CN109739032A - Liquid crystal check machine and its detection method in a kind of smooth orientation back box - Google Patents
Liquid crystal check machine and its detection method in a kind of smooth orientation back box Download PDFInfo
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- CN109739032A CN109739032A CN201910067765.XA CN201910067765A CN109739032A CN 109739032 A CN109739032 A CN 109739032A CN 201910067765 A CN201910067765 A CN 201910067765A CN 109739032 A CN109739032 A CN 109739032A
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Abstract
The invention discloses liquid crystal check machine in a kind of smooth orientation back box, the check machine includes: detection board, line scan camera, microscope camera, light source, transmission device and detection computer.The mode that the present invention cooperates by using line scan camera with microscope camera, line scan camera carries out scanning comprehensively to substrate to be detected and takes phase, it detects computer and processing image is calculated by grayscale, to be detected to the exception on substrate, microscope camera carries out microcosmic detection to abnormal area, therefore the Macroscopic Anomalies such as the microcosmic exception of substrate and dim spot can be detected, liquid crystal check machine is improved in orientation back box to the exception for being not fixed point and the Detection capability of substrate Macroscopic Anomalies, the time that liquid crystal in light orientation back box checks machine check substrate disorder is also shortened simultaneously, guarantee also to substantially increase production efficiency while product yield.
Description
Technical field
The present invention relates to liquid crystal check machine and its detection sides in field of semiconductor manufacture more particularly to a kind of smooth orientation back box
Method.
Background technique
The working principle of liquid crystal display are as follows: change the deflection angle of liquid crystal molecule by changing the voltage being applied on liquid crystal
Degree, so that polarised light direction of rotation and polarization state are controlled, to realize that liquid crystal display shows the change of state.Usual liquid crystal point
Son arrangement be randomly oriented and be distributed be it is rambling, in order to enable liquid crystal molecule to arrange along a direction, need pair
At least one progress orientation of color membrane substrates and array substrate in crystal liquid substrate.Alignment method is in color membrane substrates and battle array
Column substrate forms both alignment layers towards the side of liquid crystal and carries out orientation process, so that both alignment layers act on liquid crystal molecule, to make
Liquid crystal molecule regular can arrange, and then can control liquid crystal molecule after applying voltage in array substrate and color membrane substrates
Rotate predetermined angle.
Relative to traditional friction matching, light orientation has many advantages, such as that low pollution, controllability are high by liquid crystal display because of it
The extensive concern of manufacturer.In order to judge whether alignment film meets the requirements, need using liquid crystal check machine in light orientation back box
Substrate is detected.Liquid crystal check machine is to make base by applying setting voltage to orientation metacoxal plate in the back box of light orientation at present
Plate is lighted, and ccd image sensor (Charge Coupled Device, CCD) is moved to according to the position of setting
Operating point carries out shooting and obtains with influence backward, then compares with the influence pre-established inside board, to judge
It is whether qualified.It is inspected by random samples since fixed point can only be arranged in CCD, the regional orientation for being not fixed position can not be detectd extremely
It surveys and sampling observation, according to microscope CCD, then can only observe microcosmic scene, the sand-like dim spot of macroscopic view can not be detected, caused pair
It is very low in the inspection working efficiency of liquid crystal display panel, while cannot guarantee that the yields of production, increase the cost of production.
In conclusion in existing smooth orientation back box liquid crystal check machine it is abnormal for the regional orientation for being not fixed point and
Macroscopic Anomalies can not be detected.Therefore, it is necessary to liquid crystal check machine and its detection method are provided in a kind of smooth orientation back box to improve this
One defect.
Summary of the invention
The present invention provides liquid crystal check machine and its detection method in a kind of smooth orientation back box, for solving existing light with backward
The problem of liquid crystal check machine can not detect the regional orientation exception and Macroscopic Anomalies that are not fixed point in box.
The present invention provides liquid crystal check machine in a kind of smooth orientation back box, and the check machine includes:
Board is detected, for transmitting and fixing substrate to be detected;
Line scan camera takes phase for being scanned to the substrate;
Microscope camera carries out micro examination for the abnormal area to the substrate;
Light source, the light that the light source issues are irradiated on the substrate, sweep convenient for the microscope camera and the line
It retouches camera and takes phase;
Transmission device, for fixing and controlling the movement of the microscope camera and the line scan camera;
Computer is detected, the image obtained to the microscope camera and the line scan camera is handled, and with
The image that the detection computer-internal pre-establishes compares, and detection is abnormal.
According to one preferred embodiment of the present invention, the detection board is equipped with the first sliding rail and fixed platform,
The substrate is placed in the fixed platform, and the fixed platform is moved along first sliding rail, by the base
Plate is transported to the detection zone of the detection board.
According to one preferred embodiment of the present invention, the transmission device includes: at least three sliding blocks, at least three camera supports
And asynchronous machine, the camera support are equipped with the second sliding rail, the sliding block is moved along second slide direction.
According to one preferred embodiment of the present invention, the line scan camera and the microscope camera are each attached to the cunning
On block,
According to one preferred embodiment of the present invention, liquid crystal check machine includes at least two groups line scanning phase in the smooth orientation back box
Machine.
According to one preferred embodiment of the present invention, it is rectangle that the line scan camera, which takes phase range, is powered in the substrate
Afterwards, the line scan camera is scanned along the rectangle short side direction and takes phase, second slide direction with it is described rectangular
Shape short side direction is identical.
According to one preferred embodiment of the present invention, the camera support is equipped with elevation and subsidence regulating device, sweeps for adjusting the line
The height of camera and the microscope camera is retouched, to adapt to the substrate of different size, and adjusts suitable resolution ratio.
According to one preferred embodiment of the present invention, the light source is linear light sorurce, and the light source scans phase with the line
The scanning direction of machine is parallel.
According to one preferred embodiment of the present invention, the linear light sorurce is equipped with angle adjustment mechanism, shines the linear light sorurce
Position is penetrated to be overlapped with the scan position of the line scan camera and the microscope camera.
The present invention provides liquid crystal detection method in a kind of smooth orientation back box, and the method includes at least:
Step S10: substrate to be detected is connect with liquid crystal check machine in light orientation back box, and substrate is powered;
Step S20: after the check machine detects that substrate is powered, line scan camera is moved to be scanned along slide direction and be taken
Phase;
Step S30: detection computer calculates processing image by grayscale, examines to the abnormal area on the substrate
Out;
Step S40: microscope camera carries out micro examination to the abnormal area.
Beneficial effects of the present invention: the mode that the present invention cooperates by using line scan camera with microscope camera, line are swept
Retouching camera, scanning takes phase comprehensively to substrate to be detected progress, and detection computer is calculated by grayscale and handles image, thus to substrate
On exception detected, microscope camera carries out microcosmic detection, therefore the microcosmic exception and dim spot of substrate to abnormal area
Equal Macroscopic Anomalies can be detected, and it is macroscopical to the exception and substrate that are not fixed point to improve liquid crystal check machine in orientation back box
Abnormal Detection capability, while the time that liquid crystal in orientation back box checks machine check substrate disorder is also shortened, guarantee that product is good
Production efficiency is also substantially increased while product rate.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of embodiment or technical solution in the prior art
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only some of invention
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the structural schematic diagram of liquid crystal check machine in smooth orientation back box provided by the invention;
Fig. 2 is the flow diagram of liquid crystal detection method in smooth orientation back box provided by the invention.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention
Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side]
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
The present invention is described further in the following with reference to the drawings and specific embodiments:
Liquid crystal check machine in a kind of smooth orientation back box is present embodiments provided, as shown in Figure 1, being light provided in this embodiment
The structural schematic diagram of liquid crystal check machine in orientation back box.
Liquid crystal check machine includes: in a kind of smooth orientation back box described in the present embodiment
Board 101 is detected, for transmitting and fixing substrate to be detected;Line scan camera 106, for the substrate
It is scanned and takes phase;Microscope camera 110 carries out micro examination for the abnormal area to the substrate;Light source 113, it is described
The light that light source issues is irradiated on the substrate, takes phase convenient for the microscope camera and the line scan camera;Transmission dress
It sets, for fixing and controlling the movement of the microscope camera and the line scan camera;Detection computer (does not show in figure
Out), the image obtained to the microscope camera and the line scan camera is handled, and in the detection computer
The image that portion pre-establishes compares, and detection is abnormal.
It detects board 101 and is equipped with the first sliding rail 102 and fixed platform 103, fixed platform 103 is for placing and admittedly
Fixed substrate to be detected, while fixed platform 103 can detect board by the first sliding rail 102 under the driving of asynchronous machine
It is moved on 101 along the direction of the first sliding rail 102.When the fixed platform 103 drives substrate to reach the specified of detection board 101
When detection zone, the leaflet device being set on detection board 101 senses substrate, is powered, can carry out next to the substrate
Step detection process.
In some embodiments, fixed platform 103 is that can be replaced according to the model and specification of substrate, with
It can carry out testing product using liquid crystal check machine in smooth orientation back box provided by the invention convenient for not having to the substrate of model specification
It is whether qualified.
In the present embodiment, liquid crystal check machine further includes transmission device in the smooth orientation back box, the transmission device 104
It include: camera support 107 and sliding block 105, the camera support 107 is equipped with the second sliding rail (not shown), the cunning
Block 105 is moved along second slide direction, transmission device described in one group of camera support 107 and the composition of sliding block 105.As schemed
Show that transmission device 104 is set to 103 two sides of fixed platform and detects one end of board 101, line scan camera 106 is fixed on cunning
On block 105, microscope camera 110 is both secured on microscope camera sliding block 109.
The phase range that takes of line scan camera 106 is rectangle, and what is scanned is two dimensional image, but the length pole scanned
It is long, and width only has several pixels, so in the present embodiment, line scan camera 106 is moved along rectangle short side direction, it is described
The direction of second sliding rail is identical as the rectangle short side direction.
The line scan camera and the transmission device that matches of liquid crystal check machine in smooth orientation back box provided by the present invention
Quantity can be adjusted according to the size of substrate to be detected.As shown in Figure 1, multiple line scan cameras 106 are arranged in a crossed manner in solid
103 left and right sides of fixed platform, the line scan camera relative motion of two sides carry out taking phase to the transversal scanning of substrate.
In some embodiments, line scan camera 106 can be set to stationary state, and fixed platform 103 passes through asynchronous electricity
Machine drives substrate motion to be detected, and the direction of motion is vertical with line scan camera scanning direction, can also complete to substrate in this way
Scanning takes phase.
In the present embodiment, 4 groups of line scan cameras 106 are used, 4 groups of line scan cameras 106 pass through transmission device
104 are respectively arranged at the two sides of fixed platform 103, and the transmission device 104 further includes asynchronous machine (not shown), asynchronous
Motor driven sliding block 105 drives line scan camera 106 to move along the second sliding rail, is scanned to substrate and takes phase.In the present embodiment
In, the revolving speed of asynchronous machine can be adjusted according to the speed that line scan camera 106 scans, and readily available preferably take mutually is imitated
Fruit.
In the present embodiment, liquid crystal check machine further includes for fixing the micro- of microscope camera 110 in light orientation back box
Mirror camera transmission device 108,108 structure of microscope camera transmission device are identical as 104 structure of transmission device including micro-
Mirror camera support 111, microscope camera sliding block 109.Microscope camera transmission device 108 be set to detection board 101 with the
The vertical one end in one sliding rail, 102 direction, and in the present embodiment, microscope camera transmission device 108 is set to the first sliding rail 102
Two sliding rails between, microscope camera 110 is fixed on microscope camera sliding block 109, and microscope camera sliding block 109 can lead to
The sliding rail movement being set on microscope camera bracket 111 is crossed, carries out micro examination convenient for the abnormal area to substrate.
In the present embodiment, the camera support 107 and microscope camera bracket 111 are provided with elevation and subsidence regulating device
(not shown), for adjusting the height of the line scan camera 106 and the microscope camera 110, to adapt to different rule
The substrate of lattice, and adjust suitable resolution ratio.
Environment dark in closing inside liquid crystal check machine in usual light orientation back box, so in order to allow microscope camera
111 and the acquisition of line scan camera 106 preferably take phase effect, need to add suitable light source to check machine.In the present embodiment
In selected light source 113 be linear light sorurce, and the light source 113 is parallel with the scanning direction of the line scan camera 106.
As shown in Figure 1, light source 113 is fixed on detection board 101 by light source bracket 112, the light source 113 is additionally provided with angular adjustment
Structure is overlapped 113 irradiation position of light source and the scan position of the line scan camera 106 and the microscope camera 110.
The present invention also provides liquid crystal detection methods in a kind of smooth orientation back box, are described in detail below with reference to Fig. 2.
Fig. 2 is the flow diagram of liquid crystal detection method in smooth orientation back box provided in this embodiment, and the method is at least
Include:
Step S10: substrate to be detected is connect with liquid crystal check machine in light orientation back box, and substrate is powered;
Step S20: after the check machine detects that substrate is powered, line scan camera is moved to be scanned along slide direction and be taken
Phase;
Step S30: detection computer calculates processing image by grayscale, examines to the abnormal area on the substrate
Out;
Step S40: microscope camera carries out micro examination to the abnormal area.
Liquid crystal detection method is by using line scan camera and microscope camera in smooth orientation back box provided in this embodiment
The mode of cooperation, line scan camera carry out scanning comprehensively to substrate to be detected and take phase, and detection computer is handled by grayscale calculation
Image, so that larger to the range on substrate, obvious unusual part detects.
In the present embodiment, microscope camera carries out microcosmic detection to abnormal area, thus substrate microcosmic abnormal and
The Macroscopic Anomalies such as dim spot can be detected, thus improve in orientation back box liquid crystal check machine to the exception for being not fixed point and
The Detection capability of substrate Macroscopic Anomalies.
The mode that the present invention cooperates by using line scan camera with microscope camera, line scan camera is to substrate to be detected
It carries out scanning comprehensively and takes phase, detection computer calculates processing image by grayscale, to detect to the exception on substrate, shows
Micro mirror camera carries out microcosmic detection to abnormal area, therefore the Macroscopic Anomalies such as the microcosmic exception of substrate and dim spot can be detected
Out, improve in orientation back box that liquid crystal check machine is to the exception for being not fixed point and the Detection capability of substrate Macroscopic Anomalies, together
When also shorten the time that liquid crystal in orientation back box checks machine check substrate disorder, guarantee also to mention significantly while product yield
High production efficiency.
Although above preferred embodiment is not to limit in conclusion the present invention is disclosed above with preferred embodiment
The present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention is on the basis of the range that claim defines.
Claims (10)
1. liquid crystal check machine in a kind of smooth orientation back box, which is characterized in that the check machine includes:
Board is detected, for transmitting and fixing substrate to be detected;
Line scan camera takes phase for being scanned to the substrate;
Microscope camera carries out micro examination for the abnormal area to the substrate;
Light source, the light that the light source issues are irradiated on the substrate, scan phase convenient for the microscope camera and the line
Machine takes phase;
Transmission device, for fixing and controlling the movement of the microscope camera and the line scan camera;
Detect computer, the image obtained to the microscope camera and the line scan camera is handled, and with it is described
The image that detection computer-internal pre-establishes compares, and detection is abnormal.
2. liquid crystal check machine in light orientation back box as described in claim 1, which is characterized in that the detection board is equipped with the
One sliding rail and fixed platform,
The substrate is placed in the fixed platform, and the fixed platform is moved along first sliding rail, and the substrate is transported
It send to the detection zone of the detection board.
3. liquid crystal check machine in light orientation back box as described in claim 1, which is characterized in that the transmission device include: to
Few three sliding blocks, at least three camera supports and asynchronous machine, the camera support are equipped with the second sliding rail, the sliding block edge
Second slide direction is mobile.
4. liquid crystal check machine in light orientation back box as claimed in claim 3, which is characterized in that the line scan camera and institute
Microscope camera is stated to be each attached on the sliding block.
5. liquid crystal check machine in light orientation back box as described in claim 1, which is characterized in that liquid crystal in the smooth orientation back box
Check machine includes at least two groups line scan camera.
6. liquid crystal check machine in light orientation back box as claimed in claim 5, which is characterized in that the line scan camera takes phase model
It encloses for rectangle, after substrate energization, the line scan camera is scanned along the rectangle short side direction and takes phase, institute
It is identical as the rectangle short side direction to state the second slide direction.
7. liquid crystal check machine in light orientation back box as claimed in claim 3, which is characterized in that the camera support is equipped with lifting
Regulating device, for adjusting the height of the line scan camera and the microscope camera, to adapt to the substrate of different size, and
Adjust suitable resolution ratio.
8. liquid crystal check machine in light orientation back box as described in claim 1, which is characterized in that the light source is linear light sorurce,
And the light source is parallel with the scanning direction of the line scan camera.
9. liquid crystal check machine in light orientation back box as claimed in claim 8, which is characterized in that the linear light sorurce is equipped with angle
Adjustment structure makes the scan position weight of the linear light sorurce irradiation position Yu the line scan camera and the microscope camera
It closes.
10. liquid crystal detection method in a kind of smooth orientation back box, the method include at least:
Step S10: substrate to be detected is connect with liquid crystal check machine in light orientation back box, and substrate is powered;
Step S20: after the check machine detects that substrate is powered, line scan camera, which moves to be scanned along slide direction, takes phase;
Step S30: detection computer calculates processing image by grayscale, detects to the abnormal area on the substrate;
Step S40: microscope camera carries out micro examination to the abnormal area.
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CN102866520A (en) * | 2012-10-10 | 2013-01-09 | 深圳市华星光电技术有限公司 | Optical detection method and optical detection equipment for optical-alignment liquid-crystal panels |
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Application publication date: 20190510 |