CN109696138B - Cylindricity detection device and eccentric calibration method thereof - Google Patents
Cylindricity detection device and eccentric calibration method thereof Download PDFInfo
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- CN109696138B CN109696138B CN201910156873.4A CN201910156873A CN109696138B CN 109696138 B CN109696138 B CN 109696138B CN 201910156873 A CN201910156873 A CN 201910156873A CN 109696138 B CN109696138 B CN 109696138B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
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Abstract
The invention discloses a cylindricity detection device and an eccentric calibration method thereof. The rotary component and the vertical transmission component are installed on the workbench, the rotary component is located right above the vertical transmission component, the cylindrical device to be detected is placed on the vertical transmission component and driven to move up and down by the vertical transmission component, and the rotary component detects the cylindrical device to be detected. The three-position cylinder is started to drive the three-jaw chuck to lift up and down to adjust the distance, the servo motor drives the spectral confocal probe to rotate around the rotation center, a first distance value of the upper surface edge of the cylindrical device to be detected is recorded under any rotation angle, the spectral confocal probe is rotated 180 degrees, a second distance value is measured, multiple groups of measured values are obtained through repeated measurement, the rotation radius corresponding to each group of measured values is obtained, the rotation radius value corresponding to the peak value of Gaussian distribution is extracted as the final rotation radius, and therefore the radius of the cylindrical device to be detected is corrected. The invention has simple operation, convenient clamping and high measurement precision.
Description
Technical Field
The invention relates to the field of cylindricity measurement, in particular to a cylindricity detection device and an eccentric calibration method thereof.
Background
The study of cylindricity errors was developed based on the study of roundness errors. The measurement of cylindricity errors is somewhat more complicated than the measurement of roundness errors. The cylindricity is measured by comprehensively considering the measured data of the sections of a plurality of workpieces by using a proper mathematical model, and finally obtaining the cylindricity error value of the workpieces. In recent years, the cylindricity error measuring technology has been greatly developed, and cylindricity meters are produced at home and abroad. At present, various detection tools and methods at home cannot reasonably and economically accurately measure precise parts. Meanwhile, the cylindricity measuring device is high in price and high in environmental requirement, and the calibration of the instrument is also greatly insufficient, so that the further improvement of the product quality is influenced. The high-precision measuring device has very high requirements on the processing technology, certain deviation can not be avoided in the existing processing technology, the circle center of the spectral confocal probe is not necessarily coincident with the circle center of the measured period in the measurement process of the device, the rotating paths of the probe in different measuring directions can be circular rings with the radius r instead of fixed-point rotation, and measurement errors can occur. Therefore, developing a cylindricity detection device and a calibration method with high cost performance and high accuracy is an effective way to improve measurement accuracy.
Disclosure of Invention
In order to solve the problem of low cylindricity measurement accuracy and improve the measurement accuracy, the invention aims to provide a cylindricity measurement device and an eccentric calibration method thereof.
The technical scheme adopted by the invention is as follows:
1. cylindricity detection device
The device comprises a workbench, a rotating assembly and a vertical transmission assembly, wherein the rotating assembly and the vertical transmission assembly are arranged on the workbench, the rotating assembly is positioned right above the vertical transmission assembly, a cylindrical device to be tested is placed on the vertical transmission assembly and driven by the vertical transmission assembly to move up and down, and the rotating assembly detects cylindricity of the cylindrical device to be tested.
The vertical transmission assembly comprises a three-jaw chuck, a three-position cylinder, a connecting cylinder, a grabbing disc fixing block and a lifting rod, wherein the lower end of the three-position cylinder is fixed on a workbench through a cylinder bottom plate, a through hole is formed in the cylinder bottom plate, the cylinder bottom plate is fixed on the workbench through screws and nuts assembled in the through hole, the upper end of the three-position cylinder and the lower end of the three-jaw chuck are connected through the connecting cylinder, three fixing clamping blocks at the upper end of the three-jaw chuck jointly clamp a cylindrical device to be tested, one side of the peripheral surface of the three-jaw chuck is fixedly connected with the grabbing disc fixing block, the grabbing disc fixing block is sleeved on the lifting rod which is vertically fixed, the three-jaw chuck drives the three-jaw chuck to move up and down through the grabbing disc fixing block, and the three-jaw chuck vertically lifts along the lifting rod, and the three-position cylinder is used for adjusting the vertical position of the cylindrical device to be tested.
