CN109781335A - A kind of self generation type pressure sensor and preparation method thereof based on electrochemical principle - Google Patents
A kind of self generation type pressure sensor and preparation method thereof based on electrochemical principle Download PDFInfo
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Abstract
The invention belongs to pressure sensor correlative technology fields, it discloses a kind of self generation type pressure sensor and preparation method thereof based on electrochemical principle, the pressure sensor includes sensing structure, the working environment of the sensing structure is electrolyte environment, it is used to convert electric energy for the pressure energy of testing pressure, and then the pressure sensor obtains current pressure according to the relationship and current electric current that convert caused by obtained electric energy between electric current and corresponding pressure, it is thus achieved that the real-time monitoring of testing pressure；The sensing structure is based on electrochemical principle and realizes self power generation comprising sandwich, working electrode and to electrode, the working electrode and it is described electrode is arranged in the sandwich, and the two is separately positioned on adjacent interlayer.Energy free consumption of the present invention, fast response time have strong liquid environment applicability.
Description
Technical field
The invention belongs to pressure sensor correlative technology field, more particularly, to it is a kind of based on electrochemical principle from
Power generation type pressure sensor and preparation method thereof.
Background technique
Field is explored in ocean, pressure sensor, being capable of auxiliary monitoring Underwater Pressure as a kind of important monitoring instrument
Variation, improve the hydrographic information in region sea area.Currently, pressure sensor is pre- in sonar contact, tide monitoring, tsunami
The fields such as alert, underwater navigation and ocean expedition are widely applied.Wherein, pressure sensor can divide according to sensor mechanism
For four major class: i.e. resistance pressure type, capacitive, piezoelectric type, friction electric-type pressure sensor.Pressure drag type pressure capsule is existed using material
Resistance variations under different pressures realize pressure detection；Capacitance type pressure sensor is a kind of establishes in classical parallel capacitor
Theoretic pressure sensor is sent out under pressure according to the distance between dielectric permittivity, parallel plate suqare and parallel-plate
It is raw to change, cause capacitance variations, to establish the one-to-one relationship between capacitor and pressure.These two types of pressure sensors have
There is highly sensitive, stable output signal.However, due to the limitation of respective sensor mechanism, their pressure measurement range
Often below 10kPa (about 1 meter), seriously constrains its application in marine environment, moreover, working as both pressure sensors
When (resistance pressure type and capacitive) is for monitoring pressure in real time variation, need to consume a large amount of energy.
In order to overcome these problems, wide range, high sensitivity and pressure sensor with a self-generating function come into being,
Such as piezoelectric type pressure sensor and the electric type pressure sensor that rubs.Piezoelectric type pressure sensor utilizes piezoelectric material (quartz, pressure
Electroceramics, Kynoar etc.) be pressurized when inside positive and negative charge center occur relative displacement, generate Charge Deviation and realize pressure
The measurement of power.This kind of sensor has the advantages that stable output signal, work range is big, fast response time, however due to piezoelectricity
The quantity of electric charge that material generates is few, generally requires multi-stage amplifier system (amplifier) and amplifies place to pressure response electric signal
Reason, and the process easily causes charge leakage.Electric-type pressure sensor rub based on Maxwell's electric current theory realization pressure
Measurement, as a kind of novel pressure sensor, receives the extensive concern of researcher.But such sensor is in reality
When work, it is easy to be influenced by environmental factor (such as moisture, air pressure) and performance degradation occurs.Correspondingly, this field exists
Develop a kind of technology of the self generation type pressure sensor of adaptability preferably based on electrochemical principle and preparation method thereof and need
It asks.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of based on the spontaneous of electrochemical principle
Electric type pressure sensor and preparation method thereof, based on the work characteristics of existing pressure sensor, for the knot of pressure sensor
Linking relationship between structure and component is designed.Self generation type pressure provided by the present invention based on electrochemical principle passes
Sensor is suitable for electrolyte environment, and under ambient pressure effect, the electrochemistry usable area of working electrode changes, into
And electrochemical double-layer capacitor is caused to change, and when balancing charge remains unchanged, the pressure sensor can generate
Certain potential change, so that electric energy can be converted by ambient pressure, and ambient pressure have with the real-time current of generation it is corresponding
Relationship, measurement obtains real-time current, and then the real-time current is changed into corresponding pressure according to the corresponding relationship, thus
The real-time monitoring of marine environment Wave pressure can be achieved, and the pressure sensor can be protected in biggish pressure range ability
High sensitivity is held, there is faster response speed to pressure change, energy free consumes when work, has strong liquid environment suitable
Ying Xing.
