CN109683174A - Laser radar scanning system and method, vehicle - Google Patents
Laser radar scanning system and method, vehicle Download PDFInfo
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- CN109683174A CN109683174A CN201710977012.3A CN201710977012A CN109683174A CN 109683174 A CN109683174 A CN 109683174A CN 201710977012 A CN201710977012 A CN 201710977012A CN 109683174 A CN109683174 A CN 109683174A
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- 238000000034 method Methods 0.000 title claims abstract description 50
- 238000007493 shaping process Methods 0.000 claims abstract description 43
- 238000012545 processing Methods 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 11
- 230000001360 synchronised effect Effects 0.000 claims description 9
- 238000004891 communication Methods 0.000 claims description 3
- 230000033001 locomotion Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 13
- 238000005259 measurement Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000009897 systematic effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000005622 photoelectricity Effects 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
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- 230000003760 hair shine Effects 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
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- 239000007787 solid Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
- G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
The present invention provides a kind of laser radar scanning system and method, vehicle, laser radar scanning system includes processor, and laser emission element connected to the processor and laser pick-off unit respectively；Laser emission element includes: beam shaping unit, and is separately positioned on the laser emitter and the first MEMS galvanometer of beam shaping unit two sides；Laser pick-off unit includes: light beam convergence unit, and is separately positioned on the laser pickoff and the 2nd MEMS galvanometer of light beam convergence unit two sides, and the 2nd MEMS galvanometer is arranged in parallel on the side of the first MEMS galvanometer and the position far from testee；In the operational process of laser radar scanning system, the deflection angle of the first MEMS galvanometer and the 2nd MEMS galvanometer keeps synchronizing.The present invention can be realized the scanning accurately and securely to testee, and accurately can carry out the non-uniform scanning of density for testee, be widely used in different application and testee.
Description
Technical field
The present invention relates to laser radar technique fields, and in particular to a kind of laser radar scanning system and method, vehicle.
Background technique
Key core technologies one of of the laser radar technique as pilotless automobile, because range accuracy is high, high directivity,
Response is fast, the advantages such as is not influenced by ground clutter, and information needed for capable of effectively providing Vehicle Decision Method and control system, becomes mesh
Preceding unmanned environment senses most effective scheme.
In recent years, scanning type laser radar range finding technology graduallys mature, at present applied to the scanning ranging on laser radar
Methods and techniques are broadly divided into traditional type and solid state.Conventional laser radar scanning method is real based on rotary parts such as motors
Now, complicated in mechanical structure, size are larger；And scan method used by solid-state laser radar is to change optical path by galvanometer,
Multi-thread scanning can be realized without motor；Receiving portion since transmitting optical path field angle is larger, in existing scanning system
Two schemes are mainly used, one is realize using an APD array reception pipe；One is real using multiple independent APD pipes
It is existing.
But there are at high cost, light path design difficulty, big and applicability is low due to the limitation of structure setting asks for the scheme
Topic.
Summary of the invention
For the problems of the prior art, the present invention provides a kind of laser radar scanning system and method, vehicle, structure letter
List and flexibility height can be realized the scanning accurately and securely to testee, and can accurately carry out for testee
The non-uniform scanning of density is widely used in different application and testee.
In order to solve the above technical problems, the present invention the following technical schemes are provided:
In a first aspect, the present invention provides a kind of laser radar scanning system, the laser radar scanning system includes: processing
Device, and, the laser emission element and laser pick-off unit being connected to the processor respectively；
The laser emission element includes: beam shaping unit, and is separately positioned on the beam shaping unit two sides
Laser emitter and the first MEMS galvanometer, the light that the laser emitter issues is via the beam shaping unit by first
MEMS vibration mirror reflected is to testee；
The laser pick-off unit includes: light beam convergence unit, and is separately positioned on light beam convergence unit two sides
Laser pickoff and the 2nd MEMS galvanometer, the 2nd MEMS galvanometer be arranged in parallel in the side of the first MEMS galvanometer and
On position far from the testee, so that the light of testee reflection is converged by the 2nd MEMS galvanometer and light beam
Unit is transmitted to the laser pickoff；
In the operational process of the laser radar scanning system, the first MEMS galvanometer and the 2nd MEMS galvanometer it is inclined
Gyration keeps synchronizing.
Further, the scanning system further include: two are separately positioned on the first MEMS galvanometer and described second
Driver on MEMS galvanometer；
The driver of the first MEMS galvanometer is set and the driver that is arranged on the 2nd MEMS galvanometer with
The processor connection, so that the driver of the first MEMS galvanometer is according to the order-driven received from the processor
First MEMS galvanometer is deflected and the driver of the 2nd MEMS galvanometer drives according to the instruction received from the processor
The 2nd MEMS galvanometer is moved to carry out and the first MEMS galvanometer synchronous deflection.
Further, the laser emitter is LD laser tube, and the LD laser tube is connected to the processor, so that
The processor controls the LD laser tube and carries out Laser emission with optional frequency.
Further, the laser pickoff is APD photodetector, and the APD photodetector and the processing
Device connection, so that received light is converted electric signal by the APD photodetector, and the electric signal is sent to the place
Manage device.
