CN109799367A - A kind of four probe atomic force microscope of laser detection formula - Google Patents
A kind of four probe atomic force microscope of laser detection formula Download PDFInfo
- Publication number
- CN109799367A CN109799367A CN201910212150.1A CN201910212150A CN109799367A CN 109799367 A CN109799367 A CN 109799367A CN 201910212150 A CN201910212150 A CN 201910212150A CN 109799367 A CN109799367 A CN 109799367A
- Authority
- CN
- China
- Prior art keywords
- laser
- probe
- sample
- atomic force
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The present invention relates to atomic force microscope technology fields, disclose a kind of four probe atomic force microscope of laser detection formula.The four probe atomic force microscope of laser detection formula includes two groups of first laser components, two groups of second laser components, two group of first probe assembly, two group of second probe assembly and optical module, first laser component includes the first laser device for emitting first laser, second laser component includes the second laser for emitting second laser, first laser is different from the direction of second laser, optical module can make first laser focus on the first probe, and second laser can be made to focus on the second probe.The present invention uses four groups of probe assemblies, eliminates influence of the contact resistance to sample intrinsic resistivity, and the intrinsic electrical properties of sample can be obtained by one-shot measurement；Every group of probe assembly can select the probe of different function, realize and characterize to the synchronous of the multiple physical fields properties such as sample the same area heat, electricity.
Description
Technical field
The present invention relates to four probe atomic force microscopies of atomic force microscope technology field more particularly to a kind of laser detection formula
Mirror.
Background technique
Atomic force microscope (Atomic Force Microscope, AFM) is micro/nano-scale morphology characterization, physical measurement
And the important tool of micro-nano operation.It include probe tip and micro-cantilever in the light channel structure of atomic force microscope, probe tip is solid
It is scheduled on micro-cantilever, there are interaction force, the interaction forces between the atom of probe tip and the atom on sample surface
Change with the variation of two interatomic distances, and the interaction force can cause micro-cantilever deformation, be feedback with the deformation quantity,
The atom of probe tip and interatomic apart from constant, the shifting on sample surface are controlled by adjusting the up and down motion of probe
Dynamic probe moves it on the surface of sample, the run trace of probe can representative sample three-dimensional appearance information.
Atomic force microscope is divided into two class of self-test and laser detection according to the difference of testing mechanism, and self-test uses certainly
Detecting element (self-test probe) Lai Shixian；Laser detection utilizes optical lever detection method, and detection sensitivity is high, without integrating certainly
Detecting element, the requirement to probe is low, can not only be compatible with common silicon manufacturing probe, moreover it is possible to compatibility function probe, such as thermoelectricity
Idol, magnetics probe etc., selectivity are wide.
Existing laser detection formula atomic force microscope only supports double probe configuration modes, surveys when using this configuration mode
When measuring electricity transport property, the contact resistance between needle point and sample is larger, can not ignore, and probe spacing need to be varied multiple times
Afterwards, sample intrinsic resistivity is extracted using data fitting, it is relatively complicated, reduce detection efficiency.
Summary of the invention
Based on the above, the purpose of the present invention is to provide a kind of four probe atomic force microscope of laser detection formula, with
Connecing between needle point and sample when solving existing laser detection formula invention provides a double-probe atomic power measurement electricity transport property
The problem that electric shock resistance is larger, complex for operation step, detection efficiency is low.
In order to achieve the above object, the invention adopts the following technical scheme:
A kind of four probe atomic force microscope of laser detection formula, comprising:
First laser component comprising first laser device, the first laser device is for emitting first laser；
Second laser component comprising second laser, the second laser is for emitting second laser, and described first
Laser is different from the direction of the second laser；
First probe assembly comprising the first probe, first probe include the first micro-cantilever；
Second probe assembly comprising the second probe, second probe include the second micro-cantilever；
Optical module, the optical module can be such that the first laser focuses on first micro-cantilever, and can
Focus on the second laser on second micro-cantilever；
The first laser component, the second laser component, first probe assembly and second probe assembly
Quantity be two groups.
Further, the optical module includes edge of a knife prism, object lens beam splitter and object lens, and the first laser successively passes through
The edge of a knife prism and the object lens beam splitter are reflected into the object lens, and the Refractive focusing through the object lens is in described
On first micro-cantilever.
