CN109737893A - A method of increasing autocollimator measurement range - Google Patents
A method of increasing autocollimator measurement range Download PDFInfo
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- CN109737893A CN109737893A CN201811269078.8A CN201811269078A CN109737893A CN 109737893 A CN109737893 A CN 109737893A CN 201811269078 A CN201811269078 A CN 201811269078A CN 109737893 A CN109737893 A CN 109737893A
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Abstract
A kind of method for increasing photoelectric auto-collimator measurement range is claimed in the present invention; the following steps are included: the angle of three sides of corner mirror meets relationship: ∠ 1_2=90 °-δ 1. with having reflecting mirror of the corner mirror of particular geometric configuration as photoelectric auto-collimator12, ∠ 2_3=90 °-δ23, ∠ 1_3=90 °-δ13.2. analyzing the reflection of corner mirror internal structure and light, six Shu Guang can be divided into according to reflected order difference.3. studying reflected order and measurement parameter relationship, the coordinates matrix M of corner mirror corresponding to the reflected beams is acquiredr, angle susceptibility K and the reflected light vector B that collimator is reflected back from corner mirror.4. analyzing the relationship ξ that imaging contexts of the six beam reflected lights on the photoelectric sensor surface of autocollimator acquire spot displacement amount Yu corner mirror deflection anglex≈‑Δ·Θ1·f、ξy≈‑Δ·Θ2·f.5. the value for providing δ can increase the measurement range of photoelectric auto-collimator easily by controlling corner mirror side joint angle.The present invention can be widely applied to the field that heavy construction, warship, wing etc. require measurement range big.
Description
Technical field
The invention belongs to optical gauge field, in specifically a kind of working principle based on 2 D photoelectric autocollimator, fortune
Plane mirror is replaced with specific corner mirror, to realize the technique study for increasing photoelectric auto-collimator measurement range.
Background technique
Autocollimator is the important kind of measurement instrument for small angle measurement using optical autocollimating principle.Since it is with higher
Accuracy and measurement resolution, thus be widely used in accurate measurement work, such as: angle measurement, plate it is flat
The measurement of face degree, shafting angle shake measurement, straight line degree measurement etc. the autocollimator of guide rail plays an important role.Autocollimatic
Straight instrument is due to possessing higher accuracy and Measurement Resolution, so by being largely used in: angle measurement, the angle shaking of shafting
Measurement, the straight line degree measurement of guide rail, angle measurement etc..Since the measurement accuracy of auto-collimation instrument is more demanding, add
The restrictive condition of its measurement range is excessively single, so being in recent years all concentrated mainly on the research of auto-collimation instrument to its precision
In raising.However the photoelectric auto-collimator sold on the market now is with German MOLLER company ELCOMATHR and ELCOMAT
Series is representative, and product is substantially accomplished very high precision.However the measurement range of auto-collimation instrument is due to its own knot
The characteristics of structure, can not effectively improve always, to greatly limit its using and develop in field of industrial measurement.
Operating distance, the restriction relation formula of measurement range and the bore of its object lens of known 2 D photoelectric autocollimator are as follows:
Wherein L indicates the operating distance of photoelectric collimator, and β indicates measurement range, and D is aperture of objective lens.
According to formula (15), existing photoelectric auto-collimator will necessarily sacrifice its survey when measuring the measurement target of long range significantly
Range is measured, or increases the measurement range of autocollimator by the method for the bore for increasing its object lens.The former makes auto-collimation
The operating distance and measurement range of instrument cannot be considered in terms of, and the latter will increase the cost and weight of autocollimator, while aperture of objective lens
Increase so that the convergence of some aberrations becomes difficult, so that design difficulty increases.
