CN109719393A - The continuous producing method of hot arc and laser composite heat power supply metal compound nano body - Google Patents
The continuous producing method of hot arc and laser composite heat power supply metal compound nano body Download PDFInfo
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Abstract
The present invention relates to nano-powder production technical field, the continuous producing method of specifically hot arc and laser composite heat power supply metal compound nano body.By evaporating Multicarity nano powder preparing device using hot arc and laser composite heat power supply, laser power and hot arc power are increased, pass through the control to laser and hot arc power, to change the evaporation efficiency of anode, pass through the temperature gradient in control cavity, the nano-powder of different-grain diameter is formed, it can be achieved that continuous production.Preparation while a variety of heterogeneity powders can be achieved in the present invention, avoid the mutual pollution in powder preparation process, improve the purity of powder, production efficiency greatly improves, cost reduces, it industrially may be implemented constantly to switch between different cavitys, persistently evaporate the production effect of nano-powder, continuous production may be implemented under the premise of vacuum system satisfaction continues working.
Description
Technical field
The present invention relates to nano-powder production technical field, specifically a kind of metal compound nano body continuous production side
Method.
Background technique
DC arc plasma is to prepare nanoparticle, especially " core shell " type metal (alloy) nano-complex particle,
A kind of effective heat source of carbon associated materials and ceramic nano material tentatively realizes magnanimity production using the method at present, such as
Chinese patent application: a kind of multi-source direct-current arc automation nano-powder production system and method (201410189518.4), but
For large-scale industrial production, there is also many technical problems, be mainly manifested in how high efficiency, low cost, high-purity,
It is pollution-free, serialization to prepare nano-powder.
Existing metal compound nano body Preparation equipment and technique are mainly single in single-chamber body both for nano-powder
It generates in room and generates, classification, traps and handle, the powder Preparation equipment and technique of this single-chamber body have the following deficiencies:
1, production efficiency is lower, higher cost
Currently, the powder Preparation equipment and technique of single-chamber body, are protected completing vacuum drawn, powder generation and processing, vacuum
It holds in equal cyclic processes, the most of the time keeps with vacuum and recycle this process for vacuumizing, and is used in a preparation process
The time that this vacuum drawn and vacuum are kept accounts for 50%-70%, and the practical power production time is 15-20%, generally speaking,
Production efficiency is lower, simultaneously because vacuum drawn and vacuum keep and are iteratively repeated this process, will consume a large amount of energy, so that
Cost greatly increases.
2, purity is lower, there are cross contaminations
The powder Preparation equipment and technique of single-chamber body, after the nano-powder preparation of material always is completed in preparation, if again
The powder of other materials is prepared, at least there is the mutual pollution between 2 kinds of powders, to reduce the purity of nano-powder.
3, it cannot achieve continuous production truly
The powder Preparation equipment and technique of current single-chamber body, although the lasting feeding and confession of anode material can be passed through
It gives, realizes continuous production to a certain extent, but be limited by the size of anode material, continue feeding in material and supplied
Cheng Zhonghui there is a problem of not continuous enough, simultaneously because influence of the friction feeding to chamber vacuum degree, this method is extensive
Continuous production can not be realized under the premise of guaranteeing product quality in industrialized production, be phased out in the near future.
Currently, laser heat source is mainly used in field of material processing, realized by the complex method of laser heat source and electric arc
Increasing material manufacturing, such as Chinese patent application: a kind of compound welding gun of laser-(201510144976.0).Application swashs the present invention for the first time
Light and the compound method of electric arc heat source realize the industrialization production of nano-powder, realize laser heat source and arc-plasma
Effectively cooperation, improves the production efficiency of nano-powder.The type of laser of existing laser-electric arc composite heat source evaporation is mainly wrapped
It includes: CO2Gas laser beam, YAG Solid State Laser beam or diode laser beam, using continuous or pulsed output mode；Electric arc class
Type specifically includes that TIG electric arc, MIG electric arc, MAG electric arc or plasma arc, and direct current or DC pulse mode can be used.
Summary of the invention
The purpose of the present invention is to provide the continuous production sides of hot arc and laser composite heat power supply metal compound nano body
Method, to solve the problems mentioned in the above background technology.
