CN109782264A - A kind of MEMS galvanometer synchronization signal feedback device, method and laser radar - Google Patents
A kind of MEMS galvanometer synchronization signal feedback device, method and laser radar Download PDFInfo
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Abstract
The present invention provides a kind of MEMS galvanometer synchronization signal feedback device, method and laser radars, laser emission element emits laser and after beam shaping unit carries out beam shaping, is incident on after the MEMS transmitting unit tuned reflection driven by MEMS driving unit and carries out visual field scanning to object plane to be measured；Photodetector is used to feed back electric signal with processing unit to signal control when detecting that MEMS transmitting unit is in maximum deflection angle, so that signal control according to the electric signal controls the laser drive unit with processing unit, realize that MEMS transmitting unit is synchronous with laser emission element.MEMS galvanometer synchronization signal feedback device introducing feedback signal provided by the invention is used to control luminous realize of laser emission element and synchronizes and form closed-loop control, and device integrally has flexible stability, it can be achieved that uniform or non-homogeneous multi-thread scanning.And compared to currently used mechanical rotary laser radar installations technology, there is the features such as size is small, structure is simple, easy of integration.
Description
Technical field
The present invention relates to laser radar technique fields, and in particular to a kind of MEMS galvanometer synchronization signal feedback device, method
And laser radar.
Background technique
Laser radar detects the information such as target bearing, speed by transmitting laser beam, with range accuracy height, side
Tropism is strong, and response is fast, the advantages such as is not influenced by ground clutter, has been widely used social every field.And laser radar can
Be up to the other steric environment map datum of Centimeter Level to form precision, thus advanced driving assistance system (ADAS) and nobody drive
Sailing has important application in system.
Mechanical gyro unit realization, electric machine structure are based primarily upon applied to the technical solution of scanning laser radar system at present
Complexity, size is larger, not easy of integration；In addition there are technical solutions to change optical path using the resonance of MEMS galvanometer, completes multi-thread beam
Scanning, the program improve the stability of total system, and have the features such as size is small, structure is simple, at low cost.But due to
MEMS galvanometer vibration processes real-time position information and laser emission element control signal synchronously control relatively difficult to achieve, to being
System design and debugging bring biggish difficulty.
Summary of the invention
For the defects in the prior art, the present invention provides a kind of MEMS galvanometer synchronization signal feedback device, method and swashs
Optical radar, the present invention can be realized the synchronously control of Laser emission and the oscillation of MEMS galvanometer, and have the advantages of simple structure and easy realization, at
This is cheap, and stability is good.
To achieve the above object, the present invention the following technical schemes are provided:
In a first aspect, the present invention provides a kind of MEMS galvanometer synchronization signal feedback devices, comprising: laser drive unit,
Laser emission element, beam shaping unit, MEMS driving unit, MEMS transmitting unit, photodetector and signal control with
Processing unit, the signal control are connect with the laser drive unit and the photodetector respectively with processing unit；
The laser emission element emits laser under the driving of the laser drive unit and passes through the beam shaping
After unit carries out beam shaping, it is incident on the MEMS transmitting unit by MEMS driving unit driving and is emitted by the MEMS
Unit carries out visual field scanning to object plane to be measured after carrying out tuned reflection；Wherein, the MEMS driving unit drives the MEMS
Transmitting unit is vibrated according to preset resonance frequency, to guarantee the reality of the laser after MEMS transmitting unit tuned reflection
Scanning field of view range w1Greater than the field range w of object plane to be measured2；
The photodetector is located at the visual field within the actual scanning field range and being located at the object plane to be measured
Except range, the photodetector is being detected for detecting whether the MEMS transmitting unit is in maximum deflection angle
Electric signal is sent with processing unit to the signal control when being in maximum deflection angle to the MEMS transmitting unit；
The signal control and processing unit control the laser drive unit when receiving the electric signal,
Realize that the MEMS transmitting unit is synchronous with the laser emission element.
Further, the number of the photodetector is one, and the photodetector is for detecting the MEMS transmitting
The positive maximum deflection angle or negative sense maximum deflection angle of unit, wherein the photodetector, which is placed on, can only receive just
The light beam that other deflection angles reflect is not received to the light beam that maximum deflection angle or negative sense maximum deflection angle reflect
Position.