The rotating assembly comprises a servo motor and a spectral confocal measuring probe, the servo motor is fixed on a workbench right above the vertical transmission assembly through a motor bottom plate, a motor shaft of the servo motor downwards penetrates through the workbench to be connected with the spectral confocal probe, a probe end of the spectral confocal probe faces to the upper surface of a measured cylindrical device, and the servo motor drives the spectral confocal probe to rotate, so that the spectral confocal probe rotates by taking a rotation center as a circle center.
Preferably, the servo motor is fixedly connected with the spectral confocal probe through a connecting groove, a motor shaft of the servo motor is fixed to the upper portion of the connecting groove through a first fixing pin, and a non-probe end of the spectral confocal probe is fixed to the lower portion of the connecting groove through a second fixing pin.
Preferably, the workbench comprises a working frame, a transverse bar and vertical bars, wherein a vertical transmission component is arranged in the middle of the upper surface of the working frame, the vertical bars are vertically fixed on the working frames on two sides of the vertical transmission component respectively, the lower ends of the vertical bars are fixed on the upper surface of the working frame through connecting plates, the upper ends of the two vertical bars are connected through the transverse bars parallel to the upper surface of the working frame, a through hole for a motor shaft of a servo motor to pass through is formed in the middle of the transverse bar, and the center of the through hole and the center of a three-grab chuck are arranged on the same round mandrel.
Preferably, the workbench is further provided with a display screen, a power key, an ascending key, a descending key and a rotary key, the display screen is connected with the workbench through a connecting rod and forms a revolute pair, the power key is respectively connected with the three-position air cylinder and the servo motor to control the start and stop of the three-position air cylinder and the servo motor, the ascending key and the descending key are connected with the three-position air cylinder to control the up-down lifting of the three-position air cylinder, and the rotary key is connected with the servo motor to control the start and stop of the servo motor.
2. An eccentric calibration method for a cylindricity detection device comprises the following steps:
step a: the measured cylindrical device is placed on a three-jaw chuck for positioning and clamping, and a three-position cylinder is started to drive the three-jaw chuck to vertically lift up and down along a lifting rod so as to adjust the distance between the probe end of the spectral confocal probe and the upper surface of the measured cylindrical device;
step b: the servo motor drives the spectral confocal probe to rotate around the rotation center, as shown in fig. 4, and the spectrum is shared due to the existence of the eccentricityThe rotation center of the focal probe is not coincident with the circle center of the upper surface of the measured cylindrical device, so that the rotation path of the spectral confocal probe does not rotate at a fixed point but takes the rotation center as the circle center to do rotary motion with the radius r, and a first horizontal distance value m from the edge of the upper surface of the measured cylindrical device under any rotation angle of the rotation of the spectral confocal probe is recorded 1 Rotating the spectral confocal probe by 180 degrees on the basis of the current rotation angle, and measuring a second horizontal distance value m of the spectral confocal probe from the edge of the upper surface of the measured cylindrical device again 2 Since the angle difference between the front and rear measurements is 180 °, then m 1 、m 2 Is necessarily positioned on a straight line passing through the rotation center of the spectrum confocal probe; let m 1 And m 2 A set of measurements taken as spectral confocal probe measurements;
as shown in fig. 5, step c: the spectral confocal probe rotates for a complete circle, a plurality of first horizontal distance values are obtained through measurement, namely, the horizontal distance value of the spectral confocal probe at the edge of the upper surface of the measured cylindrical device is taken as a maximum distance value l under different rotation angles 2 With the addition of the longest determination, then l 2 The center of the upper surface of the measured cylindrical device is crossed, and then the servo motor drives the spectral confocal probe to obtain a maximum distance value l 2 Rotating 180 degrees again on the basis of the corresponding rotation angle, and measuring to obtain a minimum distance value l 1 L is 1 、l 2 On the same straight line, and l 1 、l 2 The connecting line of the (a) is the longest chord (the chord with the diameter) passing through the center of the circle on the upper surface of the measured cylindrical device;
