CN109724986A - A kind of laptop lid panel automatic defect detecting device - Google Patents

A kind of laptop lid panel automatic defect detecting device Download PDF

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Publication number
CN109724986A
CN109724986A CN201811514923.3A CN201811514923A CN109724986A CN 109724986 A CN109724986 A CN 109724986A CN 201811514923 A CN201811514923 A CN 201811514923A CN 109724986 A CN109724986 A CN 109724986A
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CN
China
Prior art keywords
enchasing plate
lid panel
monitor station
unit
workbench
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811514923.3A
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Chinese (zh)
Inventor
顾寄南
黄锐
孙晓红
侯永涛
许昊
许俏
庞晨涛
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Jiangsu University
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Jiangsu University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu University filed Critical Jiangsu University
Priority to CN201811514923.3A priority Critical patent/CN109724986A/en
Publication of CN109724986A publication Critical patent/CN109724986A/en
Pending legal-status Critical Current

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Abstract

The present invention provides a kind of laptop lid panel automatic defect detecting devices, including feeding unit, wiper unit detection unit, workbench, enchasing plate, image processor and lifting rotation unit, workbench is horizontally disposed, workbench is equipped with the first groove matched with enchasing plate, detection unit includes shading case and three industrial cameras, three industrial cameras are respectively arranged in the surface of enchasing plate, upper left side and upper right side, three industrial cameras are connect with image processor, lifting rotation unit is connect with the enchasing plate, for going up and down enchasing plate and rotation, feeding unit is used to computer lid panel being delivered to enchasing plate, after the completion of detection unit detection, feeding unit driving computer lid panel returns to initial position, the present invention can automatically detect the defect of panel, solve laptop top cover in the prior art The problem of panel detection low efficiency and detection inaccuracy.

