CN109860005A - A kind of no magnetic pigtail splice and its manufacturing method - Google Patents
A kind of no magnetic pigtail splice and its manufacturing method Download PDFInfo
- Publication number
- CN109860005A CN109860005A CN201811141632.4A CN201811141632A CN109860005A CN 109860005 A CN109860005 A CN 109860005A CN 201811141632 A CN201811141632 A CN 201811141632A CN 109860005 A CN109860005 A CN 109860005A
- Authority
- CN
- China
- Prior art keywords
- lead
- fixing seat
- porcelain bead
- weldment
- pigtail splice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ceramic Products (AREA)
- Insulators (AREA)
Abstract
The invention belongs to vacuum electronic component manufacturing method technical fields, more particularly to a kind of no magnetic pigtail splice and its manufacturing method, including lead, lead porcelain bead and lead fixing seat, the lead porcelain bead that outer rim metallizes is placed in welding positioning mould, and it is inserted into lead in the aperture on lead porcelain bead, hydrogen furnace, which is put into, after filling insulation powdered frit in the solder bath of lead porcelain bead welds to obtain lead combination weldment;Lead fixing seat is placed on welding auxiliary mould again, it combines lead in insertion lead fixing seat, the lower end surface for combining lead is placed on the ladder platform terrace in the middle part of lead fixing seat, and make the metallization outer rim of lead porcelain bead and inner wall tight fit on lead fixing seat step surface, palladium-silver spelter solder is placed at sealing-in, in the state of guaranteeing that lead is hanging, it is put into the welding of hydrogen furnace.The present invention solves in hyperfrequency electrostatic amplifier tube, the connectivity problem of pipe external circuit, has the characteristics that good air-tightness, high mechanical strength, non-magnetic, cleanliness is high, but also the temperature gradient requirement that satisfaction is welded again, and good with the welding performance of oxygen-free copper.
Description
Technical field
The invention belongs to vacuum electronic component manufacturing method technical fields, and in particular to a kind of no magnetic pigtail splice and its
Manufacturing method.
Background technique
Have in magnetron 2 leads (cathode and filament), most of connection of lead and external circuits all uses direct
The mode of spot welding cable is completed.Hyperfrequency electrostatic amplifier tube core volume is small, and external 11 leads is needed to connect with external circuit,
And interface aperture is Φ 5.5mm and Φ 9mm, the method for conventional direct spot welding is unable to satisfy technique requirement.Therefore use diameter for
The metal lead wire of 0.4mm and the closure (no magnetic pigtail splice) of ceramics are used as transition.
No magnetic pigtail splice is injected frequency amplifier block, cathode fixing seat group in connection hyperfrequency electrostatic amplifier tube
The tie of each electrode, anode and filament and external power supply system in part and anode assemblies.A kind of no magnetic pigtail splice will not only be protected
In card pipe, while pipe external circuit access, also to guarantee that every circuit is insulated from each other, more to guarantee hyperfrequency electrostatic amplifier
Vacuum-tightness.
Metal and 95 porcelain generally use sintering metal powder method needle envelope.The sealing surface of 95 porcelain is metallized, dedicated weldering is utilized
Connect mould in hydrogen furnace with metal sealing.After the sealing-in for implementing lead and lead porcelain bead with this method, because of two kinds of tungsten and 95 porcelain
Material thermal expansion coefficient mismatches, and causes porcelain sealing to burst, in aforementioned manners to lead porcelain bead and lead fixing seat sealing-in, first
It uses conventional sealing alloy 4J33 for lead fixing seat, is found after sealing-in, embrittlement is easy around lead, leads to pipe leaks gas, and
4J33 belongs to permeability magnetic material, influences greatly on surrounding magnetic field, electrical property can not be up to standard.Then, using instead with conventional molybdenum materials is lead
Material, nonmagnetic ceramic seal alloy 4J80 are that lead fixing seat carries out sealing-in, cause the leak rate of the connector to be up to 90% or more, pass through
Powerful Light Microscope observation, the ceramic member overwhelming majority are burst.