step d: according to the crossed chord theorem, it is known that:
(l 1 +r)(l 2 +r)＝(r+m 1 )(m 2 +r)
simplifying and obtaining: l (L) 1 l 2 +l 1 +rl 2 +r 2 ＝m 1 m 2 +m 1 r+m 2 r+r 2
Thereby, the rotation radius r of the spectral confocal probe (24) can be obtained:
the calculation formula of the eccentricity s of the center of rotation of the spectral confocal probe from the center of the circle of the upper surface of the measured cylindrical device is as follows:
step e: repeating the step b to obtain a plurality of groups of measured values, obtaining the rotating radius of the spectral confocal probe corresponding to each group of measured values according to the step d, enabling the numerical values formed by all the rotating radiuses to follow Gaussian distribution, extracting the rotating radius corresponding to the peak value of the Gaussian distribution as the rotating radius r of the spectral confocal probe which is finally determined, wherein the connecting line direction of the circle center of the upper surface of the cylindrical device to be measured and the rotating center of the spectral confocal probe is the eccentric direction, thereby determining the eccentric distance, the rotating radius of the probe and the eccentric direction, completing the eccentric calibration of the device, and entering the radius calibration of the cylindrical device to be detected in the step e;
step f: the cylindrical device to be detected is installed and adjusted according to the step a, the spectral confocal probe measures a group of measured values in the eccentric direction according to the step b, the first horizontal distance value and the second horizontal distance value in the group of measured values are respectively marked as D and D, and then the circle center of the spectral confocal probe of the device obtained by manufacturing is not necessarily coincident with the circle center of the measured period through calculation and correction of the method, and the problem that the rotating paths of the probe in different measuring directions are possibly circular rings with the radius r instead of fixed-point rotation can be solved.
The radius R of the cylindrical device to be inspected is thus obtained:
the high-precision measuring device has very high requirements on the processing technology, certain deviation can not be avoided in the existing processing technology, the circle center of the spectral confocal probe is not necessarily coincident with the circle center of the measured period in the measurement process of the device, the rotating paths of the probe in different measuring directions can be circular rings with the radius r instead of fixed-point rotation, and measurement errors can occur. Therefore, the measurement of the invention uses the eccentric calibration method to calibrate, the device is eccentrically calibrated before the device is used, the cylindrical device to be detected is corrected according to the data obtained by the eccentric calibration, the measurement error is reduced, and the high-precision measurement of cylindricity is realized.
The invention has the beneficial effects that:
1. the invention adopts a vertical operation table structure, and is easy to operate, maintain and improve.
2. For the measured cylindrical devices with different sizes, the measured cylindrical devices with different inner diameters can be measured through a three-jaw chuck.
3. The device adopts a strict eccentric calibration method, has high measurement precision, and can realize high-precision measurement of cylindricity.
4. The vibration-proof pad is installed at the bottom of the working frame of the device, so that the stability of the device can be improved.
Drawings
Fig. 1 is a front view of the present invention.
Fig. 2 is a front view of the rotating assembly.
Fig. 3 is a front view of the vertical drive assembly.
Fig. 4 is a schematic diagram of the error source of the device of the present invention.
Fig. 5 is a schematic calibration of the device of the present invention.
Fig. 6 is a flowchart of an eccentricity calibration method of the present invention.
