CN109678357A - In the glass and production technology of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane - Google Patents
In the glass and production technology of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane Download PDFInfo
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- CN109678357A CN109678357A CN201710980277.9A CN201710980277A CN109678357A CN 109678357 A CN109678357 A CN 109678357A CN 201710980277 A CN201710980277 A CN 201710980277A CN 109678357 A CN109678357 A CN 109678357A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/281—Nitrides
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/282—Carbides, silicides
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/76—Hydrophobic and oleophobic coatings
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/11—Deposition methods from solutions or suspensions
- C03C2218/112—Deposition methods from solutions or suspensions by spraying
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
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- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of glass and production technology in diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, the glass includes glass baseplate, the surface of the glass baseplate is equipped with diamond-like carbon film-coating, the surface plating of the diamond-like carbon film-coating is formed with the auxiliary transition zone of the key of atom containing Si, and the surface of the auxiliary transition zone is coated with AF anti-fingerprint film layer.The technique includes: preparation glass baseplate, and the surface of the glass baseplate is equipped with diamond-like carbon film-coating, is coated with the auxiliary transition zone of the key of atom containing Si on the surface of the diamond-like carbon film-coating, sprays AF anti-fingerprint film layer on the surface of the auxiliary transition zone later.The present invention can enhance AF medical fluid in the conjugation and wearability on DLC film surface, and the glass product of coating AF anti-fingerprint is made to have anti-scratch and anti-fingerprint performance.
Description
Technical field
The present invention relates to the glass based on diamond-like carbon film-coating, more particularly to one kind is in diamond-like carbon film-coating surface layer coating AF
The glass and production technology of fingerprint proof membrane.
Background technique
AF is the abbreviation of Anti-finger, refers to anti-fingerprint technology.AF material is made of the fluorine silicon resin of special construction
A kind of fluoro-containing coating, there is extremely low surface tension, commonly referred to as perfluoropolyether.AF material have hydrophobic, oil extraction, it is antifouling,
The performances such as insulation, acidproof, anti-fingerprint, AF fingerprint proof membrane coating process have spraying medical fluid and vacuum evaporation mode at present.AF is general
There is good adhesive force, wearability detection can achieve 105~115 degree of water droplet after coating on logical glass and AR glass
Angle.But due to the characteristic of diamond-like (CXNX) film layer, common coating AF technique is but unable to reach hardness and wearability,
AF layers are easy to demoulding, and customer requirement is not achieved in water droplet angle and steel ball detection hardness.
Touch-screen mobile phone, tablet computer, digital camera, GPS, all kinds of inquiry terminals, all kinds of self-aided terminals, ATM machine, program request
Glass cover-plate is all widely applied as protection in machine display screen.Cover board is directly exposed to the outermost of the products such as mobile phone and computer, because
This requires it with high rigidity, anti scuffing, due to touch control operation to be carried out, cover board is also required to have anti-fingerprint, anti-stain, Yi Qing
The functions such as clean.In order to solve the problems, such as this, current portions products application diamond-like carbon film-coating handles surface, also thinks coating AF
(Anti-Finger) film layer reduces the residual of fingerprint.AF coating process has spraying medical fluid and vacuum evaporation mode, AF to exist at present
There is good adhesive force, wearability detection can achieve 105~115 degree of water droplet after coating on common glass and AR glass
Angle meets mobile phone plane plate routine use requirement.But due to the characteristic of diamond-like (CXNX) film layer, common coating AF work
Skill is but unable to reach hardness and wearability, and AF layers are easy to demoulding.
There are two types of forms for current most of glass surface AF material coatings: one is the sprayings of the AF anti-fingerprint liquid medicine of liquid to dry
Dry, another kind is the AF anti-fingerprint pellet for selecting vacuum evaporation, using vacuum evaporation equipment vapor sorption.It is sharp before liquid spray AF
Make pre-treatment with ion gun, there is good adhesive force on common glass and AR glass.But by being coated with diamond-like
The glass of stone film, skin-friction coefficient is very low, and surface layer has certain hydrophobic performance.Simple liquid spray technique and steaming
AF layers of the anti-fingerprint of depositing process coating, before not rubbing, the detection of water droplet angle can achieve 115 °, but slightly wipe by wet cloth
Afterwards, only 60 ° or so of water droplet angle detection, cannot reach technical indicator.