Further, the second laser component further includes laser beam splitter mirror, and the second laser is successively through the laser
Beam splitter, the edge of a knife prism and the object lens beam splitter are reflected into the object lens, and through the refraction of the object lens poly-
Coke is on second micro-cantilever.
It further, further include inverted sample stage component, the sample stage component is for positioning sample.
Further, the sample stage component includes pedestal and the sample positioning stage that is fixed on the pedestal, the sample
Product positioning table is located at below the pedestal, and the sample positioning stage is for positioning the sample.
Further, the sample positioning stage includes three-dimensional manometer positioning table and horizontal micron positioning table, three wiener
Rice positioning table is mounted on the pedestal, and the three-dimensional manometer positioning table is configured in three-dimensional space motion, the water
Flat micron positioning table is installed on the three-dimensional manometer positioning table, and the horizontal micron positioning table is configured in horizontal plane
Upper movement.
Further, further include support component and lifting assembly, the lifting assembly for adjust the support component with
The distance and tilt angle of the sample stage component.
Further, the lifting assembly includes screw rod and the first connector, and first connector is fixed on the base
On seat, first connector has groove, and the screw rod has first end, and the first end is hemispherical, the first end
It is arranged in the groove.
It further, further include optical visual module, the optical module further includes object lens reflective mirror, the optical visual
Module is regarded by the microoptic that the object lens reflective mirror obtains the sample, first probe and second probe
Figure.
It further, further include four groups of opto-electronic receiver components, wherein described in opto-electronic receiver component described in two groups and two groups
One probe assembly is arranged in a one-to-one correspondence, and opto-electronic receiver component described in another two groups is set with the one-to-one correspondence of the second probe assembly described in two groups
It sets.
The invention has the benefit that
The present invention uses four groups of probe assemblies, and the contact resistance between needle point and sample becomes smaller, and eliminates contact resistance
Influence to sample intrinsic resistivity, and the intrinsic electrical properties of sample can be obtained by one-shot measurement；
Every group of probe assembly can select probe of different function, such as thermocouple, electricity probe etc., realize to the same area of sample
The synchronous characterization of the multiple physical fields properties such as domain heat, electricity；Two groups of first laser components and two groups of second laser components share one group
Optical module, it is compact-sized.
Detailed description of the invention
It, below will be to required in embodiment description in order to illustrate more clearly of the technical solution of embodiment of the present invention
The attached drawing used is briefly described, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the present invention, right
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
His attached drawing.Wherein:
Fig. 1 is the structural representation for the four probe atomic force microscope of laser detection formula that the specific embodiment of the invention provides
Figure；
Fig. 2 is the structural schematic diagram for the sample stage component that the specific embodiment of the invention provides；
Fig. 3 is the partial structure diagram for the detection module that the specific embodiment of the invention provides；
Fig. 4 is the optical path signal for the four probe atomic force microscope of laser detection formula that the specific embodiment of the invention provides
Figure；
Fig. 5 is the cutting schematic diagram for the probe that present embodiment provides；
Fig. 6 is the partial enlarged view of part A in Fig. 5.
In figure:
11- first laser component；12- second laser component；The first probe assembly of 13-；The second probe assembly of 14-；15- light
Learn component；16- sample stage component；17- sample；18- support component；19- lifting assembly；20- opto-electronic receiver component；21-
Optical visual module；
100- probe base；101- probe tip；
111- first laser device；112- first laser；The first adjusting bracket of 113-；121- second laser；122- second swashs
Light；123- laser beam splitter mirror；The first micro-cantilever of 131-；132- first clamping member；133- the first probe positioning table；141- second is pressed from both sides
Gripping member；142- the second probe positioning table；151- edge of a knife prism；152- object lens beam splitter；153- object lens；154- object lens reflective mirror；
161- pedestal；162- sample positioning stage；The first support plate of 181-；The second support plate of 182-；The first support column of 183-；The bottom 184-
Seat；The second support column of 185-；191- screw rod；The first connector of 192-；The second connector of 193-；201- photodetector；202-
Regulating part；
1331- the first probe nano positioning table；1332- the first Z axis micron positioning table；1333- the first probe level micron
Positioning table；1621- three-dimensional manometer positioning table；1622- level micron positioning table；1921- groove.
Specific embodiment
The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.It is understood that this place
The specific embodiment of description is used only for explaining the present invention rather than limiting the invention.In addition it should be noted that, in order to
Convenient for describing, only the parts related to the present invention are shown rather than entire infrastructure in attached drawing.
As shown in figs 1 to 6, present embodiment provides a kind of four probe atomic force microscope of laser detection formula, laser inspection
Four probe atomic force microscope of survey formula includes detection module and sample stage module, and detection module is used to detect the variation of laser, with
The physical field property and topographical information of sample 17 are obtained, sample stage module is for positioning sample 17 and support detection mould
Block.
As shown in Figure 1, sample stage module includes support component 18, support component 18 is used to support other modules.Specifically,
Support component 18 includes the first support plate 181 and the second support plate 182, and the first support plate 181 is located in the second support plate 182
Side, the first support plate 181 and the second support plate 182 are connected by the first support column 183.Further, first support column 183
Quantity is three, is uniformly distributed in the second support plate 182.But for the quantity of the first support column 183 in present embodiment
It is not construed as limiting, as long as connection function can be played and reinforce bonding strength.
Further, support component 18 further includes pedestal 184, and pedestal 184 is located at below the second support plate 182, and second
Fagging 182 and pedestal 184 are connected by the second support column 185.Further, the quantity of the second support column 185 is three, uniformly
It is distributed on pedestal 184.But the quantity of the second support column 185 is not construed as limiting in present embodiment, as long as can play
Connection function and reinforcement bonding strength.
Space is divided into three layers by support component 18, that is, includes the first space, second space and third space, the first space
For the space of the top of the first support plate 181, space of the second space between the first support plate 181 and the second support plate 182, the
Space of three spaces between the second support plate 182 and pedestal 184 increases support strength using the setting of this interlayer type,
And space is rationally utilized.
As depicted in figs. 1 and 2, sample stage module further includes inverted sample stage component 16, and sample stage component 16 is for fixed
Position sample 17, and sample stage component 16 is located in the first space.Sample stage component 16 uses inverted mode, is conveniently replaceable
Sample 17.
Further, sample stage component 16 includes pedestal 161 and the sample positioning stage 162 being fixed on pedestal 161, sample
Positioning table 162 is located at 161 lower section of pedestal, and sample positioning stage 162 is for positioning sample 17.
Specifically, sample positioning stage 162 includes three-dimensional manometer positioning table 1621 and horizontal micron positioning table 1622, three wieners
Rice positioning table 1621 is installed on pedestal 161, and horizontal micron positioning table 1622 is installed on three-dimensional manometer positioning table 1621, horizontal
Sample 17 is located on micron positioning table 1622.
Three-dimensional manometer positioning table 1621 is configured in three-dimensional space motion, and three-dimensional manometer positioning table 1621 is responsible for quilt
The movement of the 17 small stroke (< 100 microns) of high-precision of sample.In present embodiment, for three-dimensional manometer positioning table 1621 three
Dimension space movement implementation be not construed as limiting, as long as be able to drive three-dimensional manometer positioning table 1621 three-dimensional space motion i.e.
It can.Preferably, X-axis pedestal, Y-axis pedestal and Z axis pedestal be can be set, on X-axis pedestal fixed pedestal 161, Y-axis pedestal is along X-axis
Pedestal sliding, Z axis pedestal are slided along Y-axis pedestal, fix the three-dimensional manometer positioning table 1621 on Z axis pedestal.
Horizontal micron positioning table 1622 is configured to move in the horizontal plane, and horizontal micron positioning table 1622 is responsible for quilt
The movement of the big stroke of sample 17.Three-dimensional manometer positioning table 1621 and the mutual cooperation of horizontal micron positioning table 1622 can be realized milli
The Sample location of meter ruler cun nano-precision.In present embodiment, for horizontal micron positioning table 1622 horizontal plane motion reality
Existing mode is not construed as limiting, as long as being able to drive horizontal micron positioning table 1622 in horizontal plane motion.Preferably, Ke Yishe
X-axis pedestal and Y-axis pedestal are set, X-axis pedestal is fixed on three-dimensional manometer positioning table 1621, and Y-axis pedestal is slided along X-axis pedestal, Y-axis base
The horizontal micron positioning table 1622 is fixed on seat.
Sample stage module further includes lifting assembly 19, by lifting assembly 19 by sample stage component 16 and the first support plate
181 connections, and lifting assembly 19 can adjust distance and tilt angle of the sample stage component 16 relative to the first support plate 181.
Further, lifting assembly 19 includes screw rod 191, and screw rod 191 has a first end and a second end, first end and pedestal
161 connections, second end are connect with support component 18.
Specifically, lifting assembly 19 further includes the first connector 192, and the first connector 192 is fixed on pedestal 161, the
A connection piece 192 has groove 1921, and first end is hemispherical, and first end is set in groove 1921.Hemispherical first
End meets precise motion constraint with groove 1921, improves the precision of constraint.It is such setting so that sample stage component 16 with
Support component 18 separates, and convenient for the mounting and adjusting of sample 17, position error is up to micron level.
Accordingly, lifting assembly 19 further includes the second connector 193, and the second connector 193 is fixed on the first support plate 181
On, the second end of screw rod 191 is connect with the second connector 193.By the rotation of screw rod 191, so that sample stage component 16 is along perpendicular
Histogram is to movement to achieve the purpose that adjustment.
Preferably, the quantity of lifting assembly 19 is three groups, the distribution in equilateral triangle in the first support plate 181.But
The quantity of lifting assembly 19 is not construed as limiting in present embodiment, as long as lift action can be played and reinforce bonding strength i.e.
It can.Further, groove 1921 is V-groove and/or half-conical slot.But present embodiment is not made the shape of groove 1921
It limits, as long as first end and groove 1921 is enabled to meet precise motion constraint.
As shown in figures 1 and 3, detection module includes the first probe assembly 13 and the second probe assembly 14, the first probe groups
Part 13 and the second probe assembly 14 are used for and the surface of sample 17 generates interaction force, to obtain the shape of sample 17
Looks and physical field information.First probe assembly 13 and the second probe assembly 14 are respectively positioned in the first space, and the first probe assembly
13 and second probe assembly 14 be located between sample stage component 16 and the first support plate 181.
Detection module further includes first laser component 11 and second laser component 12, first laser component 11 and second laser
Component 12 is for emitting laser.First laser component 11 and second laser component 12 are respectively positioned in third space.
Detection module includes first detection module, the second detection module and optical module 15, and first detection module includes two
The first detection components of group, two group of first detection components are oppositely arranged.Every group of first detection components include 11 He of first laser component
First probe assembly 13, first laser component 11 include first laser device 111, and first laser device 111 is for emitting first laser
112, the first probe assembly 13 includes the first probe, and the first probe includes the first micro-cantilever 131 and the first probe tip, and first visits
Needle needle point is fixed on the first micro-cantilever 131.
Correspondingly, the second detection module includes two group of second detection components, and two group of second detection components is oppositely arranged.Second
Detection components include second laser component 12 and the second probe assembly 14, and second laser component 12 includes second laser 121, the
Dual-laser device 121 includes the second probe for emitting second laser 122, the second probe assembly 14, and the second probe includes second micro-
Cantilever and the second probe tip, the second probe tip are fixed on the second micro-cantilever.First detection module and the second detection module
One group of optical module 15 is shared, optical module 15 can be such that first laser 112 focuses on the first micro-cantilever 131, and can make
Second laser 122 focuses on the second micro-cantilever.That is, detection module includes four groups of laser modules and four groups of probe groups
Part, and laser module and probe assembly are arranged in a one-to-one correspondence.Specifically, four groups of probe assemblies are respectively positioned in the first support plate 181
Side.
