CN109637691B - Binaryzation X-ray energy selection device and preparation method thereof - Google Patents
Binaryzation X-ray energy selection device and preparation method thereof Download PDFInfo
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Abstract
A binaryzation X-ray energy selection device relates to the field of X-ray energy selection and is formed by periodically stacking optical units which are distributed binaryzation through transmission of X-rays, specifically a columnar X-ray reflection element and a columnar X-ray absorption element. The X-ray reflection element is of a hollow structure, the inner wall of the X-ray reflection element is coated with a reflection layer, and low-energy X-rays can be transmitted in the X-ray reflection element and reflected by the inner wall of the channel, so that the low-pass high-resistance energy selection effect is obtained. The X-ray absorption element is of a solid structure and is doped with an X-ray absorbent, so that high-energy X-ray can be absorbed, and the energy selection efficiency and the signal to noise ratio of imaging and detection are improved. A preparation method of a binaryzation X-ray energy selection device is characterized in that a reflecting element monofilament and an absorbing element monofilament are stacked and combined in a sleeve to obtain a compound filament rod; and then carrying out hot stretching, cutting, hot fusion, corrosion, metal deposition and other steps on the multifilament bar to obtain the binaryzation X-ray energy selection device. The method is simple and convenient to operate, low in requirement on equipment, high in controllability of the preparation process and high in precision.
Description
Technical Field
The invention relates to the field of X-ray energy selection, in particular to a binarization X-ray energy selection device and a preparation method thereof.
Background
In the research fields of high energy density physical basic research based on laser-plasma interaction, laboratory celestial body physics, inertial confinement fusion and the like, acquisition of time, space and spectral information of X-ray radiation in a detection or imaging mode is an important means for researching the state of a plasma substance. Generally, the X-ray radiation of the plasma is broad spectrum radiation formed by bremsstrahlung, radiation and recombination radiation processes, and the X-ray radiation in a specific spectral region must be independently detected or imaged to achieve fine characterization of the plasma state. For example, in the indirect driving inertial confinement fusion research, independent imaging is carried out on radiation of an N band (0.5-1 keV) and an M band (1.6-3.5 keV) of a black cavity, which is a basic requirement for researching physical processes such as laser injection, light spot movement and the like.
In general, energy selection for X-rays can be achieved with ross filters (composite metal filters) or "grazing incidence plane mirrors + single layer metal filters". The Ross filter consists of two metal films with adjacent Z values, and energy selection is realized through the difference of absorption edges of the two materials. This approach has very high transmission of hard X-rays, which is an inevitable high energy X-ray noise when used as an energy selecting device for a detection or imaging system. The combination of a grazing incidence plane mirror and a single-layer metal filter is the most applied X-ray energy selection method at present, and the energy selection is realized by utilizing the high-pass characteristic of the metal filter and the low-pass characteristic of a grazing incidence reflector. However, the method has the main problems that: 1) because the light paths are not coaxial, the different channels have different visual angles; 2) the grazing incidence angle is generally less than 10 degrees, and in order to cover all incident X-rays, the mirror surface must be large enough, so that on one hand, a large spatial solid angle is occupied, the difficulty of channel number expansion is improved, and on the other hand, the energy spectrum consistency of different areas of the obtained image is poor; 3) the light path structure is complicated, and the problems of high assembly difficulty, poor maintainability and the like exist.
The adoption of the microchannel plate can realize the transmission energy selection of X-rays, which is a new idea for the development of X-ray optics in recent years. The soft X-ray is transmitted in the micro-channel and reflected by the inner wall of the channel, so that the energy selection effect of low pass and high resistance is obtained. In the energy selection scheme, the light source, the energy selection device and the recording equipment are positioned on the same optical axis, so that a plurality of defects of an energy selection light path based on a plane mirror due to non-coaxial light paths are overcome in principle. However, the microchannel plate device is mainly used for realizing electronic gain amplification, an optical unit for realizing high-energy X-ray absorption is not arranged in the structure of the microchannel plate device, and high-energy components in incident light either penetrate through the walls of the multilayer channel to form channel crosstalk so as to reduce imaging spatial resolution or directly penetrate through the microchannel plate device to be recorded by a detector or image recording equipment to form high-energy direct-penetration noise.
Disclosure of Invention
The invention aims to provide a binarization X-ray energy selection device which is formed by periodically arranging binarization X-ray micro optical units, can realize transmission energy selection of soft X-rays, can absorb high-energy X-rays, inhibits the body effect of X-rays transmitted in the device, and further improves the energy selection efficiency and the signal-to-noise ratio of imaging and detection.
The invention also aims to provide a preparation method of the binarization X-ray energy selection device, which is simple and convenient to operate, has low requirement on equipment and can be efficiently used for preparing the binarization X-ray energy selection device.
The embodiment of the invention is realized by the following steps:
a binaryzation X-ray energy selecting device is formed by stacking a plurality of columnar X-ray reflecting elements and a plurality of columnar X-ray absorbing elements; the X-ray reflecting element is of a hollow structure, and the inner wall of the X-ray reflecting element is provided with a reflecting layer; the X-ray absorbing element is a solid structure doped with an X-ray absorber.
A preparation method of the binarization X-ray energy selecting device comprises the following steps:
s1, stacking and combining the reflecting element monofilament and the absorbing element monofilament in a sleeve to obtain a compound filament rod;
the sleeve and the absorption element monofilament are both made of corrosion-resistant materials, the reflection element monofilament comprises a shell and an inner core which are mutually sleeved, the shell is made of corrosion-resistant materials, and the inner core is made of corrosion-prone materials;
s2, carrying out hot stretching on the multifilament bar, and cutting;
s3, arranging the cut multifilament bars into a screen arranging mould, and carrying out hot fusion to form a semi-finished product of the energy selecting device;
s4, etching off the inner core of the single wire of the reflecting element to form a hole in the semi-finished product;
and S5, depositing metal in the holes of the semi-finished product to form a reflecting layer, and obtaining the binaryzation X-ray energy selection device.
The embodiment of the invention has the beneficial effects that:
the embodiment of the invention provides a binarization X-ray energy selection device which is formed by stacking a plurality of columnar X-ray reflection elements and a plurality of columnar X-ray absorption elements. Wherein, X-ray reflection unit is hollow structure, and the inner wall is plated with the reflecting layer, and soft X-ray can be transmitted in the X-ray reflection unit and reflected by the inner wall of the channel, obtains the energy selection effect of low pass high resistance. Meanwhile, the X-ray absorption element is of a solid structure and is doped with an X-ray absorbent, so that high-energy X-ray can be absorbed, and the energy selection efficiency and the signal-to-noise ratio of imaging and detection are improved.
The embodiment of the invention also provides a preparation method of the binaryzation X-ray energy selection device, wherein the reflecting element monofilament and the absorbing element monofilament are stacked and combined in the sleeve to obtain a compound filament rod; hot stretching, cutting and hot fusing the multifilament bar, and corroding the inner core of the single filament of the reflecting element to form a hole in the semi-finished product during the energy selection period; and finally, depositing metal in the holes of the semi-finished product to form a reflecting layer, thereby obtaining the binaryzation X-ray energy selection device. The preparation method is simple and convenient to operate, has low requirements on equipment, has high controllability and high precision in the preparation process, and can be efficiently used for preparing the binaryzation X-ray energy selection device.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic diagram of a binarized X-ray energy selecting device provided in embodiment 1 of the present invention;
fig. 2 is a cross-sectional view of a binarized X-ray energy selecting device provided in embodiment 1 of the present invention;
fig. 3 is a schematic diagram of a binarized X-ray energy selecting device provided in embodiment 2 of the present invention;
fig. 4 is a cross-sectional view of a binarized X-ray energy selecting device provided in embodiment 2 of the present invention;
fig. 5 is a graph illustrating a soft selection energy and a high energy cut-off effect of the binarized X-ray energy selecting device provided in embodiment 1 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. The examples, in which specific conditions are not specified, were conducted under conventional conditions or conditions recommended by the manufacturer. The reagents or instruments used are not indicated by the manufacturer, and are all conventional products available commercially.
The following describes a binary X-ray energy selecting device and a method for manufacturing the same according to embodiments of the present invention.
The embodiment of the invention provides a binarization X-ray energy selection device which is formed by stacking a plurality of columnar X-ray reflection elements and a plurality of columnar X-ray absorption elements; the X-ray reflecting element is of a hollow structure, and the inner wall of the X-ray reflecting element is provided with a reflecting layer; the X-ray absorbing element is a solid structure doped with an X-ray absorber. The soft X-ray can be transmitted in the X-ray reflection element and reflected by the inner wall of the channel, so that the energy selection effect of low pass and high resistance is obtained. The X-ray absorption element can absorb high-energy X-rays, and the energy selection efficiency and the signal-to-noise ratio of imaging and detection are improved.
Furthermore, the height of the X-ray reflecting element is 50-5000 microns, and the cross section of the X-ray reflecting element is circular or rectangular; when the cross section of the X-ray reflection element is circular, the diameter of the X-ray reflection element is 5-20 mu m; when the cross section of the X-ray reflection element is rectangular, the side length is 5-20 μm.
The reflective layer is a plating layer formed of at least one of Au, Ag, C, Ni, Mo, and Al. In practical use, the appropriate plating metal can be selected according to the required energy selection section. Preferably, the plating metal may be formed by atomic deposition, and the uniformity of the reflective layer may be ensured by finely controlling the deposition process conditions.
Similarly, the height of the X-ray absorption element is 50-5000 μm, and the cross section of the X-ray absorption element is circular or rectangular; preferably, the X-ray absorbing element has a diameter of 5 to 20 μm when the cross section is circular, and has a side length of 5 to 20 μm when the cross section is rectangular.
The X-ray absorber can be any material capable of absorbing high energy X-rays, for example, X-ray absorbers include PbO; further, when PbO is used as the X-ray absorbent, the content thereof in the X-ray absorbing element is more than 30% by weight to achieve the desired absorption effect.
For better tiling, the X-ray reflecting elements and the X-ray absorbing elements should be consistent in size. That is, the length and cross-section of the X-ray reflecting element and the X-ray absorbing element should be consistent.
When the X-ray reflecting elements and the X-ray absorbing elements are stacked, the axis directions of the X-ray reflecting elements and the X-ray absorbing elements are kept parallel, and the X-ray reflecting elements and the X-ray absorbing elements are alternately distributed. The X-ray absorbing elements are arranged around each X-ray reflecting element, and the X-ray reflecting elements are arranged around each X-ray absorbing element, so that better energy selection efficiency is achieved. In addition, a certain included angle can exist between the axial direction of the X-ray reflection element and the X-ray absorption element and the normal direction of the input surface of the binaryzation X-ray energy selection device, and the angle range is 0-10 degrees.
The embodiment of the invention also provides a preparation method of the binarization X-ray energy selection device, which comprises the following steps:
s1, stacking and combining the reflecting element monofilament and the absorbing element monofilament in a sleeve to obtain a compound filament rod;
the sleeve and the absorbing element monofilament are both made of corrosion-resistant materials, the reflecting element monofilament comprises a shell and an inner core which are mutually sleeved, the shell is made of corrosion-resistant materials, and the inner core is made of corrosion-prone materials.
Furthermore, in actual operation, an outer tube made of corrosion-resistant materials and a core made of corrosion-prone materials are combined into a core rod assembly, and then hot stretching is carried out to prepare the reflecting element monofilament. Meanwhile, an outer tube made of a corrosion-resistant material and a core body made of a corrosion-resistant material doped with an X-ray absorbent are combined into a core rod assembly, and the absorption element monofilament is prepared by hot stretching. The outer tubes for preparing the reflecting element monofilaments and the absorbing element monofilaments can adopt the same specification so as to be convenient for batch production and reduce the production cost.
Wherein, the corrosion-resistant material is high-lead silicate glass, and the specific components comprise silicon dioxide, alkali metal (Li, Na, Ka and the like) oxide, lead oxide and the like, wherein the content of the lead oxide reaches 40 percent; the corrosion susceptible material is a barium containing borate glass material. It should be noted that the etching mechanism for manufacturing the binary X-ray energy selecting device is only one feasible manufacturing method provided by the embodiment of the present invention, and in other preferred embodiments of the present invention, other mechanisms may also be adopted, for example, a high temperature resistant material may be used to replace the corrosion resistant material, a non-high temperature resistant material may be used to replace the corrosion resistant material, and the inner core is melted by increasing the temperature to form the channel of the X-ray reflective element.
Further, for round monofilaments, arranging the monofilaments into a hexagonal mold to form a multifilament bar according to the binaryzation arrangement requirement; and for the square monofilaments, arranging the monofilaments into a square die according to the requirement of binary arrangement to form a multifilament rod.
The preparation method of the binarization X-ray energy selection device provided by the embodiment of the invention further comprises the following steps:
s2, hot stretching and cutting the multifilament bar.
The multifilament bar is hot drawn to give the desired cross-sectional dimensions and the drawn multifilament bar is cut to give the desired length dimensions. Wherein the temperature for hot drawing the multifilament bar is 550-650 ℃. The selection of temperature and extrusion rate, depending on the nature of the corrosion-resistant material and the corrosive material selected, ensures both good flow properties to allow the extrusion process to be successfully completed and the shape of the extruded product to be maintained.
The preparation method of the binarization X-ray energy selection device provided by the embodiment of the invention further comprises the following steps:
and S3, arranging the cut multifilament bars into a screen arranging mould, and carrying out hot fusion to form a semi-finished product of the energy selecting device.
Wherein the temperature of the hot fusion is 500-700 ℃, and the time is 0.5-1 h. The thermal fusing can be performed by mechanical hot melt pressing. The heat fusion can form the multifilament bar and the screen arranging mould into a whole. After the hot fusion, the high-precision polishing can be carried out on a polishing machine.
The preparation method of the binarization X-ray energy selection device provided by the embodiment of the invention further comprises the following steps:
s4, etching off the inner core of the single wire of the reflecting element to form a hole in the semi-finished product;
the corrosion mode is determined by the selection of corrosion-resistant materials and easily-corroded materials, and can be acid corrosion, alkali corrosion, solvent corrosion and the like. Ultrasonic vibration is accompanied in the corrosion process to accelerate the corrosion process. And the concentration and the temperature of the acid solution are finely controlled to ensure that all the corrosion-prone materials are dissolved completely, and the materials are cleaned by clean water and dried after being corroded.
The preparation method of the binarization X-ray energy selection device provided by the embodiment of the invention further comprises the following steps:
and S5, depositing metal in the holes of the semi-finished product to form a reflecting layer, and obtaining the binaryzation X-ray energy selection device.
In the whole preparation process, the reflecting element monofilament forms an X-ray reflecting element in the binaryzation X-ray energy selecting device through the processes of hot stretching, cutting, dissolving, metal layer plating and the like; and the absorbing element monofilament forms an X-ray absorbing element in the binaryzation X-ray energy selecting device through the processes of thermal stretching, cutting and the like. The preparation method of the embodiment of the invention can obtain the orderly arranged micro-channel structure simply, conveniently and precisely by pre-arranging the reflecting element monofilament and the absorbing element monofilament and then stretching to the required size, thereby having great application potential.
The features and properties of the present invention are described in further detail below with reference to examples.
Example 1
The present embodiment provides a binary X-ray energy selecting device, which is formed by alternately stacking a plurality of X-ray reflecting elements and a plurality of X-ray absorbing elements, as shown in fig. 1 and 2.
Wherein, the X-ray reflection element is a hollow structure, and the inner wall of the X-ray reflection element is provided with an Ag coating. The height was 100 μm, the cross-section was square and the side length was 5 μm.
The X-ray absorption element is of a solid structure, and the content of PbO is 35 wt%. The height was 100 μm, the cross-section was square and the side length was 5 μm.
The preparation method of the binarization X-ray energy selection device comprises the following steps:
s1, stacking and combining the reflecting element monofilament and the absorbing element monofilament in a square mold to obtain a compound filament rod;
the casing and the absorbing element monofilament are both prepared from high-lead silicate glass containing alkali metal oxide, the reflecting element monofilament comprises a casing and an inner core which are mutually sleeved, the casing is prepared from the high-lead silicate glass containing the alkali metal oxide, and the inner core is prepared from barium-containing borate glass.
S2, hot stretching the multifilament bar at the temperature of 620 ℃ until the cross section reaches the required size; the hot-drawn multifilament bar was cut to a desired length.
And S3, arranging the cut multifilament rods into a screen arranging mould, thermally fusing for 1h at 600 ℃ by adopting mechanical hot melting pressure, and polishing with high precision on a polishing machine after thermal fusion to form a semi-finished product of the energy selecting device.
S4, placing the semi-finished product in an HF acid or nitric acid solution, wherein the mass concentration of the HF acid is 0.1-1.5%, the treatment temperature is 30 ℃, and the soaking time is 30-200 s; if the mixture is placed in a nitric acid solution, the treatment temperature is 25 ℃, and the treatment time is 60-600 s; etching off the inner core of the single filament of the reflecting element to form a hole in the semi-finished product, and cleaning and drying the semi-finished product by using clean water after the etching is finished.
And S5, depositing metal Ag in the holes of the semi-finished product to form a reflecting layer, and obtaining the binaryzation X-ray energy selection device.
Example 2
The present embodiment provides a binary X-ray energy selecting device, which is formed by alternately stacking a plurality of X-ray reflecting elements and a plurality of X-ray absorbing elements, as shown in fig. 3 and 4.
Wherein, the X-ray reflection element is a hollow structure, and the inner wall of the X-ray reflection element is provided with an Au plating layer. The height was 4000 μm, the cross-section was circular and the diameter was 20 μm.
The X-ray absorption element is a solid structure, and the content of PbO is 40 wt%. The height was 4000 μm, the cross-section was circular and the diameter was 20 μm.
The preparation method of the binarization X-ray energy selection device comprises the following steps:
s1, stacking and combining the reflecting element monofilament and the absorbing element monofilament in a square mold to obtain a compound filament rod;
the sleeve and the absorbing element monofilament are both prepared from high-lead silicate glass containing alkaline earth metal oxide, the reflecting element monofilament comprises a shell and an inner core which are mutually sleeved, the shell is the same as the absorbing element monofilament sleeve, and the inner core is prepared from barium-containing borate glass.
S2, hot stretching the multifilament bar at the temperature of 550 ℃ until the cross section reaches the required size; the hot-drawn multifilament bar was cut to a desired length.
And S3, arranging the cut multifilament rods into a screen arranging mould, thermally fusing for 1h at 550 ℃ by adopting mechanical hot melting pressure, and polishing with high precision on a polishing machine after thermal fusion to form a semi-finished product of the energy selecting device.
S4, placing the semi-finished product in an HF solution, soaking for 1h at 25 ℃, corroding the inner core of the reflecting element monofilament to form a hole in the semi-finished product, and cleaning and drying the semi-finished product with clear water after the corrosion is finished.
And S5, depositing metal Au in the holes of the semi-finished product to form a reflecting layer, and obtaining the binaryzation X-ray energy selection device.
Test examples
The binarization energy-selecting device provided by the embodiment 1 is adopted to perform energy-selecting test, and the test result is as follows:
the input light is a synchrotron radiation light source and covers a wide-spectrum X-ray signal of 0.2-5 keV. The inclination angle of the binarization device is 6 degrees, the transmission X-ray and the source intensity are recorded by using a standard detector, and the transmission X-ray and the source intensity are divided to obtain a transmittance curve. The reflection element and the absorption element of the binarization device are of square hole structures, the cross section is square, and the side length is 10 mu m. The results are shown in FIG. 5 with a cut-off of 0.5keV and a switching ratio (ratio of low-energy pass-band to high-energy cut-off band intensities) of more than 10 times.
Extrapolation from the above example, by decreasing the angle of incidence, the cut-off edge will shift to higher energy, and a higher energy cut-off edge can be obtained.
In summary, the embodiments of the present invention provide a binary X-ray energy selecting device, which is formed by stacking a plurality of columnar X-ray reflective elements and a plurality of columnar X-ray absorbing elements. Wherein, X-ray reflection unit is hollow structure, and the inner wall is plated with the reflecting layer, and soft X-ray can be transmitted in the X-ray reflection unit and reflected by the inner wall of the channel, obtains the energy selection effect of low pass high resistance. Meanwhile, the X-ray absorption element is of a solid structure and is doped with an X-ray absorbent, so that high-energy X-ray can be absorbed, and the energy selection efficiency and the signal-to-noise ratio of imaging and detection are improved.
The embodiment of the invention also provides a preparation method of the binaryzation X-ray energy selection device, wherein the reflecting element monofilament and the absorbing element monofilament are stacked and combined in the sleeve to obtain a compound filament rod; hot stretching, cutting and hot fusing the multifilament bar, and corroding the inner core of the single filament of the reflecting element to form a hole in the semi-finished product during the energy selection period; and finally, depositing metal in the holes of the semi-finished product to form a reflecting layer, thereby obtaining the binaryzation X-ray energy selection device. The preparation method is simple and convenient to operate, has low requirements on equipment, has high controllability and high precision in the preparation process, and can be efficiently used for preparing the binaryzation X-ray energy selection device.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (12)
1. A binaryzation X-ray energy selection device is characterized by being formed by stacking a plurality of columnar X-ray reflection elements and a plurality of columnar X-ray absorption elements; the X-ray reflecting element is of a hollow structure, and a reflecting layer is arranged on the inner wall of the X-ray reflecting element; the X-ray absorption element is of a solid structure and is doped with an X-ray absorbent;
the X-ray reflection elements and the X-ray absorption elements are alternately distributed.
2. The binarized X-ray energy selecting device according to claim 1, wherein the height of said X-ray reflecting element is 50 to 5000 μm, and the cross section is circular or rectangular.
3. The binarized X-ray energy selecting device according to claim 1, wherein the X-ray reflecting element has a diameter of 5 to 20 μm when the cross section is circular, and has a side length of 5 to 20 μm when the cross section is rectangular.
4. The binarized X-ray energy selecting device according to claim 2, wherein said reflective layer is a plated layer formed of at least one of Zn, Au, Ag, C, Ni, Mo and Al.
5. The binarized X-ray energy selecting device according to claim 1, wherein the height of said X-ray absorbing element is 50 to 5000 μm, and the cross section is circular or rectangular.
6. The binarized X-ray energy selecting device according to claim 5, wherein the X-ray absorbing element has a diameter of 5 to 20 μm when the cross section is circular, and has a side length of 5 to 20 μm when the cross section is rectangular.
7. The binarized X-ray energy selecting device according to claim 5, wherein said X-ray absorber comprises PbO; the content of PbO in the X-ray absorption element is more than 30 wt%.
8. The binarized X-ray energy selecting device according to claim 7, wherein the absorbing element has a better blocking effect against hard X-rays of 5 to 15KeV when the PbO content is more than 50 wt%.
9. A method for manufacturing a binarized X-ray energy selecting device according to any one of claims 1 to 8, comprising:
s1, stacking and combining the reflecting element monofilament and the absorbing element monofilament in a sleeve to obtain a compound filament rod;
the sleeve and the absorbing element monofilament are both made of corrosion-resistant materials, the reflecting element monofilament comprises a shell and an inner core which are sleeved with each other, the shell is made of corrosion-resistant materials, and the inner core is made of corrosion-prone materials;
s2, carrying out hot stretching and cutting on the multifilament bar;
s3, arranging the cut compound filament rods into a screen arranging mould, and performing thermal fusion to form a semi-finished product of an energy selecting device;
s4, etching off the inner core of the reflecting element monofilament to form a hole in the semi-finished product;
and S5, depositing metal in the holes of the semi-finished product to form the reflecting layer, and obtaining the binaryzation X-ray energy selection device.
10. The production method according to claim 9, wherein the corrosion-resistant material is a high-lead silicate glass doped with an alkali metal oxide and/or an alkaline earth metal oxide; the corrosion susceptible material includes a borate glass that is barium-containing.
11. The method according to claim 10, wherein the temperature for hot-drawing the multifilament bar is 550 to 650 ℃ and the tension is 3 KG.
12. The method according to claim 9, wherein the heat-fusing temperature is 500-700 ℃ and the time is 0.2-1.2 h.
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| CN103631081A (en) * | 2013-12-11 | 2014-03-12 | 中国工程物理研究院激光聚变研究中心 | Projection-type soft-X-ray band pass imaging system |
| CN104835544B (en) * | 2015-03-18 | 2017-07-07 | 北京控制工程研究所 | A kind of space X ray shielding device for pulsar navigation |
| CN106158888A (en) * | 2015-04-03 | 2016-11-23 | 中航（重庆）微电子有限公司 | Light absorbs sandwich, optics and preparation method |
| CN108877961B (en) * | 2018-06-22 | 2020-05-01 | 中国工程物理研究院激光聚变研究中心 | X-ray broadband energy selection device and manufacturing method thereof |
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2018
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