CN109848013A - The improved-type LCD baking vessel of organic steam removal efficiency - Google Patents
The improved-type LCD baking vessel of organic steam removal efficiency Download PDFInfo
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- CN109848013A CN109848013A CN201810789828.8A CN201810789828A CN109848013A CN 109848013 A CN109848013 A CN 109848013A CN 201810789828 A CN201810789828 A CN 201810789828A CN 109848013 A CN109848013 A CN 109848013A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The improved-type LCD baking vessel of organic steam removal efficiency according to the present invention comprising: chamber has the opening/closing portion of opening and closing entrance to place glass substrate on hot plate, and introduces heat gas by spitting unit and be discharged to discharge unit；And performance of ventilating improvement portion, it is set to the spitting unit and the heat gas that spues, and induction makes it uniformly in the flow velocity for the organic steam that the chamber interior generates, and it guides to the discharge unit according to the present invention, in LCD baking toaster case, performance of ventilating improvement portion is set in gas-supplying structure, the gas for making large area spue has pressure difference, with uniform gas flow rate discharge, so as to promote the ventilation and removal efficiency of the organic steam in chamber.
Description
Technical field
The present invention relates to a kind of improved-type LCD baking vessel of organic steam removal efficiency, in further detail, are related to one kind and exist
LCD baking toaster case, is set to gas-supplying structure for performance of ventilating improvement portion, and the gas for making large area spue has pressure difference,
With uniform gas flow rate discharge, so that promoting the ventilation of organic steam and the organic steam removal efficiency of removal efficiency improves
Type LCD baking vessel.
Background technique
Under normal circumstances, in TFT (TFT, Thin Film Transistor: thin film transistor (TFT)) LCD manufacturing process, lead to
It crosses and film deposition procedures, photoresist coating process, roasting procedure, exposure process, developing procedure, etching work procedure is repeated carrys out shape
At thin film transistor (TFT), pixel electrode, rgb pixel and public electrode.
As described above, toaster case (Oven chamber, hereinafter referred to as chamber) is following equipment in LCD manufacturing process:
With hot plate (hot plate) unit or ultraviolet light (IR, infrared ray) unit of chamber interior as heat source, put into
Before photoresist coating equipment, glass substrate is heated and makes dry and preheating, or to the glass for being coated with light-sensitive surface
Glass substrate heats certain time and light-sensitive surface is made to solidify (roasting procedure, Baking).
The baking temperature of such chamber maintains the high temperature of about 130 DEG C of front and backs, so that light-sensitive surface steams in process
It sends out and generates organic steam (organic vapor).Include various particulates in organic steam, when original sample is placed, includes
The steam of particulate adheres to chamber interior and pollutes chamber, to be difficult to carry out process, or adhesion on the glass substrate and
Reduce precision and quality.
As described above, being provided with the gas supply system of supply heat gas in order to which the organic steam generated in chamber interior is discharged
System and the exhaust unit for being discharged to the outside the organic steam of chamber interior by the gas of inflow.Existing air supply system is in chamber
The heat gas spit face of room is provided with nozzle, which has the gap-shaped through hole only constituted in regional area.
But it is existing gas supply with nozzle, there are the following problems: chamber each regional area configure be formed with it is multiple,
To which the heat gas supplied from spit face can not be moved equably, between the mobile region in the region of high-speed mobile and low speed
Vortex is generated, the time that organic steam is remained in chamber is increased, to pollute the equipment of chamber interior or induce in glass
The process that speckle etc. occurs in the surface of glass substrate is bad.
It is therefore desirable to need to be improved this problem.
Relevant background technique have Ebrean Registered Patent bulletin the 10-0722153rd (2007.05.21, denomination of invention:
LCD glass substrate toaster case).
Summary of the invention
Technical problems to be solved
The present invention is proposed according to above-mentioned necessity, and the purpose of the present invention is to provide a kind of removals of organic steam to imitate
Performance of ventilating improvement portion is arranged on gas-supplying structure, makes large area in LCD baking toaster case for the improved-type LCD baking vessel of rate
The gas of discharge have pressure difference, with uniform gas flow rate discharge, so as to promote the ventilation of organic steam in chamber with
And removal efficiency.
