CN109839351A - A kind of laser plated film film layer sticks system safety testing device and method - Google Patents
A kind of laser plated film film layer sticks system safety testing device and method Download PDFInfo
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- CN109839351A CN109839351A CN201711190397.5A CN201711190397A CN109839351A CN 109839351 A CN109839351 A CN 109839351A CN 201711190397 A CN201711190397 A CN 201711190397A CN 109839351 A CN109839351 A CN 109839351A
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Abstract
A kind of laser plated film film layer sticks system safety testing device and method, pedestal, mobile support saddle, clamp system, bracket, electron microscope, suction nozzle and nozzle height regulating mechanism, the laser of plated film is fixedly clamped by clamping and fixing device, and the angle of electron microscope is adjusted by angle adjustment device, the position that bar item is adjusted using mobile support saddle, makes the film plating layer of the upper end be located at the underface of suction nozzle.The position that suction nozzle is adjusted eventually by nozzle height regulating mechanism makes the bottom of suction hole inside suction nozzle be in contact with a bar film plating layer for upper end.The adsorption capacity generated by compressed air stream amount controller adsorbs film plating layer by suction nozzle.Suction nozzle is moved up by nozzle height regulating mechanism, observes whether film plating layer is detached from by display.It is tested relative to traditional tape method, this laser plated film film layer sticks system safety testing device will not generate pollution to film plating layer, and measured value is accurate and consistent.Effectively increase measurement efficiency and measurement accuracy.
Description
Technical field
The present invention relates to photoelectron technical fields, and in particular to a kind of laser plated film film layer sticks system safety testing device and side
Method.
Background technique
Since 1962 come out, semiconductor laser has all solid state, small in size, light-weight, long semiconductor laser
Service life, high efficiency, high reliablity and metal absorb the advantages that high to semiconductor laser, thus are widely used in Solid State Laser
Pumping, laser processing, laser cutting, precision detection and measurement, command, control, communications, and information processing, medical treatment and beauty, military affairs of device etc.
Aspect, and revolutionary breakthrough is caused in many fields, market demand and development potentiality are huge.
Under normal conditions, semiconductor laser natural cleavage plane forms resonance face, but the naturally cleaved reflection in face of laser
Rate is about 32%, and the laser for causing laser to generate has about 60% to slattern due to scattering from Cavity surface, and natural cleavage plane is in air
In it is easy to oxidize and by ambient contamination, to reduce the reliability of laser.
For this purpose, people use the optically coated method on laser natural cleavage plane, the light output function of laser is improved
Rate, and effective protection natural cleavage plane.
It falls off if Cavity surface optical film occurs in use in laser, will have a direct impact on the service life of laser, so
The adhesion between film and natural cleavage plane must be checked and rated after plated film.Three kinds are described in " Film Optics (fourth edition) "
Adhesion test method is adhesive tape test method, direct pull method of testing, scratch test respectively;Tape method is that adhesive tape is smooth
Ground is attached in film layer, is then lifted adhesive tape stabilization with the power perpendicular to film layer and is slowly removed, illustrates if film is removed thin
Film is less than adhesive tape to the adhesive force of film to the adhesive force of substrate;Direct pull method of testing be the genuine planar ends of connecting cylinder shape with
And then film layer is measured power needed for its pull-up, if film layer is separated with needle, the pulling force needed is exactly institute divided by the area of needle
The adhesiveness of survey;One load gauge head streaks film layer with the load being gradually increased when scratch is tested, and all can in each Secondary Shocks
Detect whether film layer has damage under microscope, load when film layer is removed completely is considered as the measurement of adhesiveness;By
Small in laser natural cleavage plane size, above several methods of testing are in the film layer adhesion test for laser cavity surface, glue
With method is to the adhesive tape area used every time and use lifts the angle of adhesive tape, speed has strict requirements to cause test result
Inaccuracy and adhesive tape pollution is introduced, direct labour method of testing can not directly quantify greatly, it has not been convenient to the deficiencies of operating,
In conclusion the above prior art introduces the disadvantages of polluting, is inaccurate, inconsistent when there is measurement film layer adhesion.
Summary of the invention
To overcome the above deficiencies, the invention provides a kind of not easy to pollute when measurement film layer adhesion, measurements
It is worth precisely consistent laser plated film film layer and sticks system safety testing device and method.
