CN109656016B - Tubular deformable mirror and use method thereof - Google Patents
Tubular deformable mirror and use method thereof Download PDFInfo
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- CN109656016B CN109656016B CN201910132036.8A CN201910132036A CN109656016B CN 109656016 B CN109656016 B CN 109656016B CN 201910132036 A CN201910132036 A CN 201910132036A CN 109656016 B CN109656016 B CN 109656016B
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- annular
- split plate
- incident
- deformable mirror
- annular split
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
Abstract
The application relates to a tubular deformable mirror and a use method thereof, belonging to the technical field of optical devices, wherein the tubular deformable mirror comprises a basal layer and a piezoelectric layer, the basal layer and the piezoelectric layer are tubular, the inner surface of the basal layer is plated with an optical reflection film, the outer surface of the basal layer is optically bonded with the inner surface of the piezoelectric layer, the inner surface of the piezoelectric layer is integrally plated with a first electrode to form a ground electrode of the deformable mirror, and the outer surface of the piezoelectric layer is plated with a plurality of second electrodes to form a driver of the deformable mirror.
Description
Technical Field
The application belongs to the technical field of optical devices, and particularly relates to a tubular deformable mirror and a use method thereof.
Background
The adaptive optics technology has wide application in the beam quality control of laser devices and astronomical observation fields, and the deformable mirror is a core device in the adaptive optics technology. At present, the deformable mirrors are of various types, such as piezoelectric stack driving deformable mirrors, double piezoelectric sheet deformable mirrors, micromechanical thin film deformable mirrors, liquid crystal space phase modulators and the like. Different deformable mirrors are suitable for different application scenarios, such as micro-mechanical film deformable mirrors are suitable for small-caliber light beam applications; the liquid crystal spatial phase modulator is suitable for low-power and small-caliber light beams; the deformable mirror driven by the piezoelectric stack is only suitable for the application of light beams with large caliber (more than tens of mm) due to the large size of the driver. However, for annular beams with a narrow beam cross section and a large outer diameter, conventional deformable mirrors cannot be well applied and corrected.
Disclosure of Invention
Aiming at various defects in the prior art, in order to solve the problems, a tubular deformable mirror and a use method thereof are provided, an annular light beam is made to enter the inner surface of the tubular deformable mirror at a larger incident angle through an incident annular split plate and an emergent annular split plate, the action area of the annular light beam and the tubular deformable mirror is enlarged, more drivers are arranged in the action area of the tubular deformable mirror, and a better wavefront correction effect is achieved.
In order to achieve the above purpose, the present application provides the following technical solutions:
the tubular deformable mirror comprises a basal layer and a piezoelectric layer, wherein the basal layer and the piezoelectric layer are tubular, the inner surface of the basal layer is plated with an optical reflection film, the outer surface of the basal layer is optically bonded with the inner surface of the piezoelectric layer, the inner surface of the piezoelectric layer is integrally plated with a first electrode to form a ground electrode of the deformable mirror, and the outer surface of the piezoelectric layer is plated with a plurality of second electrodes to form a driver of the deformable mirror.
Further, the inner surface of the piezoelectric layer is plated with a first metal film serving as a ground electrode of the deformable mirror, the outer surface of the piezoelectric layer is plated with a second metal film, and the second metal film is divided into a plurality of sub-modules to form a driver of the deformable mirror.
Further, the inner diameter of the piezoelectric layer is greater than the outer diameter of the base layer, and the difference between the two is not greater than 100 microns.
Further, the piezoelectric layer has a thickness of 480-520 micrometers.
In addition, the application also provides a using method of the tubular deformable mirror, which comprises the following steps:
s1: along the transmission direction of the annular light beam, an incident annular split plate is arranged at the front end of the tubular deformable mirror, an emergent annular split plate is arranged at the rear end of the tubular deformable mirror, the incident annular split plate and the emergent annular split plate are identical in material and structure, and the incident annular split plate and the emergent annular split plate are symmetrically arranged by taking the central line of the tubular deformable mirror as a symmetrical axis;
s2: the annular light beam serving as the incident light beam is transmitted to the inner surface of the tubular deformation mirror through the incident annular splitting plate, the annular light beam reflected by the inner surface of the tubular deformation mirror is transmitted to the emergent annular splitting plate, and the incident angle of the annular light beam incident to the inner surface of the tubular deformation mirror can be increased through the incident annular splitting plate and the emergent annular splitting plate.
Further, the incident annular split plate is annular and comprises a first light beam contact surface and a second light beam contact surface, the first light beam contact surface is perpendicular to the inner surface and the outer surface of the incident annular split plate, the second light beam contact surface is obliquely arranged, an included angle is formed between the second light beam contact surface and the outer surface of the incident annular split plate to serve as a split angle, and the first light beam contact surface of the incident annular split plate serves as an incident surface of an annular light beam.
Further, the cleaving angle is beta, and the incident angle of the annular light beam to the inner surface of the tubular deformable mirror is thetaWherein n is the refraction of the incident annular split plate to the annular light beamEmissivity of the material.
Further, in the step S2, the annular light beam is transmitted to the outgoing annular splitting plate and is transmitted and output as an output light beam, the output light beam has the same shape as the incident light beam, and the first light beam contact surface and the second light beam contact surface of the incident annular splitting plate and the outgoing annular splitting plate are both plated with high-transmittance dielectric films.
Further, in step S2, the annular light beam is transmitted to the outgoing annular split plate and is reflected to the inner surface of the tubular deformable mirror through the second light beam contact surface of the outgoing annular split plate, the annular light beam reflected by the inner surface of the tubular deformable mirror is transmitted to the incoming annular split plate again and is transmitted and output as an output light beam, the output light beam is identical to the incident light beam in form, the first light beam contact surface and the second light beam contact surface of the incoming annular split plate are both plated with high-transmittance dielectric films, and the second light beam contact surface of the outgoing annular split plate is plated with high-reflectance dielectric films.
The beneficial effects of the application are as follows:
the base layer and the piezoelectric layer are arranged to be tubular, the device is suitable for carrying out wavefront correction on an annular light beam, the device is novel in structure, meanwhile, the incident angle of the annular light beam to the inner surface of the tubular deformable mirror is increased by means of the incident annular split plate and the emergent annular split plate, the action area of the annular light beam and the tubular deformable mirror is increased, more drivers are arranged in the action area of the tubular deformable mirror, the correction capability of the deformable mirror is enhanced, and a better wavefront correction effect is achieved.
Drawings
FIG. 1 is a schematic view of the overall structure of the present application;
FIG. 2 is a schematic view of the light path of the second embodiment;
FIG. 3 is a schematic view of the incidence angle and the cleaving angle of an annular beam incident on the inner surface of a tube deformable mirror;
FIG. 4 is a schematic view of the optical path of the third embodiment;
FIG. 5 (a) is a schematic diagram of the wavefront distortion of an annular beam to be corrected;
FIG. 5 (b) is a schematic diagram of the wavefront distortion of an annular beam corrected using a conventional deformable mirror;
fig. 5 (c) is a schematic diagram of wavefront distortion of the ring beam corrected by using the embodiment.
In the accompanying drawings: the device comprises a 1-basal layer, a 2-piezoelectric layer, a 3-incident annular split plate, a 301-first light beam contact surface, a 302-second light beam contact surface, a 303-incident annular split plate outer surface, a 304-incident annular split plate inner surface, a 4-tubular deformable mirror and a 5-emergent annular split plate.
Detailed Description
In order to make the technical solution of the present application better understood by those skilled in the art, the technical solution of the present application will be clearly and completely described in the following with reference to the accompanying drawings, and based on the embodiments of the present application, other similar embodiments obtained by those skilled in the art without making any inventive effort should be included in the scope of protection of the present application. In addition, directional words such as "upper", "lower", "left", "right", and the like, as used in the following embodiments are merely directions with reference to the drawings, and thus, the directional words used are intended to illustrate, not to limit, the application.
Embodiment one:
as shown in fig. 1, a tubular deformable mirror comprises a substrate layer 1 and a piezoelectric layer 2, wherein the substrate layer 1 and the piezoelectric layer 2 are tubular, the inner surface of the substrate layer 1 is polished and plated with an optical reflection film for reflecting an annular light beam, and the outer surface of the substrate layer 1 is roughened and is adhered to the inner surface of the piezoelectric layer 2 through optical cement. The piezoelectric layer 2 is entirely plated with a first electrode forming the ground electrode of the deformable mirror and is plated with a plurality of second electrodes forming the driver of the deformable mirror on its outer surface. The substrate layer 1 and the piezoelectric layer 2 can be arranged as a whole, or can be formed by splicing a plurality of curved surfaces.
Specifically, the inner surface of the piezoelectric layer 2 is plated with a first metal film as a ground electrode of the deformable mirror, and the outer surface of the piezoelectric layer is plated with a second metal film, and the second metal film is divided into a plurality of sub-modules to form a driver of the deformable mirror. The drivers may be, but not limited to, piezoelectric sheets or columns, and the arrangement, number, etc. of the drivers may be specifically designed according to the wavefront distortion size, distortion characteristics, and correction target to be achieved of the annular light beam to be corrected. In this embodiment, the actuator is in the form of a piezoelectric sheet. The inner diameter of the piezoelectric layer 2 is larger than the outer diameter of the substrate layer 1, and the difference between the inner diameter and the outer diameter is not larger than 100 micrometers, so that the optical cement is prevented from being too thick. The thickness of the piezoelectric layer is 480-520 micrometers to ensure good driving capability.
As shown in fig. 2, a method for using the tubular deformable mirror comprises the following steps: along the transmission direction of annular light beam, the front end of tubular deformation mirror 4 places incident annular split plate 3, and the rear end of tubular deformation mirror 4 places emergent annular split plate 5, incident annular split plate 3 is the same with the material and the structure of emergent annular split plate 5, and both regard the central line of tubular deformation mirror 4 as symmetry axis symmetry setting, the annular light beam as incident light beam transmits the internal surface (i.e. the internal surface of stratum basale 1) of tubular deformation mirror 4 through incident annular split plate 3, the annular light beam of tubular deformation mirror 4 internal surface reflection transmits to emergent annular split plate 5, and incident annular split plate 3, emergent annular split plate 5 all promote the radial transmission angle of annular light beam to change, make annular light beam incident to the internal surface of tubular deformation mirror 4 with great incident angle, increase annular light beam and tubular deformation mirror 4's region of action, be favorable to tubular deformation mirror 4 to set up more drivers at the region of action, realize better wave front correction effect.
Specifically, as shown in fig. 3, the incident annular split plate 3 is annular, and includes a first beam contact surface 301 and a second beam contact surface 302, where the first beam contact surface 301 is perpendicular to an inner surface 304 of the incident annular split plate and an outer surface 303 of the incident annular split plate, the second beam contact surface 302 is obliquely disposed, and an included angle exists between the second beam contact surface 302 and the outer surface 303 of the incident annular split plate as a splitting angle, the first beam contact surface 301 of the incident annular split plate 3 is used as an incident surface of an annular beam, the splitting angle is β, and an incident angle of the annular beam incident on an inner surface of the tubular deformable mirror is θ:
wherein n is the refractive index of the incident annular split plate 3 to the annular light beam, θ 1 Is the first to enter the annular splitting plate 3 for the annular light beamIncidence angle θ on two-beam interface 302 2 The angle α is the angle between the light beam emitted from the second light beam contact surface 302 and the horizontal direction, and the angle is the angle between the light beam emitted from the second light beam contact surface 302 and the horizontal direction.
Embodiment two:
the same parts as those of the first embodiment are not repeated, and the difference is that:
as shown in fig. 2, the annular light beam is transmitted to the outgoing annular split plate 5 and is transmitted and output as an output light beam, and the output light beam is identical to the incident light beam in form, that is, according to reversibility of the light path, because the incident annular split plate 3 and the outgoing annular split plate 5 have identical structure and materials, and in addition, the incident annular split plate 3 and the outgoing annular split plate 5 are symmetrically arranged, and the output light beam is restored to the original form of the incident light beam. In order to ensure the light energy utilization rate, the first beam contact surface and the second beam contact surface of the incident annular split plate 3 and the emergent annular split plate 5 are plated with high-permeability dielectric films.
Specifically, the wavefront distortion of the annular light beam to be corrected, which is distributed circumferentially and radially, is shown in fig. 5 (a), the aperture of the annular light beam to be corrected is 50mm, the wall thickness is 4mm, and the pv value is 6um. The wavefront distortion of the annular light beam to be corrected after being corrected by the conventional deformable mirror is as shown in fig. 5 (b), and is basically consistent with the distribution and the PV value of the wavefront distortion before correction, which shows that the conventional deformable mirror has extremely weak capability of correcting the wavefront distortion of the annular light beam with large caliber and thin wall. The wavefront distortion corrected by this embodiment exhibits a uniform distribution of the characteristics as shown in fig. 5 (c), with a PV value of 0.3um and a PV value of only 5% of the PV value before correction. Obviously, compared with the traditional deformable mirror, the tubular deformable mirror has obviously improved capability of correcting the wave front distortion of the large-caliber thin-wall annular light beam.
Embodiment III:
the same parts as those of the first embodiment are not repeated, and the difference is that:
as shown in fig. 4, the annular beam is transmitted to the outgoing annular split plate 5 and is reflected to the inner surface of the tubular deformable mirror 4 through the second beam contact surface of the outgoing annular split plate 5, and the annular beam reflected by the inner surface of the tubular deformable mirror 4 is transmitted to the incoming annular split plate 3 again and is transmitted as an output beam, that is, the annular beam passes through the tubular deformable mirror 4 twice, so that the correction capability of the tubular deformable mirror 4 is doubled, and meanwhile, the output beam is identical to the form of the incoming beam. The first beam contact surface and the second beam contact surface of the incident annular split plate 3 are both plated with high-transmittance dielectric films, and the second beam contact surface of the emergent annular split plate 5 is plated with high-reflection dielectric films.
The foregoing detailed description of the application has been presented for purposes of illustration and description, but is not intended to limit the scope of the application, i.e., the application is not limited to the details shown and described.
Claims (9)
1. The tubular deformation mirror is characterized by comprising a basal layer and a piezoelectric layer, wherein the basal layer and the piezoelectric layer are tubular, the inner surface of the basal layer is plated with an optical reflection film, the outer surface of the basal layer is optically bonded with the inner surface of the piezoelectric layer, the inner surface of the piezoelectric layer is entirely plated with a first electrode to form a ground electrode of the deformation mirror, and the outer surface of the piezoelectric layer is plated with a plurality of second electrodes to form a driver of the deformation mirror;
along the transmission direction of the annular light beam, the front end of the tubular deformable mirror is provided with an incident annular split plate, the rear end of the tubular deformable mirror is provided with an emergent annular split plate, the incident annular split plate and the emergent annular split plate are the same in material and structure, and the incident annular split plate and the emergent annular split plate are symmetrically arranged by taking the central line of the tubular deformable mirror as a symmetrical axis.
2. A tubular deformable mirror according to claim 1, wherein the inner surface of the piezoelectric layer is coated with a first metal film as the ground electrode of the deformable mirror and the outer surface thereof is coated with a second metal film, the second metal film being divided into a plurality of sub-modules to form the driver of the deformable mirror.
3. A tubular deformable mirror according to claim 2, wherein the inner diameter of the piezoelectric layer is greater than the outer diameter of the base layer and the difference is no greater than 100 microns.
4. A tube deformable mirror as claimed in claim 3, wherein the piezoelectric layer has a thickness of 480-520 microns.
5. A method of using the tube deformable mirror of any one of claims 1-4, wherein the annular beam as the incident beam is transmitted to the inner surface of the tube deformable mirror via the incident annular split plate, the annular beam reflected by the inner surface of the tube deformable mirror is transmitted to the exit annular split plate, and the incident annular split plate and the exit annular split plate can both increase the incident angle of the annular beam to the inner surface of the tube deformable mirror.
6. The method of claim 5, wherein the incident annular split plate is annular and comprises a first beam contact surface and a second beam contact surface, the first beam contact surface is perpendicular to the inner surface and the outer surface of the incident annular split plate, the second beam contact surface is obliquely arranged and forms an included angle with the outer surface of the incident annular split plate as a split angle, and the first beam contact surface of the incident annular split plate is used as an incident surface of the annular beam.
7. The method of claim 6, wherein the angle of cleaving is β and the angle of incidence of the annular beam of light to the inner surface of the deformable tubular mirror is θWherein n is the refractive index of the incident annular split plate to the annular light beam.
8. The method of claim 7, wherein the annular beam is transmitted to the exit annular split plate and transmitted out as an output beam, the output beam is identical to the incident beam in shape, and the first beam contact surface and the second beam contact surface of the incident annular split plate and the exit annular split plate are coated with a high-transmittance dielectric film.
9. The method of claim 7, wherein the annular beam is transmitted to the exit annular split plate and reflected to the inner surface of the tubular deformable mirror via the second beam contact surface of the exit annular split plate, the annular beam reflected by the inner surface of the tubular deformable mirror is transmitted again to the entrance annular split plate and transmitted as an output beam, the output beam has the same shape as the incident beam, the first beam contact surface and the second beam contact surface of the entrance annular split plate are both coated with a high-transmittance dielectric film, and the second beam contact surface of the exit annular split plate is coated with a high-reflectance dielectric film.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910132036.8A CN109656016B (en) | 2019-02-22 | 2019-02-22 | Tubular deformable mirror and use method thereof |
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| CN201910132036.8A CN109656016B (en) | 2019-02-22 | 2019-02-22 | Tubular deformable mirror and use method thereof |
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| CN109656016B true CN109656016B (en) | 2023-09-01 |
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