To achieve the above object, according to one aspect of the present invention, a kind of self power generation based on electrochemical principle is provided
Type pressure sensor, the pressure sensor include sensing structure, and the working environment of the sensing structure is electrolyte environment,
For converting electric energy for the pressure energy of testing pressure, and then the pressure sensor is according to caused by the electric energy that conversion obtains
Relationship and current electric current between electric current and corresponding pressure obtain current pressure, it is thus achieved that the reality of testing pressure
When monitor；
The sensing structure is based on electrochemical principle and realizes self power generation comprising pressing plate, working electrode, working electrode support
Plate, to electrode supporting plate, elastic support, to electrode and rigid support body, the pressing plate, the elastic support, the work
Make electrode supporting plate, the rigid support body, described electrode supporting plate and the rigid support body be successively arranged from top to bottom
To form sandwich, the working electrode and described the working electrode support plate and described to electricity is separately positioned on to electrode
In the support plate of pole；The testing pressure is conducted by the pressing plate to the working electrode, so that the electrification of the working electrode
It learns usable area to reduce, the electric double layer capacitance of the working electrode is then made to change, the double electricity in the surface of the working electrode
Layer equilibration charge remains unchanged, and the sensing structure generates potential change, to convert electric energy for pressure energy.
Further, the sensing structure external load and generate electric current I, the relationship between electric current and corresponding pressure P
It is indicated using following formula:
I=82.8-82.79 × exp ((- 2.14E-6*P) ^0.6).
Further, electric double layer balancing charge is Q=CV, and wherein V is the electrochemical potential of working electrode, and C is work electricity
The electric double layer capacitance of pole, C=ε A/d, in formula, ε is the dielectric constant of electrolyte, and A is that the electrochemistry of working electrode can use surface
Product.
Further, the pressing plate, the working electrode support plate and it is described be porous ceramic plate to electrode supporting plate.
Further, the pressure sensor further includes current detection component and processing display component, the current detecting
Component is connected to the sensing structure, the electricity that is used for electric current caused by sensing structure described in real-time detection, and will test
Stream information is transferred to the processing display component；The processing display component is used to be calculated according to the current information that receives pair
The pressure answered, and the pressure is shown.
Further, the current detection component is electrochemical workstation.
Further, the pressure sensor further includes reference electrode, and the reference electrode is connected to the current detecting
Component.
Further, the pressure sensor is suitable for fresh water environment, further includes seal box and power conducting piece, described close
For accommodating electrolyte, the sensing structure is set in the electrolyte jacket, the working electrode and described logical to electrode
Water proof wire is crossed to be connected with the external world；One end of the power conducting piece supports behind the side of the seal box in the pressing plate
On, it is used to passing to testing pressure into the pressing plate.
Further, the pressure sensor further includes sealing ring, and the sealing ring is arranged in the power conducting piece and institute
State the position that seal box is in contact.
Other side according to the invention provides a kind of self generation type pressure based on electrochemical principle as described above
The preparation method of force snesor, the preparation method the following steps are included:
(1) by working electrode and working electrode support plate is separately positioned on to electrode and in electrode supporting plate；
(2) sandwich is prepared, the pressure sensor is then obtained.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, base provided by the invention
It is mainly had the advantages that in self generation type pressure sensor of electrochemical principle and preparation method thereof
1. the testing pressure is conducted by the pressing plate to the working electrode, so that the electrochemistry of the working electrode
Usable area reduces, and so that the electric double layer capacitance of the working electrode is changed, the surface electric double layer of the working electrode
Balancing charge remains unchanged, and the sensing structure generates potential change, so that electric energy is converted by pressure energy, the pressure sensor
It is not necessarily to external power supply when work, reduces the consumption of electric energy, there is big work range, have both high sensitivity, while having fast
Response speed can be used in the hydraulic environment of ocean, realize the functions such as tide monitoring, tsunami early warning, underwater navigation.
It further include seal box and power conducting piece 2. the pressure sensor is suitable for fresh water environment, the seal box is used
In receiving electrolyte, the sensing structure is set in the electrolyte, and thus the pressure sensor can be also used for fresh water
The wave (pressure change) of environment (river) etc. monitors, and the scope of application is wider, and flexibility is preferable.
3. more than the pressure sensor can be integrated into the sensor array with multiple pressure perception point, can be realized region
The multiple spot wave pressure in sea area monitors, so that basis signal changes, analyzes wave motion direction, movement speed, heaving of the sea height
Degree.
4. the pressing plate, the elastic support, the working electrode support plate, the rigid support body, described to electricity
Pole support plate and the rigid support body are successively arranged from top to bottom to form sandwich, the working electrode and described to electricity
Pole is separately positioned on the working electrode support plate and described in electrode supporting plate, and compact overall structure, small volume is convenient for
It carries, integrated level is higher.
Detailed description of the invention
Fig. 1 is the sensing for the self generation type pressure sensor based on electrochemical principle that first embodiment of the invention provides
The stereoscopic schematic diagram of structure.
Fig. 2 is the floor map of the sensing structure of the self generation type pressure sensor based on electrochemical principle in Fig. 1.
Fig. 3 is the preparation flow figure of the sensing structure of the self generation type pressure sensor based on electrochemical principle in Fig. 1.
A) figure in Fig. 4 is capacitor, the open-circuit voltage of the self generation type pressure sensor based on electrochemical principle in Fig. 1
With the relation curve of impressed pressure, b in Fig. 4) figure is the self generation type pressure sensor based on electrochemical principle in Fig. 1
Pressure electrochemistry wave spectrogram.
Fig. 5 be the peak point current of the self generation type pressure sensor based on electrochemical principle in Fig. 1, sensitivity with it is additional
The graph of relation of pressure.
Fig. 6 is the part for the self generation type pressure sensor based on electrochemical principle that second embodiment of the invention provides
Structural schematic diagram.
Fig. 7 is the partial plan view of the self generation type pressure sensor based on electrochemical principle in Fig. 6.
Fig. 8 is another angle of the main structure of the self generation type pressure sensor based on electrochemical principle in Fig. 6
Schematic diagram.
The electricity that Fig. 9 is generated when being the self generation type pressure sensor detection wave pressure based on electrochemical principle in Fig. 6
The curve of stream at any time.
Figure 10 is the pressure sensing array of the self generation type pressure sensor composition based on electrochemical principle in Fig. 6 to wave
The distribution schematic diagram of response current and pressure that wave movement (pressure change) generates.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which: 1- pressing plate, 2- work
Make electrode, 3- is to electrode, 4- elastic support, 5- rigid support body, 7- power conducting piece, 8- seal box, 9- water proof wire, 10-
Sodium chloride solution, 11- sealing ring.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
Embodiment 1
Please refer to Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, first embodiment of the invention provide based on electrochemical principle from
Power generation type pressure sensor, the pressure sensor include sensing structure, reference electrode, current detection component and processing display group
Part.The current detection component connects the sensing structure and reference electrode to form circuit, and the sensing structure is placed on
When monitoring pressure in electrolyte, reduce under the action of the dynamic pressure of the electrochemistry usable area of working electrode 2 in the electrolytic solution,
The sensing structure generates potential change when the surface electric double layer balancing charge of the working electrode 2 remains unchanged, to produce
Raw power output, and electric current is generated in the circuit, the current detection component is for detecting the electric current and will test
Current information be transferred to the processing display component.The processing display component is previously stored with what the sensing structure generated
The relational expression between dynamic pressure that electric current and the sensing structure are subject to, in conjunction with the relational expression and the current information received
Corresponding dynamic pressure is calculated, and the pressure information calculated is shown.Wherein, the sensing structure generates voltage and
Electric current is to lead to the structure change of the working electrode 2 due to dynamic pressure and generate.
In present embodiment, the current detection component is current sensor, after the sensing structure external load resistance,
Charge flows from high potential electrode to low potential electrode and generates electric current, and the current sensor is used to measure the electric current, and
The current information measured is transferred to the processing display component.
The sensing structure include pressing plate 1, working electrode 2, working electrode support plate, to electrode supporting plate, resilient support
Body 4, to electrode 3 and rigid support body 5, it is the pressing plate 1, the elastic support 4, the working electrode support plate, described hard
Matter supporter 5 described is arranged from top to bottom into sandwich, the work electrode supporting plate and the rigid support body 5
Electrode 2 and described electrode 3 is set in the sandwich.
The pressing plate 1, the working electrode support plate and it is described be porous ceramic plate to electrode supporting plate, with for protecting
Demonstrate,prove the abundant infiltration of electrolyte and the working electrode 2；The porous ceramic plate with a thickness of 2mm, average pore size less than 1 μm,
Having a size of 10mm (width) × 10mm (length)；The elastic support 4 is strip shape body, and two elastic supports 4 are arranged
At the both ends that the working electrode support plate is opposite, the pressing plate 1 is arranged on the elastic support 4.The working electrode 2
It is arranged in the working electrode support plate, and it is between the pressing plate 1 and the working electrode support plate.When the pressure
When plate 1 is acted on by ambient pressure, the elastic support 4 is compressed, and ambient pressure is transmitted to the work by the pressing plate 1
Make electrode 2, the working electrode 2 is pressurized；When ambient pressure release, the pressing plate 1 is extensive in the elasticity of the elastic support 4
Initial position is returned under multiple power effect.
The rigid support body 5 is strip shape body, and two rigid support bodies are separately positioned on described to electrode supporting plate
Opposite both ends, and it is connected to the opposite both ends of the working electrode support plate.It is described that electrode 3 is arranged described to electricity
In the support plate of pole, it is located at described between electrode supporting plate and the working electrode support plate.It is described to electrode 3 not by the external world
The influence of pressure, so that it is described caused by ambient pressure to ensure that voltage and current caused by the sensing structure comes solely from
The structure change of working electrode 2.It is described that electrode supporting plate is also set up far from the side to electrode 3 there are two rigid support
Body 5.
In present embodiment, the rigid support body 5 is hard strip glass plate；The electrolyte can be molten for hydrogen chloride
Liquid, sodium chloride solution, sodium hydroxide solution and other solid gels etc., certain pressure sensor apply also for seawater ring
Border, to realize the real-time monitoring to briny environment Wave pressure；It is appreciated that in other embodiments, the sensing knot
Structure and the reference electrode submerge in the electrolytic solution, and each electrode is connect with electrochemical workstation by water proof wire to constitute
Electro-chemical systems, the electricity system can be used in testing voltage signal caused by the sensing structure and current signal, according to
According to the relational expression between pressure and electric current it can be concluded that real-time pressure.
The sensing structure is immersed in electrolyte environment, and working electrode 2 is different from the chemical potential of electrolyte, and in institute
The surface for stating working electrode 2 generates electric double layer balancing charge, there are electrochemical double-layer capacitor C in electric double layer balancing charge Q,
That is Q=CV, wherein V is the electrochemical potential of working electrode；C=ε A/d, in formula, ε is the dielectric constant of electrolyte, and A is work
The electrochemistry useable surface area of electrode.When ambient pressure acts on the sensing structure, the electrochemistry of the working electrode 2 can
Reduced with surface area, electric double layer capacitance is caused to change, according to power formula Q=CV, the sensing structure is balanced in electric double layer
Charge Q can generate certain potential change when remaining unchanged, to generate certain power output, and work as external load resistance
Afterwards, charge can flow from high potential electrode to low potential electrode and generate electric current, and realizing dynamic pressure can be to the conversion of electric energy.
The pressure sensor can be used for wave monitoring, and can be integrated into array to realize the real-time prison of multiple spot wave
It surveys；Relational expression between the electric current that the sensing structure generates and pressure are as follows: I=82.8-82.79*exp ((- 2.14E-6*P) ^
0.6)；The operating pressure measurement range of the pressure sensor is 10Pa~300kPa, is become corresponding to 1 millimeter to 30 meters of hydraulic pressure
Change, segmentation sensitivity is 10.1~287kPa-1(10Pa-1kPa) and 3.2kPa-1(10kPa-300kPa), response time be
120ms。
The present invention also provides the preparation method of the self generation type pressure sensor as described above based on electrochemical principle,
The preparation method mainly comprises the steps that
The two sides opposite to electrode supporting plate are arranged in four rigid support bodies by step 1 two-by-two respectively, and will be to electricity
Pole setting described in electrode supporting plate, it is described that electrode supporting plate is located between two rigid support bodies.
Working electrode support plate is arranged on two rigid support bodies step 2, and the working electrode supports
Plate close on it is described electrode is arranged, and two elastic supports are arranged at intervals on the working electrode support plate far from described right
On the surface of electrode supporting plate.
The working electrode is arranged in the working electrode support plate step 3.
Pressing plate is arranged on the elastic support, then obtains the pressure sensor by step 4.
Certainly, in other embodiments, the preparation step of the pressure sensor can change according to actual needs.
In order to characterize the performance of the pressure sensor, following performance test has been done to the pressure sensor:
(1) sodium chloride electrolyte is configured, specifically, the sodium chloride of 35.064g is uniformly mixed with 1L deionized water, is prepared
Concentration is the sodium chloride aqueous solution of 0.6M/L.
(2) sensing structure and reference electrode are immersed in 0.6M NaCl aqueous solution simultaneously, by the work electricity
Pole and the output end to electrode are connected to electrochemical workstation by water proof wire；In addition, before test starts, using dropper
Visible bubble in bubble near the sensing structure is eliminated.
(3) the cyclic voltammetry mode in electrochemical workstation is selected to test the sensing structure at various pressures
Capacitor, and the zero charge potential of the sensing structure is tested using pressure electrochemistry pop method of testing, wherein using circulation
Bias scanning speed when volt-ampere mode is 20mV/s, and bias potential range is changed to 0.6V from 0.3V.
(4) sensing structure is tested using the voltage-vs-time mode of electrochemical workstation during pressure change
Open-circuit voltage.
(5) short-circuit signal of the sensing structure in sinusoidal pressure change procedure is tested using current-vs-time mode, according to
The sensitivity of the pressure sensor is calculated according to the corresponding relationship between peak value short circuit current and pressure.
Analysis it is found that the working electrode and it is described electrode is individually positioned in adjacent interlayer, when external pressurized masterpiece
When using the pressing plate, the impressed pressure is transferred to the working electrode, and the configuration of the working electrode is caused to change,
To realize the perception to pressure change.In pressure mechanism, it is described to electrode not by the pressing plate pressure
Effect, therefore the structure that generated voltage and current signals are all from the working electrode when pressure sensor work becomes
Change.
Wherein, when impressed pressure increases, since pressure causes the electrochemistry usable area of the working electrode to reduce, make
The capacitor for obtaining the sensing structure reduces.Simultaneously in the case where total balancing charge is constant, the electrochemistry of the sensing structure
Potential increases.In this stage, the electrochemistry usable area of the working electrode reduces mainly due to big in the working electrode
Empty site disappear caused by so that the potential of the capacitor of the sensing structure and working electrode pressure act on when all have
Have a greater change rate.When pressure is more than 300kPa, the capacitor of the sensing structure slowly reaches platform area, this is because institute
Caused by stating empty point disappearance small in working electrode, therefore the capacitor of the sensing structure and electrode potential tend to be steady, by
This shows pressure sensor pressure signal response performance with higher under 300kPa pressure.
B in Fig. 4) figure illustrates the zero charge potential that pressure electrochemistry pop method tests the sensing structure, in curve
The corresponding bias potential in the smallest position of alternating current numerical value is zero charge potential, this is because in the effect of applying bias
Under, bias potential balances the adsorbed balancing charge in surface of working electrode, causes working electrode surface electric double layer balance electricity
Lotus disappears, so that capacitance variations are generated under pressure, no charge flowing and Ion transfer.Therefore, macro manifestations are described
The output current values of sensing structure are minimum, i.e. zero charge potential of the bias potential corresponding to the point equal to working electrode；And
As seen from the figure, the zero charge potential of working electrode is -49mV, illustrates that working electrode is intrinsic negatively charged, inside adsorbent solution
Cation (Na+) surface Lai Shixian charge balance, and then constitute electric double layer balancing charge layer.
Referring to Fig. 5, peak point current is with pressure, almost linear corresponding relationship, the corresponding relationship can be indicated are as follows: I=
82.8-82.79*exp ((- 2.14E-6*P) ^0.6), accuracy 0.996.The sensitivity of pressure sensor is divided into two ranks
Section, 10Pa to 1kPa, 10kPa to 300kPa.In 10Pa~1kPa pressure limit, sensitivity is 10.1~287kPa-1, this with
The capacitance variations of pressure sensor are consistent, and the quick reduction of capacitor causes the electrochemical potential of working electrode quickly to increase, from
And assign pressure sensor high sensitivity.In 10Pa~300kPa pressure limit, the rate of change of capacitor gradually slows down, and causes
The sensitivity of pressure sensor is set to be maintained at metastable numerical value (~3.2kPa-1).In addition, using positive and reversed external pressurized
Power, which acts on the sensing structure, can generate the current signal for having one-to-one relationship with pressure, this shows pressure sensor
With high job stability.
