CN108562764A - A kind of mechanical-optical setup device for vacuum environment type atomic force microscope - Google Patents
A kind of mechanical-optical setup device for vacuum environment type atomic force microscope Download PDFInfo
- Publication number
- CN108562764A CN108562764A CN201810264229.4A CN201810264229A CN108562764A CN 108562764 A CN108562764 A CN 108562764A CN 201810264229 A CN201810264229 A CN 201810264229A CN 108562764 A CN108562764 A CN 108562764A
- Authority
- CN
- China
- Prior art keywords
- semi
- lens
- object lens
- probe
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
Abstract
The invention discloses a kind of mechanical-optical setup devices for vacuum environment type atomic force microscope, have vacuum cavity module, upper optical imagery and laser detection module, lower optical imagery module；Vacuum cavity module includes vacuum chamber, piezoelectric position moving stage, piezoelectric scanner, micro slide, sample stage, probe and probe base；Upper optical imagery and laser detection module include object lens, manual displacement platform, semi-transparent semi-reflecting lens, laser, adjustable reflective mirror, 4 quadrant detector, light source and imaging sensor；Lower optical imagery module includes object lens, manual displacement platform, light source, semi-transparent semi-reflecting lens and imaging sensor；This case devises two sets of auxiliary optical imaging devices up and down in the mechanical-optical setup of atomic force microscope for the first time, it can be used for the accurate scan positioning of material sample or biological sample simultaneously, and make atomic force microscope light path and auxiliary optical imaging system light path integrated for the first time so that whole system light path is simplified, compact-sized.
Description
Technical field
The invention belongs to high resolution analysis instrument fields, especially atomic force microscope field, and in particular to one kind is used for
The mechanical-optical setup device of vacuum environment type atomic force microscope.
Background technology
Atomic force microscope (AFM) is a kind of solid material surface microstructure that can be used to study including insulator
Analytical instrument, it passes through between the faint atom detected between sample to be tested surface and a miniature force sensitive element mutually
Active force studies the surface texture and property of substance.One is fixed micro-cantilever one end of faint power extreme sensitivity, it is another
Close to sample, which will interact the small needle point at end with sample, and active force will be so that micro-cantilever be deformed upon or moved
State changes.In order to obtain the information of sample surfaces, laser detection method is generally utilized, i.e., is beaten laser beam in probe cantilever
Then the back side is reflected on position sensor；When scanning, due to the interatomic interaction force of sample and probe tip, probe
Cantilever bending fluctuation, the reflected beams also will will therewith be deviated with sample surface morphology, then pass through test position detector glazing
The variation of spot position can obtain the information of sample surface topography.Atomic force microscope is that resolution ratio is most on our times
High surface tri-dimensional profile measuring instrument is detection device indispensable in material science research and nanometer detection field.It is former
Sub- force microscope with high resolution, applied widely, sample preparation is simple, and micro-nano inspection can be carried out in various environment
It surveys and is widely applied.
It is well known that the interaction force between atom is very small, AFM at work, in order to maintain the two
Between active force, the distance between probe and sample are very close, and usually only several nanometers or tens nanometers, this is just to instrument
The requirement of ambient enviroment is very high.Atomic force microscope currently on the market is operated in normal air environment
, but various gas molecules, there are the reasons of various mechanical oscillation and electromagnetic interference due to being enlivened in air, to obtain
High resolution ratio or relatively difficult, to really obtain the resolution ratio of atomic level using atomic force microscope, also
It is to need to work under ultravacuum, ultra-low temperature surroundings.Similar product scanning tunneling microscope as atomic force microscope
(STM) most of to work under ultravacuum ultra-low temperature surroundings, but unlike atomic force microscope, scanning
Tunnel microscope is to differentiate sample by detecting the tunnel current of sample surfaces according to the tunnel effect principle in quantum mechanics
Surface topography, do not need laser detector.STM signal detection device is relatively simple, and mainly surveys and lead
Electric sample is very suitable for and is easy to work under ultravacuum ultra-low temperature surroundings.In contrast, atomic force microscope is due to needing
Laser detector is wanted, regular replacement probe is needed and adjusts facula position, structure wants the more of complexity, under vacuum conditions
Work has many restrictions.Domestic atomic force microscope manufacturer does not have the such production of vacuum environment type atomic force microscope at present
Product, it is super true that external mainstream atomic force microscope manufacturer also only has the exploitations such as several families such as Oxford Instruments, Hitachi, RHK to have
Empty ultra-low temperature surroundings control type atomic force microscope, but volume production is not also formed, price is very expensive, needs hundreds of easily
Ten thousand.
Invention content
For the development trend of the shortcomings of the prior art and current atomic force microscope both at home and abroad, the present invention
Be designed to provide a kind of novel mechanical-optical setup device for vacuum environment type atomic force microscope, make atomic force microscopy
Mirror works under ultravacuum, ultra-low temperature surroundings, and reaches the resolution ratio of atom level, thin for nano materials research, biology
Born of the same parents' sample analysis, tribology and the research of mechanics micro-property etc..
The present invention provides a kind of mechanical-optical setup devices for vacuum environment type atomic force microscope, have vacuum cavity
Module, upper optical imagery and laser detection module, lower optical imagery module；
The vacuum cavity module include vacuum chamber, piezoelectric position moving stage, piezoelectric scanner, micro slide, sample stage, probe and
Probe base；The bottom surface and upper bottom surface of the vacuum chamber are respectively equipped with lower groove and upper groove；The piezoelectric position moving stage is set to
Lower groove is fixed on piezoelectric scanner to the right side of vacuum chamber protrusion, the piezoelectric position moving stage；The piezoelectric scanner
It is fixed on micro slide；Slot bottom corresponding position on the micro slide with upper groove and lower groove is provided with sample stage, for pacifying
Set sample；The probe is arranged right over sample stage, is installed on probe base；
The upper optical imagery and laser detection module include the first object lens, first manual displacement platform, first semi-transparent semi-reflecting
Mirror, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, laser, the second manual displacement platform, adjustable reflective mirror, Quadrant detector
Device, third manual displacement platform, first light source and the first imaging sensor；Slot of the camera lens of first object lens towards upper groove
Bottom, mirror tail are fixed on first manual displacement platform；It is semi-transparent it to be from bottom to top disposed with first above the first manual displacement platform
Semi-reflective mirror, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens and the first imaging sensor；It is set on the left of first semi-transparent semi-reflecting lens
There is adjustable reflective mirror；It is equipped with 4 quadrant detector above the adjustable reflective mirror；The 4 quadrant detector is fixed on second-hand
Dynamic displacement platform；Laser is equipped on the right side of second semi-transparent semi-reflecting lens；The laser is fixed on third manual displacement platform；It is described
First light source is equipped on the right side of third semi-transparent semi-reflecting lens；
The lower optical imagery module includes the second object lens, the 4th manual displacement platform, second light source, the 4th semi-transparent semi-reflecting lens
With the second imaging sensor；For the camera lens of second object lens towards the slot bottom of lower groove, mirror tail is fixed on the 4th manual displacement platform；
It is from top to bottom disposed with the 4th semi-transparent semi-reflecting lens and the second imaging sensor below the 4th manual displacement platform；4th half
It is equipped with second light source on the right side of saturating semi-reflective mirror.
Preferably, the vacuum chamber is in H-type structure；The slot bottom of the upper groove and lower groove is smaller than 15mm.
Preferably, the piezoelectric position moving stage selects XYZ three-dimensional piezoelectric displacement platforms；Institute's piezoelectric scanner selects XYZ three-dimensional
Piezoelectric scanner.
Preferably, the first manual displacement platform, third manual displacement platform and the 4th manual displacement platform select XY two dimensions
Manual displacement platform；The second manual displacement platform selects the one-dimensional manual displacement platforms of X.
