CN109671656A - A kind of knife system - Google Patents
A kind of knife system Download PDFInfo
- Publication number
- CN109671656A CN109671656A CN201910103209.3A CN201910103209A CN109671656A CN 109671656 A CN109671656 A CN 109671656A CN 201910103209 A CN201910103209 A CN 201910103209A CN 109671656 A CN109671656 A CN 109671656A
- Authority
- CN
- China
- Prior art keywords
- knife
- body part
- lip
- clean tank
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning In General (AREA)
Abstract
The present invention provides a kind of knife system, which includes: body part comprising: the first knife lip and the second knife lip, the second knife lip are oppositely arranged with the first knife lip；Setting is spaced between the first knife lip and the second knife lip；Cleaning assemblies is connect with the body part, and the cleaning assemblies was used in the body part free time, is cleaned to the body part.Knife system of the invention, can be improved production efficiency.
Description
[technical field]
The present invention relates to field of display technology, more particularly to a kind of knife system.
[background technique]
After the completion of wet etching (wet etch) technique, to reduce medical fluid drag-out and improving etching homogeneity, need
Knife system is set before first of washing, knife system is such as air knife or liquid cutter, however the gap of the edge of a knife due to existing knife system
Very little is easy to be blocked by the grit (Partical) in pipeline, so that bifurcated occur in air knife and liquid cutter.If there is forked
The problem of condition, product will appear uneven etching and linear Mura.
Existing solution is found to shut down cleaning when bifurcated, be needed when necessary by liquid cutter by manually being detected
Dismantling cleaning, it is time-consuming and laborious, reduce production efficiency.
Therefore, it is necessary to a kind of knife system be provided, to solve the problems of prior art.
[summary of the invention]
The purpose of the present invention is to provide a kind of knife systems, can be improved production efficiency.
In order to solve the above technical problems, the present invention provides a kind of knife system comprising:
Body part comprising:
First knife lip；
Second knife lip is oppositely arranged with the first knife lip；It is spaced and sets between the first knife lip and the second knife lip
It sets；
Cleaning assemblies is connect with the body part, and the cleaning assemblies was used in the body part free time, to described
Body portion is cleaned.
Knife system of the invention fills knife by the cleaning assemblies by increasing cleaning assemblies in existing knife system
It sets and is cleaned, to prevent the gap between grit blocking knife lip, to improve production efficiency.
[Detailed description of the invention]
Fig. 1 is the top view of existing knife system；
Fig. 2 is the bottom view of existing knife system；
Fig. 3 is the left view of existing knife system；
Fig. 4 is the structural schematic diagram of knife system of the present invention；
Fig. 5 is the top view of knife system of the present invention；
Fig. 6 is the preferred structure schematic diagram of knife system of the present invention；
Fig. 7 is the left view of the knife system of the embodiment of the present invention one；
Fig. 8 is the corresponding bottom view of knife system in Fig. 7.
Fig. 9 is the left view of the knife system of the embodiment of the present invention two；
Figure 10 is the corresponding bottom view of knife system in Fig. 9.
[specific embodiment]
The explanation of following embodiment is to can be used to the particular implementation of implementation to illustrate the present invention with reference to additional schema
Example.The direction term that the present invention is previously mentioned, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outside", " side "
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is to be given the same reference numerals in the figure.
As shown in Figures 1 to 3, existing knife system includes body part 10, and body part 10 includes the first knife lip 11 and the second knife
Lip 12 has gap 101 between the first knife lip 11 and the second knife lip 12；It is provided in the top in the gap 101
First pipe 13, the first pipe 13 have been passed through gas or liquid, and liquid is such as water.
Since the gap between the first knife lip 11 and the second knife lip 12 is smaller, it is easy to be blocked by grit 30, makes to bring about the desired sensation
Knife and liquid cutter are easy to appear bifurcated.
It is referring to figure 4. the structural schematic diagram of knife system of the present invention to 8, Fig. 4.
Knife system of the invention includes body part 10 and cleaning assemblies 20.
In conjunction with Fig. 7, body part 10 includes the first knife lip 11 and the second knife lip 12, the second knife lip 12 and the first knife lip 11
It is oppositely arranged；Setting is spaced between the first knife lip 11 and the second knife lip 12, to form gap, it is possible to understand that,
It arranges along the vertical direction in the gap.