In the figure: 1. the device comprises a workbench, a vertical transmission assembly, a rotating assembly, a vertical bar, a transverse bar, a connecting plate, a connecting rod, a 8 display screen, a 9 working frame, a 10 power key, a 11 ascending key, a 12 descending key, a 13 rotary key, a 14 measured cylindrical device, a 15 screw, a 16 nut, a 17 three-jaw chuck, a 18 three-position cylinder, a 19 connecting cylinder, a 20 cylinder bottom plate, a 21 grabbing plate fixing block, a 22 lifting rod, a 23 servo motor, a 24 spectral confocal measuring probe, a 25 connecting groove, a 26 motor bottom plate, a 27 first fixing pin, a 28 second fixing pin and a 29 shock-proof pad.
Detailed Description
The invention is further described below with reference to the drawings and examples.
As shown in fig. 1, a rotary assembly 3 and a vertical transmission assembly 2 are installed on a workbench 1, the rotary assembly 3 is located right above the vertical transmission assembly 2, a cylinder device 14 to be measured is placed on the vertical transmission assembly 2 and is driven to move up and down by the vertical transmission assembly 2, and the rotary assembly 3 detects cylindricity of the cylinder device 14 to be measured.
As shown in fig. 1, a vertical transmission component 2 is installed in the middle of the upper surface of a working frame 9, vertical bars 4 are vertically fixed on the working frames 9 on two sides of the vertical transmission component 2 respectively, the lower ends of the vertical bars 4 are fixed on the upper surface of the working frame 9 through connecting plates 6, the upper ends of the two vertical bars 4 are connected through a transverse bar 5 parallel to the upper surface of the working frame 9, a through hole for a motor shaft of a servo motor 23 to pass through is formed in the middle of the transverse bar 5, and the center of the through hole and the center of a three-grab chuck 17 are on the same round mandrel. The rotating assembly 3 is arranged in the middle of the cross bar 5, and a motor shaft of the servo motor 23 passes through a through hole of the cross bar 5 and is fixedly connected with the spectral confocal probe 24 through a connecting groove 25.
In specific implementation, the workbench 1 is further provided with a display screen 8, a power key 10, an ascending key 11, a descending key 12 and a rotary key 13, the display screen 8 is connected to the side of the workbench 9 through a connecting rod 7 for displaying measurement values, the connecting rod 7 comprises two hinged connecting rods, one end of the connecting rod 7 is connected with the display screen 8, the other end of the connecting rod 7 is fixedly connected with the workbench 9, and the display screen 8 is connected with the workbench through the connecting rod 7 and forms a revolute pair, so that the position of the display screen 8 relative to the workbench 9 is adjustable. The display screen 8 is connected to the computer via a data line, so that the measured values are displayed on the computer.
The power key 10 is respectively connected with the three-position air cylinder 18 and the servo motor 23 to control the start and stop of the three-position air cylinder 18 and the servo motor 23, the ascending key 11 and the descending key 12 are connected with the three-position air cylinder 18 to control the up and down lifting of the three-position air cylinder 18, and the rotary key 13 is connected with the servo motor 23 to control the start and stop of the servo motor 23.
The four corners of the bottom of the working frame 9 are respectively provided with a shockproof pad 29.
As shown in fig. 3, the three-position cylinder 18, the connecting cylinder 19 and the three-jaw chuck 17 are sequentially connected from bottom to top in the vertical direction, the lower end of the three-position cylinder 18 is fixed on the workbench 1 through the cylinder bottom plate 20, the cylinder bottom plate 20 is provided with a through hole, the cylinder bottom plate 20 is fixed on the workbench 1 through a screw 15 and a nut 16 assembled in the through hole, the upper end of the three-position cylinder 18 and the lower end of the three-jaw chuck 17 are connected through the connecting cylinder 19, three fixed clamping blocks at the upper end of the three-jaw chuck 17 jointly clamp the cylindrical device 14 to be tested, one side of the outer peripheral surface of the three-jaw chuck 17 is fixedly connected with a grabbing disc fixing block 21, the grabbing disc fixing block 21 is sleeved on a vertically fixed lifting rod 22, the three-position cylinder 18 drives the three-jaw chuck 17 to move up and down, the three-jaw chuck 17 vertically lifts along the lifting rod 22 through the grabbing disc fixing block 21, and the three-position cylinder 18 is used for adjusting the vertical position of the cylindrical device 11 to be tested. The lifting rod 22 is vertically fixed on one side of the three-position air cylinder 18, the lifting rod 22 is parallel to the vertical bar 4, the upper end of the lifting rod 22 is fixed on the transverse bar 5, and the lower end of the lifting rod 22 is fixed on the working frame 9.
As shown in fig. 2, the rotating assembly 3 includes a servo motor 23 and a spectral confocal measuring probe 24, the servo motor 23 is fixed on the workbench 1 right above the vertical transmission assembly 2 through a motor bottom plate 26, a motor shaft of the servo motor 23 passes through the workbench 1 downwards to be connected with the spectral confocal probe 24, a probe end of the spectral confocal probe 24 faces to the upper surface of the measured cylindrical device 14, and the servo motor 23 drives the spectral confocal probe 24 to rotate, so that the spectral confocal probe 24 makes a rotating motion with a radius r around a rotation center, and the spectral confocal probe 24 is measured with values of different directions of the cylindrical device 14. As shown in fig. 4, the center of rotation of the spectral confocal probe 24 does not coincide with the center of the upper surface of the cylindrical device under test 14 due to the eccentricity.
In a specific implementation, the servo motor 23 is fixedly connected with the spectral confocal probe 24 through a connecting groove 25, a motor shaft of the servo motor 23 is fixed to the upper portion of the connecting groove 25 through a first fixing pin 27, and a non-probe end of the spectral confocal probe 24 is fixed to the lower portion of the connecting groove 25 through a second fixing pin 28.
In the implementation, the invention adjusts the internal air pressure of the three-position air cylinder 18 by inputting and outputting the air hole of the three-position air cylinder 18 so as to control the movement axis of the three-position air cylinder 18 to move; the cylinder device 14 to be measured is clamped by adjusting the internal air pressure through the input and output of air in the air hole of the three-jaw chuck 17.
As shown in fig. 5, the cylinder device 14 to be measured is driven to vertically move by the three-position cylinder 18, so that the cylinder device 14 to be measured moves to an optimal measurement position, and the spectral confocal measurement probe 24 is driven to rotate by the servo motor 23 to perform measurement on the cylinder device 14 to be measured in different directions.
As shown in fig. 6, the specific working procedure of the present invention is as follows:
first, the cylinder device 14 to be measured is placed on the three-jaw chuck 17 to be clamped. The method specifically comprises the following steps: the cylindrical device 14 to be measured is clamped and fixed through the three-jaw chuck 17, and three fixed clamping blocks on the three-jaw chuck 17 are simultaneously pushed in through adjusting air pressure in the three-jaw chuck, so that the cylindrical device 14 to be measured can be tightly fixed in the center of the three-jaw chuck 17.
Next, the optimum measuring position of the cylinder device 14 to be measured is set by a key on the table. The method specifically comprises the following steps: pressing the power key 10 causes the table to start working. The three-position cylinder 18 drives the cylinder device 14 to be measured to move up and down through the up key 11 and the down key 12, so that the vertical direction position of the cylinder device 14 to be measured is adjusted, and the up key 11 or the down key 12 is released when the cylinder device to be measured moves to the optimal measurement position. The servo motor 23 is started by pressing the rotary key 14, so that the servo motor 23 drives the spectral confocal measuring probe 24 to rotate, the lengths of the spectral confocal measuring probe 24 at different rotation angles from the edges of the upper surface of the measured cylindrical device 14 are measured in the rotation process of the spectral confocal measuring probe 24, namely, the values of different orientations of the spectral confocal measuring probe 24 are measured, and the rotation radius r and the eccentricity s of the spectral confocal measuring probe 24 are obtained after correction calculation as shown in fig. 5.
Then, the cylindrical device to be detected is installed and debugged according to the working process, the spectral confocal probe is used for correcting and calculating according to a group of measured values in the eccentric direction, and then the measured result (namely the corrected radius R) is displayed on the display screen 8 after correction calculation is carried out according to the eccentric calibration method of the invention, so that the detection of the cylindrical device to be detected is finished, and the measuring device is closed after the power key 10 is pressed down after the measurement is finished.