Further, the number of the photodetector is two, wherein the first photodetector is described for detecting
The positive maximum deflection angle of MEMS transmitting unit, the second photodetector are used to detect the negative sense of the MEMS transmitting unit most
Large deflection angle degree；Wherein, first photodetector be placed on the light beam that can only receive the reflection of positive maximum deflection angle and
The position of the light beam of other deflection angles reflection is not received；Second photodetector, which is placed on, can only receive reversed maximum
Deflection angle reflection light beam and do not receive other deflection angles reflection light beam position.
Further, described device further include: beam reception unit, the beam reception unit from determinand for that will put down
The laser echo signal of face reflection converges on the photodetector.
Further, the beam reception unit is made of 2 or more lens or field lens.
Further, the lens or field lens, which use, has the material of high transmittance to be made near-infrared.
Further, the driving method of the MEMS driving unit includes Piezoelectric Driving, electrothermal drive, electrostatic drive and electricity
One of Magnetic driving is a variety of.
Further, the beam shaping unit is by 2 or more aspherical or free form surface lens or by 2 or more
Ordinary lens composition, the laser beam for emitting the laser emission element carry out shaping.
Second aspect, the present invention also provides a kind of based on MEMS galvanometer synchronization signal feedback device recited above
MEMS galvanometer synchronization signal feedback method, comprising:
S1, the MEMS transmitting unit shake under the driving of the MEMS driving unit according to preset resonance frequency
It swings, wherein the actual scanning field range of the laser after MEMS transmitting unit tuned reflection is greater than the visual field of object plane to be measured
Range；
S2, the laser emission element emit laser beam under the driving of the laser drive unit；
S3, the photodetector are being examined for detecting whether the MEMS transmitting unit is in maximum deflection angle
When measuring the MEMS transmitting unit and being in maximum deflection angle, the control of Xiang Suoshu signal feeds back electric signal with processing unit；
S4, signal control according to the electric signal control the laser drive unit with processing unit, real
The existing MEMS transmitting unit is synchronous with the laser emission element；
S5, circulation execute step S2~S4, realize that real-time visual field beam angulation is uniform or the multi-thread scanning of density.
The third aspect, the present invention also provides a kind of laser radars, including MEMS galvanometer synchronization signal as described above
Feedback device.
As shown from the above technical solution, MEMS galvanometer synchronization signal feedback device provided by the invention, utilizes photodetection
Device obtains MEMS transmitting unit real-time position information (maximum deflection angle) in vibration processes in real time, and by MEMS transmitting unit
Location information feed back to laser drive unit so that laser drive unit is according to the location information of MEMS transmitting unit to laser
Transmitting unit is driven, and then realizes the synchronously control that laser emission element shines and MEMS transmitting unit vibrates.Further
Ground, MEMS galvanometer synchronization signal feedback device provided by the invention, compared to currently used mechanical rotary laser radar installations, tool
Have that size is small, has the advantages of simple structure and easy realization, at low cost, stability is good, the advantages such as easy of integration.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the present invention
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the structural schematic diagram for the MEMS galvanometer synchronization signal feedback device that one embodiment of the invention provides；
Fig. 2 is the operation principle schematic diagram for the MEMS galvanometer synchronization signal feedback device that one embodiment of the invention provides；
Fig. 3 is laser-driven signal, MEMS galvanometer driving signal and the MEMS oscillator signal that one embodiment of the invention provides
Between relation schematic diagram；
Fig. 4 be another embodiment of the present invention provides MEMS galvanometer synchronization signal feedback method flow chart；
Wherein, the label meaning above in each figure is as follows:
101 indicate laser drive unit；102 indicate laser emission element；103 indicate beam shaping unit；104 indicate
MEMS driving unit；105 indicate MEMS transmitting unit；106 indicate scanning area object plane；107 indicate the first photodetector；
108 indicate the second photodetector；109 indicate signal control and processing unit；201 indicate primary optical axis ray position；1061 tables
Show object plane to be measured；1062 indicate that first refers to object plane；1063 indicate that second refers to object plane.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