According to Д В Ж y К О В (document Д В Ж y К О В, И А К О Н Я Х И Н, А А
УСИК. итерационный алгоритм определения координат изображений точ
ечных излучателей.Оптический журнал,2009,Коды 110.2960,100,2000.6
Tom76, NO1,2009 and И л ь и н с к и й Р Е Р а с п р e д e л e н и e п o т o к а и з л у ч e н и я, ф o р м и
руемое световым пучком,отражённым от световозвращателя/Р.Еильи
н с к и й // 3 б of-П р и к л а д н а я ф и з и к а, №, 2007. С .18-25.) propose the space coordinate to point light source to
Amount analysis, can derive changes in coordinates of every Shu Guang in corner mirror, thus according to Euler's formula can find out corner mirror around
Itself OX1Or OY1Axis amount of spin, so as to obtain corresponding OX along photoelectric collimator on the photosensor or
The mobile beam information of OY axis.
Summary of the invention
Present invention seek to address that the above problem of the prior art.Propose a kind of method for increasing autocollimator measurement range.This
The technical solution of invention is as follows:
A method of increasing autocollimator measurement range comprising following steps:
1), design has reflecting mirror of the corner mirror for improving geometry as photoelectric auto-collimator, and the corner mirror improves several
The angle what structure essentially consists in three of them side is improved, and the corner mirror includes three side a (1), b (2), c (3) and one
The angle of a aperture of a mirror diametric plane (4), three sides of corner mirror of the improvement geometry meets relationship: ∠ 1_2=90 °-δ12,
∠ 2_3=90 °-δ23, ∠ 1_3=90 °-δ13, wherein δ12、δ23、δ13Respectively indicate side a (1) and b (2), b (2) and c (3), a
(1) the resulting structure angle between c (3).When autocollimator keeps original state, the aperture of a mirror diametric plane (4) of corner mirror hangs down
Directly in the OZ axis of collimator, the equivalent bore (5) of corner mirror is a Magen David, including entrance pupil (6) and emergent pupil (7);
2) reflection for, analyzing corner mirror internal structure and light, according to collimated light beam along three side a (1) of corner mirror, b (2),
The reflected beams are divided into six Shu Guang by the difference of the reflected order of c (3);
3) reflected order and measurement parameter relationship, are studied, the coordinates matrix M of corner mirror corresponding to the reflected beams is acquiredr, angle it is quick
The sensitivity K and reflected light vector B that collimator is reflected back from corner mirror;
4), imaging contexts of the six beam reflected lights of analysis on the photoelectric sensor surface of autocollimator acquire spot displacement amount and corner
The relationship ξ of angle mirror deflection anglex≈-Δ·Θ1·f、ξy≈-Δ·Θ2F, wherein Θ1For corner mirror OX1The angular deflection amount of axis,
Θ2For corner mirror OY1The angular deflection amount of axis, f are the focal length of photoelectric collimator object lens,δ is a small angle
Degree;
5), by controlling corner mirror side joint angle, the value for providing δ increases the measurement range of photoelectric auto-collimator.
Further, the equivalent bore (5) is identical by shape and six parts (8) of area equation, (9), (10), (11),
(12), (13) form.
Further, six parts of the equivalent bore will all receive a part of collimated light beam, received by each section
Collimated light beam all by according to fixed reflected order, carries out anti-three times along three side a (1) of corner mirror, b (2), (3) face c
It penetrates, is then parallel to optical axis and is reflected back photoelectric auto-collimator and forms light circuit;
Further, fixation reflex sequence of the light beam inside corner mirror and effective fan relation of plane are as follows: a-b-c → 8-
11;c-b-a→11-8;b-a-c→9-12;c-a-b→12-9;b-c-a →10-13;a-c-b→13-10;According to reflecting surface
Reflected order label, six light source beams reflected are divided can in pairs.
