CN109639255A - A kind of duplexer - Google Patents
A kind of duplexer Download PDFInfo
- Publication number
- CN109639255A CN109639255A CN201811592051.2A CN201811592051A CN109639255A CN 109639255 A CN109639255 A CN 109639255A CN 201811592051 A CN201811592051 A CN 201811592051A CN 109639255 A CN109639255 A CN 109639255A
- Authority
- CN
- China
- Prior art keywords
- resonator
- lwr
- filter
- parallel
- duplexer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001914 filtration Methods 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 abstract description 25
- 238000005859 coupling reaction Methods 0.000 abstract description 25
- 230000008878 coupling Effects 0.000 abstract description 24
- 238000013461 design Methods 0.000 abstract description 3
- 230000009466 transformation Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 18
- 238000003780 insertion Methods 0.000 description 12
- 230000037431 insertion Effects 0.000 description 12
- 238000004891 communication Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 235000019687 Lamb Nutrition 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02236—Details of surface skimming bulk wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02251—Design
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
The present invention provides a kind of duplexer, comprising: emission filter, the emission filter is connected between transmitting terminal and antenna end and the series resonator including being connected with tapered in form and parallel resonator；And receiving filter, the receiving filter is connected between receiving end and the antenna end and the series resonator including being connected with tapered in form and parallel resonator, wherein, LWR resonator is connected in the series arm of TX or RX or LWR resonator is connected in the parallel branch of TX or RX and connect with ground terminal；The application be introduced into the design of the structure of filter and duplexer LWR resonator applications in piezoelectric filter, duplexer structure in improve the performance of piezoelectric filter, duplexer, the characteristics of by being adjusted using the impedance operator, flexible frequency and piezoelectric coupling coefficient of LWR resonance frequency point, using the combination of different frequency and piezoelectric coupling coefficient, the impedance transformation needed is realized in specific frequency point.
Description
Technical field
The present invention relates to semiconductor and micro electro mechanical system fields, more particularly to a kind of duplexer.
Background technique
It is more and more harsh to the performance requirement of radio frequency leading portion with the fast development of wireless communication system.And channel radio
The direction of letter system towards multi-functional, multiband, multi-protocols is developed, this proposes more the radio-frequency front-end in wireless communication equipment
High challenge.As the very important module of radio frequency leading portion, the performance of filter duplexer plays decision to radio-frequency front-end performance
The effect of property.Therefore there is very urgent demand to the lasting improvement of filter duplexer performance.
In field of radio frequency communication, thin-film bulk acoustic wave filter (Film Bulk Acoustic Wave Resonator,
FBAR) roll-offed with its small size, height, filter with low insertion loss the characteristics of, increasingly draw attention, the market share continues to increase.However, constituting
The frequency of resonator is realized by adjusting the thickness of physical layer in FBAR filter, and adjustable extent is limited, and adjusts
In the case that range is wide, resonator behavior is difficult to ensure.In addition, the piezoelectric coupling coefficient of resonator is substantially dependent upon piezoelectricity Jie
The thickness of matter layer and and material parameter, be difficult to adjust on same filter.Frequency and piezoelectric coupling coefficient realize range by
Limit the promotion of the overall performance of filter.
Therefore, how frequency and piezoelectric coupling coefficient adjusted by LWR resonator, improves piezoelectric filter, duplexer
The technical issues of performance is those skilled in the art's current urgent need to resolve.
Summary of the invention
In view of this, the present invention provides a kind of duplexer.
In a first aspect, providing a kind of duplexer, comprising:
Emission filter, the emission filter are connected between transmitting terminal and antenna end and including being connected with tapered in form
The series resonator and parallel resonator connect；And
Receiving filter, the receiving filter are connected between receiving end and the antenna end and including with trapezoidal shape
The series resonator and parallel resonator of formula connection,
Wherein, LWR resonator is connected in the series arm of TX or RX or LWR resonator is connected to the branch in parallel of TX or RX
Road is simultaneously connect with ground terminal.
The present invention introduces LWR lamb wave resonator in the design of filter and duplexer, existing by FBAR resonance
In the filter or duplexer that device is constituted, replace FBAR resonator using LWR resonator parts, LWR resonator replaces FBAR
The number of resonator and position are all with no restrictions.Compared to FBAR resonator by adjusting frequency and pressure to metal and dielectric thickness
Other than electric coupling coefficient, the plane for increasing metallic pattern inserts duty ratio for referring to spacing and metallic pattern etc. and adjusts frequency and piezoelectricity
The approach of the coefficient of coup, therefore, the adjustable range of frequency and piezoelectric coupling coefficient are wider.
Further, the LWR resonator is connected between emission filter or receiving filter and antenna end.
Further, the LWR resonator is two groups, and one group is connected between emission filter and antenna end, another
Group is connected between receiving filter and antenna end.