Description

A kind of laptop lid panel automatic defect detecting device
Technical field
The present invention relates to the testing equipment field of automation equipment more particularly to a kind of laptop lid panel defects Automatic detection device.
Background technique
It in the production process of laptop, needs to carry out defects detection to laptop lid panel, however, existing The detection of laptop lid panel after the assembly is completed is all to carry out vision-based detection using artificial in stage factory.Worker is from production The notebook computer panel that assembly is completed is removed on line, is first used alcohol wipe one time, then carry out vision-based detection.Above-mentioned work is main It operates and completes by artificial, higher to the dependence of worker in operation, worker easily occurs in prolonged work Fatigue reduces so as to cause the accuracy rate of detection, while the efficiency detected is also very low, and therefore, it is necessary to notebook at this stage The detection work of computer lid panel improves.
Summary of the invention
In response to the deficiencies in the existing technology, the present invention provides a kind of laptop lid panel defects to detect automatically Device solves the problems, such as that laptop lid panel detection efficiency is low in the prior art and detection is inaccurate.
The present invention achieves the above technical objects by the following technical means.
A kind of laptop lid panel automatic defect detecting device, including feeding unit, wiper unit detection unit, Workbench, enchasing plate, image processor and lifting rotation unit;
The workbench is horizontally disposed, and the workbench is equipped with the first groove matched with the enchasing plate, described Enchasing plate is entrenched in first groove;
The detection unit includes shading case and three industry cameras, and one end that the workbench is equipped with the first groove is protruded into In to the shading case, three industrial cameras are respectively arranged in the upper left of the surface of the enchasing plate, the enchasing plate The back upper place of the square and described enchasing plate, three industrial cameras are connect with described image processor;
The lifting rotation unit is connect with the enchasing plate, for going up and down the enchasing plate, and described chimeric After rising the enchasing plate can rotate plate;
The feeding unit is used to computer lid panel being delivered to the enchasing plate from the other end of workbench, detects After the completion of unit detection, the feeding unit driving computer lid panel returns to initial position;
Before the computer lid panel is fed through enchasing plate by feeding unit, by the wiper unit, the wiping Unit can wipe the spot in computer lid panel.
Preferably, the lifting rotation unit includes cylinder rack gear, the first helical gears, the second helical teeth Cylinder Gear The center of wheel, straight spur gear, first groove is equipped with circular through hole, and the cylinder rack gear is arranged and wears along the vertical direction Cross the circular through hole, the top of the cylinder rack gear is fixedly connected with the enchasing plate bottom, the straight spur gear with The cylinder rack gear intermeshing, first helical gears are coaxially installed on the middle section of the cylinder rack gear, institute When stating cylinder rack gear and moving up and down concordant with first helical gears to second helical gears, described second Helical gears and first helical gears are intermeshed, second helical gears and the straight tooth column Gear is driven by motor respectively.
Preferably, the feeding unit includes monitor station and electric pushrod, and the two sides of the monitor station are respectively equipped with more A idler wheel, the surface of the workbench are equipped with two roller grooves that are parallel to each other, and the idler wheel can be sliding along the roller groove Row, the electric pushrod is for pushing the monitor station to slide along the roller groove.
Preferably, the lower surface of the monitor station is equipped with the second groove matched with the enchasing plate, the detection After platform is slided to the enchasing plate, the enchasing plate can be risen and be embedded in the monitor station by the lifting rotation unit On.
Preferably, the feeding unit further includes T shape connecting column, and the T shape connecting column includes orthogonal horizontal cylinder The mediate cylindrical of body and perpendicular cylindrical body and connection horizontal cylindrical body and perpendicular cylindrical body, the horizontal cylindrical body and the monitor station Lower surface is that can be detached to snap connection, and the horizontal cylindrical body is embedded in the lower surface of the monitor station, the perpendicular cylindrical body Bottom end is connect with the electric pushrod.
Preferably, one and the perpendicular mutually matched U-lag of cylindrical body are additionally provided on the surface of the workbench, it is described In monitor station taxiing procedures, the perpendicular cylindrical body is located in the U-lag.
