33 of rotary electric machine connection, is socketed with side turntable 34, the side turntable 34 in the side shaft 33
On be provided with carrier with semiconductor chip cooperation, the side turntable 34 is located at the lower part that turntable 12 is detected at middle part, and side
When portion's turntable 34 cooperates with middle part detection turntable 12, a carrier on side turntable 34 detects the one of turntable 12 with across middle part
A feeding device 14 is docked, and the upper periphery of the side turntable 34 is provided with to be led with what the semiconductor chip on carrier cooperated
Photodetector 36 and lower part vision inspection apparatus 37, the number of the conductive detector are no less than three, and each conductive inspection
It surveys device 36 and is combined with a condition regulating device 35, the middle part rotary electric machine, side rotary electric machine, feeding device 14, light
Electric detection means 15, resistor detecting device 16, resistivity detecting device 17, top vision inspection apparatus 18, conductive detector 36,
Condition regulating device 35 and lower part vision inspection apparatus 37 are connected to distribution control box 2.
Preferably, the feeding device includes the feeding mounting base 19 being arranged on middle part installation turntable 13 and feeding liter
Sending down abnormally ascending cylinder 20, the feeding lifting cylinder 20 are connect with the feeding elevating lever 21 installed in feeding mounting base 19, and described takes
Material elevating lever 21 is pierced by the detection hole in middle part detection turntable 12, and the lower section of feeding elevating lever 21 is provided with and semiconductor product
The feeding sucker 22 of cooperation, the feeding lifting cylinder 20 and feeding sucker 22 are connected to distribution control box 2.
Preferably, the position that detection turntable 12 in the middle part is located at detection hole is provided with and the cooperation of feeding elevating lever 21
Feeding limited block 23 is provided with feeding damping spring 24 on the feeding elevating lever 21.
Preferably, the photoelectric detection system 15 includes the Photoelectric Detection seat 25 being arranged in rack 1, the photoelectricity
It is provided with mutually matched Photoelectric Detection lifting cylinder 26 and photoelectric detector 27 on detection seat 25, and photoelectric detector 27 is upper
Side is provided with Photoelectric Detection detection block 28, and the Photoelectric Detection lifting cylinder 26 and photoelectric detector 27 are connected to electric control
Case 2.
Preferably, the resistor detecting device 16 includes resistance detection seat 29, is arranged on the resistance detection seat 29
There is resistance detector 31, the two sides of the resistance detector 31 are provided with resistance detection fixture block 32 engaged therewith, described
Resistance detection fixture block 32 is combined with resistance detection gripper cylinder 30, the resistance detector 31 and resistance detection gripper cylinder 30
It is connected to distribution control box 2.
Preferably, the lower part vision inspection apparatus 37 includes that testing stand 38, the lower part vision inspection are designed in lower part
It surveys on frame 39 and is provided with CCD camera 39, it is sliding that mutually matched up and down adjustment is provided on the lower part vision-based detection frame 39
Rail 40 and up and down adjustment sliding block 41, and be adjusted by up and down adjustment handle 44, it is arranged on the up and down adjustment sliding block 41
There is the coverage stop block 43 cooperated with CCD camera 39, the CCD camera 39 is connected to distribution control box 2.
Preferably, the vibration feeding disc 4 with semiconductor chip cooperation is provided in the rack 1, the vibration is sent
The chute feeder 5 being arranged on charging tray 4 and rack 1 cooperates, and the feeding device on the other end of chute feeder 5 and middle part installation turntable 13
14 cooperations, the vibration feeding disc 4 are connected to distribution control box 2.
Preferably, the collection device 8 cooperated with middle part turntable detection device 6 is additionally provided in the rack 1, it is described
Collection device 8 includes the collecting frame 49 being arranged in rack 1, is provided with conduction band cylinder 54 on the collecting frame 49, described leads
Band cylinder 54 is combined with splicing tep reel 55 and machine reel 59, and it is horizontally disposed, institute that splicing band, which is located at the position of 49 top of collecting frame,
The machine reel 59 stated is connected with winding motor, and the winding motor is connected to distribution control box 2.
Preferably, the film pressing device 50 with splicing band cooperation thereon, the pressure are provided on the collecting frame 49
Film device 50 includes the film feeding disk 57 being arranged on collecting frame 49, and the film on the film feeding disk 57 passes through guided membrane cylinder 56 and press mold
Axis 60 is connected on the winder cylinder 58 on collecting frame 49, and winder cylinder 58 is connected with winder motor, and the press mold axis 60 is arranged
On press mold pivoted arm 52, the press mold pivoted arm 52 is mounted on the press mold rotary electric machine 51 on collecting frame 49, and press mold axis 60
Cooperate with splicing band, the winder motor and press mold rotary electric machine 51 are connected to distribution control box 2.