Summary of the invention
The technical problem to be solved in the present invention is that in view of the deficiencies of the prior art, AF medical fluid can be enhanced by providing one kind
Conjugation and wearability on DLC film surface make the glass product of coating AF anti-fingerprint have anti-scratch and anti-fingerprint
The glass and its production technology of performance.
In order to solve the above technical problems, the present invention adopts the following technical scheme that.
A kind of glass in diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane comprising have glass baseplate, the glass
The surface of substrate is equipped with diamond-like carbon film-coating, and the surface plating of the diamond-like carbon film-coating is formed with the auxiliary transition of the key of atom containing Si
The surface of layer, the auxiliary transition zone is coated with AF anti-fingerprint film layer.
Preferably, the auxiliary transition zone is after being filled with nitrogen with SiAl metal alloy targets, to be set using reactive magnetron sputtering
The silicon nitride layer of the standby incomplete nitridation reaction in the covering of diamond-like carbon film-coating surface.
Preferably, the diamond-like carbon film-coating is single layer diamond-like carbon film-coating or is plated by AR anti-reflection coating and diamond-like
The composite film coating that film combines.
A kind of process of glass in diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, the technique include: preparation glass
The surface of glass substrate, the glass baseplate is equipped with diamond-like carbon film-coating, is coated on the surface of the diamond-like carbon film-coating containing Si original
The auxiliary transition zone of sub-key sprays AF anti-fingerprint film layer on the surface of the auxiliary transition zone later.
Preferably, using vertical more continuous reactive magnetron sputtering coating wires of cabinet, according to plated film direction of transfer, by design film
Layer composition material, which puts in order, arranges target position, is calculated and is configured using cathode target quantity, group according to the thickness range of design film layer
At continuous plated film cathode cabinet channel, enables glass baseplate pass through each target position one by one and complete plated film.
Preferably, using graphite target when being coated with the diamond-like carbon film-coating, direct current target sputtering power 1-3kw adds nitrogen anti-
It should sputter, working gas flow uses argon flow 80-100SCCM/ nitrogen flow 8-10SCCM.
Preferably, using SiC or polycrystalline silicon target when being coated with the auxiliary transition zone, intermediate frequency power supply power is 500-
800W, argon flow 80-100SCCM/ nitrogen flow 1-5sccm, 200-250 DEG C of glass baseplate temperature, be disposably coated with half at
Product film sprays AF anti-fingerprint film layer later.
Preferably, before plated film, deionized water cleaning first is carried out to the glass baseplate.
Preferably, it when being coated with auxiliary transition zone, is coated with using integrated process for plating on the surface of the diamond-like carbon film-coating
Assist transition zone.
Preferably, when preparation auxiliary transition zone, in the diamond-like carbon film-coating surface covering auxiliary transition zone for being coated with completion.
It is disclosed by the invention in the glass of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, AF material is in simple glass
On can be well combined, be due in AF liquid medicine composition the Si-O of O key and simple glass bond close stablize, formed O-Si-O.Due to
Diamond-like carbon film layer does not have the presence of Si-O key, so cannot be directly in such DLC material surface, it is necessary in diamond-film-like table
Layer, increases by one layer of Si atom key.The auxiliary transition of the surface layer of glass coating key of atom containing Si in diamond-like carbon film-coating of the invention
Layer sprays AF anti-fingerprint film layer later, so that the Si of the N key of CxNx and auxiliary transition zone is bonded and closes, to increase auxiliary layer and class
The adhesive force of diamond layer is combined using Si atom in composite film with the O atom in AF medical fluid, and O-Si-O key is formed, and is increased
Adhesive force of the AF anti-fingerprint medical fluid in diamond-like surface.Based on above-mentioned characteristic, invention is enabled to enhance AF medical fluid in eka-gold
The conjugation and wearability of hard rock film surface make the glass product of coating AF anti-fingerprint have anti-scratch and anti-fingerprint performance.
