CN109799138B - In-situ measurement device and in-situ measurement method for elastic modulus and creep characteristic of polishing disc - Google Patents
In-situ measurement device and in-situ measurement method for elastic modulus and creep characteristic of polishing disc Download PDFInfo
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- CN109799138B CN109799138B CN201910127368.7A CN201910127368A CN109799138B CN 109799138 B CN109799138 B CN 109799138B CN 201910127368 A CN201910127368 A CN 201910127368A CN 109799138 B CN109799138 B CN 109799138B
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Abstract
The invention relates to an in-situ measurement device for the elastic modulus and creep characteristic of a polishing disk in full-caliber polishing, which comprises a controller fixed on the top of a beam of a polishing machine tool; the display terminal is in communication connection with the controller; the loading force actuator is fixed on the cross beam and is electrically connected with the controller; a test plate, which is a circular plate; the top of the polishing machine tool is hinged with the loading force actuator, and the bottom of the polishing machine tool is abutted with the polishing disk of the polishing machine tool; and the displacement sensor is fixed on the loading force actuator through a connecting piece and is in communication connection with the controller, and the detection direction of the displacement sensor points to the top of the test board. The invention also provides a measuring method, which realizes the in-situ measurement of the elastic modulus or creep characteristic of the polishing disk, does not need to detach the polishing disk, and has simple operation and high precision; meanwhile, special measuring equipment is not required to be purchased, and the test cost is reduced; because the polishing disk is not required to be disassembled during measurement, the shape precision of the polishing disk is prevented from being changed, and the service life of the polishing disk is prolonged.
Description
Technical Field
The invention relates to the technical field of full-caliber polishing of optical elements, in particular to an in-situ measurement device and a measurement method for the elastic modulus and creep characteristic of a polishing disc in full-caliber polishing.
Background
Full-caliber polishing is one of the main processing technologies of large-size optical elements, and is to process optical elements with smaller sizes than the large-size polishing discs, and the large-size polishing discs cover the whole surfaces of the elements during processing. The method has the advantages of higher material removal efficiency, smoother surface of the processed element, lower intermediate frequency error and the like. The full-caliber polishing discs are various in types and comprise polyurethane polishing discs made of elastic materials, asphalt polishing discs made of viscoelastic materials and the like. The polishing disk is one of key elements of full-caliber polishing, and the elastic modulus and creep property of the polishing disk have very important influence on the surface shape of the element. In the polishing process, the processing performance of the polishing disk gradually deteriorates along with the extension of the polishing time, and the elastic modulus and creep characteristic of the polishing disk change.
At present, the measurement of the elastic modulus and creep characteristic of the polishing disk is an off-line mode, and special measuring equipment is needed, but the large-size polishing disk used for full-caliber polishing is usually fixed on a turntable of a machine tool, is very troublesome to detach and affects the shape precision of the polishing disk, so that the material characteristic of the polishing disk is inconvenient to detect off-line, and the off-line detection precision is poor.
Therefore, it is a problem that a person skilled in the art needs to solve how to provide an in-situ test device for the elastic modulus and creep characteristics of a polishing disc in full-bore polishing.
Disclosure of Invention
In view of the above, the invention provides an in-situ measurement device for the elastic modulus and creep characteristic of the polishing disc in full-caliber polishing, and realizes in-situ detection of the material characteristic of the polishing disc in full-caliber polishing.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
in-situ measurement device for elastic modulus and creep characteristic of polishing disk in full-caliber polishing, which is carried on a polishing machine bed, comprises:
the controller is fixed on the top of the cross beam of the polishing machine tool;
the display terminal is in communication connection with the controller;
the loading force actuator is fixed on the cross beam and is electrically connected with the controller;
the test board is a circular board; the top of the polishing machine tool is hinged with the loading force actuator, and the bottom of the polishing machine tool is abutted with the polishing disk of the polishing machine tool;
and the displacement sensor is fixed on the loading force actuator through a connecting piece and is in communication connection with the controller, and the detection direction of the displacement sensor points to the top of the test board.
Compared with the prior art, the invention discloses an in-situ measurement device for the elastic modulus and the creep characteristic of the polishing disc in full-caliber polishing, wherein the in-situ measurement device is characterized in that the measurement device is directly mounted on a polishing machine bed, a controller controls a loading force executor to directly act on the surface of the polishing disc through a test plate, the height condition of the surface of the polishing disc obtained in the loading process of a displacement sensor is fed back to the controller, and the controller records data and display data through a display terminal, so that in-situ measurement of the elastic modulus or the creep characteristic of the polishing disc is realized, the polishing disc is not required to be detached, and the device is simple to operate and high in precision; meanwhile, special measuring equipment is not required to be purchased, and the test cost is reduced; because the polishing disk is not required to be disassembled during measurement, the shape precision of the polishing disk is prevented from being changed, and the service life of the polishing disk is prolonged.
Preferably, the loading force actuator comprises a fixed frame, an actuator and a ball head ejector rod;
the fixing frame is fixed on the cross beam;
the actuator is arranged on the fixed frame and is electrically connected with the controller;
the ball head ejector rod comprises a ball head and an ejector rod which are integrally connected; the ball head side is hinged with the top of the test board; the ejector rod side is connected with the output end of the actuator. The ball head ejector rod is hinged with the test board through a ball head, so that the test board can adapt to the shape of the polishing disk in the loading force process, and can be constantly kept to be attached to the surface of the polishing disk.
Preferably, the actuator is a drive motor or a hydraulic drive; the driving motor or the hydraulic driver is electrically connected with the controller. The specific driving motor type is selected according to the use condition, the hydraulic driver can be of a hydraulic push rod structure, and the controller is used for controlling the hydraulic pump to supply oil or return oil to push or return the hydraulic rod.
Preferably, the top of the test board is provided with a ball cap groove matched with the ball head of the ball head ejector rod, wherein the ball cap groove and the test board are of a split structure, and the ball cap groove and the test board are fixed by screws, so that the ball head ejector rod is convenient to install or replace.
Preferably, the test plate is made of steel, is not easy to deform, and the type of the steel can be selected according to the material of the polishing disc to be measured.
Preferably, the diameter of the test plate is 10mm-100mm, and the thickness of the test plate is 5mm-20mm, wherein the test plate can be made into a plurality of plates with different specifications, so that the test plate is convenient to test different polishing discs.
Preferably, the connecting piece is an adjustable connecting bracket, and the adjustable connecting bracket comprises a first connecting rod and a second connecting rod; one end of the first connecting rod is hinged with the loading force actuator, and the other end of the first connecting rod is hinged with one end of the second connecting rod; the other end of the second connecting rod is connected with a displacement sensor. The effect of adopting this scheme is: the displacement sensor points to the top of the test board in the loading test process, and the change of the surface of the polishing disk is fed back to the controller.
Preferably, the displacement sensor is a laser displacement sensor, and a Keyence LK-G5000 laser displacement sensor can be adopted, the response frequency is 392KHz, the measurement precision is +/-0.02%, the online measurement time is long, the precision is high, and the error is small.
The invention also provides an in-situ measurement method for the elastic modulus and creep characteristic of the polishing disc in full-caliber polishing, which comprises the following steps:
selecting the surface position of a polishing disk to be measured; fixing the measuring device;
selecting a preload force F of a load force actuator in a controller 0 Time of preload t 0 Force F of loading 1 Load time t 1 ；
Loading according to the pre-loading force F 0 And a preload time t 0 After loading, the loading force actuator applies a loading force F 1 Loading on the test board, and displaying and recording the change of the surface height of the polishing disk in the loading process of the test board on the display terminal until reaching the preset loading time t 1 The method comprises the steps of carrying out a first treatment on the surface of the Then the loading process is finished, and recording is stopped to obtain the surface deformation of the polishing disk under the loading force F 1 Under the action of the loading time t 1 Is a variation of (2).
Compared with the prior art, the method for measuring the elastic modulus and the creep characteristic of the polishing disk in situ in the polishing process has the advantages that the measuring equipment is directly carried on the polishing machine bed, the controller controls the loading force executor to directly act on the surface of the polishing disk through the test board, the height condition of the surface of the polishing disk obtained in the loading process of the displacement sensor is fed back to the controller, the controller records data and display data through the display terminal, the online measurement of the elastic modulus or the creep characteristic of the surface of the polishing disk is realized, the polishing disk is not required to be detached, the operation is simple, and the precision is high; meanwhile, special measuring equipment is not required to be purchased, and the test cost is reduced; because the polishing disk is not required to be disassembled during measurement, the change of the shape precision of the polishing disk is prevented, and the service life of the polishing disk is prolonged; meanwhile, the elastic modulus or creep of the surface of the polishing disk measured by the measuring method provided by the invention can analyze the processing performance of the polishing disk, so as to guide the processing process of the polishing disk.
