CN109633608A - A kind of optical waveguide phased-array laser radar - Google Patents
A kind of optical waveguide phased-array laser radar Download PDFInfo
- Publication number
- CN109633608A CN109633608A CN201910040181.3A CN201910040181A CN109633608A CN 109633608 A CN109633608 A CN 109633608A CN 201910040181 A CN201910040181 A CN 201910040181A CN 109633608 A CN109633608 A CN 109633608A
- Authority
- CN
- China
- Prior art keywords
- array
- waveguide
- optical waveguide
- multimode
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
Abstract
The invention discloses a kind of optical waveguide phased-array laser radars.Including transmitting terminal and receiving end, in transmitting terminal, laser output is connected to the input terminal of beam splitter, and the output end of beam splitter exports after optical waveguide array is connected with light emitter arrays, and optical waveguide array is equipped with integrated electric-control system；The laser emits laser, and laser is divided into multichannel light beam and enters optical waveguide array by beam splitter, acts on optical waveguide array using integrated electric-control system and carries out phase-modulation, the final angle scanning realized from light emitter arrays emitting output light.Present invention combination thermo-optic effect or electrooptic effect change the phase difference between multimode waveguide to realize the regulation of emergent light angle, avoid and apply independent electronic control unit in single waveguide, have design convenient, convenient for extension, it is compact-sized the advantages that.
Description
Technical field
The present invention relates to a kind of phased-array laser radars, more particularly relate to a kind of optical waveguide phased-array laser radar.
Background technique
Laser radar uses mobile laser beam to be scanned sampling to detection target to obtain the position of detection target, speed
The characteristic quantities such as degree.Traditional mechanical laser radar needs mechanical rotation during the scanning process, limits response speed, while whole
A device volume is also more huge.And phased-array laser radar changes laser beam by adjusting the relative phases of multiple signals
The direction of the launch, have many advantages, such as fast response time, size is small.
Increasingly developed with integreted phontonics technology, optical waveguide phased-array laser radar has been widely studied, silicon photon device
Part has the feature compatible with CMOS technology, can on monolithic simultaneously integrated optical source scanning device and control logic circuit, have
Conducive to further realizing low energy consumption, small size, high response speed, the demands such as low cost.
Current optical waveguide phased-array laser radar uses single mode waveguide generally to avoid high-order difficult to deal with is inspired
Mode, since optical waveguide phased array generally requires have fixed phase difference between each waveguide, this is uniform to single mode waveguide array
Property and consistency propose higher requirement.It is limited by processing technology, generally more difficult produce has unified duct width, side
The smooth single mode waveguide of wall, mostly uses greatly at present on every single mode waveguide plus independent electronic control unit adds to adjust due to producing
The phase deviation that work error introduces, but the electronic control unit of these dense distributions can also be such that integrated electric-control system becomes more at the same time
For complexity, and as waveguide number increases, the process for finely tuning phase can also become more cumbersome.This is unfavorable for further increasing
The waveguide number of optical waveguide phased-array laser radar system.
Summary of the invention
The problem of for background technique, the purpose of the present invention is to provide a kind of optical waveguide phased-array laser thunders
It reaches, to realize while meeting has fixed skew between each waveguide, integrated electric-control system will not be excessively complicated, has
Important application value.
The technical solution adopted by the present invention is that:
The present invention includes transmitting terminal and receiving end, the transmitting terminal include laser, beam splitter, optical waveguide array,
Integrated electric-control system and light emitter arrays；Laser output is connected to the input terminal of beam splitter, the output of beam splitter
End exports after optical waveguide array is connected with light emitter arrays, and optical waveguide array is equipped with integrated electric-control system；The laser
Device emits laser, and laser is divided into multichannel light beam and enters optical waveguide array by beam splitter, acts on light using integrated electric-control system
Waveguide array carries out phase-modulation, the final angle scanning realized from light emitter arrays emitting output light.
More single mode waveguides are used between existing beam splitter and light emitter arrays, each single mode waveguide needs pass through
Complicated electric-control system is modulated so that transmitting terminal adjusting is very troublesome.And integrated electric-control system of the invention acts on light wave
It leads array and waveguide phase is changed to multichannel optical waveguide therein, so that the phase difference of multichannel optical waveguide being kept fixed, realizes hair
The phased array at end is penetrated, so that phased array flexible adjustment is simple and effective.
The optical waveguide array includes to be connected to more multimode waveguides of beam splitter output end, on every multimode waveguide
Be equipped with one section of region for adjustment phase place, integrated electric-control system be set on region, in conjunction with electrooptic effect or thermo-optic effect with
It realizes the phase adjustment between different multimode waveguides, and then changes outgoing beam angle to enormously simplify the automatically controlled of laser radar
Modulation, realizes compact-sized, facilitates extension.
The optical waveguide array is mainly by multimode lightguide array, insulation taper tapered waveguide array and single mode waveguide battle array
Column composition, one end of multimode lightguide array are connected to the output end of beam splitter, and the other end of multimode lightguide array is through exhausted
Hot conical gradual change waveguide array is connected with single mode waveguide array, and integrated electric-control system is provided on multimode lightguide array, is integrated
Electric-control system is mainly made of contact electrode and heating electrode, is provided with and is added on every multimode waveguide of multimode lightguide array
Thermode, the heating electrode of each multimode waveguide are connected between two contact electrodes, and two contact electrodes connect external voltage
Source.Set heating electrode length is the n of set heating electrode length on first multimode waveguide on nth multimode waveguide
Times, i.e., the phase difference between waveguide is adjusted by changing multimode waveguide heating electrode length.
As shown in Figure 1, the heating electrode of each multimode waveguide is connected in series between two contact electrodes, two
It contacts electrode and connects external voltage source, by Injection Current, the heating electrode electric current having the same of each multimode waveguide, so that
Its phase is directly proportional to electrode length.
As shown in Fig. 2, the heating electrode of each multimode waveguide is connected in parallel between two contact electrodes, two
Contact electrode connect external voltage source, by apply voltage, the heating electrode bias having the same of each multimode waveguide so that
Its phase is directly proportional to electrode length.
It is connected between multimode lightguide array and single mode waveguide array, is realized more using insulation taper tapered waveguide array
Conversion of the mould optical waveguide array to single mode waveguide Waveguide array width from big to small.
Curved waveguide in multimode waveguide array is designed using the warp architecture of curvature gradual change, it is ensured that light is in transmission process
Do not excite higher order mode.
It is connect using single mode waveguide array with light emitter arrays.
The optical waveguide array is placed in substrate silicon.
The core material that the optical waveguide array and light emitter arrays use is silicon.
The invention has the advantages that:
The present invention is requiring to generate at constant phase difference between waveguide, transmits basic mode with multimode waveguide to replace single mode wave
It leads, to reduce phase deviation of the every waveguide under identical traffic length, while improving the production and processing tolerance of system.
The present invention can be by changing the heating electrode length of different waveguide in multimode lightguide array to realize multimode wave
Constant phase difference between leading, rather than individually apply electronic control unit at every waveguide, enormously simplify integrated electric-control system.Favorably
In further expanding optical waveguide array.
The present invention is converted using the width that insulation taper tapered waveguide array realizes multimode waveguide to single mode waveguide, utilizes list
Mould waveguide array is connected with light emitter arrays, so that the optical waveguide phased-array laser radar still has biggish scanning range.
Detailed description of the invention
Fig. 1 is the embodiment schematic diagram the present invention is based on thermo-optic effect.
Fig. 2 is the embodiment schematic diagram the present invention is based on electrooptic effect.
Fig. 3 is the embodiment of the present invention equivalent refractive index with duct width variation schematic diagram.
Fig. 4 is that the embodiment of the present invention equivalent refractive index deviation is shown with variation of the duct width in the case where mismachining tolerance is 5nm
It is intended to.
In figure: 1, laser, 2, beam splitter, 3, optical waveguide array, 3a, multimode lightguide array, 3b, insulation taper gradually
Become waveguide array, 3c, single mode waveguide array, 4, integrated electric-control system, 4a, contact electrode, 4b, heating electrode, 5, optical transmitting set
Array.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
Phased array radar of the invention specifically includes transmitting terminal and receiving end.As depicted in figs. 1 and 2, transmitting terminal includes laser
Device 1, beam splitter 2, optical waveguide array 3, integrated electric-control system 4 and light emitter arrays 5；1 output end of laser is connected to light
The output end of the input terminal of beam splitter 2, beam splitter 2 exports after optical waveguide array 3 and light emitter arrays 5 connect, light wave
It leads array 3 and is equipped with integrated electric-control system 4；The laser 1 emits laser, beam splitter 2 by laser be divided into multichannel light beam into
Enter optical waveguide array 3, integrated electric-control system 4 acts on optical waveguide array 3 and carries out phase-modulation, and beam splitter 2 carries out laser
Power-sharing, optical waveguide array 3 scan every road light beam and then emit multichannel light beam from light emitter arrays 5.
Optical waveguide array 3 is mainly by multimode lightguide array 3a, insulation taper tapered waveguide array 3b and single mode waveguide battle array
Arrange 3c composition, multimode lightguide array 3a forms by more multimode waveguide parallel arrangements, insulation taper tapered waveguide array 3b by
More conical gradual change waveguides are arranged, and single mode waveguide array 3c is formed by more single mode waveguide parallel arrangements, multimode lightguide
One end of array 3a is connected to the output end of beam splitter 2, and the other end of multimode lightguide array 3a is through being insulated conical gradual change wave
It leads array 3b to connect with single mode waveguide array 3c, integrated electric-control system 4 is provided on multimode lightguide array 3a, integrates automatically controlled system
System 4 is mainly made of contact electrode 4a and heating electrode 4b, is provided on the every multimode waveguide of multimode lightguide array 3a
Electrode 4b is heated, the heating electrode 4b of each multimode waveguide is connected in series between two contact electrode 4a, two contact electrodes
4a connection external voltage source.Electro-optical Modulation can also be used in specific implementation, the electrode of each multimode waveguide is connected in two in parallel
It contacts between electrode, by changing heating electrode length to realize constant phase difference between adjacent multimode waveguide, and then realizes hair
Penetrate the modulation of end phased array.
It is connected between multimode lightguide array 3a and single mode waveguide array 3c using insulation taper tapered waveguide array 3b,
Realize conversion of the multimode lightguide array 3a to single mode waveguide array 3c duct width from big to small.
Single mode waveguide array 3c is that the array of intensive single mode waveguide composition uses single mode waveguide array 3c and light emitting
Device array 5 is connected to realize biggish light beam scanning range.
The embodiment of the present invention is as follows:
This example selects the silicon nanowires optical waveguide for being based on silicon-on-insulator (SOI) material, and sandwich layer is silicon materials, with a thickness of
220nm, refractive index 3.4744, consideration central wavelength are 1550nm, are changed using the phase that thermo-optic effect acts on multimode waveguide
Become region.
In optical waveguide phased-array laser radar described in this example, the function of light beam splitting is realized using star-type coupler, it is similar
It is also an option that the beam splitter members such as multi-mode coupler (MMI) by light beam be divided into n beam (correspond to n root waveguide in waveguide array, n >
0)。
For optical waveguide array, the multimode waveguide that selection duct width is 1.6 μm first constitutes multimode lightguide array, such as
Shown in Fig. 3, consider duct width actual processing error be 5nm, the 0.3125% of the total duct width of mismachining tolerance width Zhan, and
For conventional 500nm single mode waveguide, the 1% of the total duct width of above-mentioned mismachining tolerance width Zhan.As shown in figure 4, considering waveguide
The actual processing error of width is 5nm, the single mode of the equivalent refractive index deviations of 1.6 μm of wide multimode waveguides also much smaller than 500nm
Waveguide, i.e., for single waveguide, under unit length, the phase deviation of 1.6 μm of wide multimode waveguides also will be substantially less that 500nm
Single mode waveguide, wherein phase deviation Δ φ meets: Δ φ=Δ n*L (L be waveguide overall length).
Limited by actual processing, waveguide sidewalls can not accomplish absolutely it is smooth, since 1.6 μm of multimode waveguide mould fields are in waveguide side
The Energy distribution of wall is much smaller than 500nm single mode waveguide, therefore the rough caused random phase of waveguide sidewalls that actual production goes out
Deviation, multimode waveguide also will be substantially less that single mode waveguide.
Based on above-mentioned analysis, the heating electrode 4b that this example is applied around in every multimode waveguide, by changing different waves
The heating electrode 4b length led to control the phase difference between adjacent waveguide be Δ φ 1, rather than as under existing traditional structure every
Apply independent electronic control unit on root single mode waveguide adjust adjacent waveguide phase difference and as production and processing error caused by with
Machine phase deviation avoids complicated automatically controlled process.
This example control power supply obtains same Injection Current to heat multimode waveguide, greatly simplifies integrated electric-control system, has
Conducive to extension waveguide number.In multimode lightguide array, using the multimode curved waveguide structure of curvature gradual change to prevent from exciting
Higher order mode out, while keeping waveguide array arrangement more compact.The phased-array laser radar is completed using multimode lightguide array
System realizes multimode waveguide to single mode waveguide after the light beam scanning on certain dimension, in conjunction with insulation taper tapered waveguide array
Width conversion.
Single mode waveguide array is connected with light emitter arrays, this example is using grating coupler as optical transmitting set.Pass through
Change laser wavelength of incidence and change direction of beam propagation, to realize light beam of the optical waveguide phased-array laser radar in another dimension
Scanning.N root waveguide in light emitter arrays can be used uniform equidistant arrangement or use the mode of uneven arrangement to reduce
Limitation of the secondary lobe to light beam scanning range.
The implementing procedure of optical waveguide phased-array laser radar described in this example is:
Laser is divided into the multimode lightguide battle array that the road n enters n root multimode waveguide composition by laser emitting laser, beam splitter
Column, integrated electric-control system are injected the heating electrode of every waveguide with same electric current, change the phase difference between different multimode waveguides, n
Road with phase deviation signal again pass through insulation taper tapered waveguide array enter single mode waveguide array, at this time duct width and
Adjacent waveguide spacing obtains a degree of reduction, is conducive to increase light beam scanning range, the road n light beam passes through single mode waveguide battle array again
Column enter the light emitter arrays being made of grating coupler, and the transmitting of light beam is realized by this light emitter arrays, is so far led to
Cross adjustment shoot laser wavelength and Injection Current size (changing phase difference φ 1 between waveguide).
In this example, receiving end uses the photodetector of fast response time, high sensitivity, array arrangement to target object
Echo-signal be acquired and handle, convert thereof into after electric signal and pass to signal processing circuit, treated signal
It sends computer to again and calculating is further analyzed, to obtain the information such as the position of target object, so far may be implemented two
Dimension scanning Optically controlled microwave laser radar.
Two-dimensional scanning Optically controlled microwave laser radar may be implemented.
It can be seen that present invention combination thermo-optic effect or electrooptic effect, change the phase difference between multimode waveguide to realize out
The regulation of shooting angle avoids and applies independent electronic control unit in single waveguide, has design convenient, convenient for extending, knot
The advantages that structure is compact has prominent significant technical effect.
Above-described embodiment is used to illustrate the present invention, rather than limits the invention, in spirit of the invention and
In scope of protection of the claims, to any modifications and changes that the present invention makes, protection scope of the present invention is both fallen within.
Claims (10)
1. a kind of optical waveguide phased-array laser radar, including transmitting terminal and receiving end, it is characterised in that: the transmitting terminal includes
Laser (1), beam splitter (2), optical waveguide array (3), integrated electric-control system (4) and light emitter arrays (5)；Laser
(1) output end is connected to the input terminal of beam splitter (2), and the output end of beam splitter (2) is through optical waveguide array (3) and light emitting
It is exported after device array (5) connection, optical waveguide array (3) is equipped with integrated electric-control system (4)；The laser (1) emits laser,
Laser is divided into multichannel light beam and enters optical waveguide array (3) by beam splitter (2), acts on light wave using integrated electric-control system (4)
It leads array (3) and carries out phase-modulation, the final angle scanning realized from light emitter arrays (5) emitting output light.
2. a kind of optical waveguide phased-array laser radar according to claim 1, it is characterised in that:
The optical waveguide array (3) includes more multimode waveguides for being connected to beam splitter (2) output end, every multimode waveguide
On be equipped with one section of region for adjustment phase place, integrated electric-control system (4) are set on region, in conjunction with electrooptic effect or hot light efficiency
It should be to realize the phase adjustment between different multimode waveguides, and then change outgoing beam angle.
3. a kind of optical waveguide phased-array laser radar according to claim 1 or 2, it is characterised in that:
The optical waveguide array (3) is mainly by multimode lightguide array (3a), insulation taper tapered waveguide array (3b) and list
Mould waveguide array (3c) composition, one end of multimode lightguide array (3a) is connected to the output end of beam splitter (2), multimode light wave
The other end for leading array (3a) is connected through insulation taper tapered waveguide array (3b) and single mode waveguide array (3c), multimode lightguide
It is provided with integrated electric-control system (4) on array (3a), integrates electric-control system (4) mainly by contact electrode (4a) and heating electrode
(4b) is constituted, and heating electrode (4b), each multimode waveguide are provided on every multimode waveguide of multimode lightguide array (3a)
Heating electrode (4b) be connected between two contact electrodes (4a), two contact electrodes (4a) connect external voltage sources.
4. a kind of optical waveguide phased-array laser radar according to claim 1 or 2, it is characterised in that:
The heating electrode (4b) of each multimode waveguide is connected in series between two contact electrodes (4a), two contact electricity
Pole (4a) connects external voltage source, and by Injection Current, heating electrode (4b) electric current having the same of each multimode waveguide makes
It is directly proportional to electrode length to obtain its phase.
5. a kind of optical waveguide phased-array laser radar according to claim 1 or 2, it is characterised in that:
The heating electrode (4b) of each multimode waveguide is connected in parallel between two contact electrodes (4a), two contact electricity
Pole (4a) connects external voltage source, and by applying voltage, heating electrode (4b) bias having the same of each multimode waveguide makes
It is directly proportional to electrode length to obtain its phase.
6. a kind of optical waveguide phased-array laser radar according to claim 1, it is characterised in that: use insulation conical gradual change
Waveguide array (3b) is connected between multimode lightguide array (3a) and single mode waveguide array (3c), realizes multimode lightguide array
(3a) arrives the conversion of single mode waveguide array (3c) duct width from big to small.
7. a kind of optical waveguide phased-array laser radar according to claim 1, it is characterised in that: multimode waveguide array (3a)
Interior curved waveguide is designed using the warp architecture of curvature gradual change, it is ensured that light does not excite higher order mode in transmission process.
8. a kind of optical waveguide phased-array laser radar according to claim 1, it is characterised in that:
It is connect using single mode waveguide array (3c) with light emitter arrays (5).
9. a kind of optical waveguide phased-array laser radar according to claim 1, it is characterised in that:
The optical waveguide array (3) is placed in substrate silicon.
10. a kind of optical waveguide phased-array laser radar according to claim 1, it is characterised in that:
The core material that the optical waveguide array (3) and light emitter arrays (5) use is silicon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910040181.3A CN109633608A (en) | 2019-01-16 | 2019-01-16 | A kind of optical waveguide phased-array laser radar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910040181.3A CN109633608A (en) | 2019-01-16 | 2019-01-16 | A kind of optical waveguide phased-array laser radar |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109633608A true CN109633608A (en) | 2019-04-16 |
Family
ID=66061071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910040181.3A Pending CN109633608A (en) | 2019-01-16 | 2019-01-16 | A kind of optical waveguide phased-array laser radar |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109633608A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110720049A (en) * | 2019-07-19 | 2020-01-21 | 深圳市速腾聚创科技有限公司 | Phased array detection device, laser radar and automatic driving equipment |
| US20220155620A1 (en) * | 2019-07-09 | 2022-05-19 | HyperLight Corporation | Low-loss waveguiding structures, in particular modulators |
| WO2022247574A1 (en) * | 2021-05-28 | 2022-12-01 | 华为技术有限公司 | Optical phased board, manufacturing method, and optical phased array system |
| US11585978B2 (en) | 2015-07-24 | 2023-02-21 | Openlight Photonics, Inc. | Phase tuning in waveguide arrays |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120121220A1 (en) * | 2009-06-13 | 2012-05-17 | Technische Universitaet Dortmund | Method and device for transmission of optical data between transmitter station and receiver station via of a multi-mode light wave guide |
| EP2822095A1 (en) * | 2013-06-24 | 2015-01-07 | Delphi Technologies, Inc. | Antenna with fifty percent overlapped subarrays |
| CN105527772A (en) * | 2015-12-29 | 2016-04-27 | 北京大学 | Optical phased array |
| CN106410607A (en) * | 2016-11-17 | 2017-02-15 | 清华大学 | Active optical phased array photon integration chip and manufacturing method thereof |
| US20180052378A1 (en) * | 2016-08-17 | 2018-02-22 | Samsung Electronics Co., Ltd. | Optical phased array (opa) |
| US20180175501A1 (en) * | 2016-12-16 | 2018-06-21 | Samsung Electronics Co .. Ltd. | Beam steering optical phased arrays |
| CN108459448A (en) * | 2018-03-29 | 2018-08-28 | 中国科学院西安光学精密机械研究所 | A kind of two-dimentional light beam scan method and optical phased array based on optical phased array |
-
2019
- 2019-01-16 CN CN201910040181.3A patent/CN109633608A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120121220A1 (en) * | 2009-06-13 | 2012-05-17 | Technische Universitaet Dortmund | Method and device for transmission of optical data between transmitter station and receiver station via of a multi-mode light wave guide |
| EP2822095A1 (en) * | 2013-06-24 | 2015-01-07 | Delphi Technologies, Inc. | Antenna with fifty percent overlapped subarrays |
| CN105527772A (en) * | 2015-12-29 | 2016-04-27 | 北京大学 | Optical phased array |
| US20180052378A1 (en) * | 2016-08-17 | 2018-02-22 | Samsung Electronics Co., Ltd. | Optical phased array (opa) |
| CN106410607A (en) * | 2016-11-17 | 2017-02-15 | 清华大学 | Active optical phased array photon integration chip and manufacturing method thereof |
| US20180175501A1 (en) * | 2016-12-16 | 2018-06-21 | Samsung Electronics Co .. Ltd. | Beam steering optical phased arrays |
| CN108459448A (en) * | 2018-03-29 | 2018-08-28 | 中国科学院西安光学精密机械研究所 | A kind of two-dimentional light beam scan method and optical phased array based on optical phased array |
Non-Patent Citations (3)
| Title |
|---|
| HAIFENG WANG等: ""Parallel recording with optical waveguide array"", 《SPIE PROCEEDINGS》 * |
| 王健: ""硅基光学相控阵技术研究"", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
| 王根成: ""硅基光子集成的基础功能器件研究"", 《中国博士学位论文全文数据库基础科学辑》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11585978B2 (en) | 2015-07-24 | 2023-02-21 | Openlight Photonics, Inc. | Phase tuning in waveguide arrays |
| US20220155620A1 (en) * | 2019-07-09 | 2022-05-19 | HyperLight Corporation | Low-loss waveguiding structures, in particular modulators |
| US11815750B2 (en) * | 2019-07-09 | 2023-11-14 | HyperLight Corporation | Low-loss waveguiding structures, in particular modulators |
| CN110720049A (en) * | 2019-07-19 | 2020-01-21 | 深圳市速腾聚创科技有限公司 | Phased array detection device, laser radar and automatic driving equipment |
| WO2021012088A1 (en) * | 2019-07-19 | 2021-01-28 | 深圳市速腾聚创科技有限公司 | Phased array detection apparatus, lidar, and self-driving device |
| WO2022247574A1 (en) * | 2021-05-28 | 2022-12-01 | 华为技术有限公司 | Optical phased board, manufacturing method, and optical phased array system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109633608A (en) | A kind of optical waveguide phased-array laser radar | |
| US20210215799A1 (en) | Optical phased array lidar | |
| US20200333683A1 (en) | Methods and systems for optical beam steering | |
| CN110174661B (en) | Optical phased array two-dimensional laser radar scanning chip based on polarization multiplexing | |
| US6320539B1 (en) | Fiber-optic, wideband array antenna beamformer | |
| Zheng et al. | A seven bit silicon optical true time delay line for Ka-band phased array antenna | |
| CN109839625A (en) | A kind of electric light phased-array laser radar based on LiNbO_3 film | |
| Xu et al. | Fully integrated solid-state LiDAR transmitter on a multi-layer silicon-nitride-on-silicon photonic platform | |
| US20220334451A1 (en) | Optical phased array structure and fabrication techniques | |
| CN209373098U (en) | Multilayer material phased-array laser radar transmitting chip and laser radar | |
| CN111220963A (en) | Multi-layer material phased array laser radar transmitting chip, manufacturing method and laser radar | |
| KR102070349B1 (en) | Lithium niobate-silicon nitride phase modulator and optical phased array antenna using the same | |
| CN215867107U (en) | Laser radar transmitting and receiving device of optical phased array | |
| CN110955042B (en) | Symmetrical light beam scanning system and working method thereof | |
| JP2754488B2 (en) | Optical control of electronic scanning antenna | |
| CN103094837B (en) | The controlled Optical Maser System in a kind of direction | |
| CN112764287A (en) | Half-wave two-dimensional scanning optical phased array based on flat grating antenna | |
| CN106646929A (en) | Electro-optic unit and optical phased array for integrated optical phased array | |
| RU2298810C1 (en) | Receiving-transmitting optoelectronic module of an antenna with a phased antenna array | |
| CN110673419B (en) | Method for improving scanning range of optical phased array and optical antenna device | |
| CN110750003A (en) | Rapid two-dimensional scanning optical waveguide phased array structure | |
| Zhang et al. | A Fully Solid-State Beam Scanner for FMCW LiDAR Application | |
| CN114690150A (en) | Continuous wave frequency modulation phased array laser radar chip, scanning method and laser radar | |
| Zhang et al. | Two-Dimensional High-Efficiency Transceiver Integrated Optical Phased Array with Dual-Port Antenna | |
| CN114966717A (en) | Detection system and method based on collimated light beam and laser radar system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190416 |