In conclusion the pressure sensor with excellent properties can either detect 1 millimeter of SEA LEVEL VARIATION, and can supervise
The wave variation for surveying 30 meters high, shows that pressure sensor has wide pressure monitoring range.Generally, in practical marine environment
Wave height variation is no more than 30 meters, therefore the pressure sensor can almost monitor in practical marine environment by various effect institutes
Caused wave variation, such as tsunami, submarine earthquake, hurricane etc..
Embodiment 2
Please refer to Fig. 6, Fig. 7, Fig. 8, Fig. 9 and Figure 10, second embodiment of the invention provide based on electrochemical principle
Self generation type pressure sensor, the structure and first embodiment of the invention of the pressure sensor provide former based on electrochemistry
The self generation type pressure sensor of reason is essentially identical, the difference lies in that the pressure sensor that the embodiment provides can be applicable in
In fresh water environment, and its sensing structure is contained in seal box 8, the working electrode and described is led respectively by waterproof to electrode
Line 9 is connected with the external world, and the side that the seal box 8 closes on the pressing plate offers through hole, and the through hole is used for accommodation
Conducting piece 7, one end of the power conducting piece 7 support on the pressing plate after passing through the through hole.The power conducting piece 7 and institute
The position for stating the contact of seal box 8 is provided with sealing ring 11, to realize the sealing of the sensing structure.Receiving in the seal box 8
There is sodium chloride solution 10, i.e., electrolyte is used as using the sodium chloride solution 10.In present embodiment, by the way that the sealing is arranged
The material of box 8, the pressure sensor can be applicable to petroleum pipeline, organic liquid transmission, strong acid and strong base corrosive environment
In.
In order to characterize the performance of the pressure sensor, following performance test has been done to above-mentioned pressure sensor:
(1) sensing structure after sealing that second embodiment of the invention provides is placed in fresh water lake (0.5 meter
It is deep), while being connected on the seal box 8 using red buoy, to be used to indicate position of the sensing structure in lake water.
(2) by the working electrode and it is described electrochemical workstation is connected to by water proof wire to electrode, with for adopting
Collect electric signal；Wherein, when lake surface calmness, the electric current of the sensing structure is maintained at baseline position fluctuation within a narrow range up and down；When
After having ship warp, the variation of wave caused by ship is transferred to around sensing structure, to cause sensing structure generation and wave
Wave changes consistent current signal.
It is appreciated that in other embodiments, single sense structure can be integrated into sensing battle array by integrated technique
Column, to realize the monitoring of multipoint pressure.Sensor array is placed in 0.6M NaCl aqueous solution, during the test, is passed through
The pressure change of artificial wave simulated waves, when wave passes through sensor array, different location can be generated in response to different
Current signal, and analyzed by signal, the direction of propagation of available wave, the movement velocity of wave, point of pressure in wave
Butut.
In present embodiment, after single pressure sensor is integrated into a sensor array, the pressure of multiple spot position can be realized
The multipoint pressure variation monitoring of 5 × 5 sensor array realization simulated waves is selected in the monitoring of power variation, and sensor array is to wave
The current responsing signal that caused pressure change generates is as shown in Figure 10.When wave passes through sensor array, sensor array energy
The instantaneous pressure variation for enough detecting different loci, is based on these live signals, can analyze the direction of wave motion, wave fortune
The information such as dynamic speed, this provides underwater early stage threat early warning and is of great significance in the monitoring of practical ocean wave, such as
Tsunami, submarine earthquake etc..In this experiment, wave motion direction is to move from left to right, and the movement velocity of wave is 6cm/s, wave
The relief height of wave is about 1cm.