To achieve the above object, the invention provides the following technical scheme:
The continuous producing method of hot arc and laser composite heat power supply metal compound nano body, it is characterised in that: including with
Lower step:
(1), it places target: the list of identical component or heterogeneity is installed on the anode fixator of different individual cavities
Metal or metal alloy target is anode, and the metal using fusing point higher than 3000 DEG C is cathode, on the cavity inner wall of the top of target
Opening sealing installation GaAs glass, and GaAs glass is cooled down；
(2), it vacuumizes: closing the hatch door of each individual cavity, open the vacuum valve of each individual cavity, to all cavitys
Vacuum degree is evacuated to not higher than 10-4Pa closes the vacuum valve of each individual cavity；
(3), it is filled with working gas: opening the air intake valve of each individual cavity, be passed through working gas according to the attribute of target:
When target is metallic compound, it is passed through working gas hydrogen；When target is monometallic, it is passed through working gas hydrogen and reaction gas
Body；
(4), the starting the arc: being passed through the DC voltage starting the arc between cathode and anode, and anode starts fusing steaming under arcing
Atomic state is sent out into, reaction gas is cracked into atomic state under arcing；
(5), laser is imported: by external laser light source by the way that in GaAs glass introduction chamber body, adjusting laser power is simultaneously right
Quasi- target；
(6), hot arc and laser composite heat power supply evaporate: laser power being increased to target evaporation power, while increasing electric arc
Power, target start to evaporate, by the power control to hot arc and laser composite heat power supply, to change the evaporation efficiency of anode；
(7), form powder: metallic atom and reaction gas atomic reaction generate metallic compound, control the temperature in cavity
Degree gradient is 25000-37000K/m, forms the metal compound nano body of different-grain diameter；
(8), metal nano powder is collected: being consumed and is completed to any one anode target material, closes the cavity and correspond to laser
Light source closes electric arc in the cavity, stands 12-24 hours, takes out the metal compound nano body in the cavity；
(9), change target: the cavity of powder taking-up is completed in cleaning, be put into it is identical as the target being put into before the cavity at
The monometallic or metal alloy target divided, closes the cavity hatch door, opens the vacuum valve of the cavity, be evacuated to the cavity
Vacuum degree is not higher than 10-4Pa closes the vacuum valve of the cavity, opens the air intake valve of the cavity, logical according to the attribute of target
Enter working gas: when target is metallic compound, being passed through working gas hydrogen；When target is monometallic, it is passed through working gas hydrogen
Gas and reaction gas are passed through the DC voltage starting the arc between cathode and anode, and anode starts to melt and flash under arcing
Atomic state, reaction gas are cracked into atomic state under arcing；
(10), continuous production: repeating the processing step of above-mentioned (4)-(9), realizes continuous production.
Metal of the fusing point higher than 3000 DEG C is tungsten, platinum or molybdenum in the step (1)；GaAs thickness of glass is 3-5mm.
It is 0.1 atmospheric pressure that hydrogen gas pressure is passed through in the step (3) or step (9), and reaction gas air pressure is 0.2-0.3
Atmospheric pressure.
The reaction gas being passed through in the step (3) or step (9) is oxygen, nitrogen, ammonia, alkanes gas or hydrogen sulfide
Gas.When reaction gas is oxygen, what is obtained is metallic oxide nano powder；When reaction gas is nitrogen or ammonia, obtain
Be metal nitride nano-powder；When reaction gas is alkanes gas, what is obtained is metal carbides nano-powder；Reaction gas
When body is hydrogen sulfide gas, what is obtained is nano metal sulfide powder；
DC voltage is 50-180V in the step (4) or step (9).
It is 300-400W that laser power is adjusted in the step (5).
Laser power is 500-3000W in step (6), and arc power 500-600W, evaporation efficiency range is in 0.6-
Change between 0.95.Evaporation efficiency is defined as η=P/P0, the range of η is according to different metals, and range is between 0.6-0.95
Variation, wherein magnesium, aluminium, calcium, zinc 0.9-0.95, iron, cobalt, nickel 0.8-0.9, molybdenum, niobium, tantalum 0.6-0.8.
The partial size of step (7) the metal compound nano body is 30-120nm.
The method of temperature gradient in the step (7) in control cavity is: by controlling the flow of cooling water or in chamber
Liquid nitrogen cooling tube is placed in body, to control cavity medium temperature degree gradient.
By controlling the flow of cooling water or placing liquid nitrogen cooling tube in cavity, to change temperature gradient in cavity, swash
The operative temperature of light and target material surface is 3000-5000K, and the temperature of cavity wall is 300K, temperature gradient 7000-14000K/
M, under different temperature gradients, diameter of nano particles is different, 7000-9000K/m, partial size 90-120nm, 9000-11000K/
M, partial size is 60-90nm, 110000-14000K/m, partial size 30-60nm.
Compared with prior art, the beneficial effects of the present invention are:
1, it realizes and is prepared while a variety of heterogeneity powders
It is mutually indepedent between multiple and different individual cavities, receiving for preparation heterogeneity can be evaporated in different cavitys
Rice flour body, the function of realizing different powders on one device while preparing.
2, the mutual pollution in powder preparation process is avoided, the purity of powder is improved
The nano-powder of same ingredient can be prepared in each individual cavity, it is therefore prevented that prepare different powder in a cavity
Body and the mutual pollution generated, further improve the purity of nano-powder.
3, production efficiency greatly improves, cost reduces
Multiple cavities use same set of pumped vacuum systems simultaneously, and vacuum system can not have to open and close repeatedly, significantly
The time vacuumized in production is reduced, production efficiency improves at least 30%, and production cost at least reduces 20%.
4, continuous production is realized
This continuous production technology of Multicarity, industrially may be implemented constantly to switch between different cavitys, persistently steam
Continuous production may be implemented under the premise of vacuum system satisfaction continues working in the production effect for sending out nano-powder.
Specific embodiment
Below in conjunction in the embodiment of the present invention, technical solution in the embodiment of the present invention is clearly and completely retouched
It states, it is clear that the described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.Based in the present invention
Embodiment, every other embodiment obtained by those of ordinary skill in the art without making creative efforts,
It shall fall within the protection scope of the present invention.
Embodiment 1
The continuous producing method of hot arc and laser composite heat power supply metal compound nano body, comprising the following steps:
(1), place target: the monometallic target that identical component is installed on the anode fixator of different individual cavities is
Anode, the metal using fusing point higher than 3000 DEG C is tungsten as cathode, and sealing installation is thick at the cavity inner wall upper opening of the top of target
Degree is the GaAs glass of 3mm, and cools down to GaAs glass；
(2), it vacuumizes: closing the hatch door of each individual cavity, open the vacuum valve of each individual cavity, to all cavitys
Vacuum degree is evacuated to not higher than 10-4Pa closes the vacuum valve of each individual cavity；
(3), it is filled with working gas: opening the air intake valve of each individual cavity, be passed through working gas hydrogen and reaction gas；
Being passed through hydrogen gas pressure is 0.1 atmospheric pressure, and reaction gas air pressure is 0.2-0.3 atmospheric pressure；The reaction gas being passed through is oxygen, is obtained
Be metallic oxide nano powder；
(4), the starting the arc: the 50V DC voltage starting the arc is passed through between cathode and anode, anode starts to melt under arcing
Atomic state is flashed to, reaction gas is cracked into atomic state under arcing；
(5), laser is imported: by external laser light source by adjusting laser power 300W in GaAs glass introduction chamber body
And it is directed at target；
(6), hot arc and laser composite heat power supply evaporate: laser power being increased to target evaporation power, while increasing electric arc
Power, target start to evaporate, by the power control to hot arc and laser composite heat power supply, to change the evaporation efficiency of anode；Swash
Optical power is 500W, arc power 500W, and evaporation efficiency range changes between 0.6-0.95.Evaporation efficiency be defined as η=
P/P0, according to different metals, range changes the range of η between 0.6-0.95, wherein and magnesium, aluminium, calcium, zinc 0.9-0.95,
Iron, cobalt, nickel 0.8-0.9, molybdenum, niobium, tantalum 0.6-0.8；
(7), form powder: metallic atom and reaction gas atomic reaction generate metallic compound, control the temperature in cavity
Degree gradient is 25000K/m, forms the metal compound nano body that partial size is 30-120nm；By the flow for controlling cooling water
Or liquid nitrogen cooling tube is placed in cavity, to change temperature gradient in cavity, the operative temperature of laser and target material surface is
3000K, the temperature of cavity wall are 300K, temperature gradient 7000-9000K/m, partial size 90-120nm；
(8), metal nano powder is collected: being consumed and is completed to any one anode target material, closes the cavity and correspond to laser
Light source closes electric arc in the cavity, stands 12 hours, takes out the metal compound nano body in the cavity；
(9), change target: the cavity of powder taking-up is completed in cleaning, be put into it is identical as the target being put into before the cavity at
The monometallic or metal alloy target divided, closes the cavity hatch door, opens the vacuum valve of the cavity, be evacuated to the cavity
Vacuum degree is not higher than 10-4Pa closes the vacuum valve of the cavity, opens the air intake valve of the cavity, logical according to the attribute of target
Enter working gas；
(10), continuous production: repeating the processing step of above-mentioned (4)-(9), realizes continuous production.