Preferably, first object lens select 50 times of object lens, the second object lens object to select 100 times of object lens.
Preferably, described first image sensor and the second imaging sensor select ccd image sensing
Device.
Preferably, the course of work of the mechanical-optical setup device is as follows：
1) prepare：Sample is disposed on sample stage in the vacuum chamber, probe is installed on probe base, and airtight vacuum chamber extracts
Wherein air, while temperature is reduced, so that sample and probe is in vacuum low-temperature environment；Optical imagery and laser detection in adjustment
Module and lower optical imagery module make light focusing in the cantilever of probe；
2) laser imaging：The second semi-transparent semi-reflecting lens of laser directive it is semi-transparent semi-reflecting to be reached first by laser after half reflection
On mirror, the first object lens are reached after half transmitting, laser is focused on the cantilever of probe by the first object lens；The laser is by the cantilever of probe
The first object lens are reflected back, by arriving again at the first semi-transparent semi-reflecting lens after the first object lens, adjustable reflective mirror is reached after half reflection,
4 quadrant detector is eventually arrived at after reflection；4 quadrant detector is by the laser facula signal transmission received to control system
It is handled；
3) illumination light is imaged：While laser imaging, first light source and second light source send out illumination light；Wherein, first
The illumination light that light source is sent out is beaten on third semi-transparent semi-reflecting lens, reaches the second half-reflecting half mirror after reflection, sequentially passes through
Two semi-transparent semi-reflecting lens and the first semi-transparent semi-reflecting lens reach the first object lens, the cantilever of probe are focused on by the first object lens, through probe
The first object lens, the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens are sequentially passed through after cantilever reflection, finally
It beats and carries out optical imagery on the first imaging sensor；The illumination light that second light source is sent out is beaten on the 4th semi-transparent semi-reflecting lens,
The second object lens are reached after reflection, focus on sample by the second object lens, the second object lens, the 4th half are sequentially passed through after sample reflects
Saturating semi-reflective mirror, final beat carry out optical imagery on the second imaging sensor；Described first image sensor and the second image pass
Optical imagery is transferred to control system and handled by sensor.
Preferably, the position that the angle and the second manual displacement platform of adjustable reflective mirror are adjusted in the step 2), makes to swash
The hot spot of light is located at the center of four-quadrant detector.
Preferably, the probe in the step 3) and sample are in the same plane.
The beneficial effects of the invention are as follows：The mechanical-optical setup device of atomic force microscope provided by the present invention, can make original
Sub- force microscope works under ultravacuum, ultra-low temperature surroundings, the resolution ratio with atomic level.It is aobvious in atomic force for the first time in this case
Two sets of auxiliary optical imaging devices, object lens multiple up and down are devised in the mechanical-optical setup of micro mirror has reached 50-100 times, it can
Simultaneously applied to the positioning of the accurate scan of material sample and biological sample, and make atomic force microscope light path and fill-in light for the first time
It studies as system light path is integrated so that whole system light path is simplified, compact-sized.
Description of the drawings
Fig. 1 is the internal structure schematic diagram of the mechanical-optical setup device of atomic force microscope in the present invention；
Fig. 2 is the front view of the mechanical-optical setup device of atomic force microscope in the present invention；
Fig. 3 is the stereogram of the mechanical-optical setup device of atomic force microscope in the present invention；
Wherein, 101- vacuum chambers, 102- upper grooves, 103- lower grooves, 104- piezoelectric positions moving stage, 105- piezoelectric scanners,
106- micro slides, 107- sample stages, 108- probe bases, 109- probes, the first object lens of 201-, 202- first manuals displacement platform,
The first semi-transparent semi-reflecting lens of 203-, 204- is adjustable reflective mirror, 205- 4 quadrant detectors, the second manual displacement platforms of 206-, 207-
Two semi-transparent semi-reflecting lens, 208- lasers, 209- third manual displacements platform, 210- thirds semi-transparent semi-reflecting lens, 211- first light sources,
The first imaging sensors of 212-, the second object lens of 301-, the 4th manual displacement platforms of 302-, the 4th semi-transparent semi-reflecting lens of 303-, 304-
Two light sources, the second imaging sensors of 305-；
Arrow indicates the direction of propagation of laser or illumination light in figure.
Specific implementation mode
Present invention will be described in further detail below with reference to the accompanying drawings, to enable those skilled in the art with reference to specification text
Word can be implemented according to this.
Mechanical-optical setup device provided in this embodiment is used for vacuum environment type atomic force microscope, has vacuum cavity mould
Block, upper optical imagery and laser detection module, lower optical imagery module；
Vacuum cavity module, including vacuum chamber 101, XYZ piezoelectric positions moving stage 104, XYZ piezoelectric scanners 105, micro slide
106, sample stage 107, probe base 108 and probe 109；Vacuum chamber 101 is in H-type structure, including upper groove 102 and lower groove 103,
XYZ piezoelectric positions moving stage 104 is set to lower groove 103 to the right side of vacuum chamber protrusion, on the table top of the piezoelectric position moving stage according to
It is secondary to be fixed with XYZ piezoelectric scanners 105 and micro slide 106, on micro slide 106 with 103 corresponding position of upper groove 102 and lower groove
It is provided with sample stage 107, for disposing sample, the setting of probe 109 to be installed on probe base 108 right over sample stage 107；
Wherein, sample is in same plane in probe, and light reflection unit is provided on the back side of sample stage and the cantilever of probe.
Upper optical imagery and laser detection module, including the first object lens 201, first manual displacement platform 202, first semi-transparent half
Anti- mirror 203,4 quadrant detector 205, the second manual displacement platform 206, the second semi-transparent semi-reflecting lens 207, swashs at adjustable reflective mirror 204
Light device 208, third manual displacement platform 209, third semi-transparent semi-reflecting lens 210, first light source 211 and the first imaging sensor 212；The
One object lens 201 are 50 times of object lens, and towards the slot bottom of upper groove 102, mirror tail is fixed under first manual displacement platform 202 camera lens
Face, the table top of the first manual displacement platform 202 is downward；The top of the first manual displacement platform 202 is equipped with first semi-transparent half successively
Anti- mirror 203, the second semi-transparent semi-reflecting lens 207, third semi-transparent semi-reflecting lens 210 are equipped with adjustable in the left side of the first semi-transparent semi-reflecting lens 203
The top of reflective mirror 204, adjustable reflective mirror 204 is equipped with 4 quadrant detector 205, which is fixed on second
Below manual displacement platform 206, the laser facula signal sent out for receiving laser 208, the platform of the second manual displacement platform 206
Down；The right side of second semi-transparent semi-reflecting lens 207 is equipped with laser 208, which is fixed on third manual displacement platform
Above 209；It is equipped with first light source 211 on the right side of third semi-transparent semi-reflecting lens 210, for sending out illumination light, the third semi-transparent half
The top of anti-mirror 210 is equipped with the first imaging sensor 212, the optical imagery for receiving the illumination light that first light source 211 is sent out.
Lower optical imagery module, including the second object lens 301, the 4th manual displacement platform 302, the 4th semi-transparent semi-reflecting lens 303,
Two light sources 304 and the second imaging sensor 305；Second object lens 301 are 100 times of object lens, slot of the camera lens towards lower groove 103
Bottom, mirror tail are fixed on the 4th manual displacement platform 302, and the platform of the 4th manual displacement platform 302 is fixed below second object lens 301
The lower section in face, the 4th manual displacement platform 302 is equipped with the 4th semi-transparent semi-reflecting lens 303, and 303 right side of the 4th semi-transparent semi-reflecting lens is equipped with
Second light source 304 is equipped with the second imaging sensor 305, for receiving second light source in the lower section of the 4th semi-transparent semi-reflecting lens 303
The optical imagery of 304 illumination lights sent out.