Solve the means of technical problem
To achieve the goals above, the improved-type LCD baking vessel of organic steam removal efficiency according to the present invention includes: chamber
Room has the opening/closing portion of opening and closing entrance to place glass substrate on hot plate, and introduces heat gas by spitting unit
And it is discharged to discharge unit；And performance of ventilating improvement portion, it is set to the spitting unit and the heat gas that spues, and induce in institute
The flow velocity for stating the organic steam of chamber interior generation makes it uniformly, and guides to the discharge unit.
In the present invention, performance of ventilating improvement portion is set to the spitting unit of the chamber, and be provided with
The corresponding area of inside cross-sectional area of the chamber.
In the present invention, performance of ventilating improvement portion includes: flow velocity maintenance portion, is set to the spitting unit, from heating
Impurity screening and decline pressure in gas, to maintain evenly the discharge flow velocity of heat gas；And nozzle box, setting
In flow velocity maintenance portion outside and the heat gas that supply from air supply unit is introduced by connecting tube, to guide to described
Chamber.
In the present invention, flow velocity maintenance portion includes the filter of porous material.
In the present invention, the filter includes at least one of prefilter or high-efficiency particulate air filter.
In the present invention, flow velocity maintenance portion includes the punched-plate for being formed with multiple punchings.
In the present invention, heat gas guide portion is provided on the inside of the nozzle box, for the connection will to be passed through
The direction for the heat gas that pipe is supplied to upside is converted to towards side and guides to heat gas.
In the present invention, it includes: separating plate that the heat gas guide portion, which includes: the heat gas guide portion, in institute
The inside for stating nozzle box is arranged towards upside, and divides to space；Accommodating space portion is formed in based on the separating plate
Downside accommodates the heat gas supplied from the connecting tube；Insulating space portion is formed in the spray in the accommodating space portion
Between the side of mouth box and the end of the separating plate, and heat gas is guided to upside；And guide space portion, described
The direction of heat gas is converted to towards side in insulating space portion, is maintained to guiding heat gas to the flow velocity
Portion.
In the present invention, the separating plate includes: upper lower extension, from the bottom surface of the inside of the nozzle box towards upside
Extend；And guidance extension, it is corresponding with the upper side of the nozzle box, from the upper lower extension towards the chamber
Opposite side extends, and separates with the side of the nozzle box.
In the present invention, flow velocity maintenance portion is set to the spitting unit of the chamber by setting unit.
In the present invention, it includes housing section that the setting unit, which includes: the setting unit, and the housing section supports the flow velocity
The edge in maintenance portion and it is arranged at the chamber.
Invention effect
The improved-type LCD baking vessel of organic steam removal efficiency according to the present invention is supplying in LCD baking toaster case
Performance of ventilating improvement portion is set on depressed structure, the gas for making large area spue has pressure difference, it is spued with uniform gas flow rate,
So as to promote the ventilation and removal efficiency of organic steam in chamber.
Also, the present invention is using the thermal deformation preventing portion for being incorporated into main frame portion, the thermal change according to each point to main part
Shape position carries out pressurization adjusting, contact portion while maintaining the functional level of main part between realization body portion and main frame portion
The minimum of position prevents the leakage of chamber interior to reduce the thermal deformation of main part as far as possible, maintains chamber interior temperature
Uniformity.
Detailed description of the invention
Fig. 1 is the perspective view of the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention.
Fig. 2 is the main cross section figure of the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention.
Fig. 3 is the performance of ventilating in the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention
The amplification sectional view in improvement portion.
Fig. 4 is the performance of ventilating in the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention
The figure for being added to straight trip guide portion of the amplification sectional view in improvement portion.
Fig. 5 is that the performance of ventilating of the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention changes
The sectional view of the state using punched-plate of the variation in the flow velocity maintenance portion in kind portion.