Embodiment 2
The continuous producing method of hot arc and laser composite heat power supply metal compound nano body, comprising the following steps:
(1), it places target: the metal alloy target of heterogeneity is installed on the anode fixator of different individual cavities
For anode, the metal platinum using fusing point higher than 3000 DEG C is cathode, and sealing installation is thick at the cavity inner wall upper opening of the top of target
Degree is the GaAs glass of 4mm, and cools down to GaAs glass；
(2), it vacuumizes: closing the hatch door of each individual cavity, open the vacuum valve of each individual cavity, to all cavitys
Vacuum degree is evacuated to not higher than 10-4Pa closes the vacuum valve of each individual cavity；
(3), it is filled with working gas: opening the air intake valve of each individual cavity, be passed through working gas hydrogen；It is passed through hydrogen gas
Pressure is 0.1 atmospheric pressure；
(4), the starting the arc: the 115V DC voltage starting the arc is passed through between cathode and anode, anode starts to melt under arcing
Change flashes to atomic state, and reaction gas is cracked into atomic state under arcing；
(5), laser is imported: by external laser light source by adjusting laser power 350W in GaAs glass introduction chamber body
And it is directed at target；
(6), hot arc and laser composite heat power supply evaporate: laser power being increased to target evaporation power, while increasing electric arc
Power, target start to evaporate, by the power control to hot arc and laser composite heat power supply, to change the evaporation efficiency of anode；Swash
Optical power is 1750W, arc power 550W, and evaporation efficiency range changes between 0.6-0.95.Evaporation efficiency be defined as η=
P/P0, according to different metals, range changes the range of η between 0.6-0.95, wherein and magnesium, aluminium, calcium, zinc 0.9-0.95,
Iron, cobalt, nickel 0.8-0.9, molybdenum, niobium, tantalum 0.6-0.8；
(7), form powder: metallic atom and reaction gas atomic reaction generate metallic compound, control the temperature in cavity
Degree gradient is 31000K/m, forms the metal compound nano body that partial size is 30-120nm；By the flow for controlling cooling water
Or liquid nitrogen cooling tube is placed in cavity, to change temperature gradient in cavity, the operative temperature of laser and target material surface is
4000K, the temperature of cavity wall are 300K, temperature gradient 9000-11000K/m, partial size 60-90nm；
(8), metal nano powder is collected: being consumed and is completed to any one anode target material, closes the cavity and correspond to laser
Light source closes electric arc in the cavity, stands 18 hours, takes out the metal compound nano body in the cavity；
(9), change target: the cavity of powder taking-up is completed in cleaning, be put into it is identical as the target being put into before the cavity at
The monometallic or metal alloy target divided, closes the cavity hatch door, opens the vacuum valve of the cavity, be evacuated to the cavity
Vacuum degree is not higher than 10-4Pa closes the vacuum valve of the cavity, opens the air intake valve of the cavity, logical according to the attribute of target
Enter working gas: when target is metallic compound, being passed through working gas hydrogen；When target is monometallic, it is passed through working gas hydrogen
Gas and reaction gas are passed through the DC voltage starting the arc between cathode and anode, and anode starts to melt and flash under arcing
Atomic state, reaction gas are cracked into atomic state under arcing；
(10), continuous production: repeating the processing step of above-mentioned (4)-(9), realizes continuous production.