Further, the scanning system includes multiple laser emission elements and laser pick-off unit；
The laser emission element is identical with the setting quantity of laser pick-off unit, and each described laser emission element
Matched with a laser pick-off unit；
Each laser emission element and laser pick-off unit are connected to the processor.
Second aspect, the present invention also provides the laser radar scannings that laser radar scanning system described in a kind of application is realized
Method, the scan method include:
Step 1: the processor controls the deflection that the first MEMS galvanometer and the 2nd MEMS galvanometer synchronize
Movement；
Step 2: the processor controls the laser emitter and emits beam, and the light is via the beam shaping list
Member is in the first MEMS vibration mirror reflected of first angle to testee；
Step 3: the 2nd MEMS galvanometer in second angle receives the light of the testee reflection, and should
Light is transmitted to the laser pickoff through light beam convergence unit；
Wherein, the second angle first angle obtains after being deflected according to third deflection angle；
Step 4: received light is converted electric signal by the laser pickoff, and the electric signal is sent to the place
Manage device；
Step 5: the processor carries out signal processing to the electric signal, obtains the laser radar scanning system and institute
State the distance between testee.
Further, the scan method further include:
Step 2 and step 3 are repeated, and when repeating step 2 and step 3 every time, by current described the
The value of one deflection angle is set greater than the value of last third deflection angle when repeating step 2 and step 3, to realize
Multi-thread scanning to the testee.
Further, the step 2 includes:
The processor controls the laser emitter and emits beam；
The beam shaping unit receives the light, and will be sent to after the light shaping in described in first angle
On first MEMS galvanometer；
And the light after shaping is reflexed to the testee by the first MEMS galvanometer in first angle；
Corresponding, the step 3 includes:
Through the first MEMS vibration mirror reflected in first angle to the light of the testee, enter by diffusing reflection
It is incident upon on the 2nd MEMS galvanometer in second angle；
Received light is reflexed to the light beam and converges unit by the 2nd MEMS galvanometer in second angle；
And the light beam convergence unit converges received light, and the light after convergence is emitted to described
Laser pickoff.
Further, before the step 1, the method also includes:
The diameter d of the photosurface of the laser pickoff is determined according to formula one:
In formula one, △ θ20maxFor the maximum value of third deflection angle, △ θ20minFor the minimum of third deflection angle
Value, D are the distance between the laser pickoff and the 2nd MEMS galvanometer；
The photosurface of the laser pickoff is set according to the diameter of the photosurface；
And the light described in the laser radar scanning system is arranged in the laser pickoff after setting photosurface
On the side of beam convergence unit and the position of the separate 2nd MEMS galvanometer.
The third aspect, the present invention also provides a kind of vehicle, the vehicle is equipped with the laser radar scanning system；
The processor is arranged in the car body of the vehicle；
The laser emission element and laser pick-off unit, which are matched, to be set on outside the car body of the vehicle, and the laser
Transmitting unit and laser pick-off unit are connect with the processor communication；
The processor is communicated to connect with the intracorporal display screen of the vehicle of the vehicle and warning device respectively.
As shown from the above technical solution, a kind of laser radar scanning system and method provided by the invention, vehicle, laser thunder
It include processor up to scanning system, and laser emission element connected to the processor and laser pick-off unit respectively；Laser hair
Penetrating unit includes: beam shaping unit, and is separately positioned on the laser emitter and the first MEMS of beam shaping unit two sides
Galvanometer；Laser pick-off unit includes: light beam convergence unit, and is separately positioned on the laser pickoff of light beam convergence unit two sides
With the 2nd MEMS galvanometer, and the 2nd MEMS galvanometer be arranged in parallel in the first MEMS galvanometer side and far from testee position
On；In the operational process of laser radar scanning system, the deflection angle of the first MEMS galvanometer and the 2nd MEMS galvanometer keeps same
Step.The configuration of the present invention is simple and flexibility height, can be realized the scanning accurately and securely to testee, and being capable of accurate needle
The non-uniform scanning of density is carried out to testee, is widely used in different application and testee, it is sharp ensure that
Optical radar scanning system it is compact-sized on the basis of, also improve the applicability and service life of laser radar scanning system,
Solve the problems, such as existing laser radar scanning system because luminous frequency be too high to improve measurement apart from.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the present invention
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is a kind of structural schematic diagram of laser radar scanning system of the invention；
Fig. 2 is the structural schematic diagram of driver in laser radar scanning system of the invention；
Fig. 3 is the structural schematic diagram of laser emitter in laser radar scanning system of the invention；
Fig. 4 is the structural schematic diagram of laser pickoff in laser radar scanning system of the invention；
Fig. 5 is the knot of the multiple laser emission elements and laser pick-off unit in laser radar scanning system of the invention
Structure schematic diagram；
Fig. 6 is the structural schematic diagram of laser radar scanning system in application example of the invention；
Fig. 7 a is showing for the driving signal of MEMS galvanometer in laser radar scanning systematic difference example of the invention
It is intended to；
Fig. 7 b is the schematic diagram of the oscillator signal of MEMS galvanometer in laser radar scanning systematic difference example of the invention；
Fig. 8 is a kind of structural schematic diagram of vehicle of the invention；
Fig. 9 is a kind of flow diagram of laser radar scanning method of the invention；
Figure 10 is the flow diagram of laser radar scanning method in application example of the invention；
Figure 11 is the structural representation of the laser pick-off unit side in the application example of laser radar scanning method of the invention
Figure.
Wherein, 1- processor；101- control and signal processing module；2- laser emission element；3- laser pick-off unit；4-
Laser emitter；401-LD laser tube；5- beam shaping unit；The first MEMS galvanometer of 6-；7- laser pickoff；701-APD light
Electric explorer；8- light beam converges unit；The 2nd MEMS galvanometer of 9-；10- driver；11- display screen；12- warning device；501- enters
Irradiating light beam；502-MEMS galvanometer deflects the reflected beams after θ angle；The reflected beams before 503-MEMS galvanometer is non deflected；504-
Light beam of the reflected beams after light beam convergence unit convergence；Light of the 505- the reflected beams after light beam convergence unit convergence
Beam；The photosurface of 506-APD photodetector；The diameter of the photosurface of d-APD photodetector.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
The embodiment of the present invention one provides a kind of specific embodiment of laser radar scanning system, described to swash referring to Fig. 1
Optical radar scanning system specifically includes following content
Processor 1, and, the laser emission element 2 and laser pick-off unit 3 being connect respectively with the processor 1.
It is understood that the processor 1 can be a kind of logical device of control type, such as FPGA；The laser
Transmitting unit 2 is used to emit to testee laser beam, and the laser pick-off unit 3 is for receiving the testee reflection
Light beam and convert electric signal for the light beam, then, electric signal is sent to the processor 1 by the laser pick-off unit 3,
Enable the processor 1 that laser radar scanning system position and testee is calculated according to the electric signal
The distance between.
The laser emission element 2 includes: beam shaping unit 5, and is separately positioned on 5 liang of the beam shaping unit
The laser emitter 4 and the first MEMS galvanometer 6 of side, so that the light that the laser emitter 4 issues is via the beam shaping
Unit 5 reflexes to testee by the first MEMS galvanometer 6.
In the foregoing description, the laser emission element 2 includes laser emitter 4, the beam shaping unit 5 set gradually
With the first MEMS galvanometer 6, wherein the setting of the laser emitter 4, beam shaping unit 5 and the first MEMS galvanometer 6 sequence is
Fixed, but the setting distance between each device can be configured according to actual applicable cases, and between each device
Position is arranged can be preferred are as follows: the radiating laser beams mouth of laser emitter 4 and the center of beam shaping unit 5 are the same as always
On line, and 6 slant setting of the first MEMS galvanometer, the light beam that beam shaping unit 5 is launched is via tilted-putted
First MEMS galvanometer 6 is accurately on reflection hair testee.
It is understood that the beam shaping unit 5 is also known as laser shaping device, it is in diffraction optical element (DOE)
Most common lens；The effect of beam shaping unit 5 is that laser beam to be converted into an energy equal in the present embodiment one
The flat-top hot spot of even distribution, light spot shape can be square, round or other shapes.The first MEMS galvanometer 6 with it is aftermentioned
The 2nd MEMS galvanometer 9 referred to can use identical micro-electromechanical system (MEMS) (Micro-Electro-Mechanical
System) galvanometer, wherein MEMS galvanometer is one of scanning galvanometer, and MEMS galvanometer is in microelectric technique (semiconductors manufacture
Technology) on the basis of grow up, MEMS galvanometer is to have merged photoetching, burn into film, LIGA, silicon micromachined, non-silicon micromachined
With precision machinery processing etc. technologies production high-tech electronic mechanical devices, and MEMS galvanometer be collection microsensor, microactrator,
The micro- energy of micro mechanical structure, micro battery, signal processing and control circuit, high-performance electronic integrated device, interface, communication are equal to one
The microdevice of body.
In the present embodiment, the MEMS galvanometer preferably uses a kind of MEMS galvanometer of sheet, and the MEMS vibration of the sheet
The eyeglass of mirror is obliquely installed towards the beam shaping unit 5 and testee, and specific tilt angle is according to practical application
Situation is set.
The laser pick-off unit 3 includes: light beam convergence unit 8, and is separately positioned on the light beam and converges 8 liang of unit
The laser pickoff 7 and the 2nd MEMS galvanometer 9 of side, and the 2nd MEMS galvanometer 9 is arranged in parallel in the first MEMS galvanometer 6
Side and far from the testee position on so that testee reflection light through the 2nd MEMS galvanometer 9 and light beam
Convergence unit 8 is transmitted to the laser pickoff 7.
It is understood that light is reflexed to the surface of the testee by the first MEMS galvanometer 6, and described
The surface reflection of testee returns the 2nd MEMS galvanometer 9, which is reflexed to the light again by the 2nd MEMS galvanometer 9
Beam convergence unit 8, the light beam convergence unit 8 receive and converge light, and the light after convergence is then sent to the laser
Receiver 7 so that received light is converted electric signal by the laser pickoff 7, and sends it to processor 1, so that place
Reason device 1 can be calculated according to the electric signal between laser radar scanning system position and testee away from
From.
In the operational process of the laser radar scanning system, the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9
Deflection angle keeps synchronizing, and can be realized the scanning accurately and securely to testee.
It is understood that the eyeglass of the first MEMS galvanometer 6 of sheet is towards the beam shaping unit 5 and is tested
Object tilt setting is similarly the eyeglass of the 2nd MEMS galvanometer 9 of sheet also towards the beam shaping unit 5 and tested
Object tilt setting, and be arranged in parallel with the first MEMS galvanometer 6, wherein the laser pickoff 7, light beam converge unit 8
Setting sequence with the 2nd MEMS galvanometer 9 is fixed, but the setting distance between each device can apply feelings according to actual
Condition is configured, and the setting position between each device can be preferred are as follows: laser pickoff 7 is used for the received light of laser beam
Quick face and light beam converge the center of unit 8 on the same line, and 9 slant setting of the 2nd MEMS galvanometer, so that light beam converges
Poly- unit 8 can accurately receive the light reflected via tilted-putted 2nd MEMS galvanometer 9.
From foregoing description content it is found that the laser radar scanning system that the embodiment of the present invention provides, structure are simple and clever
It is active high, it can be realized the scanning accurately and securely to testee, and accurately can carry out density not for testee
Uniform scanning, is widely used in different application and testee.
In a specific embodiment, referring to fig. 2, the laser radar scanning system also specifically includes following content:
Two drivers 10 being separately positioned on the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9；Setting exists
The driver 10 of the first MEMS galvanometer 6 and the driver 10 being arranged on the 2nd MEMS galvanometer 9 with the processing
Device 1 connects, so that the driver 10 of the first MEMS galvanometer 6 is the according to the order-driven received from the processor 1
One MEMS galvanometer 6 is deflected and the driver 10 of the 2nd MEMS galvanometer 9 is according to the finger received from the processor 1
It enables and the 2nd MEMS galvanometer 9 is driven to carry out and 6 synchronous deflection of the first MEMS galvanometer.
It is understood that driving of the processor 1 to the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9
Device 10 sends order-driven respectively, so that the driver 10 of the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9 is controlled respectively
It makes the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9 synchronizes deflection.Wherein, the synchronous deflection specially exists
First MMES galvanometer and the 2nd MEMS galvanometer 9 described in synchronization are on identical deflection angle.
From foregoing description content it is found that the laser radar scanning system that the embodiment of the present invention provides, shakes to two MMES
Mirror carries out angle synchronously control, and realization is synchronous with shining, and avoids because luminous frequency is excessively high so that measuring distance can not improve
The drawbacks of.
In a specific embodiment, referring to Fig. 3, the laser emitter 4 in the laser radar scanning system is specific
Including following content:
The laser emitter 4 is LD (Laser Diode) laser tube, and the LD laser tube 401 and the processor 1
Connection, so that the processor 1, which controls the LD laser tube 401, carries out Laser emission with optional frequency.
It is understood that it is a kind of semiconductor laser tube that the LD laser tube 401, which is, the processor 1 controls described
LD laser tube 401 carries out Laser emission with optional frequency, and the luminous frequency of the LD laser tube 401 can arbitrarily set, sweep
Can also be carried out according to uneven frequency during retouching it is luminous, thus realize it is multi-thread under density unevenly scan, in detection
Significant points improve luminous frequency, and data volume increases, and can more accurately identify the time of day of testee；In the secondary of detection
Position reduces luminous frequency, to reduce electricity power consumption and data transmission pressure, so that application scenarios are more extensive.
In a specific embodiment, referring to fig. 4, the laser pickoff 7 in the laser radar scanning system is specific
Including following content:
The laser pickoff 7 is APD photodetector 701, and the APD photodetector 701 and the processor 1
Connection so that received light is converted electric signal by the APD photodetector 701, and the electric signal is sent to described
Processor 1.
In the description, according to the laser radar scanning system position of practical situations and testee
Between maximum distance and minimum range, and, the distance between the laser pickoff 7 and the 2nd MEMS galvanometer 9, come
The photosurface for determining the APD photodetector 701, in the preferred embodiment of the present embodiment, by the APD photodetector
The diameter of 701 photosurface is set greater than 0.558mm, to meet laser radar scanning system position and measured object
In the measurement request between 0.5m and 200m between body.
It is understood that avalanche photodide APD (Avalanche Photodiode) photodetector is used
In converting electric signal for received optical signal, enable the processor 1 that the laser is calculated according to the electric signal
The distance between radar scanning system position and testee can be realized the sweeping accurately and securely to testee
It retouches, is widely used in different application and testee.
In a specific embodiment, referring to Fig. 5, the laser radar scanning system includes multiple Laser emissions
Unit 2 and laser pick-off unit 3；And the laser emission element 2 is identical and each with the setting quantity of laser pick-off unit 3
A laser emission element 2 is matched with a laser pick-off unit 3；Each laser emission element 2 and swash
Light receiving unit 3 is connected to the processor 1, to be suitable for different applications, and then improves laser radar scanning
Systematic difference popularity.
In a specific embodiment, the present invention also provides the beam shaping lists in the laser radar scanning system
Three kinds of different implementations of member 5:
The first: the beam shaping unit 5 includes: that successively vertical and coaxial arrangement the first plano-convex lens, plano-concave are saturating
Mirror and the second plano-convex lens；The plane of first plano-convex lens is oppositely arranged with the laser emitter 4, first plano-convex
The convex surface of lens and the plane of the plano-concave lens are oppositely arranged, and the concave surface of the plano-concave lens and second plano-convex lens
Plane be oppositely arranged.
Second: the beam shaping unit 5 includes: two vertical and coaxial arrangement plano-convex aspherical mirrors, and two
The aspherical of plano-convex aspherical mirror is oppositely arranged.
The third: the beam shaping unit 5 includes: vertical and coaxial arrangement plano-concave aspherical mirror peace convex aspheric surface
Mirror, and the concave surface of the plano-concave aspherical mirror and the convex surface of the plano-convex aspherical mirror are oppositely arranged.
In a specific embodiment, the present invention also provides the light beam money orders in the laser radar scanning system
A kind of implementation of member 8:
The light beam convergence unit 8 includes: vertical and coaxial arrangement convex lens and concavees lens, and the concavees lens are arranged
Between the convex lens and the laser pickoff 7.
From foregoing description content it is found that the laser radar scanning system that the embodiment of the present invention provides, is widely used in not
With application and testee, ensure that laser radar scanning system it is compact-sized on the basis of, also improve sharp
The applicability and service life of optical radar scanning system.
For further instruction this programme, the present invention also provides a kind of concrete applications of the laser radar scanning system
Example, referring to Fig. 6, which specifically includes following content:
The laser radar scanning system includes laser emitter 4, beam shaping unit 5, the first MEMS galvanometer module,
One of two MEMS galvanometer modules, light beam convergence unit 8, laser pickoff 7 and processor 1 are preferred: control and signal processing
Module 101.
The first MEMS galvanometer module includes the driver 10 of the first MEMS galvanometer 6 and the first MEMS galvanometer 6；It is described
The 2nd MEMS galvanometer module include the 2nd MEMS galvanometer 9 and the 2nd MEMS galvanometer 9 driver 10.
The control and signal processing module 101 is carried out for controlling the laser emitter 4 with optional frequency
It shines；Control the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9 synchronize on deflection angle；To described
Laser pickoff 7 generate electric signal carry out information processing.
Laser emission is realized using LD laser tube 401 in this application example, and beam shaping unit 5 uses at least a piece of aspheric
Face mirror and common microscope group are realized.
The laser that LD laser tube 401 is launched is incident to described first after 5 shaping of beam shaping unit
On MEMS galvanometer 6, it is divided into fan beam under the deflection angle of the first MEMS galvanometer 6 and is incident to testee.
The 2nd MEMS galvanometer 9 receives the light beam returned from testee by diffusing reflection, shakes in the 2nd MEMS
Light beam converges unit 8 by the reception light beam under 9 deflection angle of mirror, back to the APD photodetector 701.
In this application example, set LD laser tube 401 and emit the frequency of laser as 500KHz, i.e., it is adjacent it is luminous twice between
It is divided into 2us, the frequency of oscillation of the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9 under resonance state is 22KHz.
Fig. 7 a is a kind of schematic diagram of the driving signal for MEMS galvanometer that this application example provides, and Fig. 7 b is this application example
A kind of schematic diagram of the oscillator signal of the MEMS galvanometer provided, and the frequency of MEMS galvanometer driving signal is 22KHz, MEMS galvanometer
Frequency of oscillation be also 22KHz, and when the rising edge of MEMS galvanometer driving signal arrive when, MEMS galvanometer just deflects into most
In wide-angle.When MEMS galvanometer is in resonance state, deflection angle and time are at sine relation.This application example controls two
The synchronous method of MEMS galvanometer is that the control and signal processing module 101 generate two same driving signals, frequency one
It causes, phase is consistent；As long as therefore the rising edge of detection MEMS galvanometer driving signal tracks the deflection angle of MEMS galvanometer.
From foregoing description content it is found that the laser radar scanning system that application example of the invention provides, by two MEMS
Galvanometer is separately employed in transmitting-receiving both ends, so that light path design is more simple；Using two panels MEMS galvanometer instead of rotating parts such as motors
Part simplifies structure, is constantly shrinking, and the service life increases；It is only with a LASER Discharge Tube LD and a laser pick-off pipe APD
Multi-thread scanning can be achieved, reduce the usage quantity of APD photodetector 701, or avoid realizing multi-thread sweep using APD array
It retouches, cost greatly reduces.
The embodiment of the present invention two provides the specific implementation for being provided with a kind of vehicle of the laser radar scanning system
Mode, referring to Fig. 8, the vehicle specifically includes following content and includes:
The vehicle is equipped with the laser radar scanning system；The processor 1 is arranged in the car body of the vehicle；
The laser emission element 2 and laser pick-off unit 3, which are matched, to be set on outside the car body of the vehicle, and the Laser emission list
Member 2 and laser pick-off unit 3 are communicated to connect with the processor 1；The processor 1 is intracorporal with the vehicle of the vehicle respectively
Display screen 11 and warning device 12 communicate to connect.
From foregoing description content it is found that the vehicle that the embodiment of the present invention provides, can accurately and securely realize vehicle
The measurement of the distance between testee, and the flexibility applied is high, and solves the existing laser thunder of setting in the car
Up to scanning system because luminous frequency be too high to improve measurement apart from the problem of.
The embodiment of the present invention three provides a kind of laser radar scanning realized based on the laser radar scanning system
The specific embodiment of method, referring to Fig. 9, the laser radar scanning method specifically includes following content and includes:
Step 100: the processor 1 controls the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9 synchronizes
Yaw motion.
In step 100, the generation of processor 1 carries out the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9
Synchronous driving signal, and the driving signal is respectively sent to the first MEMS galvanometer 6 and the 2nd MEMS galvanometer
9；And the first MEMS galvanometer 6 and the 2nd MEMS galvanometer 9 are transported according to the deflection that the driving signal synchronizes
It is dynamic.
Step 200: the processor 1 controls the laser emitter 4 and emits beam, and the light is whole via the light beam
The first MEMS galvanometer 6 that shape unit 5 is in first angle reflexes to testee.
In step 200, the processor 1 controls the laser emitter 4 and emits beam；The beam shaping unit 5
The light is received, and 6 light of the first MEMS galvanometer in first angle will be sent to after the light shaping；And place
The light after shaping is reflexed into the testee in 6 light of the first MEMS galvanometer of first angle.
Step 300: the 2nd MEMS galvanometer 9 in second angle receives the light of the testee reflection, and
The light is transmitted to the laser pickoff 7 through light beam convergence unit 8；
Wherein, the second angle first angle obtains after being deflected according to third deflection angle.
Step 200 and step 300 are repeated, and when repeating step 200 and step 300 every time, it will be current
The value of first deflection angle be set greater than last third deflection angle when repeating step 200 and step 300
The value of degree, to realize the multi-thread scanning to the testee.
Step 400: received light is converted electric signal by the laser pickoff 7, and the electric signal is sent to institute
State processor 1.
Step 500: the processor 1 carries out signal processing to the electric signal, obtains the laser radar scanning system
The distance between described testee.
From foregoing description content it is found that the laser radar scanning method that the embodiment of the present invention provides, can be realized to quilt
The scanning accurately and securely of object is surveyed, and accurately can carry out the non-uniform scanning of density for testee, it is generally applicable
In different applications and testee, ensure that laser radar scanning system it is compact-sized on the basis of, also improve
The applicability and service life of laser radar scanning system, solve existing laser radar scanning system because luminous frequency is excessively high
And can not improve measurement apart from the problem of.
In a specific embodiment, described before the step 100 in the laser radar scanning method
Laser radar scanning method also specifically includes following content:
(1) the diameter d of the photosurface of the laser pickoff 7 is determined according to formula one:
In formula one, △ θ20maxFor the maximum value of third deflection angle, △ θ20minFor the minimum of third deflection angle
Value, D are the distance between the laser pickoff 7 and described 2nd MEMS galvanometer 9；
(2) photosurface of the laser pickoff 7 is set according to the diameter of the photosurface；
(3) light described in the laser radar scanning system is arranged in the laser pickoff 7 after setting photosurface
On the side of beam convergence unit 8 and the position of the separate 2nd MEMS galvanometer 9.
From foregoing description content it is found that the laser radar scanning method that the embodiment of the present invention provides, is widely used in not
With application and testee, ensure that laser radar scanning system it is compact-sized on the basis of, also improve sharp
The applicability and service life of optical radar scanning system.
For further instruction this programme, the present invention also provides a kind of concrete applications of the laser radar scanning method
Example, referring to Figure 10, which specifically includes following content:
S1: the control and the generation of signal processing module 101 make the first MEMS galvanometer 6 and the 2nd MEMS shake
The synchronous driving signal of 9 deflection angle of mirror is 22KHz, the square-wave signal that duty ratio is 50%；
S2: when being constantly zero, the first MEMS galvanometer 6 deflects into maximum angle θ10, the LD laser tube 401
Shine for the first time, 9 deflection angle of the 2nd MEMS galvanometer is θ at this time20, due to the 2nd MEMS galvanometer 9 with it is described
First MEMS galvanometer 6 is synchronous, therefore θ10=θ20；
S3: pass through time difference △ t0Afterwards, light beam is incident on the 2nd MEMS by the testee diffusing reflection and shakes
On mirror 9, the 2nd MEMS galvanometer 9 has deflected angle △ θ at this time20, the first MEMS galvanometer 6 deflected angle △ θ10, specifically
Have, △ θ10=△ θ20；
S4: light beam is back to after the 2nd MEMS galvanometer 9 reflection by the light beam convergence unit 8 described
APD photodetector, complete for the first time scanning ranging；
S5: being t constantly1When, 6 deflection angle of the first MEMS galvanometer is θ11, the LD laser tube 401 carries out
Second luminous, and 9 deflection angle of the 2nd MEMS galvanometer is θ at this time21, specifically have, θ11=θ21；
S6: after time difference △ t1, light beam is incident on the 2nd MEMS by the testee diffusing reflection and shakes
On mirror 9, the 2nd MEMS galvanometer 9 has deflected angle △ θ at this time21, the first MEMS galvanometer 6 deflected angle △ θ11, specifically
Have, △ θ11=△ θ21；
S7: light beam is back to after the 2nd MEMS galvanometer 9 reflection by the light beam convergence unit 8 described
APD photodetector, complete second scanning ranging；
S8: circulation executes step S5 to S7, realizes multi-thread scanning.
Figure 11 is the structure that the laser radar scanning system based on double MEMS galvanometers that this application example provides receives side
Schematic diagram.Light 501 is incident beam, and 503 the reflected beams for MEMS galvanometer before non deflected, 504 be the reflected beams 503
Light beam after light beam convergence unit convergence, 502 deflect the reflected beams after θ angle for MEMS galvanometer, and 505 be the reflection
Light beam of the light beam 502 after light beam convergence unit convergence, 506 be the photosurface of APD photodetector, and d is the APD photoelectricity
The photosurface size of detector 506.
Further, according to the luminous frequency of 500KHz in this application example, t at the time of described in step S51As
2us, according to MEMS galvanometer deflection angle and time at sine relation, obtains in the 2us time of beginning in the time of 2us,
MEMS galvanometer has deflected 0.5 °, by laser TOF measuring principle and range formula:
(c is the light velocity, and t is light transmission time)
Obtaining the maximum distance that 2us can be measured is 300m.It, should to avoid the echo-signal to shine twice from generating interference
With maximum measurement distance is set in example as 200m, minimum measurement distance is 0.5m, so as to calculate work as testee away from
When from luminous point 0.5m, laser, which is issued to be incident on from the LD laser tube 401, to be undergone on the 2nd MEMS galvanometer 9
Time is 3.3ns, and in the time of 3.3ns, according to MEMS vibration mirror scanning track at sine relation, the 2nd MEMS vibration
9 deflection angle of mirror approximatively thinks that MEMS galvanometer deflection angle is 0 ° in the 3.3ns time less than 0.001 °；Work as testee
Apart from luminous point be 200m when, laser be issued to from the LD laser tube 401 be incident on undergone on the 2nd MEMS galvanometer 9 when
Between be 1.3us, in the time of 1.3us, MEMS galvanometer deflection angle be 0.2 °, by reflection law obtain twice the reflected beams it
Between angle be 0.4 °, by the position of the APD photodetector and the 2nd MEMS galvanometer 9 in this application example
Distance be set as 80mm.Due to that can not learn accurate distance of the testee apart from luminous point in advance, the APD light
The photosurface size of electric explorer, i.e. diameter d minimum are answered are as follows:
Or
D=2 × D × tan (△ θ20max-△θ20minThe ≈ 0.558mm of)=2 × 80 × 0.279
By calculating above, it is known that as long as the photosurface of APD photodetector is sized to be greater than 0.558mm, energy
The laser beam returned under any distance of the testee in 0.5m to 200m is received, to realize that this application example is proposed
The laser radar scanning method based on double MEMS galvanometers.
Further, receiving side Optical devices can select to design according to actual needs, and in actual use, APD photoelectricity is visited
Survey device photosurface be generally a fixed value, therefore between the APD photodetector and the 2nd MEMS galvanometer 9 away from
From can be rationally arranged according to the parameters such as focal length for receiving light beam convergence unit 8, flexibility is higher.
Particularly, the luminous frequency of the LD laser tube 401 can arbitrarily be set, during the scanning process can also be according to not
Uniform frequency carry out it is luminous, thus realize it is multi-thread under density unevenly scan, luminous frequency is mentioned in the significant points of detection
Height, data volume increase, and can more accurately identify the time of day of testee；Luminous frequency is reduced in the secondary position of detection,
To reduce electricity power consumption and data transmission pressure, so that application scenarios are more extensive.
It should also be noted that, herein, relational terms such as first and second and the like are used merely to one
Entity or operation are distinguished with another entity or operation, without necessarily requiring or implying between these entities or operation
There are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant are intended to contain
Lid non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
The above examples are only used to illustrate the technical scheme of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation
Technical solution documented by example is modified or equivalent replacement of some of the technical features；And these are modified or replace
It changes, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of laser radar scanning system, which is characterized in that the laser radar scanning system includes: processor, and, point
The laser emission element and laser pick-off unit not being connected to the processor；
The laser emission element includes: beam shaping unit, and is separately positioned on swashing for the beam shaping unit two sides
Optical transmitting set and the first MEMS galvanometer, the light that the laser emitter issues is via the beam shaping unit by the first MEMS
Vibration mirror reflected is to testee；
The laser pick-off unit includes: light beam convergence unit, and is separately positioned on swashing for light beam convergence unit two sides
Optical receiver and the 2nd MEMS galvanometer, the 2nd MEMS galvanometer are arranged in parallel in the side of the first MEMS galvanometer and separate
On the position of the testee, so that the light of testee reflection converges unit by the 2nd MEMS galvanometer and light beam
It is transmitted to the laser pickoff；
In the operational process of the laser radar scanning system, the deflection angle of the first the MEMS galvanometer and the 2nd MEMS galvanometer
Degree keeps synchronizing.
2. scanning system according to claim 1, which is characterized in that the scanning system further include: two are respectively set
Driver on the first MEMS galvanometer and the 2nd MEMS galvanometer；
The driver of the first MEMS galvanometer is set and the driver that is arranged on the 2nd MEMS galvanometer with it is described
Processor connection, so that the driver of the first MEMS galvanometer is first according to the order-driven received from the processor
MEMS galvanometer is deflected and the driver of the 2nd MEMS galvanometer is according to the order-driven institute received from the processor
The 2nd MEMS galvanometer is stated to carry out and the first MEMS galvanometer synchronous deflection.
3. scanning system according to claim 1, which is characterized in that the laser emitter is LD laser tube, and described
LD laser tube is connected to the processor, so that the processor, which controls the LD laser tube, carries out laser hair with optional frequency
It penetrates.
4. scanning system according to claim 1, which is characterized in that the laser pickoff is APD photodetector, and
The APD photodetector is connected to the processor, so that received light is converted telecommunications by the APD photodetector
Number, and the electric signal is sent to the processor.
5. scanning system according to claim 1-4, which is characterized in that the scanning system includes multiple described
Laser emission element and laser pick-off unit；
The laser emission element is identical with the setting quantity of laser pick-off unit, and each described laser emission element with
One laser pick-off unit matches；
Each laser emission element and laser pick-off unit are connected to the processor.
6. a kind of laser radar scanning method realized using laser radar scanning system described in any one of claim 1 to 5,
It is characterized in that, the scan method includes:
Step 1: the processor controls the yaw motion that the first MEMS galvanometer and the 2nd MEMS galvanometer synchronize；
Step 2: the processor controls the laser emitter and emits beam, and the light is via the beam shaping unit quilt
The first MEMS vibration mirror reflected in first angle is to testee；
Step 3: the 2nd MEMS galvanometer in second angle receives the light of testee reflection, and by the light
The laser pickoff is transmitted to through light beam convergence unit；
Wherein, the second angle first angle obtains after being deflected according to third deflection angle；
Step 4: received light is converted electric signal by the laser pickoff, and the electric signal is sent to the processing
Device；
Step 5: the processor carries out signal processing to the electric signal, obtains the laser radar scanning system and the quilt
Survey the distance between object.
7. scan method according to claim 6, which is characterized in that the scan method further include:
Step 2 and step 3 are repeated, and when repeating step 2 and step 3 every time, partially by current described first
The value of gyration is set greater than the value of last third deflection angle when repeating step 2 and step 3, to realize to institute
State the multi-thread scanning of testee.
8. scan method according to claim 6, which is characterized in that the step 2 includes:
The processor controls the laser emitter and emits beam；
The beam shaping unit receives the light, and by be sent to after the light shaping in first angle described first
On MEMS galvanometer；
And the light after shaping is reflexed to the testee by the first MEMS galvanometer in first angle；
Corresponding, the step 3 includes:
Through the first MEMS vibration mirror reflected in first angle to the light of the testee, it is incident to by diffusing reflection
On the 2nd MEMS galvanometer in second angle；
Received light is reflexed to the light beam and converges unit by the 2nd MEMS galvanometer in second angle；
And the light beam convergence unit converges received light, and the light after convergence is emitted to the laser
Receiver.
9. scan method according to claim 6, which is characterized in that before the step 1, the method also includes:
The diameter d of the photosurface of the laser pickoff is determined according to formula one:
In formula one, △ θ20maxFor the maximum value of third deflection angle, △ θ20minFor the minimum value of third deflection angle, D is
The distance between the laser pickoff and the 2nd MEMS galvanometer；
The photosurface of the laser pickoff is set according to the diameter of the photosurface；
And laser pickoff setting light beam described in the laser radar scanning system after setting photosurface is converged
On the side of poly- unit and the position of the separate 2nd MEMS galvanometer.
10. a kind of vehicle, which is characterized in that the vehicle is equipped with as laser radar described in any one of claim 1 to 5 is swept
Retouch system；
The processor is arranged in the car body of the vehicle；
The laser emission element and laser pick-off unit, which are matched, to be set on outside the car body of the vehicle, and the Laser emission
Unit and laser pick-off unit are connect with the processor communication；
The processor is communicated to connect with the intracorporal display screen of the vehicle of the vehicle and warning device respectively.
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| CN110018486A (en) * | 2019-05-06 | 2019-07-16 | 上海擎朗智能科技有限公司 | A kind of multi-beam laser range sensor based on TOF |
| CN110161512A (en) * | 2019-05-08 | 2019-08-23 | 深圳市速腾聚创科技有限公司 | Multi-line laser radar |
| CN110398752A (en) * | 2019-08-05 | 2019-11-01 | 昂纳信息技术（深圳）有限公司 | A kind of laser radar system of more visual fields |
| CN110865356A (en) * | 2019-12-27 | 2020-03-06 | 成都英飞睿技术有限公司 | Mixed solid-state multi-line laser radar |
| CN112698308A (en) * | 2020-12-24 | 2021-04-23 | 中国科学院苏州纳米技术与纳米仿生研究所 | Computer storage medium, laser radar system and synchronization method thereof |
| CN113050066A (en) * | 2021-02-04 | 2021-06-29 | 宁波傲视智绘光电科技有限公司 | Laser scanning device, method and storage medium |
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| WO2021223183A1 (en) * | 2020-05-07 | 2021-11-11 | 深圳市速腾聚创科技有限公司 | Laser transceiving assembly, laser radar, and automatic driving device |
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| CN110398752A (en) * | 2019-08-05 | 2019-11-01 | 昂纳信息技术（深圳）有限公司 | A kind of laser radar system of more visual fields |
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