CN219843791U

CN219843791U - Alignment mounting equipment

Info

Publication number: CN219843791U
Application number: CN202320284638.7U
Authority: CN
Inventors: 邓章; 赖俊魁; 颜智德; 廖广兰; 宿磊
Original assignee: CYG Semiconductor Equipment Zhuhai Co Ltd
Current assignee: CYG Semiconductor Equipment Zhuhai Co Ltd
Priority date: 2023-02-21
Filing date: 2023-02-21
Publication date: 2023-10-17
Anticipated expiration: 2033-02-21

Abstract

The utility model discloses alignment mounting equipment, which comprises a base, a transfer device, an attaching device and a detection device, wherein the transfer device is used for transferring a plurality of substrates; the transfer device is arranged on the base and is provided with a material carrying table, a first fine adjustment assembly and a first rough adjustment assembly, the material carrying table is used for placing materials to be pasted and a substrate, and the first rough adjustment assembly is used for controlling the material carrying table to move; the attaching device comprises a suction nozzle which is in sliding fit with the base and is positioned above the material carrying platform; the detection device comprises a visual detection component and a display component, wherein the visual detection component is arranged above the suction nozzle, and the display component is arranged on the base and is in communication connection with the visual detection component. By arranging the transfer device and the detection device, the alignment defect caused by the position deviation of transfer and the deviation of the calibration of the visual component is eliminated, the mounting precision of mounting equipment is effectively improved, and the yield of products is improved.

Description

Alignment mounting equipment

Technical Field

The utility model relates to the field of alignment bonding, in particular to alignment bonding equipment.

Background

In the existing mounting equipment, before mounting, a first alignment characteristic point of a material to be mounted and a second alignment characteristic point of a mounting substrate are mainly calibrated by a visual calibration device, and then mounting is performed. Such mounting equipment cannot eliminate the positional deviation of transfer after alignment and the deviation of visual component calibration, and it is difficult to realize high-precision mounting.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides the alignment mounting equipment, which can effectively improve the mounting precision and the yield of products.

The alignment and mounting equipment comprises a base, a transfer device, an attaching device and a detection device; the transfer device is arranged on the base, and is sequentially provided with a material carrying platform, a first fine adjustment assembly and a first rough adjustment assembly along the vertical direction, wherein the material carrying platform is used for placing materials to be pasted and a substrate, and the first rough adjustment assembly is used for controlling the material carrying platform to move; the attaching device comprises a suction nozzle, the suction nozzle is in sliding fit with the base and is positioned above the material carrying platform, the base is provided with a driving piece, the output end of the driving piece is connected with the suction nozzle to drive the suction nozzle to move along the vertical direction, and the first fine adjustment component is used for controlling the alignment of the base plate on the material carrying platform and the suction nozzle; the detection device comprises a visual detection component and a display component, wherein the visual detection component is installed above the suction nozzle, the detection end of the visual detection component faces to the suction nozzle, and the display component is installed on the base and is in communication connection with the visual detection component.

The alignment mounting equipment provided by the embodiment of the utility model has at least the following beneficial effects: when the user uses the alignment mounting equipment, firstly, the material to be mounted and the substrate are placed on the material carrying platform, then the first coarse adjustment assembly is used for controlling the material carrying platform to move, so that the material to be mounted is moved to the position below the suction nozzle for suction, then the user uses the first coarse adjustment assembly again for controlling the material carrying platform to move, the substrate is moved to the position below the suction nozzle, the vision detection assembly can detect the first alignment characteristic point of the material to be mounted and the second alignment characteristic point of the position to be mounted on the substrate at the same time, then the user uses the first fine adjustment assembly for adjusting the position of the material carrying platform, and simultaneously observes the alignment condition of the first alignment characteristic point and the second alignment characteristic point displayed by the display assembly, adjusts the position of the substrate in real time until the first alignment characteristic point and the first alignment characteristic point are accurately aligned, and the suction nozzle descends and releases the material to be mounted, and the mounting of the material is completed. Through setting up and move and carry device and detection device, the user can observe the substrate and wait to paste the counterpoint condition of material, adjusts the material loading platform position simultaneously, and then carries out the calibration counterpoint to the substrate in real time, carries out the dress again after the calibration is accomplished and pastes, eliminates the counterpoint defect that the deviation that moves the position deviation and vision subassembly of moving and marks leads to, effectively improves the subsides accuracy of subsides dress equipment, improves the yields of product.

