CN109687274A - A kind of all solid laser for lasing 350nm laser - Google Patents
A kind of all solid laser for lasing 350nm laser Download PDFInfo
- Publication number
- CN109687274A CN109687274A CN201910047752.6A CN201910047752A CN109687274A CN 109687274 A CN109687274 A CN 109687274A CN 201910047752 A CN201910047752 A CN 201910047752A CN 109687274 A CN109687274 A CN 109687274A
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- concave mirror
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
The invention discloses a kind of all solid lasers for lasing 350nm laser, including the 966nmLD laser pump (ing) and fibre-coupled mirrors for generating laser source, fibre-coupled mirrors are used to integrate the hot spot that 966nmLD laser pump (ing) generates laser, laser further includes average mirror, plano-concave mirror and filter, and the YSGG crystal according to designated ratio mixed with Er is provided between average mirror and plano-concave mirror, average mirror, plano-concave mirror, YSGG crystal and filter are set gradually on the same axis；Average mirror peace concave mirror combines the resonant cavity to form laser, the plating film coefficient of average mirror are as follows: the transmitance that 350nm, 540nm~558nm, 650nm~675nm wavelength laser reflectivity are greater than 99.9% and 966nm wavelength laser is greater than 95%；Different plating film coefficients is arranged according to continuous and pulse output condition in plano-concave mirror；YSGG crystal is used as the gain media of laser；Filter is used to filter out all light emitted from laser outside 350nm wavelength laser；Overall structure of the present invention is simple, directly lasing can go out the laser of 350nm, and have good hot spot beam quality.
Description
Technical field
The invention belongs to optical device field more particularly to laser devices, and in particular to one kind swashs for lasing 350nm
The all solid laser of light.
Background technique
Solid ultraviolet laser by pump mode be divided into xenon flash lamp pumping ultraviolet laser, krypton flashlamp-pumped ultraviolet laser and
Novel laser diode pumping full-solid laser.But the outer laser optical photoelectric transformation efficiency of solid violet is generally lower, purple light two
When pole pipe develops to shorter wavelength, new difficulty can be brought in terms of photon limitation, non-radiative processes, maintenance
Topic.There are two types of the method that full solid state ultraviolet laser spectral line generates is general, first is that directly being carried out to infrared all solid laser intracavitary
Or outer 3 frequencys multiplication of chamber or 4 frequencys multiplication obtain ultraviolet laser spectral line；It is then recycled second is that obtaining second harmonic first with frequency doubling technology
Ultraviolet laser spectral line is obtained with frequency technology.
Gas laser includes the excimer laser to work in a pulsed fashion, the ion laser to work in a continuous manner
With He-Cd and metal vapors ultraviolet laser.The wavelength of gas ultraviolet laser is mixed dependent on used gas
Polymer type.Metal vapors ultraviolet laser refers mainly to copper steam ultraviolet laser, its generation wavelength is 511nm's and 578nm
Light then can produce the ultraviolet radioactive that wavelength is 255nm, 271nm and 289nm using mixing and frequency multiplication.Laser beam distribution clothes
From Gaussian Profile.Outstanding problem in gas laser application is that occupation area of equipment big, limited reliability, service life be short, high energy
Consumption and high cost.Moreover, excimer pulsed laser beam is of poor quality, exposure mask loss is big.There are light for ion laser and He-Cd
The disadvantage of beam directional stability difference.
Middle ultraviolet band is the emphasis direction of ALGaN laser diode development；Because the excitation of the wave band ultraviolet radioactive is imitated
Rate highest, delivery efficiency are also relatively high.In order to keep UV ray radiation source more practical, the ultraviolet diode development of semiconductor
One direction is the volume and power consumption for substantially reducing existing ultraviolet laser and its power supply, another direction is exploitation launch wavelength
For 280nm, power consumption less than 10mW light emitting diode and launch wavelength be 340nm, power consumption be less than 25mW laser diode
In summary, existing ultraviolet wavelength solid state laser or gas laser have that the device is complicated degree are higher,
Sufficiently bulky, expensive problem；But with the development of technology, for the heterogeneous of the semiconductor laser complexity of ultraviolet wavelength
Junction structure and very high current density propose very high requirement to semiconductor material, and current ultraviolet semiconductor laser can only
Reach 370nm and power be not it is especially high, be unable to satisfy requirement.