Fig. 6 is shown in the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention by logical
The flow velocity streamline schematic diagram in wind performance improvement portion.
Fig. 7 is shown in the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention by logical
The chamber interior temperature schematic diagram that wind performance improvement portion is formed.
Fig. 8 is the opening and closing entrance of the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention
Opening/closing portion and thermal deformation preventing portion fractionation perspective view.
Fig. 9 is the assembling stereogram of Fig. 8.
Figure 10 is the main view of opening/closing portion according to an embodiment of the invention and thermal deformation preventing portion.
Figure 11 is the partial cut cross-sectional perspective view of opening/closing portion according to an embodiment of the invention and thermal deformation preventing portion.
Figure 12 is the side cross-sectional view of opening/closing portion according to an embodiment of the invention and thermal deformation preventing portion.
Description of symbols
100: chamber；110: spitting unit；120: discharge unit；130: entrance；200: performance of ventilating improvement portion；210: flow velocity
Maintenance portion；212: filter；214: punched-plate；215: punching；220: nozzle box；230: air supply unit；232: gas heater；
234: flow control valve；240: setting unit；242: housing section；250: gas guide portion；260: separating plate；262: extending up and down
Portion；264: guidance extension；270: accommodating space portion；280: insulating space portion；290: guide space portion；300: opening/closing portion；
310: main part；320: main frame portion；340: contact portion；350: frame；360: connection supporting part；370: rotation supporting portion；
380: driving portion；382: power part；384: straight trip portion；386: hinge part；400: thermal deformation preventing portion；410: point interconnecting piece；
420: fastening hole section；430: contact minimum portion；440: engaging portion；442: screw hole；444: combined hole；446: bonded block.
Specific embodiment
In the following, being described with reference to the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention.
Wherein, in order to illustrate clearness and convenience, sometimes exaggeration show line shown in the accompanying drawings thickness or
The size etc. of constitution element.Also, aftermentioned term is defined based on the function in the present invention, can be according to user, operation
The intention or habit of person and change.Therefore, these terms are defined based on entire contents of the present specification.
Fig. 1 is the perspective view of the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention, Fig. 2
It is the main cross section figure of the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention, Fig. 3 is according to this hair
The amplification sectional view in performance of ventilating improvement portion, Fig. 4 are in the improved-type LCD baking vessel of the organic steam removal efficiency of a bright embodiment
The amplification section in performance of ventilating improvement portion in the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention
The figure for being added to straight trip guide portion of figure, Fig. 5 are that the improved-type LCD of organic steam removal efficiency according to an embodiment of the invention dries
The sectional view of the state for applying punched-plate of the variation in flow velocity maintenance portion in the performance of ventilating improvement portion of roasted room, Fig. 6 is to show
Pass through the stream in performance of ventilating improvement portion in the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention out
Fast streamline schematic diagram,
Fig. 7 is shown in the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention by logical
The chamber interior temperature schematic diagram that wind performance improvement portion is formed.
Fig. 8 is the opening and closing entrance of the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention
Opening/closing portion and thermal deformation preventing portion fractionation perspective view, Fig. 9 is the assembling stereogram of Fig. 8, and Figure 10 is one real according to the present invention
The opening/closing portion of example and the main view of thermal deformation preventing portion are applied, Figure 11 is that opening/closing portion according to an embodiment of the invention and thermal deformation are anti-
The partial cut cross-sectional perspective view of stop, Figure 12 are the sides section of opening/closing portion according to an embodiment of the invention and thermal deformation preventing portion
Face figure.
Referring to figs. 1 to Figure 12, the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention includes
Chamber 100 and performance of ventilating improvement portion 200.
Chamber 100 is following structure: being formed with the placement glass substrate 20 on the hot plate 140 inside chamber 100
Entrance 130, by spitting unit 110 introduce heat gas, and to discharge unit 120 be discharged.