The embodiment of the invention realizes the measurement of the cylindricity of the device, and is convenient to clamp and safe to test. The measurement error of the cylindricity of the device can be greatly eliminated through the calibration method, the measurement accuracy is high, and the high-accuracy measurement of the cylindricity can be realized.
Claims (4)
1. An eccentric calibration method of a cylindricity detection device is characterized by comprising the following steps of: the cylindricity detection device comprises a workbench (1), a rotating assembly (3) and a vertical transmission assembly (2), wherein the rotating assembly (3) and the vertical transmission assembly (2) are arranged on the workbench (1), the rotating assembly (3) is positioned right above the vertical transmission assembly (2), a detected cylindrical device (14) is placed on the vertical transmission assembly (2) and is driven by the vertical transmission assembly (2) to move up and down, and the rotating assembly (3) detects cylindricity of the detected cylindrical device (14);
the vertical transmission assembly (2) comprises a three-jaw chuck (17), a three-position air cylinder (18), a connecting cylinder (19), a grabbing disc fixing block (21) and a lifting rod (22), wherein the lower end of the three-position air cylinder (18) is fixed on the workbench (1) through an air cylinder bottom plate (20), the upper end of the three-position air cylinder (18) is connected with the lower end of the three-jaw chuck (17) through the connecting cylinder (19), three fixing clamping blocks at the upper end of the three-jaw chuck (17) jointly clamp a cylinder device (14) to be tested, one side of the peripheral surface of the three-jaw chuck (17) is fixedly connected with the grabbing disc fixing block (21), the grabbing disc fixing block (21) is sleeved on the lifting rod (22) which is vertically fixed, and the three-jaw chuck (17) is driven to move up and down through the grabbing disc fixing block (21), so that the three-jaw chuck (17) is vertically lifted up and down along the lifting rod (22);
the rotating assembly (3) comprises a servo motor (23) and a spectral confocal measuring probe (24), the servo motor (23) is fixed on a workbench (1) right above the vertical transmission assembly (2) through a motor bottom plate (26), a motor shaft of the servo motor (23) downwards penetrates through the workbench (1) to be connected with the spectral confocal probe (24), a probe end of the spectral confocal probe (24) faces to the upper surface of a measured cylindrical device (14), and the servo motor (23) drives the spectral confocal probe (24) to rotate so that the spectral confocal probe (24) rotates by taking a rotation center as a circle center;
the eccentricity calibration method of the cylindricity detection device comprises the following steps:
step a: the cylindrical device (14) to be measured is placed on a three-jaw chuck (17) for positioning and clamping, and a three-position cylinder (18) is started to drive the three-jaw chuck (17) to vertically lift up and down along a lifting rod (22) so as to adjust the distance between the probe end of a spectrum confocal probe (24) and the upper surface of the cylindrical device (14) to be measured;
step b: a servo motor (23) drives a spectral confocal probe (24) to rotate around a rotation center, and a first horizontal distance value m from the upper surface edge of a measured cylindrical device (14) under any rotation angle of the spectral confocal probe (24) is recorded 1 Rotating the spectral confocal probe (24) by 180 degrees, and measuring a second horizontal distance value m of the spectral confocal probe (24) from the upper surface edge of the measured cylindrical device (14) again ２ Will m 1 And m is a set of measurements measured by a spectral confocal probe (24);
step c: the spectral confocal probe (24) rotates for a complete circle, a plurality of first horizontal distance values are obtained by measurement, and the maximum value is taken as a maximum distance value l 2 Then the servo motor (23) drives the spectral confocal probe (24) to obtain the maximum distance value l 2 Rotating 180 degrees again on the basis of the corresponding rotation angle, and measuring to obtain a minimum distance value l 1 ；
Step d, according to the theorem of the crossed strings, the following steps are shown:
(l 1 +r)(l 2 +r)＝(r+m 1 )(m 2 +r)
thereby, the rotation radius of the spectrum confocal probe (24) can be obtained
The calculation formula of the eccentricity s of the rotation center of the spectral confocal probe (24) from the center of the circle of the upper surface of the measured cylindrical device (14) is as follows:
step e: repeating the step b to obtain a plurality of groups of measured values, obtaining the rotating radius of the spectral confocal probe (24) corresponding to each group of measured values according to the step d, subjecting the numerical values formed by all the rotating radiuses to Gaussian distribution, extracting the rotating radius corresponding to the peak value of the Gaussian distribution as the rotating radius r of the spectral confocal probe (24) which is finally determined, wherein the connecting line direction of the circle center of the upper surface of the cylindrical device (14) to be measured and the rotating center of the spectral confocal probe (24) is the eccentric direction, thereby determining the eccentric distance, the rotating radius of the probe and the eccentric direction, completing the eccentric calibration of the device, and entering the radius calibration of the cylindrical device to be detected in the step e;
step f: the cylindrical device to be detected is installed and adjusted according to the step a, a set of measurement values in the eccentric direction are measured by a spectral confocal probe (24) according to the step b, and a first horizontal distance value and a second horizontal distance value in the set of measurement values are respectively marked as D and D, so that the radius R of the cylindrical device to be detected is obtained:
2. the eccentricity calibration method of a cylindricity inspection apparatus according to claim 1, wherein:
the servo motor (23) is fixedly connected with the spectral confocal probe (24) through a connecting groove (25), a motor shaft of the servo motor (23) is fixed to the upper portion of the connecting groove (25) through a first fixing pin (27), and a non-probe end of the spectral confocal probe (24) is fixed to the lower portion of the connecting groove (25) through a second fixing pin (28).
3. The eccentricity calibration method of a cylindricity measuring device according to claim 2, wherein: the workbench (1) comprises a working frame (9), a transverse bar (5) and vertical bars (4), wherein a vertical transmission component (2) is mounted in the middle of the upper surface of the working frame (9), the vertical bars (4) are vertically fixed on the working frames (9) on two sides of the vertical transmission component (2) respectively, the lower ends of the vertical bars (4) are fixed on the upper surface of the working frame (9) through connecting plates (6), the upper ends of the two vertical bars (4) are connected through the transverse bar (5) parallel to the upper surface of the working frame (9), a through hole for a motor shaft of a servo motor (23) to penetrate is formed in the middle of the transverse bar (5), and the center of the through hole and the center of a three-grabbing chuck (17) are arranged on the same round mandrel.
4. The eccentricity calibration method of a cylindricity measuring device according to claim 1, wherein: the workbench (1) is further provided with a display screen (8), a power key (10), an ascending key (11), a descending key (12) and a rotary key (13), wherein the display screen (8) is connected with the workbench (1) through a connecting rod (7) to form a revolute pair, the power key (10) is respectively connected with a three-position air cylinder (18) and a servo motor (23) to control the start and stop of the three-position air cylinder (18) and the servo motor (23), the ascending key (11) and the descending key (12) are both connected with the three-position air cylinder (18) to control the up-down lifting of the three-position air cylinder (18), and the rotary key (13) is connected with the servo motor (23) to control the start and stop of the servo motor (23).
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| CN110142518B (en) * | 2019-05-21 | 2020-11-13 | 奔腾激光(温州)有限公司 | Method for detecting precision of rotation center for laser cutting and adjusting device thereof |
| CN110196013B (en) * | 2019-06-28 | 2021-01-01 | 长春理工大学 | Clamp for eccentric measurement |
| CN111001681A (en) * | 2019-12-30 | 2020-04-14 | 江苏罡阳股份有限公司 | Coaxiality automatic detection and deviation rectification mechanism based on magnetic flux change |
| CN111933368B (en) * | 2020-08-10 | 2022-01-07 | 扬州市江华电力器材有限公司 | Production process of annular grading ring |
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