Further, when a pair of of the reflected beams reflected order is b-a-c, when c-a-b, according to two beam collimated reflected light in photoelectric transfer
Along the displacement of autocollimator OX and OY axis respectively only with corner mirror along OX on sensor1、OY1The amount of spin of axis is related, is reflected
Light vectorIt is parallel to the collimated incident beam of corner mirror;The invariable axis U of one pair of them light beam in three pairs of light beams and corner
Angle mirror OX1、OY1Vertically, that is, meet following relationship:
Three reflecting surface a (1) of the corner mirror can be obtained according to formula (1), b (2), c (3) meet following angular relationship:
sin(δ23)·cos(δ12)·cos(δ13)+sin(δ13)=0 (2)
sin(δ23)·cos(δ12)·cos(δ13)-sin(δ13)+2sin(δ12)·cos(δ13)=0 (3)
Three reflecting surface a (1) of the corner mirror, b (2), the angle δ between c (3) can be obtained by being solved according to above formula12, δ23, δ13
Are as follows:
δ13=arctan (sin (δ12)) (4)
sin(δ23)=- tan (δ12) (5)
δ23=arcsin (- tan (δ12)) (6)
The light beam is to a-b-c, the invariable axis of c-b-aIn the reference axis OZ of corner mirror1Component on axis are as follows:
Acquire the resulting structure angle δ of three side a (1) of the corner mirror, b (2), c (3)12, δ23, δ13Value and the light beam a-
The invariable axis of b-c, c-b-aIn the reference axis OZ of corner mirror1The component of axis:
Wherein δ is a minute angle, and reflected order is the light beam invariable axis of b-a-cIt indicates are as follows:
Reflected order is the light beam invariable axis of b-a-cIt is by the parameter institute of three side a (1) of corner mirror, b (2), c (3)
It determines, the sequence of reflecting surface, the coordinates matrix of the corner mirror of the light beam b-a-c is passed through according to the light beam are as follows:
According to above formula it is found that along the light beam that b-a-c reflected order reflects, the coordinates matrix of corner mirror meets Euler's rotation formula
In to itself OX and OY axis rotation angle inductive relationship, acquire the angle susceptibility of the corner mirror are as follows:
The light beam b-a-c is reflected back the reflected light vector of collimator from corner mirror are as follows:
It can be obtained according to above formula, reflected light is on the two-dimensional surface of the photoelectric sensor of autocollimator along the displacement information of OX and OY axis
OX corresponding with corner mirror1、OY1The rotation situation of axis is related;
Along the light beam of b-a-c reflected order reflection, the light beam that corresponding another beam is reflected along c-a-b reflected order, reflection
Light vector parameter Δ is negative, remaining parameter is identical.
Further, the imaging feelings on photoelectric sensor surface of the six different beam reflected lights of the reflected order in photoelectric collimator
Condition are as follows: the light beam of reflected order b-a-c, c-a-b are respectively hot spot (14) and (15), hot spot in the imaging of photoelectric sensor surface
(16) and (17) are imaged by the light beam that reflected order is a-b-c, c-b-a, and it is b- that hot spot (18) and (19), which are by reflected order,
The light beam of c-a, a-c-b are imaged, the hot spot (14) and (15), hot spot (16) and (17), and hot spot (18) and (19) are corner mirror
The imaging contexts of light beam when not deflecting, hot spot (14') and (15'), hot spot (16') and (17'), hot spot (18') and (19')
Indicate the imaging contexts of light beam when corner mirror deflects, the displacement and corner mirror deflection angle of the hot spot (14) and (15)
Relationship are as follows:
ξx≈-Δ·Θ1·f (13)
ξy≈-Δ·Θ2·f (14)
Wherein Θ1For corner mirror OX1The angular deflection amount of axis, Θ2For corner mirror OY1The angular deflection amount of axis, f are photoelectric collimator object
The focal length of mirror.
Further, pass through the resulting structure angle δ to three side a (1) of the corner mirror, b (2), c (3)12, δ23, δ13It carries out
Control, according to the angle susceptibility of corner mirrorThe value of δ is set on demand, photoelectric auto-collimation can be increased
The measurement range of instrument.
It advantages of the present invention and has the beneficial effect that:
The invention discloses a kind of methods for increasing photoelectric auto-collimator measurement range, with the corner with particular geometric configuration
Reflecting mirror of the mirror as photoelectric auto-collimator, to reduce the angular sensitivity of loop reflection light, to increase the measurement of autocollimator
Range.By controlling corner mirror side joint angle, the value for providing inclination angle can increase photoelectric auto-collimator easily
Measurement range.Brought problem can only be increased by increasing aperture of objective lens by overcoming autocollimator measurement range.This method
Measurement range can effectively can be dramatically increased under conditions of not increasing collimator aperture of objective lens.Based on the novel of this method
Photoelectric collimator can be widely applied to the field that heavy construction, warship, wing etc. require measurement range big.