Summary of the invention
The high, body for the above-mentioned solid state laser of ultraviolet wavelength in the prior art and gas laser integral device complexity
Product is big, expensive, and the optical maser wavelength the problem of being unable to satisfy existing generation demand generated, and the present invention is in proposing one kind
All solid laser for lasing 350nm laser；The all solid laser is gone out using the very simple direct lasing of device
350nm in turn avoids swashing as current solid state laser and gas with the preferable hot spot beam quality that solid state laser possesses
Light device the device is complicated the high and sufficiently bulky problem of degree, specific technical solution are as follows:
A kind of all solid laser for lasing 350nm laser, the laser include for generating laser source
966nmLD laser pump (ing) and the 966nmLD laser pump (ing) output end and coaxial fibre-coupled mirrors are installed in, the optical fiber coupling
Close mirror and be used to integrate the hot spot that the 966nmLD laser pump (ing) generates laser, the laser further include average mirror, plano-concave mirror and
Filter, and it is provided between the average mirror and the plano-concave mirror YSGG crystal according to designated ratio mixed with Er, it is described flat
Flat mirror, plano-concave mirror, YSGG crystal and filter are set gradually on the same axis；Wherein, the average mirror peace concave mirror combines shape
At the resonant cavity of laser, the plating film coefficient of the average mirror are as follows: 350nm, 540nm~558nm, 650nm~675nm wavelength swash
The transmitance that light reflectivity is greater than 99.9% and 966nm wavelength laser is greater than 95%；The plating film coefficient of the plano-concave mirror are as follows:
350nm wavelength laser transmitance is 20%, the transmitance of 558nm wavelength laser is 3% and the transmitance of 675nm wavelength laser is
2%；The YSGG crystal is used as the gain media of laser；The filter be used for filter out outside 350nm wavelength laser it is all from
The light that laser emits.
Further, under pulse output condition, the laser is arranged between the average mirror and the plano-concave mirror
There are an aperture and passive Q-switch, the average mirror, aperture, passive Q-switch and the plano-concave mirror are coaxially disposed, and
The passive Q-switch is between the aperture and the plano-concave mirror, wherein the average mirror peace concave mirror combines to be formed
The resonant cavity of laser, to provide feedback energy and specified wavelength and the light of frequency selected to penetrate, the plated film of the average mirror
Coefficient are as follows: 350nm, 540nm~558nm, 650nm~675nm wavelength laser reflectivity swash greater than 99.9% and 966nm wavelength
The transmitance of light is greater than 95%, the plating film coefficient of the plano-concave mirror are as follows: 350nm wavelength laser transmitance is 50%, 558nm wavelength
The transmitance of laser is 3% and the transmitance of 675nm wavelength laser is 2% and the transmitance of 966nm wavelength laser is greater than
95%, the aperture for filtering in the resonant cavity high-order mode of light beam and to beam shaping, use by the passive Q-switch
The peak work of the light beam is promoted in the quality factor Q for controlling the resonant cavity to realize the compression to the beam energy
Rate.
Further, the passive Q-switch include one with BK7 material preparation substrate and be covered on the substrate by
MoS2The film of composition forms, wherein the film is arranged close to the aperture.
Further, the Er that the YSGG crystal is mixed is Er3+Ion, and the Er3+The concentration of ion is 35%.
Further, the output end of the 966nmLD laser pump (ing) is additionally provided with an optical-fiber coupling connector, for described
Being flexibly connected between laser and the fibre-coupled mirrors occurs for 966nmLD laser pump (ing).
Further, the average mirror and the plano-concave mirror are the setting of two sides plated film.
Compared with prior art, all solid laser for lasing 350nm laser of the invention have the beneficial effect that it is whole
Body structure is simple, avoids current solid state laser and gas laser the device is complicated that degree is high and sufficiently bulky problem, and
Higher power output can be used；Meanwhile directly lasing can go out the laser of 350nm, there is good hot spot beam quality.
Detailed description of the invention
Fig. 1 is the structure composition figure signal described in present example for all solid laser of lasing 350nm laser.
Identifier declaration: 1-966nmLD laser pump (ing), 2- optical-fiber coupling connector, 3- fibre-coupled mirrors, the average mirror of 4-, 5-
First plano-concave mirror, 6- filter, 7- thin plate, 8- passive Q-switch, 9- the second plano-concave mirror.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described.
In embodiments of the present invention, a kind of all solid laser for lasing 350nm laser is provided, can be used for realizing
Continuous and pulse 350nm laser output；Specifically, the part a in refering to fig. 1, the laser for the output of continuous 350nm laser
Including the 966nmLD laser pump (ing) 1 for generating laser source and it is installed in 1 output end of 966nmLD laser pump (ing) and coaxial light
Fine coupling mirror 3, fibre-coupled mirrors 3 are used to integrate the hot spot that 966nmLD laser pump (ing) 1 generates laser, and laser further includes average
Mirror 4, the first plano-concave mirror 5 and filter 6, and be provided with according to designated ratio between average mirror 4 and the first plano-concave mirror 5 mixed with 35%
Er3+YSGG crystal, average mirror 4, YSGG crystal, the first plano-concave mirror 5 and filter 6 are set gradually on the same axis；Wherein, just
In the case where normal continuous-wave lasing laser, the plating film coefficient of average mirror are as follows: 350nm, 540nm~558nm and 650nm~675nm wave
The reflectivity of long laser is greater than 99.9%, and 966nm wavelength laser transmitance is greater than 95% setting, the plating film coefficient of plano-concave mirror
Are as follows: 350nm wavelength laser transmitance is 20%, the transmitance of 558nm wavelength laser is 3% and the transmission of 675nm wavelength laser
Rate is that 2% and 966nm wavelength laser transmitance is greater than 95% setting.
Referring again to the part b in Fig. 1, in the specific embodiment of the invention, using laser of the invention when in impulsive condition
When lower generation 350nm laser exports, plating film coefficient is used are as follows: 350nm wavelength laser transmitance is 50%, 558nm wavelength laser
Transmitance be 3% and the transmitance of 675nm wavelength laser is 2% and 966nm wavelength transmitance is 95% the second plano-concave
Mirror 9 is realized, wherein is provided with an aperture 7 and passive Q-switch 8 between average mirror 4 and the second plano-concave mirror 9, wherein
Aperture 7, passive Q-switch 9 and the second plano-concave mirror 9 are coaxially disposed, and passive Q-switch 8 is located at aperture 7 and the second plano-concave
Between mirror 9；Meanwhile passive Q-switch 8 include one with BK7 material preparation substrate and be covered on substrate by with a thickness of 1.8nm-
The few layer of MoS of 3.7nm2The film of composition forms, and film is located between aperture 7 and the second plano-concave mirror 9 and close to aperture
Diaphragm 7 is arranged.
In embodiments of the present invention, in the case where 966nmLD laser pump (ing) continuously exports laser, 540nm~558nm wave
Long laser is issued by YSGG crystal；Likewise, 975nm~1000nm wavelength laser is also obtained by YSGG crystal lasing；And 340nm
~350nm light occur in crystal and frequency generate, and wavelength be 350nm be most strong light；And average mirror peace concave mirror is as sharp
The resonant cavity of light device, gain media of the present invention by the YSGG crystal mixed with Er as laser, to realize population inversion
With the necessary condition for manufacturing the output of 350nm laser with frequency, emit energy and the choosing of light beam come feedback laser by resonant cavity
The wave for selecting permeable wavelength and frequency filters out the light emitted other than 350nm from laser finally by filter, realizes
The continuous output of 350nm laser.
Under 966nmLD laser pump (ing) pulse output condition, the high-order of resonance intracavity beam is filtered out by aperture
Mould simultaneously carries out shaping to light beam, meanwhile, in conjunction with passive Q-switch；Specifically, passive Q-switch is because of MoS2Film possesses can be " full
With " and " bleaching " saturated absorbing body characteristic as influence laser cavity quality factor Q value can make it is continuous by what is generally exported
Laser energy, which is compressed in the extremely narrow pulse of width, to be emitted, to make the peak power of light source that several orders of magnitude can be improved；Finally
The continuous output of 350nm laser is realized by plano-concave mirror and filter, wherein filter is 350nm laser filter, last real to guarantee
Now the light beam in addition to 350nm wavelength laser without other wavelength is penetrated from filter 6.
Preferably, under pulse output condition, in order to allow intracavitary 350nm light to generate oscillation and the arteries and veins exported will not be made
Punching causes to export pulse energy decline because transmitance is too low, and the transmitance to plano-concave mirror in 350nm wavelength laser is arranged
It is 50%.
In addition, in the present invention, the output end of 966nmLD laser pump (ing) 1 is additionally provided with an optical-fiber coupling connector 2, use
Being flexibly connected between laser and fibre-coupled mirrors 3 occurs in 966nmLD laser pump (ing)；Preferably, average 4 He of mirror in the present invention
First plano-concave mirror 5 and the second plano-concave mirror 9 are the setting of two sides plated film.
Compared with prior art, all solid laser for lasing 350nm laser of the invention have the beneficial effect that it is whole
Body structure is simple, avoids current solid state laser and gas laser the device is complicated that degree is high and sufficiently bulky problem, and
Higher power output can be used；Meanwhile directly lasing can go out the laser of 350nm, there is good hot spot beam quality.
The foregoing is merely a prefered embodiment of the invention, is not intended to limit the scope of the patents of the invention, although referring to aforementioned reality
Applying example, invention is explained in detail, still can be to aforementioned each tool for coming for those skilled in the art
Technical solution documented by body embodiment is modified, or carries out equivalence replacement to part of technical characteristic.All benefits
The equivalent structure made of description of the invention and accompanying drawing content is directly or indirectly used in other related technical areas,
Similarly within the invention patent protection scope.
Claims (6)
1. a kind of all solid laser for lasing 350nm laser, the laser include for generating laser source
966nmLD laser pump (ing) and the 966nmLD laser pump (ing) output end and coaxial fibre-coupled mirrors are installed in, the optical fiber coupling
It closes mirror and is used to integrate the hot spot that the 966nmLD laser pump (ing) generates laser, which is characterized in that the laser further includes average
Mirror, plano-concave mirror and filter, and it is provided between the average mirror and the plano-concave mirror YSGG according to designated ratio mixed with Er
Crystal, the average mirror, plano-concave mirror, YSGG crystal and filter are set gradually on the same axis；Wherein, the average mirror peace
Concave mirror combines the resonant cavity to form laser, the plating film coefficient of the average mirror are as follows: and 350nm, 540nm~558nm, 650nm~
The transmitance that 675nm wavelength laser reflectivity is greater than 99.9% and 966nm wavelength laser is greater than 95%；The plano-concave mirror
Plate film coefficient are as follows: 350nm wavelength laser transmitance is 20%, the transmitance of 558nm wavelength laser is 3% and 675nm wavelength swashs
The transmitance of light is 2%；The YSGG crystal is used as the gain media of laser；The filter swashs for filtering out 350nm wavelength
All light emitted from laser outside light.
2. being used for all solid laser of lasing 350nm laser as described in claim 1, which is characterized in that exported in pulse
Under the conditions of, the laser is provided with an aperture and passive Q-switch between the average mirror and the plano-concave mirror, described
Average mirror, aperture, passive Q-switch and the plano-concave mirror are coaxially disposed, and the passive Q-switch is located at the aperture
Between the plano-concave mirror, wherein the average mirror peace concave mirror combines the resonant cavity to form laser, to provide feedback energy
Measure and select specified wavelength and the light of frequency to penetrate, the plating film coefficient of the average mirror are as follows: 350nm, 540nm~558nm,
The transmitance that 650nm~675nm wavelength laser reflectivity is greater than 99.9% and 966nm wavelength laser is greater than 95%, described flat
The plating film coefficient of concave mirror are as follows: 350nm wavelength laser transmitance is 50%, the transmitance of 558nm wavelength laser is 3% and 675nm
The transmitance of wavelength laser is that the transmitance of 2% and 966nm wavelength laser is greater than 95%, and the aperture is for filtering
The high-order mode of light beam and to beam shaping in the resonant cavity, the passive Q-switch be used to control the quality of the resonant cavity because
Plain Q promotes the peak power of the light beam to realize the compression to the beam energy.
3. being used for all solid laser of lasing 350nm laser as claimed in claim 2, which is characterized in that the passive Q is opened
Close include one with BK7 material preparation substrate and be covered on the substrate by MoS2The film of composition forms, wherein described thin
Film is arranged close to the aperture.
4. being used for all solid laser of lasing 350nm laser as described in claim 1, which is characterized in that the YSGG is brilliant
The Er that body is mixed is Er3+Ion, and the Er3+The concentration of ion is 35%.
5. being used for all solid laser of lasing 350nm laser as described in claim 1, which is characterized in that the 966nmLD
The output end of laser pump (ing) is additionally provided with an optical-fiber coupling connector, and laser and institute occurs for the 966nmLD laser pump (ing)
State the flexible connection between fibre-coupled mirrors.
6. all solid laser as claimed in any one of claims 1 to 5 for lasing 350nm laser, which is characterized in that institute
It states average mirror and the plano-concave mirror is the setting of two sides plated film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910047752.6A CN109687274A (en) | 2019-01-18 | 2019-01-18 | A kind of all solid laser for lasing 350nm laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910047752.6A CN109687274A (en) | 2019-01-18 | 2019-01-18 | A kind of all solid laser for lasing 350nm laser |
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| Publication Number | Publication Date |
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| CN109687274A true CN109687274A (en) | 2019-04-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910047752.6A Pending CN109687274A (en) | 2019-01-18 | 2019-01-18 | A kind of all solid laser for lasing 350nm laser |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5276695A (en) * | 1992-10-26 | 1994-01-04 | The United States Of America As Represented By The Secretary Of The Navy | Multifrequency, rapidly sequenced or simultaneous tunable laser |
| CN1754290A (en) * | 2003-05-02 | 2006-03-29 | 光波电子公司 | Laser resistant to internal ir-induced damage |
| CN106816807A (en) * | 2017-03-30 | 2017-06-09 | 华中科技大学 | Optical fiber laser as pumping source intracavity pump optical parametric oscillator |
| CN107394577A (en) * | 2017-08-16 | 2017-11-24 | 中国科学院福建物质结构研究所 | Infrared all solid state laser in one kind |
| CN107419334A (en) * | 2017-08-10 | 2017-12-01 | 中国科学院福建物质结构研究所 | A kind of crystalline material, its preparation method and the application as laser crystal |
-
2019
- 2019-01-18 CN CN201910047752.6A patent/CN109687274A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5276695A (en) * | 1992-10-26 | 1994-01-04 | The United States Of America As Represented By The Secretary Of The Navy | Multifrequency, rapidly sequenced or simultaneous tunable laser |
| CN1754290A (en) * | 2003-05-02 | 2006-03-29 | 光波电子公司 | Laser resistant to internal ir-induced damage |
| CN106816807A (en) * | 2017-03-30 | 2017-06-09 | 华中科技大学 | Optical fiber laser as pumping source intracavity pump optical parametric oscillator |
| CN107419334A (en) * | 2017-08-10 | 2017-12-01 | 中国科学院福建物质结构研究所 | A kind of crystalline material, its preparation method and the application as laser crystal |
| CN107394577A (en) * | 2017-08-16 | 2017-11-24 | 中国科学院福建物质结构研究所 | Infrared all solid state laser in one kind |
Non-Patent Citations (2)
| Title |
|---|
| HONGKUN NIE等: ""Highly Efficient Continuous-Wave and Passively Q-Switching 2.8 um Er:YSGG Laser"", 《IEEE PHOTONICS TECHNOLOGY LETTERS》 * |
| P.A.LOIKO等: ""Judd-Ofelt analysis and stimulated-emission cross-sections for highly doed(38 at%) Er：YSGG laser cystal"", 《JOUNAL OF LUMINESCENCE》 * |
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Application publication date: 20190426 |