The four probe atomic force microscope of laser detection formula that present embodiment provides uses four groups of probe assemblies, the needle of probe
Contact resistance between point and sample 17 becomes smaller, and eliminates influence of the contact resistance to the intrinsic resistivity of sample 17,
And the intrinsic electrical properties of sample 17 can be obtained by one-shot measurement；Every group of probe assembly can select different function
The probe, such as thermocouple, electricity probe etc. of energy, are realized to multiple physical fields properties such as 17 the same area heat of sample, electricity
Synchronous characterization；Two groups of first laser components 11 and two groups of second laser components 12 share one group of optical module 15, compact-sized.
Specifically, first detection module and the second detection module interlaced arrangement, so that first laser 112 and second laser
122 direction is different.Preferably, four probes are distributed in " ten " font, still, in present embodiment, for the first detection mould
The specific installation site of block and the second detection module is not construed as limiting, as long as being able to detect the variation of four beam laser to obtain detected sample
The physical field property and topographical information of product 17.
As shown in Figure 1 and Figure 4, optical module 15 include edge of a knife prism 151, object lens beam splitter 152 and object lens 153, first
Successively being reflected into object lens 153 through edge of a knife prism 151 and object lens beam splitter 152, and the refraction through object lens 153 of laser 112
It focuses on the first micro-cantilever 131.
Further, second laser component 12 further includes laser beam splitter mirror 123, and second laser 122 is successively through laser beam splitter
Mirror 123, edge of a knife prism 151 and object lens beam splitter 152 are reflected into object lens 153, and the Refractive focusing through object lens 153 is in
On two micro-cantilevers.
Detection module further includes opto-electronic receiver component 20, the corresponding one group of opto-electronic receiver component 20 of every group of probe assembly.Every beam
For the laser focused on probe by being reflected into opto-electronic receiver component 20, opto-electronic receiver component 20 is able to detect the change of laser
Change.Since the setting angle of four groups of probe assemblies is different, four beam the reflected beams can separate one by one, keep its four optical path mutually indepedent,
And it will not interfere.
Specifically, opto-electronic receiver component 20 includes photodetector 201, and every beam focuses on the laser on probe by reflection
Into in photodetector 201, photodetector 201 is able to detect the variation of laser.Optionally, photodetector 201 can be with
It is placed between probe and object lens 153, it can also be in the outside of object lens 153, present embodiment, to photodetector 201
Position be not construed as limiting, as long as being able to detect the variation of laser.
Further, opto-electronic receiver component 20 further includes regulating part 202, and regulating part 202 is installed on the second support plate 182
On, photodetector 201 is installed on regulating part 202.Photodetector is adjusted in turn by adjusting the angle of regulating part 202
201 angle.
As shown in Figure 1, first laser component 11 further includes the first adjusting bracket 113, first laser device 111 is fixed on the first tune
It saves on frame 113, the first adjusting bracket 113 is fixed on pedestal 184.Accordingly, second laser component 12 further includes the second adjusting bracket,
Second laser 121 is fixed on the second adjusting bracket, and the second adjusting bracket is fixed on pedestal 184.
Further, the first probe assembly 13 further includes first clamping member 132, and the first micro-cantilever 131 is fixed on the first folder
In gripping member 132.Correspondingly, the second probe assembly 14 further includes the second clamping piece 141, and the second micro-cantilever is fixed on the second clamping piece
On 141.
Further, the first probe assembly 13 further includes the first probe positioning table 133, and the first probe positioning table 133 is used for
Positioning probe.Specifically, the first probe positioning table 133 includes the first probe nano positioning table 1331, the first Z axis micron positioning table
1332 and the first probe level micron positioning table 1333, the first probe level micron positioning table 1333 be installed on the first support plate
On 181, the first probe level micron positioning table 1333 can move in the horizontal plane, and kinematic accuracy is up to micron level；First Z
Axis micron positioning table 1332 is installed on the first probe level micron positioning table 1333, and can follow the first probe level micron
Positioning table 1333 moves together, and the first Z axis micron positioning table 1332 can (in present embodiment, Z-direction be referred to along Z axis
Vertical direction) movement, kinematic accuracy is up to micron level；It is fixed that first probe nano positioning table 1331 is installed on the first Z axis micron
On the platform 1332 of position, the first probe is installed on the first probe nano positioning table 1331, the fortune of the first probe nano positioning table 1331
Precision is moved up to Nano grade, by adjusting the phase of the first probe positioning table 133 adjustable first probe and sample 17
To position, to facilitate the relevant information for obtaining sample 17.
Correspondingly, the second probe assembly 14 also includes the second probe positioning table 142, the structure of the second probe positioning table 142
It is identical as the structure of the first probe positioning table 133, it will not repeat them here.
It should be noted that in order to keep four groups of probe assemblies non-interference and compact-sized, if existing probe is not
It is able to satisfy demand, then is reused after being modified to probe.There are probelem in two aspects for existing probe: first, probe needle
Point 101 is not in the front end of micro-cantilever；Second, probe base 100 is excessive, and four micro-cantilevers can not be close, four groups of probe assemblies
Between formed interference.As shown in Figure 1 and Figure 5, the problem excessive for probe base 100, can be by micro- with focused ion beam etc.
Processing technology or Solid Laser Precise Cutting Technology cut probe base 100, meet the requirements it, specific cutting mode and cutting
It region will be depending on actual conditions.As shown in figures 1 to 6, for probe tip 101 not the front end of micro-cantilever the problem of,
The probe for needing that probe tip 101 is selected to forward extend out, or probe tip 101 is cut with focused ion beam, its satisfaction
It asks, specific cutting mode and cutting region will be depending on actual conditions.
As shown in Figure 1, it further includes optics view that present embodiment, which provides a kind of four probe atomic force microscope of laser detection formula,
Feel module 21, optical module 15 further includes object lens reflective mirror 154, optical visual module 21 by object lens reflective mirror 154 obtain by
The microoptic view of sample 17 and four probes.The optical visual module 21 is separated with detection module, improves laser light
The stability on road.Specifically, object lens reflective mirror 154 is located at the lower section of object lens beam splitter 152, convenient for by the variation of laser and probe
Real-time Feedback is to optical visual module 21.Preferably, which is the zoom zooming system of Navitar company,
Infinity optical system design, and object lens reflective mirror 154 will not influence the use of the zoom zooming system.The optical visual module
21 variable multiples, when probe location positions and adjusts, amplification factor is low, and multiple amplifies after probe location adjustment,
To fine-tune the relative position of probe Yu sample 17.21 variable focal length of optical visual module, can assist probes approach
Microscopical focussing plane is adjusted when sample 17.
Note that above are only better embodiment and institute's application technology principle of the invention.Those skilled in the art can manage
Solution, the present invention is not limited to particular implementations described here, are able to carry out for a person skilled in the art various apparent
Variation is readjusted and is substituted without departing from protection scope of the present invention.Therefore, although by embodiment of above to this hair
It is bright to be described in further detail, but the present invention is not limited only to embodiment of above, is not departing from present inventive concept
In the case of, it can also include other more equivalent implementations, and the scope of the invention is determined by the scope of the appended claims.
Claims (10)
1. a kind of four probe atomic force microscope of laser detection formula characterized by comprising
First laser component (11) comprising first laser device (111), the first laser device (111) are swashed for emitting first
Light (112)；
Second laser component (12) comprising second laser (121), the second laser (121) are swashed for emitting second
Light (122), the first laser (112) are different from the direction of the second laser (122)；
First probe assembly (13) comprising the first probe, first probe include the first micro-cantilever (131)；
Second probe assembly (14) comprising the second probe, second probe include the second micro-cantilever；
Optical module (15), the optical module (15) can make the first laser (112) focus on first micro-cantilever
(131) on, and the second laser (122) can be made to focus on second micro-cantilever；
The first laser component (11), the second laser component (12), first probe assembly (13) and described second
The quantity of probe assembly (14) is two groups.
2. four probe atomic force microscope of laser detection formula according to claim 1, which is characterized in that the optical module
It (15) include edge of a knife prism (151), object lens beam splitter (152) and object lens (153), the first laser (112) is successively through described
Edge of a knife prism (151) and the object lens beam splitter (152) are reflected into the object lens (153), and through the object lens (153)
Refractive focusing on first micro-cantilever (131).
3. four probe atomic force microscope of laser detection formula according to claim 2, which is characterized in that the second laser
Component (12) further includes laser beam splitter mirror (123), and the second laser (122) is successively through the laser beam splitter mirror (123), described
Edge of a knife prism (151) and the object lens beam splitter (152) are reflected into the object lens (153), and through the object lens (153)
Refractive focusing on second micro-cantilever.
4. four probe atomic force microscope of laser detection formula according to claim 1, which is characterized in that further include inverted
Sample stage component (16), the sample stage component (16) is for positioning sample (17).
5. four probe atomic force microscope of laser detection formula according to claim 4, which is characterized in that the sample stage group
Part (16) includes pedestal (161) and the sample positioning stage (162) being fixed on the pedestal (161), the sample positioning stage
(162) it is located at below the pedestal (161), the sample positioning stage (162) is for positioning the sample (17).
6. four probe atomic force microscope of laser detection formula according to claim 5, which is characterized in that the Sample location
Platform (162) includes three-dimensional manometer positioning table (1621) and horizontal micron positioning table (1622), the three-dimensional manometer positioning table
(1621) it is mounted on the pedestal (161), the three-dimensional manometer positioning table (1621) is configured to transport in three-dimensional space
Dynamic, the horizontal micron positioning table (1622) is installed on the three-dimensional manometer positioning table (1621), the horizontal micron positioning
Platform (1622) is configured to move in the horizontal plane.
7. four probe atomic force microscope of laser detection formula according to claim 6, which is characterized in that further include support group
Part (18) and lifting assembly (19), the lifting assembly (19) is for adjusting the support component (18) and the sample stage component
(16) distance and tilt angle.
8. four probe atomic force microscope of laser detection formula according to claim 7, which is characterized in that the lifting assembly
It (19) include screw rod (191) and the first connector (192), first connector (192) is fixed on the pedestal (161),
First connector (192) has groove (1921), and the screw rod (191) has first end, and the first end is hemispherical,
The first end is set in the groove (1921).
9. four probe atomic force microscope of laser detection formula according to claim 4, which is characterized in that further include optics view
Feel module (21), the optical module (15) further includes object lens reflective mirror (154), and the optical visual module (21) passes through described
Object lens reflective mirror (154) obtains the microoptic view of the sample (17), first probe and second probe.
10. four probe atomic force microscope of laser detection formula according to claim 1, which is characterized in that further include four groups
Opto-electronic receiver component (20), wherein opto-electronic receiver component (20) described in two groups and the first probe assembly (13) one described in two groups are a pair of
It should be arranged, opto-electronic receiver component (20) described in another two groups is arranged in a one-to-one correspondence with the second probe assembly (14) described in two groups.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910212150.1A CN109799367B (en) | 2019-03-20 | 2019-03-20 | Laser detection type four-probe atomic force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910212150.1A CN109799367B (en) | 2019-03-20 | 2019-03-20 | Laser detection type four-probe atomic force microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109799367A true CN109799367A (en) | 2019-05-24 |
| CN109799367B CN109799367B (en) | 2022-02-11 |
Family
ID=66563734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910212150.1A Active CN109799367B (en) | 2019-03-20 | 2019-03-20 | Laser detection type four-probe atomic force microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109799367B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101403680A (en) * | 2008-11-12 | 2009-04-08 | 中国科学院上海光学精密机械研究所 | Beam tracking apparatus of needle point scanning type atomic force microscope |
| CN101629885A (en) * | 2009-07-07 | 2010-01-20 | 清华大学 | Double probe micro nanometer mechanics detecting system |
| CN103412150A (en) * | 2013-08-30 | 2013-11-27 | 哈尔滨工业大学 | Double-probe atomic power microscope and method for realizing nanometer structure operation by adopting microscope |