Summary of the invention
For above-mentioned problems of the prior art and deficiency, the present invention provides a kind of no magnetic pigtail splice, can solve
Certainly in hyperfrequency electrostatic amplifier tube, the connectivity problem of pipe external circuit has good air-tightness, high mechanical strength, non-magnetic, clean
Spend high feature.
It is a further object of the present invention to provide the manufacturing methods of above-mentioned no magnetic pigtail splice.
To achieve the above object, the invention provides the following technical scheme:
A kind of no magnetic pigtail splice, including lead, lead porcelain bead and lead fixing seat place the lead porcelain bead of outer rim metallization
In welding positioning mould, and lead composition lead wire set is inserted into the aperture on lead porcelain bead and is closed, in the solder bath of lead porcelain bead
Hydrogen furnace is put into after middle filling insulation powdered frit to weld to obtain lead combination weldment;The lead fixing seat is placed on welding auxiliary mould
On, lead combination weldment is inserted into lead fixing seat, is placed in lead combination weldment lower end surface in the middle part of lead fixing seat
On ladder platform terrace, and it is fitted close the outer rim of lead porcelain bead with inner wall on lead fixing seat step surface, in lead porcelain bead
Palladium-silver spelter solder is placed at the sealing-in formed with lead fixing seat, in the state of guaranteeing that lead is hanging, is put into the welding of hydrogen furnace.
Further, lead is made of high temperature molybdenum wire.
Further, lead porcelain bead is by 95% Al2O3Ceramic manufacturing is made.
Further, lead fixing seat is processed by MoCu25Ni5.
Another technical solution of the present invention is a kind of manufacturing method of above-mentioned no magnetic pigtail splice, according to following
Step carries out:
Step 1: lead, lead porcelain bead and lead fixing seat being done into conventional cleaning and handled;
Step 2: the outer rim of treated in step 1 lead porcelain bead is metallized;
Step 3: the lead porcelain bead in step 2 being placed in welding positioning mould, and is inserted into and draws in the aperture on lead porcelain bead
Lead combination is obtained after line;
Step 4: suspension is formed after taking insulation powdered frit to mix with dehydrated alcohol, wherein insulation powdered frit is comprising following component and again
Amount portion rate: 60-62 parts of quartz sand;17-19 parts of aluminium oxide;9-11 parts and magnesia 8-10 parts of calcium oxide;
Step 5: the suspension in step 4 being added dropwise in the solder bath of lead porcelain bead, after dehydrated alcohol volatilization, be further dropped into
Solder bath is filled up to insulation powdered frit;When other positions in the lead portion that insulation powdered frit is stained with solder bath or more or outside solder bath
When, it is necessary to after lead combination and welding positioning mould are all put into the cleaning of 100W supersonic wave cleaning machine, again again according to the step
Operation;
Step 6: after to dehydrated alcohol volatilization, combines in lead and weld positioning mould and be put into togerther in hydrogen furnace, and logical wet hydrogen,
Hydrogen furnace is warming up to 1030 ± 5 DEG C, keeps the temperature 4-5min, room temperature is down to and obtains lead combination weldment;
Step 7: taking out lead from the hydrogen furnace in step 6 and combine weldment, with helium mass spectrometer leak detector to lead combination weldment leak detection;
If lead, which combines weldment, occurs gas leakage, repeatedly step 5- step 6;
Step 8: lead fixing seat being placed on welding auxiliary mould, then lead combination weldment of the leak detection after qualified is inserted into lead
Pigtail splice weldment is obtained in fixing seat, and the lower end surface of lead combination weldment is placed in the ladder platform terrace in the middle part of lead fixing seat
On, it is fitted close inner wall on the metallization outer rim and lead fixing seat step surface of lead porcelain bead, and place palladium at sealing-in
Silver-copper brazing alloy is put into hydrogen furnace in the state of guaranteeing that lead is hanging, then by pigtail splice weldment and welding auxiliary mould, leads to wet
Hydrogen furnace is warming up to 940 ± 10 DEG C, keeps the temperature 2-3min, be down to room temperature and obtain pigtail splice by hydrogen;
Step 9: after taking out pigtail splice in the hydrogen furnace in step 8, hunted leak with helium mass spectrometer leak detector, warehousing after passing.