Preferably, the elastic modulus or creep property of the polishing pad is calculated by the formula:
e＝4F 1 h/(πad 2 ) (1) calculating;
or by e (t) =a (t)/h (2);
wherein, e in the formula (1) is the elastic modulus of the elastic material polishing disk; d is the diameter of the test plate; h is the thickness of the polishing disc; the loading force and the acting time are respectively F 1 、t 1 A is to measure the deformation of the elastic material polishing disk;
in the formula (2), e (t) is a creep function of the viscoelastic material polishing disk, namely creep strain at different loading moments t; a (t) is the deformation of the viscoelastic material polishing disk at different loading moments t; t is the moment of action of loading force, 0<t<t 1 ，t 1 Is the duration of the loading force; h is the thickness of the polishing disc.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an in-situ measurement device for the elastic modulus and creep characteristic of a polishing disc in full-caliber polishing;
FIG. 2 is a view showing a partial enlarged section of an in-situ measurement device B-B for the elastic modulus and creep characteristic of a polishing disc in full-caliber polishing;
FIG. 3 is a schematic diagram showing the structure of the in-situ measurement device for the elastic modulus and creep characteristic of the polishing disk in full-caliber polishing provided by the invention, which is carried on a full-caliber polishing machine tool (the polishing disk is made of a viscoelastic material);
FIG. 4 is an enlarged view of portion A of FIG. 3;
FIG. 5 is a schematic diagram of the structure of the polishing disk elastic modulus and creep characteristic in-situ measurement device in full-caliber polishing provided by the invention, which is carried on a full-caliber quick polishing machine (the polishing disk is made of elastic material);
FIG. 6 is a diagram showing deformation of a polishing disk of viscoelastic material measured by an in-situ measurement method for the elastic modulus and creep characteristic of the polishing disk in full-caliber polishing according to the present invention;
fig. 7 is a diagram showing deformation of the polishing disk made of elastic material, which is measured by the in-situ measurement method for the elastic modulus and creep characteristic of the polishing disk in full-caliber polishing according to the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment of the invention discloses an in-situ measurement device for the elastic modulus and creep characteristic of a polishing disc in full-caliber polishing, which realizes in-situ detection of the material characteristic of the polishing disc in full-caliber polishing.
Referring to fig. 1 to 5, the in-situ measurement device for the elastic modulus and creep characteristic of a polishing disk in full-caliber polishing, provided by the invention, is carried on a polishing machine tool 1 and comprises:
the controller 4 is fixed on the top of the cross beam 2 of the polishing machine tool 1;
the display terminal is in communication connection with the controller 4;
the loading force actuator 5 is fixed on the cross beam 2 and is electrically connected with the controller 4;
the test board 6, the test board 6 is a circular board; the top of the polishing machine tool is hinged with a loading force actuator 5, and the bottom of the polishing machine tool is abutted with a polishing disk of the polishing machine tool 1;
and the displacement sensor 7 is fixed on the loading force actuator 5 through a connecting piece, is in communication connection with the controller 4, and the detection direction of the displacement sensor 7 points to the top of the test board 6.
The invention discloses an in-situ measurement device for the elastic modulus and creep characteristic of a polishing disk in full-caliber polishing, which is characterized in that a measurement device is directly carried on a polishing machine tool 1, a controller 4 controls a loading force executor 5 to directly act on the surface of the polishing disk through a test plate 6, the height condition of the surface of the polishing disk obtained in the loading process through a displacement sensor 7 is fed back to the controller 4, and the controller 4 records data and display data through a display terminal, so that in-situ measurement of the elastic modulus or creep characteristic of the polishing disk is realized, and the polishing disk is not required to be detached, so that the operation is simple and the precision is high; meanwhile, special measuring equipment is not required to be purchased, and the test cost is reduced; because the polishing disk is not required to be disassembled during measurement, the shape precision of the polishing disk is prevented from being changed, and the service life of the polishing disk is prolonged.
In one embodiment of the present invention, referring to fig. 1, the loading force actuator 5 includes a fixing frame 51, an actuator 52 and a ball head ejector 53;
the fixing frame 51 is fixed on the cross beam 2;
the actuator 52 is mounted on the fixing frame 51 and is electrically connected with the controller 4;
the ball head ejector rod 53 comprises a ball head and an ejector rod which are integrally connected; the ball head side is hinged with the top of the test board 6; the ejector rod side is connected to the output end of the actuator 52. The ball head ejector rod 53 is hinged with the test board 6 by a ball head, so that the test board 6 can adapt to the shape of the polishing disk in the loading force process, and can be constantly kept to be attached to the surface of the polishing disk.
Specifically, the actuator 52 is a drive motor or a hydraulic driver; the drive motor or hydraulic drive is electrically connected to the controller 4. The specific driving motor type is selected according to the use condition, the hydraulic driver can be of a hydraulic push rod structure, and the controller 4 controls the hydraulic pump to supply oil or return oil to push or return the hydraulic rod.
In another embodiment of the present invention, referring to fig. 2, the top of the test board 6 is provided with a ball cap groove adapted to the ball of the ball head ejector 53, wherein the ball cap groove and the test board 6 are in a split structure, and the ball head ejector 53 is conveniently installed or replaced by screw fixation.
Specifically, the test board 6 is made of steel, which is not easy to deform, and the type of steel can be selected according to the material of the polishing disk to be measured.
The diameter of the test board 6 is 10mm-100mm, and the thickness is 5mm-20mm, wherein the test board 6 can be made into a plurality of boards with different specifications, so that different polishing discs can be conveniently tested.
In other embodiments of the present invention, referring to fig. 1 and 4, the connection member is an adjustable connection bracket 8, and the adjustable connection bracket 8 includes a first connection rod 81 and a second connection rod 82; one end of the first connecting rod 81 is hinged with the loading force actuator 5, and the other end of the first connecting rod 82 is hinged with one end of the second connecting rod; the other end of the second connecting rod 82 is connected to the displacement sensor 7. The effect of adopting this scheme is: the displacement sensor 7 is advantageously directed to the top of the test plate 6 during the loading test, and the change in the surface of the polishing disc is fed back to the controller 4.
The displacement sensor 7 is a laser displacement sensor, and can be a Keyence LK-G5000 laser displacement sensor, the response frequency is 392KHz, the measurement accuracy is +/-0.02%, the online measurement time is long, the accuracy is high, and the error is small.
Meanwhile, the invention also provides an in-situ measurement method for the elastic modulus and creep characteristic of the polishing disc in full-caliber polishing, which comprises the following steps:
selecting the surface position of a polishing disk to be measured; fixing the measuring device on a polishing machine bed;
selection of the preload force F of the load force actuator 5 in the control 4 0 Time of preload t 0 Force F of loading 1 Load time t 1 ；
Loading according to the pre-loading force F 0 And a preload time t 0 After loading, the loading force actuator 5 applies a loading force F 1 Acting on the test board 6 to load, and displaying and recording the change of the surface height of the polishing disk in the loading process of the test board 6 on the display terminal until reaching the preset loading time t 1 The method comprises the steps of carrying out a first treatment on the surface of the Then the loading process is finished, and recording is stopped to obtain the surface deformation of the polishing disk under the loading force F 1 Under the action of the loading time t 1 Is a variation of (2).
According to the method for measuring the elastic modulus and the creep characteristic of the polishing disk in situ in polishing, provided by the invention, by directly carrying measuring equipment on a polishing machine tool 1, a controller 4 controls a loading force executor 5 to directly act on the surface of the polishing disk through a test plate 6, the height condition of the surface of the polishing disk obtained in the loading process through a displacement sensor 7 is fed back to the controller 4, and the controller 4 records data and display data through a display terminal, so that the online measurement of the elastic modulus or the creep of the surface of the polishing disk is realized, and the polishing disk is not required to be detached, so that the operation is simple and the precision is high; meanwhile, special measuring equipment is not required to be purchased, and the test cost is reduced; the polishing disk is not required to be disassembled during measurement, so that the shape accuracy of the polishing disk is prevented from being changed, and the service life of the polishing disk is prolonged; meanwhile, the elastic modulus or creep characteristic of the polishing disk measured by the measuring method provided by the invention can analyze the processing performance of the polishing disk, so as to guide the processing process of the polishing disk.
Wherein, the elastic modulus or creep characteristic of the polishing disk is represented by the formula:
e＝4F 1 h/(πad 2 ) (1) calculating;
or by e (t) =a (t)/h (2);
wherein, e in the formula (1) is the elastic modulus of the elastic material polishing disk; d is the diameter of the test plate 6; h is the thickness of the polishing disc; the loading force and the acting time are respectively F 1 、t 1 A is to measure the deformation of the elastic material polishing disk;
in the formula (2), e (t) is a creep function of the viscoelastic material polishing disk, namely creep strain at different loading moments t; a (t) is the deformation of the viscoelastic material polishing disk at different loading moments t; t is the moment of action of loading force, 0<t<t 1 ，t 1 Is the duration of the loading force; h is the thickness of the polishing disc.
Specific application example 1
Referring to fig. 3 and 4, the measuring device of the embodiment is loaded in a full-caliber polishing machine tool, a polishing disc is a viscoelastic asphalt polishing disc, the thickness h of the asphalt polishing disc is 15mm, and a multi-station bridge mechanism and a cross beam are arranged above the polishing disc; the measuring device comprises a loading force actuator, a ball head ejector rod and a polishing disc, wherein the loading force actuator is fixed on a cross beam; the diameter of the test plate is 50mm, and the thickness is 5mm; the loading force executor adopts a hydraulic push rod structure, and the loading or return of the hydraulic push rod is realized by controlling the hydraulic pump to pump oil or return oil through a controller; the loading force range of the actuator is controlled between 1N and 200N, and the loading force control precision is less than 0.2N; meanwhile, a Keyence LK-G5000 laser displacement sensor is fixed on a loading force actuator through an adjustable connecting bracket, the test end of the laser displacement sensor is kept to be always directed to the top of the test board, and the test value of the laser displacement sensor is displayed on a display terminal through a controller.
The magnitude of the pre-loading force, the pre-loading time, the loading force and the loading time are set by the controller, can be set manually, and can also be selected from preset data, wherein the pre-loading force and the pre-loading time are that the bottom of the test board is completely attached to the polishing disk before loading test; in the embodiment, a key is arranged on the controller, and the loading force is manually set to be 20N, the loading time is set to be 8min, and the pre-loading force and the loading time are set to be 1N and 5s respectively; then the loading force executor is preloaded under the control of the controller, the loading force acts on the polishing disk from the executor and the ball head ejector rod to the test board, so that the test board is completely attached to the polishing disk, then loading is carried out, the displacement sensor transmits the deformation condition of the polishing disk in real time in the loading process, and the controller receives and displays records through the display terminal.
Sampling period d of laser displacement sensor t Deformation data obtained at 4800 sampling moments measured for 8min is denoted as a (t i ) I=1, … …, 4800, the measurement of the laser displacement sensor is shown in fig. 6, the creep function e (t i ) The method comprises the following steps: e (t) i )＝a(t i )/h，t i ＝d t ×i。
Specific application example 2
Referring to fig. 5, the measuring device of the embodiment is mounted in a full-caliber quick polishing machine, a polishing disc is an elastic polyurethane polishing disc, the thickness of the polishing disc is 1.2mm, and a beam is arranged above the polishing disc; the measuring device comprises a loading force actuator, a ball head ejector rod and a polishing disc, wherein the loading force actuator is fixed on a cross beam; the diameter d of the test plate is 50mm, and the thickness h is 5mm; the actuator in the loading force actuator adopts a driving motor, and the output end of the driving motor is connected with the ball head ejector rod. The test end of the laser displacement sensor is always directed to the top of the test board, and the test value of the laser displacement sensor is displayed on the display terminal through the controller.
The pre-loading force, the pre-loading time, the loading force and the loading time are selected by the pre-set data of the controller; in the embodiment, the loading force is 20N, the loading time is 1min, and the pre-loading force and the loading time are respectively 1N and 5s; then the loading force executor is preloaded under the control of the controller, the loading force acts on the polishing disk from the executor and the ball head ejector rod to the test board, so that the test board and the polishing disk are completely attached, then loading is carried out, the displacement sensor transmits deformation (namely, the height change of the test board) of the surface of the polishing disk in real time in the loading process, and the controller receives and displays records through the display terminal.
Sampling period d of laser displacement sensor t Deformation data obtained at 600 sampling moments measured for 1min are denoted as a (t i ) I=1, … …, 600, the measurement values of the laser displacement sensor are shown in fig. 7,a (t i ) Approximately 5 μm, the elastic modulus e of the elastic polyurethane polishing disk is determined according to e=4f 1 h/(πad 2 ) And carrying out substitution numerical calculation.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. In-situ measurement device for elastic modulus and creep characteristic of polishing disk in full-caliber polishing, which is carried on a polishing machine tool (1), is characterized by comprising:
the controller (4) is fixed on the top of the cross beam (2) of the polishing machine tool;
the display terminal is in communication connection with the controller (4);
the loading force actuator (5) is fixed on the cross beam (2) and is electrically connected with the controller (4);
the test board (6), the said test board (6) is the circular plate; the top of the polishing machine tool is hinged with the loading force actuator (5), and the bottom of the polishing machine tool is abutted with the polishing disc (3) of the polishing machine tool;
the displacement sensor (7) is fixed on the loading force actuator (5) through a connecting piece, is in communication connection with the controller (4), and the detection direction of the displacement sensor (7) points to the top of the test board (6);
the loading force actuator (5) comprises a fixing frame (51), an actuator (52) and a ball head ejector rod (53); the fixing frame (51) is fixed on the cross beam (2); the actuator (52) is arranged on the fixed frame (51) and is electrically connected with the controller (4); the ball head ejector rod (53) comprises a ball head and an ejector rod which are integrally connected; the ball head side is hinged with the top of the test board (6); the ejector rod side is connected with the output end of the actuator (52);
the connecting piece is an adjustable connecting bracket (8), and the adjustable connecting bracket (8) comprises a first connecting rod (81) and a second connecting rod (82); one end of the first connecting rod (81) is hinged with the loading force actuator (5), and the other end of the first connecting rod is hinged with one end of the second connecting rod (82); the other end of the second connecting rod (82) is connected with the displacement sensor (7).
2. The in-situ measurement device for the elastic modulus and the creep characteristic of the polishing disc in full-caliber polishing according to claim 1, wherein the actuator (52) is a driving motor or a hydraulic driver; the driving motor or the hydraulic driver is electrically connected with the controller (4).
3. The in-situ measurement device for the elastic modulus and the creep characteristic of the polishing disc in full-caliber polishing according to claim 1, wherein the top of the test board (6) is provided with a ball cap groove matched with the ball head of the ball head ejector rod (53).
4. The in-situ measurement device for the elastic modulus and the creep characteristic of the polishing disc in full-caliber polishing according to claim 1, wherein the test plate (6) is made of steel.
5. The in-situ measurement device for the elastic modulus and the creep characteristic of the polishing disc in full-caliber polishing according to claim 1, wherein the diameter of the test plate (6) is 10mm-100mm, and the thickness is 5mm-20mm.
6. The device for measuring the elastic modulus and creep characteristics of a polishing disc in full-caliber polishing according to any one of claims 1 to 5, wherein the displacement sensor (7) is a laser displacement sensor.
7. The in-situ measurement method for the elastic modulus and creep characteristic of the polishing disc in full-caliber polishing is characterized by comprising the following steps of:
selecting the surface position of a polishing disk to be measured; fixing the measuring device according to any one of claims 1-6;
selecting a preload force F of a load force actuator in a controller 0 Time of preload t 0 Force F of loading 1 Load time t 1 ；
Loading according to the pre-loading force F 0 And a preload time t 0 After loading, the loading force actuator applies a loading force F 1 Loading on the test board, and displaying and recording the change of the surface height of the polishing disk in the loading process of the test board on the display terminal until reaching the preset loading time t 1 The method comprises the steps of carrying out a first treatment on the surface of the Then the loading process is finished, and recording is stopped to obtain the surface deformation of the polishing disk under the loading force F 1 Under the action of the loading time t 1 Is a variation of (2).
8. The method for in-situ measurement of elastic modulus and creep property of polishing pad in full-bore polishing as set forth in claim 7, wherein the elastic modulus or creep property of the polishing pad is calculated by the formula: e=4f 1 h/(πad 2 ) (1) calculating;
or by e (t) =a (t)/h (2);
wherein, e in the formula (1) is the elastic modulus of the elastic material polishing disk; d is the diameter of the test plate; h is the thickness of the polishing disc; the loading force and the acting time are respectively F 1 、t 1 A is to measure the deformation of the elastic material polishing disk;
in the formula (2), e (t) is a creep function of the viscoelastic material polishing disk, namely creep strain at different loading moments t; a (t) is the deformation of the viscoelastic material polishing disk at different loading moments t; t is the moment of action of loading force, 0<t<t 1 ，t 1 Is the duration of the loading force; h is the thickness of the polishing disc.
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| CN201910127368.7A CN109799138B (en) | 2019-02-20 | 2019-02-20 | In-situ measurement device and in-situ measurement method for elastic modulus and creep characteristic of polishing disc |
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| CN201910127368.7A CN109799138B (en) | 2019-02-20 | 2019-02-20 | In-situ measurement device and in-situ measurement method for elastic modulus and creep characteristic of polishing disc |
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| CN109799138B true CN109799138B (en) | 2023-09-22 |
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Citations (9)
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