Further, the LWR resonator is connected between emission filter and antenna end.
Further, the LWR resonator is connected between receiving filter and antenna end.
Further, the LWR resonator is connected to the parallel connection of any one node in emission filter or receiving filter
Branch road is simultaneously connect with ground terminal.
Still further, the LWR resonator is two groups, two groups of LWR resonators are connected to emission filter, receive
It is connect in filter in the parallel branch of any one node and with ground terminal.
Still further, the LWR resonator be connected in emission filter in the parallel branch of any one node and with
Ground terminal connection.
Still further, the LWR resonator be connected in receiving filter in the parallel branch of any one node and with
Ground terminal connection.
Further, the LWR resonator LWR resonator is four groups, and two groups of LWR resonators are connected on transmitting filtering respectively
Between device and antenna end, receiving filter and antenna end, another two groups of LWR resonators are connected to emission filter, receive filter
It is connect in wave device in the parallel branch of any one node and with ground terminal.
Further, the LWR resonator is two groups, and one group is connected between emission filter and antenna end, another group
It is connected in emission filter in the parallel branch of any one node and is connect with ground terminal.
Further, the LWR resonator is two groups, and one group is connected between receiving filter and antenna end, another group
It is connected in receiving filter in the parallel branch of any one node and is connect with ground terminal.
The present invention compared with the prior art the utility model has the advantages that
The application introduces LWR resonator applications in piezoelectric filter, duplex in the design of the structure of filter and duplexer
The performance for improving piezoelectric filter, duplexer in the structure of device, by the impedance operator of utilization LWR resonance frequency point, flexibly
The characteristics of frequency and piezoelectric coupling coefficient are adjusted, using the combination of different frequency and piezoelectric coupling coefficient, in specific frequency
Point realizes the impedance transformation needed.
Compared to FBAR by being adjusted other than frequency and piezoelectric coupling coefficient to metal and dielectric thickness, metal is also added
The plane of figure inserts the approach that duty ratio for referring to spacing and metallic pattern etc. adjusts frequency and piezoelectric coupling coefficient, therefore, frequency
It is wider with the adjustable range of piezoelectric coupling coefficient.On the one hand matched freedom degree is increased in passband using LWR, improve band
Interior Insertion Loss and echo performance.On the other hand, real by the variation of impedance by adjusting some frequency point of the frequency of LWR outside band
The improvement of existing Out-of-band rejection and isolation.And LWR structure and FBAR process compatible are guaranteeing that stacking thickness and FBAR are identical
In the case of, specific frequency and piezoelectric coupling coefficient can be realized by adjusting planar graph.
Detailed description of the invention
Attached drawing for a better understanding of the present invention, does not constitute an undue limitation on the present invention.Wherein:
Fig. 1 is a kind of circuit structure diagram of duplexer of the application first embodiment.
Fig. 2 is the circuit structure diagram of the duplexer of the first variation of the application first embodiment.
Fig. 3 is the circuit structure diagram of the duplexer of the second variation of the application first embodiment.
Fig. 4 is a kind of circuit structure diagram of duplexer of the application second embodiment.
Fig. 5 is the circuit structure diagram of the duplexer of the first variation of two embodiment of the application.
Fig. 6 is the circuit structure diagram of the duplexer of the second variation of two embodiment of the application.
Fig. 7 is a kind of circuit structure diagram of the duplexer of the application 3rd embodiment.
Fig. 8 is the circuit structure diagram of the duplexer of the first variation of three embodiment of the application.
Fig. 9 is the circuit structure diagram of the duplexer of the second variation of three embodiment of the application.
Figure 10 is the TX frequency range pass band insertion loss curve of the duplexer of the application 3rd embodiment.
Figure 11 is the RX frequency range pass band insertion loss curve of the duplexer of the application 3rd embodiment.
Figure 12 is the plane structure chart of the application LWR resonator.
Figure 13 is a kind of realization structure chart of the application LWR resonator electrode.
Figure 14 is a kind of sectional view for realizing structure of the application LWR resonator electrode.
Figure 15 is that the another of the application LWR resonator electrode realizes structure chart.
Figure 16 is another sectional view for realizing structure of the application LWR resonator electrode.
Figure 17 is the different corresponding frequency of slotting finger spacing of the application LWR resonator.
Figure 18 is the different corresponding electromechanical coupling factor of slotting finger spacing of the application LWR resonator.
Figure 19 is the different corresponding frequency of piezoelectric thickness of the application LWR resonator.
Figure 20 is the different corresponding electromechanical coupling factor of piezoelectric thickness of the application LWR resonator.
Figure 21 is the vibration displacement figure under the application LWR resonator emulation device operating mode.
Specific embodiment
Technical solution in order to enable those skilled in the art to better understand the present invention, below in conjunction with of the invention real
The attached drawing in example is applied, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without making creative work, all should belong to protection of the present invention
Range.
Embodiment 1
Fig. 1 shows a kind of circuit structure diagram of the duplexer of the application first embodiment.As shown in Figure 1, a kind of duplex
Device, comprising:
Emission filter 101, the emission filter 101 be connected between transmitting terminal (TX) and antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator；And
Receiving filter 102, the receiving filter be connected between receiving end (RX) and the antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator,
Wherein, LWR resonator is two groups, one group of transmitting terminal series connection LWR resonator 103 be connected on emission filter 101 with
Between antenna end (ANT), another group of receiving end series connection LWR resonator 104 is connected on receiving filter 102 and antenna end (ANT)
Between.
Specifically, emission filter 101 and receiving filter 102 are by thtee-stage shiplock resonator and three-level parallel resonator
It constitutes, node of the thtee-stage shiplock resonator respectively in the side nearly antenna end (ANT) draws branch to ground terminal, and three-level is in parallel
Resonator is connected on branch road respectively.
Fig. 2 shows the circuit structure diagrams of the duplexer of the first variation of the application first embodiment.As shown in Fig. 2,
A kind of duplexer, comprising:
Emission filter 101, the emission filter 101 be connected between transmitting terminal (TX) and antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator；And
Receiving filter 102, the receiving filter be connected between receiving end (RX) and the antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator,
Wherein, transmitting terminal series connection LWR resonator 103 is connected between emission filter 101 and antenna end (ANT).
Specifically, emission filter 101 is made of thtee-stage shiplock resonator and three-level parallel resonator, the thtee-stage shiplock
Node of the resonator respectively in the side nearly antenna end (ANT) draws branch to ground terminal, and three-level parallel resonator is connected on respectively
Branch road；Receiving filter 102 is made of level Four series resonator and three-level parallel resonator, the three-level parallel resonator
It is connected in parallel between two series resonators and a ground terminal respectively.
Fig. 3 shows the circuit structure diagram of the duplexer of the second variation of the application first embodiment.As shown in figure 3,
A kind of duplexer, comprising:
Emission filter 101, the emission filter 101 be connected between transmitting terminal (TX) and antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator；And
Receiving filter 102, the receiving filter be connected between receiving end (RX) and the antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator,
Wherein, series connection LWR resonator 104 in receiving end is connected between receiving filter 102 and antenna end (ANT).
Specifically, emission filter 101 is made of level Four series resonator and three-level parallel resonator, the three-level is in parallel
Resonator is connected in parallel respectively between two series resonators and a ground terminal；Receiving filter 102 is by thtee-stage shiplock
Resonator and three-level parallel resonator are constituted, and node of the thtee-stage shiplock resonator respectively in the side nearly antenna end (ANT) draws
For out branch to ground terminal, three-level parallel resonator is connected on branch road respectively.
Embodiment 2
Fig. 4 shows a kind of circuit structure diagram of the duplexer of the application second embodiment.As shown in figure 4, a kind of duplex
Device, comprising:
Emission filter 101, the emission filter 101 be connected between transmitting terminal (TX) and antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator；And
Receiving filter 102, the receiving filter be connected between receiving end (RX) and the antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator,
Wherein, LWR resonator is two groups, and two groups of LWR resonators 105,106 are connected to transmitting filtering 101, receive filter
It is connect in wave device 102 in the parallel branch of any one node and with ground terminal.
Specifically, emission filter 101, receiving filter 102 are by level Four series resonator and two-stage parallel connection resonator
Constitute, the two-stage parallel connection resonator be connected in parallel on respectively nearly transmitting terminal (TX) series resonator two-by-two and ground terminal it
Between, transmitting terminal parallel connection LWR resonator 105 be connected in parallel nearly two series resonator of antenna end (ANT) and ground terminal it
Between；Receiving filter 102 is made of level Four series resonator and two-stage parallel connection resonator, the two-stage parallel connection resonator difference
It is connected in parallel between the series resonator two-by-two and a ground terminal of proximity receiving end (RX), receiving end parallel connection LWR resonator
106 are connected in parallel between nearly two series resonator of antenna end (ANT) and a ground terminal.
Fig. 5 shows the circuit structure diagram of the duplexer of the first variation of the application second embodiment.As shown in figure 5,
A kind of duplexer, comprising:
Emission filter 101, the emission filter 101 be connected between transmitting terminal (TX) and antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator；And
Receiving filter 102, the receiving filter be connected between receiving end (RX) and the antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator,
Wherein, transmitting terminal parallel connection LWR resonator 105 is connected to the parallel branch of any one node in emission filter 101
Above and with ground terminal it connect.
Specifically, emission filter 101 is made of level Four series resonator and two-stage parallel connection resonator, the two-stage parallel connection
Resonator is connected in parallel respectively between the series resonator two-by-two and a ground terminal of nearly transmitting terminal (TX), and transmitting terminal is in parallel
LWR resonator 105 is connected in parallel between nearly two series resonator of antenna end (ANT) and a ground terminal；Receiving filter
102 are made of level Four series resonator and three-level parallel resonator, and the three-level parallel resonator is connected in two in parallel respectively
Between series resonator and a ground terminal.
Fig. 6 shows the circuit structure diagram of the duplexer of the second variation of the application second embodiment.As shown in fig. 6,
A kind of duplexer, comprising:
Emission filter 101, the emission filter 101 be connected between transmitting terminal (TX) and antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator；And
Receiving filter 102, the receiving filter be connected between receiving end (RX) and the antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator,
Wherein, receiving end parallel connection LWR resonator 106 is connected to the parallel branch of any one node in receiving filter 102
Above and with ground terminal it connect.
Specifically, emission filter 101 is made of level Four series resonator and three-level parallel resonator, the three-level is in parallel
Resonator is connected in parallel respectively between two series resonators and a ground terminal；Receiving filter 102 is connected by level Four
Resonator and two-stage parallel connection resonator are constituted, and the two-stage parallel connection resonator is connected in proximity receiving end (RX) in parallel respectively and goes here and there two-by-two
Join between resonator and a ground terminal, receiving end parallel connection LWR resonator 106 is connected in nearly antenna end (ANT) two in parallel and goes here and there
Join between resonator and a ground terminal.
Embodiment 3
Fig. 7 shows a kind of circuit structure diagram of the duplexer of the application 3rd embodiment.As shown in fig. 7, a kind of duplex
Device, comprising:
Emission filter 101, the emission filter 101 be connected between transmitting terminal (TX) and antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator；And
Receiving filter 102, the receiving filter be connected between receiving end (RX) and the antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator,
Wherein, LWR resonator is four groups, one group of transmitting terminal series connection LWR resonator 103 be connected on emission filter 101 with
Between antenna end (ANT), one group of receiving end series connection LWR resonator 104 be connected on receiving filter 102 and antenna end (ANT) it
Between, one group of transmitting terminal parallel connection LWR resonator 105 be connected in emission filter in the parallel branch of any one node and with ground connection
End connection, one group of receiving end parallel connection LWR resonator 106 be connected in receiving filter in the parallel branch of any one node and with
Ground terminal connection.
Specifically, emission filter 101 and receiving filter 102 are by thtee-stage shiplock resonator and two-stage parallel connection resonator
It constitutes, the two-stage parallel connection resonator is connected in parallel respectively between two series resonators and a ground terminal.
Fig. 8 shows the circuit structure diagram of the duplexer of the first variation of the application 3rd embodiment.As shown in figure 8,
A kind of duplexer, comprising:
Emission filter 101, the emission filter 101 be connected between transmitting terminal (TX) and antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator；And
Receiving filter 102, the receiving filter be connected between receiving end (RX) and the antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator,
Wherein, LWR resonator is two groups, one group of transmitting terminal series connection LWR resonator 103 be connected on emission filter 101 with
Between antenna end (ANT), another group of transmitting terminal parallel connection LWR resonator 105 is connected to any one node in emission filter 101
It is connect in parallel branch and with ground terminal.
Specifically, emission filter 101 is made of thtee-stage shiplock resonator and two-stage parallel connection resonator, the two-stage parallel connection
Resonator is connected in parallel respectively between two series resonators and a ground terminal；Receiving filter 102 is connected by level Four
Resonator and three-level parallel resonator are constituted, the three-level parallel resonator be connected in parallel respectively two series resonators and
Between one ground terminal.
Fig. 9 shows the circuit structure diagram of the duplexer of the second variation of the application 3rd embodiment.As shown in figure 9,
A kind of duplexer, comprising:
Emission filter 101, the emission filter 101 be connected between transmitting terminal (TX) and antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator；And
Receiving filter 102, the receiving filter be connected between receiving end (RX) and the antenna end (ANT) and
Including the series resonator connected with tapered in form and parallel resonator,
Wherein, LWR resonator is two groups, one group of receiving end series connection LWR resonator 104 be connected on emission filter 101 with
Between antenna end (ANT), another group of receiving end parallel connection LWR resonator 106 is connected to any one node in receiving filter 102
It is connect in parallel branch and with ground terminal.
Specifically, emission filter 101 is made of level Four series resonator and three-level parallel resonator, the three-level is in parallel
Resonator is connected in parallel respectively between two series resonators and a ground terminal；Receiving filter 102 is by thtee-stage shiplock
Resonator and two-stage parallel connection resonator are constituted, the two-stage parallel connection resonator be connected in parallel respectively two series resonators and
Between one ground terminal.
