CN109632909A - A kind of production method of ceramic base sensing electrode surface fine-line - Google Patents
A kind of production method of ceramic base sensing electrode surface fine-line Download PDFInfo
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- G01N27/3275—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
- G01N27/3278—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles
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Abstract
The present invention provides a kind of production method of ceramic base sensing electrode surface fine-line, including ceramic matrix, characterized by comprising the following steps: S1., in ceramic matrix surface layout fine-line, the line width of the fine-line is 5-100 μm, line-spacing is 5-100 μm；S2. in the porous gold of the surface finish nano of fine-line；S3. by working electrode, reference electrode, the corresponding flat that ceramic matrix is integrated into electrode interdigital electrode on.The present invention passes through in ceramic matrix surface layout fine-line, to improve the reliability of sensing electrode, pass through the porous gold of surface finish nano in fine-line, to improve the sensitivity of sensing electrode, by by working electrode, reference electrode, the corresponding flat that ceramic matrix is integrated into electrode interdigital electrode on, the volume of sensing electrode can be reduced, realizes miniaturization.
Description
Technical field
The present invention relates to sensing circuit technical field, and in particular to a kind of ceramic base sensing electrode surface fine-line
Production method.
Background technique
POCT(point of care testing), it is defined as detecting immediately, refers specifically to the clinic carried out beside patient
Detection is used at the scene and is analyzed at once.Quickly obtain testing result.And POCT examines chip fastly, then is mating answer
For the sensing circuit of related medical instrument, to reach the result that instrument quickly detects.POCT possess it is quick, convenient, save at
This features such as, is embodied in and is made instantly available testing result, and instrumentation is easy, and monomer inspection cost reduces.Immediately it examines
Disconnected (POCT) only retains and diagnoses most crucial sampling, analysis, Quality Control, output element, greatly reduces Diagnostic Time, meets
The requirement of accurate inspection result is obtained in shortest time, and reduces the difficulty of diagnostic operation, detection space is expanded, in primary care
Mechanism, family be daily and the scenes such as emergency event in be used widely.
It is corresponding to it, POCT product has the characteristics that " miniature portable, easy to operate, easy to use, report is instant ", valence
Lattice are lower compared to laboratory large size diagnostic device, and Basic medical and health institutions is suitble to use, and meeting medical detection service
The investment for significantly reducing instrument and equipment fund simultaneously meets the main trend of country's classification diagnosis and treatment policy, is to play primary care
The important way of the effects of health organ's early diagnosis, prophylactic function, chronic disease management.In the management of personal and family health care,
The status of self detection is very prominent, and POCT product is then best test selection, and in two, tertiary hospitals, POCT product will
It is complementary to one another with large-scale diagnostic device, plays role of inspection more and more.
Currently, the technology for POCT is broadly divided into immunochromatography technique, biosensor technique and biochip technology, greatly
It is mostly based on immunological response and biochemical reaction.
In recent years, research worker improves and integrates to the performance and device of biosensor, occurs many new
Technology and method fusion, comprising: the biosensor based on micro-fluidic chip, the biosensor based on paper, based on receiving
Biosensor, the biosensor based on mobile phone detection platform and the integrated intelligent biosensor of rice material.
Important subdivision field of the POCT as in-vitro diagnosis industry, product is by quick, portable, easy to operate etc. excellent
Gesture is used widely in multiple fields such as detection section, hospital, emergency treatment, primary care, family health care management, pathological examinations.With
For the demand growth examined fastly immediately, the development of the market POCT in the world is relatively stable, with external diagnosis reagent
Raising of the development and relevant industries of industry for POCT degree of recognition, global POCT industry market scale continuous enlargement, according to beauty
State advisory organization Rncos report, the market scale of whole world POCT in 2013 reach 16,000,000,000 dollars, it is contemplated that following to keep about 8%
Annual compound growth rate, be increased to 24,000,000,000 dollars in 2018.In terms of Global Regional, the higher prosperity of health care development level
Country is the staple market of POCT, and wherein the U.S., Europe and Japan occupy front three, and the market share is respectively 47%, 30% and
12%, and the emerging markets such as China, India, Brazil, although accounting for smaller, development speed is faster than average level, is global POCT
The major impetus that industry increases.
The biomedical electrode core component one of the most key as detection system can play swashing for bioelectrical signals
The effects of encouraging, acquire, conducting, but since bioelectrical signals are weaker, in most cases it is generally necessary to be come using multiple electrodes
The acquisition and analysis of bioelectrical signals are carried out simultaneously.Therefore, biomedical electrode generally requires good electric conductivity, leads to
It is often to manufacture processing in such a way that silica-base material or surface of polymer material cover one layer of easy conductive metal layer to be formed.Due to life
It is directly contacted in object electrode for medical service use process with tissue, the contact impedance for generally requiring to reduce to the greatest extent electrode is steady to obtain
Fixed physiological signal, at the same also require it is nontoxic, to avoid the bad physiological reaction such as allergy is caused.To reduce in detection process
Due to the interference problem that movement generates, usually selects the electrode material being bonded with skin height or utilize the application of foam-back structure
The using effect of bumper and absorbing shock is played in biomedical electrode.But in the prior art, the reliability and sensitivity of electrode
Or it is not ideal enough.
Summary of the invention
In view of this, the present invention provides a kind of production method of ceramic base sensing electrode surface fine-line, it is of the invention
Ceramic base sensing electrode surface fine-line reliability is higher, and sensitivity is more preferable.
The technical solution of the present invention is as follows: a kind of production method of ceramic base sensing electrode surface fine-line, including ceramics
Matrix, which comprises the following steps:
S1. in ceramic matrix surface layout fine-line, the line width of the fine-line is 5-100 μm, line-spacing is 5-100 μm；
S2. in the porous gold of the surface finish nano of fine-line；
S3. by working electrode, reference electrode, the corresponding flat that ceramic matrix is integrated into electrode interdigital electrode on.
Further, the step S1 comprising the following specific steps
Step A: metalized is made on ceramic matrix surface；
Step B: high-conductive metal layer is obtained by electrical-chemistry method layers of copper；
Step C: fine layers of copper route is obtained using ultra-violet lithography；
Step D: the Gold plated Layer on high-conductive metal layer；
Step E: on the basis of lithography process, layer gold is thickeied to specified thickness.
Further, the metalized of the step A is sputtered titanium-tungsten ion on ceramic matrix.
Further, the step S2 comprising the following specific steps
Step 1): electrical-chemistry method Sn/Au eutectic is used in layer gold；
Step 2 removes tin by chemistry, obtains the interdigital electrode of nano-porous gold modification.
Porous gold surface modification technique increases the sensitivity of sensor in the present invention, can be big by nano-porous gold modification
Width increases active material load, improves the sensitivity of bio-sensing, electrochemical sensing and gas-sensitive sensor device.Nano-porous gold is steady
It is qualitative good, it is easy to load various sensitive active materials on the surface thereof.
Further, in the step S3, working electrode is gold electrode, is platinum electrode to electrode, reference electrode is chlorination
Silver electrode.
Further, the working electrode with to the distance between electrode be 50-100 μm.Working electrode and to electrode spacing
From between 50-100 μm, distance is shorter, can eliminate the concentration polarization in Electrochemical Test Procedure significantly, can detect electricity
The intrinsic electro catalytic activity of pole active material.
Further, the ceramic matrix is aluminium nitride ceramics matrix.
Further, the sensing electrode further includes detecting instrument and data analysis module, and sensing electrode is connected to detector
The input terminal of device, the output terminating data analysis module of detecting instrument.
The beneficial effects of the present invention are:
The present invention is by ceramic matrix surface layout fine-line, to improve the reliability of sensing electrode, by fine lines
The porous gold of the surface finish nano on road, to improve the sensitivity of sensing electrode, by by working electrode, reference electrode, to electrode
It is integrated into the interdigital electrode of the corresponding flat of ceramic matrix, the volume of sensing electrode can be reduced, realize miniaturization.