According to some embodiments of the utility model, the first coarse adjustment assembly comprises an X-axis sliding table and a Y-axis sliding table, the X-axis sliding table is in sliding fit with the base, the Y-axis sliding table is in sliding fit with the X-axis sliding table, the first fine adjustment assembly is connected with the Y-axis sliding table, the base is provided with a first driving rod for driving the X-axis sliding table to move along the X-axis direction, the X-axis sliding table is provided with a second driving rod for driving the Y-axis sliding table to move along the Y-axis direction.

According to some embodiments of the present utility model, the first fine adjustment assembly includes an X-axis fine adjustment member, a Y-axis fine adjustment member, and a rotation fine adjustment member, where the rotation fine adjustment member, the X-axis fine adjustment member, and the Y-axis fine adjustment member are sequentially disposed along a vertical direction, the Y-axis fine adjustment member is connected to the Y-axis sliding table, the rotation fine adjustment member is used to adjust a rotation angle of the loading table, the X-axis fine adjustment member includes a moving sliding table and a supporting sliding table, a cross roller guide rail is installed between the moving sliding table and the supporting sliding table, the moving sliding table is capable of moving along the X-axis direction, the supporting sliding table is connected to a first fine adjustment knob, the moving sliding table is installed with a pressing block, and a stopper rod of the first fine adjustment knob is disposed toward the pressing block.

According to some embodiments of the utility model, the support sliding table is provided with a limiting plate, the limiting plate and the first fine tuning knob are respectively positioned at two sides of the support sliding table, the limiting plate is provided with a limiting groove, the limiting groove is arranged along the moving direction of the moving sliding table, the moving sliding table is connected with a limiting pin, and the limiting pin penetrates through the limiting groove.

According to some embodiments of the utility model, the movable sliding table is provided with a first connecting column, the supporting sliding table is provided with a second connecting column, the first connecting column and the second connecting column are respectively positioned on one side opposite to the movable sliding table and the supporting sliding table, the first connecting column and the second connecting column are arranged at intervals along the X-axis direction, a reset spring is arranged between the movable sliding table and the supporting sliding table, and two ends of the reset spring are respectively connected with the first connecting column and the second connecting column.

According to some embodiments of the utility model, the rotary trimming member comprises a supporting table and a turntable, the material carrying table is connected with the turntable, the turntable is connected with the supporting table in a rotary mode, the supporting table is connected with the X-axis trimming member, the supporting table is connected with a second trimming knob and an elastic pressing head, one side of the turntable is provided with a swinging rod, and two sides of the swinging rod are respectively in butt joint with a plug rod of the second trimming knob and the elastic pressing head.

According to some embodiments of the utility model, a second fine adjustment assembly is arranged between the visual detection assembly and the mounting frame, and the second fine adjustment assembly is used for driving the visual detection assembly to move in the XZ plane.

According to some embodiments of the utility model, the base is provided with a second coarse adjustment assembly, the second coarse adjustment assembly is connected with a mounting plate, the second fine adjustment assembly is mounted on the mounting plate, and the second coarse adjustment assembly is used for driving the vision detection assembly to move in an XY plane.

According to some embodiments of the utility model, the loading platform is provided with a positioning protrusion matched with the shape of the substrate, and the positioning protrusion is provided with a suction hole.

According to some embodiments of the utility model, the loading platform is provided with a plurality of grooves matched with the shape of the material to be pasted, and the plurality of grooves are arranged around the positioning protrusion.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described with reference to the accompanying drawings and examples, in which:

fig. 1 is a schematic structural diagram of an alignment mounting device according to an embodiment of the present utility model;

fig. 2 is a schematic structural view of a transfer apparatus according to an embodiment of the present utility model;

FIG. 3 is an enlarged view at A in FIG. 2;

FIG. 4 is a schematic view of the structure of an X-axis fine tuning and a Y-axis fine tuning according to an embodiment of the present utility model;

FIG. 5 is a schematic view of another angle of the X-axis fine tuning and the Y-axis fine tuning according to an embodiment of the present utility model;

FIG. 6 is a cross-sectional view of an X-axis fine tuning of an embodiment of the present utility model;

fig. 7 is a schematic structural view of a visual inspection assembly according to an embodiment of the present utility model.

Reference numerals: a base 100; a transfer device 200; a limit groove 201; a groove 202; a loading table 210; positioning projections 211; a first trimming assembly 220; x-axis fine adjustment member 221; a moving slide 2211; a support slide 2212; cross roller track 2213; a first fine tuning knob 2214; a pressing block 2215; a limit plate 2216; limit pin 2217; a first connection post 2218; a second connection post 2219; y-axis fine tuning 222; rotating the trimming member 223; a support table 2231; turntable 2232; second fine tuning knob 2233; a resilient pressing head 2234; a swing rod 2235; a first coarse tuning component 230; an X-axis sliding table 231; a Y-axis sliding table 232; a first driving lever 233; a second drive lever 234; a return spring 240; attaching means 300; a suction nozzle 310; a driving member 320; a motor 321; a detection device 400; a visual detection component 410; a CCD unit 411; an optical lens 412; an illumination light source 413; a display assembly 420; a second trimming assembly 430; a second coarse tuning component 440; mounting plate 441.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

In the description of the present utility model, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present utility model and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.

In the description of the present utility model, a number means one or more, a number means two or more, and greater than, less than, exceeding, etc. are understood to not include the present number, and above, below, within, etc. are understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present utility model, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present utility model can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.

Referring to fig. 1, an alignment mounting apparatus according to an embodiment of the present utility model includes a base 100, a transfer device 200, an attaching device 300, and a detecting device 400; the transfer device 200 is installed on the base 100, the transfer device 200 is sequentially provided with a material carrying platform 210, a first fine adjustment assembly 220 and a first coarse adjustment assembly 230 along the vertical direction, specifically, the first coarse adjustment assembly 230 is connected with the base 100, the first fine adjustment assembly 220 is installed above the first coarse adjustment assembly 230, the material carrying platform 210 is installed above the first fine adjustment assembly 220, the material carrying platform 210 is used for placing materials to be pasted and a substrate, and the first coarse adjustment assembly 230 drives the first fine adjustment assembly 220 to move by driving the first fine adjustment assembly 220 to move, so that the material carrying platform 210 is controlled to move; the attaching device 300 comprises a suction nozzle 310, the suction nozzle 310 is in sliding fit with the base 100 and is positioned above the loading platform 210, the suction nozzle 310 can slide along the vertical direction, the base 100 is provided with a driving piece 320, the driving piece 320 is generally a ball screw linear module with high control precision and high movement stability, which is driven by a motor 321, the output end of the driving piece 320, namely a sliding table of the linear module, is connected with the suction nozzle 310 to drive the suction nozzle 310 to move along the vertical direction, the movement amplitude of the loading platform 210 which can be controlled by a first fine adjustment assembly 220 is smaller than the movement amplitude of the loading platform 210 which can be controlled by a first coarse adjustment assembly 230, and the first fine adjustment assembly 220 is used for controlling the alignment of a substrate on the loading platform 210 and the suction nozzle 310; the detection device 400 includes a visual detection component 410 and a display component 420, the visual detection component 410 is mounted above the suction nozzle 310, the visual detection component 410 is mainly composed of a CCD unit 411, an illumination light source 413 and an optical lens 412 which are sequentially arranged along the vertical direction, the optical lens 412 is used for shooting a substrate and a material to be pasted, the illumination light source 413 is used for providing an illumination working environment for the optical lens 412, the CCD unit 411 is used for analyzing and converting images shot by the optical lens 412, a detection end of the visual detection component 410, namely a camera of the optical lens 412, is arranged towards the suction nozzle 310, the display component 420 is mounted on the base 100 and is in communication connection with the visual detection component 410, the working depth of field of the optical lens 412 is larger than the distance between the pre-pasting height of the material to be pasted and the surface to be pasted, so that the visual detection component 410 can clearly image the first alignment feature point on the material to be pasted and the second alignment feature point on the substrate on the pre-pasting height, and the visual detection component 410 can image the first alignment feature point, the substrate and the second alignment feature point on the substrate on the display component 420.