Embodiment 3
The continuous producing method of hot arc and laser composite heat power supply metal compound nano body, comprising the following steps:
(1), place target: the monometallic target that heterogeneity is installed on the anode fixator of different individual cavities is
Anode, the metal molybdenum using fusing point higher than 3000 DEG C is cathode, sealing installation thickness at the cavity inner wall upper opening of the top of target
For the GaAs glass of 5mm, and GaAs glass is cooled down；
(2), it vacuumizes: closing the hatch door of each individual cavity, open the vacuum valve of each individual cavity, to all cavitys
Vacuum degree is evacuated to not higher than 10-4Pa closes the vacuum valve of each individual cavity；
(3), it is filled with working gas: opening the air intake valve of each individual cavity, be passed through working gas hydrogen and reaction gas；
Being passed through hydrogen gas pressure is 0.1 atmospheric pressure, and reaction gas air pressure is 0.3 atmospheric pressure；When the reaction gas being passed through is nitrogen or ammonia,
What is obtained is metal nitride nano-powder；
(4), the starting the arc: the 180V DC voltage starting the arc is passed through between cathode and anode, anode starts to melt under arcing
Change flashes to atomic state, and reaction gas is cracked into atomic state under arcing；
(5), laser is imported: by external laser light source by adjusting laser power 400W in GaAs glass introduction chamber body
And it is directed at target；
(6), hot arc and laser composite heat power supply evaporate: laser power being increased to target evaporation power, while increasing electric arc
Power, target start to evaporate, by the power control to hot arc and laser composite heat power supply, to change the evaporation efficiency of anode；Swash
Optical power is 3000W, arc power 600W, and evaporation efficiency range changes between 0.6-0.95.Evaporation efficiency be defined as η=
P/P0, according to different metals, range changes the range of η between 0.6-0.95, wherein and magnesium, aluminium, calcium, zinc 0.9-0.95,
Iron, cobalt, nickel 0.8-0.9, molybdenum, niobium, tantalum 0.6-0.8；
(7), form powder: metallic atom and reaction gas atomic reaction generate metallic compound, control the temperature in cavity
Degree gradient is 37000K/m, forms the metal compound nano body that partial size is 30-120nm；By the flow for controlling cooling water
Or liquid nitrogen cooling tube is placed in cavity, to change temperature gradient in cavity, the operative temperature of laser and target material surface is
5000K, the temperature of cavity wall are 300K, temperature gradient 110000-14000K/m, partial size 30-60nm；
(8), metal nano powder is collected: being consumed and is completed to any one anode target material, closes the cavity and correspond to laser
Light source closes electric arc in the cavity, stands 24 hours, takes out the metal compound nano body in the cavity；
(9), change target: the cavity of powder taking-up is completed in cleaning, be put into it is identical as the target being put into before the cavity at
The monometallic or metal alloy target divided, closes the cavity hatch door, opens the vacuum valve of the cavity, be evacuated to the cavity
Vacuum degree is not higher than 10-4Pa closes the vacuum valve of the cavity, opens the air intake valve of the cavity, logical according to the attribute of target
Enter working gas: when target is metallic compound, being passed through working gas hydrogen；When target is monometallic, it is passed through working gas hydrogen
Gas and reaction gas are passed through the DC voltage starting the arc between cathode and anode, and anode starts to melt and flash under arcing
Atomic state, reaction gas are cracked into atomic state under arcing；
(10), continuous production: repeating the processing step of above-mentioned (4)-(9), realizes continuous production.
Embodiment 4
Hot arc described in the present embodiment is each with the continuous producing method of laser composite heat power supply metal compound nano body
Step is in the same manner as in Example 1, difference are as follows:
Reaction gas is alkanes gas, and what is obtained is metal carbides nano-powder.
Embodiment 5
Hot arc described in the present embodiment is each with the continuous producing method of laser composite heat power supply metal compound nano body
Step is in the same manner as in Example 1, difference are as follows:
Reaction gas is hydrogen sulfide gas, and what is obtained is nano metal sulfide powder.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any label in claim should not be construed as limiting the claims involved.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (9)
1. the continuous producing method of hot arc and laser composite heat power supply metal compound nano body, it is characterised in that: including following
Step:
(1), it places target: the monometallic of identical component or heterogeneity is installed on the anode fixator of different individual cavities
Or metal alloy target is anode, the metal using fusing point higher than 3000 DEG C is cathode, the cavity inner wall upper opening of the top of target
Place's sealing installation GaAs glass, and GaAs glass is cooled down；
(2), it vacuumizes: closing the hatch door of each individual cavity, open the vacuum valve of each individual cavity, all cavitys are taken out true
Sky to vacuum degree is not higher than 10-4Pa closes the vacuum valve of each individual cavity；
(3), it is filled with working gas: opening the air intake valve of each individual cavity, be passed through working gas according to the attribute of target: target
When for metallic compound, it is passed through working gas hydrogen；When target is monometallic, it is passed through working gas hydrogen and reaction gas；
(4), the starting the arc: being passed through the DC voltage starting the arc between cathode and anode, and anode starts to melt and flash under arcing
Atomic state, reaction gas are cracked into atomic state under arcing；
(5), laser is imported: by external laser light source by adjusting laser power and alignment targets in GaAs glass introduction chamber body
Material；
(6), hot arc and laser composite heat power supply evaporate: laser power is increased into target evaporation power, while increasing arc power,
Target starts to evaporate, by the power control to hot arc and laser composite heat power supply, to change the evaporation efficiency of anode；
(7), form powder: metallic atom and reaction gas atomic reaction generate metallic compound, control the temperature ladder in cavity
Degree is 25000-37000K/m, forms the metal compound nano body of different-grain diameter；
(8), metal nano powder is collected: it consumes and completes to any one anode target material, close the cavity and correspond to laser light source,
Electric arc in the cavity is closed, 12-24 hours is stood, takes out the metal compound nano body in the cavity；
(9), change target: the cavity of powder taking-up is completed in cleaning, is put into the target identical component being put into before with the cavity
Monometallic or metal alloy target, close the cavity hatch door, open the vacuum valve of the cavity, are evacuated to vacuum to the cavity
Degree is not higher than 10-4Pa closes the vacuum valve of the cavity, opens the air intake valve of the cavity, is passed through work according to the attribute of target
Make gas: when target is metallic compound, being passed through working gas hydrogen；Target be monometallic when, be passed through working gas hydrogen and
Reaction gas is passed through the DC voltage starting the arc between cathode and anode, and anode, which starts to melt, under arcing flashes to atom
State, reaction gas are cracked into atomic state under arcing；
(10), continuous production: repeating the processing step of above-mentioned (4)-(9), realizes continuous production.
2. the continuous producing method of hot arc according to claim 1 and laser composite heat power supply metal compound nano body,
It is characterized by: metal of the fusing point higher than 3000 DEG C is tungsten, platinum or molybdenum in the step (1)；GaAs thickness of glass is 3-
5mm。
3. the continuous producing method of hot arc according to claim 1 and laser composite heat power supply metal compound nano body,
It is characterized by: being passed through hydrogen gas pressure in the step (3) or step (9) is 0.1 atmospheric pressure, reaction gas air pressure is 0.2-
0.3 atmospheric pressure.
4. the continuous producing method of hot arc according to claim 1 and laser composite heat power supply metal compound nano body,
It is characterized by: the reaction gas being passed through in the step (3) or step (9) is oxygen, nitrogen, ammonia, alkanes gas or sulphur
Change hydrogen.
5. the continuous producing method of hot arc according to claim 1 and laser composite heat power supply metal compound nano body,
It is characterized by: DC voltage is 50-180V in the step (4) or step (9).
6. the continuous producing method of hot arc according to claim 1 and laser composite heat power supply metal compound nano body,
It is characterized by: adjusting laser power in the step (5) is 300-400W.
7. the continuous producing method of hot arc according to claim 1 and laser composite heat power supply metal compound nano body,
It is characterized by: laser power is 500-3000W, arc power 500-600W in the step (6), evaporation efficiency range exists
Change between 0.6-0.95.
8. the continuous producing method of hot arc according to claim 1 and laser composite heat power supply metal compound nano body,
It is characterized by: the partial size of step (7) nano-powder is 30-120nm.
9. the continuous producing method of hot arc according to claim 1 and laser composite heat power supply metal compound nano body,
It is characterized by: the method for temperature gradient in the step (7) in control cavity is: by control cooling water flow or
Liquid nitrogen cooling tube is placed in cavity, to control cavity medium temperature degree gradient.
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