Compared with prior art, the beneficial effects of the present invention are:
1) present invention solve in hyperfrequency electrostatic amplifier tube, the connectivity problem of pipe external circuit, have air-tightness good, mechanical strong
Spend the feature high, non-magnetic, cleanliness is high.
2) present invention also meets the temperature gradient requirement welded again, and good with the welding performance of oxygen-free copper.
3) present invention may extend in other miniaturization multi-electrode vacuum devices.
Detailed description of the invention
Fig. 1 is that lead of the invention combines assemble welding structural schematic diagram;
Fig. 2 is pigtail splice assemble welding structural schematic diagram.
In figure: 1. leads, 2. lead porcelain beads, 21. solder baths, 3. lead fixing seats, 4. welding positioning moulds, 5. are drawn
Line combines weldment, 6. welding assist moulds, at 7. sealing-ins.
Specific embodiment
The following describes the present invention in detail with reference to the accompanying drawings and specific embodiments.
As shown in Figs. 1-2, a kind of no magnetic pigtail splice, including the lead 1 made of high temperature molybdenum wire, by 95% Al2O3Ceramics
The lead porcelain bead 2 that outer rim metallizes is placed on weldering by manufactured lead porcelain bead 2 and the lead fixing seat 3 made of MoCu25Ni5
It connects in positioning mould 4, and is inserted into lead 1 in the aperture on lead porcelain bead 2 and forms lead combination, in the solder bath of lead porcelain bead 2
Hydrogen furnace is put into 21 after filling insulation powdered frit to weld to obtain lead combination weldment 5;The lead fixing seat 3 is placed on welding auxiliary
On mould 6, lead combination weldment 5 is inserted into lead fixing seat 3, lead combination 5 lower end surface of weldment is made to be placed in lead fixing seat 3
On the ladder platform terrace at middle part, and it is fitted close the outer rim of lead porcelain bead 2 with inner wall on 3 step surface of lead fixing seat,
7 place palladium-silver spelter solder at the sealing-in that lead porcelain bead 2 and lead fixing seat 3 are formed, and in the state of guaranteeing that lead 1 is hanging, are put into
The welding of hydrogen furnace.
The present invention also provides the manufacturing methods of above-mentioned no magnetic pigtail splice, specifically carry out as steps described below:
Step 1: lead 1, lead porcelain bead 2 and lead fixing seat 3 being done into conventional cleaning and handled;
Step 2: the outer rim of treated in step 1 lead porcelain bead 2 is metallized;
Step 3: the lead porcelain bead 2 in step 2 being placed in welding positioning mould 4, and is inserted into the aperture on lead porcelain bead 2
Lead combination is obtained after lead 1;
Step 4: suspension is formed after taking insulation powdered frit to mix with dehydrated alcohol, wherein insulation powdered frit is comprising following component and again
Amount portion rate: 60-62 parts of quartz sand;17-19 parts of aluminium oxide;9-11 parts and magnesia 8-10 parts of calcium oxide;
Step 5: the suspension in step 4 being added dropwise in the solder bath 21 of lead porcelain bead 2, after dehydrated alcohol volatilization, again
It instills to insulation powdered frit and fills up solder bath 21;
Step 6: after to dehydrated alcohol volatilization, combining in lead and weld positioning mould 4 and be put into togerther in hydrogen furnace, and lead to wet
Hydrogen furnace is warming up to 1030 ± 5 DEG C, keeps the temperature 4-5min by hydrogen, is down to room temperature and is obtained lead combination weldment 5;
Step 7: taking out lead from the hydrogen furnace in step 6 and combine weldment 5, lead combination weldment 5 is examined with helium mass spectrometer leak detector
Leakage;
Step 8: lead fixing seat 3 being placed on welding auxiliary mould 6, then lead combination weldment 5 of the leak detection after qualified is inserted into
Pigtail splice weldment is obtained in lead fixing seat 3, and the lower end surface of lead combination weldment 5 is placed in the ladder at 3 middle part of lead fixing seat
On step surface, it is fitted close inner wall on the metallization outer rim and 3 step surface of lead fixing seat of lead porcelain bead 2, and in sealing-in
Palladium-silver spelter solder is placed at place 7, is put into hydrogen in the state of guaranteeing that lead 1 is hanging, then by pigtail splice weldment and welding auxiliary mould 6
In furnace, lead to wet hydrogen, hydrogen furnace is warming up to 940 ± 10 DEG C, 2-3min is kept the temperature, is down to room temperature and obtains pigtail splice;
Step 9: after taking out pigtail splice in the hydrogen furnace in step 8, hunted leak with helium mass spectrometer leak detector, warehousing after passing.