It should be noted that, the display assembly 420 includes a display and a controller, the controller is used to control the start and stop of the driving element 320, after a user observes that the calibration of the first alignment feature point and the second alignment feature point is completed on the display, the driving element 320 can be controlled to start by using the controller, the driving element 320 drives the suction nozzle 310 to descend and then to perform the mounting operation, and the display and the controller can be separately arranged, i.e. the controller is an entity switch independent of the display, so that the arrangement can improve the use hand feeling of the user; the display and the controller can be integrated, namely, the display is a touch screen which can be operated by a touch screen, and the controller is an interactable program displayed on the touch screen, so that the intelligent degree of the mounting equipment can be effectively improved, and the operation convenience of the mounting equipment is improved.

It can be understood that when the user uses the alignment mounting device, firstly, the material to be mounted and the substrate are placed on the material loading platform 210, then, the first coarse adjustment component 230 is used to control the material loading platform 210 to move, the material to be mounted on the material loading platform 210 is moved below the suction nozzle 310, the driving component 320 is used to control the suction nozzle 310 to move down and suck the material to be mounted, after the suction nozzle 310 sucks the material to be mounted, the visual detection component 410 can clearly image the material to be mounted and the first alignment feature point on the material to be mounted, then, the suction nozzle 310 is lifted to the pre-mounting height of the first alignment feature point on the substrate and the second alignment feature point corresponding to the mounting position, then, the user again uses the first coarse adjustment component 230 to control the material loading platform 210 to move, the substrate is moved below the suction nozzle 310, the visual detection component 410 can simultaneously detect the first alignment feature point and the second alignment feature point, then, the user uses the first coarse adjustment component 220 to adjust the position of the first alignment feature point and the second alignment feature point, and the second fine adjustment component 320 is used to accurately adjust the alignment feature point to the first alignment feature point, and the alignment feature point is precisely aligned, and the alignment feature point is precisely adjusted, and the alignment feature is displayed. Through setting up and moving device 200 and detection device 400, make the counterpoint process of base plate and waiting to paste the material become accurate, visual, the user can observe the counterpoint condition of base plate and waiting to paste the material, adjust the material loading platform 210 position on one side, and then calibrate the counterpoint to the base plate in real time, wait to paste and paste the dress again after the second counterpoint feature point calibration of the first counterpoint feature point on the dress material and the dress position on the base plate is accomplished, adjust the base plate position in real time through first trimming assembly 220, thereby eliminate the positional deviation that moves, carry out real-time calibration to first counterpoint feature point and second counterpoint feature point through observing display assembly 420, thereby eliminate the counterpoint defect that the deviation that vision detection assembly 410 markd led to, effectively improve the dress precision of dress equipment, improve the yields of product.

Referring to fig. 1 and 2, it can be understood that the loading table 210 is provided with a positioning protrusion 211 matching the shape of the substrate, and the positioning protrusion 211 is provided with a suction hole (not shown in the drawings). The positioning bulge 211 is matched with the shape of the bottom surface of the substrate, namely the top surface of the positioning bulge 211 is matched with the shape and the size of the bottom surface of the substrate, a user can firstly place the substrate on the positioning bulge 211, then the bottom surface of the substrate is attached to the top surface of the positioning bulge 211, the projection of the bottom surface of the substrate and the projection of the top surface of the positioning bulge 211 are overlapped, then the suction hole is controlled to generate vacuum negative pressure to adsorb the substrate, and the positioning and the mounting of the substrate are completed, so that the substrate can be fixed, the problems of slight displacement, deflection and the like of the substrate in the moving process of the material carrying table 210 are avoided, the time cost required by the user for additionally adjusting the position of the substrate is reduced, and the subsequent material to be pasted and the substrate are convenient to align; on the other hand, the air holes are arranged to absorb or release the substrate, and the structure of the air holes corresponds to that of the suction nozzle 310, so that the consistency of the result of the mounting equipment is improved, and meanwhile, a user can conveniently load and unload the substrate, and further, the continuous operation of the mounting equipment is facilitated.

Further, the loading table 210 is provided with a plurality of grooves 202 matching with the shape of the material to be pasted, and the plurality of grooves 202 are arranged around the positioning protrusion 211. Through a plurality of recesses 202 that set up, the user can be before carrying out the dress operation, will wait to paste a plurality of material and place recess 202 in, can carry out dress operation in succession afterwards, only need through moving first coarse adjustment subassembly 230 cooperation suction nozzle 310 can reload the material loading, need not get the material from other places again, effectively improves the operating efficiency of equipment of pasting.

