CN109817732A - A kind of method and device thereof preparing copper indium gallium selenide film battery - Google Patents
A kind of method and device thereof preparing copper indium gallium selenide film battery Download PDFInfo
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- CN109817732A CN109817732A CN201811557674.6A CN201811557674A CN109817732A CN 109817732 A CN109817732 A CN 109817732A CN 201811557674 A CN201811557674 A CN 201811557674A CN 109817732 A CN109817732 A CN 109817732A
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- substrate
- evaporation source
- selenium
- copper
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- 238000000034 method Methods 0.000 title claims abstract description 56
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 238000001704 evaporation Methods 0.000 claims abstract description 95
- 230000008020 evaporation Effects 0.000 claims abstract description 94
- 239000000758 substrate Substances 0.000 claims abstract description 91
- 229910052711 selenium Inorganic materials 0.000 claims abstract description 72
- 239000011669 selenium Substances 0.000 claims abstract description 72
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims abstract description 71
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 46
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims abstract description 44
- 229910052802 copper Inorganic materials 0.000 claims abstract description 44
- 239000010949 copper Substances 0.000 claims abstract description 44
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 44
- 229910052738 indium Inorganic materials 0.000 claims abstract description 39
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 39
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 33
- 239000011248 coating agent Substances 0.000 claims abstract description 31
- 238000000576 coating method Methods 0.000 claims abstract description 31
- 238000000137 annealing Methods 0.000 claims abstract description 19
- QNWMNMIVDYETIG-UHFFFAOYSA-N gallium(ii) selenide Chemical compound [Se]=[Ga] QNWMNMIVDYETIG-UHFFFAOYSA-N 0.000 claims abstract description 11
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000005477 sputtering target Methods 0.000 claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims description 42
- 238000004544 sputter deposition Methods 0.000 claims description 40
- 238000000151 deposition Methods 0.000 claims description 21
- 230000008021 deposition Effects 0.000 claims description 21
- IRPLSAGFWHCJIQ-UHFFFAOYSA-N selanylidenecopper Chemical compound [Se]=[Cu] IRPLSAGFWHCJIQ-UHFFFAOYSA-N 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 230000007613 environmental effect Effects 0.000 claims description 2
- 125000003748 selenium group Chemical group *[Se]* 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 60
- 239000010409 thin film Substances 0.000 abstract description 39
- 238000002360 preparation method Methods 0.000 abstract description 13
- 239000011521 glass Substances 0.000 description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 11
- 239000007789 gas Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 7
- 230000008901 benefit Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000005361 soda-lime glass Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- CDZGJSREWGPJMG-UHFFFAOYSA-N copper gallium Chemical compound [Cu].[Ga] CDZGJSREWGPJMG-UHFFFAOYSA-N 0.000 description 3
- 229910000807 Ga alloy Inorganic materials 0.000 description 2
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- WURBVZBTWMNKQT-UHFFFAOYSA-N 1-(4-chlorophenoxy)-3,3-dimethyl-1-(1,2,4-triazol-1-yl)butan-2-one Chemical compound C1=NC=NN1C(C(=O)C(C)(C)C)OC1=CC=C(Cl)C=C1 WURBVZBTWMNKQT-UHFFFAOYSA-N 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811557674.6A CN109817732A (en) | 2018-12-19 | 2018-12-19 | A kind of method and device thereof preparing copper indium gallium selenide film battery |
Applications Claiming Priority (1)
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CN201811557674.6A CN109817732A (en) | 2018-12-19 | 2018-12-19 | A kind of method and device thereof preparing copper indium gallium selenide film battery |
Publications (1)
Publication Number | Publication Date |
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CN109817732A true CN109817732A (en) | 2019-05-28 |
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Family Applications (1)
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CN201811557674.6A Pending CN109817732A (en) | 2018-12-19 | 2018-12-19 | A kind of method and device thereof preparing copper indium gallium selenide film battery |
Country Status (1)
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CN (1) | CN109817732A (en) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090101192A1 (en) * | 2007-10-19 | 2009-04-23 | Qualcomm Incorporated | Photovoltaic devices with integrated color interferometric film stacks |
CN101740660A (en) * | 2008-11-17 | 2010-06-16 | 北京华仁合创太阳能科技有限责任公司 | Copper indium gallium selenium (CIGS) solar cell, film of absorbing layer thereof, method and equipment for preparing film |
CN101985734A (en) * | 2010-11-12 | 2011-03-16 | 河南师范大学 | Method for preparing copper-indium-gallium-selenium film |
CN102254998A (en) * | 2011-07-18 | 2011-11-23 | 中国科学院深圳先进技术研究院 | Cadmium-free CuInGaSe thin film solar cell assembly and preparing method of zinc sulfide buffer layer thin film thereof |
CN102569508A (en) * | 2011-12-29 | 2012-07-11 | 中山大学 | Thin-film solar photovoltaic cell with nano wire array structure and preparation method for thin-film solar photovoltaic cell |
CN103343323A (en) * | 2013-07-03 | 2013-10-09 | 深圳先进技术研究院 | Preparation method of copper-indium-gallium-selenium film |
CN105679861A (en) * | 2016-01-20 | 2016-06-15 | 浙江大学 | Surface-plasma-enhanced two-dimensional material/semiconductor heterojunction solar cell and preparation method therefor |
CN106929806A (en) * | 2016-10-25 | 2017-07-07 | 广东振华科技股份有限公司 | High-barrier nano inorganic non-metallic film, its preparation method and vacuum winding filming equipment |
-
2018
- 2018-12-19 CN CN201811557674.6A patent/CN109817732A/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090101192A1 (en) * | 2007-10-19 | 2009-04-23 | Qualcomm Incorporated | Photovoltaic devices with integrated color interferometric film stacks |
CN101740660A (en) * | 2008-11-17 | 2010-06-16 | 北京华仁合创太阳能科技有限责任公司 | Copper indium gallium selenium (CIGS) solar cell, film of absorbing layer thereof, method and equipment for preparing film |
CN101985734A (en) * | 2010-11-12 | 2011-03-16 | 河南师范大学 | Method for preparing copper-indium-gallium-selenium film |
CN102254998A (en) * | 2011-07-18 | 2011-11-23 | 中国科学院深圳先进技术研究院 | Cadmium-free CuInGaSe thin film solar cell assembly and preparing method of zinc sulfide buffer layer thin film thereof |
CN102569508A (en) * | 2011-12-29 | 2012-07-11 | 中山大学 | Thin-film solar photovoltaic cell with nano wire array structure and preparation method for thin-film solar photovoltaic cell |
CN103343323A (en) * | 2013-07-03 | 2013-10-09 | 深圳先进技术研究院 | Preparation method of copper-indium-gallium-selenium film |
CN105679861A (en) * | 2016-01-20 | 2016-06-15 | 浙江大学 | Surface-plasma-enhanced two-dimensional material/semiconductor heterojunction solar cell and preparation method therefor |
CN106929806A (en) * | 2016-10-25 | 2017-07-07 | 广东振华科技股份有限公司 | High-barrier nano inorganic non-metallic film, its preparation method and vacuum winding filming equipment |
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Address after: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 100176 3rd floor, 11th floor, 11 Kangding street, Daxing District, Beijing Applicant before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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