Realize that technical problem present in the laser radar of multi-thread beam scanning is using MEMS galvanometer existing, it is more difficult to realize
Laser emission is vibrated synchronous with MEMS galvanometer.To solve this problem, it is same to provide a kind of MEMS galvanometer for one embodiment of the invention
Signal feedback device is walked, referring to Fig. 1 and Fig. 2, which includes: laser drive unit 101, laser emission element 102, light
Beam shaping unit 103, MEMS driving unit 104, MEMS transmitting unit 105, photodetector 107 and 108 and signal control
With processing unit 109, signal control and processing unit 109 respectively with the laser drive unit 101 and the photoelectricity
Detector 107 and 108 connects；It is understood that MEMS transmitting unit 105 is realized using MEMS galvanometer；The beam shaping
Unit 103 is formed by 2 or more aspherical or free form surface lens or by 2 or more ordinary lens, for swashing to described
The laser beam that light emitting unit 102 emits carries out shaping；105 He of the laser emission element 102 and MEMS transmitting unit
Primary optical axis between the microscope group of beam shaping unit 103 keeps being overlapped；
The laser emission element 102 emits laser under the driving of the laser drive unit 101 and passes through the light
After beam shaping unit 103 carries out beam shaping, it is incident on the MEMS transmitting unit 105 driven by the MEMS driving unit 104
And by carrying out visual field scanning to object plane to be measured after the MEMS transmitting unit 105 progress tuned reflection；Wherein, the MEMS drives
Moving cell 104 drives the MEMS transmitting unit 105 to be vibrated according to preset resonance frequency, single to guarantee to emit through MEMS
The actual scanning field range w of laser after first 105 tuned reflections1Greater than the field range w of object plane to be measured2；It is understood that
It is that the MEMS driving unit 104 can change the MEMS transmitting unit 105 by way of adjusting driving circuit frequency
Resonance frequency, and then change the actual scanning field range of the MEMS transmitting unit 105；It is understood that described
The driving method of MEMS driving unit 104 may include one of Piezoelectric Driving, electrothermal drive, electrostatic drive and electromagnetic drive
Or it is a variety of.
Wherein, the photodetector is located within the actual scanning field range and is located at the object plane to be measured
Except field range.For example, the photodetector is located at what the MEMS transmitting unit 105 reflected under maximum deflection angle
Laser beam can cannot pass through the photodetection by the photodetector and the laser reflected under other deflection angles
The position of device, so that the photodetector can be according to whether receiving MEMS transmitting unit 105 described in optical signal detecting be
It is no to be in maximum deflection angle, and when detecting that the MEMS transmitting unit 105 is in maximum deflection angle to the signal
Control sends electric signal with processing unit 109；
Signal control and processing unit 109 when receiving the electric signal to the laser drive unit 101 into
Row control, realizes that the MEMS transmitting unit 105 is synchronous with the laser emission element 102.
As it can be seen that MEMS galvanometer synchronization signal feedback device provided in an embodiment of the present invention realizes the synchronously control of closed loop.
It is understood that since the laser of the laser emission element 102 transmitting is cyclic pulse signal, and it is described
When MEMS transmitting unit 105 is in resonant state, deflection angle and time at SIN function relationship, in a harmonic period
In, the MEMS transmitting unit has a positive maximum deflection angle and a negative sense maximum deflection angle, therefore can basis
Positive maximum deflection angle or negative sense maximum deflection angle the control laser emission element of the MEMS transmitting unit detected are synchronous
It shines, to realize that laser emission element is synchronous with the MEMS transmitting unit.Fig. 3 is laser provided in an embodiment of the present invention
Relation schematic diagram between driving signal, MEMS galvanometer driving signal and MEMS oscillator signal.From figure 3, it can be seen that working as MEMS
When galvanometer is in resonant state, deflection angle and time, in a cycle change procedure, MEMS was driven at SIN function relationship
Dynamic voltage signal realizes triggering using square-wave signal, and the edge of rising edge corresponds to the maximum deflection angle of MEMS galvanometer deflection, and
And laser-driven signal is cyclic pulse signal.
It is understood that the number of the photodetector can be one, when the number of photodetector can be
At one, which is used to detect the positive maximum deflection angle or negative sense maximum deflection angle of the MEMS transmitting unit
Degree；Wherein, the photodetector be placed on can only receive positive maximum deflection angle or negative sense maximum deflection angle reflection
Light beam and do not receive other deflection angles reflection light beam position.
It is understood that the number of the photodetector can also be two, when the number of photodetector can be with
When being two, the first photodetector is used to detect the positive maximum deflection angle of the MEMS transmitting unit, and the second photoelectricity is visited
Survey the negative sense maximum deflection angle that device is used to detect the MEMS transmitting unit；Wherein, first photodetector is placed on only
The light beam of positive maximum deflection angle reflection can be received and do not receive the position for the light beam that other deflection angles reflect；Second
A photodetector is placed on the light beam that can only receive reversed maximum deflection angle reflection and does not receive other deflection angles
The position of the light beam of reflection.
Referring to Fig. 1 and Fig. 2, the present embodiment definition is located within the actual scanning field range and is located at the determinand
Object plane except the field range of plane is known as referring to object plane (1062 and 1063), object plane (1061) to be measured and reference
Object plane (1062 and 1063) has collectively constituted the scanning area object plane 106 in Fig. 1.It wherein, include in Fig. 2 with reference to object plane
Shown in first refer to object plane 1063 with reference to object plane 1062 and second, the present embodiment defines simultaneously to be scanned to the reference substance
Optical signal in plane is known as reference optical signal, and reference optical signal includes scanning to first with reference to the first ginseng on object plane 1062
Optical signal and scanning are examined to second with reference to the second reference optical signal on object plane 1063.First photodetection shown in Fig. 2
Device 107 and the second photodetector 108 are respectively used to the edge optical signal and the in the first reference optical signal field range of detection
Edge optical signal in two reference optical signal field ranges.When the first photodetector 107 detects the first reference optical signal view
When edge optical signal in range, indicate that the MEMS transmitting unit 105 is now in positive maximum deflection angle, when second
When photodetector 108 detects the edge optical signal in the second reference optical signal field range, the MEMS hair at this time is indicated
It penetrates unit 105 and is in negative sense maximum deflection angle.As it can be seen that the embodiment of the present invention is believed light using the photoelectric effect of photodetector
Number be converted into electric signal, and electric signal be transferred to signal control and processing unit 109, so by signal control with handle it is single
First 109 pairs of laser drive units 101 control, and realize the MEMS transmitting unit 105 and the laser emission element
102 synchronization.
It is understood that if the MEMS transmitting unit 105 corresponding actual scanning visual field under maximum deflection angle
Range size w1=35 °, the corresponding field range w of object plane to be measured2=30 °, then the first photodetector, which is placed on, to receive
θ=+ 17.5°Physical location on；Second photodetector, which is placed on, can only receive θ=- 17.5°Physical location on.
It is understood that when using signal feedback is carried out based on two photodetectors shown in Fig. 2, described in expression
MEMS galvanometer synchronization signal feedback device has carried out synchronous calibration twice in a harmonic period, so as to more precisely
Realize that the MEMS transmitting unit is synchronous with the laser emission element.
In addition, in order to reduce equipment cost and complexity, the number of the photodetector may be one, one
Photodetector can be used for detecting the positive maximum deflection angle or negative sense maximum deflection angle of the MEMS transmitting unit, when
When the number of the photodetector is one, it is equivalent to a harmonic period and carries out a synchronous calibration.
In addition, it should be noted that, not limiting in the present embodiment the number of photodetector and specific setting position
It is fixed, as long as being able to satisfy photodetector can detecte whether the MEMS transmitting unit is in maximum deflection angle and can't detect
The other deflection angles of MEMS transmitting unit.
The content as shown in Fig. 1 and Fig. 2 is adopted it is found that MEMS galvanometer synchronization signal feedback device provided in an embodiment of the present invention
With the resonant vibration of the micro- galvanometer of MEMS, the beam emissions being emitted on the micro- galvanometer mirror surface of MEMS are reflected into certain visual field and distance
The object of range, while introducing reference optical signal in the out-of-plane peripheral field of determinand and forming signal feedback control.It compares
Realize that the device of laser scanning, MEMS galvanometer improve the stabilization of scanning laser radar using mechanical scanning or motor drive mode
Property and angular resolution and scan frequency, and be easily integrated, be conducive to push laser radar technique to miniaturization, lightness
Develop with integrated direction.