Preferably, it is provided on the collecting frame 49 and pulls motor 53, set on the output shaft of the pulling motor 53
It is equipped with the pulling wheel 61 with splicing leukorrhagia surface engagement, and the pulling column for pulling wheel 61 to be uniformly arranged by outside is matched with splicing band
It closes, the pulling motor 53 is connected to distribution control box 2.
Preferably, it is provided with pressed seat 62 on the collecting frame 49, be provided on the pressed seat 62 and pulls wheel
The contact roller 63 of 61 cooperations.
When specifically used, first pass through distribution control box 2 and control the movement of vibration feeding disc 4, by semiconductor chip to be detected
It is transported in chute feeder 5, drives feeding elevating lever 21 to decline by feeding lifting cylinder 20 again later, and then make feeding sucker 22
Product is sucked, controls middle part detection turntable 12 again later and rotates a lattice, and then product is made to be located at the top of photoelectric detection system 15,
To product carry out Photoelectric Detection, then proceed to rotate counterclockwise, product made to be located at the top of resistor detecting device 16, to product into
Row resistance electrical measurement, continues to rotate counterclockwise later, successively passes through multiple resistivity detecting devices, detects multiple resistivity
Value, and averaging sends distribution control box 2 to, continues to rotate later, passes through 18 testing product of top vision inspection apparatus
It is qualified when underside shape, it continues to rotate later, product is made to be located at the position that middle part detection turntable 12 and side turntable 34 cooperate
Set, then product be placed on the carrier of side turntable 34 by feeding device 14, make side turntable rotate, drive product according to
It is secondary to detect product in items such as different temperatures, radiation, illumination by each condition regulating device 35 and by conductive detector 36
Conductive condition under part, is then further continued for turning to the lower section of lower part vision inspection apparatus 37, the upper surface of testing product it is outer
Whether qualified, be rotated further by another position docked with middle part detection turntable 12 later if seeing, by feeding device 14 by product
It picks up, and passes through the rotation of middle part detection turntable 12, be moved to above the movable splicing band of collection device 8, and pass through feeding
Device 14 is placed into splicing and takes, and then splicing band moves together, when by film pressing device 50, by press mold axis 60 to product
Press mold is carried out, roll set collection is carried out by machine reel 59 again later.
It should be noted that, in this document, the terms "include", "comprise" or its any other variant are intended to non-row
His property includes, so that the process, method, article or equipment for including a series of elements not only includes those elements, and
And further include other elements that are not explicitly listed, or further include for this process, method, article or equipment institute it is intrinsic
Element.
Used herein a specific example illustrates the principle and implementation of the invention, the explanation of above example
It is merely used to help understand method and its core concept of the invention.The above is only a preferred embodiment of the present invention, it answers
When pointing out due to the finiteness of literal expression, and objectively there is unlimited specific structure, for the common skill of the art
For art personnel, without departing from the principle of the present invention, several improvement, retouching or variation can also be made, can also incited somebody to action
Above-mentioned technical characteristic is combined in the right way；These improve retouching, variation or combination, or the not improved structure by invention
Think and technical solution directly applies to other occasions, is regarded as protection scope of the present invention.
Claims (3)
1. a kind of turntable material fetching mechanism for semiconductor chip detection, including rack (1) and distribution control box (2) its feature exist
In being provided with mutually matched middle part turntable detection device (6) and side turntable detection device (7), institute in the rack (1)
The middle part turntable detection device (6) stated includes the middle part shaft (11) rotated counterclockwise connecting with middle part rotary electric machine, described
Middle part shaft (11) be successively socketed with from bottom to up middle part detection turntable (12) and middle part install turntable (13), the middle part
Detection hole is uniformly offered in detection turntable (12), and the feeding dress for being pierced by detection hole is installed in middle part installation turntable (13)
It sets (14), the side turntable detection device (7) includes the side shaft (33) connecting with side rotary electric machine, the side
It is socketed in portion's shaft (33) side turntable (34), the load with semiconductor chip cooperation is provided on the side turntable (34)
Tool, the side turntable (34) is located at the lower part of middle part detection turntable (12), and turntable is detected at side turntable (34) and middle part
(12) when cooperating, a carrier on side turntable (34) and a feeding device (14) across middle part detection turntable (12) are right
It connects, the middle part rotary electric machine, side rotary electric machine and feeding device (14) are connected to distribution control box (2).
2. a kind of turntable material fetching mechanism for semiconductor chip detection according to claim 1, which is characterized in that described
Feeding device include setting middle part installation turntable (13) on feeding mounting base (19) and feeding lifting cylinder (20), it is described
Feeding lifting cylinder (20) and feeding mounting base (19) in the feeding elevating lever (21) installed connect, the feeding elevating lever
(21) detection hole being pierced by middle part detection turntable (12), and be provided with below feeding elevating lever (21) and match with semiconductor product
The feeding sucker (22) of conjunction, the feeding lifting cylinder (20) and feeding sucker (22) are connected to distribution control box (2).
3. a kind of turntable material fetching mechanism for semiconductor chip detection according to claim 2, which is characterized in that described
Middle part detection turntable (12) be located at detection hole position be provided with feeding elevating lever (21) cooperate feeding limited block (23),
Feeding damping spring (24) are provided on the feeding elevating lever (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910158710.XA CN109860090A (en) | 2016-12-26 | 2016-12-26 | A kind of turntable material fetching mechanism for semiconductor chip detection |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611220392.8A CN106847722B (en) | 2016-12-26 | 2016-12-26 | A kind of full-automatic detector of semiconductor chip |
| CN201910158710.XA CN109860090A (en) | 2016-12-26 | 2016-12-26 | A kind of turntable material fetching mechanism for semiconductor chip detection |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611220392.8A Division CN106847722B (en) | 2016-12-26 | 2016-12-26 | A kind of full-automatic detector of semiconductor chip |
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| CN109860090A true CN109860090A (en) | 2019-06-07 |
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| CN201611220392.8A Active CN106847722B (en) | 2016-12-26 | 2016-12-26 | A kind of full-automatic detector of semiconductor chip |
| CN201910158721.8A Withdrawn CN109920743A (en) | 2016-12-26 | 2016-12-26 | A kind of performance detection mechanism convenient for collection semiconductor chip |
| CN201910158700.6A Withdrawn CN109887857A (en) | 2016-12-26 | 2016-12-26 | A kind of performance detection mechanism of semiconductor chip |
| CN201910158710.XA Withdrawn CN109860090A (en) | 2016-12-26 | 2016-12-26 | A kind of turntable material fetching mechanism for semiconductor chip detection |
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| CN201611220392.8A Active CN106847722B (en) | 2016-12-26 | 2016-12-26 | A kind of full-automatic detector of semiconductor chip |
| CN201910158721.8A Withdrawn CN109920743A (en) | 2016-12-26 | 2016-12-26 | A kind of performance detection mechanism convenient for collection semiconductor chip |
| CN201910158700.6A Withdrawn CN109887857A (en) | 2016-12-26 | 2016-12-26 | A kind of performance detection mechanism of semiconductor chip |
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| CN107452662B (en) * | 2017-09-13 | 2024-01-30 | 安徽海思达机器人有限公司 | Robot integration platform for chip packaging |
| CN107758008A (en) * | 2017-11-01 | 2018-03-06 | 江苏凯尔生物识别科技有限公司 | Test packing integral machine |
| CN107757962A (en) * | 2017-11-01 | 2018-03-06 | 江苏凯尔生物识别科技有限公司 | SMT detects packaging mechanism |
| CN109712918B (en) * | 2018-12-29 | 2021-03-16 | 铜陵富仕三佳机器有限公司 | Chip detection and collection equipment and use method thereof |
| CN110007207B (en) * | 2019-04-17 | 2021-01-26 | 山东阅芯电子科技有限公司 | Method for reducing number of positioning points in semiconductor device detection equipment |
| CN116577643B (en) * | 2023-07-11 | 2023-12-22 | 苏州晶睿半导体科技有限公司 | Automatic testing system and method for semiconductor chip |
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| US6734694B2 (en) * | 2001-03-19 | 2004-05-11 | Juki Corporation | Method and apparatus for automatically testing semiconductor device |
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-
2016
- 2016-12-26 CN CN201611220392.8A patent/CN106847722B/en active Active
- 2016-12-26 CN CN201910158721.8A patent/CN109920743A/en not_active Withdrawn
- 2016-12-26 CN CN201910158700.6A patent/CN109887857A/en not_active Withdrawn
- 2016-12-26 CN CN201910158710.XA patent/CN109860090A/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| CN106847722B (en) | 2019-05-10 |
| CN106847722A (en) | 2017-06-13 |
| CN109920743A (en) | 2019-06-21 |
| CN109887857A (en) | 2019-06-14 |
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| PB01 | Publication | ||
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| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20190607 |
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| WW01 | Invention patent application withdrawn after publication |