CN109669224A - Semielliptical lens array and preparation method thereof based on flexible substrates production - Google Patents

Semielliptical lens array and preparation method thereof based on flexible substrates production Download PDF

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Publication number
CN109669224A
CN109669224A CN201811568080.5A CN201811568080A CN109669224A CN 109669224 A CN109669224 A CN 109669224A CN 201811568080 A CN201811568080 A CN 201811568080A CN 109669224 A CN109669224 A CN 109669224A
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China
Prior art keywords
semielliptical
lens array
flexible substrates
moulding material
module
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CN201811568080.5A
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Chinese (zh)
Inventor
叶回春
李木军
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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Priority to CN201811568080.5A priority Critical patent/CN109669224A/en
Publication of CN109669224A publication Critical patent/CN109669224A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0012Arrays characterised by the manufacturing method
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842Manufacturing moulds, e.g. shaping the mould surface by machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/02Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles
    • B29C39/10Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. casting around inserts or for coating articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0012Arrays characterised by the manufacturing method
    • G02B3/0031Replication or moulding, e.g. hot embossing, UV-casting, injection moulding

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Electroluminescent Light Sources (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

A kind of semielliptical lens array and preparation method thereof based on flexible substrates production, includes the following steps: the mold with groove of 3D printing one, is provided with oval substrate array in groove;The first moulding material is instilled in oval substrate by dispenser, forms semielliptical lens formpiston after solidification;Overmolded is carried out using the second moulding material, obtains semielliptical lens array former;Semielliptical lens array former is wrapped on cylindrical rod and obtains roll die;The flexible substrates for being coated with third moulding material are rolled using roll die, the semielliptical lens array of high-precision batch can be obtained.The present invention has many advantages, such as that technological operation is simple, the process-cycle is short, at low cost and controlled shape, can be good at meeting the needs of micro-lens array batch production.

Description

Semielliptical lens array and preparation method thereof based on flexible substrates production
Technical field
The present invention relates to optical microlens processing technique field, in particular to a kind of semielliptical based on flexible substrates production Lens array and preparation method thereof.
Background technique
Semielliptical lens are one kind more special in non-spherical lens, its face type is usually the half or one of ellipsoid Part is chiefly used in optical fiber front end face, and laser diode and its coupling efficiency can be improved, can be with using semielliptical lens Increase spot definition and numerical aperture, the purpose of cost of implementation, height assembly displacement errors tolerance, semielliptical lens are always all It is the emphasis of optics field.
Much more difficult than spherical lens of the production of semielliptical lens, it is there are two the main shaft of different curvature, when processing pair The requirement height of eccentric equal error makes processing cost very high.Typical method of producing has microcomputer control single-point diamond to add at present Work technology, common grinding polishing technology, precise compression molding technology.Also studies have reported that using hot technique of backflow of photoetching etc..But Size is unable to get in several hundred microns to the semielliptical lens of several millimeters of ranges using grinding and polishing technology at all, and diamond Turning technology cost of manufacture is high, and time-consuming.Remaining processing method is also difficult to realize the production of batch high-precision low cost.
Summary of the invention
In view of this, the main purpose of the present invention is to provide a kind of semielliptical lens arrays based on flexible substrates production And preparation method thereof, at least be partially solved at least one of above-mentioned the technical issues of referring to.
The present invention is achieved by the following technical solutions:
As one aspect of the present invention, a kind of method based on flexible substrates production semielliptical lens array is provided, Characterized by comprising the following steps:
Step 1: by 3D printing production one with reeded mold, the oval substrate battle array of protrusion is provided in the groove Column;
Step 2: the first moulding material is respectively dropped on the oval substrate array by dispenser and forms semielliptical shape, Infusion volume designs to obtain according to half ellipsoidal surface shape, and first mold material cures is made to form semielliptical lens array formpiston;
Step 3: the second moulding material being poured into the groove of the mold, be coated on the semielliptical lens array sun Second moulding material is taken off negative from semielliptical lens array is obtained after second mold material cures mould outer surface Mould;
Step 4: the semielliptical lens array former being coated on cylindrical rod, obtains being used to prepare semielliptical lens array The roll die of column;
Step 5: being rolled in the flexible substrates for being coated with third moulding material using the roll die, to the third After mold material cures, the semielliptical lens array being formed in the flexible substrates is obtained.
As another aspect of the present invention, provide it is a kind of be prepared using method as described above it is half ellipse Globe lens array is formed in a flexible substrates.
As another aspect of the invention, a kind of rolling coining platform is provided comprising: ribbon supply module applies rubber moulding Block, coining module and take-up module, in which:
Ribbon supply module is used for wound flexible substrate;
Gluing module is set to ribbon supply module rear end, for being wound through for the flexible substrates, and to passing through The flexible substrates are coated with third moulding material;
Module is imprinted, the gluing module rear end is set to, the rolling that method as described above is prepared is installed thereon Compression mould rolls the third moulding material in the flexible substrates passed through for being wound through for the flexible substrates Pressure, solidification;
Take-up module is set to the coining module rear end, for winding to the flexible substrates passed through.
Based on the above-mentioned technical proposal, the beneficial effects of the present invention are embodied in:
The present invention propose combine 3D printing technique, high-precision glue-dispensing technology and die casting technology, by theoretical calculation with Software emulation derives control half ellipsoidal surface shape method of controlling, obtains semielliptical lens array former, saturating then in conjunction with semielliptical Lens array former and rolling stamping technique, realize the batch making of semielliptical lens array on a flexible substrate, by this hair The bright semielliptical lens array produced is at low cost, manufacture craft is simple, fabrication cycle is short, continuously can in high volume replicate Feature.
Detailed description of the invention
Fig. 1 is the flow chart that the method for semielliptical lens array is made the present invention is based on flexible substrates;
Fig. 2 is that the present invention is based on the process schematic representations that flexible substrates make semielliptical lens array;
Fig. 3 is the schematic diagram for the semielliptical lens that the oval substrate designed in Fig. 2 and theoretical calculation obtain;
Fig. 4 is the structural schematic diagram that coining platform is rolled used in the embodiment of the present invention 1.
In figure: the oval substrate of 1- design, the semielliptical lens that 2- theoretical calculation obtains, 3- is with reeded mold, 4- Instill the semielliptical after glue solidifies, 5- dispenser, 6- glue drop, 7- semielliptical lens array formpiston, 8- semielliptical lens Array former, 9- roll die, 10- cylindrical rod, 11- flexible substrates, 12- gluing glue, 13- ultraviolet lamp, 14- workbench, 15- Module reference for installation item, 16- gluing module, 17- ribbon supply module, 18- imprint module, 19- take-up module, 20- adjustment module.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference Attached drawing, the present invention is described in further detail.