Chamber 100 is a device which to be formed as six-sided box shape, and entrance 130 is opened and closed by opening/closing portion 300
After being placed on glass substrate 20 on the hot plate 140 for being set to inside, pass through hot plate before being put into photoresist coating equipment
140 glass substrates 20 and be dried and preheat, or to be coated with light-sensitive surface glass substrate 20 heat certain time
And toast light-sensitive surface.
Spitting unit 110 is configured to be formed in the one side of chamber 100, is to supply heat gas in order to which organic steam is discharged
Heat gas discharge position, organic steam be baking be placed on the glass substrate 20 on hot plate 140 when it is generated.
Discharge unit 120 is formed in the another side of chamber 100 and is formed in the opposite sides of spitting unit 110.Discharge unit
120 by the mobile organic steam of the heat gas to spue from spitting unit 110, to be discharged to the outside.
The remaining two sides of not formed spitting unit 110 and discharge unit 120 in chamber 100, can in direction relative to each other
A pair of of entrance 130 is set.For the discrepancy of glass substrate 20, entrance 130 is formed as length direction aperture mode.
Performance of ventilating improvement portion 200 is such as flowering structure: being set to spitting unit 110 and the heat gas that spues, induces in chamber
The flow velocity for the organic steam that 100 inside generate makes it uniformly, and guides to discharge unit 120, so as to improve organic in chamber 100
The performance of ventilating of steam.
Following problem exists in the prior art: forming multiple spitting unit 110 in a manner of nozzle, spues from spitting unit 110
Heat gas in can generate vortex, to can not steadily be moved inside chamber 100, so realizing with can not be successfully organic
The discharge of steam, the impurity being stained in organic steam in the equipment inside chamber 100 and be contaminated, to significantly reduce equipment
Energy.But using performance of ventilating improvement according to the present invention portion 200, with uniform and slower flow speed stability by heat gas
It is discharged to discharge unit 120, to improve the drafting efficiency of organic steam, can solve that 100 internal unit of chamber is contaminated or glass
The speckle problem bad so as to cause process is stained on glass substrate 20.
Referring to Fig. 2, be placed on glass substrate 20 on hot plate 140 by lifter pin 150 with the upper surface with hot plate 140 slightly
Isolated state is placed, wherein lifter pin 150 above and below multiple through holes for being formed up and down in hot plate 140 by rising
Drop movement.
Performance of ventilating improvement portion 200 is located at the spitting unit 110 of chamber 100, is provided with the inside cross-sectional area with chamber 100
Corresponding larger area.
Performance of ventilating improvement portion 200 includes: flow velocity maintenance portion 210, is set to spitting unit 110, for from heat gas
Impurity screening and make generate pressure decline, to maintain evenly the discharge flow velocity of heat gas；And nozzle box 220, if
It is placed in the outside in flow velocity maintenance portion 210 and the heat gas supplied from air supply unit 230 is introduced by connecting tube 222, to draw
It is directed at chamber 100.
Settable gas heater 232, is heated into heat gas for gas in connecting tube 222.It can in connecting tube 222
Flow control valve 234 is set, the supply amount of the heat gas supplied by air supply unit 230 is adjusted.
Referring to Fig. 2 and Fig. 3, flow velocity maintenance portion 210 may include the filter 212 of porous material.Filter 212 can be with
Including at least one of prefilter or high-efficiency particulate air filter (HEPA filter).As needed, filter
212 can also be using the other kinds of filter other than prefilter or high-efficiency particulate air filter, Ke Yiying
With all materials of uniform flow velocity can be provided with low speed.
Join Fig. 5, flow velocity maintenance portion 210 may include the punched-plate 214 to form multiple punchings 215.