The present invention overcomes the technical solution used by its technical problem to be:
A kind of laser plated film film layer sticks system safety testing device, comprising:
Pedestal;
Mobile support saddle is mounted on the base;
Clamp system is set on mobile support saddle for bar item that is fixedly clamped, and mobile support saddle drives clamp system along front and back
To or left and right directions move horizontally;
Bracket is set on pedestal;
Electron microscope is connected and fixed by angle adjustment device and bracket, and angle adjustment device adjusts the bat of electron microscope
Angle is taken the photograph, display is connected to electron microscope;
Suction nozzle, is vertically arranged above bar item, and suction nozzle is connected to compressed air stream amount controller by suction pipe;And
Nozzle height regulating mechanism, driving suction nozzle move up and down, and make the plating of the bottom and bar upper end of suction hole inside suction nozzle
Film layer is in contact.
Further, above-mentioned mobile support saddle is microscope carrier, and it is micro- that driving is provided on the microscope carrier
The direction adjusting knob that mirror objective table front-rear direction or left and right directions move horizontally.
Further, above-mentioned clamp system includes the fixed block being fixed on mobile support saddle, by screw is installed on fixation
The movable block of block side, forms clip slot between the fixed block and movable block, described bar of item is located in clip slot.
Further, above-mentioned angle adjustment device includes the swing rod that cantilever tip is hingedly installed on by pin shaft, the electricity
Sub- microscope is installed on swing rod.
Further, said suction nozzle height adjustment mechanism includes the adjusting screw being combined on pedestal vertically, the suction pipe
By pivoted housing and adjust screw rotation connection.
It further, further include the locating convex block for being set to suction nozzle bottom, the bottom of suction hole and bar item inside suction nozzle
When upper end is in contact, locating convex block is in contact with the side of bar item.
A kind of laser plated film film layer adhesion test method, includes the following steps:
A) the laser bar item of plated film is clamped by clamp system;
B) shooting angle of electron microscope is adjusted by angle adjustment device, until showing at clearly film plating layer on display
Image;
C) position that bar item is adjusted by mobile support saddle, is located at the film plating layer of the upper end immediately below suction nozzle;
D) by nozzle height regulating mechanism, the bottom of suction hole inside suction nozzle is made to be in contact with a bar film plating layer for upper end;
E) compressed air stream amount controller is opened, is closed after adjusting vacuum degree to setting value;
F) by nozzle height regulating mechanism, increase suction nozzle, whether the film plating layer on logical display observation bar item falls off;
If g) film plating layer does not fall off, step d)-step f) is repeated, and improve vacuum degree setting value, until film plating layer falls off.
The beneficial effects of the present invention are: the laser of plated film is fixedly clamped by clamping and fixing device, and pass through angle
The angle that regulating device adjusts electron microscope is spent, the position of bar item is adjusted using mobile support saddle, makes the film plating layer position of the upper end
In the underface of suction nozzle.The position that suction nozzle is adjusted eventually by nozzle height regulating mechanism makes the bottom of suction hole inside suction nozzle
It is in contact with a bar film plating layer for upper end.The adsorption capacity generated by compressed air stream amount controller, by suction nozzle to film plating layer
It is adsorbed.Suction nozzle is moved up by nozzle height regulating mechanism, observes whether film plating layer is detached from by display.Relatively
It is tested in traditional tape method, this laser plated film film layer, which sticks system safety testing device, to generate pollution, measured value to film plating layer
It is accurate and consistent.Effectively increase measurement efficiency and measurement accuracy.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is the schematic view of the front view at suction nozzle position of the invention;
Fig. 3 is the present invention looks up structural representation at suction nozzle position of the invention;
Fig. 4 is the structural schematic diagram of clamp system of the invention;
Fig. 5 is that locating convex block of the invention is in contact the structural schematic diagram of state with bar side;
In figure, 1. pedestal, 2. microscope carrier, 3. direction adjusting knob, 4. clamping device, 5. bars of items, 6. suction pipe 7. is adjusted
13. display of screw 8. compressed air stream amount controller, 9. suction nozzle, 10. bracket, 11. pin shaft, 12. swing rod, 14. electronic display
43. screw of micro mirror 15. locating convex block, 16. suction hole, 41. fixed block, 42. movable block, 44. clip slot.
Specific embodiment
1 to attached drawing 5, the present invention will be further described with reference to the accompanying drawing.
