CN109765503A - A kind of process cavity and fragmentation inspection method with fragmentation detection - Google Patents
A kind of process cavity and fragmentation inspection method with fragmentation detection Download PDFInfo
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Abstract
The present invention provides a kind of process cavity with fragmentation detection and fragmentation inspection methods, to solve the problems, such as to lack effective substrate integrity detection means in prior art processes processing procedure.Its structure includes the load plane for bearing substrate, further includes: multipolar electromagnetic field, for forming the electromagnetic environment for covering the load plane in the space locating for the load plane；Electromagnetic signal sensor array, for acquiring the electromagnetic signal distribution in the electromagnetic environment；Electromagnetic signal detection device, for obtaining the difference electromagnetic signal of same fixed position according to the electromagnetic signal distribution and determining the position coordinates of defect in substrate according to difference electromagnetic signal.While forming contactless defects detection, the physical parameter variation being adapted to during kinds of processes processing procedure, signal quantization real-time objective, state-detection data can be used as the data basis that manufacturing process improves analysis, avoid defect of the visual inspection means in position, opportunity and repeatability.
Description
Technical field
The present invention relates to substrate-processing techniques fields, and in particular to a kind of process cavity and fragmentation inspection with fragmentation detection
Perception method.
Background technique
In panel display screen manufacturing process, need in process cavity to substrate carry out forvacuum, plus hydrogen, dehydrogenation,
The manufacturing process such as metal annealing need to carry out necessary detection to the integrality of substrate in technical process, whether judge substrate
Occur damaged, unfilled corner even fragmentation the defects of.Existing technology is that (or front and back) installs optical perception in process cavity
Device, to perceive the breakage of substrate；As hydrogenation furnace optics detector is mounted on the two sides of cooling chamber；But at present for machinery
The vertical substrate edges in arm motion direction be can not detection, in addition optical sensor often occurs that hot spot is abnormal, is also easy to produce wrong report
The situations such as alert.
Summary of the invention
In view of this, the embodiment of the present invention provides a kind of process cavity with fragmentation detection and fragmentation inspection method, with
It solves the problems, such as to lack effective substrate integrity detection means in prior art processes processing procedure.
The process cavity with fragmentation detection of the embodiment of the present invention is also wrapped including the load plane for bearing substrate
It includes:
Multipolar electromagnetic field, for forming the electromagnetic environment for covering the load plane in the space locating for load plane；
Electromagnetic signal sensor array, for acquiring the electromagnetic signal distribution in the electromagnetic environment；
Electromagnetic signal detection device, for obtaining the difference electricity of same fixed position according to the electromagnetic signal distribution
Magnetic signal and the position coordinates that defect in substrate is determined according to difference electromagnetic signal.
The electromagnetic signal sensor array includes the laying battle array that magnetic induction sensor and/or electric induction sensor are formed
Column, the laying array are laid in the drop shadow spread of the load plane.In such manner, it is possible to guarantee substrate completely in multipolar electromagnetic
In the magnetic field environment and/or electric field environment that field is formed.
In one embodiment of the invention, multipolar electromagnetic field includes several magnetic pole groups, includes several magnetic poles, magnetic pole in magnetic pole group
Form the equally distributed electromagnetic environment of magnetic field strength.Stable magnetic force is advantageously formed in such a way that multiple groups magnetic pole group is set
Line obtains convenient for magnetic induction sensor.
In one embodiment of the invention, the multipolar electromagnetic field includes the first magnetic pole group and the second magnetic pole group, first magnetic
In the group of pole include at least two pole N generating units, the second magnetic pole group include at least two pole S generating units, it is described at least
Two pole N generating units are identical as at least two S pole generating unit quantity, the first magnetic pole group and second magnetic pole
Group is located at a pair of of opposed end of the load plane, and the pole at least two N generating unit is along the extension side of one end
To laying, there is gap, at least two S pole generating unit and at least two N between the adjacent pole N generating unit
Pole generating unit corresponds, and lays along the extending direction of the other end.Based on the magnetic line of force that such mode is formed, Ke Yi
The magnetic field distribution being evenly distributed is formed on load plane, is lacked so that electromagnetic signal detection device is more readily detected out in substrate
Sunken position.
In one embodiment of the invention, the multipolar electromagnetic field includes electromagnetic coil, and the electromagnetic coil is around the carrying
Plane setting.
In one embodiment of the invention, the multipolar electromagnetic field includes the first magnetic pole group, the second magnetic pole group and electromagnetic coil, institute
It states the first magnetic pole group and the second magnetic pole group is located at a pair of of opposed end of the load plane, the first magnetic pole group
In include at least two pole N generating units, the second magnetic pole group include at least two pole S generating units, at least two N
Pole generating unit is identical as at least two S pole generating unit quantity, and the pole at least two N generating unit is along one end
Extending direction is laid, and has gap between the adjacent pole N generating unit, at least two S pole generating unit and it is described extremely
Few two pole N generating units correspond, and lay along the extending direction of another end；The electromagnetic coil is located at described
Another pair opposed end of load plane, the electromagnetic coil are arranged around the load plane.By the way that magnetic pole group is arranged simultaneously
And electromagnetic coil, detection accuracy can be improved.
In one embodiment of the invention, the first magnetic pole group and the second magnetic pole group activate or replace simultaneously with electromagnetic coil
Activation.Such mode is activated simultaneously by electric and magnetic fields or alternate activation, either simultaneously or alternately using corresponding sensor array
Corresponding signal intensity is detected, detection accuracy is further increased.
In one embodiment of the invention, the electromagnetic signal detection device includes:
Encoder forms sensing data output for the output signal of each sensor to be carried out coding encapsulation；
Magnetic signal processor obtains magnetic field strength in the electromagnetic signal distribution for handling sensing data
The data of mutated site or mutational range, and determine according to the data position coordinates of defect on the substrate.
The fragmentation inspection method of the embodiment of the present invention, comprising:
Electromagnetic environment is formed around the load plane for bearing substrate；
Electromagnetic signal distribution is detected in the electromagnetic environment；
It obtains the mutation electromagnetic signal in the electromagnetic signal distribution and institute is determined according to the mutation electromagnetic signal
State the position coordinates of the defects of substrate.
In one embodiment of the invention, the electromagnetic environment is electric field environment and/or magnetic field environment.
The process cavity and fragmentation inspection method with fragmentation detection of the embodiment of the present invention, form contactless defects detection
While, the physical parameter variation being adapted to during kinds of processes processing procedure, signal quantization real-time objective, state-detection data
It can be used as the data basis that manufacturing process improves analysis, avoid visual inspection means in position, opportunity and repeatability
Defect.
Detailed description of the invention
Fig. 1 show the function structure schematic diagram of the process cavity for having fragmentation detection of one embodiment of the invention.
Fig. 2 show the schematic front view of the process cavity internal structure for having fragmentation detection of one embodiment of the invention.
Fig. 3 show the elevational schematic view of the process cavity internal structure for having fragmentation detection of one embodiment of the invention.
Fig. 4 show the process cavity internal magnetic field emulation schematic diagram for having fragmentation detection of one embodiment of the invention.
Fig. 5 show the schematic front view of the process cavity internal structure for having fragmentation detection of another embodiment of the present invention.
Fig. 6 show the elevational schematic view of the process cavity internal structure for having fragmentation detection of another embodiment of the present invention.
Fig. 7 show the process cavity internal magnetic field emulation schematic diagram for having fragmentation detection of another embodiment of the present invention.
Fig. 8 show the elevational schematic view of the process cavity internal structure for having fragmentation detection of another embodiment of the present invention.
Appended drawing reference:
10- multipolar electromagnetic field；20- electromagnetic signal sensor array；30- electromagnetic signal detection device；40- microscope carrier；
11- the first magnetic pole group；12- the second magnetic pole group；13- electromagnetic coil；
21- magnetic induction sensor；22- electric induction sensor.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that the described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
Fig. 1 show the function structure schematic diagram of the process cavity for having fragmentation detection of one embodiment of the invention.Such as Fig. 1 institute
Show, the present embodiment includes:
Multipolar electromagnetic field 10, for forming covering substrate in the space locating for load plane (for example being formed as microscope carrier 40)
Electromagnetic environment.
Electromagnetic environment can be the steady magnetic field environment that multiple pole pieces are formed, and be also possible to the steady of electrod assembly formation
State electric field environment is also possible to the stable electromagnetic environment of alternation that pole piece and electrod assembly are formed.
Microscope carrier 40 provides stable substrate support, can be support platform, braced frame, is also possible to fixed clamp machinery
Arm or path mobile mechanical arm, are not specifically limited herein.
Substrate can be the full-size transitional product after the completion of one-time process processing procedure, such as (chemical gaseous phase is formed sediment by CVD
Product) substrate of function element layer pattern, the full-size intermediate products being also possible in one-time process processing procedure, example are formed after processing procedure
Substrate such as in annealing process.
Electromagnetic signal sensor array 20, for acquiring the electromagnetic signal distribution in electromagnetic environment.
Electromagnetic signal sensor is according to the space characteristics of electromagnetic environment, such as spatial signal intensity feature, spatial-intensity letter
Number overlapping features, spatial-intensity signal interference characteristics or spatial-intensity sign mutation feature are laid to form array, obtain technique system
The Electromagnetic Continuous signal distributions state in journey each stage.
Electromagnetic signal detection device 30, for obtaining the difference electromagnetism of same fixed position according to electromagnetic signal distribution
Signal, and determine according to the difference electromagnetic signal position coordinates of defect in the substrate.
It will be appreciated by those skilled in the art that since material generally has one of paramagnetism, diamagnetism (diamagnetism) spy
Property.Electromagnetic signal distribution is basicly stable in the electromagnetic environment of stable state, is placed in bistable electromagnetic environment and determines integral material
Corresponding influence can be generated on electromagnetic signal distribution, and determine the metamorphosis of integral material and will lead to electromagnetic signal distribution
There is localized variation in state, and localized variation is acquired by sensor and is quantified, can determine the physical imperfection that material is likely to occur.
While having the process cavity of fragmentation detection to form contactless defects detection of the embodiment of the present invention, is adapted to more
Physical parameter variation during kind manufacturing process, signal quantization real-time objective, state-detection data can be used as manufacturing process
The data basis for improving analysis, avoids defect of the visual inspection means in position, opportunity and repeatability.
Fig. 2 show the schematic front view of the process cavity internal structure for having fragmentation detection of one embodiment of the invention.Fig. 3
It show the elevational schematic view of the process cavity internal structure for having fragmentation detection of one embodiment of the invention.In conjunction with Fig. 2 and Fig. 3 institute
Show, in the embodiment of the present invention:
Microscope carrier 40, the load plane formed by frame structure are in rectangle for carrying and fixed substrate, such as in this reality
It applies in example, substrate is located at 40 top surface of microscope carrier.
The the first magnetic pole group 11 and the second magnetic pole group 12 of multipolar electromagnetic field 10 are constituted, includes at least two in the first magnetic pole group 11
A pole N generating unit, the second magnetic pole group 12 include at least two pole S generating units, and at least two pole N generating units and S are at least
Two pole generating unit quantity are identical, and the first magnetic pole group 11 and the second magnetic pole group 12 are located at a pair of of opposite end of microscope carrier 40
At least two pole the N generating units in portion, the first magnetic pole group 11 are laid along the extending direction of one end, and the adjacent pole N occurs single
There is gap, at least two pole S generating units of the second magnetic pole group 12 and at least two poles N correspond, and along another between member
The extending direction of one end is laid.
Electromagnetic signal sensor array 20 includes the magnetic induction that array is laid in the drop shadow spread of 40 load plane of microscope carrier
Sensor 21 is used for magnetic field sensor signal, the quantization voltage signal of corresponding magnetic field strength is formed, for example, magnetic in the present embodiment
Inductive pick-up 21 is laid in the bottom surface of microscope carrier 40.
Electromagnetic signal detection device 30 includes:
Encoder forms sensing data output for the output signal of each sensor to be carried out coding encapsulation；
Magnetic signal processor obtains the mutation of magnetic field strength in electromagnetic signal distribution for handling sensing data
The data of position or mutational range, and determine according to the data position coordinates of defect on the substrate.
In practical application, the magnetic field that the first magnetic pole group 11 and the second magnetic pole group 12 are formed covers substrate.
Fig. 4 show the process cavity internal magnetic field emulation schematic diagram for having fragmentation detection of one embodiment of the invention.Such as Fig. 4
Shown, the magnetic line of force in magnetic field can form the approximately parallel magnetic line of force in the corresponding pole N-S interpolar in the present embodiment, in adjacent N
Pole-S interpolar forms the staggered magnetic line of force, and magnetic field strength is related to the density of the magnetic line of force, each position of magnetic pole once it is determined that, magnetic field
Intensity distribution determines, when the substrate of form stable is placed in magnetic field, the variation that the intensity distribution in magnetic field can be regular, and meeting
Corresponding stable magnetic field distribution is formed, can quantify to obtain by magnetic induction sensor 21, when substrate form occurs carefully
When microvariations, the change intensity of magnetic field distribution and position can quantify to obtain by magnetic induction sensor 21.
In one embodiment of the invention, it can also include other magnetic pole groups, match with the first magnetic pole group 11 and the second magnetic pole group 12
It closes and forms magnetic field covering load plane (i.e. the load plane of substrate) of magnetic field distribution more evenly, so that due to damaged, scarce
The substrate form that angle even fragmentation is formed is easier to be detected by the magnetic signal processor of electromagnetic signal detection device 30.
In one embodiment of the invention, polarity can be realized under certain conditions between the pole S generating unit and the pole N generating unit
It exchanges, so as to form alternating magnetic field, forms the feature frame by frame of electromagnetic environment, obtain the different characteristic in same detection position
According to for real time contrast.
Fig. 5 show the schematic front view of the process cavity internal structure for having fragmentation detection of another embodiment of the present invention.
Fig. 6 show the elevational schematic view of the process cavity internal structure for having fragmentation detection of another embodiment of the present invention.In conjunction with Fig. 5 and
Shown in Fig. 6, in the embodiment of the present invention:
Microscope carrier 40, the load plane formed by frame structure, for carrying with fixed substrate such as in the present embodiment, base
Plate is located at 40 top surface of microscope carrier.
The electromagnetic coil 13 of multipolar electromagnetic field 10 is constituted around microscope carrier 40.
Electromagnetic signal sensor array 20 includes the electric induction that array is laid in the drop shadow spread of 40 load plane of microscope carrier
Sensor 22 forms the quantization voltage signal of corresponding electric field strength for induction field signal, for example, inductance in the present embodiment
Inductive sensing device 22 is laid in the bottom surface of microscope carrier 40.
In practical application, the electric field that electromagnetic coil 13 is formed covers substrate.
Fig. 7 show the process cavity internal electric field emulation schematic diagram for having fragmentation detection of one embodiment of the invention.Such as Fig. 7
It is shown, the power line of electric field form extending direction in electromagnetic coil 13 convergent, approximately parallel power line, electricity in the present embodiment
Field intensity is related to the density of power line, and the intensity distribution of 13 internal electric field of electromagnetic coil determines, when the substrate of form stable is placed in
When in electric field, the variation that the intensity distribution of electric field can be regular will form corresponding stable electric-field intensity distribution, Ke Yitong
The quantization of electric induction sensor 22 is crossed to obtain, when slight change occurs for substrate form, the change intensity of electric-field intensity distribution and position
Setting can quantify to obtain by electric induction sensor 22.
In one embodiment of the invention, electromagnetic coil 13 can be flowed to controlled current flow and be converted, and can form alternating electric field, be formed
The feature frame by frame of electromagnetic environment obtains the different characteristic in same detection position and is used for real time contrast.
Fig. 8 show the elevational schematic view of the process cavity internal structure for having fragmentation detection of another embodiment of the present invention.
As shown in figure 8, including: in the embodiment of the present invention
In a pair of of opposed end:
The the first magnetic pole group 11 and the second magnetic pole group 12 of multipolar electromagnetic field 10 are constituted, includes at least two in the first magnetic pole group 11
A pole N generating unit, the second magnetic pole group 12 include at least two pole S generating units, at least two pole N generating units and at least two
A pole S generating unit quantity is identical, and the first magnetic pole group 11 and the second magnetic pole group 12 are located at a pair of of opposed end of microscope carrier 40,
At least two pole N generating units of the first magnetic pole group 11 are laid along the extending direction of one end, are had between the generating unit of the adjacent pole N
There are gap, at least two pole S generating units of the second magnetic pole group 12 and at least two pole N generating units one of the first magnetic pole group 11
One is corresponding, and lays along the extending direction of the other end.
In another pair opposed end:
The electromagnetic coil 13 for constituting multipolar electromagnetic field 10 is arranged around the load plane of microscope carrier 40.
Electromagnetic signal sensor array 20 includes the magnetic induction sensor distinguishing array in 40 drop shadow spread of microscope carrier and laying
21 and electric induction sensor 22.
The first magnetic pole group 11 and the second magnetic pole group 12 and electromagnetic coil 13 cooperatively form compound multipole electricity in practical application
Magnetic field 10, electric and magnetic fields activate simultaneously or alternate activation, are either simultaneously or alternately detected using corresponding sensor array corresponding
Signal intensity further increases detection accuracy.
The fragmentation inspection method of the embodiment of the present invention, comprising:
Electromagnetic environment is formed around the load plane for bearing substrate；
Electromagnetic signal distribution is detected in electromagnetic environment；
The mutation electromagnetic signal in electromagnetic signal distribution is obtained according to mutation electromagnetic signal and determines lacking in substrate
Sunken position coordinates.
Electromagnetic environment can be the composite electromagnetic environment of electric field environment, magnetic field environment or both.
Electric field alternation or alternating magnetic field can be used in one embodiment of the invention, are formed the feature frame by frame of electromagnetic environment, are obtained
It obtains the different characteristic in same detection position and is used for real time contrast.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, made any modification, equivalent replacement etc. be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of process cavity with fragmentation detection, including the load plane for bearing substrate, it is characterised in that further include:
Multipolar electromagnetic field, for forming the electromagnetic environment for covering the load plane in the space locating for the load plane；
Electromagnetic signal sensor array, for acquiring the electromagnetic signal distribution in the electromagnetic environment；
Electromagnetic signal detection device, the difference electromagnetism for obtaining same fixed position according to the electromagnetic signal distribution are believed
Number and the position coordinates of defect in the substrate are determined according to the difference electromagnetic signal.
2. the process cavity according to claim 1 with fragmentation detection, which is characterized in that the electromagnetic signal sensor
Array includes the laying array that magnetic induction sensor and/or electric induction sensor are formed, and the laying array is laid in described hold
In the drop shadow spread for carrying plane.
3. the process cavity according to claim 1 with fragmentation detection, which is characterized in that the multipolar electromagnetic field includes
Several magnetic pole groups, include several magnetic poles in the magnetic pole group, and the magnetic pole forms the equally distributed electromagnetism of magnetic field strength
Environment.
4. the process cavity according to claim 1-3 with fragmentation detection, which is characterized in that the multipole electricity
Magnetic field includes the first magnetic pole group and the second magnetic pole group, includes at least two pole N generating units in the first magnetic pole group, and described the
Two magnetic pole groups include at least two pole S generating units, and at least two N pole generating unit and the pole at least two S occur
Element number is identical, and the first magnetic pole group and the second magnetic pole group are located at a pair of of opposite end of the load plane
Portion, extending direction of at least two N pole generating unit along an end is laid, between the adjacent pole N generating unit
With gap, at least two S pole generating unit and at least two N pole generating unit are corresponded, and along another institute
The extending direction for stating end is laid.
5. the process cavity according to claim 1 with fragmentation detection, which is characterized in that the multipolar electromagnetic field includes
Electromagnetic coil, the electromagnetic coil are arranged around the load plane.
6. the process cavity according to claim 1 with fragmentation detection, which is characterized in that the multipolar electromagnetic field includes
First magnetic pole group, the second magnetic pole group and electromagnetic coil；
The first magnetic pole group and the second magnetic pole group are located at a pair of of opposed end of the load plane, and described first
In magnetic pole group include at least two pole N generating units, the second magnetic pole group include at least two pole S generating units, it is described extremely
Few two pole N generating units are identical as at least two S pole generating unit quantity, the pole at least two N generating unit edge
The extending direction of one end is laid, and has gap between the adjacent pole N generating unit, and the pole at least two S occurs
Unit and at least two N pole generating unit correspond, and lay along the extending direction of another end；
The electromagnetic coil is located at another pair opposed end of the load plane, and the electromagnetic coil is around the load plane
Setting.
7. the process cavity according to claim 6 with fragmentation detection, which is characterized in that the first magnetic pole group and
Two magnetic pole groups and the electromagnetic coil activate simultaneously or alternate activation.
8. the process cavity according to claim 1 with fragmentation detection, which is characterized in that the electromagnetic signal detection dress
It sets and includes:
Encoder forms sensing data output for the output signal of each sensor to be carried out coding encapsulation；
Magnetic signal processor obtains magnetic field strength in the electromagnetic signal distribution for handling the sensing data
The data of mutated site or mutational range, and determine according to the data position coordinates of defect on the substrate.
9. a kind of fragmentation inspection method, comprising:
Electromagnetic environment is formed around the load plane for bearing substrate；
Electromagnetic signal distribution is detected in the electromagnetic environment；
It obtains the mutation electromagnetic signal in the electromagnetic signal distribution and the base is determined according to the mutation electromagnetic signal
The position coordinates of the defects of plate.
10. fragmentation inspection method as claimed in claim 9, which is characterized in that the electromagnetic environment is electric field environment and/or magnetic
Field environment.
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