215 transverse direction of punching and longitudinal arrangement of punched-plate 214 form multiple row in upper and lower and left and right, so as to drop
The pressure of low heat gas reduces discharge flow velocity, while heat gas being made to have straight trip property, realizes uniform mobile.When will rush
When orifice plate 214 is used as flow velocity maintenance portion 210, it can be used alone, however, if necessary, can also be combined with filter 212 makes
With.In such a case, it is possible to obtain the flow velocity of more uniform heat gas.Uniform flow velocity is in chamber 100 as a result,
Portion does not form the in stable conditionly mobile heat gas of vortex, therefore when hot plate 140 toasts glass substrate 20, will be generated
Organic steam is effectively and stably discharged to the outside by discharge unit 120, so as to improve the inner ventilation of chamber 100
Energy.
It can be equipped with heat gas guide portion 250 in the inside of nozzle box 220, will be supplied by connecting tube 222 to upside
The direction of heat gas be converted to towards side and heat gas guided.
Referring to Fig. 2 to Fig. 5, heat gas guide portion 250 includes: separating plate 260, in the inside of nozzle box 220 towards upper
Side setting is to divide space；Accommodating space portion 270 is formed under the inside of nozzle box 220 based on separating plate 260
Side and the heat gas for accommodating the supply of connecting tube 222；Insulating space portion 280 is formed in nozzle box in accommodating space portion 270
Heat gas and guide space portion 290 are guided between 220 side and the end of separating plate 260 and to upside, it is empty in isolation
Between the direction of heat gas is converted to towards side in portion 280, to guiding heat gas to flow velocity maintenance portion 210.
Separating plate 260 may include: upper lower extension 262, extend from the inner bottom surface of nozzle box 220 to upside；And
Extension 264 is guided, it is corresponding with the upper side of nozzle box 220 and prolong from the opposite side of upper lower extension 262 towards chamber 100
It stretches, and is separated with the side of nozzle box 220.
Guidance extension 264 can be formed as in guide space portion 290 more towards flow velocity maintenance portion 210 more dipping down
Tiltedly.It should be noted that guidance extension 264 can also be horizontally formed so as to corresponding with the upper side of nozzle box 220.
The upper side of nozzle box 220 be horizontally formed so that heat gas have straight trip property, however, if necessary, additionally it is possible to
With tilt angle corresponding with the guidance tilt angle of extension 264 of separating plate 260, more towards flow velocity maintenance portion 210 to
Incline upward is formed.
It is to show for be arranged in spitting unit 110, to be evenly supplied heating in flow velocity maintenance portion 210 referring to Fig. 6 and Fig. 7
The figure of the state of gas, Fig. 5 show flow velocity maintenance portion 200 by the porous material including filter 212 or punched-plate 214 etc.
It constitutes, so that pressure declines when heat gas passes through the porous or punching 215 in flow velocity maintenance portion 210, so that flow velocity obviously becomes
Slowly, it vortex will not be generated forms uniform streamline (streamline) and carry out mobile state.As a result, in Fig. 6, tieed up according to by flow velocity
It holds portion 210 and realizes uniform streamline, can be obtained from the equally distributed Thermal Infra-Red detecting state of 100 internal temperature color of chamber
Know the discharge for realizing uniform organic steam.
Flow velocity maintenance portion 210 can be set to the spitting unit 110 in chamber 100 by setting unit 240.
Setting unit 240 may include the edge for supporting flow velocity maintenance portion 210 and the housing section for being arranged at chamber 100
242。
Referring to Fig. 4, setting unit 240 can also include straight trip guide portion 244, be located at the approaching side of housing section 242 and draw
Lead the straight trip movement of the heat gas moved in guide space portion 290.Guide portion 244 of keeping straight on is from the edge of housing section 242
To 270 side horizontal extension of guide space portion.Straight trip guide portion 244 is formed towards 290 side level of guide space portion protrusion.
The straight trip guide portion 244 for being formed in the downside position of housing section 242 can prolong towards upper lower extension 262 with guidance
The connecting portion of extending portion 284 extends to form, so as to guiding that the inclined surface of the guidance extension 264 along separating plate 260 moves plus
Hot gas.The straight trip guide portion 244 of the prominent lower edge for being formed in housing section 242 can shorten or eliminate and separate as a result,
The interval of plate 260, so as to prevent the vortex of the heat gas supplied by guide space portion 290.