Detailed description of the invention
Fig. 1 is that the present invention provides corner mirror structure chart of the preferred embodiment photoelectricity from straight quasi- instrument.
Fig. 2 is the equivalent bore of corner mirror of the present invention.
Fig. 3 is the imaging contexts of light beam on the photosensor after corner mirror of the present invention replaces plane mirror.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, in detail
Description.Described embodiment is only a part of the embodiments of the present invention.
The technical solution that the present invention solves above-mentioned technical problem is:
A method of increasing autocollimator measurement range, comprising the following steps:
Step 1., with having reflecting mirror of the corner mirror as photoelectric auto-collimator for improving geometry.As shown in Figure 1, institute
Stating corner mirror includes three sides a1, b2, c3 and an aperture of a mirror diametric plane 4.Three sides a1, b2, c3 of the corner mirror
Angle meet following relationship: ∠ 1_2=90 °-δ12, ∠ 2_3=90 °-δ23, ∠ 1_3=90 °-δ13, wherein δ12、δ23、δ13Point
It Biao Shi not resulting structure angle between side a (1) and b (2), b (2) and c (3), a (1) and c (3);It is kept just in autocollimator
When beginning state, the OZ axis of the aperture of a mirror diametric plane 4 of corner mirror perpendicular to collimator.As shown in Fig. 2, the equivalent mouth of the corner mirror
Diameter 5 is a Magen David, including entrance pupil 6 and emergent pupil 7.The equivalent bore 5 is identical by shape and six parts 8 of area equation,
9,10,11,12,13 composition;
2. step, analyzes the reflection of corner mirror internal structure and light, according to collimated light beam along corner mirror three side a (1), b
(2), the reflected beams are divided into six Shu Guang by the difference of the reflected order of c (3);
3., research reflected order and measurement parameter relationship acquire the coordinates matrix M of corner mirror corresponding to the reflected beams to stepr、
The angle susceptibility K and reflected light vector B that collimator is reflected back from corner mirror;
4. step, analyzes imaging contexts of the six beam reflected lights on the photoelectric sensor surface of autocollimator and acquires spot displacement amount
With the relationship ξ of corner mirror deflection anglex≈-Δ·Θ1·f、ξy≈-Δ·Θ2F, wherein Θ1For corner mirror OX1The angle of axis is inclined
Turn amount, Θ2For corner mirror OY1The angular deflection amount of axis, f are the focal length of photoelectric collimator object lens,δ is one micro-
Low-angle;
5., by controlling corner mirror side joint angle, the value for providing δ can increase photoelectric auto-collimator to step easily
Measurement range.
Six parts of the equivalent bore will all receive a part of collimated light beam, and collimated light beam received by each section is all
By according to fixed reflected order, triple reflection is carried out along corner mirror three sides face a1, b2, c3, is then parallel to optical axis
It is reflected back photoelectric auto-collimator and forms light circuit.Fixation reflex sequence and effective covering of the fan of the light beam inside corner mirror
Relationship are as follows: a-b-c → 8-11;c-b-a→11-8; b-a-c→9-12;c-a-b→12-9;b-c-a→10-13;a-c-b→
13-10.It marks, six light source beams reflected are divided can in pairs according to the reflected order of reflecting surface, such as according to a-b-c,
The reflected order of c-b-a can be divided into the opposite light beam of a pair of of reflected order.