Detailed description of the invention
Invention is described further using attached drawing, but the embodiments in the accompanying drawings do not constitute any limitation to the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to the following drawings
Its attached drawing:
Fig. 1 is the structural representation of the porous gold modification interdigital electrode of the circuit board of the invention based on ceramic surface fine-line
Figure；
Fig. 2 is the positive structure schematic of the circuit board of the invention based on ceramic surface fine-line；
Fig. 3 is the structure schematic diagram of the circuit board of the invention based on ceramic surface fine-line；
Wherein, ceramic substrate 1, porous gold modification interdigital electrode 2；Working electrode W, reference electrode R, to electrode C.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment 1
A kind of production method of ceramic base sensing electrode surface fine-line, including ceramic matrix, which is characterized in that including following
Step:
S1. in ceramic matrix surface layout fine-line, the line width of the fine-line is 5 μm, line-spacing is 5 μm；
S2. in the porous gold of the surface finish nano of fine-line；
S3. by working electrode, reference electrode, the corresponding flat that ceramic matrix is integrated into electrode interdigital electrode on.
Further, the step S1 comprising the following specific steps
Step A: metalized is made on ceramic matrix surface；
Step B: high-conductive metal layer is obtained by electrical-chemistry method layers of copper；
Step C: fine layers of copper route is obtained using ultra-violet lithography；
Step D: the Gold plated Layer on high-conductive metal layer；
Step E: on the basis of lithography process, layer gold is thickeied to specified thickness.
Further, the metalized of the step A is sputtered titanium-tungsten ion on ceramic matrix.
Further, the step S2 comprising the following specific steps
Step 1): electrical-chemistry method Sn/Au eutectic is used in layer gold；
Step 2 removes tin by chemistry, obtains the interdigital electrode of nano-porous gold modification.
Porous gold surface modification technique increases the sensitivity of sensor in the present invention, can be big by nano-porous gold modification
Width increases active material load, improves the sensitivity of bio-sensing, electrochemical sensing and gas-sensitive sensor device.Nano-porous gold is steady
It is qualitative good, it is easy to load various sensitive active materials on the surface thereof.
Further, in the step S3, working electrode is gold electrode, is platinum electrode to electrode, reference electrode is chlorination
Silver electrode.
Further, the working electrode with to the distance between electrode be 50 μm.Working electrode and exist to electrode distance
Between 50-100 μm, distance is shorter, can eliminate the concentration polarization in Electrochemical Test Procedure significantly, can detect electrode active
The intrinsic electro catalytic activity of property material.
Further, the ceramic matrix is aluminium nitride ceramics matrix.
Further, the sensing electrode further includes detecting instrument and data analysis module, and sensing electrode is connected to detector
The input terminal of device, the output terminating data analysis module of detecting instrument.
The beneficial effects of the present invention are:
The present invention is by ceramic matrix surface layout fine-line, to improve the reliability of sensing electrode, by fine lines
The porous gold of the surface finish nano on road, to improve the sensitivity of sensing electrode, by by working electrode, reference electrode, to electrode
It is integrated into the interdigital electrode of the corresponding flat of ceramic matrix, the volume of sensing electrode can be reduced, realize miniaturization.
Embodiment 2
A kind of production method of ceramic base sensing electrode surface fine-line, including ceramic matrix, which is characterized in that including following
Step:
S1. in ceramic matrix surface layout fine-line, the line width of the fine-line is 100 μm, line-spacing is 100 μm；
S2. in the porous gold of the surface finish nano of fine-line；
S3. by working electrode, reference electrode, the corresponding flat that ceramic matrix is integrated into electrode interdigital electrode on.
Further, the step S1 comprising the following specific steps
Step A: metalized is made on ceramic matrix surface；
Step B: high-conductive metal layer is obtained by electrical-chemistry method layers of copper；
Step C: fine layers of copper route is obtained using ultra-violet lithography；
Step D: the Gold plated Layer on high-conductive metal layer；
Step E: on the basis of lithography process, layer gold is thickeied to specified thickness.
Further, the metalized of the step A is sputtered titanium-tungsten ion on ceramic matrix.
Further, the step S2 comprising the following specific steps
Step 1): electrical-chemistry method Sn/Au eutectic is used in layer gold；
Step 2 removes tin by chemistry, obtains the interdigital electrode of nano-porous gold modification.
Porous gold surface modification technique increases the sensitivity of sensor in the present invention, can be big by nano-porous gold modification
Width increases active material load, improves the sensitivity of bio-sensing, electrochemical sensing and gas-sensitive sensor device.Nano-porous gold is steady
It is qualitative good, it is easy to load various sensitive active materials on the surface thereof.
Further, in the step S3, working electrode is gold electrode, is platinum electrode to electrode, reference electrode is chlorination
Silver electrode.