Referring to Fig. 2 to Fig. 5, when observing the moving condition of heat gas, pass through the receipts of 222 flow nozzle box 220 of connecting tube
Hold spatial portion 270 heat gas by the upper lower extension 262 of separating plate 260 and guidance extension 264 block after reduce flow velocity,
It stops, later again via insulating space portion 280 to upside vertical shift, moving direction is converted in guide space portion 290, pass through
Pressure declines when being moved horizontally by guide space portion 290, and passing through flow velocity maintenance portion 210, so that flow velocity is reduced and uniformly moved
It is dynamic, organic steam is discharged to discharge unit 120.
At this moment, make to enter stream from the edge of housing section 242 to 290 side of guide space portion straight trip guide portion 244 outstanding
The heat gas in fast maintenance portion 210 is entered in the entire side of the spitting unit 110 of chamber 100 with uniform flow velocity.
Referring to Fig. 8 to Figure 12, the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention can be with
Include: opening/closing portion 300, to the entrance 130 of chamber 100 be opened and closed and help the taking-up of glass substrate 20 and prevent heating gas
The leakage of body；Opening/closing portion and thermal deformation preventing portion 400 may be disposed at opening/closing portion 300 and minimize because of the height inside chamber 100
The thermal deformation that heat is generated in opening/closing portion 300, to prevent the leakage of organic steam.
Opening/closing portion 300 includes: main part 310, obstructs entrance 130；And main frame portion 330, it is separated with main part 310
Configuration and the entrance 130 that the pressurization of main part 310 is tightly attached to chamber 100 by driving portion 380.
The sealing element 320 for being close to be inserted in the inside edge of entrance 130 can be set in the medial surface of main part 310.
Main frame portion 330 includes: contact portion 340, from 310 configured separate of main part and passes through thermal deformation preventing portion 400
And main part 310 is connected to each other；Frame 350, at least one direction transversely or in longitudinal direction of one side of contact portion 340
Configuration is more than two to support loading；And connection supporting part 360, connect the two-side supporting of scaffold 350.
Connection supporting part 360 in laterally multiple frames 350 for being connected to each other towards upper and lower sides configured separate, by screw or
The fastening element such as person's bolt is combined with frame 350.
Rotation shaft 370 can also be set on connection supporting part 360, and rotation shaft 370 extends to two sides, passes through
The rotation driving of driving portion 380, to open or close opening/closing portion 300.Rotation shaft 370 from connection supporting part 360 downside
It is formed to two sides are prominent.
Driving portion 380 may include: power part 382, provide power；Straight trip portion 384 passes through the active force of power part 382
Straight trip movement and hinge part 386, connect with 384 hinge of straight trip portion, so that straight trip power, which is converted to rotary force, to be made to rotationally support
Axis 370 rotates and opens or closes opening/closing portion 300.
Power part 382 can use air pressure or hydraulic cylinder.It should be noted that power part 382 can be using motor etc.
Various power parts.The rotatable shape in the side of hinge part 386 is connected with rotation shaft 370, and other side hinge is connected with straight trip
Portion 384.Power part 382 and 384 axis connection of straight trip portion, the scaffold by being located at chamber 100 are pivotably coupled to keep straight on
The opposite side in portion 384.
Thermal deformation preventing portion 400 may include: an interconnecting piece 410, at least one direction in transversely or longitudinally exists
It is formed on main part 310 multiple；Screw hole portion 420 is formed through in contact portion 340 thus with an interconnecting piece in front-rear direction
410 is corresponding；And contact minimum portion 430, an interconnecting piece 410 is connected to be fastened on the state of screw hole portion 420 to real
It is now transferred to the minimum of the hot gas in main frame portion 330 from main part 310 and adjusts main part 310 by tightening or loosening
Deformation.
It contact minimum portion 430 can be by be realized in length direction with the tool of hollow bolt or screw.
