CN109742263A - A kind of preparation method and making apparatus of electroluminescent device - Google Patents
A kind of preparation method and making apparatus of electroluminescent device Download PDFInfo
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- CN109742263A CN109742263A CN201811579684.XA CN201811579684A CN109742263A CN 109742263 A CN109742263 A CN 109742263A CN 201811579684 A CN201811579684 A CN 201811579684A CN 109742263 A CN109742263 A CN 109742263A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 41
- 239000002904 solvent Substances 0.000 claims abstract description 83
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 239000012528 membrane Substances 0.000 claims abstract description 39
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 11
- 239000011261 inert gas Substances 0.000 claims description 6
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 25
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 238000000151 deposition Methods 0.000 abstract description 7
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- 239000008367 deionised water Substances 0.000 description 11
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- 238000010586 diagram Methods 0.000 description 11
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- 238000001035 drying Methods 0.000 description 6
- 239000004372 Polyvinyl alcohol Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
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- 239000003795 chemical substances by application Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
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- 229920003303 ion-exchange polymer Polymers 0.000 description 2
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
The invention discloses a kind of preparation method of electroluminescent device and making apparatus, the preparation method includes: the substrate surface formation electrode layer in substrate；Functional film layer is formed on the supporting layer of functional membrane；Substrate and functional membrane placement are removed into supporting layer in a solvent；Functional film layer is attached into electrode layer surface.It first will be on electrode deposition to substrate, it is then placed in the bottom in the container equipped with solvent, the functional membrane with double-layer structure that preparation is completed is put into solvent, after supporting layer in standby function film is completely dissolved, only need in solvent environment, functional membrane is bonded with the electrode layer deposited on substrate, avoid the high cost using dry method depositional coating, it will not also be to environmental concerns, and it can control the type of solvent used, also the reduction of cost can be brought to manufacturer in production, and be more advantageous to the dangerous control in actual production.
Description
Technical field
The present invention relates to field of display technology more particularly to the preparation methods and making apparatus of a kind of electroluminescent device.
Background technique
Electroluminescent device is a kind of electronic device for converting electrical energy into luminous energy, typical structure be usually on substrate according to
Secondary setting transparent anode, luminescent layer and cathode.But such structure luminous efficiency is usually lower, and cut-in voltage is again higher.For
These problems are solved, various other functional film layers, such as electricity in the prior art would generally be added between electrode and luminescent layer
Pole surface decorative layer, carrier injection layer, carrier blocking layers, barrier layer and buffer layer etc..
When making each functional film layer, stock utilization is low, causes cost high.
Summary of the invention
Technical problem to be solved by the invention is to provide the preparation methods and system of a kind of electroluminescent device at low cost
Make equipment.
To achieve the above object, the present invention provides a kind of preparation methods of electroluminescent device, comprising steps of
Electrode layer is formed in the substrate surface of substrate；
Functional film layer is formed on the supporting layer of functional membrane；
Substrate and functional membrane placement are removed into supporting layer in a solvent；And
Functional film layer is attached into electrode layer surface.
Optionally, described that functional film layer is attached into electrode layer surface comprising steps of the effect using gravitional force will be molten
The method of agent transfer, is bonded the functional film layer with the electrode layer.
Optionally, described that functional film layer is attached into electrode layer surface comprising steps of the effect using impressed pressure will be molten
The method of agent transfer, is bonded the functional film layer with the electrode layer.
Optionally, described that functional film layer is attached into electrode layer surface comprising steps of going to accept using the substrate independent
The functional film layer, be bonded the electrode layer with the functional film layer.
Optionally, removed in supporting layer in a solvent in described place substrate and functional membrane, the supporting layer with it is described
Electrode layer is staggered relatively.
Optionally, the thickness of the functional film layer is greater than the thickness of the supporting layer.
Optionally, it is described functional film layer is attached into electrode layer surface after further comprise the steps of: and utilize inert gas flow
By the functional film layer drying after the attaching.
Optionally, the functional film layer is no more than the supporting layer range to the projection in the direction of the supporting layer.
The invention also discloses a kind of preparation methods of electroluminescent device, comprising steps of
Electrode layer is formed in the substrate surface of substrate；
Functional film layer is formed on the supporting layer of functional membrane；
Substrate and functional membrane placement are removed into supporting layer in a solvent；
The method that solvent is shifted in the effect of impressed pressure is bonded the functional film layer with the electrode layer；And
The functional film layer after the attaching is dried up using stream of nitrogen gas.
The invention also discloses a kind of making apparatus of electroluminescent device, comprising: substrate preparation facilities, in substrate
Substrate surface formed electrode layer；Function membrane preparation device, for forming functional film layer on the supporting layer of functional membrane；Supporting layer
Stripping off device, for substrate and functional membrane placement to be removed supporting layer in a solvent；And functional film layer adhering device, being used for will
Functional film layer attaches to electrode layer surface.
For the scheme of the dry process of functional membrane, the present invention first by electrode deposition to substrate, is then placed in
The functional membrane with double-layer structure that preparation is completed is put into solvent, in standby function film by the bottom in the container equipped with solvent
Supporting layer be completely dissolved after, it is only necessary in solvent environment, functional membrane is bonded i.e. with the electrode layer deposited on substrate
Can, avoid the high cost using dry method deposition film, while will not be to environmental concerns, and can control used molten
The type of agent also can bring the reduction of cost to manufacturer in production, and be more advantageous to the dangerous control in actual production.
Detailed description of the invention
Included attached drawing is used to provide to be further understood from the embodiment of the present invention, and which constitute one of specification
Point, for illustrating embodiments of the present invention, and come together to illustrate the principle of the present invention with verbal description.Under it should be evident that
Attached drawing in the description of face is only some embodiments of the present invention, for those of ordinary skill in the art, is not paying wound
Under the premise of the property made is laborious, it is also possible to obtain other drawings based on these drawings.In the accompanying drawings:
Fig. 1 is a kind of schematic diagram of the rough process of the preparation method of electroluminescent device of the embodiment of the present invention；
Fig. 2 is a kind of signal of process of the preparation method of electroluminescent device of the embodiment of the present invention comprising plurality of optional
Figure；
Fig. 3 is a kind of schematic diagram of the functional membrane of bilayer film of the embodiment of the present invention；
Fig. 4 is the schematic diagram that a kind of electrode layer of the embodiment of the present invention deposits on substrate；
Fig. 5 is a kind of schematic diagram of the dissolved functional membrane of supporting layer of the embodiment of the present invention；
Fig. 6 is the schematic diagram that a kind of functional film layer of the embodiment of the present invention is bonded with electrode layer；
Fig. 7 is a kind of schematic diagram of gravitional force drainage of the embodiment of the present invention；
Fig. 8 is the schematic diagram after a kind of gravitional force discharge solvent of the embodiment of the present invention；
Fig. 9 is a kind of schematic diagram of impressed pressure drainage of the embodiment of the present invention；
Figure 10 is the schematic diagram after a kind of impressed pressure discharge solvent of the embodiment of the present invention；
Figure 11 is a kind of schematic diagram made before electrode layer active joint function film layer of the embodiment of the present invention；
Figure 12 is a kind of schematic diagram made after electrode layer active joint function film layer of the embodiment of the present invention.
Wherein, 100, substrate；110, substrate；120, electrode layer；200, functional membrane；210, functional film layer；220, supporting layer；
300, container；310, flow-guiding structure；400, solvent；410, deionized water；500, pressure device.
Specific embodiment
Specific structure and function details disclosed herein are only representative, and are for describing the present invention show
The purpose of example property embodiment.But the present invention can be implemented by many alternative forms, and be not interpreted as
It is limited only by the embodiments set forth herein.
In the description of the present invention, it is to be understood that, the orientation or position of the instructions such as term " on ", "lower", "horizontal"
Relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present invention and simplification of the description, without referring to
Show or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot manage
Solution is limitation of the present invention.In addition, term " includes " and its any deformation, it is intended that cover and non-exclusive include.For
For those skilled in the art, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
Term used herein above is not intended to limit exemplary embodiment just for the sake of description specific embodiment.Also answer
When understanding, term " includes " used herein above provides depositing for stated feature, step, operation, unit and/or component
, and do not preclude the presence or addition of other one or more features, step, operation, component and/or combination thereof.
The present invention provides a kind of preparation method of functional membrane in novel electroluminescent device, the key point of this method has
Two；One is the structure for preparing a bilayer film, and lower film is as supporting layer, while the layer as sacrifice, topmost thin film
As functional membrane needed for electroluminescent device (carrier injection layer and carrier blocking layers etc.)；This sacrifice layer can be
Polyvinyl alcohol or it is other can be sacrificial by the substance of deionized water dissolving, so after the structure of this bilayer film is dipped in water
The layer of domestic animal will be dissolved, and functional film layer thereon will be detached from substrate.Secondly being to be used after functional film layer is detached from substrate
The structure comprising anode (cathode) or other functional film layers has been prepared to go to accept the process of independent functional film layer.
Below with reference to the accompanying drawings the invention will be further described with optional embodiment.
Refering to what is shown in Fig. 1, the preparation method that the embodiment of the present invention discloses a kind of electroluminescent device includes:
S11, electrode layer 120 (as shown in Figure 3) is formed on 110 surface of substrate of substrate；
S12, functional film layer 210 (as shown in Figure 3) is formed on the supporting layer 220 of functional membrane；
S13, by substrate 100 and functional membrane 200 be placed in solvent 400 remove supporting layer 220 (such as Fig. 7 to Figure 12 institute
Show)；
S14, functional film layer 210 is attached to 120 surface of electrode layer (as shown in Fig. 7 to Figure 12).
First electrode layer 120 is deposited on substrate 110, is then placed in the bottom in the container 300 equipped with solvent 400, it will
The functional membrane 200 with double-layer structure that preparation is completed is put into solvent 400, and the supporting layer 220 in standby function film 200 is completely molten
Xie Hou, it is only necessary in 400 environment of solvent, functional membrane 200 is bonded with the electrode layer 120 deposited on substrate 110,
The high cost using dry method deposition film is avoided, will not also be to environmental concerns, and can control solvent 400 used
Type, also the reduction of cost can be brought to manufacturer in production, and be more advantageous to the dangerous control in actual production.
Wherein, there is no sequencing between S11 and S12, be that functional film layer 210 is being attached into 120 surface of electrode layer
The preparation in preparation process before.
With reference to Fig. 2, in one embodiment, attach functional film layer 210 the step of include:
S241, the method for being shifted solvent 400 using the effect of gravitional force, make functional film layer 210 with solvent 400
Liquid level declines and is gradually bonded (as shown in Figure 7 and Figure 8) with electrode layer 120.
After supporting layer 220 is dissolved in solvent 400, functional film layer 210 swims in solvent independently of in solvent 400
On 400 liquid levels, because be bonded functional film layer 210 with the electrode layer 120 for being located at 400 bottom of solvent, then just needing to shorten
The spacing of the two, this programme pass through the effect method that shifts solvent 400 using gravitional force, it is only necessary to prepare one it is empty
Container 300 simultaneously places it in 300 lower section of container equipped with solvent 400, establishes the flow-guiding structure 310 between container 300, solvent
400 can automatically flow under gravity in empty container 300, such functional film layer 210 with solvent 400 liquid level decline and
It is gradually close with electrode layer 120, and be finally bonded the two, this method is at low cost, and it is easy to operate, and controllable degree is high, because
It is controllable to operate, so the Anawgy accuracy of functional film layer 210 and electrode layer 120 is high.
With reference to Fig. 2, in one embodiment, attach functional film layer 210 the step of include:
S242, the method for being shifted solvent 400 using the effect of impressed pressure, make functional film layer 210 with solvent 400
Liquid level declines and is gradually bonded (as shown in Figure 9 and Figure 10) with electrode layer 120.
After supporting layer 220 is dissolved in solvent 400, functional film layer 210 swims in solvent independently of in solvent 400
On 400 liquid levels, because be bonded functional film layer 210 with the electrode layer 120 for being located at 400 bottom of solvent, then just needing to shorten
The spacing of the two, this programme pass through the effect method that shifts solvent 400 using impressed pressure, it is only necessary to prepare one it is empty
It is simultaneously established flow-guiding structure 310 between the container 300 equipped with solvent 400 by container 300, then utilizes the machines pair such as pressure pump
400 Liquid Level Pressure of solvent, solvent 400 can enter in empty container 300 under the action of pressure, and such functional film layer 210 is with solvent
400 liquid level decline and it is gradually close with electrode layer 120, and finally the two is bonded, this method is easy to operate, controllable degree
Height, and it is at low cost, it is because operation is controllable, the Anawgy accuracy of functional film layer 210 and electrode layer 120 is high.
With reference to Fig. 2, in one embodiment, attach functional film layer 210 the step of include:
S243, it goes to accept independent functional film layer 210 using substrate 100, is bonded electrode layer 120 with functional film layer 210
(as is illustrated by figs. 11 and 12).
After supporting layer 220 is dissolved in solvent 400, functional film layer 210 swims in solvent independently of in solvent 400
On 400 liquid levels, because be bonded functional film layer 210 with the electrode layer 120 for being located at 400 bottom of solvent, then just needing to shorten
The spacing of the two, because functional film layer 210 is relatively thin, it has not been convenient to directly operate on it, and what is prepared contains electrode
The structure of the substrate 100 of layer 120 is more solid, operates on it more convenient, and therefore, this programme is by by 400 bottom of solvent
100 whereabouts functional film layer of substrate, 210 direction containing electrode layer 120 prepared it is mobile, then finally the two is pasted
It closes, this method is easy to operate, and controllable degree is high, and it is at low cost, because operation is controllable, by functional film layer 210 and electrode layer 120
Anawgy accuracy it is high.
In one embodiment, in the step of removing supporting layer 220, supporting layer 220 and electrode layer 120 are staggered relatively.?
When making functional film layer 210 on supporting layer 220, relational pattern can be made in functional film layer 210, the pattern needed for this is court
It is made to the direction of supporting layer 220, so, for pattern direction mistake after preventing functional film layer 210 to be bonded with electrode layer 120,
This programme keeps supporting layer 220 and electrode layer 120 staggered relatively in the step of removing supporting layer 220, and such supporting layer 220 is molten
For solution after solvent 400, functional film layer 210 is that 400 liquid level of solvent is floated on the direction of required pattern, until with electrode layer 120
Complete fitting.
With reference to Fig. 3, in one embodiment, the thickness d 1 of supporting layer 220 is less than the thickness d 2 of functional film layer 210.It considers
Supporting layer 220 is exactly to make functional film layer 210 for convenience, and functional film layer 210 is being bonded preparation process with electrode layer 120
In, supporting layer 220, which needs to be dissolved, to be removed, and therefore, this programme makes the thickness d 1 of supporting layer 220 less than the thickness of functional film layer 210
D2 is spent, in this way in double-deck functional membrane 200 of preparation, spends branch relatively short in the time for preparing supporting layer 220 and relatively thin
The time for supportting the dissolution of layer 220 is also shorter, improves the rate of whole preparation process.
It in one embodiment, further include after being attached using inert gas flow after the step of attaching functional film layer 210
Functional film layer 210 dry up.
After functional film layer 210 attaches on electrode layer 120, functional film layer 210 is also soaked with solvent 400, entire to accelerate
It prepares and completes, need quickly to dry up the functional film layer 210 after attaching, it is contemplated that there is functional pattern in functional film layer 210,
Solvent 400 is usually organic solvent 400, then generating shadow to functional film layer 210 to prevent drying process from oxidation reaction occur
It rings, therefore, this programme utilizes inert gas flow by the functional film layer 210 after attaching after the step of attaching functional film layer 210
Drying is not susceptible to chemically react, will not impact to functional film layer 210 because inert gas chemical property is stablized.
In one embodiment, inert gas includes nitrogen.Nitrogen chemical property is stablized, and prepares conveniently, from a wealth of sources, because
This, this programme is dried up the functional film layer 210 after attaching using stream of nitrogen gas, and it is at low cost, and no pollution to the environment.
With reference to Fig. 3, in one embodiment, functional film layer 210 is no more than supporting layer to the projection in the direction of supporting layer 220
220 ranges.For the entire double-deck functional membrane 200, functional film layer 210 belongs to the actual needs structure sheaf of this programme, and
Supporting layer 220 is intended merely to facilitate production functional film layer 210, and therefore, supporting layer 220 is equivalent to for functional film layer 210
Play a base plate, then functional film layer 210 is fabricated into this process difficulty on supporting layer 220 to reduce, this
Scheme regulation, makes functional film layer 210 be no more than 220 range of supporting layer, such supporting layer to the projection in the direction of supporting layer 220
220 are greater than the face of functional film layer 210 with 210 contact surface of functional film layer, to reduce the manufacture difficulty of functional film layer 210.
In one embodiment, solvent 400 includes deionized water 410；Deionized water 410 is using ion exchange resin using anti-
The method of infiltration is produced.In view of wanting environmental protection in production process, then solvent 400 itself should select environment-friendly materials to be made, therefore,
The solvent 400 that this programme uses is deionized water 410, because deionized water 410 is environmentally friendly, dissolves the ability of general alcohols
By force, and it is still pollution-free after dissolution；The deionized water 410 in this programme uses reverse osmosis side using ion exchange resin simultaneously
Method is produced, and the pollution generated during the method production deionized water 410 is small, and prepares high degree of automation, and cost is opposite
It is lower, and the raw material of deionized water 410 is raw water, it is from a wealth of sources, it is at low cost.
In one embodiment, the material of supporting layer 220 includes polyvinyl alcohol.In view of supporting layer 220 be not put into solvent
It needs to guarantee fixed state when in 400, in order to avoid the preparation and movement of functional film layer 210 are influenced because loosely waiting, then just needing
The material of supporting layer 220 has certain viscosity, and therefore, the 220 material use polyvinyl alcohol of supporting layer of this programme is made, because
Polyvinyl alcohol has preferable viscosity, while good water solubility, meets the preparation requirement of supporting layer 220, and at low cost, preparation side
Just.
As another embodiment of the present invention, refering to what is shown in Fig. 2, a kind of preparation method of electroluminescent device is disclosed,
Comprising steps of
S21, electrode layer 120 (as shown in Figure 3) is formed on 110 surface of substrate of substrate；
S22, functional film layer 210 (as shown in Figure 3) is formed on the supporting layer 220 of functional membrane；
S23, by substrate 100 and functional membrane 200 be placed in solvent 400 remove supporting layer 220 (such as Fig. 7 to Figure 12 institute
Show)；
S242, solvent is shifted using the effect of impressed pressure, is bonded the functional film layer with the electrode layer (as schemed
Shown in 9 and Figure 10)；
S25, the functional film layer after the attaching is dried up using stream of nitrogen gas.
The bottom on electrode deposition to substrate 110, being first then placed in the container 300 equipped with solvent 400, will prepare
At the functional membrane 200 with double-layer structure be put into solvent 400, after the supporting layer 220 in standby function film 200 is completely dissolved,
It only needs in 400 environment of solvent, functional membrane 200 is bonded with the electrode layer 120 deposited on substrate 110, is avoided
, will not also be to environmental concerns using the high cost of dry method deposition film, and can control the kind of solvent 400 used
Class also can bring the reduction of cost to manufacturer in production, and be more advantageous to the dangerous control in actual production；Supporting layer
After 220 are dissolved in solvent 400, functional film layer 210 is swum on 400 liquid level of solvent independently of in solvent 400；Because
It is bonded functional film layer 210 with the electrode layer 120 for being located at 400 bottom of solvent, then just need to shorten the spacing of the two, we
Case passes through the effect method that shifts solvent 400 using impressed pressure, it is only necessary to prepare an empty container 300 and by its with
Flow-guiding structure 310 is established between container 300 equipped with solvent 400, then 400 liquid level of solvent is added using machines such as pressure pumps
Pressure, solvent 400 can enter in empty container 300 under the action of pressure, and such functional film layer 210 declines with the liquid level of solvent 400
And it is gradually close with electrode layer 120, and be finally bonded the two, this method is easy to operate, and controllable degree is high, and at low cost,
It is because operation is controllable, the Anawgy accuracy of functional film layer 210 and electrode layer 120 is high；Electrode is attached in functional film layer 210
After on layer 120, functional film layer 210 is also soaked with solvent 400, to accelerate entirely to prepare and complete, needs the function after attaching quickly
Energy film layer 210 dries up, it is contemplated that there is functional pattern in functional film layer 210, solvent 400 is usually organic solvent 400, then for
Prevent drying process from oxidation reaction occur and having an impact to functional film layer 210, therefore, this programme is attaching functional film layer 210
The step of after the functional film layer 210 after attaching is dried up using stream of nitrogen gas because the chemical property of nitrogen is stablized, be not susceptible to
Chemical reaction, will not impact functional film layer 210.
As another embodiment of the present invention, with reference to shown in Fig. 7 to Figure 12, a kind of production of electroluminescent device is disclosed
Equipment, including the substrate preparation facilities for forming electrode layer 120 on 110 surface of substrate, for forming function on supporting layer 220
The function membrane preparation device of energy film layer 210 is used to for substrate 100 and functional membrane 200 to be placed on removal supporting layer 220 in solvent 400
Supporting layer stripping off device, and for functional film layer 210 to be attached to 120 function of surface film layer adhering device of electrode layer.
100 preparation facilities of substrate includes washer and roaster, and washer includes ultrasonic cleaner, and roaster includes drying
Case will first be attached to the electrode layer on substrate 110 120 and carry out ultrasonic cleaning, baking oven is put into after cleaning and obtains substrate 100；Function
Energy 200 preparation facilities of film includes applying spraying machine, and applying spraying machine includes sol evenning machine, and supporting layer 220 and functional film layer 210 are passed through sol evenning machine
Spin coating movement successively obtain；220 stripping off device of supporting layer includes container 300 and solvent 400, and solvent 400 includes deionized water
410, supporting layer 220 is dissolved in deionized water 410 to realize the removing of supporting layer 220；210 adhering device of functional film layer includes pressure
Power device 500, container 300, flow-guiding structure 310, micromanipulation system and the tool for moving substrate, using pressure device 500 or
Gravitional force exports the solvent 400 in container 300 by flow-guiding structure 310, then makes function using micromanipulation system
Film layer 210 and electrode layer 120 attach.
It should be noted that the restriction for each step being related in this programme, in the premise for not influencing concrete scheme implementation
Under, it does not regard as being can be the step of making restriction to step sequencing, write on front what is first carried out, be also possible to
It executes, is possibly even performed simultaneously afterwards, as long as this programme can be implemented, all shall be regarded as belonging to protection model of the invention
It encloses.
The above content is combine specific optional embodiment further detailed description of the invention, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (10)
1. a kind of preparation method of electroluminescent device, which is characterized in that comprising steps of
Electrode layer is formed in the substrate surface of substrate；
Functional film layer is formed on the supporting layer of functional membrane；
Substrate and functional membrane placement are removed into supporting layer in a solvent；And
Functional film layer is attached into electrode layer surface.
2. a kind of preparation method of electroluminescent device as described in claim 1, which is characterized in that described to paste functional film layer
Electrode layer surface is attached to comprising steps of the solvent is shifted in the effect using gravitional force, make the functional film layer with it is described
Electrode layer fitting.
3. a kind of preparation method of electroluminescent device as described in claim 1, which is characterized in that described to paste functional film layer
Electrode layer surface is attached to comprising steps of solvent is shifted in the effect using impressed pressure, makes the functional film layer and the electrode
Layer fitting.
4. a kind of preparation method of electroluminescent device as described in claim 1, which is characterized in that described to paste functional film layer
Electrode layer surface is attached to comprising steps of the mobile substrate and functional film layer contraposition, make the electrode layer and the function
Film layer fitting.
5. a kind of preparation method of electroluminescent device as described in claim 1, which is characterized in that described by substrate and function
Energy film is placed to be removed in supporting layer in a solvent, and the supporting layer and the electrode layer are staggered relatively.
6. a kind of preparation method of electroluminescent device as described in claim 1, which is characterized in that the thickness of the functional film layer
Degree is greater than the thickness of the supporting layer.
7. a kind of preparation method of electroluminescent device as described in claim 1, which is characterized in that described by functional film layer
It attaches to after electrode layer surface to further comprise the steps of: and is dried up the functional film layer after the attaching using inert gas flow.
8. a kind of preparation method of electroluminescent device as described in claim 1, which is characterized in that the functional film layer is to institute
The projection for stating the direction of supporting layer is no more than the supporting layer range.
9. a kind of preparation method of electroluminescent device, which is characterized in that comprising steps of
Electrode layer is formed in the substrate surface of substrate；
Functional film layer is formed on the supporting layer of functional membrane；
Substrate and functional membrane placement are removed into supporting layer in a solvent；
Solvent is shifted using the effect of impressed pressure, is bonded the functional film layer with the electrode layer；And
The functional film layer after the attaching is dried up using stream of nitrogen gas.
10. a kind of making apparatus of electroluminescent device characterized by comprising
Substrate preparation facilities forms electrode layer for the substrate surface in substrate；
Function membrane preparation device, for forming functional film layer on the supporting layer of functional membrane；
Supporting layer stripping off device, for substrate and functional membrane placement to be removed supporting layer in a solvent；And
Functional film layer adhering device, for functional film layer to be attached to electrode layer surface.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811579684.XA CN109742263B (en) | 2018-12-24 | 2018-12-24 | Preparation method and preparation equipment of electroluminescent device |
| PCT/CN2019/123237 WO2020134940A1 (en) | 2018-12-24 | 2019-12-05 | Preparation method and manufacturing device for electroluminescent device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| WO2020134940A1 (en) * | 2018-12-24 | 2020-07-02 | 惠科股份有限公司 | Preparation method and manufacturing device for electroluminescent device |
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| CN105304832A (en) * | 2015-11-02 | 2016-02-03 | 深圳市华星光电技术有限公司 | Method for preparing electroluminescent device |
| CN106098938A (en) * | 2015-04-30 | 2016-11-09 | 三星显示有限公司 | Flexible organic light emitting diode display and manufacture method thereof |
| US20170053908A1 (en) * | 2014-12-18 | 2017-02-23 | Edico Genome, Corp. | Graphene fet devices, systems, and methods of using the same for sequencing nucleic acids |
| CN108417710A (en) * | 2018-04-17 | 2018-08-17 | 中国科学院宁波材料技术与工程研究所 | A kind of preparation method of flexible device |
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| CN109742263B (en) * | 2018-12-24 | 2020-11-24 | 惠科股份有限公司 | Preparation method and preparation equipment of electroluminescent device |
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| US20170053908A1 (en) * | 2014-12-18 | 2017-02-23 | Edico Genome, Corp. | Graphene fet devices, systems, and methods of using the same for sequencing nucleic acids |
| CN106098938A (en) * | 2015-04-30 | 2016-11-09 | 三星显示有限公司 | Flexible organic light emitting diode display and manufacture method thereof |
| CN105304832A (en) * | 2015-11-02 | 2016-02-03 | 深圳市华星光电技术有限公司 | Method for preparing electroluminescent device |
| CN108417710A (en) * | 2018-04-17 | 2018-08-17 | 中国科学院宁波材料技术与工程研究所 | A kind of preparation method of flexible device |
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| WO2020134940A1 (en) * | 2018-12-24 | 2020-07-02 | 惠科股份有限公司 | Preparation method and manufacturing device for electroluminescent device |
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