Self generation type pressure sensor and preparation method thereof provided by the invention based on electrochemical principle, sensing structure
It works in electrolyte, is not necessarily to external power supply, and can produce the real-time voltage that there is certain relationship with ambient pressure and electric current letter
Number, it can be adapted for briny environment and fresh water environment, the scope of application is wider, and flexibility is preferable, and response speed is very fast
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of self generation type pressure sensor based on electrochemical principle, it is characterised in that:
The pressure sensor includes sensing structure, and the working environment of the sensing structure is electrolyte environment, and being used for will be to
The pressure energy of measuring pressure is converted into electric energy, so pressure sensor electric current according to caused by the electric energy that conversion obtains with it is right
The relationship between pressure answered and current electric current obtain current pressure, it is thus achieved that the real-time monitoring of testing pressure；
The sensing structure be based on electrochemical principle realize self power generation comprising pressing plate, working electrode, working electrode support plate,
To electrode supporting plate, elastic support, to electrode and rigid support body, the pressing plate, the elastic support, work electricity
Pole support plate, described is successively arranged from top to bottom with shape electrode supporting plate and the rigid support body rigid support body
At sandwich, the working electrode and described the working electrode support plate and described to electrode branch is separately positioned on to electrode
On fagging；The testing pressure is conducted by the pressing plate to the working electrode, so that the electrochemistry of the working electrode can
Reduced with area, the electric double layer capacitance of the working electrode is then made to change, the surface electric double layer of the working electrode is flat
Weighing apparatus charge remains unchanged, and the sensing structure generates potential change, to convert electric energy for pressure energy.
2. the self generation type pressure sensor based on electrochemical principle as described in claim 1, it is characterised in that: the sensing
Structure external load and generate electric current I, the relationship between electric current and corresponding pressure P using following formula indicate:
I=82.8-82.79 × exp ((- 2.14E-6*P) ^0.6).
3. the self generation type pressure sensor based on electrochemical principle as described in claim 1, it is characterised in that: electric double layer is flat
Weighing apparatus charge is Q=CV, and wherein V is the electrochemical potential of working electrode, and C is the electric double layer capacitance of working electrode, C=ε A/d, formula
In, ε is the dielectric constant of electrolyte, and A is the electrochemistry useable surface area of working electrode.
4. the self generation type pressure sensor based on electrochemical principle as described in claim 1, it is characterised in that: the pressure
Plate, the working electrode support plate and it is described be porous ceramic plate to electrode supporting plate.
5. the self generation type pressure sensor according to any one of claims 1-4 based on electrochemical principle, it is characterised in that:
The pressure sensor further includes that current detection component and processing display component, the current detection component are connected to the sensing
The current information that structure is used for electric current caused by sensing structure described in real-time detection, and will test is transferred to the place
Manage display component；The processing display component is used to calculate corresponding pressure according to the current information received, and will be described
Pressure is shown.
6. the self generation type pressure sensor based on electrochemical principle as claimed in claim 5, it is characterised in that: the electric current
Detection components are electrochemical workstation.
7. the self generation type pressure sensor based on electrochemical principle as claimed in claim 5, it is characterised in that: the pressure
Sensor further includes reference electrode, and the reference electrode is connected to the current detection component.
8. the self generation type pressure sensor according to any one of claims 1-4 based on electrochemical principle, it is characterised in that:
The pressure sensor is suitable for fresh water environment, further includes seal box and power conducting piece, the seal box is for accommodating electrolysis
Liquid, the sensing structure are set in the electrolyte, the working electrode and described pass through water proof wire and extraneous to electrode
It is connected；One end of the power conducting piece supports on the pressing plate behind the side of the seal box, is used for pressure to be measured
Power passes to the pressing plate.
9. the self generation type pressure sensor based on electrochemical principle as claimed in claim 8, it is characterised in that: the pressure
Sensor further includes sealing ring, and the position that the power conducting piece is in contact with the seal box is arranged in the sealing ring.
10. a kind of preparation side of the described in any item self generation type pressure sensors based on electrochemical principle of claim 1-9
Method, which is characterized in that method includes the following steps:
(1) by working electrode and working electrode support plate is separately positioned on to electrode and in electrode supporting plate；
(2) sandwich is prepared, the pressure sensor is then obtained.
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| CN201910152490.XA CN109781335B (en) | 2019-02-28 | 2019-02-28 | Self-generating pressure sensor based on electrochemical principle and preparation method thereof |
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| CN114964601A (en) * | 2022-05-24 | 2022-08-30 | 深圳市一鸣新材料有限公司 | Real-time monitoring device for pressure change inside battery |
| CN116952446A (en) * | 2023-05-15 | 2023-10-27 | 清华大学深圳国际研究生院 | Underwater pressure sensor and method for measuring size and change speed of underwater pressure |
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| CN109781335B (en) | 2020-05-19 |
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