CN109742263B - Preparation method and preparation equipment of electroluminescent device - Google Patents
Preparation method and preparation equipment of electroluminescent device Download PDFInfo
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- CN109742263B CN109742263B CN201811579684.XA CN201811579684A CN109742263B CN 109742263 B CN109742263 B CN 109742263B CN 201811579684 A CN201811579684 A CN 201811579684A CN 109742263 B CN109742263 B CN 109742263B
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- 239000002904 solvent Substances 0.000 claims abstract description 82
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 238000000034 method Methods 0.000 claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 claims abstract description 25
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 238000005381 potential energy Methods 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 abstract description 6
- 230000002349 favourable effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 216
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 239000008367 deionised water Substances 0.000 description 11
- 229910021641 deionized water Inorganic materials 0.000 description 11
- 239000007788 liquid Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 5
- 239000004372 Polyvinyl alcohol Substances 0.000 description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
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- 230000007613 environmental effect Effects 0.000 description 2
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- 229920003303 ion-exchange polymer Polymers 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000001223 reverse osmosis Methods 0.000 description 2
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- 150000001298 alcohols Chemical class 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
The invention discloses a preparation method and a preparation device of an electroluminescent device, wherein the preparation method comprises the following steps: forming an electrode layer on the surface of the substrate; forming a functional film layer on the support layer of the functional film; placing the substrate and the functional film in a solvent to remove the supporting layer; and attaching the functional film layer to the surface of the electrode layer. The method comprises the steps of firstly depositing an electrode on a substrate, then placing the substrate into the bottom of a container filled with a solvent, placing the prepared functional film with a double-layer structure into the solvent, and after a supporting layer in the functional film is completely dissolved, only in a solvent environment, attaching the functional film to an electrode layer deposited on the substrate, so that the high cost of depositing a film layer by a dry method is avoided, the environment cannot be damaged, the type of the used solvent can be controlled, the cost can be reduced for manufacturers in production, and the method is more favorable for danger control in actual production.
Description
Technical Field
The invention relates to the technical field of display, in particular to a preparation method and manufacturing equipment of an electroluminescent device.
Background
An electroluminescent device is a type of electronic device that converts electrical energy into optical energy, and a typical structure thereof is generally that a transparent anode, a light emitting layer, and a cathode are sequentially disposed on a substrate. However, such a structure generally has a low light emitting efficiency and a high turn-on voltage. In order to solve these problems, various other functional film layers, such as an electrode surface modification layer, a carrier injection layer, a carrier transport layer, a blocking layer, a buffer layer, etc., are usually added between the electrode and the light emitting layer in the prior art.
The material utilization rate is low when each functional film layer is manufactured, and the cost is high.
Disclosure of Invention
The invention aims to provide a preparation method and manufacturing equipment of an electroluminescent device with low cost.
In order to achieve the above object, the present invention provides a method for manufacturing an electroluminescent device, comprising the steps of:
forming an electrode layer on the surface of the substrate;
forming a functional film layer on the support layer of the functional film;
placing the substrate and the functional film in a solvent to remove the supporting layer; and
and attaching the functional film layer to the surface of the electrode layer.
Optionally, the attaching the functional film layer to the surface of the electrode layer includes: and attaching the functional film layer to the electrode layer by using a method of transferring the solvent under the action of gravitational potential energy.
Optionally, the attaching the functional film layer to the surface of the electrode layer includes: and attaching the functional film layer to the electrode layer by using a method of transferring the solvent under the action of external pressure.
Optionally, the attaching the functional film layer to the surface of the electrode layer includes: and carrying the independent functional film layer by using the substrate to ensure that the electrode layer is attached to the functional film layer.
Optionally, in the removing the support layer by placing the substrate and the functional film in a solvent, the support layer is placed opposite to the electrode layer.
Optionally, the thickness of the functional film layer is greater than that of the support layer.
Optionally, after attaching the functional film layer to the surface of the electrode layer, the method further includes the steps of: and blowing the attached functional film layer by inert gas flow.
Optionally, the projection of the functional film layer to the direction of the support layer does not exceed the range of the support layer.
The invention also discloses a preparation method of the electroluminescent device, which comprises the following steps:
forming an electrode layer on the surface of the substrate;
forming a functional film layer on the support layer of the functional film;
placing the substrate and the functional film in a solvent to remove the supporting layer;
the solvent is transferred under the action of external pressure, so that the functional film layer is attached to the electrode layer; and
and blowing the attached functional film layer by using nitrogen airflow.
The invention also discloses a device for manufacturing the electroluminescent device, which comprises: a substrate preparation device for forming an electrode layer on a substrate surface of a substrate; a functional film preparation device for forming a functional film layer on the support layer of the functional film; the supporting layer stripping device is used for placing the substrate and the functional film in a solvent to remove the supporting layer; and a functional film layer attaching device for attaching the functional film layer to the surface of the electrode layer.
Compared with the scheme of dry preparation of the functional film, the method has the advantages that the electrode is firstly deposited on the substrate, then the substrate is placed at the bottom in the container filled with the solvent, the prepared functional film with the double-layer structure is placed in the solvent, after the supporting layer in the functional film is completely dissolved, the functional film is only required to be attached to the electrode layer deposited on the substrate in the solvent environment, the high cost of film deposition by using a dry method is avoided, meanwhile, the environment cannot be damaged, the type of the used solvent can be controlled, the cost can be reduced for manufacturers in production, and the danger control in actual production is facilitated.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. In the drawings:
FIG. 1 is a schematic diagram showing a general flow of a method for manufacturing an electroluminescent device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a method for fabricating an electroluminescent device according to an embodiment of the present invention, including various alternative processes;
FIG. 3 is a schematic view of a functional film of a double-layered film according to an embodiment of the present invention;
FIG. 4 is a schematic illustration of an electrode layer deposited on a substrate in accordance with an embodiment of the present invention;
FIG. 5 is a schematic view of a functional film after dissolution of a support layer according to an embodiment of the present invention;
FIG. 6 is a schematic view illustrating a functional film layer bonded to an electrode layer according to an embodiment of the invention;
FIG. 7 is a schematic diagram of a gravitational potential energy drainage method in accordance with an embodiment of the present invention;
FIG. 8 is a schematic representation of the solvent after draining by gravitational potential energy in accordance with one embodiment of the present invention;
FIG. 9 is a schematic illustration of an applied pressure drainage method according to an embodiment of the present invention;
FIG. 10 is a schematic view of the solvent being removed under an applied pressure in accordance with one embodiment of the present invention;
FIG. 11 is a schematic view of an electrode layer before being actively bonded to a functional film layer according to an embodiment of the invention;
fig. 12 is a schematic view illustrating an electrode layer actively bonded to a functional film layer according to an embodiment of the invention.
100, a substrate; 110. a substrate; 120. an electrode layer; 200. a functional film; 210. a functional film layer; 220. a support layer; 300. a container; 310. a flow guide structure; 400. a solvent; 410. deionized water; 500. a pressure device.
Detailed Description
Specific structural and functional details disclosed herein are merely representative and are provided for purposes of describing example embodiments of the present invention. The present invention may, however, be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the term "comprises" and any variations thereof is intended to cover non-exclusive inclusions. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments. It will be further understood that the terms "comprises" and/or "comprising," when used herein, specify the presence of stated features, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, components, and/or groups thereof.
The invention provides a novel preparation method of a functional film in an electroluminescent device, which has two key points; one is a structure for preparing a double-layer film, the lower layer film is used as a supporting layer and is also used as a sacrificial layer, and the upper layer film is a functional film (a current carrier injection layer, a current carrier transmission layer and the like) required in the electroluminescent device; the sacrificial layer can be polyvinyl alcohol or other substances which can be dissolved by deionized water, so that after the double-layer film structure is immersed in water, the sacrificial layer can be dissolved, and the functional film layer on the sacrificial layer can be separated from the substrate. The second is the process of using the prepared structure containing the anode (cathode) or other functional film layer to receive the independent functional film layer after the functional film layer is separated from the substrate.
The invention will be further elucidated with reference to the drawings and alternative embodiments.
Referring to fig. 1, an embodiment of the present invention discloses a method for manufacturing an electroluminescent device, including:
s11, forming an electrode layer 120 on the surface of the substrate 110 (as shown in fig. 4);
s12, forming a functional film layer 210 on the support layer 220 of the functional film (as shown in fig. 3);
s13, placing the substrate 100 and the functional film 200 in a solvent 400 to remove the support layer 220 (as shown in fig. 7 to 12);
s14, attaching the functional film 210 to the surface of the electrode layer 120 (as shown in fig. 7 to 12).
The electrode layer 120 is firstly deposited on the substrate 110, then the substrate is placed at the bottom in the container 300 filled with the solvent 400, the prepared functional film 200 with the double-layer structure is placed in the solvent 400, after the support layer 220 in the functional film 200 is completely dissolved, the functional film 200 is only required to be attached to the electrode layer 120 deposited on the substrate 110 in the solvent 400 environment, the high cost of film deposition by a dry method is avoided, the environment cannot be damaged, the type of the used solvent 400 can be controlled, the cost can be reduced for manufacturers in production, and the danger control in actual production is facilitated.
The sequence of S11 and S12 is not limited, and is a preparation operation in the preparation process before the functional film layer 210 is attached to the surface of the electrode layer 120.
Referring to fig. 2, in an embodiment, the step of attaching the functional film 210 includes:
s241, the functional film layer 210 is gradually bonded to the electrode layer 120 as the liquid level of the solvent 400 is lowered by transferring the solvent 400 by gravitational potential energy (as shown in fig. 7 and 8).
After the support layer 220 is dissolved in the solvent 400, the functional film layer 210 is independent of the solvent 400 and floats on the liquid level of the solvent 400, and the distance between the functional film layer 210 and the electrode layer 120 at the bottom of the solvent 400 needs to be shortened because the functional film layer 210 is attached to the electrode layer 120 at the bottom of the solvent 400.
Referring to fig. 2, in an embodiment, the step of attaching the functional film 210 includes:
s242, the functional film layer 210 is gradually bonded to the electrode layer 120 as the liquid level of the solvent 400 is lowered by transferring the solvent 400 by the action of the external pressure (as shown in fig. 9 and 10).
After the support layer 220 is dissolved in the solvent 400, the functional film layer 210 is separated from the solvent 400, and floats on the surface of the solvent 400, since the functional film layer 210 is attached to the electrode layer 120 at the bottom of the solvent 400, the distance between the functional film layer and the electrode layer needs to be shortened, and the solution transfers the solvent 400 by using the external pressure, only an empty container 300 needs to be prepared and the flow guide structure 310 is established between the empty container 300 and the container 300 containing the solvent 400, then, the liquid level of the solvent 400 is pressurized by a machine such as a pressure pump, the solvent 400 is put into the empty container 300 under the pressure, thus, the functional film layer 210 gradually approaches the electrode layer 120 as the liquid level of the solvent 400 drops, and finally the two layers are bonded, the method has the advantages of convenient operation, high controllable degree and low cost, and the bonding precision of the functional film layer 210 and the electrode layer 120 is high because the operation is controllable.
Referring to fig. 2, in an embodiment, the step of attaching the functional film 210 includes:
s243, the substrate 100 is used to receive the independent functional film layer 210, and the electrode layer 120 is bonded to the functional film layer 210 (as shown in fig. 11 and 12).
After the supporting layer 220 is dissolved in the solvent 400, the functional film layer 210 is independent of the solvent 400 and floats on the liquid level of the solvent 400, and because the functional film layer 210 is attached to the electrode layer 120 at the bottom of the solvent 400, the distance between the functional film layer 210 and the electrode layer 120 needs to be shortened, because the functional film layer 210 is thin, it is inconvenient to directly operate the functional film layer, and the prepared substrate 100 including the electrode layer 120 has a firmer structure and is convenient to operate.
In an embodiment, in the step of removing the support layer 220, the support layer 220 is placed opposite to the electrode layer 120. When the functional film 210 is formed on the support layer 220, a pattern is formed on the functional film 210, and the desired pattern is formed in a direction toward the support layer 220, so that in order to prevent a pattern direction from being wrong after the functional film 210 is bonded to the electrode layer 120, in the present embodiment, in the step of removing the support layer 220, the support layer 220 is placed opposite to the electrode layer 120, so that after the support layer 220 is dissolved in the solvent 400, the functional film 210 floats on the liquid surface of the solvent 400 in the direction of the desired pattern until the functional film 210 is bonded to the electrode layer 120.
Referring to fig. 3, in an embodiment, the thickness d1 of the support layer 220 is smaller than the thickness d2 of the functional film 210. Considering that the support layer 220 is just for facilitating the fabrication of the functional film layer 210, in the process of attaching the functional film layer 210 to the electrode layer 120, the support layer 220 needs to be dissolved and removed, so that the thickness d1 of the support layer 220 is smaller than the thickness d2 of the functional film layer 210, so that when the dual-layer functional film 200 is fabricated, the time spent in fabricating the support layer 220 is relatively short, and the time spent in dissolving the thinner support layer 220 is also short, thereby increasing the rate of the whole fabrication process.
In one embodiment, the step of attaching the functional film 210 further includes drying the attached functional film 210 with an inert gas flow.
After the functional film layer 210 is attached to the electrode layer 120, the functional film layer 210 is further soaked with the solvent 400, for accelerating the whole preparation and completion, the attached functional film layer 210 needs to be dried quickly, functional patterns are provided on the functional film layer 210, the solvent 400 is usually an organic solvent 400, so that the oxidation reaction is generated in the drying process and the functional film layer 210 is affected, therefore, the inert gas airflow is utilized to dry the attached functional film layer 210 after the step of attaching the functional film layer 210, the inert gas chemical property is stable, the chemical reaction is not easy to occur, and the functional film layer 210 is not affected.
In one embodiment, the inert gas comprises nitrogen. The nitrogen has stable chemical property, convenient preparation and wide source, so the scheme utilizes the nitrogen airflow to blow and dry the attached functional film layer 210, has low cost and does not pollute the environment.
Referring to fig. 3, in an embodiment, the projection of the functional film layer 210 to the direction of the support layer 220 does not exceed the range of the support layer 220. For the whole double-layer functional film 200, the functional film layer 210 belongs to an actually required structural layer of the present solution, and the support layer 220 is only for conveniently manufacturing the functional film layer 210, so that the support layer 220 acts as a foundation plate for the functional film layer 210, and in order to reduce the difficulty of the process of manufacturing the functional film layer 210 on the support layer 220, the present solution provides that the projection of the functional film layer 210 to the direction of the support layer 220 does not exceed the range of the support layer 220, so that the contact surface of the support layer 220 and the functional film layer 210 is larger than the surface of the functional film layer 210, thereby reducing the difficulty of manufacturing the functional film layer 210.
In one embodiment, the solvent 400 includes deionized water 410; the deionized water 410 is prepared by reverse osmosis using ion exchange resin. Considering the environmental protection in the production process, the solvent 400 should be made of an environmental protection material, so the solvent 400 adopted in the scheme is the deionized water 410, because the deionized water 410 is environment-friendly, the capability of dissolving general alcohols is strong, and no pollution is generated after the dissolution; meanwhile, the deionized water 410 in the scheme is prepared by using the ion exchange resin and adopting a reverse osmosis method, the pollution generated in the process of producing the deionized water 410 by the method is small, the preparation automation degree is high, the cost is relatively low, and the raw material of the deionized water 410 is raw water, so that the source is wide and the cost is low.
In one embodiment, the material of the support layer 220 includes polyvinyl alcohol. Considering that the support layer 220 needs to be fixed when not being placed in the solvent 400, so as to prevent the preparation and movement of the functional film 210 from being affected by loosening and the like, the material of the support layer 220 needs to have certain viscosity, and therefore, the material of the support layer 220 in the present scheme is made of polyvinyl alcohol, because the polyvinyl alcohol has good viscosity and good water solubility, the preparation requirement of the support layer 220 is met, and the cost is low and the preparation is convenient.
As another embodiment of the present invention, referring to fig. 2, a method for manufacturing an electroluminescent device is disclosed, comprising the steps of:
s21, forming an electrode layer 120 on the surface of the substrate 110 (as shown in fig. 4);
s22, forming a functional film layer 210 on the support layer 220 of the functional film (as shown in fig. 3);
s23, placing the substrate 100 and the functional film 200 in a solvent 400 to remove the support layer 220 (as shown in fig. 7 to 12);
s242, transferring the solvent by the action of external pressure to attach the functional film layer to the electrode layer (as shown in fig. 9 and 10);
and S25, drying the attached functional film layer by using nitrogen airflow.
Firstly, depositing an electrode on a substrate 110, then placing the electrode on the bottom of a container 300 filled with a solvent 400, placing the prepared functional film 200 with a double-layer structure into the solvent 400, and after a supporting layer 220 in the functional film 200 is completely dissolved, only attaching the functional film 200 to an electrode layer 120 deposited on the substrate 110 in the solvent 400 environment, so that the high cost of film deposition by a dry method is avoided, the environment is not damaged, the type of the used solvent 400 can be controlled, the cost is reduced for manufacturers in production, and the danger control in actual production is facilitated; after the support layer 220 is dissolved in the solvent 400, the functional film layer 210 is separated from the solvent 400 and floats on the liquid surface of the solvent 400; in the scheme, the space between the functional film layer 210 and the electrode layer 120 at the bottom of the solvent 400 needs to be shortened by using the external pressure to transfer the solvent 400, only an empty container 300 needs to be prepared and a flow guide structure 310 is established between the empty container 300 and the container 300 filled with the solvent 400, then a machine such as a pressure pump is used for pressurizing the liquid level of the solvent 400, the solvent 400 enters the empty container 300 under the pressure, and the functional film layer 210 gradually approaches to the electrode layer 120 along with the descending of the liquid level of the solvent 400 and is finally attached to the electrode layer 120; after function rete 210 is attached to electrode layer 120, function rete 210 has still soaked solvent 400, for accelerating whole preparation and completion, need to weather the function rete 210 after attaching fast, consider that function pattern has on the function rete 210, solvent 400 is organic solvent 400 usually, so for preventing to weather the oxidation reaction appears in the process and produce the influence to function rete 210, consequently, this scheme utilizes the nitrogen gas air current to weather the function rete 210 after attaching behind the step of attaching function rete 210, because the chemical property of nitrogen gas is stable, the difficult chemical reaction that takes place, can not cause the influence to function rete 210.
As another embodiment of the present invention, referring to fig. 7 to 12, a manufacturing apparatus of an electroluminescent device is disclosed, which comprises a substrate preparing means for forming an electrode layer 120 on a surface of a substrate 110, a functional film preparing means for forming a functional film layer 210 on a support layer 220, a support layer peeling means for removing the support layer 220 by placing the substrate 100 and the functional film 200 in a solvent 400, and a functional film attaching means for attaching the functional film layer 210 to a surface of the electrode layer 120.
The substrate 100 preparation device comprises a cleaner and a roaster, wherein the cleaner comprises an ultrasonic cleaner, the roaster comprises an oven, the electrode layer 120 attached to the substrate 110 is firstly subjected to ultrasonic cleaning, and the substrate 100 is obtained after the electrode layer is placed in the oven after the electrode layer is cleaned; the preparation device of the functional film 200 comprises a coating and spraying machine, wherein the coating and spraying machine comprises a spin coater, and the support layer 220 and the functional film layer 210 are sequentially obtained through the spin coating action of the spin coater; the peeling device of the support layer 220 comprises a container 300 and a solvent 400, wherein the solvent 400 comprises deionized water 410, and the support layer 220 is dissolved in the deionized water 410 so as to realize peeling of the support layer 220; the functional film 210 attaching device includes a pressure device 500, a container 300, a flow guiding structure 310, a micro-manipulation system and a tool for moving the substrate, the solvent 400 in the container 300 is guided out through the flow guiding structure 310 by using the pressure device 500 or gravitational potential energy, and then the functional film 210 is attached to the electrode layer 120 by using the micro-manipulation system.
It should be noted that, the limitations of the steps involved in the present disclosure are not considered to limit the order of the steps without affecting the implementation of the specific embodiments, and the steps written in the foregoing may be executed first, or executed later, or even executed simultaneously, and as long as the present disclosure can be implemented, all should be considered to belong to the protection scope of the present disclosure.
The foregoing is a more detailed description of the invention in connection with specific alternative embodiments, and the practice of the invention should not be construed as limited to those descriptions. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (8)
1. A method for manufacturing an electroluminescent device, comprising the steps of:
forming an electrode layer on the surface of the substrate;
forming a functional film layer on the support layer of the functional film;
placing the substrate and the functional film in a solvent to remove the supporting layer; and
attaching the functional film layer to the surface of the electrode layer;
wherein the attaching the functional film layer to the surface of the electrode layer comprises the steps of: transferring the solvent by using the action of gravitational potential energy to ensure that the functional film layer is attached to the electrode layer.
2. The method of claim 1, wherein the step of attaching the functional film layer to the surface of the electrode layer comprises the steps of: and moving the substrate to align with the functional film layer, so that the electrode layer is attached to the functional film layer.
3. The method of claim 1, wherein the step of removing the support layer by placing the substrate and the functional film in a solvent comprises placing the support layer opposite to the electrode layer.
4. The method of claim 1, wherein the functional film layer has a thickness greater than that of the support layer.
5. The method of claim 1, further comprising the step of, after said attaching the functional film layer to the surface of the electrode layer: and blowing the attached functional film layer by inert gas flow.
6. The method of claim 1, wherein the projection of the functional film layer to the direction of the support layer does not exceed the range of the support layer.
7. A method for manufacturing an electroluminescent device, comprising the steps of:
forming an electrode layer on the surface of the substrate;
forming a functional film layer on the support layer of the functional film;
placing the substrate and the functional film in a solvent to remove the supporting layer;
transferring the solvent by using the action of external pressure to ensure that the functional film layer is attached to the electrode layer; and
and drying the attached functional film layer by using nitrogen airflow.
8. An apparatus for manufacturing an electroluminescent device, comprising:
a substrate preparation device for forming an electrode layer on a substrate surface of a substrate;
a functional film preparation device for forming a functional film layer on the support layer of the functional film;
the supporting layer stripping device is used for placing the substrate and the functional film in a solvent to remove the supporting layer; and
the functional film layer attaching device is used for attaching the functional film layer to the surface of the electrode layer;
when the functional film layer is attached to the surface of the electrode layer, the solvent is transferred under the action of gravitational potential energy or external pressure, so that the functional film layer is attached to the electrode layer.
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| CN201811579684.XA CN109742263B (en) | 2018-12-24 | 2018-12-24 | Preparation method and preparation equipment of electroluminescent device |
| PCT/CN2019/123237 WO2020134940A1 (en) | 2018-12-24 | 2019-12-05 | Preparation method and manufacturing device for electroluminescent device |
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| CN201811579684.XA CN109742263B (en) | 2018-12-24 | 2018-12-24 | Preparation method and preparation equipment of electroluminescent device |
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| US20170053908A1 (en) * | 2014-12-18 | 2017-02-23 | Edico Genome, Corp. | Graphene fet devices, systems, and methods of using the same for sequencing nucleic acids |
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| CN105304832B (en) * | 2015-11-02 | 2017-07-25 | 深圳市华星光电技术有限公司 | The preparation method of electroluminescent device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20170053908A1 (en) * | 2014-12-18 | 2017-02-23 | Edico Genome, Corp. | Graphene fet devices, systems, and methods of using the same for sequencing nucleic acids |
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| WO2020134940A1 (en) | 2020-07-02 |
| CN109742263A (en) | 2019-05-10 |
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