The semielliptical lens array and preparation method thereof that the invention discloses a kind of to be made based on flexible substrates, first with 3D printing technique prints oval substrate array, and light-sensitive material is instilled to oval base according to demand using glue dispenser with high precision On the array of bottom, semielliptical lens formpiston is formed after cured, semielliptical lens former is then obtained by overmolded;Semielliptical is saturating Mirror former is wrapped on designed cylindrical rod and obtains roll die, and roll die is attached on rolling coining platform, rolling is used The semielliptical lens array of high-precision batch can be obtained in dynamic pressure print platform.
Specifically, as shown in Figure 1, the present invention provides a kind of sides based on flexible substrates production semielliptical lens array Method, comprising the following steps:
Step 1: by 3D printing production one with reeded mold 3, the oval substrate battle array of protrusion is provided in groove Column, as shown in Fig. 2 (a).
Wherein specifically it can be used 3 d modeling software such as SolidWorks, UG NX, ProE/Creo etc. to semielliptical lens Substrate is designed, and is exported stl format, is reused high-precision 3D printer and print oval substrate array.3D printing essence Degree should be controlled can be by the layer thickness control of printing at least in 32 micron dimensions, and relative error < 0.3%.
Wherein the oval substrate 1 of each design is as shown in Figures 2 and 3 in oval substrate array, transverse size one As control within 3mm, the thickness of substrate is less than 0.3mm, in order to avoid rolling effect is bad.It is appreciated that the groove of mold is deeply slightly Higher than oval substrate thickness, so as to the casting of subsequent second moulding material.
Wherein mold materials are selected not be bonded with the second moulding material and make the indeformable material of mold.
Step 2: being respectively dropped into the first moulding material on oval substrate array by dispenser 5 into semielliptical shape, drop Enter amount to design to obtain according to half ellipsoidal surface shape, so that the first mold material cures is formed semielliptical lens array formpiston, such as Fig. 2 (b) It is shown.
Wherein, the first moulding material is ultraviolet glue or photoresist glue, such as SU8 negtive photoresist, AZ4620, TEX YEAR Ultraviolet source corresponding with the first mold material cures wave crest can be used to carry out for the small glue of the curing deformations coefficient such as 1551M2 Curing molding.
Wherein glue drop 6 is respectively dropped into oval substrate array by dispenser 5, in oval base under the action of surface tension Semielliptical shape is formed on the array of bottom, and then obtains instilling the semielliptical 4 after glue solidifies, and eventually forms semielliptical lens array sun Mould 7.
The infusion volume (i.e. glue drop amount) is the curvature according to needed for semielliptical lens and semielliptical that theoretical calculation obtains 2 volume of lens specifically can mutually be confirmed in surface Evolver software with theoretical calculation, determine semielliptical lens meridian and Curvature M, its orthogonal face curvature N, the individually relationship between the long axis length a and minor axis length b of oval substrate, as shown in figure 3, And then ellipsoid volume calculation formula is combined to obtain, whereinSince calculation method is known to those skilled in the art, And it is not related to inventive point of the present invention, and therefore not to repeat here.
Wherein dispenser 5 is the controllable dispenser of flow, has changeable needle mouth, dispensing stable gas pressure and dispensing time It can control within 0.2s, control infusion volume, root especially by the pinhole diameter of metering needle mouth, dispensing air pressure and dispensing time According to theory deduction, the time of gluing is unsuitable too long, as an example, under 60Psi dispensing air pressure, the condition of pinhole diameter 0.2mm Under, the gluing time accurately controls the radius of curvature of lens no more than 0.2S.If gluing overlong time, will lead to glue Increase, curvature defomation is not inconsistent with theoretical calculation, and is not suitable for rolling coining.
Step 3: the second moulding material being poured into the groove of mold, 7 appearance of semielliptical lens array formpiston is coated on The second moulding material is taken off from semielliptical lens array former 8 is obtained, such as Fig. 2 (c) institute after the second mold material cures in face Show.
This step carries out overmolded using the second moulding material, and the second moulding material is preferably PDMS (polydimethylsiloxane, Chinese name dimethyl silicone polymer) material, no matter with semielliptical lens array anode membrane 7 Knockout course, or excellent release property is shown in the knockout course of subsequent rolling process.PDMS solution solidifies not Can be by heater riser curing rate, heating meeting is so that oval substrate array deformation, therefore time of repose need under room temperature environment Greater than 24 hours, to guarantee that solution is fully cured.
Step 4: semielliptical lens array former being coated on cylindrical rod 10, obtains being used to prepare semielliptical lens array Roll die 9, as shown in Fig. 2 (d);
Wherein, which can be mounted on rolling coining platform as the initial roll die without pattern image It is used cooperatively, which is fixed on cylindrical rod 10 using double-sided adhesive.
Step 5: being rolled in the flexible substrates 11 for being coated with third moulding material using roll die 9, formed to third After material solidification, obtain being formed in the semielliptical lens array in flexible substrates, as shown in Fig. 2 (e).
Wherein third moulding material is ultraviolet glue glue, and cure shrinkage should be selected than small, curing rate is fast, optical property Good ultraviolet glue, if the 1551M2 that TEX YEAR is produced forms gluing glue 12 in flexible substrates 11 as shown in Fig. 2 (e), Solidify under the irradiation of ultraviolet lamp 3 while rolling.
Wherein roll die be mountable to a rolling coining platform on rolled, according to experience rolling speed early period≤ When 0.5m/min, preferable rolling and solidification effect can be obtained.
Wherein flexible substrates 11 are the optical grade film of uv transmittance >=85%, such as the optics of high ultraviolet light PET material is freely crimped with certain tensile strength and capable of coating, and the thickness of flexible substrates is preferably 75~125 μm, as The A4300 of 188 μ m thicks of TOYOBO company production can be used in example.
It is LED ultraviolet source corresponding with ultraviolet glue glue solidification wave crest that wherein ultraviolet lamp 3 is available, as excellent Choosing, solidification light intensity >=800mw/cm that third moulding material is applied2
The present invention also provides a kind of semielliptical lens array being prepared using method as described above, shapes In Cheng Yuyi flexible substrates.
The present invention more provides a kind of rolling coining platform, as shown in figure 4, comprising: ribbon supply module 17, gluing module 12, module 18 and take-up module 19 are imprinted, in which:
Ribbon supply module 17 is used for wound flexible substrate 11;
Gluing module 12 is set to 17 rear end of ribbon supply module, soft for being wound through for flexible substrates 11, and to what is passed through Property substrate 11 be coated with third moulding material;
Module 18 is imprinted, 12 rear end of gluing module is set to, the rolling that method as described above is prepared is installed thereon Compression mould 9, for being wound through for flexible substrates 11, the third moulding material in the flexible substrates 11 passed through is rolled, Solidification;
Take-up module 19 is set to coining 18 rear end of module, for winding to the flexible substrates 11 passed through.
Preferably, rolling coining platform further includes adjustment module 20, it is respectively arranged at the forward and backward of coining module 18 End, for flexible substrates 11 and the cornerite and tensile force of roll die 9 to be adjusted.
Technical solution of the present invention is described further below by a specific embodiment:
Embodiment 1
As shown in Fig. 2, the present embodiment, which is based on flexible substrates by following steps, makes semielliptical lens array:
Step 1: gone out using SolidWorks software design with reeded mold 3 according to required ellipsoid lens size, Die size: long * wide * high is having a size of 54mm*24mm*2.8mm, and groove size: long * wide * depth is 50mm*20mm*0.8mm, slot Inside be convexly equipped with 5*7 oval substrate array, each ellipse size of foundation base: long axis a is 2.4mm, and short axle b is 1.2mm, height 0.2mm.The HD3500MAX model 3D printer for reusing the production of 3D System company prints the mold.
Step 2: the relationship obtained according to surface Evolver software emulation and theoretical calculationThis implementation Desired meridian face curvature is 0.35 in example, and glue can be calculated according to existing semielliptical volume calculation formula Amount instills glue amount appropriate, specially dispenser air pressure using dispenser on the oval substrate array that step 1 prints 60Psi, pinhole diameter 0.24mm, dispensing time 0.2s, the LED light source for reusing 365nm wave crest solidify glue, and it is ellipse to obtain half Globe lens array formpiston 7;
Step 3: configured PDMS solution is poured on the semielliptical lens array formpiston 7 in step 2, fluence is poured Mold inner groovy is filled up, waiting in 24 hours is stood and is fully cured, obtain the semielliptical lens array former of PDMS material 8。
Step 4: the semielliptical lens array former 8 that third step obtains is coated on cylindrical rod 10 with double-sided adhesive, obtain Roll die 9 with semielliptical graphic feature.
Step 5: the roll die 9 in the 4th step is mounted on rolling coining platform, to soft coated with ultraviolet glue Property substrate 11 is solidified while rolling, obtains being formed in the semielliptical lens array in flexible substrates.
Wherein the rolling platform as shown in figure 4, include be installed on workbench 14 gluing module 16, ribbon supply module 17, Module 18, take-up module 19 and adjustment module 20 are imprinted, when each module is installed on the basis of module reference for installation item 15, wherein pressing Impression block 18 includes the installation position of multiple roll dies 9, for installing roll die 9;It is additionally provided in coining module 18 ultraviolet Lamp 13 is the UP314LED light source of her Vata production of Shanghai.PET flexible substrates 11 are spooled in ribbon supply module 17, the flexibility Substrate 11 is the A4300 of TOYOBO company production, 188 μm of thickness, after rolling up embossed module 18, adjustment module 20, is finally existed It is tightened in take-up module 19;Gluing module 16 is used to coat glue to the flexible substrates 11 at ribbon supply module 17;Adjustment module 20 For controlling the cornerite and tensile force of flexible substrates 11 Yu roll die 9.When rolling, by the 1551M2 of TEX YEAR company production Glue pours into the glue case in gluing module 16, starts gluing module 16, and glue is coated in flexible substrates 11, starts take-up mould Block 19, the flexible substrates 16 that driving has coated glue move forward;Ultraviolet lamp 13 under starting coining module 18, by what is imprinted The solidification of semielliptical lens array;The winding of semielliptical lens array is carried out in take-up module 19.
In conclusion the present invention realizes the batch making of semielliptical lens array on a flexible substrate, there is technique behaviour Make the advantages that simple, the process-cycle is short, at low cost and controlled shape, can be good at meeting the extensive high-precision of such lens The demand of production.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects Describe in detail bright, it should be understood that the foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to restrict the invention, it is all Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention Within the scope of.

Claims (10)

1. a kind of method based on flexible substrates production semielliptical lens array, which comprises the following steps:
Step 1: by 3D printing production one with reeded mold, the oval substrate array of protrusion is provided in the groove;
Step 2: the first moulding material being respectively dropped into semielliptical shape on the oval substrate array by dispenser, is instilled Amount designs to obtain according to half ellipsoidal surface shape, and first mold material cures is made to form semielliptical lens array formpiston;
Step 3: the second moulding material being poured into the groove of the mold, be coated on outside the semielliptical lens array formpiston Second moulding material is taken off from obtaining semielliptical lens array former after second mold material cures on surface;
Step 4: the semielliptical lens array former being coated on cylindrical rod, obtains being used to prepare semielliptical lens array Roll die;
Step 5: being rolled in the flexible substrates for being coated with third moulding material using the roll die, formed to the third After material solidification, the semielliptical lens array being formed in the flexible substrates is obtained.
2. the method according to claim 1, wherein in step 1:
The precision of 3D printing should be controlled at least: can be by the layer thickness control of printing in 32 micron dimensions, and relative error < 0.3%;
Mold materials are selected not be bonded with second moulding material and make the indeformable material of mold;
The thickness of each oval substrate is less than 0.3mm in the ellipse substrate array, and long axis length is within 3mm.
3. the method according to claim 1, wherein first moulding material is ultraviolet glue or light in step 2 Photoresist glue, preferably optical grade ultraviolet glue, using ultraviolet source corresponding with the first mold material cures wave crest into Row solidification.
4. the method according to claim 1, wherein in step 2, the dispenser have changeable needle mouth, The dispensing stable gas pressure and dispensing time can control within 0.2s, passes through the pinhole diameter of metering needle mouth, dispensing air pressure and point The glue time controls the infusion volume.
5. the method according to claim 1, wherein the infusion volume is in surface in step 2 Under Evolver software and theoretical calculation are mutually confirmed, by ellipsoid lens meridian face curvature M, its orthogonal face curvature N, single ellipse The semielliptical lens volume that the long axis length a and minor axis length b of substrate are calculated, wherein
6. second moulding material is PDMS material the method according to claim 1, wherein in step 3, Solidified under room temperature environment by standing at least 24 hours;Second moulding material pours fluence and can make the mold Groove fills up.
7. the method according to claim 1, wherein the cylindrical rod can be installed on a rolling pressure in step 4 Print platform is used cooperatively, and the semielliptical lens array former is fixed on the cylindrical rod using double-sided adhesive.
8. the method according to claim 1, wherein in step 5:
The third moulding material is ultraviolet glue glue, and the flexible substrates are that the optical grade of uv transmittance >=85% is thin Film, the thickness of the flexible substrates are preferably 75~125 μm;
The roll die is installed on rolling coining platform and is rolled, rolling speed≤0.5m/min;
Solidification light intensity >=800mw/cm that the third moulding material is applied2
9. a kind of semielliptical lens array that the method using as described in claim 1 to 8 any one is prepared, It is formed in a flexible substrates.
10. a kind of rolling imprints platform comprising: ribbon supply module, gluing module, coining module and take-up module, feature exist In:
Ribbon supply module is used for wound flexible substrate;
Gluing module is set to ribbon supply module rear end, for being wound through for the flexible substrates, and to described in passing through Flexible substrates are coated with third moulding material;
Module is imprinted, the gluing module rear end is set to, is installed thereon just like side described in claim 1 to 8 any one The roll die that method is prepared, for being wound through for the flexible substrates, to the third in the flexible substrates passed through Moulding material is rolled, is solidified;
Take-up module is set to the coining module rear end, for winding to the flexible substrates passed through.
CN201811568080.5A 2018-12-18 2018-12-18 Semielliptical lens array and preparation method thereof based on flexible substrates production Pending CN109669224A (en)

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Publication number Priority date Publication date Assignee Title
CN115194989A (en) * 2022-07-15 2022-10-18 深圳市谛源光科有限公司 Optical microstructure group preparation method and system

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TW200848787A (en) * 2006-08-30 2008-12-16 Hitachi Maxell Microlens array sheet used for backlight device and roll plate for manufacturing microlens array sheet
CN101339364A (en) * 2008-08-13 2009-01-07 中国科学院上海光学精密机械研究所 Method for manufacturing microlens array by soft mode impressing
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115194989A (en) * 2022-07-15 2022-10-18 深圳市谛源光科有限公司 Optical microstructure group preparation method and system

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