Wherein, the preparation method for the insulation powdered frit used in step 4, carries out as steps described below:
It is to clean up ball milling bottle, porcelain ball and high alumina saggar first, thoroughly drying is stand-by;By ratio of weight and the number of copies, stone is taken respectively
Raw material is obtained after 60-62 parts of sand, 17-19 parts of aluminium oxide, 9-11 parts of calcium oxide, 8-10 parts of magnesia mixing, by porcelain ball and raw material
It is mixed according to weight ratio 1:3, is put into the ball milling bottle of drying after mix grinding 2.0-2.5h and obtains mix grinding material, discharged 50 meshes, to
Melting;Mix grinding material is packed into high alumina saggar, is put into electric stove hearth, heating rate is 200 DEG C/h, and energization is warming up to 1280-1300
DEG C, 30-40min is kept the temperature, melting material of coming out of the stove to obtain after naturally cooling to 100 DEG C is powered off;By melting material and porcelain ball by weight 1:3
22-24h is ground after mixing, is crossed after 50 meshes up to insulation powdered frit finished product.
Wherein, in steps of 5, when on 1 part of lead that insulation powdered frit is stained with 21 or more solder bath or outside solder bath 21
When other positions, it is necessary to after lead combination and welding positioning mould 4 are all put into the cleaning of 100W supersonic wave cleaning machine, again according to this
Step re-operates.
Wherein, in step 7 if gas leakage, repeatedly step 5- step 6 occur for lead combination weldment 5.
Claims (7)
1. a kind of no magnetic pigtail splice, including lead (1), lead porcelain bead (2) and lead fixing seat (3), which is characterized in that will be outer
The lead porcelain bead (2) of edge metallization is placed in welding positioning mould (4), and is inserted into lead in the aperture on lead porcelain bead (2)
(1) composition lead combination is put into hydrogen furnace after filling insulation powdered frit in the solder bath (21) of lead porcelain bead (2) and welds to obtain lead
It combines weldment (5);The lead fixing seat (3) is placed in welding auxiliary mould (6), and lead combination weldment (5) is inserted into and is drawn
In line fixing seat (3), it is placed in lead combination weldment (5) lower end surface on the ladder platform terrace in the middle part of lead fixing seat (3), and make
Inner wall is fitted close on the outer rim and lead fixing seat (3) step surface of lead porcelain bead (2), solid in lead porcelain bead (2) and lead
(7) place palladium-silver spelter solder at the sealing-in that reservation (3) is formed, and in the state of guaranteeing that lead (1) is hanging, are put into the welding of hydrogen furnace.
2. a kind of no magnetic pigtail splice as described in claim 1, which is characterized in that the lead (1) is high temperature molybdenum wire system
At.
3. a kind of no magnetic pigtail splice as described in claim 1, which is characterized in that the lead porcelain bead (2) is by 95%
Al2O3Ceramic manufacturing is made.
4. a kind of no magnetic pigtail splice as described in claim 1, which is characterized in that the lead fixing seat (3) by
MoCu25Ni5 is processed into.