Preferably, the wiper unit includes horizontal axis, hollow circuit cylinder sponge and horizontal axis support frame, the middle cylindrical sponges set It is located on the horizontal axis, the both ends of the horizontal axis are fixed on the side of shading case by horizontal axis support frame, and the monitor station is by institute It states during electric pushrod is pushed on enchasing plate, the hollow circuit cylinder sponge can wipe the computer top cover on the monitor station Panel.
Preferably, it is equipped with cavity in the horizontal axis, cleaning solution is accommodated in the cavity, the bottom of the horizontal axis is equipped with more A first through hole being connected to the cavity, hollow circuit cylinder sponge described in the first through hole face, the top of the horizontal axis is set There is second through-hole, second through-hole is located at the outside of the hollow circuit cylinder sponge.
Beneficial effects of the present invention:
Feeding unit is arranged in the present invention, can automatically send measured panel to detection unit, and in this process by wiping It wipes unit to wipe the spots such as the dust of panel surface, to improve the accuracy of detection unit detection, the present invention is provided with lifting Rotary unit, enables panel lifting rotation, and three industrial cameras is enable to shoot panel upper surface and four sides respectively The picture in face, and image processor is reached, by the defect of image processor analysis panel surface, entire detection process is high-efficient, Detection accuracy is high, the setting of lifting rotation unit, enables the industrial camera for being installed on enchasing plate upper left side and back upper place The usage quantity of industrial camera is reduced in four sides for taking panel, saves cost;
Wiper unit of the invention includes horizontal axis, hollow circuit cylinder sponge and horizontal axis support frame, and hollow circuit cylinder sponge is installed on On horizontal axis, horizontal axis is installed on the side of shading case by horizontal axis support frame, and structure is simple, saves installation space, also, in cross Cavity for accommodating cleaning solution is set in axis, in wiping process, cleaning solution can be flowed out by the through-hole on horizontal axis, so that Hollow circuit cylinder sponge is more preferable to the wiping cleaning effect of panel.
Monitor station in feeding mechanism of the invention realizes feeding by electric pushrod, and upon completion of the assays, is pushed away by electronic Bar is driven back into initial position, realizes discharging, i.e. feeding and discharging is realized by an electric pushrod, to save cost.
Detailed description of the invention
Fig. 1 is to be shown according to a kind of structure of laptop lid panel automatic defect detecting device of the embodiment of the present invention It is intended to.
Fig. 2 is the main view of Fig. 1.
Fig. 3 is the right view of Fig. 1.
Fig. 4 is the top view of Fig. 1.
Fig. 5 is the structural schematic diagram according to the monitor station of the embodiment of the present invention.
Fig. 6 is the structural schematic diagram according to the lifting rotation unit of the embodiment of the present invention.
Fig. 7 is according to the enchasing plate of the embodiment of the present invention and the structural schematic diagram of the first groove.
Fig. 8 is the structural schematic diagram according to the wiper unit of the embodiment of the present invention.
Fig. 9 is the structural schematic diagram according to the horizontal axis of the embodiment of the present invention.
Figure 10 is the structural schematic diagram according to the T shape connecting column of the embodiment of the present invention.
Appended drawing reference:
1. monitor station, 2. electric pushrods, 3. support columns, 4. industrial cameras, 5. enchasing plates, 6.T shape connecting column, 7. first tiltedly Tooth roller gear, 8. second helical gears, 9. cylinder rack gears, 10. straight spur gears, 11. first support frames, 12. Two support frames, 13. first stepper motors, 14. second stepper motors, 15. motor fixing frames, 16. bottom plate fixing grooves, 17. horizontal axis, 18. hollow circuit cylinder sponge, 19. shading casees, 20. workbench, 21. bottom plates, 22. horizontal axis support frames.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached The embodiment of figure description is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", The orientation or positional relationship of the instructions such as " thickness ", "upper", "lower", " axial direction ", " radial direction ", "vertical", "horizontal", "inner", "outside" To be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description of the present invention and simplification of the description, rather than indicate or It implies that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as Limitation of the present invention.In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply phase To importance or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be with Explicitly or implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or Two or more, unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc. Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can be machine Tool connection, is also possible to be electrically connected;It can be directly connected, two members can also be can be indirectly connected through an intermediary Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood in this hair as the case may be Concrete meaning in bright.