When a pair of of the reflected beams reflected order is b-a-c, when c-a-b, according to two beam collimated reflected light edge on the photosensor
The displacement of autocollimator OX and OY axis is respectively only with corner mirror along OX1、OY1The amount of spin of axis is related, obtains reflected light vector
It is parallel to the collimated incident beam of corner mirror;The invariable axis U and corner mirror OX of one pair of them light beam in three pairs of light beams1、
OY1Vertically, that is, meet following relationship:
Three reflecting surface a (1) of the corner mirror can be obtained according to formula (1), b (2), c (3) meet following angular relationship:
sin(δ23)·cos(δ12)·cos(δ13)+sin(δ13)=0 (2)
sin(δ23)·cos(δ12)·cos(δ13)-sin(δ13)+2sin(δ12)·cos(δ13)=0 (3)
Three reflecting surface a (1) of the corner mirror, b (2), the angle δ between c (3) can be obtained by being solved according to above formula12, δ23, δ13
Are as follows:
δ13=arctan (sin (δ12)) (4)
sin(δ23)=- tan (δ12) (5)
δ23=arcsin (- tan (δ12)) (6)
The light beam is to a-b-c, the invariable axis of c-b-aIn the reference axis OZ of corner mirror1Component on axis are as follows:
Acquire the resulting structure angle δ of three side a (1) of the corner mirror, b (2), c (3)12, δ23, δ13Value and the light beam a-
The invariable axis of b-c, c-b-aIn the reference axis OZ of corner mirror1The component of axis:
Wherein δ is a minute angle, and reflected order is the light beam invariable axis of b-a-cIt indicates are as follows:
When δ≤5 °, the error of the operation is less than 0.5%.
Reflected order is the light beam invariable axis of b-a-cIt is by the parameter institute of three side a (1) of corner mirror, b (2), c (3)
It determines, the sequence of reflecting surface, the coordinates matrix of the corner mirror of the light beam b-a-c is passed through according to the light beam are as follows:
According to above formula it is found that along the light beam that b-a-c reflected order reflects, the coordinates matrix of corner mirror meets Euler's rotation formula
In to itself OX and OY axis rotation angle inductive relationship, acquire the angle susceptibility of the corner mirror are as follows:
The light beam b-a-c is reflected back the reflected light vector of collimator from corner mirror are as follows:
It can be obtained according to above formula, reflected light is on the two-dimensional surface of the photoelectric sensor of autocollimator along the displacement information of OX and OY axis
OX corresponding with corner mirror1、OY1The rotation situation of axis is related.
Along the light beam of b-a-c reflected order reflection, the light beam that corresponding another beam is reflected along c-a-b reflected order, reflection
Light vector parameter Δ is negative, remaining parameter is identical.
The imaging contexts on photoelectric sensor surface of the six different beam reflected lights of the reflected order in photoelectric collimator are as follows: reflection
Sequence be b-a-c, c-a-b light beam photoelectric sensor surface imaging be respectively hot spot (14) and (15), hot spot (16) and
It (17) is to be imaged by the light beam that reflected order is a-b-c, c-b-a, it is b-c-a, a- that hot spot (18) and (19), which are by reflected order,
The light beam of c-b is imaged, the hot spot (14) and (15), hot spot (16) and (17), and hot spot (18) and (19) are that corner mirror does not occur
The imaging contexts of light beam when deflection, hot spot (14') and (15'), hot spot (16') and (17'), hot spot (18') and (19') are indicated
The imaging contexts of light beam when corner mirror deflects, the relationship of the displacement and corner mirror deflection angle of the hot spot (14) and (15)
Are as follows:
ξx≈-Δ·Θ1·f (13)
ξy≈-Δ·Θ2·f (14)
Wherein Θ1For corner mirror OX1The angular deflection amount of axis, Θ2For corner mirror OY1The angular deflection amount of axis, f are photoelectric collimator object
The focal length of mirror.
For 2 D photoelectric autocollimator general at present, angle susceptibility is 2, whole precision≤0.3 ", and measurement range is about
700 ", resolution ratio 0.01 ", focal length 860mm, aperture of objective lens 60mm, photoelectric sensor selects high-resolution area array CCD, electric
Specific item mirror, measurement control are that notebook software triggers, and corner mirror is fixed with measurement object, a diameter of 62mm, by glass K8(n
=1.5163) it cuts.
In this example, by adjusting the resulting structure angle for making three side a 1 of corner mirror of the present invention, b 2, c 3
Respectively ∠ 1_2=∠ 1_3=91 ° 39', ∠ 2_3=89 ° 20'46 ", provides δ=1 ° 39', then the corner mirror can be acquired
Angle susceptibilityThan the angle susceptibility K of current 2 D photoelectric collimator0=2 reduce 20 times,
That is the measurement range of photoelectric collimator also improves at least 20 times.
As stated above, the method for the present invention for increasing autocollimator measurement range can have while guaranteeing operating distance
Measurement range is increased by 20 times by effect.
The above embodiment is interpreted as being merely to illustrate the present invention rather than limit the scope of the invention.It is reading
After the content of record of the invention, technical staff can be made various changes or modifications the present invention, these equivalence changes and
Modification equally falls into the scope of the claims in the present invention.
Claims (7)
1. a kind of method for increasing autocollimator measurement range, which comprises the following steps:
1), design has reflecting mirror of the corner mirror for improving geometry as photoelectric auto-collimator, and the corner mirror improves several
The angle what structure essentially consists in three of them side is improved, and the corner mirror includes three side a (1), b (2), c (3) and one
The angle of a aperture of a mirror diametric plane (4), three sides of corner mirror of the improvement geometry meets relationship: ∠ 1_2=90 °-δ12,
∠ 2_3=90 °-δ23, ∠ 1_3=90 °-δ13, wherein δ12、δ23、δ13Respectively indicate side a (1) and b (2), b (2) and c (3), a
(1) the resulting structure angle between c (3), when autocollimator keeps original state, the aperture of a mirror diametric plane (4) of corner mirror hangs down
Directly in the OZ axis of collimator, the equivalent bore (5) of corner mirror is a Magen David, including entrance pupil (6) and emergent pupil (7);
2) reflection for, analyzing corner mirror internal structure and light, according to collimated light beam along three side a (1) of corner mirror, b (2), c
(3) the reflected beams are divided into six Shu Guang by the difference of reflected order;
3) reflected order and measurement parameter relationship, are studied, the coordinates matrix M of corner mirror corresponding to the reflected beams is acquiredr, angle it is quick
The sensitivity K and reflected light vector B that collimator is reflected back from corner mirror;
4), imaging contexts of the six beam reflected lights of analysis on the photoelectric sensor surface of autocollimator acquire spot displacement amount and corner
The relationship ξ of angle mirror deflection anglex≈-Δ·Θ1·f、ξy≈-Δ·Θ2F, wherein Θ1For corner mirror OX1The angular deflection amount of axis,
Θ2For corner mirror OY1The angular deflection amount of axis, f are the focal length of photoelectric collimator object lens,δ is a small angle
Degree;
5), by controlling corner mirror side joint angle, the value for providing δ increases the measurement range of photoelectric auto-collimator.
2. a kind of method for increasing autocollimator measurement range according to claim 1, which is characterized in that the equivalent mouth
Diameter (5) is identical by shape and six parts (8), (9), (10), (11), (12), (13) of area equation form.
3. a kind of method for increasing autocollimator measurement range according to claim 2, which is characterized in that the equivalent mouth
Six parts of diameter will all receive a part of collimated light beam, and collimated light beam received by each section all will be according to fixed anti-
Sequence is penetrated, triple reflection is carried out along three side a (1) of corner mirror, b (2), (3) face c, is then parallel to optical axis reflected light
Electric autocollimator simultaneously forms light circuit.
4. a kind of method for increasing autocollimator measurement range according to claim 3, which is characterized in that the light beam edge
Fixation reflex sequence inside corner mirror and the relationship effectively fanned are as follows: a-b-c → 8-11;c-b-a→11-8;b-a-c→9-12;
c-a-b→12-9;b-c-a→10-13;a-c-b→13-10;It is marked according to the reflected order of reflecting surface, it can be six reflected
Light source beam is divided in pairs.
5. a kind of method for increasing autocollimator measurement range according to claim 4, which is characterized in that when a pair reflects
Light beam reflected order is b-a-c, when c-a-b, according to two beam collimated reflected light on the photosensor along autocollimator OX and OY
The displacement of axis is only respectively with corner mirror along OX1、OY1The amount of spin of axis is related, obtains reflected light vectorIt is parallel to corner mirror
Collimated incident beam;The invariable axis U and corner mirror OX of one pair of them light beam in three pairs of light beams1、OY1Axis is vertical, that is, meets
Following relationship:
Three reflecting surface a (1) of the corner mirror can be obtained according to formula (1), b (2), c (3) meet following angular relationship:
sin(δ23)·cos(δ12)·cos(δ13)+sin(δ13)=0 (2)
sin(δ23)·cos(δ12)·cos(δ13)-sin(δ13)+2sin(δ12)·cos(δ13)=0 (3)
Three reflecting surface a (1) of the corner mirror, b (2), the resulting structure angle δ between c (3) can be obtained by being solved according to above formula12, δ23,
δ13Are as follows:
δ13=arctan (sin (δ12)) (4)
sin(δ23)=- tan (δ12) (5)
δ23=arcsin (- tan (δ12)) (6)
The light beam is to a-b-c, the invariable axis of c-b-aIn the reference axis OZ of corner mirror1Component on axis are as follows:
Acquire the resulting structure angle δ of three side a (1) of the corner mirror, b (2), c (3)12, δ23, δ13Value and the light beam a-
The invariable axis of b-c, c-b-aIn the reference axis OZ of corner mirror1The component of axis:
Wherein δ is a minute angle, and reflected order is the light beam invariable axis of b-a-cIt indicates are as follows:
Reflected order is the light beam invariable axis of b-a-cIt is to be determined by the parameter of three side a (1) of corner mirror, b (2), c (3)
Fixed, the sequence of reflecting surface, the coordinates matrix of the corner mirror of the light beam b-a-c are passed through according to the light beam are as follows:
According to above formula it is found that along the light beam that b-a-c reflected order reflects, the coordinates matrix of corner mirror meets Euler's rotation formula
In to itself OX and OY axis rotation angle inductive relationship, acquire the angle susceptibility of the corner mirror are as follows:
The light beam b-a-c is reflected back the reflected light vector of collimator from corner mirror are as follows:
It can be obtained according to above formula, reflected light is on the two-dimensional surface of the photoelectric sensor of autocollimator along the displacement information of OX and OY axis
OX corresponding with corner mirror1、OY1The rotation situation of axis is related;
Along the light beam of b-a-c reflected order reflection, the light beam that corresponding another beam is reflected along c-a-b reflected order, reflection
Light vector parameter Δ is negative, remaining parameter is identical.
6. a kind of method for increasing autocollimator measurement range according to claim 5, which is characterized in that the reflection is suitable
The imaging contexts on photoelectric sensor surface of the six different beam reflected lights of sequence in photoelectric collimator are as follows: reflected order b-a-c, c-
The light beam of a-b is respectively hot spot (14) and (15) in the imaging of photoelectric sensor surface, and hot spot (16) and (17) are by reflected order
It is imaged for the light beam of a-b-c, c-b-a, hot spot (18) and (19) are imaged by the light beam that reflected order is b-c-a, a-c-b, institute
State hot spot (14) and (15), hot spot (16) and (17), hot spot (18) and (19) are the imaging of light beam when corner mirror does not deflect
Situation, hot spot (14') and (15'), hot spot (16') and (17'), hot spot (18') and (19') indicate that corner mirror deflects the time
The imaging contexts of beam, the relationship of the displacement and corner mirror deflection angle of the hot spot (14) and (15) are as follows:
ξx≈-Δ·Θ1·f(13)
ξy≈-Δ·Θ2·f(14)
Wherein Θ1For corner mirror OX1The angular deflection amount of axis, Θ2For corner mirror OY1The angular deflection amount of axis, f are photoelectric collimator object lens
Focal length.
7. a kind of method for increasing autocollimator measurement range according to claim 6, which is characterized in that by described
Three side a (1) of corner mirror, b (2), c (3) resulting structure angle δ12, δ23, δ13It is controlled, it is sensitive according to the angle of corner mirror
DegreeThe value of δ is set on demand, the measurement range of photoelectric auto-collimator can be increased.
Priority Applications (1)
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