5. a kind of manufacturing method of no magnetic pigtail splice described in claim 1, which is characterized in that this method is according to the following steps
It carries out:
Step 1: lead (1), lead porcelain bead (2) and lead fixing seat (3) being done into conventional cleaning and handled;
Step 2: the outer rim of treated in step 1 lead porcelain bead (2) is metallized;
Step 3: the lead porcelain bead (2) in step 2 being placed in welding positioning mould (4), and the aperture on lead porcelain bead (2)
Lead combination is obtained after middle insertion lead (1);
Step 4: suspension is formed after taking insulation powdered frit to mix with dehydrated alcohol, wherein insulation powdered frit is comprising following component and again
Amount portion rate: 60-62 parts of quartz sand;17-19 parts of aluminium oxide;9-11 parts and magnesia 8-10 parts of calcium oxide;
Step 5: the suspension in step 4 is added dropwise in the solder bath (21) of lead porcelain bead (2), after dehydrated alcohol volatilization,
It is further dropped into insulation powdered frit and fills up solder bath (21);
Step 6: after to dehydrated alcohol volatilization, combining in lead and weld positioning mould (4) and be put into togerther in hydrogen furnace, and lead to wet
Hydrogen furnace is warming up to 1030 ± 5 DEG C, keeps the temperature 4-5min by hydrogen, is down to room temperature and is obtained lead combination weldment (5);
Step 7: taking out lead combination weldment (5) from the hydrogen furnace in step 6, weldment is combined to lead with helium mass spectrometer leak detector
(5) it hunts leak;
Step 8: lead fixing seat (3) being placed in welding auxiliary mould (6), then lead of the leak detection after qualified combines weldment
(5) it is inserted into lead fixing seat (3) and obtains pigtail splice weldment, the lower end surface of lead combination weldment (5) is placed in lead fixing seat
(3) on the ladder platform terrace in the middle part of, make inner wall on the metallization outer rim and lead fixing seat (3) step surface of lead porcelain bead (2)
It is fitted close, and (7) place palladium-silver spelter solder at sealing-in, is welded in the state of guaranteeing that lead (1) is hanging, then by pigtail splice
Part and welding auxiliary mould (6) are put into hydrogen furnace, lead to wet hydrogen, and hydrogen furnace is warming up to 940 ± 10 DEG C, 2-3min is kept the temperature, is down to room temperature
Obtain pigtail splice;
Step 9: after taking out pigtail splice in the hydrogen furnace in step 8, hunted leak with helium mass spectrometer leak detector, warehousing after passing.
6. a kind of manufacturing method of no magnetic pigtail splice as claimed in claim 5, which is characterized in that in the step 5, when
Insulation powdered frit is stained on lead (1) part of solder bath (21) or more or when outer other position of solder bath (21), it is necessary to will draw
After line combination and welding positioning mould (4) are all put into the cleaning of 100W supersonic wave cleaning machine, re-operated again according to step 5.
7. a kind of manufacturing method of no magnetic pigtail splice as claimed in claim 5, which is characterized in that in the step 7 such as
Fruit lead combines weldment (5) and gas leakage occurs, then repeatedly step 5- step 6.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811141632.4A CN109860005B (en) | 2018-09-28 | 2018-09-28 | Non-magnetic lead connector and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811141632.4A CN109860005B (en) | 2018-09-28 | 2018-09-28 | Non-magnetic lead connector and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109860005A true CN109860005A (en) | 2019-06-07 |
CN109860005B CN109860005B (en) | 2021-04-02 |
Family
ID=66889723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811141632.4A Active CN109860005B (en) | 2018-09-28 | 2018-09-28 | Non-magnetic lead connector and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109860005B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115036159A (en) * | 2022-07-12 | 2022-09-09 | 宜兴市伊特瓷件厂 | Air-tight insulating assembly for power device and preparation method thereof |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1638004A (en) * | 2003-12-30 | 2005-07-13 | Lg电子株式会社 | High voltage input apparatus for magnetron |
EP1517351A3 (en) * | 2003-09-19 | 2008-02-20 | Matsushita Electric Industrial Co., Ltd. | Magnetron cathode assembly |
CN201060840Y (en) * | 2007-05-08 | 2008-05-14 | 广东格兰仕集团有限公司 | Main body of vacuum tube cathode support |
CN201153355Y (en) * | 2008-01-23 | 2008-11-19 | 安徽华东光电技术研究所 | Miniature pin sealing construction of ceramic body |
GB2478990A (en) * | 2010-03-26 | 2011-09-28 | E2V Tech | Magnetron with high gfrequency cathode heater power supply |
CN202564170U (en) * | 2011-12-28 | 2012-11-28 | 中国电子科技集团公司第十二研究所 | Miniaturization structure of collector leading wire insulator |
CN105355339A (en) * | 2015-10-23 | 2016-02-24 | 中国电子科技集团公司第五十五研究所 | Ceramic insulator |
CN105355526A (en) * | 2015-11-21 | 2016-02-24 | 安徽华东光电技术研究所 | Miniature collector lead wire sealing method and seal structure |
-
2018
- 2018-09-28 CN CN201811141632.4A patent/CN109860005B/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1517351A3 (en) * | 2003-09-19 | 2008-02-20 | Matsushita Electric Industrial Co., Ltd. | Magnetron cathode assembly |
CN1638004A (en) * | 2003-12-30 | 2005-07-13 | Lg电子株式会社 | High voltage input apparatus for magnetron |
CN201060840Y (en) * | 2007-05-08 | 2008-05-14 | 广东格兰仕集团有限公司 | Main body of vacuum tube cathode support |
CN201153355Y (en) * | 2008-01-23 | 2008-11-19 | 安徽华东光电技术研究所 | Miniature pin sealing construction of ceramic body |
GB2478990A (en) * | 2010-03-26 | 2011-09-28 | E2V Tech | Magnetron with high gfrequency cathode heater power supply |
CN202564170U (en) * | 2011-12-28 | 2012-11-28 | 中国电子科技集团公司第十二研究所 | Miniaturization structure of collector leading wire insulator |
CN105355339A (en) * | 2015-10-23 | 2016-02-24 | 中国电子科技集团公司第五十五研究所 | Ceramic insulator |
CN105355526A (en) * | 2015-11-21 | 2016-02-24 | 安徽华东光电技术研究所 | Miniature collector lead wire sealing method and seal structure |
Non-Patent Citations (1)
Title |
---|
骆岷,李瑶: "小型化多级降压收集极引线瓷封件研究", 《真空电子技术》 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115036159A (en) * | 2022-07-12 | 2022-09-09 | 宜兴市伊特瓷件厂 | Air-tight insulating assembly for power device and preparation method thereof |
Also Published As
Publication number | Publication date |
---|---|
CN109860005B (en) | 2021-04-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10385459B2 (en) | Advanced layered bulk ceramics via field assisted sintering technology | |
US7488443B2 (en) | Electrically conductive cermet and method of making | |
EP3157040B1 (en) | High voltage high current vacuum integrated circuit | |
US2014809A (en) | Electron discharge tube | |
JP2008505442A (en) | System and method for designing projector lamps | |
EP1778602A2 (en) | Ceramic bonding composition, method of making, and article of manufacture incorporating the same | |
CN109860005A (en) | A kind of no magnetic pigtail splice and its manufacturing method | |
JPH059740A (en) | Semiconductor wafer heating device | |
US4725449A (en) | Method of making radio frequency ion source antenna | |
US2133492A (en) | Method for manufacturing vacuum vessels | |
CN109153235A (en) | The method for preparing ceramics insulator | |
US7132798B2 (en) | Joined bodies, high pressure discharge lamps and assemblies therefor | |
CN102570094A (en) | High-voltage lead assembly for ultrahigh vacuum device and manufacture method thereof | |
US20080203916A1 (en) | Ceramic Discharge Vessel Having a Sealing Composition | |
US2873510A (en) | Method of manufacturing seals for electric discharge tubes | |
CN209526062U (en) | Vacuum electrode | |
CN103058700B (en) | Insulating sealed metal air pipe as well as sealed connection method of metal pipes and ceramic pipe | |
CN103193507B (en) | Method for improving wettability of metal to SiC ceramic | |
US3049792A (en) | Method of making insulated terminals of the receptacle type | |
US2811576A (en) | High frequency electrode | |
CN115966502B (en) | Manufacturing method of high-temperature ion implantation electrostatic chuck | |
JP3283692B2 (en) | Airtight insulation terminal | |
CN201146084Y (en) | Capacitor insulator | |
US4280078A (en) | Magnetron | |
US2189928A (en) | Electric discharge vessel |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |