CN109830412B - Novel nanometer cold cathode electron gun - Google Patents
Novel nanometer cold cathode electron gun Download PDFInfo
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- CN109830412B CN109830412B CN201910115489.XA CN201910115489A CN109830412B CN 109830412 B CN109830412 B CN 109830412B CN 201910115489 A CN201910115489 A CN 201910115489A CN 109830412 B CN109830412 B CN 109830412B
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Abstract
The invention belongs to the technical field of vacuum electron, and particularly provides a novel nanometer cold cathode electron gun, which comprises: the cathode is fixedly supported on the base through the lower insulating sleeve, and the second anode is fixedly supported on the cathode through the upper insulating sleeve; the cathode is an annular metal structure with an inverted frustum-shaped hollow cavity at the central position, and the inner surface of the cathode is provided with an annular nano cold cathode emission band; the first anode is fixed on the base, arranged in the hollow cavity of the cathode and positioned in the center of the hollow cavity. The invention adopts the field emission cold cathode to replace a hot cathode, and the cathode adopts a new structure, thereby not only ensuring that field emission electrons are not intercepted, but also achieving the purpose of reducing working voltage, and ensuring that the nano cold cathode material has enough emission area to emit current, thereby effectively solving the key scientific problem of effectively forming the field emission electron beam in the field emission application.
Description
Technical Field
The invention belongs to the technical field of vacuum electronics, relates to millimeter wave and terahertz wave source technology, and particularly provides a novel nanometer cold cathode electron gun.
Background
The electric vacuum radiation source device is a core device of modern electronic systems such as space communication, radar, electronic countermeasure, controllable thermonuclear fusion device, particle accelerator and the like, and plays an important role in national safety and national economy. The cathode and the electron optical system in the electric vacuum radiation source device occupy the most important position, the traditional device generally adopts a hot cathode system, and through decades of development, the hot cathode process is very mature and is widely applied to various electric vacuum devices, but the thermal emission cathode has the following remarkable defects: the structure is complex, the cost is high, the cathode system is composed of a plurality of metal and ceramic components, and because the hot cathode works in a high-temperature environment of thousands of degrees, a filament used for heating in the cathode is easy to break or short-circuit, so that the device is damaged; in addition, the heating power required results in system complexity, reduced system efficiency, and longer time to reach operating temperature.
The nanometer material is used as a field emission material with excellent performance, and compared with a hot cathode electron source, the nanometer cold cathode has the advantages of high reaction speed, high efficiency, small size, high reliability and the like; the performance of the electric vacuum device can be greatly improved. However, a key scientific problem still exists in the field emission application of the nano cathode material, and the problem is not solved: efficient formation of field emitted electron beams. Since field emission requires a strong electric field to be maintained on the cathode surface, the grid control structure inevitably requires a reduced cathode-grid spacing to enhance the surface electric field in order to reduce the operating voltage, which deteriorates the uniformity of the electric field below the grid hole, and field emission electrons are liable to bombard the grid, causing damage to the ignition, such as a pierce gun.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a nanometer cold cathode electron gun with a novel structure.
In order to achieve the purpose, the invention adopts the technical scheme that:
a novel nano cold cathode electron gun comprising: the cathode, the first anode, the second anode, the base, the upper insulating sleeve and the lower insulating sleeve; it is characterized in that the preparation method is characterized in that,
the cathode is fixedly supported on the base through the lower insulating sleeve, and the second anode is fixedly supported on the cathode through the upper insulating sleeve; the cathode is an annular metal structure with a hollow cavity at the center, the hollow cavity is in an inverted frustum shape, and the inner surface of the cathode is provided with an annular nanometer cold cathode emission band; the first anode is fixed on the base, arranged in the hollow cavity of the cathode and positioned in the center of the hollow cavity.
Further, the second anode is a tubular metal structure with an electron beam channel inside.
Further, the first anode is of a truncated cone-shaped metal structure.
Furthermore, the end face of the second anode close to the cathode is an inclined surface inclined towards the cathode direction, and a semicircular metal structure is arranged at the tail end of the inclined surface.
The upper end of the second anode can be hermetically connected with a high-frequency system to form an ultrahigh vacuum environment.
It should be noted that: the cathode can be formed by internally cutting a cylinder in a circular truncated cone, and the inner surface of the cathode is an internally-cut inclined surface.
The invention has the beneficial effects that:
the invention provides a novel nanometer cold cathode electron gun, wherein high potential is connected to a second anode and a first anode, the cathode is grounded, electrons are emitted from a cathode emission region to move obliquely downwards under the action of an electric field, and when the electrons reach the position of a horizontal axis, the voltage of the first anode and the voltage of the second anode are adjusted, so that the electrons cling to the axis to move forwards along an electron beam channel in the second anode under the action of a magnetic field. Compared with the traditional magnetic control electron gun, the electron gun does not need to add a magnetic field near the cathode, greatly simplifies the structure of the whole electron gun and ensures that the processing design is more convenient; the electron beam electron gun is different from a solid linear electron gun, the radius of the cross section of the electron beam formed by the electron gun can be effectively adjusted by effectively adjusting the voltages of the first anode and the second anode, even the cross section of the electron beam is a solid electron beam, so that the electron beam channel required by a device is reduced, and the efficiency of the device is greatly improved.
Drawings
FIG. 1 is a schematic diagram of a two-dimensional structure of a novel nano cold cathode electron gun according to the present invention; wherein: 1 is a base, 2 is a first anode, 3 is a cathode, 3-1 is an annular nanometer cold cathode emission band, 4 is a second anode, 5-1 is a lower insulating sleeve, and 5-2 is an upper insulating sleeve.