| CN103454454A (en) * | 2013-08-30 | 2013-12-18 | 哈尔滨工业大学 | Laser force measuring system for double-probe atomic force microscope |
| CN106645803A (en) * | 2016-12-14 | 2017-05-10 | 国家纳米科学中心 | Fast dual-probe atomic force microscope approximation device and fast dual-probe atomic force microscope approximation method |
| CN207636627U (en) * | 2017-12-18 | 2018-07-20 | 长理纳米生物技术（长春）有限公司 | Three probe atomic force microscopy systems |
| CN108562764A (en) * | 2018-03-28 | 2018-09-21 | 苏州飞时曼精密仪器有限公司 | A kind of mechanical-optical setup device for vacuum environment type atomic force microscope |
-
2019
- 2019-03-20 CN CN201910212150.1A patent/CN109799367B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101403680A (en) * | 2008-11-12 | 2009-04-08 | 中国科学院上海光学精密机械研究所 | Beam tracking apparatus of needle point scanning type atomic force microscope |
| CN101629885A (en) * | 2009-07-07 | 2010-01-20 | 清华大学 | Double probe micro nanometer mechanics detecting system |
| CN103412150A (en) * | 2013-08-30 | 2013-11-27 | 哈尔滨工业大学 | Double-probe atomic power microscope and method for realizing nanometer structure operation by adopting microscope |
| CN103454454A (en) * | 2013-08-30 | 2013-12-18 | 哈尔滨工业大学 | Laser force measuring system for double-probe atomic force microscope |
| CN106645803A (en) * | 2016-12-14 | 2017-05-10 | 国家纳米科学中心 | Fast dual-probe atomic force microscope approximation device and fast dual-probe atomic force microscope approximation method |
| CN207636627U (en) * | 2017-12-18 | 2018-07-20 | 长理纳米生物技术（长春）有限公司 | Three probe atomic force microscopy systems |
| CN108562764A (en) * | 2018-03-28 | 2018-09-21 | 苏州飞时曼精密仪器有限公司 | A kind of mechanical-optical setup device for vacuum environment type atomic force microscope |
Non-Patent Citations (2)
| Title |
|---|
| NOBUO SATOH等: ""Multi-Probe Atomic Force Microscopy Using Piezoelectric Cantilevers"", 《JAPANESE JOURNAL OF APPLIED PHYSICS》 * |
| 许可等: ""多探针扫描探针显微镜研究进展与应用"", 《科学通报》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109799367B (en) | 2022-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106802135B (en) | Freeform optics element in level detecting apparatus and detection method | |
| Hsu et al. | Development of the fast astigmatic auto-focus microscope system | |
| EP1892727A1 (en) | Measuring apparatus | |
| CN1323309C (en) | Reflection multilight bean confocal interference microscope having several tens nanometer lateral discriminability | |
| CN102589466B (en) | Contour microscopic method | |
| CN103383247A (en) | Optical detection system and device | |
| CN101603813B (en) | Dimension measuring device for optical standing wave nano-particles | |
| CN107144237A (en) | Heavy caliber interferometer measuration system and algorithm based on three-dimensional splicing | |
| US9689892B2 (en) | Scanning probe microscope | |
| CN103454071B (en) | A kind of focusing performance method of testing of X-ray combination refractor | |
| CN106645803B (en) | A kind of invention provides a double-probe atomic power quickly approaches device and method | |
| CN110514138A (en) | A kind of shape measurement system and method based on probe self gravity | |
| CN205192445U (en) | Optics three -dimensional imaging device | |
| CN105136024B (en) | Light path switching device and the micro-nano measuring system for integrating multiple gauge heads | |
| CN109799367A (en) | A kind of four probe atomic force microscope of laser detection formula | |
| GB2337815A (en) | Thickness meter for thin transparent objects | |
| Bodensiek et al. | A high-speed vertical optical trap for the mechanical testing of living cells at piconewton forces | |
| CN216898783U (en) | Confocal micro-measuring apparatu of line scanning spectrum | |
| CN110161008A (en) | Common optical axis degree and amplification factor can self-alignment fluorescent grain tracing method and devices | |
| CN109443711A (en) | A kind of optical elements of large caliber measuring device and method being servo-actuated high-velocity scanning confocal microscopy based on pin hole | |
| CN109799368B (en) | Double-probe atomic force microscope | |
| CN112179762A (en) | Double prism auxiliary measurement of Young modulus of metal wire | |
| CN104266583A (en) | Multi-degree-of-freedom measuring system | |
| CN109443241A (en) | A kind of high speed axial direction scanning confocal micro-measurement apparatus and method based on tuning fork driving | |
| CN217385551U (en) | Surface enhanced Raman atomic force microscope system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |