CN109696259A - A kind of redundant pressure sensor and preparation method - Google Patents
A kind of redundant pressure sensor and preparation method Download PDFInfo
- Publication number
- CN109696259A CN109696259A CN201811562809.8A CN201811562809A CN109696259A CN 109696259 A CN109696259 A CN 109696259A CN 201811562809 A CN201811562809 A CN 201811562809A CN 109696259 A CN109696259 A CN 109696259A
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- China
- Prior art keywords
- elastic element
- pressure chamber
- flexible sheet
- back side
- pressure sensor
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- Pending
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- 238000002360 preparation method Methods 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 9
- 230000008569 process Effects 0.000 claims abstract description 6
- 238000000151 deposition Methods 0.000 claims description 3
- 239000011888 foil Substances 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 3
- 238000004381 surface treatment Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000005538 encapsulation Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of redundant pressure sensor, including elastic element and impulse element, the back side of elastic element is equipped with pressure chamber, forms flexible sheet between pressure chamber and the front of elastic element；The front of the elastic element of pressure chamber face is prepared with multiple mutually independent strain bridges；The back side side of elastic element is connect with impulse component seal, and the tracting pressuring hole being connected with pressure chamber is provided on impulse element.Pressure sensor of the invention has many advantages, such as small in size, light-weight.The invention also discloses a kind of preparation method, comprising steps of S01, at the back side of elastic element opening up pressure chamber, flexible sheet is formed between pressure chamber and the front of elastic element；S02, multiple strain bridges are made on flexible sheet, form chip；S03, the back side side of the elastic element in chip and impulse element are welded and forms seal chamber；S04, lead packages complete assembly.Method of the invention has many advantages, such as simple process, easy to operate.
Description
Technical field
The invention mainly relates to pressure sensor technique field, a kind of redundant pressure sensor and preparation method are refered in particular to.
Background technique
The high reliability in sensor information channel is the premise of the normal works such as electronic monitoring, control system, and passes
Sensor Redundancy Design and measurement are to improve the important means of reliability, can avoid mono signal acquisition sensor failure and cause
Operating interruptions even damage, cause irremediable heavy economic losses and casualties, aerospace, weapons, ship,
It is more and more applied in the fields such as industry.The design of existing pressure redundant measurement, mainly using dual chip or multi-chip into
Row encapsulation measurement, or even directly adopt two or more sensors and be mounted on same pipe joint 4 and measure, as shown in Figure 1, from
And volume and weight needed for causing sensor redundancy installation is big, is unable to satisfy development of the Redundancy Design to small size, light weight
Demand.
Summary of the invention
The technical problem to be solved in the present invention is that, for technical problem of the existing technology, the present invention provides one
Small in size, the light-weight redundant pressure sensor of kind, and a kind of easy to operate, simple process preparation method is accordingly provided.
In order to solve the above technical problems, technical solution proposed by the present invention are as follows:
The back side of a kind of redundant pressure sensor, including elastic element and impulse element, the elastic element is equipped with blind hole
To form pressure chamber, flexible sheet is formed between the pressure chamber and the front of the elastic element；The pressure chamber face
The front of elastic element is prepared with multiple mutually independent strain bridges；The back side side of the elastic element and impulse member
Part is tightly connected, and is provided with tracting pressuring hole on the impulse element, the tracting pressuring hole is connected with the pressure chamber.
As a further improvement of the above technical scheme:
The quantity of the pressure chamber be it is multiple, each strain bridge is respectively arranged on the corresponding flexible sheet of each pressure chamber.
Multiple pressure chambers are mutually indepedent and are evenly distributed on elastic element centered on the axis of the elastic element.
The quantity of the blind hole is three.
The back side of the elastic element opens up fluted, and the groove is connected with each pressure chamber.
The back side side of the elastic element and the impulse element weld.
The invention also discloses a kind of preparation methods of redundant pressure sensor as described above, comprising steps of
S01, blind hole is opened up at the back side of elastic element to form pressure chamber, the front of the blind hole and the elastic element
Between form flexible sheet；
S02, multiple strain bridges are made on flexible sheet, form chip；
S03, the back side side of the elastic element in chip and impulse element are welded and forms seal chamber；
S04, lead packages complete assembly.
As a further improvement of the above technical scheme:
In step S02, mirror surface treatment is carried out to flexible sheet surface, passes through semiconductive thin film depositing operation and photoetching work
Skill prepares strain bridge on the flexible sheet.
In step S02, multiple foil gauges are pasted on flexible sheet and form multiple strain bridges.
Compared with the prior art, the advantages of the present invention are as follows:
Redundant pressure sensor of the invention is provided with multiple pressure chambers on same elastic element and forms elastic membrane
Independent strain bridge is arranged in piece on each flexible sheet, to be assembled into multiple chips on same elastic element, is realizing
On the basis of the pressure signal measurement of more redundancies, guarantee integrally-built encapsulation miniaturization and lightweight；Each strain bridge difference
Preparation on mutually independent flexible sheet, do not interfere with each other, arbitrarily all the way or two-way chip failure will not influence it is remaining
The performance and pressure signal of chip acquire.
The preparation method of redundant pressure sensor of the invention, it is simple process, easy to operate；Prepared redundant pressure passes
Sensor has the advantages that as described above.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the prior art.
Fig. 2 is schematic cross-sectional view (embodiment one) of the invention.
Fig. 3 is the schematic cross-sectional view (embodiment one) of elastic element of the present invention.
Fig. 4 is the overlooking structure diagram of elastic element of the present invention.
Fig. 5 is the structure chart (embodiment one) that strain bridge is prepared on elastic element of the invention.
Fig. 6 is overall structure diagram of the invention.
Fig. 7 is the structural schematic diagram (embodiment two) of elastic element of the present invention.
Fig. 8 is the structural schematic diagram (embodiment three) of elastic element of the present invention.
Figure label indicates: 1, elastic element；101, pressure chamber；102, flexible sheet；103, sealing surface；104, groove；
105, section；106, hard-core；2, strain bridge；201, strain resistor；3, impulse element；301, tracting pressuring hole；4, pipe joint.
Specific embodiment
Below in conjunction with Figure of description and specific embodiment, the invention will be further described.
Embodiment one:
As shown in Figures 2 to 6, the redundant pressure sensor of the present embodiment, including elastic element 1 (such as conventional elastomer)
With impulse element 3, the back side of elastic element 1 is equipped with multiple blind holes to form pressure chamber 101, pressure chamber 101 and elastic element 1
Flexible sheet 102 is formed between front；The front of the elastic element 1 of each 101 face of pressure chamber is prepared with strain bridge 2, answers
Power transformation bridge 2 is made of multiple strain resistors 201, mutually indepedent between each strain bridge 2；The back side side of elastic element 1 is (i.e. close
Cover 103) with impulse element 3 be tightly connected (such as weld), be provided with tracting pressuring hole 301 on impulse element 3, tracting pressuring hole 301 and
Pressure chamber 101 is connected.Redundant pressure sensor of the invention, be provided on same elastic element 1 multiple pressure chambers 101 with
Multiple flexible sheets 102 are formed, independent strain bridge 2 is set on each flexible sheet 102, thus in same elastic element 1
On be assembled into multiple chips, on the basis of realizing the pressure signal measurement of more redundancies, guarantee that integrally-built encapsulation minimizes
And lightweight；Each strain bridge 2 is prepared respectively on mutually independent flexible sheet 102, is not interfere with each other, arbitrarily all the way or two-way
Chip failure will not influence the performance and pressure signal acquisition of remaining chip.
In the present embodiment, the quantity of pressure chamber 101 is three, and three pressure chambers 101 are mutually indepedent and with elastic element 1
It is evenly distributed on centered on axis on elastic element 1；Each strain bridge 2 is then respectively arranged at the corresponding elasticity of each pressure chamber 101
On diaphragm 102.Certainly, the quantity of pressure chamber 101 is not defined herein, in other embodiments, two can also be used
It is a, four or more.
In the present embodiment, for the ease of the assembly between impulse element 3 and elastic element 1, opened at the back side of elastic element 1
Equipped with groove 104, groove 104 is connected with each pressure chamber 101.
The present invention further correspondingly discloses a kind of preparation method of redundant pressure sensor as described above, comprising steps of
S01, blind hole is opened up at the back side of elastic element 1 to form pressure chamber 101, pressure chamber 101 and elastic element 1 are just
Flexible sheet 102 is formed between face；In addition the excision on one side of elastic element 1 is formed into section 105, is convenient for subsequent strain bridge 2
Positioning；
S02, mirror surface treatment is carried out to 102 surface of flexible sheet, multiple strain bridges is then prepared on flexible sheet 102
2, form chip；It is of course also possible to form multiple strain bridges 2 by pasting multiple foil gauges；
S03, the back side side (i.e. sealing surface 103) of the elastic element 1 in chip and the welding of impulse element 3 are formed into sealing
Chamber；
S04, lead packages complete assembly.
In the present embodiment, in step S02, mirror is carried out to 102 surface of flexible sheet by abrasive polishing process
Reason；By semiconductive thin film depositing operation and photoetching process (belonging to common process, details are not described herein) prepared by strain bridge 2
On flexible sheet 102.
In the present embodiment, in step S04, according to the demand of measurement task, can optionally two-way strain bridge 2 carry out it is double
Redundant pressure measurement, or open on elastic element 1 double blind hole formed dual redundant pressure measurement, open three or more blind holes formed it is more
Redundant pressure measurement.
Embodiment two:
As shown in fig. 7, the present embodiment and the difference of embodiment one are only that: the quantity of pressure chamber 101 is one, i.e., corresponding
The quantity of flexible sheet 102 is also one, and each strain bridge 2 is then distributed on flexible sheet 102, is specifically existed with annular distribution
On flexible sheet 102.Other not described contents are the same as example 1, and details are not described herein.
Embodiment three:
As shown in figure 8, the difference of the present embodiment and embodiment one is only that: passing through hard-core 106 between each pressure chamber 101
(protrusion is machined into) is mutually isolated, to make between each flexible sheet 102 independently of each other, to avoid interfering with each other.Its
Its not described content is the same as example 1, and details are not described herein.
The above is only the preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-described embodiment,
All technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
For those of ordinary skill, several improvements and modifications without departing from the principles of the present invention should be regarded as protection of the invention
Range.
Claims (9)
1. a kind of redundant pressure sensor, which is characterized in that including elastic element (1) and impulse element (3), the elastic element
(1) the back side is equipped with blind hole to be formed pressure chamber (101), between the pressure chamber (101) and the front of the elastic element (1)
It is formed flexible sheet (102)；The front of the elastic element (1) of pressure chamber (101) face is prepared with multiple mutually independent
Strain bridge (2)；The back side side of the elastic element (1) and the impulse element (3) are tightly connected, the impulse element
(3) it is provided on tracting pressuring hole (301), the tracting pressuring hole (301) is connected with the pressure chamber (101).
2. redundant pressure sensor according to claim 1, which is characterized in that the quantity of the pressure chamber (101) is more
A, each strain bridge (2) is respectively arranged on the corresponding flexible sheet (102) of each pressure chamber (101).
3. redundant pressure sensor according to claim 2, which is characterized in that multiple pressure chambers (101) it is mutually indepedent and
It is evenly distributed on centered on the axis of the elastic element (1) on elastic element (1).
4. redundant pressure sensor according to claim 3, which is characterized in that the quantity of the blind hole is three.
5. redundant pressure sensor as claimed in any of claims 2 to 4, which is characterized in that the elastic element
(1) the back side opens up fluted (104), and the groove (104) is connected with each pressure chamber (101).
6. redundant pressure sensor as claimed in any of claims 1 to 4, which is characterized in that the elastic element
(1) back side side and the impulse element (3) is welded.
7. a kind of preparation method of the redundant pressure sensor as described in any one of claim 1 to 6, which is characterized in that
Comprising steps of
S01, blind hole is opened up at the back side of elastic element (1) to be formed pressure chamber (101), the blind hole and the elastic element
(1) flexible sheet (102) are formed between front；
S02, multiple strain bridges (2) are made on flexible sheet (102), form chip；
S03, the back side side of the elastic element (1) in chip and impulse element (3) welding are formed into seal chamber；
S04, lead packages complete assembly.
8. preparation method according to claim 7, which is characterized in that in step S02, to flexible sheet (102) surface
Mirror surface treatment is carried out, is prepared strain bridge (2) in the flexible sheet by semiconductive thin film depositing operation and photoetching process
(102) on.
9. preparation method according to claim 7, which is characterized in that in step S02, glued on flexible sheet (102)
It pastes multiple foil gauges and forms multiple strain bridges (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811562809.8A CN109696259A (en) | 2018-12-20 | 2018-12-20 | A kind of redundant pressure sensor and preparation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811562809.8A CN109696259A (en) | 2018-12-20 | 2018-12-20 | A kind of redundant pressure sensor and preparation method |
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| Publication Number | Publication Date |
|---|---|
| CN109696259A true CN109696259A (en) | 2019-04-30 |
Family
ID=66231842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811562809.8A Pending CN109696259A (en) | 2018-12-20 | 2018-12-20 | A kind of redundant pressure sensor and preparation method |
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| Country | Link |
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| CN (1) | CN109696259A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110044520A (en) * | 2019-05-29 | 2019-07-23 | 南京元感微电子有限公司 | The force snesor of pressure between measurement solid |
| CN112880799A (en) * | 2021-03-25 | 2021-06-01 | 梅特勒-托利多(常州)精密仪器有限公司 | Safety redundant sensor |
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| CN102980711A (en) * | 2011-09-06 | 2013-03-20 | 霍尼韦尔国际公司 | Packaged sensor with multiple sensors elements |
| CN104931194A (en) * | 2014-03-19 | 2015-09-23 | 阿尔斯通技术有限公司 | Probe for measuring pressure oscillations in the combustor of a gas turbine |
| CN105115659A (en) * | 2015-08-31 | 2015-12-02 | 中国电子科技集团公司第四十八研究所 | Multi-redundancy pressure-sensitive core body |
| US20150377729A1 (en) * | 2013-02-28 | 2015-12-31 | Hitachi Automotive Systems, Ltd. | Pressure detecting device |
| CN205027465U (en) * | 2015-05-21 | 2016-02-10 | 武汉中航传感技术有限责任公司 | Two remaining pressure tube structures |
| CN106525264A (en) * | 2016-12-20 | 2017-03-22 | 中国航天空气动力技术研究院 | Sputtering thin film temperature-pressure composite sensor and manufacturing method thereof |
| CN106995205A (en) * | 2013-04-30 | 2017-08-01 | 基德科技公司 | The method for manufacturing pressure sensor |
| CN206695932U (en) * | 2017-03-02 | 2017-12-01 | 南京沃天科技有限公司 | Triplex redundance pressure sensor |
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2018
- 2018-12-20 CN CN201811562809.8A patent/CN109696259A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2483705Y (en) * | 2001-05-31 | 2002-03-27 | 湖南长沙索普测控技术有限公司 | Nano pressure sensor |
| CN102980711A (en) * | 2011-09-06 | 2013-03-20 | 霍尼韦尔国际公司 | Packaged sensor with multiple sensors elements |
| US20150377729A1 (en) * | 2013-02-28 | 2015-12-31 | Hitachi Automotive Systems, Ltd. | Pressure detecting device |
| CN106995205A (en) * | 2013-04-30 | 2017-08-01 | 基德科技公司 | The method for manufacturing pressure sensor |
| CN104931194A (en) * | 2014-03-19 | 2015-09-23 | 阿尔斯通技术有限公司 | Probe for measuring pressure oscillations in the combustor of a gas turbine |
| CN205027465U (en) * | 2015-05-21 | 2016-02-10 | 武汉中航传感技术有限责任公司 | Two remaining pressure tube structures |
| CN105115659A (en) * | 2015-08-31 | 2015-12-02 | 中国电子科技集团公司第四十八研究所 | Multi-redundancy pressure-sensitive core body |
| CN106525264A (en) * | 2016-12-20 | 2017-03-22 | 中国航天空气动力技术研究院 | Sputtering thin film temperature-pressure composite sensor and manufacturing method thereof |
| CN206695932U (en) * | 2017-03-02 | 2017-12-01 | 南京沃天科技有限公司 | Triplex redundance pressure sensor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110044520A (en) * | 2019-05-29 | 2019-07-23 | 南京元感微电子有限公司 | The force snesor of pressure between measurement solid |
| CN110044520B (en) * | 2019-05-29 | 2021-02-26 | 南京元感微电子有限公司 | Force sensor for measuring pressure between solids |
| CN112880799A (en) * | 2021-03-25 | 2021-06-01 | 梅特勒-托利多(常州)精密仪器有限公司 | Safety redundant sensor |
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