Further, the working electrode with to the distance between electrode be 100 μm.Working electrode and exist to electrode distance
Between 50-100 μm, distance is shorter, can eliminate the concentration polarization in Electrochemical Test Procedure significantly, can detect electrode active
The intrinsic electro catalytic activity of property material.
Further, the ceramic matrix is aluminium nitride ceramics matrix.
Further, the sensing electrode further includes detecting instrument and data analysis module, and sensing electrode is connected to detector
The input terminal of device, the output terminating data analysis module of detecting instrument.
Embodiment 3
A kind of production method of ceramic base sensing electrode surface fine-line, including ceramic matrix, which is characterized in that including following
Step:
S1. in ceramic matrix surface layout fine-line, the line width of the fine-line is 10 μm, line-spacing is 10 μm；
S2. in the porous gold of the surface finish nano of fine-line；
S3. by working electrode, reference electrode, the corresponding flat that ceramic matrix is integrated into electrode interdigital electrode on.
Further, the step S1 comprising the following specific steps
Step A: metalized is made on ceramic matrix surface；
Step B: high-conductive metal layer is obtained by electrical-chemistry method layers of copper；
Step C: fine layers of copper route is obtained using ultra-violet lithography；
Step D: the Gold plated Layer on high-conductive metal layer；
Step E: on the basis of lithography process, layer gold is thickeied to specified thickness.
Further, the metalized of the step A is sputtered titanium-tungsten ion on ceramic matrix.
Further, the step S2 comprising the following specific steps
Step 1): electrical-chemistry method Sn/Au eutectic is used in layer gold；
Step 2 removes tin by chemistry, obtains the interdigital electrode of nano-porous gold modification.
Porous gold surface modification technique increases the sensitivity of sensor in the present invention, can be big by nano-porous gold modification
Width increases active material load, improves the sensitivity of bio-sensing, electrochemical sensing and gas-sensitive sensor device.Nano-porous gold is steady
It is qualitative good, it is easy to load various sensitive active materials on the surface thereof.
Further, in the step S3, working electrode is gold electrode, is platinum electrode to electrode, reference electrode is chlorination
Silver electrode.
Further, the working electrode with to the distance between electrode be 65 μm.Working electrode and exist to electrode distance
Between 50-100 μm, distance is shorter, can eliminate the concentration polarization in Electrochemical Test Procedure significantly, can detect electrode active
The intrinsic electro catalytic activity of property material.
Further, the ceramic matrix is aluminium nitride ceramics matrix.
Further, the sensing electrode further includes detecting instrument and data analysis module, and sensing electrode is connected to detector
The input terminal of device, the output terminating data analysis module of detecting instrument.
Embodiment 4
A kind of production method of ceramic base sensing electrode surface fine-line, including ceramic matrix, which is characterized in that including following
Step:
S1. in ceramic matrix surface layout fine-line, the line width of the fine-line is 50 μm, line-spacing is 50 μm；
S2. in the porous gold of the surface finish nano of fine-line；
S3. by working electrode, reference electrode, the corresponding flat that ceramic matrix is integrated into electrode interdigital electrode on.
Further, the step S1 comprising the following specific steps
Step A: metalized is made on ceramic matrix surface；
Step B: high-conductive metal layer is obtained by electrical-chemistry method layers of copper；
Step C: fine layers of copper route is obtained using ultra-violet lithography；
Step D: the Gold plated Layer on high-conductive metal layer；
Step E: on the basis of lithography process, layer gold is thickeied to specified thickness.
Further, the metalized of the step A is sputtered titanium-tungsten ion on ceramic matrix.
Further, the step S2 comprising the following specific steps
Step 1): electrical-chemistry method Sn/Au eutectic is used in layer gold；
Step 2 removes tin by chemistry, obtains the interdigital electrode of nano-porous gold modification.
Porous gold surface modification technique increases the sensitivity of sensor in the present invention, can be big by nano-porous gold modification
Width increases active material load, improves the sensitivity of bio-sensing, electrochemical sensing and gas-sensitive sensor device.Nano-porous gold is steady
It is qualitative good, it is easy to load various sensitive active materials on the surface thereof.
Further, in the step S3, working electrode is gold electrode, is platinum electrode to electrode, reference electrode is chlorination
Silver electrode.