Detailed description of the invention
Fig. 1 is glass structure schematic diagram of the present invention in diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane.
Specific embodiment
The present invention is described in more detail with reference to the accompanying drawings and examples.
The invention discloses a kind of glass in diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, please refer to Fig. 1, packet
Glass baseplate 1 is included, the surface of the glass baseplate 1 is equipped with diamond-like carbon film-coating 2, and the surface of the diamond-like carbon film-coating 2 is plated
It is formed with the auxiliary transition zone 3 of the key of atom containing Si, the surface of the auxiliary transition zone 3 is coated with AF anti-fingerprint film layer 4.
In above-mentioned glass, AF material can be well combined on simple glass, be due to O key in AF liquid medicine composition and common glass
The Si-O bond of glass, which is closed, to be stablized, and O-Si-O is formed.Since diamond-like (CxNx) film layer does not have the presence of Si-O key, so cannot be straight
It connects in such DLC material surface, it is necessary on diamond-like (CxNx) film surface layer, increase by one layer of Si atom key.It is of the invention in class
The auxiliary transition zone 3 of the diamond coated 2 surface layer of glass coating key of atom containing Si sprays AF anti-fingerprint film layer 4 later, so that
The N key of CxNx and the Si of auxiliary transition zone 3 are bonded and close, and to increase the adhesive force of auxiliary layer Yu diamond-like rock layers, utilize composite membrane
Si atom is combined with the O atom in AF medical fluid in layer, forms O-Si-O key, increases AF anti-fingerprint medical fluid at diamond-like (CxNx)
The adhesive force on surface.Based on above-mentioned characteristic, enable invention enhance AF medical fluid in the conjugation on DLC film surface and
Wearability makes the glass product of coating AF anti-fingerprint have anti-scratch and anti-fingerprint performance.
In the present embodiment, the auxiliary transition zone 3 is to be splashed after being filled with nitrogen with SiAl metal alloy targets using magnetic control reaction
The silicon nitride layer for the incomplete nitridation reaction that jet device covers on 2 surface of diamond-like carbon film-coating.
Further, the diamond-like carbon film-coating 2 is for single layer diamond-like carbon film-coating or by AR anti-reflection coating and diamond-like
The composite film coating that stone plated film combines.
In above-mentioned glass, plating diamond (CxNx) film layer 2 on glass substrate 1, then at diamond-like (CxNx)
It is coated with the auxiliary transition zone 3 containing Si atom key in film layer 2, then on transition zone 3, AF anti-fingerprint is sprayed using AF flush coater
Film layer 4, completes handicraft product after overbaking.
Auxiliary transition zone in the present embodiment is filled with N2 gas with SiAl metal alloy targets and is existed using reactive magnetron sputtering equipment
Diamond-like (CXNX) film surface covers silicon nitride (SixNx) layer of one layer very thin of incomplete nitridation reaction.Meanwhile using itself
It is also that hard material silicon nitride (SixNx) is used as auxiliary layer, the hardness of diamond-like (CxNx) film layer is influenced small.
For the present embodiment in the surface layer of glass coating AF fingerprint proof membrane technology of diamond-like carbon film-coating, process for plating method is benefit
It is suitable by design film layer composition material arrangement according to plated film direction of transfer with vertical more continuous reactive magnetron sputtering coating wires of cabinet
Sequence arranges target position, is calculated and is configured using cathode target quantity according to the thickness range of design film layer, forms continuous plated film cathode
Cabinet channel, glass substrate complete plated film finished product technique by each target position one by one.
The present embodiment uses diamond-like carbon film layer graphite target, and direct current target sputtering power 1-3kw adds nitrogen (N2) reaction to splash
It penetrates, working gas flow uses argon flow 80-100SCCM/N2 gas 8-10SCCM.Additional film layer SixNx SiC (or polycrystalline
Silicon) target intermediate frequency power supply power 500-800W, Ar2 throughput 80-100SCCM/N2 throughput 1-5sccm, substrate temperature 200-
250 DEG C, it is disposably coated with semi-finished product film, then take away and spray AF.
In the present embodiment, in the surface layer of glass coating AF fingerprint proof membrane technology of diamond-like carbon film-coating, AF coating and diamond-like
Stone (CXNX) film layer is well combined, and water droplet angle initial detecting reaches 116 degree；By 0000# steel wool 1000G pressure back and forth 3000
After secondary friction, the detection of water droplet angle is still greater than 100 degree；It is not scratched with 7# 500G pressure test of Mohs' hardness；Use diameter
For the stainless shot of 3.2MM, detected using rub resistance instrument, under 500G power back and forth stroke 50 times it is not damaged.
In practical application, plated film front glass substrate carries out deionized water cleaning, vacuum background 3.5E-3pa, operating pressure
Under the conditions of 4.5-6E-1, using vacuum magnetic control film coating line, sputters different composite material and form.This technology includes plating diamond
CxNx film layer, SixNx layers of auxiliary.Further, it can be used and the continuous integrated process for plating of diamond-like carbon film layer (CxNx) plated film
Auxiliary layer can also have been plated formerly and cover (SixNx) in the film layer of diamond-like as auxiliary layer.
The present embodiment is coated with the SiC target material that SixNx additional film layer uses, and can plate membrane material with SiAl, polycrystalline SI target etc.
Material substitution uses.It can be seen that in conjunction with the above several points auxiliary present invention can apply to cover SixNx in the DLC film similar with CxNx
Film layer is helped, increases the technology foundation of adhesive force as AF coating.
In order to better describe technical solution of the present invention, the invention also discloses one kind to apply on diamond-like carbon film-coating surface layer
Plate the process of glass of AF fingerprint proof membrane, which is characterized in that the technique includes: to prepare glass baseplate 1, the glass baseplate 1
Surface be equipped with diamond-like carbon film-coating 2, be coated with the auxiliary transition zone 3 of the key of atom containing Si on the surface of the diamond-like carbon film-coating 2,
AF anti-fingerprint film layer 4 is sprayed on the surface of the auxiliary transition zone 3 later.
In the present embodiment, using vertical more continuous reactive magnetron sputtering coating wires of cabinet, according to plated film direction of transfer, by setting
Meter film layer composition material, which puts in order, arranges target position, is calculated and is configured using cathode target number according to the thickness range of design film layer
Amount, forms continuous plated film cathode cabinet channel, and glass baseplate 1 is enabled to complete plated film by each target position one by one.
Further, using graphite target when being coated with the diamond-like carbon film-coating 2, direct current target sputtering power 1-3kw adds nitrogen
Reactive sputtering, working gas flow use argon flow 80-100SCCM/ nitrogen flow 8-10SCCM.
In addition, using SiC or polycrystalline silicon target when being coated with the auxiliary transition zone 3, intermediate frequency power supply power is 500-800W,
Argon flow 80-100SCCM/ nitrogen flow 1-5sccm, 200-250 DEG C of 1 temperature of glass baseplate are disposably coated with semi-finished product film,
AF anti-fingerprint film layer 4 is sprayed later.Before plated film, deionized water cleaning first is carried out to the glass baseplate 1.
When being coated with auxiliary transition zone 3 as a preferred method, using integrated process for plating in the diamond-like carbon film-coating
2 surface is coated with auxiliary transition zone 3.Or: when preparation auxiliary transition zone 3, covered on 2 surface of diamond-like carbon film-coating for being coated with completion
Lid auxiliary transition zone 3.
The concrete processing procedure of present invention process can refer to following two embodiments:
Embodiment one
Implement to be coated with auxiliary transition zone (SixNx) on continous way magnetron sputtering plating line, first by design membrane system, determine
Every layer of target type and target position quantity are arranged by structure GLASS/CxNx/SixNx/AF level.Cabinet heating temperature setting 200
DEG C, vacuum degree is evacuated to 5.0E-3pa base vacuum, and then all target position cabinets fill Ar2 gas, it is re-filled with N2 as reaction gas,
Ar2 flow 80-100sccm, graphite target N2 throughput 8-10sccm, SiC target N2 throughput set 1sccm.Then, needed for unlatching
The power supply of target position is wanted, graphite target is sputtered with DC power supply low-power, and general direct current target power output 2.2KW, SiC target uses medium frequency electric
Source sputtering, power setting 600W are sent into cleaned glass substrate, successively pass through each sputtering target plating diamond film CxNx
With auxiliary transition zone SixNx composite film.Graphite target power output is too high or too low, and N2 flow has CxNx layers of adhesive force and hardness
Very big influence should adjust the control of N2 flow according to the actual situation.The glass for completing plated film walks out cabinet, and it is anti-to be then sent through AF
Fingerprint spray coating medicated liquor carries out AF spraying on diamond-film-like CxNx and auxiliary transition zone SixNx composite film, finally, drying
Finish into AF sprayed product.
Embodiment two
The glass for having plated DLC diamond-film-like is implemented to be coated with auxiliary transition on continous way magnetron sputtering plating line
When layer (SixNx), by SiC target (or SiAl, polycrystalline SI) mounted in coating wire close to terminal position, cabinet heating temperature sets 200
DEG C, vacuum degree is evacuated to 5.0E-3pa base vacuum, and then the target position cabinet that is connected fills Ar2 gas, it is re-filled with N2 as reaction gas,
Ar2 flow 80-100sccm, SiC target N2 throughput set 1sccm.SiC target is sputtered using intermediate frequency power supply, power setting 600W,
It is sent into the glass substrate for having plated DLC diamond-film-like, successively passes through each cabinet, is heated to substrate, SiC target is finally reached and is coated with
Assist transition zone SixNx.The glass for completing plated film walks out cabinet, AF anti-fingerprint spray coating medicated liquor is then sent through, in diamond-film-like
AF spraying is carried out on CxNx and auxiliary transition zone SixNx composite film, finally, AF sprayed product is completed in drying.
Glass disclosed by the invention in diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane is for diamond-like
(CxNx) film deposition AF poor adhesive force, firmly wipe the problem of rear water droplet angle reduces or disappears.Design is auxiliary using being once coated with
The manufacture craft for helping layer covers one layer of SixNx in diamond-film-like layer surface, obtains ideal CxNx+SixNx composite film,
The Si bond of the N key and SixNx that make CxNx is closed, and auxiliary layer and diamond-like rock layers adhesive force are increased.It is former using Si in composite film
Son and the O key combination in AF medical fluid, form O-Si-O key, increase AF anti-fingerprint medical fluid in the attachment on the surface diamond-like (CxNx)
Power.Current diamond-like (CXNX) coated product surface A F coating adhesion problem is solved, is the similar diamond-like of industry
(CXNX) coated product surface treatment, coating AF fingerprint proof membrane providing method.
The above is preferred embodiments of the present invention, is not intended to restrict the invention, all in technology model of the invention
Interior done modification, equivalent replacement or improvement etc. are enclosed, should be included in the range of of the invention protect.
Claims (10)
1. a kind of glass in diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, which is characterized in that include glass baseplate
(1), the surface of the glass baseplate (1) is equipped with diamond-like carbon film-coating (2), and the surface plating of the diamond-like carbon film-coating (2) is formed with
The surface of the auxiliary transition zone (3) of the key of atom containing Si, auxiliary transition zone (3) is coated with AF anti-fingerprint film layer (4).
2. as described in claim 1 in the glass of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, which is characterized in that described
Assisting transition zone (3) is after being filled with nitrogen with SiAl metal alloy targets, using reactive magnetron sputtering equipment in diamond-like carbon film-coating
(2) silicon nitride layer of the incomplete nitridation reaction of surface covering.
3. as described in claim 1 in the glass of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, which is characterized in that described
Diamond-like carbon film-coating (2) is single layer diamond-like carbon film-coating or the Composite Coatings combined by AR anti-reflection coating and diamond-like carbon film-coating
Film.
4. a kind of process of glass in diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, which is characterized in that the technique packet
It includes: preparing glass baseplate (1), the surface of the glass baseplate (1) is equipped with diamond-like carbon film-coating (2), plates in the diamond-like
The surface of film (2) is coated with the auxiliary transition zone (3) of the key of atom containing Si, sprays AF on the surface of auxiliary transition zone (3) later
Anti-fingerprint film layer (4).