A kind of laptop lid panel defect according to an embodiment of the present invention is specifically described in conjunction with attached drawing first below Automatic detection device.
Please refer to Fig. 1~10, a kind of laptop lid panel defect according to an embodiment of the present invention detects dress automatically It sets including feeding unit, wiper unit detection unit, workbench 20, bottom plate 21, enchasing plate 5, image processor and lifting rotation Unit.
Specifically, workbench 20 is horizontally disposed, and is located at the top of bottom plate 21, and workbench 20 divides for detection zone and feeding There is square first groove in region, the detection zone center of workbench 20, and to match with enchasing plate 5, enchasing plate 5 is located at When in the first groove, the upper surface of enchasing plate 5 is concordant with the upper surface of workbench 20.
As depicted in figs. 1 and 2, detection unit includes shading case 19 and three industrial cameras 4, the detection of the workbench 20 Region stretches in the shading case 19, and three industrial cameras 4 are respectively arranged in the surface, described of the enchasing plate 5 The back upper place on the upper left side of enchasing plate 5 and the enchasing plate 5 is respectively used to the computer lid panel that shooting is located on enchasing plate 5 Upper surface and side, three industrial cameras 4 connect with described image processor, and image processor receives industrial phase Image processing and analyzing is carried out after the photo that machine 4 transmits, to identify the defect of computer lid panel.
As shown in fig. 6, lifting rotation unit is connect with the enchasing plate 5, for going up and down the enchasing plate 5, and After rising the enchasing plate 5 can rotate the enchasing plate 5, specifically, lifting rotation unit includes cylinder rack gear 9, first Helical gears 7, the second helical gears 8, straight spur gear 10, the first stepper motor 13 and second stepper motor 14, the center of first groove is equipped with circular through hole, and the cylinder rack gear 9 is arranged along the vertical direction and passes through described round logical Hole, the top of the cylinder rack gear 9 are fixedly connected with 5 bottom of enchasing plate, and the straight spur gear 10 is located at Cylinder Gear The right side of item 9, is intermeshed with the cylinder rack gear 9, and straight spur gear 10 is connected and is installed on the first stepper motor 13 On first support frame 11, the first stepper motor 13 is fixed under workbench 20 by stepper motor fixed frame 15;First helical teeth Roller gear 7 is coaxially installed on the middle section of the cylinder rack gear 9, and the cylinder rack gear 9 moves up and down to described second tiltedly When tooth roller gear 8 is concordant with first helical gears 7, second helical gears 8 and first helical teeth Roller gear 7 is intermeshed, and second stepper motor 14 is vertically placed in 21 fixing groove 16 of bottom plate, is had an area of bar thereon and is passed through second Support frame 12 is connected with the second helical gears 8.
As shown in Figure 1 and Figure 5, feeding unit is used to for computer lid panel being delivered to from the other end of workbench 20 described On enchasing plate 5, after the completion of detection unit detection, the feeding unit driving computer lid panel returns to initial position, specifically, The feeding unit includes monitor station 1, electric pushrod 2 and T shape connecting column 6, and monitor station 1 is for placing laptop top cover surface Plate, the upper surface of monitor station 1 is equipped with the embedded mould matched with laptop lid panel, so that laptop top cover Panel is more stable on monitor station 1.The two sides of the monitor station 1 are respectively equipped with multiple idler wheels, the table of the workbench 20 Face is equipped with two roller grooves that are parallel to each other, and the idler wheel can be slided along the roller groove.It is set on the lower surface of monitor station 1 There is the second groove matched with enchasing plate 5, the monitor station 1 is slided to 5 top of enchasing plate, the lifting rotation list The enchasing plate 5 can be risen and is embedded on the monitor station 1 by member, so that monitor station 1 is moved with enchasing plate 5.
As shown in figure 5 and figure 10, T shape connecting column 6 includes that orthogonal horizontal cylindrical body and perpendicular cylindrical body and connection are horizontal The lower surface of the mediate cylindrical of cylindrical body and perpendicular cylindrical body, the horizontal cylindrical body and the monitor station 1 is that can be detached from buckle to connect It connects, the horizontal cylindrical body is embedded in the rectangle snap-in groove on the lower surface of the monitor station 1, the bottom of the perpendicular cylindrical body End is hollow cylindrical, is interference fitted with the electric pushrod 2, and electric pushrod 2 is supported by support column 3.The surface of workbench 20 On be additionally provided with one and the perpendicular mutually matched U-lag of cylindrical body, in 1 taxiing procedures of monitor station, the perpendicular cylindrical body In the U-lag.
As shown in Figure 8 and Figure 9, wiper unit includes horizontal axis 17, hollow circuit cylinder sponge 18 and horizontal axis support frame 22, it is described in Cylindrical sponges are set on the horizontal axis 17, and the both ends of the horizontal axis 17 are fixed on the side of shading case 19 by horizontal axis support frame 22 Face is square structure, for fixing in the square groove of horizontal axis support frame 22.Cavity, the cavity are equipped in the horizontal axis 17 Inside accommodate cleaning solution, the bottom of the horizontal axis 17 is set there are five the first through hole being connected to the cavity, first through hole it is straight Diameter is 0.5~1mm, and the top of hollow circuit cylinder sponge 18 described in the first through hole face, the horizontal axis 17 is equipped with one second The diameter of through-hole, the second through-hole is 1~2mm, and second through-hole is located at the outside of the hollow circuit cylinder sponge 18, is used for sky Intracavitary injection cleaning solution.Horizontal axis 17 can be removed from horizontal axis support frame 22, to replace hollow circuit cylinder sponge 18.The monitor station During 1 is pushed on enchasing plate 5 by the electric pushrod 2, the hollow circuit cylinder sponge 18 can be wiped on the monitor station 1 Computer lid panel.
The course of work of the invention:
After laptop lid panel is removed the embedded mould being placed on monitor station 1 by manipulator from assembly line, The push rod of electric pushrod 2 acts to the left, pushes monitor station 1 to move downward by T shape connecting column 6, by the hollow of wiper unit The extruding of cylindrical sponges 18 wipes.
Before the movement of monitor station 1, enchasing plate 5 is located in the first groove of 20 detection zone of workbench.When monitor station 1 moves To the surface of enchasing plate 5, when the left-hand wheel of monitor station 1 reaches the left limit of 20 roller groove of workbench, the first stepper motor 13 movements, drive straight spur gear 10 to rotate, and increase cylinder rack gear 9, so that enchasing plate 5 be made to rise.When on cylinder rack gear 9 It is raised to when the first helical gears 7 being made to be meshed with the second helical gears 8,13 stopping of the first stepper motor movement.This When, enchasing plate 5 is embedded in the embeded slot of 1 bottom of monitor station, and will test the picking-up of platform 1, the card of T shape connecting column 6 and monitor station 1 Button is detached from, at this moment industrial camera 4 is in taking first group of photo, the respectively upper surface of laptop lid panel and two phases Adjacent side.Then, second stepper motor 14 acts, and drives the rotation of the second helical gears 8, and then drives the first helical teeth circle Stud wheel 7 rotates, final that monitor station 1 is driven to rotate.After monitor station 1 turns over 180 degree, 14 stopping of second stepper motor movement, Positioned at two industrial cameras 4 of 5 upper left side of enchasing plate and back upper place at this moment taking second group of photo, respectively laptop Other two adjacent side of lid panel.Then, second stepper motor 14 acts, and monitor station 1 is made to continue to rotate 180 degree.
After industrial camera 4 takes second group of photo, monitor station 1 continues to rotate 180 degree, the movement of the first stepper motor 13, Decline cylinder rack gear 9, then the first helical gears 7 and the second helical gears 8 are detached from, and the idler wheel of monitor station 1 returns In roller groove on to workbench 20, while the horizontal cylindrical body of T shape connecting column 6 enters in the snap-in groove of monitor station 1.Complete with After upper step, the push rod of electric pushrod 2 is acted to the right, drives monitor station 1 to keep in the center, last mechanical arm takes workpiece away.
Action moment and time with upper push-rod and motor be according to the beat of assembly line, industrial camera 4 photo opporunity, Actuation time of stepper motor etc. is because of usually determination.The rotating cycle and angle of first stepper motor 13 should according to make first tiltedly Planar gesture is determined to the requirement concordant with the upper plane of the second helical gears 8 on tooth roller gear 7;Second stepping electricity The rotating cycle and angle of machine 14 should be determined according to making monitor station 1 rotate the requirement of two 180 degrees.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example Property, it is not considered as limiting the invention, those skilled in the art are not departing from the principle of the present invention and objective In the case where can make changes, modifications, alterations, and variations to the above described embodiments within the scope of the invention.

Claims (8)

1. a kind of laptop lid panel automatic defect detecting device, which is characterized in that including feeding unit, wiper unit Detection unit, workbench, enchasing plate, image processor and lifting rotation unit;
The workbench is horizontally disposed, and the workbench is equipped with the first groove matched with the enchasing plate, described chimeric Plate is entrenched in first groove;
The detection unit includes shading case and three industrial cameras, and one end that the workbench is equipped with the first groove stretches to In the shading case, three industrial cameras are respectively arranged in the upper left side of the surface of the enchasing plate, the enchasing plate With the back upper place of the enchasing plate, three industrial cameras are connect with described image processor;
The lifting rotation unit is connect with the enchasing plate, for going up and down the enchasing plate, and in the enchasing plate liter After rising the enchasing plate can rotate;
The feeding unit is used to computer lid panel being delivered to the enchasing plate, detection unit from the other end of workbench After the completion of detection, the feeding unit driving computer lid panel returns to initial position;
Before the computer lid panel is fed through enchasing plate by feeding unit, by the wiper unit, the wiper unit The spot in computer lid panel can be wiped.
2. laptop lid panel automatic defect detecting device according to claim 1, which is characterized in that the liter Drop rotary unit includes cylinder rack gear, the first helical gears, the second helical gears, straight spur gear, and described the The center of one groove is equipped with circular through hole, and the cylinder rack gear is arranged along the vertical direction and passes through the circular through hole, the circle The top of column rack gear is fixedly connected with the enchasing plate bottom, and the straight spur gear and the cylinder rack gear are intermeshed, First helical gears are coaxially installed on the middle section of the cylinder rack gear, and the cylinder rack gear moves up and down to institute State the second helical gears it is concordant with first helical gears when, second helical gears and described first Helical gears intermeshing, second helical gears and the straight spur gear are driven by motor respectively.
3. laptop lid panel automatic defect detecting device according to claim 1, which is characterized in that described to send Material unit includes monitor station and electric pushrod, and the two sides of the monitor station are respectively equipped with multiple idler wheels, the table of the workbench Face is equipped with two roller grooves that are parallel to each other, and the idler wheel can be slided along the roller groove, and the electric pushrod is for pushing away The monitor station is moved to slide along the roller groove.
4. laptop lid panel automatic defect detecting device according to claim 3, which is characterized in that the inspection The lower surface of scaffold tower is equipped with the second groove matched with the enchasing plate, and the monitor station is slided to the enchasing plate Afterwards, the enchasing plate can be risen and is embedded on the monitor station by the lifting rotation unit.
5. laptop lid panel automatic defect detecting device according to claim 3, which is characterized in that described to send Material unit further includes T shape connecting column, and the T shape connecting column includes that orthogonal horizontal cylindrical body and perpendicular cylindrical body and connection are horizontal The lower surface of the mediate cylindrical of cylindrical body and perpendicular cylindrical body, the horizontal cylindrical body and the monitor station is that can be detached from buckle to connect It connects, the horizontal cylindrical body is embedded in the lower surface of the monitor station, and the bottom end of the perpendicular cylindrical body and the electric pushrod connect It connects.
6. laptop lid panel automatic defect detecting device according to claim 5, which is characterized in that the work Make to be additionally provided with one and the perpendicular mutually matched U-lag of cylindrical body on the surface of platform, it is described in the monitor station taxiing procedures Perpendicular cylindrical body is located in the U-lag.
7. laptop lid panel automatic defect detecting device according to claim 3, which is characterized in that the wiping Wiping unit includes horizontal axis, hollow circuit cylinder sponge and horizontal axis support frame, and the middle cylindrical sponges are set on the horizontal axis, the cross The both ends of axis are fixed on the side of shading case by horizontal axis support frame, and the monitor station is pushed on enchasing plate by the electric pushrod During, the hollow circuit cylinder sponge can wipe the computer lid panel on the monitor station.
8. laptop lid panel automatic defect detecting device according to claim 7, which is characterized in that the cross It is equipped with cavity in axis, accommodates cleaning solution in the cavity, the bottom of the horizontal axis is equipped with multiple the be connected to the cavity One through-hole, hollow circuit cylinder sponge described in the first through hole face, the top of the horizontal axis are equipped with second through-hole, and described the Two-way hole is located at the outside of the hollow circuit cylinder sponge.
CN201811514923.3A 2018-12-12 2018-12-12 A kind of laptop lid panel automatic defect detecting device Pending CN109724986A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811514923.3A CN109724986A (en) 2018-12-12 2018-12-12 A kind of laptop lid panel automatic defect detecting device

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Application Number Priority Date Filing Date Title
CN201811514923.3A CN109724986A (en) 2018-12-12 2018-12-12 A kind of laptop lid panel automatic defect detecting device

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CN109724986A true CN109724986A (en) 2019-05-07

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CN201811514923.3A Pending CN109724986A (en) 2018-12-12 2018-12-12 A kind of laptop lid panel automatic defect detecting device

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CN110941518A (en) * 2019-11-22 2020-03-31 重庆电力高等专科学校 Computer hardware detects platform
CN115201111A (en) * 2022-07-18 2022-10-18 武昌首义学院 Device for detecting defects of artificial boards

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CN101266803A (en) * 2007-03-13 2008-09-17 昭和电工株式会社 Disk-shaped substrate manufacturing method and washing apparatus
CN102847688A (en) * 2011-06-30 2013-01-02 株式会社荏原制作所 Substrate cleaning method
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Publication number Priority date Publication date Assignee Title
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CN115201111B (en) * 2022-07-18 2023-04-18 武昌首义学院 Device for detecting defects of artificial boards

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Application publication date: 20190507