Further, the working electrode with to the distance between electrode be 80 μm.Working electrode and exist to electrode distance
Between 50-100 μm, distance is shorter, can eliminate the concentration polarization in Electrochemical Test Procedure significantly, can detect electrode active
The intrinsic electro catalytic activity of property material.
Further, the ceramic matrix is aluminium nitride ceramics matrix.
Further, the sensing electrode further includes detecting instrument and data analysis module, and sensing electrode is connected to detector
The input terminal of device, the output terminating data analysis module of detecting instrument.
Embodiment 5
A kind of production method of ceramic base sensing electrode surface fine-line, including ceramic matrix, which is characterized in that including following
Step:
S1. in ceramic matrix surface layout fine-line, the line width of the fine-line is 80 μm, line-spacing is 80 μm；
S2. in the porous gold of the surface finish nano of fine-line；
S3. by working electrode, reference electrode, the corresponding flat that ceramic matrix is integrated into electrode interdigital electrode on.
Further, the step S1 comprising the following specific steps
Step A: metalized is made on ceramic matrix surface；
Step B: high-conductive metal layer is obtained by electrical-chemistry method layers of copper；
Step C: fine layers of copper route is obtained using ultra-violet lithography；
Step D: the Gold plated Layer on high-conductive metal layer；
Step E: on the basis of lithography process, layer gold is thickeied to specified thickness.
Further, the metalized of the step A is sputtered titanium-tungsten ion on ceramic matrix.
Further, the step S2 comprising the following specific steps
Step 1): electrical-chemistry method Sn/Au eutectic is used in layer gold；
Step 2 removes tin by chemistry, obtains the interdigital electrode of nano-porous gold modification.
Porous gold surface modification technique increases the sensitivity of sensor in the present invention, can be big by nano-porous gold modification
Width increases active material load, improves the sensitivity of bio-sensing, electrochemical sensing and gas-sensitive sensor device.Nano-porous gold is steady
It is qualitative good, it is easy to load various sensitive active materials on the surface thereof.
Further, in the step S3, working electrode is gold electrode, is platinum electrode to electrode, reference electrode is chlorination
Silver electrode.
Further, the working electrode with to the distance between electrode be 90 μm.Working electrode and exist to electrode distance
Between 50-100 μm, distance is shorter, can eliminate the concentration polarization in Electrochemical Test Procedure significantly, can detect electrode active
The intrinsic electro catalytic activity of property material.
Further, the ceramic matrix is aluminium nitride ceramics matrix.
Further, the sensing electrode further includes detecting instrument and data analysis module, and sensing electrode is connected to detector
The input terminal of device, the output terminating data analysis module of detecting instrument.
Embodiment 6
The present embodiment provides a kind of production method of ceramic base sensing electrode surface fine-line is provided, following step is specifically included
It is rapid:
(1) sensing electrode fine circuitry is processed
By taking ceramic base electrode as an example, during semiconductor circuit retrofit, fine-line etching process middle line the wide line away from thickness
There are correlations between degree.In order to ensure that the needs of fining circuit fabrication pass through thick film negtive photoresist work on the basis of lithography process
Skill thickeies layer gold to specified thickness.After handling by ceramic surface metallization, highly conductive gold is obtained by electrical-chemistry method layers of copper
Belong to layer.Then, finer layers of copper route can be obtained using ultra-violet lithography, and the reliability of sensing electrode can be improved.
(2) sensing electrode surface modifies nano-porous gold
In order to increase the sensitivity of POCT sensing electrode, in the gold surface of alumina ceramic-base interdigital electrode, one layer of in-situ modification
Nano-porous gold.Porous gold can effectively be anchored bio-sensing active material, such as Pt nanoparticle, cobalt oxide, and protease is blood red
Element etc..As the sensor receptor of specificity sensing, its detection to corresponding biomarker molecule is realized, improve sensor inspection
The sensitivity of survey carries out nano-porous gold modification in electrode surface, and the interdigital electrode after modification detects substrate, and it is negative that it can be improved
Carrying capacity improves its detection accuracy.
