CN109769096A - A Servo Motion Control Method for Linear CCD Scanning Process - Google Patents

A Servo Motion Control Method for Linear CCD Scanning Process Download PDF

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CN109769096A
CN109769096A CN201910062131.5A CN201910062131A CN109769096A CN 109769096 A CN109769096 A CN 109769096A CN 201910062131 A CN201910062131 A CN 201910062131A CN 109769096 A CN109769096 A CN 109769096A
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speed
motion
loop
curve
acceleration
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CN109769096B (en
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邹见效
张泽州
彭超
张健
牛凡
徐红兵
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University of Electronic Science and Technology of China
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Abstract

本发明公开了一种用于线阵CCD扫描过程的伺服运动控制方法，先规划线阵光电耦合型成像器件CCD的扫描轨迹，再对双环PID算法和迭代学习前馈+PID反馈控制算法的参数进行整定，最后，判断被摄物体当前运动状态，并根据不同运动状态之间的切换与切换优化后进行速度控制，从而来避免线阵CCD相机扫描过程中因运动速度不平稳而产生的图像失真。

The invention discloses a servo motion control method for a linear array CCD scanning process. The scanning trajectory of a linear array photoelectric coupling type imaging device CCD is first planned, and then the parameters of the double-loop PID algorithm and the iterative learning feedforward + PID feedback control algorithm are Carry out tuning, and finally, judge the current motion state of the subject, and perform speed control according to the switching between different motion states and switching optimization, so as to avoid the image distortion caused by the unstable motion speed during the scanning process of the linear CCD camera. .

Description

A kind of servo control method for linear array CCD scanning process
Technical field
The invention belongs to precise flange technical fields, more specifically, are related to a kind of for linear array CCD scanning mistake The servo control method of journey.
Background technique
CCD (Charge Coupled Device) is a kind of photoelectric coupling type image device, can directly be turned optical signal It is changed to electric signal, obtains digitized image after signal amplifies analog-to-digital conversion.CCD device is divided by the arrangement mode of its photosensitive unit For two class of line array CCD and area array CCD.Line array CCD is because its structure is simple, cost is relatively low and is used widely.Different from face As long as the simply exposure of the image capturing system of battle array CCD can obtain area image, the imaging system of linear array CCD scanning is desirable Two-dimensional areas image could be obtained using movement velocity continuous scanning, the characteristic and area array CCD acquisition system of imaging have centainly Difference.
The scene that Line-scanning Image Acquisition System is used to have relative motion between testee and camera, line-scan digital camera are only adopted every time Collect one-row pixels, to obtain the complete image of a width, subject must be along the direction perpendicular to line array sensor with certain Speed movement, after line array CCD acquire data line, subject has moved to next unit length just, formation Continuously data acquire.
Line array CCD has the fixed line-scanning period, when it only press itself scan period acquisition image and and subject When movement velocity is asynchronous, blurred image situation will occur, the image of acquisition is usually to be distorted, and may be lost important Data or increase and repeat useless data, the compression of testee is presented or stretches image, therefore is realized in scanning process The indifference control of speed is the key that obtain correct and equal proportion image.
SERVO CONTROL during existing linear array CCD scanning mostly uses greatly single control model, cannot achieve scanning process The accurate control of middle different motion state.Again or biaxial movement is using structure is uniformly controlled, and does not account in scanning process Twin shaft transports the difference of realized function.That is the main movement for realizing subject in scanning process of the movement of x-axis, it is desirable that realize The indifference of speed controls.The movement of Y-axis is mainly accomplished that positioning function.Ignore during this point normally results in scanning motion Still the movement of non-scan direction is generated.Phenomena such as even being distorted so as to cause photo generation stretching, the compression of camera shooting, Difficulty of the acquired photo in subsequent image processing is increased, the detection efficiency of system is reduced.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of servos for linear array CCD scanning process Motion control method, by carrying out indifference control to speed in scanning process, to avoid in linear array CCD camera scanning process because of fortune The image fault that dynamic speed is unstable and generates.
For achieving the above object, a kind of servo control method for linear array CCD scanning process of the present invention, It is characterized in that, comprising the following steps:
(1), the scanning track of linear array photoelectric coupling type image device CCD is planned
(1.1), the motion profile of scanning direction is planned
The pixel that the every row of line array CCD is arranged is Nr, the width of line array CCD is W0, the sweep speed of line array CCD is Vc, it is shot Speed of moving body is V0,；
Then have: transversal scanning precisionLongitudinal scanning precision
Guarantee acquisition image it is undistorted, according to the equal principle of horizontal and vertical resolution ratio, subject it is best Movement speed and the sweep speed of line array CCD meet following relationship:
V0=VC×W0/Nr
Finally, according to movement velocity V0Plan the motion profile of scanning direction；
(1.2), the motion profile of non-scan direction is planned
Set the movement travel of subject to the single sweep operation width W of line array CCD0；
(1.3), planned trajectory is optimized
Increase filter module in the motion profile output end of planning, filters the noise disturbance in planned trajectory；
(2), parameter tuning
(2.1), the parameter tuning of bicyclic pid algorithm
In speed outer ring and position inner ring, desired accelerating curve A is found out according to the planned trajectory after optimization respectivelyg (t), then by grating scale sensor actual accelerating curve A is obtainedg0(t), acceleration error curve e is then calculatedA(t) =Ag(t)-Ag0(t), Proportional coefficient K is finally adjusted according to Ziegler-Nichols algorithmpWith integral coefficient Ki, to complete double The parameter tuning of ring pid algorithm；
(2.2), iterative learning feedforward+PID/feedback control algolithm parameter tuning；
(2.2.1), the speed outer ring for masking system only retains the position inner ring of system；Then according to the rule after optimization It draws track and finds out desired rate curve Vs(t), by Vs(t) it carries out Fourier transformation and obtains Vs(jw), then with Vs(jw) as system System initial input is simultaneously input to speed outer ring；According to the actual speed curve V of grating scale read-out systems0(t), by Vs0(t) it carries out Fourier transformation obtains Vs0(jw), then with Vs0(jw) it is initially exported as system；
Finally, substituting into iterative learning control law to system, the first time input of system is obtainedYdIt (jw) is system desired output speed；
(2.2.2), Y is exported by the first time of grating scale sensor read-out system1(jw), it then, calculates defeated for the first time Speed-error curve Δ Y out1(jw)=Y1(jw)-Yd(jw)；
Again by iterative learning control law, second of input U of system is calculated according to following formula2(jw)；
Wherein, UrIt (jw) is the r times input of system, r=2,3,4 ...；Yr-1It (jw) is the r-1 times output of system, ρ For Difference Terms proportionality coefficient；
Pass through second of output Y of grating scale sensor read-out system simultaneously2(jw), second of output then, is calculated Speed-error curve Δ Y2(jw)=Y2(jw)-Yd(jw)；
Judge that front and back obtains whether speed-error curve vibrates twice, if there is oscillation, is then once obtained rear It inputs the feed forward input signal as system and otherwise calculates the input next time of system again by iterative learning control law, And so on, stop iteration when speed-error curve vibrates；
(2.2.3), the speed outer ring that feed forward input signal is input to the bicyclic PID adjusted in step (2.1) In, complete iterative learning feedforward+PID/feedback control algolithm parameter tuning；
(3), judge subject current motion state
To the movement velocity V of subject0Seek first derivative, obtain the acceleration a of subject, then by acceleration a with Given threshold value ε compares, when | a | when > ε, subject is in variable motion state；When | a | when≤ε, subject is at the uniform velocity Motion state；
(4), the switching between different motion state and handover optimization
(4.1), when subject is in variable motion state, it is switched to feedforward control+PID/feedback control, it is specific to control Process processed are as follows:
(4.1.1), the initial input U for calculating system under this motion state0；
U0=Kp1*Kp2*Vs(0)+Ur(0)
Wherein, Kp1、Kp2For the proportionality coefficient of position inner ring and speed outer ring, Ur(0) at the beginning for feed forward input signal The value at quarter, Vs(0) value carved at the beginning for desired rate curve；
(4.1.2), the acceleration feedback signal A that system under motion state is read by grating scale0(t), before then bringing into Control+PID/feedback control law is presented, the acceleration signal A (t) of system under this motion state is calculated；
ev(t)=A (t)-A0(t)
Wherein, Ki2For the integral coefficient of speed outer ring；
(4.1.3), step (4.1.1)-(4.1.2) is repeated, real-time tracking is carried out to acceleration signal A (t), keep system real When the rate curve that exports reach desired speed curve, to complete the control under the motion state；
(4.2), when subject is in uniform speed motion state, bicyclic PID control, specific control process are switched to are as follows:
(4.2.1), the initial input U for calculating system under this motion state0；
U0=Kp1*Kp2*Vs(0)
(4.2.2), the acceleration feedback signal A that system under motion state is read by grating scale0(t), it then brings into double Ring PID control rule, calculates the acceleration signal A (t) of system under this motion state；
ev(t)=A (t)-A0(t)
Wherein, Ki2For the integral coefficient of speed outer ring；
(4.2.3), step (4.2.1)-(4.2.2) is repeated, real-time tracking is carried out to acceleration signal A (t), keep system real When the rate curve that exports reach desired speed curve, to complete the control under the motion state.
Goal of the invention of the invention is achieved in that
A kind of servo control method for linear array CCD scanning process of the present invention, first plans linear array photoelectric coupling type The scanning track of image device CCD, then bicyclic pid algorithm and iterative learning feedforward+PID/feedback control algolithm parameter are carried out Adjusting, finally, judge subject current motion state, and according between different motion state switching and handover optimization it is laggard Row speed control, thus to avoid the image fault generated in linear array CCD camera scanning process because movement velocity is unstable.
Meanwhile a kind of servo control method for linear array CCD scanning process of the present invention also has below beneficial to effect Fruit:
(1), the difference model-free Iterative Algorithm that feed forward of acceleration uses, can cause to avoid by system modelling mistake Error, Dynamic iterations process can constantly correct the output error caused by disturbance, realize and control the indifference of boost phase； Secondly, the application of difference can eliminate system constant error in iterative process, in the algorithm that the present invention uses, Difference Terms are not only Consider influence of the state of the system before current state twice to system, it is also contemplated that system mode pair during primary iteration System residual influences, and introduces influence coefficient of the proportionality coefficient ρ to each secondary iteration to system and is distributed；
(2), two kinds of Controlling model switching controls that the present invention designs make system carry out bicyclic PID in the uniform speed scanning stage Control, accelerates and retarded motion stage system is controlled using feed forward of acceleration, and this control structure makes system while having The advantages of bicyclic PID control structure, in turn avoid the disadvantage that system is under single mode state of a control；
(3), handover optimization signal is introduced in handoff procedure, is avoided model and is switched to the disturbance of system bring suddenly, Reduce the time that system switches between two kinds of control models.
Detailed description of the invention
Fig. 1 is a kind of servo control method flow diagram for linear array CCD scanning process of the present invention；
Fig. 2 is linear array CCD scanning process schematic；
Fig. 3 is filtered programming movement trajectory diagram；
Fig. 4 is switch module motion switch state block diagram；
Fig. 5 is handover optimization signal schematic representation；
Fig. 6 is the feed forward input signal comparison diagram of optimization front and back；
Fig. 7 is the structural block diagram of feedforward input module；
Fig. 8 is the structural block diagram of servo control system；
Fig. 9 is traditional PID control and rate curve comparison diagram of the present invention；
Figure 10 is traditional PID control and speed-error curve comparison diagram of the present invention.
Specific embodiment
A specific embodiment of the invention is described with reference to the accompanying drawing, preferably so as to those skilled in the art Understand the present invention.Requiring particular attention is that in the following description, when known function and the detailed description of design perhaps When can desalinate main contents of the invention, these descriptions will be ignored herein.
Embodiment
Fig. 1 is a kind of servo control method flow diagram for linear array CCD scanning process of the present invention.
In the present embodiment, as shown in Figure 1, a kind of servo control side for linear array CCD scanning process of the present invention Method, comprising the following steps:
S1, the scanning track for planning linear array photoelectric coupling type image device CCD
S1.1, the motion profile for planning scanning direction
Line-scanning Image Acquisition System must be containing the normal capture of motion control ability, and the most important link of motion control is determining The line frequency of line scan camera is in correctly matching and closes with the relationship between movement velocity, only scan frequency and movement velocity Just available correct distortionless image, specific scanning process are as shown in Figure 2 for system.
Guarantee that acquired image is not stretched or compresses, it is necessary to defer to a bit: horizontal and vertical point of object Resolution is equal, i.e. the mobile distance of object is identical as the actual size of pixel sampling in a row synchronizing cycle.
The pixel that the every row of line array CCD is arranged is Nr, the width of line array CCD is W0, the sweep speed of line array CCD is Vc, it is shot Speed of moving body is V0,；
Then have: transversal scanning precisionLongitudinal scanning precision
Guarantee acquisition image it is undistorted, according to the equal principle of horizontal and vertical resolution ratio, subject it is best Movement speed and the sweep speed of line array CCD meet following relationship:
V0=VC×W0/Nr
When camera lens and selected camera, transverse precision is fixed value, constant in linear array scanning camera line frequency In the case of the Longitudinal precision of image be the movement velocity with object and change.When speed of moving body is too fast, make reality Compression of images will cause certain data segments and lose, when speed of moving body speed, stretches real image, can bring repetition Hash.In NI Vision Builder for Automated Inspection application, in order to obtain moving object clearly image, avoid image fuzzy, line scanning Image must lock Longitudinal precision: Longitudinal precision being made to be consistently equal to transverse precision.
Finally, according to movement velocity V0Plan the motion profile of scanning direction；Program results are as shown in figure 3, motion process It is divided into boost phase, uniform motion stage, decelerating phase.In the uniform motion stage, and R1 the and R2 stage is reserved, it is complete to speed At the uniform velocity start scanning process again entirely.
S1.2, the motion profile for planning non-scan direction
The movement of non-scan direction is hollow travel stage, and CCD line-scan digital camera does not work at this time.When in order to reduce idle stroke Between, speed is improved in non-line-scan digital camera working region as far as possible, but need to guarantee positioning accuracy.In order to save empty stroke time, at this time The movement of scanned object is divided into accelerating sections and braking section.The stroke of whole section of movement exactly sets the movement travel of subject It is set to the single sweep operation width W of line array CCD0；
S1.3, planned trajectory is optimized
In order to avoid the mutation of speed, acceleration in scanning process.It is smooth as far as possible in motion process, steady.It requires to advise Draw track it is as smooth as possible, without radio-frequency component.In order to keep planned trajectory more smooth, what the present invention used exports in trajectory planning End adds filter module.Filter module can filter out the noise disturbance in planned trajectory using Kalman filter, It is exactly the track unsmooth stage accelerated between uniform motion, realizes the optimization to planned trajectory.
Planned trajectory after having added filter to carry out track optimizing adds as shown in figure 3, filter has been added to eliminate later Velocity jump between fast motion stage and uniform motion stage.
S2, parameter tuning
The parameter tuning of S2.1, bicyclic pid algorithm
In speed outer ring and position inner ring, desired accelerating curve A is found out according to the planned trajectory after optimization respectivelyg (t), then by grating scale sensor actual accelerating curve A is obtainedg0(t), acceleration error curve e is then calculatedA(t) =Ag(t)-Ag0(t), Proportional coefficient K is finally adjusted according to Ziegler-Nichols algorithmpWith integral coefficient Ki, to complete double The parameter tuning of ring pid algorithm；
The parameter tuning of bicyclic pid algorithm includes the parameter tuning of speed outer ring pid algorithm and the pid algorithm of position inner ring Parameter tuning, tuning process is identical, below we be illustrated by taking the parameter tuning of speed outer ring pid algorithm as an example, Detailed process are as follows:
1) proportional controller will, be accessed into system；
2), the proportional gain K of Set scale controller inputs a unit step signal, observation electricity to proportional controller Acceleration responsive curve A of the machine to unit step signals0(t)；
3), ascending change proportional gain K, until system vibrates；
4), when self-sustained oscillation occurs continuing in system, gain at this time and cycle of oscillation is recorded, is respectively labeled as critical Gain KuWith critical period Tu；
5), the Proportional coefficient K of calculating speed outer ringp2With integral coefficient Ki2；
S2.2, iterative learning feedforward+PID/feedback control algolithm parameter tuning；
S2.2.1, the speed outer ring for masking system only retain the position inner ring of system；Then according to the planning after optimization Track finds out desired rate curve Vs(t), by Vs(t) it carries out Fourier transformation and obtains Vs(jw), then with Vs(jw) it is used as system Initial input is simultaneously input to speed outer ring；According to the actual speed curve V of grating scale read-out systems0(t), by Vs0(t) Fu is carried out In leaf transformation obtain Vs0(jw), then with Vs0(jw) it is initially exported as system；
Finally, substituting into iterative learning control law to system, the first time input of system is obtainedYdIt (jw) is system desired output speed；
S2.2.2, Y is exported by the first time of grating scale sensor read-out system1(jw), it then, calculates and exports for the first time Speed-error curve Δ Y1(jw)=Y1(jw)-Yd(jw)；
Again by iterative learning control law, second of input U of system is calculated according to following formula2(jw)；
Wherein, UrIt (jw) is the r times input of system, r=2,3,4 ...；Yr-1It (jw) is the r-1 times output of system, ρ For Difference Terms proportionality coefficient；
Pass through second of output Y of grating scale sensor read-out system simultaneously2(jw), second of output then, is calculated Speed-error curve Δ Y2(jw)=Y2(jw)-Yd(jw)；