Contact minimum portion 430 is formed as multiple, in the state of being anchored on contact portion 340, according to the heat of main part 310
Deflection is selectively tightened or is loosened in the point of contact portion 340, the amount of pressurization with main part 310 is adjusted, thereby executing master
The level (level) in body portion 310 maintains function, and reduces the heat transferring contact area that heat is transmitted to contact portion 340, thus will
The minimizing deformation of main part 310, prevents the leakage of organic steam, and prevents main frame portion 330 from becoming by contact portion 340
Heat.
Existing as a result, is that main part 310 and main frame portion 330 form face contact, and the hot gas of main part 310 passes same as before
It is handed to main frame portion 330, thus 330 heating of main frame portion and the worry there are thermal deformation, it is difficult to it is touched with hand, still, root
According to the present invention, area of heat transfer is changed to point (point, point) using contact minimum portion 430 and is contacted, rather than face contact,
It realizes and minimizes, it, can be by heat transmitting temperature drop so as to minimize the high fever for the main part 310 for being transferred to main frame portion 330
Down to the degree that can touch main frame portion 330 with hand.
For thermal deformation preventing portion 400 after the thermal deformation for adjusting main part 310, end portion 440 is fastened on contact minimum portion
430, and it is incorporated into an interconnecting piece 410, so as to which main frame portion 330 is fixed on main part 310.
Referring to Fig. 8, Figure 11 and Figure 12, end portion 440 may include: insertion hole 442, and front and back is formed through in contact most
The central part in smallization portion 430；Fastened by screw hole 444 is formed in an interconnecting piece 410；And fastener 446, it is incorporated into insertion hole
442 and the fastened by screw hole 444 of an interconnecting piece 410 is fastened on to which main part 310 is fixed in main frame portion 330.
Insertion hole 442 can be the screw hole to form straight through hole or internal screw thread.Fastened by screw hole 444 is in being formed
The screw hole of screw thread.
When being inserted into hole 442 is straight through hole, partial section of the fastener 446 in insertion insertion hole 442 is not formed
Screw thread only forms screw thread in the section fastened with fastened by screw hole 444.Also, when being inserted into hole 442 is screw hole, fastening
Part 446 forms screw thread in entire section, in conjunction with insertion 442 screw of hole, simultaneously continuously fastens with fastened by screw hole 444, from
And can be bonded to each other main part 310 and main frame portion 330.In one embodiment of the invention, insertion hole 442 is formed as straight and passes through
Through-hole, fastener 446 do not form screw thread in the section in insertion insertion hole 442, only form external screw thread in end edge.
Therefore, the improved-type LCD baking vessel of organic steam removal efficiency according to an embodiment of the invention toasts in LCD and uses
In toaster case, performance of ventilating improvement portion is set in gas-supplying structure, the gas for making large area spue has pressure difference, with uniform
Gas flow rate spues, so as to promote the ventilation and removal efficiency of organic steam in chamber.Also, the present invention utilizes combination
Thermal deformation preventing portion in main frame portion, to the thermal deformation position of main part, each carries out pressurization adjusting, maintains main part
Horizontal functional, while the minimum of the contact site between realization body portion and main frame portion, so as to reduce master as far as possible
The thermal deformation in body portion prevents the leakage of chamber interior, it is possible to maintain the uniformity of chamber interior temperature.
The embodiment being illustrated in the accompanying drawings illustrates the present invention, but these are exemplary, technology belonging to the present invention
The available various modifications of the technical staff in field and equivalent other embodiments.
Therefore, it should real technical protection scope of the invention is defined based on claims.
Claims (11)
1. a kind of improved-type LCD baking vessel of organic steam removal efficiency characterized by comprising
Chamber has the opening/closing portion of opening and closing entrance to place glass substrate on hot plate, and is introduced and added by spitting unit
Hot gas is simultaneously discharged to discharge unit；And
Performance of ventilating improvement portion is set to the spitting unit and the heat gas that spues, and induces and generate in the chamber interior
The flow velocity of organic steam make it uniformly, and guide to the discharge unit.
2. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 1, which is characterized in that
Performance of ventilating improvement portion is provided with area corresponding with the inside cross-sectional area of the chamber.
3. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 1, which is characterized in that
Performance of ventilating improvement portion includes:
Flow velocity maintenance portion, is set to the spitting unit, impurity screening and declines pressure from heat gas, thus equably
Maintain the discharge flow velocity of heat gas；And
Nozzle box is set to the outside in flow velocity maintenance portion and introduces the heating gas supplied from air supply unit by connecting tube
Body, to guide to the chamber.
4. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 3, which is characterized in that
Flow velocity maintenance portion includes the filter of porous material.
5. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 4, which is characterized in that
The filter includes at least one of prefilter or high-efficiency particulate air filter.
6. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 3, which is characterized in that
Flow velocity maintenance portion includes the punched-plate for being formed with multiple punchings.
7. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 3, which is characterized in that
It is provided with heat gas guide portion on the inside of the nozzle box, adds for what will be supplied by the connecting tube to upside
The direction of hot gas is converted to towards side and guides to heat gas.
8. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 7, which is characterized in that
The heat gas guide portion includes:
Separating plate is arranged towards upside in the inside of the nozzle box, and divides to space；
Accommodating space portion is formed in downside based on the separating plate, accommodates the heat gas supplied from the connecting tube；
Insulating space portion, be formed in the accommodating space portion nozzle box side and the separating plate end it
Between, and heat gas is guided to upside；And
Guide space portion is converted in the direction of heat gas towards side in the insulating space portion, so that gas will be heated
Body is guided to flow velocity maintenance portion.
9. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 8, which is characterized in that
The separating plate includes:
Upper lower extension extends from the bottom surface of the inside of the nozzle box towards upside；And
Extension is guided, it is corresponding with the upper side of the nozzle box, from the upper lower extension towards the opposite side of the chamber
Extend, and is separated with the side of the nozzle box.
10. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 9, which is characterized in that
Flow velocity maintenance portion is set to the spitting unit of the chamber by setting unit.
11. the improved-type LCD baking vessel of organic steam removal efficiency according to claim 10, which is characterized in that
The setting unit includes housing section, and the housing section supports the edge in flow velocity maintenance portion and is arranged at the chamber
Room.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020170162562A KR20190063634A (en) | 2017-11-30 | 2017-11-30 | Organic vapor removal efficiency improvement type lcd bake chamber |
| KR10-2017-0162562 | 2017-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109848013A true CN109848013A (en) | 2019-06-07 |
| CN109848013B CN109848013B (en) | 2022-08-23 |
Family
ID=66848662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810789828.8A Active CN109848013B (en) | 2017-11-30 | 2018-07-18 | LCD baking chamber with improved organic vapor removal efficiency |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20190063634A (en) |
| CN (1) | CN109848013B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112099314A (en) * | 2020-11-10 | 2020-12-18 | 晶芯成(北京)科技有限公司 | Gas replacement device and photoresist baking equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140026899A (en) * | 2012-08-23 | 2014-03-06 | 주식회사 나래나노텍 | Gas intake and exhaust device and method for heat treatment of substrate, and heat treatment chamber and apparatus of substrate having the same |
-
2017
- 2017-11-30 KR KR1020170162562A patent/KR20190063634A/en not_active Application Discontinuation
-
2018
- 2018-07-18 CN CN201810789828.8A patent/CN109848013B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140026899A (en) * | 2012-08-23 | 2014-03-06 | 주식회사 나래나노텍 | Gas intake and exhaust device and method for heat treatment of substrate, and heat treatment chamber and apparatus of substrate having the same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112099314A (en) * | 2020-11-10 | 2020-12-18 | 晶芯成(北京)科技有限公司 | Gas replacement device and photoresist baking equipment |
| CN112099314B (en) * | 2020-11-10 | 2021-03-19 | 晶芯成(北京)科技有限公司 | Gas replacement device and photoresist baking equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109848013B (en) | 2022-08-23 |
| KR20190063634A (en) | 2019-06-10 |
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