The body part 10 may also include first pipe 13, and the first pipe 13 is set to the first knife lip 11 and described
The top in the gap 101 between the second knife lip 12.
The cleaning assemblies 20 is connect with the body part 10, and the cleaning assemblies 20 is used for idle in the body part 10
When, the body part 10 is cleaned.
Wherein, as shown in fig. 7, the first knife lip 11 includes top 111 and lower part 112；The second knife lip 12 also wraps
Include top 121 and lower part 122.
In one embodiment, the side of the lower part 112 of the first knife lip 11 towards the second knife lip 12 is provided with
One clean tank 31；First clean tank 31 is also groove.Wherein the shape of first clean tank 31 is semicircle.Wherein, it is
Cleaning effect is further increased, the radius of first clean tank 31 is greater than the first preset value, certainly, first clean tank
31 shape may be rectangle or trapezoidal etc..In one embodiment, the first preset value is more than or equal to grit most
Major diameter.
Return to Figures 5 and 6, the cleaning assemblies 20 includes: input channel 21 and output channel 22, the input channel 21 with
One end of the body part 10 connects, and the input channel 21 is corresponding with the position of first clean tank 31.Input channel 21
Liquid or gas can be passed through.
In conjunction with Fig. 8, the output channel 22 is connect with the other end of the body part 10, the output channel 22 with it is described
The position of first clean tank 31 is corresponding namely the input channel 21 and the output channel 22 with first clean tank 31
Position it is corresponding, grit is discharged by the first clean tank 31.
In conjunction with Fig. 8, wherein first clean tank 31 extends to the other end from one end of the first knife lip 11.That is,
First clean tank 31 is arranged in transverse direction.Such as first clean tank 31 from the left end of the first knife lip 11 extend to the right side
End.
As shown in figure 5, the input channel 21 is connect by the first valve 23 with one end of the body part 10, it is described defeated
Pipeline 22 is connect by the second valve 24 with the other end of the body part 10 out.
As shown in fig. 6, the cleaning assemblies 20 further includes control module 25, the control module 25 is respectively with described first
Valve 23 and second valve 24 connection.
The control module 25 is used to control first valve 23 and second valve in the body part 10 work
Door 24 is closed；And it when the body part 10 is idle, controls first valve 23 and second valve 24 is opened.
In specific work process, when body part work, cleaning assemblies 20 is without cleaning, specially control mould
Block 25 closes the first valve 23 and second valve 24.When the body part does not work, cleaning assemblies 20 is started to work,
First valve 23 and second valve 24 are opened specifically by control module 25, cleaned by input channel 21 to first
It is passed through gas or liquid in slot 31, the grit between two knife lips is discharged by the first clean tank 31, avoids between blocking
Gap prevents knife system from bifurcated occur.
Knife system of the invention can be liquid cutter device or air knife apparatus, when it is liquid cutter device, in first pipe 13
It has been passed through liquid, when it is air knife apparatus, has been passed through gas in first pipe 13.
Fig. 9 and 10 are please referred to, Fig. 9 is the left view of the knife system of the embodiment of the present invention two.
In another embodiment, as shown in figure 9, the present embodiment and the difference of a upper embodiment are: the second knife lip
The side of 12 lower part 122 towards the first knife lip 11 is provided with the second clean tank 32, the position of first clean tank 31
It is corresponding with the position of second clean tank 32.In conjunction with the combination of Figure 10 namely the first clean tank 31 and the second clean tank 32
Form through-hole 301.Wherein through-hole 301 extends to the other end from one end of the body part 10, so as to preferably by dirt
Grain discharge, further improves cleaning effect.
Wherein the shape of second clean tank 32 is also semicircle.It is of course also possible to be rectangle or trapezoidal etc..
Wherein, the radius of second clean tank 32 is greater than the second preset value, for example the second preset value is more than or equal to maximum half of grit
Diameter.It should be understood that can according to need the radius size of the first clean tank of setting at this time.
Wherein, second clean tank 32 extends to the other end from one end of the second knife lip 12.In conjunction with Figure 10, such as
Second clean tank 32 extends to right end from the left end of the second knife lip 12.
Since the structure to existing knife system improves, specifically increase cleaning assemblies on body part, to pass through
The cleaning assemblies tool setting device is cleaned, and the gap between grit blocking knife lip is prevented, so that knife system is avoided bifurcated occur,
And then improve production efficiency.Further, since input channel and output channel is arranged at the both ends of body part, and at least exist
Clean tank is set on the knife lip of side, using the clean tank as the passing away of grit, to easily grit be discharged, more preferably
Ground prevents the gap between grit blocking knife lip, further improves production efficiency.
Knife system of the invention fills knife by the cleaning assemblies by increasing cleaning assemblies in existing knife system
It sets and is cleaned, to prevent the gap between grit blocking knife lip, to improve production efficiency.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of knife system characterized by comprising
Body part comprising:
First knife lip；
Second knife lip is oppositely arranged with the first knife lip；Setting is spaced between the first knife lip and the second knife lip；
Cleaning assemblies is connect with the body part, and the cleaning assemblies was used in the body part free time, to the body part
It is cleaned.
2. knife system according to claim 1, which is characterized in that
The first knife lip includes upper and lower part；The second knife lip also includes upper and lower part；Under the first knife lip
The side of portion towards the second knife lip is provided with the first clean tank；
The cleaning assemblies includes:
Input channel, the input channel are connect with one end of the body part；
Output channel, the output channel are connect with the other end of the body part, the input channel and the output channel
It is corresponding with the position of first clean tank.
3. knife system according to claim 2, it is characterised in that the lower part of the second knife lip is towards the first knife lip
Side be provided with the second clean tank, the position of first clean tank with and second clean tank position it is corresponding.
4. knife system according to claim 3, which is characterized in that
The shape of first clean tank and second clean tank is semicircle.
5. knife system according to claim 2, it is characterised in that first clean tank is from one end of the first knife lip
Extend to the other end.
6. knife system according to claim 2, which is characterized in that
The radius of first clean tank is greater than the first preset value.
7. knife system according to claim 2, which is characterized in that
The input channel connect by the first valve with one end of the body part, the output channel pass through the second valve and
The other end of the body part connects.
8. knife system according to claim 7, it is characterised in that the cleaning assemblies further includes control module, the control
Module is connect with first valve and second valve respectively；
The control module, for controlling first valve and second valve closing in body part work；With
And in the body part free time, first valve and second valve opening are controlled.
9. knife system according to claim 1, which is characterized in that the body part includes first pipe, first pipe
Road is set to the top in the gap between the first knife lip and the second knife lip.
10. knife system according to claim 1, which is characterized in that
The knife system is liquid cutter device or air knife apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910103209.3A CN109671656B (en) | 2019-02-01 | 2019-02-01 | Knife device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910103209.3A CN109671656B (en) | 2019-02-01 | 2019-02-01 | Knife device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109671656A true CN109671656A (en) | 2019-04-23 |
| CN109671656B CN109671656B (en) | 2020-10-16 |
Family
ID=66151011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910103209.3A Active CN109671656B (en) | 2019-02-01 | 2019-02-01 | Knife device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109671656B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201886235U (en) * | 2010-06-13 | 2011-06-29 | 北京京东方光电科技有限公司 | Liquid knife |
| US20120276832A1 (en) * | 2011-04-29 | 2012-11-01 | H. Opdam Management B.V. | Air Curtain, And A Vehicle Provided With Such An Air Curtain |
| CN203904459U (en) * | 2014-06-25 | 2014-10-29 | 合肥鑫晟光电科技有限公司 | Aqua knife and etching device |
| CN204338427U (en) * | 2014-12-26 | 2015-05-20 | 苏州晶洲装备科技有限公司 | High uniformity liquid cutter |
-
2019
- 2019-02-01 CN CN201910103209.3A patent/CN109671656B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201886235U (en) * | 2010-06-13 | 2011-06-29 | 北京京东方光电科技有限公司 | Liquid knife |
| US20120276832A1 (en) * | 2011-04-29 | 2012-11-01 | H. Opdam Management B.V. | Air Curtain, And A Vehicle Provided With Such An Air Curtain |
| CN203904459U (en) * | 2014-06-25 | 2014-10-29 | 合肥鑫晟光电科技有限公司 | Aqua knife and etching device |
| CN204338427U (en) * | 2014-12-26 | 2015-05-20 | 苏州晶洲装备科技有限公司 | High uniformity liquid cutter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109671656B (en) | 2020-10-16 |
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