The TX frequency range pass band insertion loss that Figure 10 shows the duplexer of the application 3rd embodiment improves curve.It can by Figure 10
Know, filament is the TX frequency range pass band insertion loss curve that duplexer does not increase LWR resonator structure, and thick line is that duplexer increase LWR is humorous
The TX frequency range pass band insertion loss curve for device structure of shaking, duplexer increase frequency and piezoelectricity coupling by increasing LWR resonator structure
The freedom degree of coefficient adjustment, it is more preferable to the matching of passband, therefore Insertion Loss is improved.
The RX frequency range pass band insertion loss that Figure 11 shows the duplexer of the application 3rd embodiment improves curve, can by Figure 11
Know, filament is the RX frequency range pass band insertion loss curve that duplexer does not increase LWR resonator structure, and thick line is that duplexer increase LWR is humorous
The RX frequency range pass band insertion loss curve for device structure of shaking, duplexer increase frequency and piezoelectricity coupling by increasing LWR resonator structure
The freedom degree of coefficient adjustment, it is more preferable to the matching of passband, therefore Insertion Loss is improved.
Here, LWR resonator will be described.Figure 12 shows the plane structure chart of the LWR resonator of the application.Such as Figure 12 institute
Show, LWR resonator includes substrate 1, cavity 2, anode 3, cathode 4 and piezoelectric layer medium, and the positive and negative electrode is referred to by intersecting to insert
Electrode connection, the dielectric layer are located between the slotting finger of positive and negative electrode.This figure merely illustrates one layer of electrode structure, actually
LWR resonator stereochemical structure is sandwich structure.
Figure 13 shows a kind of realization structure of the LWR resonator electrode of the application.Figure 14 shows this LWR resonator electricity
The sectional view of pole.Figure 15 shows a kind of realization structure of the LWR resonator electrode of the application.Figure 16 shows this LWR resonance
The sectional view of device electrode.
By Figure 13-16 it is found that Figure 14 and Figure 16 is two kinds of ways of realization of LWR resonator electrode, Figure 14 upper/lower electrode is
Finger-cross structure, Figure 15's powers on extremely Cha Zhi mechanism, and lower electrode is block of metal structure.
Figure 17 shows the different corresponding frequencies of slotting finger spacing of the application LWR resonator.
Figure 18 shows the different corresponding electromechanical coupling factor of slotting finger spacing of the application LWR resonator.
Figure 19 shows the different corresponding frequency of piezoelectric thickness of the application LWR resonator.
Figure 20 shows the different corresponding electromechanical coupling factor of piezoelectric thickness of the application LWR resonator.
By Figure 17-20 it is found that LWR is as a kind of resonator, can with existing FBAR process compatible, in the filtering of FBAR
It is integrated in device.And its frequency and electromechanical coupling factor kt2 adjusting is very flexible, overcomes FBAR frequency itself and mechanical-electric coupling
The lesser problem of coefficient relative adjustment range, it is more preferable with interior matching, it can be used to improve Out-of-band rejection.It wherein inserts and refers to spacing
The adjusting of pitch is an increased dimension, because only adjusting frequency and mechanical-electric coupling in vertical lamination in FBAR
Coefficient k t2.On the other hand, in fact similar with FBAR, resonance frequency is positioned away from working frequency region remote position, it can
To come as a capacitor using being more ideal as a capacitor and because the mobility scale of frequency is bigger
Selection.
Figure 21 is the vibration displacement figure under the application LWR resonator emulation device operating mode.As shown in Figure 21, this device
Part is the device that a kind of electromagnetic wave arrives electromagnetic wave conversion to sound wave again, when resonance frequency is when input terminal inputs, device generation sound
Wave resonance, surface vibration is stronger more deeply feeling for color in Figure 21, expression be device operation the case where.
In several embodiments provided herein, it should be understood that disclosed system and method can pass through it
Its mode is realized.For example, the apparatus embodiments described above are merely exemplary, for example, the division of the unit, only
Only a kind of logical function partition, there may be another division manner in actual implementation, such as multiple units or components can be tied
Another system is closed or is desirably integrated into, or some features can be ignored or not executed.Another point, it is shown or discussed
Mutual coupling, direct-coupling or communication connection can be through some interfaces, the INDIRECT COUPLING or logical of device or unit
Letter connection can be electrical property, mechanical or other forms.The unit as illustrated by the separation member can be or can also be with
It is not physically separated, component shown as a unit may or may not be physical unit, it can be located at one
A place, or may be distributed over multiple network units.Part therein or complete can be selected according to the actual needs
Portion unit achieves the purpose of the solution of this embodiment.
It, can also be in addition, the functional units in various embodiments of the present invention may be integrated into one processing unit
It is that each unit physically exists alone, can also be integrated in one unit with two or more units.
Although by reference to attached drawing and combining the mode of preferred embodiment to the present invention have been described in detail, the present invention
It is not limited to this.Without departing from the spirit and substance of the premise in the present invention, those of ordinary skill in the art can be to the present invention
Embodiment carry out various equivalent modifications or substitutions, and these modifications or substitutions all should in covering scope of the invention/appoint
What those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, answer
It is included within the scope of the present invention.Therefore, protection scope of the present invention is answered described is with scope of protection of the claims
It is quasi-.
Claims (10)
1. a kind of duplexer characterized by comprising
Emission filter, the emission filter are connected between transmitting terminal and antenna end and including being connected with tapered in form
Series resonator and parallel resonator；And
Receiving filter, the receiving filter are connected between receiving end and the antenna end and including being connected with tapered in form
The series resonator and parallel resonator connect,
Wherein, LWR resonator is connected in the series arm of TX or RX or LWR resonator is connected in the parallel branch of TX or RX
And it is connect with ground terminal.
2. duplexer according to claim 1, which is characterized in that the LWR resonator is connected on emission filter or connects
It receives between filter and antenna end.
3. duplexer according to claim 2, which is characterized in that the LWR resonator is two groups, and one group is connected on transmitting
Between filter and antenna end, another group is connected between receiving filter and antenna end.
4. duplexer according to claim 2, which is characterized in that the LWR resonator is one group, is connected on transmitting filtering
Between device and antenna end or it is connected between receiving filter and antenna end.
5. duplexer according to claim 1, which is characterized in that the LWR resonator be connected to emission filter or
It is connect in receiving filter in the parallel branch of any one node and with ground terminal.
6. duplexer according to claim 5, which is characterized in that the LWR resonator is two groups, two groups of LWR resonance
Device is connected to emission filter, connect in receiving filter in the parallel branch of any one node and with ground terminal.
7. duplexer according to claim 5, which is characterized in that the LWR resonator is one group, is connected to transmitting filter
It is connect in the parallel branch that any one node is drawn in wave device or receiving filter and with ground terminal.
8. duplexer according to claim 1, which is characterized in that the LWR resonator LWR resonator be four groups, two
Group LWR resonator is connected on respectively between emission filter and antenna end, receiving filter and antenna end, another two groups of LWR resonance
Device is connected to emission filter, connect in receiving filter in the parallel branch of any one node and with ground terminal.
9. duplexer according to claim 1, which is characterized in that the LWR resonator is two groups, and one group is connected on hair
Penetrate between filter and antenna end, another group be connected in emission filter in the parallel branch of any one node and and ground terminal
Connection.
10. duplexer according to claim 1, which is characterized in that the LWR resonator is two groups, and one group is connected on
Between receiving filter and antenna end, another group be connected in receiving filter in the parallel branch of any one node and with ground connection
End connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811592051.2A CN109639255B (en) | 2018-12-25 | 2018-12-25 | Duplexer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811592051.2A CN109639255B (en) | 2018-12-25 | 2018-12-25 | Duplexer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109639255A true CN109639255A (en) | 2019-04-16 |
| CN109639255B CN109639255B (en) | 2022-07-12 |
Family
ID=66077475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811592051.2A Active CN109639255B (en) | 2018-12-25 | 2018-12-25 | Duplexer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109639255B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110943711A (en) * | 2019-11-06 | 2020-03-31 | 天津大学 | Duplexer and electronic equipment |
| CN112187210A (en) * | 2020-09-30 | 2021-01-05 | 诺思(天津)微系统有限责任公司 | Filter packaging structure, multiplexer and communication equipment |
| CN112212850A (en) * | 2020-09-22 | 2021-01-12 | 诺思(天津)微系统有限责任公司 | Annular silicon gyroscope structure, manufacturing process thereof and silicon gyroscope sensor |
| WO2021068671A1 (en) * | 2019-10-11 | 2021-04-15 | 天津大学 | Filter circuit and method for improving performance of filter circuit, and signal processing device |
| CN112886942A (en) * | 2019-11-29 | 2021-06-01 | 华为技术有限公司 | Filter circuit, duplexer, and communication device |
| CN117650766A (en) * | 2024-01-30 | 2024-03-05 | 成都频岢微电子有限公司 | Acoustic wave duplexer and suppression resonator |
Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1253713A2 (en) * | 2001-04-23 | 2002-10-30 | Agilent Technologies, Inc. (a Delaware corporation) | Controlled effective coupling coefficients for film bulk acoustic resonators |
| DE10241425A1 (en) * | 2002-09-06 | 2004-03-18 | Epcos Ag | Acoustic wave type resonator especially, for band-pass HF filters and mobile communication equipment, has selected material and thickness ratio adjusted for layer sequence of resonator |
| US20040150293A1 (en) * | 2002-12-05 | 2004-08-05 | Michael Unterberger | Component operating with bulk acoustic waves, and having asymmetric/symmetrical circuitry |
| CN101212211A (en) * | 2006-12-25 | 2008-07-02 | 京都陶瓷株式会社 | Duplexer and communications equipment |
| US8174170B1 (en) * | 2009-05-13 | 2012-05-08 | Sand 9, Inc. | Methods and apparatus for mechanical resonating structures |
| CN102811032A (en) * | 2011-06-01 | 2012-12-05 | 太阳诱电株式会社 | Electronic circuit and electronic module |
| CN103078157A (en) * | 2013-01-16 | 2013-05-01 | 天津大学 | Piezoelectric sound wave duplexer module |
| DE102012224460A1 (en) * | 2011-12-27 | 2013-06-27 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Solid-mount bulk acoustic wave resonator (SMR) used in wireless communication device, has active area of acoustic reflector that is formed by overlapping of acoustic reflector, electrodes and piezoelectric layer |
| CN103312286A (en) * | 2012-03-07 | 2013-09-18 | 太阳诱电株式会社 | Resonator, method of manufacturing the same, frequency filter, duplexer and electronic device |
| CN103378817A (en) * | 2012-04-13 | 2013-10-30 | 太阳诱电株式会社 | Filter device, manufacturing method for filter device, and duplexer |
| CN103973332A (en) * | 2013-01-25 | 2014-08-06 | 太阳诱电株式会社 | Module Substrate And Duplexer Module |
| JP2015054986A (en) * | 2013-09-11 | 2015-03-23 | 太陽誘電株式会社 | Film deposition method of aluminum nitride film, manufacturing method of elastic wave device, and manufacturing apparatus of aluminum nitride film |
| CN105281701A (en) * | 2014-07-25 | 2016-01-27 | 太阳诱电株式会社 | Filter and duplexer |
| CN106374870A (en) * | 2016-08-31 | 2017-02-01 | 兆讯恒达微电子技术(北京)有限公司 | Crystal oscillator |
| US9948273B1 (en) * | 2007-12-21 | 2018-04-17 | Sitime Corporation | Temperature stable MEMS resonator |
| CN108540105A (en) * | 2018-04-11 | 2018-09-14 | 武汉大学 | Rf-resonator structure |
| CN108964631A (en) * | 2017-05-18 | 2018-12-07 | 三星电机株式会社 | Bulk acoustic wave resonator |
-
2018
- 2018-12-25 CN CN201811592051.2A patent/CN109639255B/en active Active
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1253713A2 (en) * | 2001-04-23 | 2002-10-30 | Agilent Technologies, Inc. (a Delaware corporation) | Controlled effective coupling coefficients for film bulk acoustic resonators |
| DE10241425A1 (en) * | 2002-09-06 | 2004-03-18 | Epcos Ag | Acoustic wave type resonator especially, for band-pass HF filters and mobile communication equipment, has selected material and thickness ratio adjusted for layer sequence of resonator |
| US20040150293A1 (en) * | 2002-12-05 | 2004-08-05 | Michael Unterberger | Component operating with bulk acoustic waves, and having asymmetric/symmetrical circuitry |
| CN101212211A (en) * | 2006-12-25 | 2008-07-02 | 京都陶瓷株式会社 | Duplexer and communications equipment |
| US9948273B1 (en) * | 2007-12-21 | 2018-04-17 | Sitime Corporation | Temperature stable MEMS resonator |
| US8174170B1 (en) * | 2009-05-13 | 2012-05-08 | Sand 9, Inc. | Methods and apparatus for mechanical resonating structures |
| CN102811032A (en) * | 2011-06-01 | 2012-12-05 | 太阳诱电株式会社 | Electronic circuit and electronic module |
| DE102012224460A1 (en) * | 2011-12-27 | 2013-06-27 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Solid-mount bulk acoustic wave resonator (SMR) used in wireless communication device, has active area of acoustic reflector that is formed by overlapping of acoustic reflector, electrodes and piezoelectric layer |
| CN103312286A (en) * | 2012-03-07 | 2013-09-18 | 太阳诱电株式会社 | Resonator, method of manufacturing the same, frequency filter, duplexer and electronic device |
| CN103378817A (en) * | 2012-04-13 | 2013-10-30 | 太阳诱电株式会社 | Filter device, manufacturing method for filter device, and duplexer |
| CN103078157A (en) * | 2013-01-16 | 2013-05-01 | 天津大学 | Piezoelectric sound wave duplexer module |
| CN103973332A (en) * | 2013-01-25 | 2014-08-06 | 太阳诱电株式会社 | Module Substrate And Duplexer Module |
| JP2015054986A (en) * | 2013-09-11 | 2015-03-23 | 太陽誘電株式会社 | Film deposition method of aluminum nitride film, manufacturing method of elastic wave device, and manufacturing apparatus of aluminum nitride film |
| CN105281701A (en) * | 2014-07-25 | 2016-01-27 | 太阳诱电株式会社 | Filter and duplexer |
| US20160028371A1 (en) * | 2014-07-25 | 2016-01-28 | Taiyo Yuden Co., Ltd. | Filter and duplexer |
| CN106374870A (en) * | 2016-08-31 | 2017-02-01 | 兆讯恒达微电子技术(北京)有限公司 | Crystal oscillator |
| CN108964631A (en) * | 2017-05-18 | 2018-12-07 | 三星电机株式会社 | Bulk acoustic wave resonator |
| CN108540105A (en) * | 2018-04-11 | 2018-09-14 | 武汉大学 | Rf-resonator structure |
Non-Patent Citations (3)
| Title |
|---|
| SAMUEL PEI HAO LOKE 等: "Two dimensional, high electromechanical coupling aluminium nitride Lamb wave resonators", 《 2015 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC)》 * |
| XIN SUN 等: "Flexible Lamb Wave Resonators Based on Lithium Niobate Thin Film", 《2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)》 * |
| 唐宁 等: "新型便携式薄膜体声波谐振气体传感器的研制与应用", 《纳米技术与精密工程》 * |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021068671A1 (en) * | 2019-10-11 | 2021-04-15 | 天津大学 | Filter circuit and method for improving performance of filter circuit, and signal processing device |
| CN110943711A (en) * | 2019-11-06 | 2020-03-31 | 天津大学 | Duplexer and electronic equipment |
| WO2021088477A1 (en) * | 2019-11-06 | 2021-05-14 | 天津大学 | Duplexer and electronic device |
| CN110943711B (en) * | 2019-11-06 | 2023-10-03 | 天津大学 | Duplexer and electronic equipment |
| CN112886942A (en) * | 2019-11-29 | 2021-06-01 | 华为技术有限公司 | Filter circuit, duplexer, and communication device |
| CN112212850A (en) * | 2020-09-22 | 2021-01-12 | 诺思(天津)微系统有限责任公司 | Annular silicon gyroscope structure, manufacturing process thereof and silicon gyroscope sensor |
| CN112187210A (en) * | 2020-09-30 | 2021-01-05 | 诺思(天津)微系统有限责任公司 | Filter packaging structure, multiplexer and communication equipment |
| CN112187210B (en) * | 2020-09-30 | 2021-12-28 | 诺思(天津)微系统有限责任公司 | Filter packaging structure, multiplexer and communication equipment |
| CN117650766A (en) * | 2024-01-30 | 2024-03-05 | 成都频岢微电子有限公司 | Acoustic wave duplexer and suppression resonator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109639255B (en) | 2022-07-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109639255A (en) | A kind of duplexer | |
| CN109802644A (en) | A kind of duplexer | |
| US10141643B2 (en) | High-frequency filter including matching circuit | |
| US11381217B2 (en) | Radio frequency circuit, multiplexer, radio frequency front end circuit and communication apparatus | |
| CN110071702A (en) | A kind of bandpass filter and duplexer | |
| JP5262413B2 (en) | Multiband duplexer module | |
| US8390392B2 (en) | Variable capacitance module and matching circuit module | |
| EP2747282B1 (en) | Tunable impedance network | |
| CN109831178A (en) | A kind of duplexer | |
| DE102010062069A1 (en) | Duplexer with circuit for negative phase shifting | |
| CN109417378A (en) | Multiplexer, high-frequency front-end circuit and communication device | |
| EP3902137A1 (en) | Band-pass filter and method for improving suppression level thereof, duplexer and electronic device | |
| CN111342813B (en) | Radio frequency piezoelectric multiplexer and electronic equipment for improving isolation based on phase shift network | |
| CN110071703A (en) | A kind of duplexer | |
| CN110089032A (en) | Filter and method for adjusting performance of filter | |
| CN111130498A (en) | Duplexer | |
| WO2021013571A1 (en) | Saw/baw hybrid rf receiving filter, rf duplexer and rf multiplexer | |
| CN112216939A (en) | Filter device and method for realizing filtering power division and duplexer functions | |
| CN107453858A (en) | Support the radio frequency front-end device and electronic equipment of carrier aggregation | |
| CN111342806B (en) | Piezoelectric filter having lamb wave resonator, duplexer, and electronic device | |
| JP2014003460A (en) | Resonator, duplexer, and communication device | |
| CN109314504B (en) | Elastic wave filter device | |
| CN109560832A (en) | A kind of radio circuit and terminal for 5G communication | |
| CN112106303B (en) | Multiplexer | |
| WO2019185285A1 (en) | Electroacoustic lattice filter and rf filter module comprising a lattice filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20240130 Granted publication date: 20220712 |