Referring to fig. 2 and 3, it can be understood that the rotary trimming member 223 includes a support table 2231 and a turntable 2232, the carrier table 210 is connected with the turntable 2232, the turntable 2232 is rotationally connected with the support table 2231, the support table 2231 is connected with the X-axis trimming member 221, the support table 2231 is connected with a second trimming knob 2233 and an elastic pressing head 2234, a swing rod 2235 is disposed on one side of the turntable 2232, and two sides of the swing rod 2235 are respectively abutted with a plug rod of the second trimming knob 2233 and the elastic pressing head 2234. The second fine tuning knob 2233 includes a rotatable and readable handle portion and a stopper slidably engaged with the handle portion, and the user can control the stopper to stretch and retract by rotating the handle portion, and the later-described first fine tuning knob 2214 is similar to the second fine tuning knob 2233 in structure, and the specific structure thereof can refer to the handle portion of the micrometer, which is not described herein. Through setting up second fine setting knob 2233, elasticity pressure head 2234 and pendulum rod 2235, the user rotates second fine setting knob 2233, make the stopper pole a small margin flexible, stopper pole and elasticity pressure head 2234 cooperation drive pendulum rod 2235 remove, and then drive revolving stage 2232 and rotate, realize the small margin angle modulation to carrying platform 210, second fine setting knob 2233 easy operation, control accurate stability, elasticity pressure head 2234 and pendulum rod 2235 cooperation are spacing to pendulum rod 2235 at the XY plane, and then avoid carrying platform 210 to appear not hard up rotatory scheduling problem after the fine setting, effectively improve carrying platform 210's job stabilization.

Referring to fig. 2 and 4, it may be understood that the first coarse adjustment assembly 230 includes an X-axis sliding table 231 and a Y-axis sliding table (the X-axis, the Y-axis, and the Z-axis are three axes perpendicular to each other in space, in this embodiment, the X-axis direction may also correspond to the length direction of the substrate, the Y-axis direction may also correspond to the width direction of the substrate, the Z-axis direction may also correspond to the up-down direction of the mounting substrate, and a suitable azimuth term will be described later herein, which will be described later herein in detail, is selected according to features that will be described later), the X-axis sliding table 231 is slidably engaged with the base 100, the Y-axis sliding table is slidably engaged with the X-axis sliding table 231, the first fine adjustment assembly 220 is connected with the Y-axis sliding table, the base 100 is slidably mounted with a first driving rod 233, the first driving rod 233 is slidably mounted along the X-axis direction, the first driving rod 233 is fixedly connected with the X-axis sliding table 231 to thereby drive the X-axis sliding table 231 to move along the X-axis direction, the X-axis sliding table 231 is slidably provided with a second driving rod 234, the second driving rod 234 is slidably along the Y-axis sliding table. In the primary mounting process, the user needs to move the material to be mounted under the suction nozzle 310, at this time, the user directly moves the first driving rod 233, so as to drive the X-axis sliding table 231 to move along the X-axis direction, thereby adjusting the displacement of the material to be mounted on the material carrying table 210 in the X-axis direction, the user directly moves the second driving rod 234, so as to drive the Y-axis sliding table to move along the Y-axis direction, thereby adjusting the displacement of the material to be mounted on the material carrying table 210 in the Y-axis direction, and by setting the first driving rod 233 and the second driving rod 234, the position of the material carrying table 210 can be quickly adjusted by the first driving rod 233 and the second driving rod 234, so that the suction nozzle 310 can quickly absorb the material to be mounted, and the operating efficiency of the mounting device is further improved while the structure of the first coarse adjusting assembly 230 is simplified.

It should be noted that, the plurality of grooves 202 are disposed around the positioning protrusion 211 and are also disposed along the circumferential direction of the loading platform 210 at intervals, that is, the long side and the short side of the loading platform 210 are both provided with the plurality of grooves 202 at intervals, at this time, the maximum sliding distance of the X-axis sliding table 231 is greater than the length of the loading platform 210, and the maximum sliding distance of the Y-axis sliding table is greater than the width of the loading platform 210, so that the first coarse adjustment assembly 230 can move each part of the top surface of the loading platform 210 below the suction nozzle 310, thereby avoiding the problem that the suction nozzle 310 cannot suck the material to be pasted at the corners of the loading platform 210, and improving the structural rationality of the pasting device.

Referring to fig. 4 and 5, it may be understood that the first fine tuning assembly 220 includes an X-axis fine tuning element 221, a Y-axis fine tuning element and a rotating fine tuning element 223, the X-axis fine tuning element 221 and the Y-axis fine tuning element are sequentially disposed along a vertical direction, the Y-axis fine tuning element is connected with a Y-axis sliding table, the rotating fine tuning element 223 is used for adjusting a rotation angle of the loading table 210, the X-axis fine tuning element 221 includes a moving sliding table 2211 and a supporting sliding table 2212, a cross roller guide rail 2213 is installed between the moving sliding table 2211 and the supporting sliding table 2212, the moving sliding table 2211 can move along the X-axis direction, a first fine tuning knob 2214 is connected to the supporting sliding table 2212, a pressing block 2215 is installed on the moving sliding table 2211, a plug rod of the first fine tuning knob 2214 is disposed toward the pressing block 2215, a structure of the Y-axis fine tuning assembly is similar to the X-axis fine tuning element 221, and a structure of the Y-axis fine tuning assembly can be quickly understood in combination with the drawings and the description about the X-axis fine tuning element 221. The crossed roller guide rail 2213 is composed of two guide rails with V-shaped roller tracks, roller retainer cylindrical rollers and the like, the cylindrical rollers which are arranged in a crossed manner reciprocate on the V-shaped roller track surface which is subjected to precise grinding, the load in all directions can be borne, high-precision and stable linear motion is realized, through the arrangement of the crossed roller guide rail 2213, the crossed roller guide rail 2213 is matched with the first fine adjustment knob 2214, a user can accurately and efficiently adjust the displacement of the material carrying table 210 in the X-axis direction, as the first fine adjustment assembly 220 basically adopts the high-precision driving shoulder of the fine adjustment knob to control the displacement in all directions, the first fine adjustment assembly 220 influences less variable of the substrate and material to be pasted, the operation precision of the pasting equipment is further improved, and in addition, the crossed roller guide rail 2213 can adapt to the reciprocating motion of the movable sliding table 2211, adapt to the long-term continuous operation of the pasting equipment, and effectively prolong the service life of the pasting equipment while improving the movement stability of the movable sliding table 2211.

Referring to fig. 5, it can be understood that the support sliding table 2212 is provided with a limiting plate 2216, the limiting plate 2216 and the first fine tuning knob 2214 are respectively located at two sides of the support sliding table 2212, the limiting plate 2216 is provided with a limiting groove 201, the limiting groove 201 is arranged along the moving direction of the moving sliding table 2211, the moving sliding table 2211 is connected with a limiting pin 2217, and the limiting pin 2217 is penetrated in the limiting groove 201. When the user uses the X-axis driving rod to control the X-axis sliding table 231 to move, the position of the material carrying table 210 can be directly observed, so that the substrate or the material to be pasted can be initially positioned, but when the user uses the first fine tuning knob 2214, the substrate, the material to be pasted, the first alignment feature point, the second alignment feature point and other images displayed by the component 420 are required to be observed and displayed at any time, at this moment, the attention of the user is not on the transfer device 200, once long-time operation is performed, the user can unconsciously rotate the first fine tuning knob 2214 all the time, the moving distance of the moving sliding table 2211 is increased, more time is required to be required to reset and adjust subsequently, and when the user uses the first fine tuning knob 2214 to control the moving sliding table 2211 to move, the limiting pin 2211 is set through setting the limiting plate 2216 and the limiting pin 2217, when the limiting pin 2217 moves to the end of the limiting groove 201, the wall of the limiting pin 2217 prevents the limiting pin 2217 from moving, the user cannot continue to rotate the first fine tuning knob 2214, and further, the user is reminded not to readjust adjust the moving sliding table 2211, and the user can reset the first fine tuning knob 2214, and the user can reset the moving position of the sliding table 2211 again, and the first fine tuning knob 2212 is further, and the user can further use the fine tuning to change the position of the moving table 2212, and the moving the sliding table 2212, and the user can further use the fine tuning device to be further conveniently and the fine tuning to move the sliding table 201.

Referring to fig. 6, it can be understood that the moving slide 2211 is provided with a first connection column 2218, the supporting slide 2212 is provided with a second connection column 2219, the first connection column 2218 and the second connection column 2219 are respectively located at opposite sides of the moving slide 2211 and the supporting slide 2212, the first connection column 2218 and the second connection column 2219 are arranged at intervals along the X-axis direction, a return spring 240 is arranged between the moving slide 2211 and the supporting slide 2212, and two ends of the return spring 240 are respectively connected with the first connection column 2218 and the second connection column 2219. Through setting up reset spring 240, the in-process that the user used first fine setting knob 2214 to control to remove slip table 2211, reset spring 240 always moves slip table 2211 through first spliced pole 2218 pullback, do not need the manual stopper rod butt who pushes away removal slip table 2211 messenger butt briquetting 2215 and first fine setting knob 2214 of user, save time cost and the human cost that the user required of doing the above-mentioned operation, further improve user's use experience degree, reset spring 240's resilience force and the stopper rod's of first fine setting knob 2214 butt pressure mutually support, fix a position removal slip table 2211 in X-axis direction (i.e. the slip direction who removes slip table 2211), effectively improve the job stabilization nature who removes slip table 2211, in addition, spacing pin 2217 and limiting plate 2216 cooperation restriction removal slip table 2211 of above-mentioned, still can avoid reset spring 240 to excessively stretch, effectively prolong reset spring 240's life.

Referring to fig. 7, it is understood that a second trimming member 430 is disposed between the visual inspection member 410 and the mounting frame, for driving the visual inspection member 410 to move in the XZ plane, and the second trimming member 430 and a third trimming member described later are similar to the first trimming member 220, and can be regarded as a reduced version of the first trimming member 220 without the rotating trimming member 223, only the second trimming member 430 is vertically disposed, and the user will understand with reference to the drawings and the foregoing description about the X-axis trimming member 221 and the Y-axis trimming member, which will not be repeated herein. Before the mounting operation, the user needs to adjust the distance between the visual detection component 410 and the suction nozzle 310, so that after the suction nozzle 310 adsorbs the material to be mounted, the visual detection component 410 can clearly image the material to be mounted and the first alignment feature point on the material to be mounted, so that the visual detection component 410 needs to be finely adjusted, the user can adjust the position of the visual detection component 410 along the X-axis direction and also adjust the position of the visual detection component 410 along the Z-axis direction, or the position of the visual detection component 410 is compositely adjusted along the X-axis direction and the Z-axis direction, the imaging of the visual detection component 410 is ensured to be clear, the user can observe the image acquired by the visual detection component 410 through the display component 420 conveniently, in addition, the user can adjust the position of the visual detection component 410 through the second fine adjustment component 430, so that the visual detection component 410 meets different imaging heights required by different materials to be mounted, the application range of mounting equipment is enlarged, and the product competitiveness of the mounting equipment is improved.

Further, the base 100 is provided with a second coarse adjustment assembly 440, the second coarse adjustment assembly 440 is connected to a mounting plate 441, the second fine adjustment assembly 430 is mounted to the mounting plate 441, and the second coarse adjustment assembly 440 is used for driving the visual inspection assembly 410 to move in the XY plane. Through setting up second coarse adjustment subassembly 440, the user is before using second fine adjustment subassembly 430 accurate adjustment visual inspection subassembly 410 position, can use second coarse adjustment subassembly 440 roughly to adjust visual inspection subassembly 410's position, first quick travel visual inspection subassembly 410, make the suction nozzle 310 appear the image in display module 420, rethread second fine adjustment subassembly 430 carefully adjust visual inspection subassembly 410's position, make the image in the display module 420 become high definition, second coarse adjustment subassembly 440 and second fine adjustment subassembly 430 cooperate, when increasing visual inspection subassembly 410 and adjusting the dimension, divide into two steps with visual inspection subassembly 410's position adjustment, coarse adjustment quick location visual inspection subassembly 410 earlier, fine setting accurate location visual inspection subassembly 410 again, make things convenient for the user to use visual inspection subassembly 410, further improve user's use experience.

The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.

Claims

1. An alignment mounting apparatus, comprising:

a base;

the transfer device is arranged on the base, and is sequentially provided with a material carrying platform, a first fine adjustment assembly and a first rough adjustment assembly along the vertical direction, wherein the material carrying platform is used for placing materials to be pasted and a substrate, and the first rough adjustment assembly is used for controlling the material carrying platform to move;

the attaching device comprises a suction nozzle, the suction nozzle is in sliding fit with the base and is positioned above the material carrying platform, the base is provided with a driving piece, the output end of the driving piece is connected with the suction nozzle to drive the suction nozzle to move along the vertical direction, and the first fine adjustment component is used for controlling the alignment of the base plate on the material carrying platform and the suction nozzle;

the detection device comprises a visual detection component and a display component, wherein the visual detection component is installed above the suction nozzle, the detection end of the visual detection component faces to the suction nozzle, and the display component is installed on the base and is in communication connection with the visual detection component.

2. The alignment mounting device of claim 1 wherein the first coarse adjustment assembly comprises an X-axis slide and a Y-axis slide, the X-axis slide is in sliding engagement with the base, the Y-axis slide is in sliding engagement with the X-axis slide, the first fine adjustment assembly is connected with the Y-axis slide, the base is provided with a first drive rod for driving the X-axis slide to move in the X-axis direction, the X-axis slide is provided with a second drive rod for driving the Y-axis slide to move in the Y-axis direction.

3. The alignment mounting device according to claim 2, wherein the first trimming assembly comprises an X-axis trimming member, a Y-axis trimming member and a rotating trimming member, the X-axis trimming member and the Y-axis trimming member are sequentially arranged in the vertical direction, the Y-axis trimming member and the Y-axis sliding table are connected, the rotating trimming member is used for adjusting the rotation angle of the loading table, the X-axis trimming member comprises a moving sliding table and a supporting sliding table, a cross roller guide rail is arranged between the moving sliding table and the supporting sliding table, the moving sliding table can move along the X-axis direction, the supporting sliding table is connected with a first trimming knob, the moving sliding table is provided with a pressing block, and a plug rod of the first trimming knob is arranged towards the pressing block.

4. The alignment mounting device according to claim 3, wherein the supporting sliding table is provided with a limiting plate, the limiting plate and the first fine tuning knob are respectively located at two sides of the supporting sliding table, the limiting plate is provided with a limiting groove, the limiting groove is arranged along the moving direction of the moving sliding table, the moving sliding table is connected with a limiting pin, and the limiting pin penetrates through the limiting groove.

5. The alignment mounting device according to claim 4, wherein the movable sliding table is provided with a first connecting column, the supporting sliding table is provided with a second connecting column, the first connecting column and the second connecting column are respectively located at opposite sides of the movable sliding table and the supporting sliding table, the first connecting column and the second connecting column are arranged at intervals along the X-axis direction, a return spring is arranged between the movable sliding table and the supporting sliding table, and two ends of the return spring are respectively connected with the first connecting column and the second connecting column.

6. The alignment mounting device according to claim 3, wherein the rotating fine adjustment member comprises a supporting table and a turntable, the material carrying table is connected with the turntable, the turntable is connected with the supporting table in a rotating manner, the supporting table is connected with the X-axis fine adjustment member, the supporting table is connected with a second fine adjustment knob and an elastic pressing head, one side of the turntable is provided with a swinging rod, and two sides of the swinging rod are respectively abutted with a plug rod and the elastic pressing head of the second fine adjustment knob.

7. The alignment mounting device of claim 1, wherein a second fine adjustment assembly is disposed between the vision inspection assembly and the base, and the second fine adjustment assembly is configured to drive the vision inspection assembly to move in the XZ plane.

8. The alignment mounting assembly of claim 7 wherein the base mounts a second coarse adjustment assembly, the second coarse adjustment assembly being coupled to a mounting plate, the second fine adjustment assembly being mounted to the mounting plate, the second coarse adjustment assembly being configured to drive the vision inspection assembly to move in the XY plane.

9. The alignment mounting device of claim 1 wherein the carrier is provided with a positioning protrusion matching the shape of the substrate, the positioning protrusion being provided with a suction hole.

10. An alignment mounting device as claimed in claim 9 wherein said carrier is provided with a plurality of recesses matching the profile of the material to be mounted, a plurality of said recesses being provided around said positioning projections.