Wherein, first manual displacement platform 202, third manual displacement platform 209 and the 4th manual displacement platform 302 select XY two dimensions
Manual displacement platform, the second manual displacement platform 206 select the one-dimensional manual displacement platforms of X；First imaging sensor 212 and the second image pass
Sensor 305 selects ccd image sensor.
The operating process of first ion microscope with the mechanical-optical setup is as follows：The probe 109 is mounted on institute first
It states above probe base 108, by sample fixed placement in the sample stage 107 of micro slide 106, is then shut off vacuum chamber 101, extract
Wherein air, and temperature is reduced, until probe 109 and sample are under ultravacuum ultra-low temperature surroundings；Then AFM controls are opened
System and software systems adjust 208 light path of laser, regulate optical imaging system focal length up and down；Pass through AFM softwares system
System selection scanning work pattern, 104 mobile example position of control XYZ three-dimensional piezoelectrics displacement platform, make sample close to probe 109 until
Behind working region, after every basic sweep parameter is set, after XYZ piezoelectric scanners 105 start scanning, 4 quadrant detector 205
Received laser facula signal is transferred to AFM software systems；Meanwhile charge coupling device (CCD), i.e. the first image pass
The illumination light optical imaging data of receiving is transferred to AFM software systems by sensor 212 and the second imaging sensor 305.
Wherein, laser irradiation path is as follows：The laser that laser 208 is sent out is beaten in the upper surface of second semi-transparent semi-reflecting lens 207,
Wherein 1/2 laser energy is by reflection and gets on the first semi-transparent semi-reflecting lens 203, then 1/2 laser energy passes through first semi-transparent half
Anti- mirror 203, and pass through first object lens 201, it finally focuses on the cantilever of probe 109；By adjusting third manual displacement
Platform 209 is to regulate and control the position of laser and finally get on the cantilever of probe 109；The hot spot reflected on cantilever by probe 109
It is beaten on the first semi-transparent semi-reflecting lens 203 using the first object lens 201, wherein 1/2 light spot energy is adjustable anti-by reflecting and getting to
On light microscopic 204, finally beaten on 4 quadrant detector 205 using reflection, the laser light that 4 quadrant detector 205 is received
Spot signal is transferred to AFM controller and is handled；It, can be with by adjusting the second manual displacement platform 206 and adjustable reflective mirror 204
Adjust the position of the angle and 4 quadrant detector 205 of hot spot so that hot spot is finally beaten at the center of 4 quadrant detector 205.
Meanwhile the illumination light that first light source 211 is sent out is beaten on third semi-transparent semi-reflecting lens 210, and it is semi-transparent to be re-reflected into second
On semi-reflective mirror 207, and the second semi-transparent semi-reflecting lens 207, the first semi-transparent semi-reflecting lens 203 are sequentially passed through, finally passes through described first
Object lens 201 finally also focus on the cantilever of the probe 109；Then the light reflected on the cantilever of probe 109 sequentially passes through again
First object lens 201, the second semi-transparent semi-reflecting lens 207, on third semi-transparent semi-reflecting lens 210, are finally beaten first semi-transparent semi-reflecting lens 203
Optical imagery is carried out on the first imaging sensor 212 of charge coupling device (CCD).
Similarly, the illumination light that second light source 304 is sent out is beaten on the 4th semi-transparent semi-reflecting lens 303, is most passed through afterwards using reflection
The second object lens 301 are crossed, are finally focused on sample；Then the light reflected on sample sequentially passes through second object lens 301, again
Four semi-transparent semi-reflecting lens 303, final beat carry out optical imagery on the second imaging sensors of the CCD 305.When due to work, sample
Product and probe 109 are therefore the first imaging sensors of CCD 212 and the second imaging sensors of CCD 305 in the approximately the same plane
Sample and probe 109 can be imaged simultaneously.
Arrow in attached drawing is the possible propagation path of light path, and after single pass, software can automatically save scanning
Image and source data can carry out various analyses using image analysis software to the sample surfaces data of acquisition, as Roughness analysis,
Depth survey, range measurement, mechanics property analysis etc..
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (9)
1. a kind of mechanical-optical setup device for vacuum environment type atomic force microscope, which is characterized in that have vacuum cavity mould
Block, upper optical imagery and laser detection module, lower optical imagery module；
The vacuum cavity module includes vacuum chamber, piezoelectric position moving stage, piezoelectric scanner, micro slide, sample stage, probe and probe
Seat；The bottom surface and upper bottom surface of the vacuum chamber are respectively equipped with lower groove and upper groove；The piezoelectric position moving stage is set to recessed
Slot is fixed on piezoelectric scanner to the right side of vacuum chamber protrusion, the piezoelectric position moving stage；Above the piezoelectric scanner
It is fixed with micro slide；Slot bottom corresponding position on the micro slide with upper groove and lower groove is provided with sample stage, for disposing sample
Product；The probe is arranged right over sample stage, is installed on probe base；
The upper optical imagery and laser detection module include the first object lens, first manual displacement platform, the first semi-transparent semi-reflecting lens, the
Two semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, laser, the second manual displacement platform, adjustable reflective mirror, 4 quadrant detector,
Three manual displacement platforms, first light source and the first imaging sensor；The camera lens of first object lens is towards the slot bottom of upper groove, mirror tail
It is fixed on first manual displacement platform；From bottom to top be disposed with above the first manual displacement platform the first semi-transparent semi-reflecting lens,
Second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens and the first imaging sensor；It is equipped on the left of first semi-transparent semi-reflecting lens adjustable
Reflective mirror；It is equipped with 4 quadrant detector above the adjustable reflective mirror；The 4 quadrant detector is fixed on the second manual displacement
Platform；Laser is equipped on the right side of second semi-transparent semi-reflecting lens；The laser is fixed on third manual displacement platform；The third half
It is equipped with first light source on the right side of saturating semi-reflective mirror；
The lower optical imagery module includes the second object lens, the 4th manual displacement platform, second light source, the 4th semi-transparent semi-reflecting lens and the
Two imaging sensors；For the camera lens of second object lens towards the slot bottom of lower groove, mirror tail is fixed on the 4th manual displacement platform；It is described
It is from top to bottom disposed with the 4th semi-transparent semi-reflecting lens and the second imaging sensor below 4th manual displacement platform；4th semi-transparent half
Second light source is equipped on the right side of anti-mirror.
2. mechanical-optical setup device according to claim 1, which is characterized in that the vacuum chamber is in H-type structure；The fovea superior
The slot bottom of slot and lower groove is smaller than 15mm.
3. mechanical-optical setup device according to claim 1, which is characterized in that the piezoelectric position moving stage selects XYZ three-dimensional pressures
Current potential moving stage；Institute's piezoelectric scanner selects XYZ three-dimensional piezoscanners.
4. mechanical-optical setup device according to claim 1, which is characterized in that the first manual displacement platform, third are manual
Displacement platform and the 4th manual displacement platform select XY two dimension manual displacement platforms；The second manual displacement platform selects the one-dimensional manual positions X
Moving stage.
5. mechanical-optical setup device according to claim 1, which is characterized in that first object lens select 50 times of object lens, the
Two object lens objects select 100 times of object lens.
6. mechanical-optical setup device according to claim 1, which is characterized in that described first image sensor and the second image
Sensor selects ccd image sensor.
7. mechanical-optical setup device according to claim 1, which is characterized in that the course of work of the mechanical-optical setup device is such as
Under：
1) prepare：Sample is disposed on sample stage in the vacuum chamber, probe is installed on probe base, and airtight vacuum chamber extracts wherein
Air, while temperature is reduced, so that sample and probe is in vacuum low-temperature environment；Optical imagery and laser detection module in adjustment
Make light focusing in the cantilever or sample of probe with lower optical imagery module；
2) laser imaging：Laser reaches the second semi-transparent semi-reflecting lens of laser directive on the first semi-transparent semi-reflecting lens after half reflection,
The first object lens are reached after half transmitting, laser is focused on the cantilever of probe by the first object lens；The laser is reflected by the cantilever of probe
It returns the first object lens and adjustable reflective mirror is reached after half reflection, through anti-by arriving again at the first semi-transparent semi-reflecting lens after the first object lens
4 quadrant detector is eventually arrived at after penetrating；4 quadrant detector carries out the laser facula signal transmission received to control system
Processing；
3) illumination light is imaged：While laser imaging, first light source and second light source send out illumination light；Wherein, first light source
The illumination light sent out is beaten on third semi-transparent semi-reflecting lens, reaches the second half-reflecting half mirror after reflection, sequentially passes through the second half
Saturating semi-reflective mirror and the first semi-transparent semi-reflecting lens reach the first object lens, the cantilever of probe are focused on by the first object lens, the cantilever through probe
The first object lens, the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens are sequentially passed through after reflection, are finally beaten
Optical imagery is carried out on first imaging sensor；The illumination light that second light source is sent out is beaten on the 4th semi-transparent semi-reflecting lens, through anti-
The second object lens are reached after penetrating, sample is focused on by the second object lens, and the second object lens, the 4th semi-transparent half are sequentially passed through after sample reflects
Anti- mirror, final beat carry out optical imagery on the second imaging sensor；Described first image sensor and the second imaging sensor
Optical imagery is transferred to control system to handle.
8. mechanical-optical setup device according to claim 7, which is characterized in that adjust adjustable reflective mirror in the step 2)
The position of angle and the second manual displacement platform makes the hot spot of laser be located at the center of four-quadrant detector.
9. mechanical-optical setup device according to claim 7, which is characterized in that probe and sample in the step 3) are in
On same plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810264229.4A CN108562764A (en) | 2018-03-28 | 2018-03-28 | A kind of mechanical-optical setup device for vacuum environment type atomic force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810264229.4A CN108562764A (en) | 2018-03-28 | 2018-03-28 | A kind of mechanical-optical setup device for vacuum environment type atomic force microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108562764A true CN108562764A (en) | 2018-09-21 |
Family
ID=63533057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810264229.4A Pending CN108562764A (en) | 2018-03-28 | 2018-03-28 | A kind of mechanical-optical setup device for vacuum environment type atomic force microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108562764A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109799367A (en) * | 2019-03-20 | 2019-05-24 | 国家纳米科学中心 | A kind of four probe atomic force microscope of laser detection formula |
| CN109884343A (en) * | 2019-02-22 | 2019-06-14 | 浙江中医药大学 | A kind of light-baffling device for delivering directly image viewing for transmission electron microscope |
| CN111337712A (en) * | 2020-04-10 | 2020-06-26 | 清华大学 | Coupling system of vacuum atomic force microscope and vacuum atomic force microscope |
| CN115128788A (en) * | 2022-05-30 | 2022-09-30 | 中国人民解放军国防科技大学 | Horizontally arranged microscope parallel to observation object |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1587982A (en) * | 2004-09-07 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Modular atomic force microscope |
| CN208043857U (en) * | 2018-03-28 | 2018-11-02 | 苏州飞时曼精密仪器有限公司 | A kind of mechanical-optical setup device for vacuum environment type atomic force microscope |
-
2018
- 2018-03-28 CN CN201810264229.4A patent/CN108562764A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1587982A (en) * | 2004-09-07 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Modular atomic force microscope |
| CN208043857U (en) * | 2018-03-28 | 2018-11-02 | 苏州飞时曼精密仪器有限公司 | A kind of mechanical-optical setup device for vacuum environment type atomic force microscope |
Non-Patent Citations (1)
| Title |
|---|
| TSUNEMI EIKA;KOBAYASHI KEI;OYABU NORIAKI;HIROSE MASAHARU;TAKENAKA YOSHIKO;MATSUSHIGE KAZUMI;YAMADA HIROFUMI: "Development of multi-environment dual-probe atomic force microscopy system using optical beam deflection sensors with vertically incident laser beams.", THE REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 8, no. 2013, pages 083701 - 1 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109884343A (en) * | 2019-02-22 | 2019-06-14 | 浙江中医药大学 | A kind of light-baffling device for delivering directly image viewing for transmission electron microscope |
| CN109884343B (en) * | 2019-02-22 | 2023-12-19 | 浙江中医药大学 | Light blocking device for direct projection image observation of transmission electron microscope |
| CN109799367A (en) * | 2019-03-20 | 2019-05-24 | 国家纳米科学中心 | A kind of four probe atomic force microscope of laser detection formula |
| CN109799367B (en) * | 2019-03-20 | 2022-02-11 | 国家纳米科学中心 | Laser detection type four-probe atomic force microscope |
| CN111337712A (en) * | 2020-04-10 | 2020-06-26 | 清华大学 | Coupling system of vacuum atomic force microscope and vacuum atomic force microscope |
| CN115128788A (en) * | 2022-05-30 | 2022-09-30 | 中国人民解放军国防科技大学 | Horizontally arranged microscope parallel to observation object |
| CN115128788B (en) * | 2022-05-30 | 2023-11-28 | 中国人民解放军国防科技大学 | Horizontally placed microscopic device parallel to observed object |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108562764A (en) | A kind of mechanical-optical setup device for vacuum environment type atomic force microscope | |
| US5144833A (en) | Atomic force microscopy | |
| US6144028A (en) | Scanning probe microscope assembly and method for making confocal, spectrophotometric, Near-Field, and Scanning probe measurements and associated images | |
| US7091476B2 (en) | Scanning probe microscope assembly | |
| AU623703B2 (en) | Photon scanning tunneling microscopy | |
| CN100587394C (en) | Method and device for measuring micro-nano deep groove structure | |
| JP7073532B2 (en) | 3D reconstruction system and 3D reconstruction method | |
| US20130042375A1 (en) | Control system for a scanning probe microscope | |
| CN208043857U (en) | A kind of mechanical-optical setup device for vacuum environment type atomic force microscope | |
| CN101586947B (en) | Differential confocal aiming triggering type microscopic measuring method and device based on resonance girder scanning | |
| CN111487441A (en) | Measuring device based on atomic force microscope and step surface measuring method | |
| CN201138196Y (en) | Measuring apparatus of micro-nano deep groove structure | |
| CN109443711A (en) | A kind of optical elements of large caliber measuring device and method being servo-actuated high-velocity scanning confocal microscopy based on pin hole | |
| CN2397505Y (en) | Optical fibre confocal scanning microscope | |
| Xu et al. | A new micro/nano-touch-trigger probe using an optoelectronic sensor with a wedge prism | |
| CN212379431U (en) | Measuring device based on atomic force microscope | |
| CN1300565C (en) | Atomic force microscope measuring device based on angular measurement | |
| Manske et al. | Nanopositioning and nanomeasuring machine for multi-sensor applications | |
| JPH10282128A (en) | Scanning probe microscope | |
| JP3617242B2 (en) | Micro displacement measurement mechanism and micro displacement mechanism | |
| KR101493837B1 (en) | Microscopy Scanning Photocurrent and Photovoltage at Low Temperature. | |
| Köhnke et al. | Confocal Laser Vibrometry: Visualizing vibrations inside microelectromechanical systems | |
| RU106958U1 (en) | Scanning Near-Field Optical Microscope | |
| US20090139313A1 (en) | Time-Tagged Data for Atomic Force Microscopy | |
| CN111665375A (en) | Atomic force microscope probe and system based on waveguide Bragg grating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |