CN204149032U - A kind of polishing machine polishing fluid pipeline pure water recoiling device - Google Patents
A kind of polishing machine polishing fluid pipeline pure water recoiling device Download PDFInfo
- Publication number
- CN204149032U CN204149032U CN201420491658.2U CN201420491658U CN204149032U CN 204149032 U CN204149032 U CN 204149032U CN 201420491658 U CN201420491658 U CN 201420491658U CN 204149032 U CN204149032 U CN 204149032U
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- CN
- China
- Prior art keywords
- pure water
- polishing fluid
- polishing
- fluid pipeline
- check valve
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 92
- 239000012530 fluid Substances 0.000 title claims abstract description 55
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 50
- 238000002425 crystallisation Methods 0.000 abstract description 6
- 230000008025 crystallization Effects 0.000 abstract description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000011010 flushing procedure Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model belongs to monocrystalline silicon buffing sheet production technical field, relates generally to a kind of polishing machine polishing fluid pipeline pure water recoiling device.Polishing machine polishing fluid pipeline pure water recoiling device disclosed in the utility model mainly supplies ball valve (1) by pure water, pure water flowmeter (2), check valve (3), three-way connection (4), check valve (5) are formed, pure water supply ball valve (1), pure water flowmeter (2), check valve (3) connect with the second branch road of three-way connection (4) after connecting successively, the outlet of check valve (5) connects with the first branch road of three-way connection (4), and the 3rd branch road of three-way connection (4) connects with the inner polishing fluid pipeline of polishing machine.Polishing fluid pipeline pure water recoiling device structure disclosed in the utility model is simple, and install easy to operate, security performance is good, effectively can avoid the formation of crystallization in SPM-19 type polishing machine polishing fluid pipeline, reduce equipment failure rate, enhance technology stability, significantly enhance product yield.
Description
Technical field
The utility model belongs to monocrystalline silicon buffing sheet production technical field, relates generally to a kind of polishing machine polishing fluid supply line.
Background technology
Monocrystalline silicon buffing sheet is the basic material of IC industry, and one of polishing machine capital equipment that to be production polished silicon wafer indispensable.The SPM-19 type polishing machine wherein produced by Japanese FUJIKOSHI company is used widely in monocrystalline silicon buffing sheet manufacturer domestic at present.This type polishing machine employing chemically mechanical polishing mode realizes the polishing to monocrystalline silicon sheet surface, must ensure that chemical corrosion rate is removed speed with machinery and mated completely in the course of the work.Therefore the supply status of polishing fluid has extremely important impact for the product quality of monocrystalline silicon buffing sheet (hereinafter referred to as silicon chip).
In polishing production process, polishing solution supplying system continues supply polishing fluid by main turntable center supply opening to main turntable.Now, require on the one hand polishing fluid with the temperature of technique initialization, stability of flow to main turntable supply, to ensure the uniformity to silicon chip surface chemical attack effect; Require that polishing fluid remains comparatively high-cleanness, high, in order to avoid cause secondary pollution or other damage to silicon chip surface simultaneously.But we find in actual moving process, there is following outstanding problem in the polishing fluid pipeline of SPM-19 type polishing machine:
Between polishing fluid filter outlet to main turntable center supply opening, pipeline is longer, and is dispersed with the pipe fittings such as more parts such as such as flowmeter, temperature probe etc. and elbow, threeway, check valve.After polishing fluid stops supply, in above-mentioned pipeline, parts and pipe fitting, a large amount of polishing fluid can be accumulated; Along with passage of time, this part polishing fluid is deposited on tube wall and parts, inside pipe fitting gradually, forms the solid-state junction crystal being difficult to remove, thus causes a series of fault:
1, crystallization causes polishing fluid tubing internal diameter to narrow blocking even completely, cannot ensure the supply flow of polishing fluid;
2, crystallization causes the even whole components and parts of spare parts logistics instability such as flowmeter, temperature probe, check valve malfunctioning, causes great threat to the reliability of Processes and apparatus.
3, crystalline solid is solid-state and state labile, and wherein a part to be mixed in polishing fluid and together to flow to main turntable with polishing fluid, pollutes polishing cloth and is also formed polished silicon slice surface quality and threaten.
Utility model content
In view of practical problem existing in prior art, the utility model designs and discloses a kind of polishing machine polishing fluid pipeline pure water recoiling device; Under the prerequisite not changing existing polishing fluid method of supplying, by using pure water recoil polishing fluid pipeline, removing remaining polishing fluid, avoiding crystallization to generate, to solve the above-mentioned series of problems caused because of the crystallization of channel interior polishing fluid.
For realizing above-mentioned utility model object, the concrete technical scheme that the utility model is taked is: a kind of polishing machine polishing fluid pipeline pure water recoiling device, primarily of, three-way connection, pure water supply ball valve, pure water flowmeter and check valve form.Wherein, in former polishing fluid pipeline, pipeline blocks by polishing fluid supply ball valve exit, installs three-way connection additional.First branch road in this joint supplies ball valve by check valve and polishing fluid and exports and be connected; Second branch road is connected with pure water supply line by check valve, pure water flowmeter, pure water supply ball valve; 3rd branch road is connected with the inner polishing fluid pipeline of polishing machine.When polishing machine normally works, closed by the pure water supply ball valve in second branch road, the polishing fluid supply ball valve in first branch road is opened, and native mode supply pressed by polishing fluid; When polishing machine is idle, can carry out pure water recoil as required, now be closed by the polishing fluid supply ball valve in first branch road, opened by the pure water supply ball valve in second branch road, pure water recoil starts.After back flushing process terminates, then closed by the pure water supply ball valve in second branch road, the polishing fluid supply ball valve in first branch road is opened, polishing machine normal Standby.
Polishing fluid pipeline pure water recoiling device structure disclosed in the utility model is simple, and install easy to operate, security performance is good, effectively can avoid the formation of crystallization in SPM-19 type polishing machine polishing fluid pipeline, reduce equipment failure rate, enhance technology stability, significantly enhance product yield.
Accompanying drawing illustrates:
Fig. 1 is structural representation of the present utility model.
In figure: 1, pure water supply ball valve; 2, pure water flowmeter; 3, check valve; 4, three-way connection; 5, check valve; 6, polishing fluid supply ball valve; 7, pure water supply line; 8, inner polishing fluid pipeline.
Detailed description of the invention
Embodiment of the present utility model is provided as follows below in conjunction with accompanying drawing:
As shown in Figure 1, a kind of polishing machine polishing fluid pipeline pure water recoiling device described in the utility model, form primarily of pure water supply ball valve 1, pure water flowmeter 2, check valve 3, three-way connection 4, check valve 5, wherein pure water supply ball valve 1 is PVDF material, control pure water break-make, its outlet connects with pure water flowmeter 2 import; Pure water flowmeter 2 is used for showing pure water flow when recoiling, and its outlet connects with the import of check valve 3; The effect of check valve 3 ensures that pure water orientation flows into polishing machine, and prevent polishing fluid from sealing in pure water pipeline, the outlet of check valve 3 connects with three-way connection 4; With it in like manner, the effect of check valve 5 ensures that polishing fluid can only flow into polishing machine in certain direction, and prevent pure water from sealing in polishing fluid pipeline, its outlet connects with three-way connection 4 equally; The effect of three-way connection 4 is linked up pure water recoiling device, polishing solution supplying system and polishing machine internal duct.
The concrete operation step of pure water recoil is as follows: first polishing fluid is supplied ball valve 6 and close, then pure water is supplied ball valve 1 to open, use polishing machine operator scheme change-over switch that polishing machine is placed in " manually " operator scheme, " supply of polishing fluid high flow capacity ", " supply of polishing fluid low discharge " and " polishing fluid discharge " button on touch-screen are lighted simultaneously, regulate pure water flow to 16L/min, make pure water pour the inner polishing fluid pipeline of polishing machine, remaining polishing fluid is thoroughly poured discharge tube.After 5 minutes, treat that remaining polishing fluid is rinsed totally, above-mentioned touch screen option is all cancelled, pure water is supplied ball valve 1 to close, use polishing machine operator scheme change-over switch polishing machine to be placed in " automatically " operator scheme, polishing machine is switched back auto state, and back flushing process terminates.
Claims (1)
1. a polishing machine polishing fluid pipeline pure water recoiling device, is characterized in that: described polishing machine polishing fluid pipeline pure water recoiling device mainly supplies ball valve (1) by pure water, pure water flowmeter (2), check valve (3), three-way connection (4), check valve (5) are formed; Wherein, three-way connection (4) is arranged on the pipeline in polishing fluid supply ball valve (6) exit, and first branch road of three-way connection (4) supplies ball valve (6) by check valve (5) and polishing fluid and export and be connected; Three-way connection (4) second branch roads are connected with pure water supply line (7) by check valve (3), pure water flowmeter (2), pure water supply ball valve (1); Three-way connection (4) the 3rd branch road is connected with inner polishing fluid pipeline (8) of polishing machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420491658.2U CN204149032U (en) | 2014-08-29 | 2014-08-29 | A kind of polishing machine polishing fluid pipeline pure water recoiling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420491658.2U CN204149032U (en) | 2014-08-29 | 2014-08-29 | A kind of polishing machine polishing fluid pipeline pure water recoiling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204149032U true CN204149032U (en) | 2015-02-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420491658.2U Expired - Fee Related CN204149032U (en) | 2014-08-29 | 2014-08-29 | A kind of polishing machine polishing fluid pipeline pure water recoiling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204149032U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109822461A (en) * | 2019-04-11 | 2019-05-31 | 烟台工程职业技术学院(烟台市技师学院) | A kind of metal plate mirror finish polishing fluid automatic supplier |
| CN110125105A (en) * | 2019-05-05 | 2019-08-16 | 湖南五新隧道智能装备股份有限公司 | A kind of pump line cleaning structure and cleaning method |
-
2014
- 2014-08-29 CN CN201420491658.2U patent/CN204149032U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109822461A (en) * | 2019-04-11 | 2019-05-31 | 烟台工程职业技术学院(烟台市技师学院) | A kind of metal plate mirror finish polishing fluid automatic supplier |
| CN110125105A (en) * | 2019-05-05 | 2019-08-16 | 湖南五新隧道智能装备股份有限公司 | A kind of pump line cleaning structure and cleaning method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201203 Address after: 471000 No. 99 Binhe North Road, Luoyang hi tech Industrial Development Zone, Henan Patentee after: Mesk Electronic Materials Co.,Ltd. Address before: 471000 No. 99 Binhe North Road, Luoyang hi tech Industrial Development Zone, Henan Patentee before: LUOYANG SINGLE CRYSTAL SILICON GROUP Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150211 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |