DE4411330A1 - Single or multiple capillary element mfr. - Google Patents

Abstract

In the prodn. of a mono- or multi-capillary element, structure or system by drawing a bundle of glass tubes, a peripheral face of defined shape is obtd. by (a) drawing using a cylindrical or polygonal preform formed by hermetic sealing of a glass tube bundle; (b) constricting the bundle by exposure to reduced pressure; and (c) moving the heated glass mass up and down in the region of the bulb-shaped section in dependence on the shaping of the upper or lower part of the element and in accordance with the defined shape of the peripheral face. During forming of the cylindrical or polygonal part, the constriction after heating is <= 10-15% of the total cross-sectional area of the bundle before forming. The reduced pressure, in the temp. interval Th to Tk is 0.8-0.1 kg./sq.cm. and the glass surface temp., on leaving the furnace, is <= 2T, where Th is the starting temp. of loss of glass brittleness and Tk is the temp. of glass fluidity. Also claimed is an appts. for controlled deflection of radiation.

Description

The invention relates to a method for producing polycapillary and monocapillary elements, structures and other systems as well as devices using of these elements and structures. The invention is applicable in various areas of science and Technology. Technologically, the invention belongs to the field of the glass industry and particularly affects the Glass device manufacturing.

The invention is used, for example, for production of solid fiber optic elements that are used for targeted Deflection of different types of radiation, for example as Lenses or transfocators. Another application The field of the invention is X-ray lithography and material science using different beams lung. Furthermore, the invention for the production of three-dimensional structures with dimensions in micrometers area as well as for the production of filters for the fine egg  Cleaning and separation of substances and for the production of mi crocodile plates are used.

Furthermore, a polycapillary structure (or a product) understood a multichannel system, the one Has a large number of openings. The product can have a complicated edge surface (e.g. a conical one or one that comes close to it, a parabolic or one close to this, a barrel-shaped, etc.) where the Correspondingly, channels can also be of complicated shape nen.

Under a polycapillary fiber optic element is a straight polycapillary with a large number of openings stood, both the openings and the Polykapil lare itself cylindrical, hexagonal, rectangular, triangular etc. can be trained.

The production of polycapillary structures takes place according to the fiber optic technology, which is described in various books:
VB Veinberg, DK Sattarov:
"Volokonnaya Optika" (fiber optics);
NS Kapany:
"Fiber Optics, Principles and Applications".
NY London, Academic Press 1967, 432 PP

The technology currently used in the glass industry are for the production of polycapillary structures complicated.

Following the procedure described in the Mullard Research Laborato Ries (GB-PS 106 4072) was developed, you get the Structures by pulling glass tubes into one Bundles of the required geometry can be arranged and again to maintain a channel block (a Multika pillare), each channel of this block  receives its final dimensions. Multicapillaries after the second drawing process are obtained in Ab cuts of a certain length, which are then made into eggs nem bundle and heated under pressure, so that in Result the multicapillaries merge. However he did Such a method does not allow the production of homo structures, but there is a deformation of the Ka observed along the boundaries between the Multicapillaries are arranged. The deformation is special on the boundaries where the geome trie the pack is disturbed. Such a change in shape Channels occur when the multicapillaries ver melt.

In US-PS 41 27398 the general principles of Technology of manufacturing multi-channel tube structures shown. This technology consists of the following etap pen:

• - Composition of a variety of tubes and their Merging into a fixed package with a specific one Cross-section.
• - Heating this package up to the temperature of the expansion tube into a uniform hexagonal Structure.
• - Extending the given structure to a given one NEN cross-section of the smallest size, whereby a fusion the tube is only on the contact surfaces.
• - Cutting the drawn hexagonal structures in Ab cuts of a certain length, filling with gas and closed melt from both sides.
• - Inserting the above structures into a tube.
• - Sintering at the softening temperature without destruction individual tube elements.
• - The temperature between the melted ends is differently.

The temperature zone moves along the selected Pa ket (from hot to cold end) with simultaneous drain Pen of the gases, the gaps are eliminated.

However, the technology proposed is complex and not reproducible. In addition, at the borders of the Caking defects observed due to an uneven moderate heating of the package of output tubes will call. In this case, parts of the block bake ter different conditions together, resulting in existence leads from openings between the channels, for example Deformations of the border channels of a multi-core light guide ters.

In the process for the production of microporous plates (US PS 40 10019) relatively long glass tubes become one Bundles joined together by placing them side by side in parallel be placed. The tubes are long as long pulled until the desired diameter of the microchannels is enough. The essence of the invention is the reali The procedure is based in at least two stages under the Condition that the ratio of the thickness of the Walls constant to the inner diameter of the tubes will. The tube bundle is egg-shaped at one end heated to a temperature at which the glass does not flow but is only minimally softened so that you can Can pull out influence of a large force. The pulling process is done at a slow speed, taking one Preserved area with a smaller cross section. Then the first section near one of its ends up to egg warmed to a higher temperature at which the glass clearly is softened, after which you pull again takes. The pulling is done using a smaller one Force than when pulling the first section, creating a Preventing the product from breaking off. The warmed first section is repeated under the influence of a significantly less force, the size of the  Open the tubes to the desired size of the microka channels is reduced.

However, the specified method is unsuitable for manufacturing position of polycapillary structures with a compli decorated volume configuration (cone, axially symmetrical Ro station body with parabolic or other complicated Edge surface). The disadvantage of this procedure is the discreet one te execution of the drawing process, resulting in the impossibility the control of the rate of displacement of the heat ten glass mass in directions necessary for the formation of a predetermined volume according to a selected law that the geometry of the edge surface of the solid fiber optic ele mentes guaranteed, results. With the help of this procedure rens it is also not possible to use channels in the micrometer and Submicron range (0.25 ... 0.1 micron) len, because in the structure formation only under the influence of Surface tension forces it due to inflation of the Channels either to squeeze the channels or to their destruction comes as the main parameters of the structure education "temperature - pressure - speed" after this Procedures not defined to be coordinated can.

In addition, the process has no reproducibility Structure formation (lack of control over the main para meter).

The polycapillary fiber optic product can not only in a direct drawing process in the temperature field but it can also consist of fiber optic elements, Capillaries or polycapillaries are assembled.

The method of mechanical assembly of is known X-ray and neutron lenses and half lenses in this Way (U.S. Patent 51,92869). The X-ray and neutron lenses focus divergent radiation, its external shape is reminiscent on a barrel. The X-ray half lenses convert divergent ones  Radiation in quasi-parallel radiation and its shape is roughly like the top half of a barrel.

These lenses are made up of a variety of capillaries, which are embedded in layers so that they have an effect tive radiation transport due to multiple reflection of Ensure radiation on the inner walls of the capillaries most.

In this already known method, the capillaries or polycapillaries are drawn through a system of nets or plates with openings. Devices that are manufactured using this method have the following parts:
You cannot mechanically assemble capillaries with diameters <300 microns because they lose the ability to remain stable in the required shape. Because of the inaccuracies in the positioning of the openings in the nets and plates, lenses and half-lenses have a very extensive focal spot in the longitudinal direction (sometimes up to a few cm with a capillary diameter of about 0.4 mm). As a result, radiation acceptance and focusing are not effective. The device installed according to this method ensures transmission of the radiation of less than 10%.

In their own publications (see e.g. the time publication "Optics of Beams", Moscow IROS 1993, Preprints des Kurtschatow Institute 1991. . .) and in our own US patent PS 51 92869 proposed X-ray capillary optics to solve a number of medical tasks (Production of angiographs, tomographs, mammographs etc.), microscopy, the production of analysis devices (Diffractometer, devices for local X-ray analysis by Ele elements) and X-ray telescopes and to solve the problems contact and projection x-ray lithography, etc. put.  

However, none of these tasks has been carried out in practice solves. The reason for this was the lack of one for the solution of these problems adequate technology.

A precision geome is needed to solve all of these tasks Trie of each element of the optical system required Lich, and also an extremely high accuracy the manufacture of the entire optical system.

The various proposed in U.S. Patent 51,92869 Network technologies do not guarantee uniformity the curvature of the capillaries and polycapillaries, why the particles during transport through the optical system go lore. The maximum permeability in the laboratory pattern of these lenses has been reached does not exceed 5 up to 7% (see Optics of Beams, Moscow IROS, 1993). The mi nominal extent of the focal spot reached a level of 0.4 mm, which is not suitable for most tasks is peaceful.

Based on the present tech technology, a permeability of about 50% was obtained and the size of the focal spot is at a level of 15 Micrometer.

Basically important for both technology and the solution to the above problems turned out to be Possibility of generating interference effects using capillary optical systems that have axial symmetry Zen.

Thanks to this fact, the solution of one is simplified Set of technological tasks and the proposed Technology proves to be perfectly adequate for ge tasks, that is, only now is it within the scope the present inventive technology possible Solve tasks previously announced.

A polycapillary fiber optic product represents a com plicated three-dimensional structure with channels from one  Extension in the micrometer and submicrometer range. In In recent years, three-dimensional structures in the Micrometer range using a special technology who received the designation LIGA technology (Abbreviation of the German words: Lithographie, Galvanfor impression, impression). Find the products of LIGA technology wide application in microelectronics, optics, me medicine and general industry and science.

One of the most important elements of this technology is the use of powerful synchrotron beams with an energy of around 6 keV and a beam divergence of around 10 ^-4 rad, with which a resist is irradiated through a mask.

The use of synchrotron radiation is extremely expensive LIGA technology - it makes it practical limited to a few applications. Besides, that is Aspect ratio of channel diameter to channel length still less than 1000.

The invention has for its object effective procedures ren for the production of polycapillaries and monocapillaries Elements and structures as well as based on this procedure to create existing devices.

The aim of the invention is:

• - manufacture of polycapillary products and elements,
• - Reproducible production of these products and elements te,
• - Manufacture of a stable fiber optic product or Element with a variable cross section the longitudinal axis (cone or axially symmetrical rotation bodies with parabolic or other complicated shapes the edge surface),
• - Reduction of the diameter of the openings in the Structure,
• - increasing productivity,
• - manufacture of structures without inter-channel openings,  
• - Development of new methods of assembling polyka pillar products made of elements,
• - Production of three-dimensional structures, which are currently manufactured using LIGA technology, with an aspect ratio up to 10 ^-6 and channel sizes up to 10 ^-5 cm.

This object is achieved by the feature le in the characterizing part of the main claims with the features in the respective generic terms. Expedient ßige embodiments of the invention are in the dependent claims Chen included.

The basis of the present invention is the task order the manufacture of mono- or polycapillaries Products and elements with channel sizes of a few milli meters to the submicrometer range; the Pro products and the channels in the products a complicated have a geometric structure. The channels can be made with Schich different chemical elements Ensuring the possibility of better transportation of the Beams of radiation and the possibility of controlling the spectra of the different types of radiation.

The products and items can be made from different glasses be produced, so that by means of subsequent Etching and filling the cavities with metal or their materials three-dimensional structures with a such high aspect ratio can be established that difficult to achieve through modern structures. It be there is also the task of developing new methods of Assembly of polycapillary products made of fiber optics elements.

In the procedural part, the goal is achieved by that to produce a mono- or polycapillary stabi len structure or an element with parabolic or  another complicated shape of the edge surface of the drawing process with a preformed cylindrical or polygonal part is done with one end of the glass tube bundle hermetically sealed is completed and then at Generation of negative pressure tapers.

Furthermore, an up and down movement of the heated glass mass takes place in the formation zone of the onion-shaped section depending on the formation of the upper or lower part of the polycapillary solid fiber-optic structure or of the element in accordance with the predetermined shape of the edge surface, with the formation of the cylindri rule, the taper should not be more than 10-15% of the total area of the cross section of the bundle of glass tubes before the formation of the cylindrical or polygonal part. The negative pressure in the temperature interval T _h -T _k should be 0.8-0.1 kg / cm², the temperature on the glass surface when leaving the furnace should not exceed 2 T, whereby
T _h - the temperature at which glass brittleness disappears in ° C
T _k - the temperature of the glass fluidity in ° C
T - the heat resistance temperature of the glass in ° C.

The poly capillary structure or the element one or more Layers of the same or different chemical elements elements are applied, for which the starting material in the formation zone of the onion-shaped section with a Speed is moved that the given speed corresponds to the drawing process of the glass tube. At the same time, a thin one is made inside the tube or protective gas atmosphere created, during application some layers, the deposit of the elements only at the The cylindrical or polygonal part is formed. When producing various types of filters only the process of previous formation of the cylindrical Partly through the hermetic sealing of one end of the  Bundle of glass tubes and the subsequent rejuvenation Vacuum generation, the displacement of the heated glass mass in the formation zone of the onion-shaped part without practiced here to give a complicated edge surface.

To produce three-dimensional structures from various materials, including Me tallen, their alloys etc. the polycapillary is placed Structure made of glasses with different chemical combinations composition, which after dragging and filling with one or the other material (for example metal) full be constantly etched off to the necessary structure or to expose the element.

One of the variants of the proposed method is Production of planar polycapillary structures or Elements for which the batch consists of both levels and cylindrical structures is realized by inserting in the formation zone of the onion-shaped section and on closing the tubes with the ones in them closed polycapillary structures.

Another variant is that for the production of egg fiber optic element with the necessary solid Form the drawing process by means of guiding the to be preserved Glass tube (capillary, polycapillary, etc.) by conduction roll is realized, which guarantees the necessary form most.

It is producing a polycapillary structure (Product) proposed from a variety of Schich with arranged channels and made of fiber optic elements elements assembled using different methods were exist.

One of the methods of making a polycapillary structure is that on the surface everyone Layer grooves are applied into the capillary  or the polycapillary is firmly inserted, after that the layers are laid one inside the other and fastened.

Another method is that the grooves with With the help of mechanical profiling or with methods of Planar technology, such as radiation methods, Lithography methods etc. generated with subsequent etching become.

Another variant is that the space between the grooves used as a channel for radiation transport with the grooves on the inner surface of each Layer are generated.

The following variant is that the capillaries or polycapillaries inserted into a system of hollow channels leads in which the thickness of the partitions between the Channels can be constant or over the cross section of the optical system changes. The free end of the capillaries or polycapillaries is evenly from all sides too squeezed and fastened, the shape of the capillaries or polycapillaries can be different - cylindrical, hexagonal, conical, square or something like that.

The following version comes close to this variant, in which the free end of the capillaries or polycapillaries by one second system of hollow channels with partition walls which has a conical structure, so that the Kapil Lar or polycapillary ends oriented to a focal point are.

Another variant is that instead of a Ka pillare or polycapillary uses a miniature lens is, for example, a polycapillary that is drawn like this was that the cross section of the transport channels in it changes along its long axis and one end to one Focus is oriented.

The following variant consists in that over each capillary, Polycapillary and miniature lens a certain firm  Shell is drawn, the thickness of which may be constant or also can vary across the cross section of the optical system. The free end of the capillaries, polycapillaries or minia turlinsen is compressed evenly or by a System of cone-like channels that lead to one Are focused. This variant comes with the fol process, in which a hollow casing is used as a solid casing pillare or the separating layer between the Kapil laren, polycapillaries or miniature lenses by vapor deposition (Sputtering) is generated.

Another variant is that the shape of the first Layer of the system by evaporation (sputtering) one corresponding profile is generated on a wire. On the profile obtained is mechanically optical elements (Capillaries, polycapillaries, etc.) applied or opened sticks in the spaces between the optical elements Material is poured and then the same is poured on Show the profile of the second and subsequent layers testifies.

The following procedure comes close to this variant, in which the profile of the layers by wrapping the previous one Layer with a flat film or a material with egg ner profile thickness is generated.

The optical system can also be composed of flat surfaces be placed, with grooves on each flat surface in which the optical elements contained in this Are focused, embedded. After that all of these surfaces merged, with between the Surface partitions of the required thickness and length are inserted so that all optical elements on the Focus of the optical system are oriented.

This procedure comes close to the following procedure, in which who glued the optical elements to flat surfaces and then the optical system from these surfaces using partitions of the required thickness and length is put together.  

In the device section, the goal set is there achieved by a device for targeted deflection Different types of radiation are proposed contains a radiation source and an optical system that from a variety of layers in the form of nearby gel suitable and adequate surfaces of the second order (for play conical, barrel-shaped, spherical, etc.). There are channels for radiation transport in each layer arranged, the channel diameter in the longitudinal direction change. The curvature radius changes accordingly dius with respect to the longitudinal axis of symmetry of the device across the cross section of the device. The radiation source is outside or inside the system.

Another variant is a device in which the Layers of the optical system from planar structures be stand.

Another variant is a group of devices in which are used as optical systems are made based on the procedures above have been described.

The invention is intended to be described in part in the following Figures illustrated embodiments explained in more detail become.

Show it:

Fig. 1
The representation of the process according to the proposed method by means of a special device, the reference characters indicating the following:
1 bundle of glass tubes
2 glass tube
3 feed component
4 oven
5 cylinder part
6 fiber optic product
7 exhaust component

Fig. 2
The representation of the manufacturing process of glass fiber optic elements with different surface coverings, the reference numerals indicating the following:
1 solution
2 dispensers
3 evaporators
4 vapors
5 oven
6 shutdown element
7 deformed area
8 separation element

Fig. 3
The representation of the manufacturing process of three-dimensional structures using the proposed method, the reference symbols indicating the following:
1 assembly
2 feed component
3 oven
4 fiber optic element
5 exhaust component
6 Section through the glass fiber optic element
7 carrier layer
8 pad
9 Removal of glass type No. 2 from the sample
10 Filling the element with metal
11 Removal of glass type No. 1
12 Removal of the carrier layer

Fig. 4
The representation of the manufacturing process of a glass fiber optic element of a given shape, the reference numerals indicating the following:
1 bundle of glass tubes
2 feed component
3 oven
4 Device for intensive heating
5 exhaust component
6 formation component
7 assembled product

Fig. 5
The representation of the manufacturing process of planar structures, with the reference symbols indicating the following:
1 bundle of glass tubes
2 glass tubes
3 feed component
4 oven
5 formation component
6 exhaust component

Fig. 6
An illustration of a layer of the optical system with the grooves applied to the layer.

Fig. 7
An illustration of an optical system with interleaved layers.

Fig. 8
A longitudinal section of an optical system, the ends of which are oriented towards the radiation source.

Fig. 9
An illustration of the manufacture of an optical system in which one end of the optical elements is secured in a system of hollow channels with partitions and the other free end is pressed together evenly from all sides.

Fig. 10
The optical system as a full lens.

Fig. 11
The optical system as a miniature lens.

Fig. 12
An illustration of a flat layer of an optical system with grooves applied that are focused in that plane.

Fig. 13a
A cross-section of the optical system, which consists of right-angled capillaries that are geometrically correctly arranged.

Fig. 13b
The element of a polycapillary structure that strictly repeats the structure of the large capillaries and is oriented in the same way as the blocks from the large capillaries.

Fig. 14
The schematic representation of the contact X-ray lithography, the reference symbols indicating the following:
1 source
2 half lenses
3 mask
4 resist

Fig. 15
The schematic representation of the projection lithography (deep X-ray lithography) with the reference symbols following:
1 mask
2 half lenses
3 resist

Fig. 16
A microscope with a point source, the reference symbols denoting the following:
1 object
2 conical half-lens
3 detector

Fig. 17
A microscope for a parallel beam, the reference characters denoting the following:
1 object
2 widening half lenses
3 detector

Fig. 18
The schematic representation of the diffractometer, the reference symbols denoting the following:
2 half lenses
3 crystal monochromator
4 detector

Fig. 19
The illustration of the fluorescence analysis of the elements, with the reference symbols indicating the following:
1 source
2 sample
3 half lenses
4 detector

Fig. 20
A schematic representation of the element analysis, the reference numerals indicating the following:
1 source
2 sample
3 half lenses
4 crystal monochromator
5 detector

Fig. 21
A schematic representation of the three-dimensional element analysis with the aid of two crossed lenses, the reference symbols denoting the following:
1 source
2 , 4 lenses
3 sample
5 detector

Fig. 22
A schematic representation of the element analysis with the aid of polarized radiation, the reference symbols denoting the following:
1 source
2 half lenses
3 target
4 sample
5 detector

Preferred variants of the implementation of the invention are described below:
The stated aim is achieved in that in the present process of producing a polycapillary stable fiber-optic product or element, the process of drawing from an end piece of a glass tube bundle, which forms a onion-shaped section, is placed in the temperature field of an oven. The end of the bundle of glass tubes is fixed at the feed point of the bundle. The method is characterized in that the drawing process is carried out with a preformed cylindrical or polygonal part and a hermetic seal of one end of the glass tube bundle with the aim of producing a stable polycapillary product with a parabolic or other complicated peripheral surface.

Subsequently, the cylindrical or polygonal part is tapered when a negative pressure is generated and the heated glass mass is moved up and down in the formation zone of the onion-shaped section depending on the formation of the upper or lower part of the polycapillary stable fiber-optic element in accordance with the predetermined edge area. When the cylindrical or polygonal part is formed, the shrinkage should not amount to more than 10-15% of the total area of the cross section of the bundle of glass tubes. The vacuum should be 0.8-0.1 kg / cm² in the interval T _h -T _k . The temperature on the glass surface should not exceed 2T when leaving the oven, whereby
T _h - the temperature at which glass brittleness disappears in ° C (500-600 ° C)
T _k - the temperature of the glass fluidity in ° C (600-800 ° C) and
T - is the heat resistance temperature in ° C (50-200 ° C).

The main characteristics of the proposed techni solution are the following:

• 1. Application of a preformed cylindrical or polygonal part by hermetically sealing one End of the glass tube bundle and subsequent Rejuvenation when generating a negative pressure in the process the manufacture of a polycapillary solid  fiber optic product for transport and targeted Deflection of x-rays and others Types of radiation.
• 2. Up and down movement of the heated glass mass in the bil depending on the onion-shaped section speed of the formation of the upper and lower part of the polycapillary solid product according to the pre given shape of the edge surface.
• 3. The shrinkage should not be more than 10 to 15% of the Ge total area of the cross section of the glass tube bundle the formation of the cylindrical or polygonal part be.
• 4. The vacuum should be 0.8-0.1 kg / cm² in the temperature interval T _h -T _k .
• 5. The temperature on the glass surface as it exits the furnace should not exceed 2 T
• 6. The manufacturing process of the polycapillary solid fa Seroptic product is continuous and progressing in one stage.

The lack of explanations in the scientific-techni and patent literature that the Darle presented here are analogous, the conclusion allows that the submitted procedure represents a major novelty.

The technical nature of the proposed method will now explained with reference to the figures.

In Fig. 1 the scheme of the apparatus for the production of po lykapillarer solid fiber optic products is shown.

The manufacturing process of solid fiber optic products is realized in the following way:
A bundle of glass tubes ( 1 ) is inserted into a glass tube ( 2 ) which is attached at one end to the feed component ( 3 ). The other end of the glass tube ( 2 ) with the glass tube bundle ( 1 ) inside (hereinafter referred to as the component) is placed in the temperature field of the furnace ( 4 ). When the component ( 1 , 2 ) in the furnace ( 4 ) is heated to the temperature of the glass softening, the feeder ( 3 ) is switched on and the interior of the component is evacuated at the same time. In the downward movement, the cylinder part ( 5 ) is formed in this way, the component ( 7 ), the pulling guide, is detected and moved at a variable speed when it is moved away, the formation of the finest glass fiber optic product ( 6 ) guarantee. During the drawing process, the direction of movement of the glass mass is selected depending on the formation of the upper or lower part of the fiber-optic product.

Now the advantages of using this method should be creter be considered.

The direction of movement of the glass mass is determined by the formation the upper or lower part of the element, by the mutual influence of weight and weight Surface tension occurs, which allows the glass mass in the formation of the element and the creation of a Cross section variable along the longitudinal axis of symmetry balance of the fiber-optic product ten.

The proposed method is based on the natural one physical properties of the glass (toughness, upper surface tension, weight), which is achieving a high Reproducibility of solid fiber optic products leaves.  

The presence of a continuously forming zy Lindric or polygonal part allows a practical unlimited diameter reduction in the polycapillary solid product, an increase in productivity and the Creation of structures without spaces between the Channels with a continuous production of fiber optic products.

The achievement of the set goal and also the success the entire drawing process depends on the taper at the Formation of the cylindrical part. If the taper too becomes strong, the polycapillaries or the Glass tube in the component and there is an inflation of the Component, which leads to its destruction in the furnace. If the Rejuvenation is too weak, then gaps remain between between the channels, which makes the product unsuitable for the intended use and its further processing (Cutting and the like).

Based on what can be said about tapering one can conclude that leaving the specified Intervals for the parameters in either case either Reduce the quality or destroy the whole Manufacturing process leads. To manufacture the products According to the proposed method, glass tubes for the shell of the component with a diameter between 10 Use mm and 200 mm. The minimum diameter of the glass tube that is inserted into the envelope is through the stability of the construction and the requirements determines the future system.

Before explaining the proposed procedure, the following concrete example are considered. In a jar Glass tube L 80 or NS-1 with a diameter of 30 mm become polycapillary tubes with an outside diameter diameter of 1 mm and a diameter of the openings of 0.05 mm installed. One end of the component obtained will hermetically sealed with a compound and at the feed  location of the pulling apparatus, and the other end is put in the oven. After heating the lower end of the component and the formation of the cylindrical part it is gripped by the pulling device and fiber optic product te with a parabolic edge surface.

The stable fiber optic elements obtained have Open diameter between 0.025. . . 0.030 mm on the one aisle side and between 0.010. . . 0.015 mm on the out aisle side and allow the transport of X-rays an energy of 30 keV with a transmission coefficient of about 50%. The focal distance is F = 10 cm.

To solve a number of radiation transport tasks, it is desirable to coat the inner walls of the capillaries or polycapillaries with 1 to 2 layers of different chemical elements or to produce multilayer structures on these walls. This can be achieved as part of the proposed method. A coating of the capillaries can also be carried out from the outside. This process is carried out by means of guiding a monocapillary tube or a rod or a rod consisting of a large number of capillaries into the formation zone of the onion-shaped section at a speed which corresponds to the speed specified for the drawing process of the glass tube, with the simultaneous production of Negative pressure or the creation of an inert gas atmosphere. One or more layers of the same or different elements are deposited on the inner surface of the polycapillary product (or element). If several layers are applied, the deposit occurs only when the cylindrical or polygonal part is formed. This process is shown schematically in FIG. 2. This process can be used, for example, to produce dosing devices, micro syringes for chromatography, ampoules for nuclear magnetic resonance devices and multi-channel circuit boards. The proposed technology opens up the possibility of producing a wide variety of filters for the separation of gases and liquids. It is important to note that these filters have the following advantages:

• - The diameter of the pores can be the submicron range to reach.
• - The arrangement of the pores is geometrically balanced and symmetrical structure.
• - The transparency can be regulated and be high and
• - The ratio of pore diameter to channel length can Reach 10⁶.

For the production of filters according to the proposed Ver only the preforming of the cylindrical part will run by hermetically sealing one end of the glass tube bundle and the subsequent shrinkage Evacuation realized. The movement of the heated Bulk glass in the zone of formation of the onion-shaped Section takes place without formation of a complicated Edge surface.

Three-dimensional structures are currently in the microme area using LIGA technology. Of the most important part of this technology is the use of a super parallel synchrotron beam to generate a straight long channel in the resist through a mask is irradiated. With the help of such technology made a variety of three-dimensional structures, their application in microelectronics, medicine, the Science etc. (different sensors, Micromotors, elements of micro optics, filters and similar). It became an aspect ratio of about 103 reached (ratio of channel diameter to its Length). The use of synchrotron radiation is more expensive extraordinary this technology, besides it is difficult to increase the aspect ratio.  

The method according to the invention allows practically complete dig to solve the problems for which the LIGA technology is used. The technology is significantly knocked out less expensive and you can get an aspect ratio of about Reach 10⁶. LIGA technology currently only allows the production of straight channels, the invention Technology provides the ability to change channels Form manufacture what the number of possible uses can grow significantly.

To implement this process, the polycapillary structure is assembled from glasses with different chemical compositions, but the same linear thermal expansion coefficients. After the drawing process, the glass structures are filled with metal and etched to release the required structure or the required element. The manufacturing process of the three-dimensional micro structure is shown in Fig. 3. The required shape of the structure is made from two glasses with different properties. The drawing process is then carried out to achieve the required geometric parameters and the structure obtained is cut into a plurality of identical layers. The first type of glass is then etched. The structure obtained is filled with the required metal (for example, by galvanic or other methods). The second type of glass is then etched in a medium that differs from the medium for the etching process of the first type of glass. This gives a three-dimensional structure with the necessary aspect ratio ( FIG. 3).

A polycapillary fiber optic product (e.g. an X-ray gene or neutron lens) can be composed of elements be set, e.g. B. from polycapillaries, capillaries and their structures. It does so in a number of cases cheaper, these elements necessary from the start to give stable structure, such as B. the necessary crumb  radius, the necessary length, etc. For example, be the lens is made up of many layers, each in the capil laren or polycapillaries of the required radius of curvature us and the required length.

The implementation of the process of producing a fiber optic element with the necessary stable shape is realized by guiding the glass tubes / glass tubes (capillaries, polycapillaries) obtained with the aid of guide rollers which guarantee the required shape (see FIG. 4).

The invention can also be used for the manufacture of various flat systems are used, such as flat polycapillaries and cladding glasses, both as element base and as independent elements to solve different tasks different areas of industry and science can (especially as a planar Troschanov capillary in medicine, as coated glasses in medicine, Biochemistry, chemistry, as polycapillary systems in the X-ray technology and X-ray technology).

The production is possible both from a flat batch and from a cylindrical batch by inserting the polycapillaries into the formation zone of the onion-shaped section and then compressing the tube together with the polycapillaries enclosed therein (see FIG. 5).

The device consists of a large number of layers, each layer having the shape of a parabolic, spherical, conical, barrel-shaped, etc. surface. A large number of channels for radiation transport are embedded in each layer, which are oriented to one another and to the radiation source in such a way that transmission with the least losses is guaranteed. An example of such a layer is shown in FIG. 6. The shape of this layer is reminiscent of half a boat or a boat. On such a surface grooves are created, in the op table elements, for. B. capillaries or polycapillaries are firmly embedded. Then these layers with the embedded optical elements are nested and fixed and you get a complete optical system. A schematic representation of such an optical system is shown in FIG. 7.

The grooves in each layer are created so that the ends of the grooves "look" at the source (this can be seen in Fig. 8, in which a longitudinal section of the optical system is shown). The radiation enters the optical elements from the source and is transported by them, where one, two, three and multiple reflections take place.

The grooves can be different in an optical system generated in this way. For example, you can use it Create with the help of a mechanical profile.

Another method is to use methods which are used in microelectronics, e.g. B. that Cut out the grooves with blasting methods and on closing etching.

If the surface of the grooves is sufficiently smooth, they can form the transport channels themselves, ie become optical elements. In this case the grooves run along the inner surface of the above layers and their depth can change along their length. This is schematically illustrated in Fig. 8, where a longitudinal section of an optical system with such grooves is shown.

A promising direction for producing an optical system from optical elements is the following:
A special system of hollow channels with corresponding partitions is manufactured, into which the optical elements are inserted. The opposite, free end of the optical elements is evenly compressed from all sides so that they are firmly embedded ( Fig. 9). The optical elements can have different shapes: cylindrical, square, right-angled, hexagonal, conical and others. In such a device, the profile of the optical element comes close to a parabola. Since the ends of the optical elements "look" exactly at the source, the thickness of the partition walls is calculated beforehand.

With the help of this method, not only a half lens but also a full lens can be produced ( Fig. 10).

In a number of cases, a miniature half or full lens can be used very effectively as an optical element ( FIG. 11). In this case, the optical system forms an ensemble which is composed of miniature lenses or half lenses. Such a system is more effective because the radiation capture angle can be very large.

Another variant of such a device is the fol case where instead of a system of hollow channels with partitions over each channel a solid shell of the he required geometry is drawn, the thickness of which from the best conditions for the radiation transport through the optical system is determined. Such a shell can Example are made of hollow glass capillaries. A such cover can also be made by using a optical element in any film, material or similar ches wrapped up. In a number of cases, one can produce such a film also by vapor deposition (sputtering) len.

Another variant of the production of an optical system is the following:
The required shape (barrel-shaped, conical, etc.) of the first layer is e.g. B. generated by vapor deposition of a corre sponding profile on a wire. Mechanically optical elements that are oriented towards the source are applied (glued) to the profile obtained. A substance is poured into the spaces between the optical elements, e.g. B. soft adhesive, and then the profile shape of the second layer is generated, on which optical elements are applied (or glued).

So the entire optical system is layered manufactured. The necessary profile of the layer can be not only by vapor deposition, but also by wrapping the previous layer with a flat (flat) film or create a material with profile thickness.

An embodiment of this variant is the case in which as a basic "architectural" material a level Foil or a material with a profiled thickness is used becomes. In this case, optical material will be on this material Applied elements in the required geometry, d. H. with the required gaps between the opti elements. After that, the entire system is one Wire or rod or a capillary wrapped around the zen form a central part of the optical system. The result is the new optical system emerged.

Another variant of the device is a system which is composed of flat surfaces. Various cases are possible, e.g. B. grooves are applied to each flat upper surface, in which optical elements are embedded, which are focused in this plane ( Fig. 12). Then these surfaces are put into each other in such a way that partitions of the required thickness and length are inserted between the surfaces. Thereafter, the area where the partition walls are located is stably fastened, and the opposite end is pressed and fastened until the surfaces touch each other.

A modification of this device is the case when the optical elements simply glued to flat surfaces and then together using partitions be set.

The present invention can be applied in the following areas:
Medicine, microelectronics, scientific and analytical device construction, ecology, industry, microscopy, tomography, for information transmission, for the targeted deflection of various types of radiation (neutrons, X-rays, heat radiation and others) for the production of three-dimensional structures in the micrometer range etc. Various areas of application are to be used in following are explained in more detail.

Interference and microfocus

When monochromatic radiation passes through capillaries, interference effects can arise under certain conditions. For this it is necessary that the capillary structure occupies an exact symmetry. For example, the structure, which consists of strictly embedded rectangular capillaries ( Fig. 13 a), has a symmetry, which is also called first-order symmetry.

In the case when a large number of small capillaries are present within these capillaries, which reproduce the geometric arrangement of the large capillaries (blocks), then there is a second-order symmetry ( FIG. 13b). If an optical system consists of such structures, e.g. B. an X-ray half lens, which was drawn from a large number of such capillaries (1st order symmetry) or polycapillaries (2nd order symmetry), then an interference image will arise when focusing the monochromatic parallel beam through the half lens. The extent of the central maximum is of the order of the diameter of a capillary (or the diameter of a small channel in the polycapillary structure).

Such a system focuses very effectively monochromatic radiation.

In the case of polychromatic radiation, the half works lens like a spectrometer, d. H. it breaks down the radiation according to the wavelengths and thus in different ab the corresponding spectra would appear from the starting surface focused parts.

Effective focusing also occurs for a simple Ka pillar or polycapillary column if the source is one is quasi point radiation source.  

When pulling such strictly symmetrical lenses after The method according to the invention requires that Right at the beginning the capillaries (or the polycapillaries) are geometrically arranged so during the drawing process this symmetry over the entire length of the lens or half lens preserved.

microelectronics

The proposed devices can be used in microelectronics. For example, in contact X-ray lithography, a half lens is used, which converts the divergent radiation into quasi-parallel radiation, after which the mask and resist are positioned ( FIG. 14).

To implement the projection lithography (depth lithography), a mask is placed in the parallel beam and a half lens is arranged behind it, which shows the dimensions of the mask elements reduced to a resist ( FIG. 15).

Microscopy and tomography

A number of arrangements can be realized in microscopy and tomography. In the first case, an object is placed in front of the source, behind the object is a cone-shaped X-ray optical system and behind it a detector ( Fig. 16).

In the second case, the object is placed in the parallel beam, behind it is an enlarging optical system, then the detector ( Fig. 17).

Scientific and analytical devices

Diffractometer:
In this case, a half lens is placed in front of the source, a crystal monochromator behind, then the detector ( Fig. 18).

In general, it is better to use a half lens in all cases where inch columns are used.
Element analysis:
Various arrangements can be implemented here. For example, a semi-lens or lens can be placed behind the sample that the radiation from the source strikes ( FIG. 19). In the case where one or the other element can be clearly separated, a crystal monochromator is placed behind the half-lens and a detector behind it ( Fig. 20).

An arrangement is possible in which a lens is arranged in front of the source and is combined with a second lens that collects the radiation from the sample ( FIG. 21).

The use of polarized radiation is also possible. In this case, a half lens is placed in front of the source, since behind an object, the radiation being polarized by reflection of the radiation by 90 ° at the source. The sample is placed in the polarized beam and the detector is positioned at an angle of 90 ° to the polarization plane ( Fig. 22).

With such an arrangement, the subsurface can be severely ver be reduced and thus the sensitivity increased. In particular, a crystal monochro can be used as an object Use the mator. In this case, is done simultaneously with the polarization of the beam its monochromatization. It other arrangements can also be built in which NEN or other form can be lenses, half lenses, monochrome mators etc. can be combined.

Transfer of the object image

In a number of cases, object mapping is required with a reduction in the dimensions of the object elements transfer. In this case, a parallel beam is used Object, and behind it a capillary system in which the capillary diameter from the lens entrance to her Decrease end.  

There is a detector behind the lens, a film, an X-ray video con, etc.

In such an arrangement, one can transfer the Ab Realize formation of X-ray sources in space, d. H. make an x-ray telescope.

New collimator types

In the event that the inner surfaces of the capillaries are not designed to be reflective (e.g. by generating a rough layer on their inner surfaces or by some other method), they can be called collimato be used.

medicine

With every medical diagnosis, with the X-ray used, can be used in the present patent beaten lenses and half lenses used effectively the.

For example, a capillary system can be placed in front of the detector that suppresses the scattered radiation from the object. In the case of a quasi-point source, the capillary system a conical appearance, in the focus of which the source is. In the case of a parallel beam this is a column of capillaries in front of the detector stands.

One can go there to transfer a medical image put a lens or lens system on the object that reduce the object elements in the illustration and behind the Lenses become an ordinary x-ray film or an x-ray videocon positioned.

The analysis shows that you do this in a number of cases a reduction in the radiation dose by

is the ratio of entry to exit area of the Lens. The indicated possibility of reducing the loading radiation dose is due to the presence of a  Threshold at which the X-ray film is still exposed or where the X-ray video con starts to work.

To generate an image of the coronary vasculature of the People (angiography) can be two quasi-monochromatic Use rays that are in front of and behind the absorpti line of iodine (about 33 keV), which is a contrast tel serves.

The proposed lenses and half lenses can different combinations used for angiography become.

An anode can be used as the source, in which there are two elements with K _a lines near 33 KeV. In front of the source there is a system of rotating filters that mutually hide one or the other K _α line. A half lens is placed behind it, which converts the divergent radiation into quasi-parallel radiation. For the further design of the arrangement, there are two possibilities. The first possibility is that a column of capillaries is placed behind the half lens in order to cut off the hard radiation components that are associated with the braking radiation.

The second possibility is that a half lens in the second part is bent so that it the hard beam cuts off the share of the

In another arrangement, two halves are placed in front of the source lenses that emit radiation on two crystal mono align chromators. Each crystal cuts one or the other the other line out of the spectrum. From the Kristal starting from the monochromatic radiation on the Heart of the patient, behind which is a detector located, which subtracts the two figures from each other here to get an image of the coronary system.

A special powerful pulse source can be used as the source le are used, e.g. B. a plasma source.

The proposed optics can also be used for the transmission of medical illustration in combination with the synchrotron  radiation can be used. You can use lenses very effectively and half-lenses in the production of new types of medical use a tomograph. The lenses make it possible it, the beam the necessary shape and the required Dimensions to give out one or the other energy interval to select the radiation emerging from the source and to direct this filtered radiation onto the object. This enables the radiation dose to be reduced and the increase in spatial resolution.

The proposed optics are also used in no time clear medicine, for diagnosis with the help of isotopes. An improvement in the spatial resolution is possible.

Application in therapy is also important, for example very effective in the treatment of non-operable Tumors of the cerebrum. The X-ray source is included Lens or half lens on a spherical surface like this moves that the tumor is always in the focus of the beam and the healthy cells only a minimal dose hold.

The use of a neutron lens for loading is also effective act of skin cancer (melenomy). The Pa tient boron containing near Ge focus on swell. Because boron is very effective thermal Neutrons absorbed, emitting core particles, In a sense, there is a micro-explosion inside the sick cells and thus to destroy them.

The invention is not based on the embodiment described here limited examples. Rather, it is possible through Variation of the means and features according to the invention further Realize embodiments without the scope of Er to leave.

Claims (43)

1. A method for producing a mono- or polycapillary element, a structure or another system for use in various fields of science and technology by pulling from a lower end of a bundle of glass tubes of any configuration which is placed in a temperature field and on which there is an onion-shaped Section forms, and which is attached at the other end to the feed device, characterized in that with the aim of producing a mono- or polycapillary element, a structure or another system with an edge surface of a defined shape, the drawing process with a hermetically sealed one Bundle of glass tubes preformed cylindrical or polygonal part and subsequent shrinkage when generating negative pressure is carried out and the heated glass mass in the area of the formation of the onion-shaped section depending on the formation of the upper or lower part of the mono- or polycapillary element, the structure or another system and in accordance with the defined shape of the edge surface is moved up and down, with the formation of the cylindrical or polygonal part, the shrinkage after heating not more than 10 to 15% of the total area of the cross section of the glass part bundle before formation of the cylindrical or polygonal part, the negative pressure in the temperature interval T _h -T _{k is} 0.8-0.1 kg / cm² and the temperature on the glass surface when exiting the furnace does not exceed 2 T, whereby
T _h - temperature at which glass brittleness disappears,
T _k - temperature of the glass fluidity (flow limit temperature of the glass),
T - heat resistance temperature of the glass is. 2. The method according to claim 1, characterized in that on the inner surface of the polycapillary channels Structure, element or other system one or multiple layers of the same or different chemical elements are applied, for which the starting material in the area of Formation of the onion-shaped section with a Speed is supplied that the predetermined The pulling speed of the glass tubes corresponds to simultaneous generation of negative pressure or the Ensuring a protective gas atmosphere inside the Glass tube, the deposition when applying multiple layers when forming only the cylindrical or polygonal part. 3. The method according to claim 1, characterized in that to produce different types of filters only egg ne formation of a cylindrical or polygonal Part by hermetically sealing one end of the Bundle of glass tubes and subsequent shrinkage Vacuum generation is realized and the Displacement of the heated glass mass in the zone of Formation of the onion-shaped section without complicated edge surface shaping takes place.   4. The method according to claim 1, characterized in that for the production of three-dimensional structures that made of various materials including me tall, metal alloys, etc. exist, the polycapillary Structure or the polycapillary element made of glasses with different chemical composition, the glasses after being drawn and / or filled with one or the other material, for example metal, to be etched away in whole or in part, where at the required structure or the required Element is exposed. 5. The method according to claim 1, characterized in that for the production of planar polycapillary structures structures or elements as raw materials both flat as well as cylindrical structures are used this and this in the zone of formation of the onion-shaped gen section are fed, and then a Closure of the tube together with included in it polycapillary structures. 6. The method according to claim 1, characterized in that for the production of a fiber optic element with emergency agile stable shape of the pulling process by the Füh tion of the monocapillary or polycapile to be produced laren glass tubes realized with the help of guide rollers will ensure the required shape. 7. The method according to claim 1, characterized in that that the polycapillary structure in the form of an opti systems from a multitude of layers with Ka channels and consists of fiber optic elements is set.   8. Method of manufacturing an optical system according to Claim 7 characterized in that grooves are made on the surface of each layer the one into which the capillary or the polycapillary is inserted beds and then put the layers one inside the other and be attached. 9. The method according to claim 8, characterized in that the grooves in the layers through mechanical profile education or methods of planar technology, for example wise through radiation methods, methods of lithography graphie etc., produced with subsequent etching become. 10. The method according to claim 9, characterized in that the space between the walls of the grooves as Ka nal is used for radiation transport, the Grooves are applied to the inner surface of each layer be brought. 11. The method according to claim 7, characterized in that the capillaries or polycapillaries in a system with hollow channels are pushed in by the thickness the partition walls between the channels is constant or changes across the cross section of the optical system, and the free end of the capillaries or polycapillaries evenly compressed from all sides and befe Stigt is, the capillaries and polycapillaries egg ne different shape, for example cylindrical, hexagonal, conical, square, etc. can.   12. The method according to claim 11, characterized in that a mini instead of a capillary or polycapillary Tur lens or half lens is used, for example a capillary or polycapillary that is drawn like this was that the cross section of the transport channels in the length changed. 13. The method according to claim 11, characterized in that over any capillary, polycapillary or miniature lens a firm shell is drawn, the thickness of which is constant or vary across the cross section of the optical system iert, and the free end of the capillaries, polycapillaries or miniature lenses evenly compressed and is attached. 14. The method according to claim 13, characterized in that a hollow capillary is used as a solid sheath or a partition between the capillaries, polycapillaries or miniature lenses by sputtering or vapor deposition will be produced. 15. The method according to claim 7, characterized in that the shape of the first layer of the optical system Sputtering a corresponding profile onto one Wire or rod is made and into which it holding profile optical elements (capillaries, polyka pillaren etc.) mechanically applied (or glued) and into the separation areas between the optical Elements cast material and then in the same way the profile shape of the second and subsequent layers is provided.   16. The method according to claim 15, characterized in that the profile of the layers by wrapping the previous ones layer with a flat film or mate rial is produced with a profiled thickness. 17. The method according to claim 7, characterized in that the optical system is composed of flat surfaces is set, with grooves on each flat surface are brought into which the optical elements which are focused, embedded and subsequently all surfaces are merged where with the necessary partition walls between the surfaces Thickness and length are inserted so that all optical Elements on the focal point of the optical system ori are dated. 18. The method according to claim 17, characterized in that the optical elements on the flat surfaces be stuck and then the optical system out of these Surfaces using partitions of the necessary thickness and length between them becomes. 19. The method according to claim 1, characterized in that to produce a capillary structure with complete defined symmetry in the original arrangement of the capillaries or polycapillaries the necessary sym Measurement of the positions of the capillaries or polycapilla ren is reproduced and obtained in the drawing process remains.   20. Device for the targeted deflection of radiation, the contains a radiation source and an optical system, characterized in that the optical system a variety of layers in the Form of similar or adequate areas of the second order tion (for example conical, barrel-shaped, spherical mige etc.) contains and in each layer the channels for the radiation transport are arranged, the Change the diameter of the channels along their axis, the radius of curvature correspondingly channels with respect to the axis of symmetry in the longitudinal direction of the Device changes over the cross section of the device and the radiation source is outside or inside of the optical system. 21. The apparatus according to claim 20, characterized in that the layers of the optical system made of planar structure doors exist. 22. The apparatus of claim 12 or 20, characterized in that such systems are used as optical systems, which are produced according to claims 1 to 18. 23. The device according to claim 22, characterized in that for the construction of an X-ray lithograph as an optical System a half lens between the source and the mask is arranged, which the divergent radiation in quasi-parallel radiation and behind the Mask is a resist.   24. The device according to claim 22, characterized in that for performing deep X-ray lithography (Project depth x-ray lithography) in a parallel beam a mask is set and behind it as opti system, a special half lens is arranged, which optically reduces the mask elements to a Resist maps. 25. The device according to claim 22, characterized in that to build a microscope between the source and the optical designed as a magnifying half lens System an object is positioned and in the focal point of the half lens the source sits. 26. The device according to claim 22, characterized in that to build a microscope in the parallel X-ray as an optical system, a magnifying half lens is set and a detector is positioned behind it is. 27. The apparatus according to claim 22, characterized in that to build a diffractometer between the source and the crystal monochromator as an optical system Half lens is arranged. 28. The apparatus according to claim 22, characterized in that for X-ray fluorescence analysis between the source and the lens is arranged with the sample, which with at least one other lens is combined and the art interacts that the lenses have a common  Have focus on the sample, being the sample can move in different directions. 29. The device according to claim 22, characterized in that for fluorescence analysis between the sample on which the radiation hits, and a detector as opti cal system a semi-lens or lens is arranged. 30. The device according to claim 29, characterized in that a crystal mo between the half lens and the detector nochromator is arranged. 31. The device according to claim 22, characterized in that to apply polarized radiation to the element analyze the radiation from the source using an as Half-lens trained optical system on a tar get directed through which the radiation by 90 ° is deflected and directed at the sample, the radiation from the sample from a detector is analyzed, which is at an angle of 90 ° is arranged to the radiation direction target sample. 32. Device according to claim 31, characterized in that a crystal monochromator is arranged as the target, the radiation emerging from the half lens by 90 ° distracts. 33. Device according to claim 22, characterized in that for transferring the mapping of object elements ter the object an opti formed as a half lens cal system, which is the figure  of the object elements reduced, behind the half lens an X-ray film or an X-ray video con Visualization of the x-ray image is arranged. 34. Device according to claim 22, characterized in that for imaging X-ray sources in space len as optical systems one or more half lenses be used, the parallel radiation on one or focus several detectors. 35. The apparatus of claim 34, characterized in that to increase the angular resolution of an X-ray telescope pes in front of the half lens a system of collimators is set. 36. Device according to claim 22, characterized in that for the production of collimators as an optical system Capillary or polycapillary structures are used, whose inner surfaces do not reflect radiation. 37. Device according to claim 22, characterized in that to suppress the scattered radiation that is in the object for example in medical X-rays stands behind the object as an optical system Gel-shaped capillary system is arranged in the The source is in focus. 38. Device according to claim 37, characterized in that in the event that parallel radiation strikes the Object placed in front of the detector a capillary column becomes.   39. Apparatus according to claim 22, characterized in that a source with two K _α lines is used to transmit the image of the human coronary vascular system, which lies in front of and behind the iodine absorption line, a system of filters being located in front of the source, which alternately cover one or the other K _α line and behind the filters is an optical system, an X-ray half lens that converts the divergent radiation into parallel radiation, and a capillary column is arranged behind the half lens that suppresses the hard part of the radiation. 40. Device according to claim 22, characterized in that an impulse source for the construction of an angiograph is used in front of the two half as an optical system lenses, which are then the parallel radiation aim at two crystal monochromators, whereby from this then two monochromatic beams hen, their energy in front of and behind the absorption line of the contrast medium, and both beams meet in the heart of the patient and behind the pa tients two detectors are arranged, and successor a picture of the coronary vascular system from the other figure is subtracted. 41. Device according to claim 22, characterized in that to generate a diagnostic recording in the me dizin using isotopes instead of standard col Limators as an optical system capillaries, polycapilla ren, capillary structures, lenses and / or half lenses be used. 42. Device according to claim 22, characterized in that  to treat tumors the x-ray source with a optical system around along a spherical surface the tumor is moved so that it is constantly in the Focus of the optical system is located. 43. Device according to claim 22, characterized in that for the treatment of skin cancer as an optical system Neutron lens is used, the thermal neutron on which effectively absorb with thermal neutrons the agent pretreated tumor focused.