As shown in attached drawing 1 and attached drawing 3, a kind of laser plated film film layer sticks system safety testing device, comprising: pedestal 1;Mobile branch
Seat, is installed on pedestal 1;Clamp system is set on mobile support saddle for bar item 5 that is fixedly clamped, and mobile support saddle drives folder
Tight mechanism is along the longitudinal direction or left and right directions moves horizontally;Bracket 10 is set on pedestal 1;Electron microscope 14, passes through angle
Regulating device is connected and fixed with bracket 10, and angle adjustment device adjusts the shooting angle of electron microscope 14, and display 13 connects
In electron microscope 14;Suction nozzle 9, is vertically arranged at 5 top of bar item, and suction nozzle 9 is connected to compressed air require control by suction pipe 6
Device 8;And nozzle height regulating mechanism, driving suction nozzle 9 move up and down, and make bottom and bar item 5 of 9 inside suction hole 16 of suction nozzle
The film plating layer of upper end is in contact.By the way that the laser of plated film is fixedly clamped by clamping and fixing device, and pass through angle tune
Regulating device adjusts the angle of electron microscope 14, and the position of bar item 5 is adjusted using mobile support saddle, is located at the film plating layer of the upper end
The underface of suction nozzle 9.The position that suction nozzle 9 is adjusted eventually by nozzle height regulating mechanism, makes the bottom of 9 inside suction hole 16 of suction nozzle
Portion is in contact with the film plating layer of 5 upper end of bar item.The adsorption capacity generated by compressed air stream amount controller 8 is plated by 9 Duis of suction nozzle
Film layer is adsorbed.Suction nozzle 9 is moved up by nozzle height regulating mechanism, observes whether film plating layer takes off by display 13
From.It is tested relative to traditional tape method, this laser plated film film layer, which sticks system safety testing device, to generate pollution to film plating layer,
Measured value is accurate and consistent.Effectively increase measurement efficiency and measurement accuracy.
Embodiment 1:
Further, mobile support saddle is microscope carrier 2, before driving microscope carrier 2 is provided on microscope carrier 2
The direction adjusting knob that rear direction or left and right directions move horizontally.Using microscope carrier 2 as mobile support saddle, its is at low cost,
It is easy to operate.
Embodiment 2:
As shown in Fig. 4, clamp system can be following structure comprising the fixed block 41 that is fixed on mobile support saddle passes through
Screw 43 is installed on the movable block 42 of 41 side of fixed block, and clip slot 44 is formed between fixed block 41 and movable block 42, and bar item 5 is located at
In clip slot 44.By rotary screw 43, make movable block 42 close to fixed block 41,44 width of clip slot made to narrow, can be realized to bar
Item 5 is fixedly clamped.
Embodiment 3:
Angle adjustment device can be following structure comprising the swing rod 12 on 10 top of bracket is hingedly installed on by pin shaft 11,
Electron microscope 14 is installed on swing rod 12.When needing to adjust the angle of microscope 14, by rotating swing rod 12, operation
It is convenient and simple.
Embodiment 4:
Nozzle height regulating mechanism can be following structure comprising the adjusting screw 7 being combined on pedestal 1 vertically, suction pipe 6 are logical
It crosses pivoted housing and adjusts screw 7 and be rotatablely connected.Turning adjusting screw 7 can drive suction pipe 6 to move up and down by pivoted housing.It realizes and inhales
The height adjustment of mouth 9.
Embodiment 5:
It further include the locating convex block 15 for being set to 9 bottom of suction nozzle as shown in attached drawing 2 and attached drawing 5, when 9 inside suction hole 16 of suction nozzle
When bottom is in contact with 5 upper end of bar item, locating convex block 15 is in contact with the side of bar item 5, and convex block 15 plays positioning action, side
The film plating layer of the side end face and the upper end of holding the right-angle structure and bar item 5 that are formed with the bottom surface of suction hole 16 forms right-angle structure phase
Matching facilitates completion to position, contacts the bottom surface of suction hole 16 preferably with film plating layer.
The invention further relates to a kind of laser plated film film layer adhesion test methods, include the following steps:
A) the laser bar item 5 of plated film is clamped by the clamp system in claim 1;
B) shooting angle of electron microscope 14 is adjusted by angle adjustment device, until showing clearly plated film on display 13
Image at layer;
C) position that bar item 5 is adjusted by mobile support saddle, is located at the film plating layer of the upper end immediately below suction nozzle 9;
D) by nozzle height regulating mechanism, the bottom of 9 inside suction hole 16 of suction nozzle is made to connect with the film plating layer of 5 upper end of bar item
Touching;
E) compressed air stream amount controller is opened, is closed after adjusting vacuum degree to setting value;
F) by nozzle height regulating mechanism, increase suction nozzle 9, whether the film plating layer that logical display 13 is observed on bar item 5 takes off
It falls;
If g) film plating layer does not fall off, step d)-step f) is repeated, and improve vacuum degree setting value, until film plating layer falls off,
Suction when film plating layer falls off on suction nozzle is the adhesiveness magnitude of film.
Aforesaid operations method is simple, the efficient consistency and stick for realizing that the test of laser plated film film layer adhesion measures
Attached property can magnitude.
Claims (7)
1. a kind of laser plated film film layer sticks system safety testing device characterized by comprising
Pedestal (1);
Mobile support saddle is installed on pedestal (1);
Clamp system is set on mobile support saddle for be fixedly clamped a bar item (5), and mobile support saddle drives clamp system before
Rear direction or left and right directions move horizontally;
Bracket (10) is set on pedestal (1);
Electron microscope (14) is connected and fixed by angle adjustment device and bracket (10), and angle adjustment device adjusts electronic display
The shooting angle of micro mirror (14), display (13) are connected to electron microscope (14);
Suction nozzle (9) is vertically arranged above a bar item (5), and suction nozzle (9) is connected to compressed air stream amount controller by suction pipe (6)
(8);And
Nozzle height regulating mechanism, driving suction nozzle (9) move up and down, make the bottom of the internal suction hole (16) of suction nozzle (9) with bar
The film plating layer of item (5) upper end is in contact.
2. laser plated film film layer according to claim 1 sticks system safety testing device, it is characterised in that: the mobile support saddle
For microscope carrier (2), driving microscope carrier (2) front-rear direction or a left side are provided on the microscope carrier (2)
The direction adjusting knob that right direction moves horizontally.
3. laser plated film film layer according to claim 1 sticks system safety testing device, it is characterised in that: the clamp system
Including be fixed on mobile support saddle fixed block (41), the movable block of fixed block (41) side is installed on by screw (43)
(42), clip slot (44) are formed between the fixed block (41) and movable block (42), described bar of item (5) is located in clip slot (44).
4. laser plated film film layer according to claim 1 sticks system safety testing device, it is characterised in that: the angular adjustment
Device includes the swing rod (12) that bracket (10) top is hingedly installed on by pin shaft (11), and the electron microscope (14) is installed on
On swing rod (12).
5. laser plated film film layer according to claim 1 sticks system safety testing device, it is characterised in that: the nozzle height
Regulating mechanism includes the adjusting screw (7) being combined on pedestal (1) vertically, and the suction pipe (6) is by pivoted housing and adjusts screw (7)
Rotation connection.
6. laser plated film film layer as claimed in any of claims 1 to 5 sticks system safety testing device, feature exists
In: it further include the locating convex block (15) for being set to suction nozzle (9) bottom, the bottom and bar item when the internal suction hole (16) of suction nozzle (9)
(5) when upper end is in contact, locating convex block (15) is in contact with the side of a bar item (5).
7. a kind of laser plated film film layer adhesion test method, which comprises the steps of:
A) the laser bar item (5) of plated film is clamped by the clamp system in claim 1;
B) shooting angle of electron microscope (14) is adjusted by angle adjustment device, until showing clearly on display (13)
Image at film plating layer;
C) position that bar item (5) are adjusted by mobile support saddle, is located at the film plating layer of the upper end immediately below suction nozzle (9);
D) by nozzle height regulating mechanism, make the bottom of the internal suction hole (16) of suction nozzle (9) and the film plating layer of bar item (5) upper end
It is in contact;
E) compressed air stream amount controller is opened, is closed after adjusting vacuum degree to setting value;
F) by nozzle height regulating mechanism, increase suction nozzle (9), the film plating layer in logical display (13) observation bar item (5) is
It is no to fall off;
If g) film plating layer does not fall off, step d)-step f) is repeated, and improve vacuum degree setting value, until film plating layer falls off.
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CN201711190397.5A CN109839351A (en) | 2017-11-24 | 2017-11-24 | A kind of laser plated film film layer sticks system safety testing device and method |
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