5. as claimed in claim 4 in the process of glass of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, feature
It is, using vertical more continuous reactive magnetron sputtering coating wires of cabinet, according to plated film direction of transfer, by design film layer composition material
It puts in order and arranges target position, calculated according to the thickness range of design film layer and configure using cathode target quantity, form continuous plating
Film cathode cabinet channel enables glass baseplate (1) complete plated film by each target position one by one.
6. as claimed in claim 4 in the process of glass of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, feature
It is, be coated with the diamond-like carbon film-coating (2) Shi Caiyong graphite target, direct current target sputtering power 1-3kw adds nitrogen reactive sputtering,
Working gas flow uses argon flow 80-100SCCM/ nitrogen flow 8-10SCCM.
7. as claimed in claim 4 in the process of glass of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, feature
It is, be coated with auxiliary transition zone (3) the Shi Caiyong SiC or polycrystalline silicon target, intermediate frequency power supply power is 500-800W, argon gas stream
80-100SCCM/ nitrogen flow 1-5sccm is measured, 200-250 DEG C of temperature of glass baseplate (1) is disposably coated with semi-finished product film, later
It sprays AF anti-fingerprint film layer (4).
8. as claimed in claim 4 in the process of glass of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, feature
It is, before plated film, deionized water cleaning first is carried out to the glass baseplate (1).
9. as claimed in claim 4 in the process of glass of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, feature
It is, when being coated with auxiliary transition zone (3), is coated with auxiliary on the surface of the diamond-like carbon film-coating (2) using integrated process for plating
Transition zone (3).
10. as claimed in claim 4 in the process of glass of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane, feature
It is, when preparation assists transition zone (3), in diamond-like carbon film-coating (2) surface covering auxiliary transition zone (3) for being coated with completion.
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| CN201710980277.9A CN109678357A (en) | 2017-10-19 | 2017-10-19 | In the glass and production technology of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane |
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| CN201710980277.9A CN109678357A (en) | 2017-10-19 | 2017-10-19 | In the glass and production technology of diamond-like carbon film-coating surface layer coating AF fingerprint proof membrane |
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| CN111470780A (en) * | 2020-04-10 | 2020-07-31 | 广州视源电子科技股份有限公司 | Preparation method of glass panel, display screen and display device |
| CN112080723A (en) * | 2020-08-20 | 2020-12-15 | 深圳市矽谷溅射靶材有限公司 | Nano multilayer composite anti-scratching film on surface of gold product and preparation method thereof |
| CN112851140A (en) * | 2021-01-22 | 2021-05-28 | 昆山国显光电有限公司 | Glass cover plate manufacturing method, glass cover plate and display module |
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| CN110937822A (en) * | 2019-12-27 | 2020-03-31 | 宜昌南玻显示器件有限公司 | Wear-resistant AG + AR + AF glass and preparation method thereof |
| CN115349031A (en) * | 2020-01-31 | 2022-11-15 | 旭硝子欧洲玻璃公司 | Durable decorative coated substrate and method of obtaining same |
| CN111470780A (en) * | 2020-04-10 | 2020-07-31 | 广州视源电子科技股份有限公司 | Preparation method of glass panel, display screen and display device |
| CN112080723A (en) * | 2020-08-20 | 2020-12-15 | 深圳市矽谷溅射靶材有限公司 | Nano multilayer composite anti-scratching film on surface of gold product and preparation method thereof |
| CN112851140A (en) * | 2021-01-22 | 2021-05-28 | 昆山国显光电有限公司 | Glass cover plate manufacturing method, glass cover plate and display module |
| CN112851140B (en) * | 2021-01-22 | 2022-09-23 | 昆山国显光电有限公司 | Glass cover plate manufacturing method, glass cover plate and display module |
| CN114596776A (en) * | 2022-02-28 | 2022-06-07 | 京东方杰恩特喜科技有限公司 | Glass cover plate, display screen assembly, electronic equipment and glass cover plate processing method |
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