In a kind of optional embodiment, the MEMS galvanometer synchronization signal feedback device further include: beam reception unit,
The beam reception unit is for will converge to the photodetector from the laser echo signal of determinand plane reflection.It is excellent
Selection of land, the beam reception unit are made of 2 or more lens or field lens, and the lens or field lens are high saturating using having to near-infrared
The material for crossing rate is made.
Further, since the laser emission element can emit the laser beam of optional frequency, if according to described
The Signals in Laser beam frequencies of photodetector feedback and delay are controlled, then the angle that may be implemented under multi-thread beam is equal
Even scanning or density unevenly scan, for example, the significant points in detection improve luminous frequency, data volume increases, more can be quasi-
The really time of day of identification testee；Keep system entire scan more reasonable, application prospect is also more extensive.
As seen from the above description, MEMS galvanometer synchronization signal feedback device provided in an embodiment of the present invention, is visited using photoelectricity
It surveys device and obtains MEMS transmitting unit real-time position information (maximum deflection angle) in vibration processes in real time, and MEMS is emitted into list
The location information of member feeds back to laser drive unit, so that laser drive unit is according to the location information of MEMS transmitting unit to sharp
Light emitting unit is driven, and then realizes the synchronously control that laser emission element shines and MEMS transmitting unit vibrates.Into one
Step ground, MEMS galvanometer synchronization signal feedback device provided in an embodiment of the present invention, compared to currently used mechanical rotary laser thunder
Up to device, have that size is small, has the advantages of simple structure and easy realization, at low cost, stability is good, the advantages such as easy of integration.
Based on identical inventive concept, another embodiment of the present invention provides a kind of based on MEMS described in above example
The MEMS galvanometer synchronization signal feedback method of galvanometer synchronization signal feedback device, referring to fig. 4, this method comprises the following steps:
S1: the MEMS transmitting unit shakes under the driving of the MEMS driving unit according to preset resonance frequency
It swings, wherein the actual scanning field range of the laser after MEMS transmitting unit tuned reflection is greater than the visual field of object plane to be measured
Range.
S2: the laser emission element emits laser beam under the driving of the laser drive unit.
S3: the photodetector is being examined for detecting whether the MEMS transmitting unit is in maximum deflection angle
When measuring the MEMS transmitting unit and being in maximum deflection angle, the control of Xiang Suoshu signal feeds back electric signal with processing unit.
S4: the signal control according to the electric signal controls the laser drive unit with processing unit, real
The existing MEMS transmitting unit is synchronous with the laser emission element.
S5: circulation executes step S2~S4, realizes that real-time visual field beam angulation is uniform or the multi-thread scanning of density.
MEMS galvanometer synchronization signal feedback method provided in this embodiment, as using the vibration of MEMS described in above example
Mirror synchronization signal feedback device is realized, therefore its principle is similar with technical effect, and details are not described herein again.
Based on identical inventive concept, further embodiment of this invention provides a kind of laser radar, which includes
MEMS galvanometer synchronization signal feedback device described in above example.
Laser radar provided in this embodiment, as including the feedback dress of MEMS galvanometer synchronization signal described in above example
It sets, therefore its principle is similar with technical effect, details are not described herein again.
The above examples are only used to illustrate the technical scheme of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation
Technical solution documented by example is modified or equivalent replacement of some of the technical features；And these are modified or replace
It changes, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of MEMS galvanometer synchronization signal feedback device characterized by comprising laser drive unit, laser emission element,
Beam shaping unit, MEMS driving unit, MEMS transmitting unit, photodetector and signal control and processing unit, it is described
Signal control is connect with the laser drive unit and the photodetector respectively with processing unit；
The laser emission element emits laser under the driving of the laser drive unit and passes through the beam shaping unit
After carrying out beam shaping, it is incident on by the MEMS transmitting unit of MEMS driving unit driving and by the MEMS transmitting unit
Visual field scanning is carried out to object plane to be measured after carrying out tuned reflection；Wherein, the MEMS driving unit drives the MEMS transmitting
Unit is vibrated according to preset resonance frequency, to guarantee the actual scanning of the laser after MEMS transmitting unit tuned reflection
Field range w1Greater than the field range w of object plane to be measured2；
The photodetector is located at the field range within the actual scanning field range and being located at the object plane to be measured
Except, the photodetector is used to detect whether the MEMS transmitting unit is in maximum deflection angle, and detecting
It states and sends electric signal with processing unit to the signal control when MEMS transmitting unit is in maximum deflection angle；
The signal control and processing unit control the laser drive unit when receiving the electric signal, realize
The MEMS transmitting unit is synchronous with the laser emission element.
2. the apparatus according to claim 1, which is characterized in that the number of the photodetector is one, which visits
Survey positive maximum deflection angle or negative sense maximum deflection angle that device is used to detect the MEMS transmitting unit；Wherein, the photoelectricity
Detector is placed on the light beam that can only receive positive maximum deflection angle or the reflection of negative sense maximum deflection angle and does not receive
The position of the light beam of other deflection angles reflection.
3. the apparatus according to claim 1, which is characterized in that the number of the photodetector is two, the first photoelectricity
Detector is used to detect the positive maximum deflection angle of the MEMS transmitting unit, and the second photodetector is described for detecting
The negative sense maximum deflection angle of MEMS transmitting unit；Wherein, first photodetector, which is placed on, can only receive positive maximum
Deflection angle reflection light beam and do not receive other deflection angles reflection light beam position；Second photodetector is placed
The light beam and the position for not receiving the light beam of other deflection angles reflection that reversed maximum deflection angle reflects can only received.
4. the apparatus according to claim 1, which is characterized in that further include: beam reception unit, the beam reception unit
For the photodetector will to be converged to from the laser echo signal of determinand plane reflection.
5. device according to claim 4, which is characterized in that the beam reception unit is by 2 or more lens or field lens
Composition.
6. device according to claim 5, which is characterized in that the lens or field lens are using having high transmittance to near-infrared
Material be made.
7. the apparatus according to claim 1, which is characterized in that the driving method of the MEMS driving unit includes that piezoelectricity drives
One of dynamic, electrothermal drive, electrostatic drive and electromagnetic drive are a variety of.
8. the apparatus according to claim 1, which is characterized in that the beam shaping unit by 2 or more it is aspherical or from
Formed by the lens of curved surface or by 2 or more ordinary lens, the laser beam for emitting the laser emission element into
Row shaping.
9. a kind of MEMS galvanometer based on MEMS galvanometer synchronization signal feedback device as described in any one of claims 1 to 8 is same
Walk signal feedback method characterized by comprising
S1, the MEMS transmitting unit are vibrated under the driving of the MEMS driving unit according to preset resonance frequency,
Wherein, the actual scanning field range of the laser after MEMS transmitting unit tuned reflection is greater than the visual field model of object plane to be measured
It encloses；
S2, the laser emission element emit laser beam under the driving of the laser drive unit；
S3, the photodetector are being detected for detecting whether the MEMS transmitting unit is in maximum deflection angle
When the MEMS transmitting unit is in maximum deflection angle, the control of Xiang Suoshu signal feeds back electric signal with processing unit；
S4, signal control according to the electric signal control the laser drive unit with processing unit, realize institute
It is synchronous with the laser emission element to state MEMS transmitting unit；
S5, circulation execute step S2~S4, realize that real-time visual field beam angulation is uniform or the multi-thread scanning of density.
10. a kind of laser radar, which is characterized in that including MEMS galvanometer synchronization signal as described in any one of claims 1 to 8
Feedback device.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112345207A (en) * | 2020-10-28 | 2021-02-09 | 歌尔光学科技有限公司 | Galvanometer detection device, galvanometer detection method and readable storage medium |
| CN113411560A (en) * | 2020-09-11 | 2021-09-17 | 梅卡曼德（北京）机器人科技有限公司 | Modulation method, device and system for imaging scanning signal synchronization |
| CN114706212A (en) * | 2022-04-08 | 2022-07-05 | 佛山市顺德区蚬华多媒体制品有限公司 | Driving method of electromagnetic driving micro motor |
| CN115236684A (en) * | 2022-09-23 | 2022-10-25 | 浙江大华技术股份有限公司 | Laser radar scanning method, device, computer equipment and storage medium |
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