Fig. 2 and 4 are two-dimensional simulation diagrams of the electron gun according to the embodiment of the present invention (the upper half of the diagram is taken because the two-dimensional simulation diagrams are axially and radially symmetrical, respectively).
Fig. 3 and 5 are schematic diagrams of the distribution of the applied magnetic field along with the height of the device in the embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
The present embodiment provides a novel nano cold cathode electron gun, whose structure is shown in fig. 1, including: the cathode, the first anode, the second anode, the base, the upper insulating sleeve and the lower insulating sleeve; the cathode is fixedly supported on the base through the lower insulating sleeve, and the second anode is fixedly supported on the cathode through the upper insulating sleeve; the cathode is an annular metal structure with a hollow cavity at the center, the hollow cavity is in an inverted frustum shape, and the inner surface of the cathode is provided with an annular nanometer cold cathode emission band; the first anode is fixed on the base, arranged in the hollow cavity of the cathode and positioned in the center of the hollow cavity; the second anode is a tubular metal structure with an electron beam channel inside; the first anode is of a circular truncated cone-shaped metal structure; the end face of the second anode close to the cathode is an inclined surface inclined towards the cathode direction, and the tail end of the inclined surface is provided with a semicircular metal structure.
In this embodiment, the specific size parameters are set as follows: the upper radius of the annular nanometer cold cathode emission band is 2.8mm, the bottom radius is 2.95mm, the width is 0.3mm, and the distance between the tail end of the cathode and the left end face of the second anode is 2.35 mm; the inner radius of the tail end of the cathode is 3.5 mm; the radius of the bottom of the first anode is 0.2mm, the height radius is 0.5mm, and the length is 2 mm; the radius of the electron beam channel is 2.3 mm. The upper and lower insulating sleeves are made of No. 99 ceramic, and the base is made of stainless steel metal. The second anode is grounded, and when the voltage of the first anode is minus 3.0KV, the voltage of the cathode is minus 4.0 KV. The electron beam trajectory diagram, shown in fig. 2, is a hollow electron beam, and the magnetic field distribution applied by the electron gun is shown in fig. 3. The second anode is grounded, and when the voltage of the first anode is minus 5.0KV, the voltage of the cathode is minus 5.1 KV. As shown in fig. 4, an electron beam trajectory diagram of the novel nano cold cathode electron gun described herein is obtained, the electron beam moves along the electron beam channel in close contact with the axis to form a solid beam, and the applied magnetic field distribution diagram is shown in fig. 5. Compared with the starting time of a hot cathode which is as long as several minutes, the cold cathode electron gun of the design can realize quick starting. Compare in the hollow electron beam that traditional magnetic control electron gun formed, this design electron gun structure can effectively adjust electron beam radius size through adjusting first positive pole, second positive pole voltage and magnetic field, realizes solid electron beam even for this design electron gun uses more conveniently.
While the invention has been described with reference to specific embodiments, any feature disclosed in this specification may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise; all of the disclosed features, or all of the method or process steps, may be combined in any combination, except mutually exclusive features and/or steps.
Claims (5)
1. A nano-cold cathode electron gun, comprising: the cathode, the first anode, the second anode, the base, the upper insulating sleeve and the lower insulating sleeve; it is characterized in that the preparation method is characterized in that,
the cathode is fixedly supported on the base through the lower insulating sleeve, and the second anode is fixedly supported on the cathode through the upper insulating sleeve; the cathode is an annular metal structure with a hollow cavity at the center, the hollow cavity is in an inverted frustum shape, and the inner surface of the cathode is provided with an annular nanometer cold cathode emission band; the first anode is fixed on the base, arranged in the hollow cavity of the cathode and positioned in the center of the hollow cavity.
2. The nano-sized cold cathode electron gun as claimed in claim 1, wherein said nano-sized cold cathode electron gun is capable of generating electron beams having a cross section of a circular hollow or solid.
3. The nano cold cathode electron gun according to claim 1, wherein said first anode is a truncated cone shaped metal structure.
4. The nano-cold cathode electron gun according to claim 1, wherein said second anode is a tubular metal structure having electron beam channels therein.
5. The nano cold cathode electron gun according to claim 4, wherein the end surface of the second anode adjacent to the cathode is an inclined surface inclined toward the cathode, and a semicircular ring metal structure is provided at the end of the inclined surface.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102082062B (en) * | 2010-12-29 | 2013-03-06 | 清华大学 | Field emission display device |
| CN104319215B (en) * | 2014-11-05 | 2017-05-31 | 东南大学 | A kind of electron gun of the circular flat cold cathode of round platform and cylindricality combination gate hole structure |
| CN104810225B (en) * | 2015-05-26 | 2017-11-10 | 电子科技大学 | A kind of electron gun of grid external cold-cathode electron source array and its composition |
| CN106229246B (en) * | 2016-08-31 | 2018-10-23 | 安徽华东光电技术研究所 | Cold cathode electron gun of vacuum electron magnetron |
| CN107591300B (en) * | 2017-08-18 | 2019-09-17 | 电子科技大学 | One kind infusing cold cathode radiation source based on helical annular electronics |
| CN107527779B (en) * | 2017-08-18 | 2019-06-07 | 电子科技大学 | One kind infusing cold cathode radiation source based on spiral shape electronics |
| CN109065428B (en) * | 2018-08-16 | 2020-10-09 | 电子科技大学 | Double-gate control type cold cathode electron gun and preparation method thereof |
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