Judge that front and back obtains whether speed-error curve vibrates twice, if there is oscillation, is then once obtained rear It inputs the feed forward input signal as system and otherwise calculates the input next time of system again by iterative learning control law, And so on, stop iteration when speed-error curve vibrates；
S2.2.3, feed forward input signal is input in the speed outer ring of the bicyclic PID adjusted in step S2.1, Complete iterative learning feedforward+PID/feedback control algolithm parameter tuning；
S3, judge subject current motion state
The realization of the function of motion state judgment module is completed by switch module, as shown in figure 4, to the fortune of subject Dynamic speed V0First derivative is sought, obtains the acceleration a of subject, then by acceleration a compared with given threshold value ε, when | a | > ε When, there are the errors outside an allowable error range for scanned object, and subject is in variable motion state at this time；When | a | When≤ε, the acceleration of scanned object drifts about in zero crossings, and subject is in uniform speed motion state at this time；
Switching and handover optimization between S4, different motion state
In order to guarantee that the stability of system is not influenced by the handoff procedure of the Controlling model of system, the present invention devises one A handover optimization module.The design of handover optimization signal is as shown in figure 5, in order to avoid feed-forward signal is when reaching switching critical points It is unexpected that zero setting lead to the mutation of system model, to influence the stability of system.It is excellent track must to be carried out in the switching initial stage Change.In view of two basic demands of handover optimization signal: the smooth transition of 1. realization switching critical points to zero.2. subtracting as far as possible Small transit time reduces switching time of the system between two kinds of models.
Therefore the road handover optimization signal switching initial stage under switch module is selected brachistochrone by the present invention, that is, Cycloid.Brachistochrone is well positioned to meet our requirements to handover optimization signal.By the phase between system critical state ε to 0 Mutual switching state is designed to that brachistochrone can be very good to solve caused system disturbance in System control structures handoff procedure and ask Topic.The feed forward of acceleration module of handover optimization signal has been added to export as shown in Fig. 6, when system reaches critical switching state ε, Feed-forward signal drops to zero along brachistochrone, until scanning process terminates.At this point, the output of feed forward of acceleration signal is zero.System System is realized by feed forward of acceleration control to smoothly switching bicyclic PID control.
The detailed process of switching control is described in we below.
S4.1, when subject is in variable motion state, be switched to the control of feedforward control+PID/feedback, feedforward input The structural block diagram of module is as shown in fig. 7, its basic thought is to be adjusted in an iterative process with the obtained data of preceding k iteration The input quantity of+1 iteration of kth, specific control process are as follows:
S4.1.1, the initial input U for calculating system under this motion state0；
U0=Kp1*Kp2*Vs(0)+Ur(0)
Wherein, Kp1、Kp2For the proportionality coefficient of position inner ring and speed outer ring, Ur(0) at the beginning for feed forward input signal The value at quarter, Vs(0) value carved at the beginning for desired rate curve；
S4.1.2, the acceleration feedback signal A that system under motion state is read by grating scale0(t), feedforward is then brought into Control+PID/feedback control law, calculates the acceleration signal A (t) of system under this motion state；
ev(t)=A (t)-A0(t)
Wherein, Ki2For the integral coefficient of speed outer ring；
S4.1.3, step S4.1.1-S4.1.2 is repeated, real-time tracking is carried out to acceleration signal A (t), keeps system real-time The rate curve of output reaches desired speed curve, to complete the control under the motion state；
S4.2, when subject is in uniform speed motion state, be switched to bicyclic PID control, specific control process are as follows:
S4.2.1, the initial input U for calculating system under this motion state0；
U0=Kp1*Kp2*Vs(0)
S4.2.2, the acceleration feedback signal A that system under motion state is read by grating scale0(t), it then brings into bicyclic PID control rule, calculates the acceleration signal A (t) of system under this motion state；
ev(t)=A (t)-A0(t)
Wherein, Ki2For the integral coefficient of speed outer ring；
S4.2.3, step S4.2.1-S4.2.2 is repeated, real-time tracking is carried out to acceleration signal A (t), keeps system real-time The rate curve of output reaches desired speed curve, to complete the control under the motion state.
In the present embodiment, whole control block diagram of the invention is as shown in Figure 8.By the method for the invention and one group of debugging Good common bicyclic PID servo control method compares.Fig. 9 is traditional PID control and rate curve pair of the present invention Than figure, Figure 10 is traditional PID control and speed-error curve comparison diagram of the present invention.As shown in Figure 9 and Figure 10.In variable motion rank Section, the tracking error of control method of the present invention is significantly less than traditional PID control, and response speed has larger mention It rises, solves the problems, such as the time lag of traditional PID control.In the uniform motion stage, control method of the present invention with Track precision is also obviously promoted compared with traditional PID control.The results showed that the present invention passes through above design, motion servo The dynamic property of system significantly improves, and reduces steady track error, meanwhile, the present invention also dramatically reduces movement and watches The modeling difficulty of dress system, and disturbance bring model uncertainty can be tracked, tracking accuracy is improved, to make Motion servo system can not only guarantee stability and corresponding rapidity, also make the output speed of motion servo system any Moment can farthest reappear plans speed out.
Although the illustrative specific embodiment of the present invention is described above, in order to the technology of the art Personnel understand the present invention, it should be apparent that the present invention is not limited to the range of specific embodiment, to the common skill of the art For art personnel, if various change the attached claims limit and determine the spirit and scope of the present invention in, these Variation is it will be apparent that all utilize the innovation and creation of present inventive concept in the column of protection.

Claims (2)

1.一种用于线阵CCD扫描过程的伺服运动控制方法，其特征在于，包括以下步骤：1. a servo motion control method for linear array CCD scanning process, is characterized in that, comprises the following steps: (1)、规划线阵光电耦合型成像器件CCD的扫描轨迹(1) Planning the scanning trajectory of the linear array photoelectric coupling imaging device CCD (1.1)、规划扫描方向的运动轨迹(1.1), plan the motion trajectory of the scanning direction 设置线阵CCD每行的像素为Nr，线阵CCD的宽度为W0，线阵CCD的扫描速率为Vc，被摄物体运动速度为V0，；Set the pixel of each line of the linear CCD as N r , the width of the linear CCD as W 0 , the scanning rate of the linear CCD as V c , and the moving speed of the subject as V 0 ,; 则有：横向扫描精度纵向扫描精度 Then there are: horizontal scanning accuracy Vertical scanning accuracy 保证采集的图像不失真，按照横向和纵向的分辨率相等的原则，被摄物体的最佳移动速度与线阵CCD的扫描速率满足以下关系：To ensure that the collected images are not distorted, according to the principle of equal horizontal and vertical resolutions, the optimal moving speed of the subject and the scanning rate of the linear CCD satisfy the following relationship: V0＝VC×W0/Nr V 0 =V C ×W 0 /N r 最后，根据运动速度V0规划扫描方向方向的运动轨迹；Finally, plan the motion trajectory in the scanning direction according to the motion speed V 0 ; (1.2)、规划非扫描方向的运动轨迹(1.2), plan the motion trajectory in the non-scanning direction 将被摄物体的运动行程设置为线阵CCD的单次扫描宽度W0；Set the motion stroke of the object to be the width W 0 of a single scan of the linear CCD; (1.3)、对规划轨迹进行优化(1.3), optimize the planned trajectory 在规划的运动轨迹输出端增加滤波模块，滤掉规划轨迹中的噪声扰动；A filter module is added at the output end of the planned motion trajectory to filter out the noise disturbance in the planned trajectory; (2)、参数整定(2), parameter setting (2.1)、双环PID算法的参数整定(2.1), parameter setting of double-loop PID algorithm 在速度外环和位置内环中，分别根据优化后的规划轨迹求出期望的加速度曲线Ag(t)，再通过光栅尺传感器得到实际的加速度曲线Ag0(t)，然后计算出加速度误差曲线eA(t)＝Ag(t)-Ag0(t)，最后根据Ziegler-Nichols算法调整比例系数Kp和积分系数Ki，从而完成双环PID算法的参数整定；In the speed outer loop and the position inner loop, the desired acceleration curve A g (t) is obtained according to the optimized planning trajectory, and the actual acceleration curve A g0 (t) is obtained through the grating sensor, and then the acceleration error is calculated. Curve e A (t)=A g (t)-A g0 (t), and finally adjust the proportional coefficient K p and the integral coefficient K i according to the Ziegler-Nichols algorithm, thereby completing the parameter tuning of the dual-loop PID algorithm; (2.2)、迭代学习前馈+PID反馈控制算法的参数整定；(2.2) Parameter setting of iterative learning feedforward + PID feedback control algorithm; (2.2.1)、屏蔽掉系统的速度外环，仅保留系统的位置内环；然后根据优化后的规划轨迹求出期望的速度曲线Vs(t)，将Vs(t)进行傅里叶变换得到Vs(jw)，再以Vs(jw)作为系统初始输入并输入至速度外环；根据光栅尺读出系统的实际速度曲线将进行傅叶变换得到再以作为系统初始输出；(2.2.1), shield the speed outer loop of the system, and keep only the position inner loop of the system; then find the desired speed curve V s (t) according to the optimized planning trajectory, and perform Fourier on V s (t) V s (jw) is obtained by leaf transformation, and then V s (jw) is used as the initial input of the system and input to the outer speed loop; the actual speed curve of the system is read out according to the grating ruler Will Take the Fourier transform to get again with as the initial output of the system; 最后，代入迭代学习控制律至系统，得到系统的第一次输入Yd(jw)为系统期望输出速度；Finally, substitute the iterative learning control law into the system to get the first input of the system Y d (jw) is the expected output speed of the system; (2.2.2)、通过光栅尺传感器读出系统的第一次输出Y1(jw)，然后，计算第一次输出的速度误差曲线ΔY1(jw)＝Y1(jw)-Yd(jw)；(2.2.2), read the first output Y 1 (jw) of the system through the grating sensor, and then calculate the speed error curve ΔY 1 (jw)=Y 1 (jw)-Y d ( jw); 再次通过迭代学习控制律，按照如下公式计算出系统的第二次输入U2(jw)；Through the iterative learning control law again, the second input U 2 (jw) of the system is calculated according to the following formula; 其中，Ur(jw)为系统的第r次输入，r＝2,3,4,...；Yr-1(jw)为系统的第r-1次输出；Among them, U r (jw) is the rth input of the system, r=2,3,4,...; Y r-1 (jw) is the r-1th output of the system; 同时通过光栅尺传感器读出系统的第二次输出Y2(jw)，然后，计算第二次输出的速度误差曲线ΔY2(jw)＝Y2(jw)-Yd(jw)；At the same time, the second output Y 2 (jw) of the system is read out through the grating sensor, and then the speed error curve ΔY 2 (jw)=Y 2 (jw)-Y d (jw) of the second output is calculated; 判断前后两次得到速度误差曲线是否出现振荡，如果出现振荡，则将后一次得到输入作为系统的前馈输入信号，否则，再次通过迭代学习控制律计算出系统的下一次输入，并以此类推，直到速度误差曲线出现振荡时停止迭代；Determine whether the speed error curve obtained twice before and after oscillates. If there is oscillation, use the latter input as the feedforward input signal of the system. Otherwise, calculate the next input of the system through the iterative learning control law again, and so on. , stop iterating until the velocity error curve oscillates; (2.2.3)、将前馈输入信号输入至步骤(2.1)中已经整定好的双环PID的速度外环中，完成迭代学习前馈+PID反馈控制算法的参数整定；(2.2.3), input the feedforward input signal into the speed outer loop of the dual-loop PID that has been tuned in step (2.1), and complete the parameter tuning of the iterative learning feedforward + PID feedback control algorithm; (3)、判断被摄物体当前运动状态(3), determine the current motion state of the subject 对被摄物体的运动速度V0求一阶导数，得到被摄物体的加速度a，再将加速度a与给定阈值ε比较，当|a|＞ε时，被摄物体处于变速运动状态；当|a|≤ε时，被摄物体处于匀速运动状态；Calculate the first derivative of the moving speed V 0 of the subject to obtain the acceleration a of the subject, and then compare the acceleration a with the given threshold ε. When |a|>ε, the subject is in a variable-speed motion state; when When |a|≤ε, the subject is in a state of uniform motion; (4)、不同运动状态之间的切换与切换优化(4) Switching and switching optimization between different motion states (4.1)、当被摄物体处于变速运动状态时，切换到前馈控制+PID反馈控制，具体控制过程为：(4.1) When the subject is in a variable-speed motion state, switch to feedforward control + PID feedback control. The specific control process is as follows: (4.1.1)、计算此运动状态下系统的初始输入U0；(4.1.1), calculate the initial input U 0 of the system under this motion state; U0＝Kp1*Kp2*Vs(0)+Ur(0)U 0 =K p1 *K p2 *V s (0)+U r (0) 其中，Kp1、Kp2为位置内环和速度外环的比例系数，Ur(0)为前馈输入信号在初始时刻的值，Vs(0)为期望速度曲线在初始时刻的值；Among them, K p1 and K p2 are the proportional coefficients of the position inner loop and the speed outer loop, U r (0) is the value of the feedforward input signal at the initial moment, and V s (0) is the value of the expected speed curve at the initial moment; (4.1.2)、通过光栅尺读出运动状态下系统的加速度反馈信号A0(t)，然后带入前馈控制+PID反馈控制律，计算出此运动状态下系统的加速度信号A(t)；(4.1.2) Read out the acceleration feedback signal A 0 (t) of the system in the motion state through the grating ruler, and then bring in the feedforward control + PID feedback control law to calculate the acceleration signal A (t) of the system in this motion state ); ev(t)＝A(t)-A0(t)e v (t)=A(t)-A 0 (t) 其中，Ki2为速度外环的积分系数；Among them, K i2 is the integral coefficient of the outer speed loop; (4.1.3)、重复步骤(4.1.1)-(4.1.2)，对加速度信号A(t)进行实时跟踪，使系统实时输出的速度曲线到达期望速度曲线，从而完成该运动状态下的控制；(4.1.3), repeat steps (4.1.1)-(4.1.2) to track the acceleration signal A(t) in real time, so that the speed curve output by the system in real time reaches the desired speed curve, thereby completing the motion state control; (4.2)、当被摄物体处于匀速运动状态时，切换到双环PID控制，具体控制过程为：(4.2) When the subject is moving at a constant speed, switch to double-loop PID control. The specific control process is as follows: (4.2.1)、计算此运动状态下系统的初始输入U0；(4.2.1), calculate the initial input U 0 of the system under this motion state; U0＝Kp1*Kp2*Vs(0)U 0 =K p1 *K p2 *V s (0) (4.2.2)、通过光栅尺读出运动状态下系统的加速度反馈信号A0(t)，然后带入双环PID控制律，计算出此运动状态下系统的加速度信号A(t)；(4.2.2), read out the acceleration feedback signal A 0 (t) of the system under the motion state through the grating ruler, and then bring in the double-loop PID control law to calculate the acceleration signal A (t) of the system under this motion state; ev(t)＝A(t)-A0(t)e v (t)=A(t)-A 0 (t) 其中，Ki2为速度外环的积分系数；Among them, K i2 is the integral coefficient of the outer speed loop; (4.2.3)、重复步骤(4.2.1)-(4.2.2)，对加速度信号A(t)进行实时跟踪，使系统实时输出的速度曲线到达期望速度曲线，从而完成该运动状态下的控制。(4.2.3), repeat steps (4.2.1)-(4.2.2) to track the acceleration signal A(t) in real time, so that the speed curve output by the system in real time reaches the desired speed curve, thereby completing the motion state control. 2.根据权利要求1所述的一种用于线阵CCD扫描过程的伺服运动控制方法，其特征在于，所述步骤(2.1)中，双环PID算法的参数整定包括速度外环PID算法的参数整定和位置内环的PID算法的参数整定；2. a kind of servo motion control method for linear array CCD scanning process according to claim 1, is characterized in that, in described step (2.1), the parameter setting of double loop PID algorithm comprises the parameter of speed outer loop PID algorithm Tuning and parameter tuning of the PID algorithm of the position inner loop; 其中，速度外环PID算法的参数整定具体过程为：Among them, the specific process of parameter tuning of the speed outer loop PID algorithm is as follows: 1)、将接入比例控制器到系统中；1), connect the proportional controller to the system; 2)、设置比例控制器的比例增益K，给比例控制器输入一个单位阶跃信号，观测电机对单位阶跃信号的加速度响应曲线 2) Set the proportional gain K of the proportional controller, input a unit step signal to the proportional controller, and observe the acceleration response curve of the motor to the unit step signal 3)、由小到大改变比例增益K，直到系统出现振荡；3) Change the proportional gain K from small to large until the system oscillates; 4)、当系统出现持续等幅振荡时，记录下此时的增益和振荡周期，分别标记为临界增益Ku和临界周期Tu；4), when the continuous constant amplitude oscillation occurs in the system, record the gain and oscillation period at this time, and mark them as critical gain Ku and critical period Tu respectively; 5)、计算速度外环的比例系数Kp2和积分系数Ki2；5), calculate the proportional coefficient K p2 and integral coefficient K i2 of the outer speed loop; Kp2＝λ*Ku， K p2 =λ*K u , 其中，λ、η均为常数；Among them, λ and η are constants; 位置内环的PID算法的参数整定具体过程为：The specific process of parameter tuning of the PID algorithm of the position inner loop is as follows: 按照步骤1)-5)所述方法，完成位置内环的PID算法的参数整定，得到位置内环的比例系数Kp1和积分系数Ki1。According to the method described in steps 1)-5), the parameter setting of the PID algorithm of the position inner loop is completed, and the proportional coefficient K p1 and the integral coefficient K i1 of the position inner loop are obtained.
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