The ceramic base sensing electrode of the present embodiment can be applied to for target biomarker molecule:
Glucose oxidase is modified to interdigital electrode respectively, is applied to the relevant blood sugar test of diabetes；
Ferroheme is modified to interdigital electrode, is applied to detection cancer earlier markers nitric oxide molecule；
Platinum grain is modified to interdigital electrode, is applied to the relevant reactive oxygen species of detection inflammation；
Reduced graphene is modified to interdigital electrode, detects the relevant urea of kidney trouble and detection mind applied to distinguishing simultaneously
Through the relevant dopamine of property disease.
Porous gold surface modification technique increases the sensitivity of sensor in the present invention, can be big by nano-porous gold modification
Width increases active material load, improves the sensitivity of bio-sensing, electrochemical sensing and gas-sensitive sensor device.Nano-porous gold is steady
It is qualitative good, it is easy to load various sensitive active materials on the surface thereof.
Using mild method for electrochemical machining, porous gold thin film, first electrical-chemistry method gold can be obtained in any substrate
Chemistry removes tin, the interdigital electrode (see figure 1) of available porous gold modification to tin eutectic again.
Interdigital electrode be finger-like or pectination face in have periodic patterns electrode pair aggregate, a side be generate electricity
Pole, another party are passive electrode, so as to realize electrochemical redox circular response on the electrode.
Interdigital electrode feature: highly sensitive CV measurement；The electrochemical measurement of a small amount of sample；It is small-sized integrated；At a high speed
Response；Conductivity measurement.
Interdigital electrode has the advantage that compared with single electrode
1) when carrying out electrochemical analysis measurement to a small amount of sample solution using single electrode, sample will consume nearly because of electrolysis
To the greatest extent.However use this interdigitated array electrode that will not exhaust sample material even if redox reaction repeated.
2) in single electrode measurement method, because electrolysis sample material makes electric current become very small.And bipolar electrode is surveyed
The current value of amount mode increases to about 30 times or so.
Porous gold modification interdigital electrode use temperature range: -50 °C ~ 250 °C.
3) the coplanar integrated technology of three electrodes
By Conventional electrochemical three-electrode system, i.e., working electrode, reference electrode, electrode is integrated into ceramics or high molecular material
In interdigital electrode for the corresponding flat of matrix, i.e. the coplanar integrated technology of three electrodes (Fig. 2 and Fig. 3).Working electrode is gold, to electricity
Extremely platinum, reference electrode are silver chlorate, and three kinds of electrodes all are processed to be formed with thick film negtive photoresist technique.Working electrode and to electrode spacing
From between 50-100 μm, distance is shorter, can eliminate the concentration polarization in Electrochemical Test Procedure significantly, can detect electricity
The intrinsic electro catalytic activity of pole active material.
When design, three electrodes of tradition is substantially narrowed down under several millimeters of size, added convenient for the design of microsensor
Work is suitable for biology relevant to electrochemistry and electro-chemical activity detection in particular for the sensor of Electrochemical Detection.Processing
Interdigital electrode pattern precision afterwards in the micron-scale, using semiconductor machining, suitable for making for MEMS and miniature electrochemical device
With.
The present embodiment also provides the circuit board based on ceramic surface fine-line, including sensing electrode, the sensing electrode
It is made of by above-described design method.
Preferably, the circuit board based on ceramic surface fine-line, sensing electrode further include detecting instrument and data point
Mould group is analysed, sensing electrode is connected to the input terminal of detecting instrument, the output terminating data analysis module of detecting instrument.
The present embodiment is by ceramic matrix surface layout fine-line, to improve the reliability of sensing electrode, by
The porous gold of the surface finish nano of fine-line, to improve the sensitivity of sensing electrode, by by working electrode, reference electrode,
Electrode is integrated into the interdigital electrode of the corresponding flat of ceramic matrix, the volume of sensing electrode can be reduced, realizes miniaturization.
The POCT of the present embodiment examines electrode fastly, detects mainly for vim and vigour biochemistry class, can detecte blood, sweat, urine
Mainly there is a pH Deng, detection project, CO 2, O 2, K+, Na+, Hct also includes blood glucose, lactic acid etc..
Sensing electrode includes target identification body (such as antibody, probe, aptamers), (such as grape is glycoxidative for signal tracer
Enzyme, ferrocene, methylene blue etc.) and signaling bearer body (such as electrode) three parts.
By taking blood sugar test electrode as an example, gold plating is sprayed as signaling bearer body on flexible material surface, constructs flexible electrical
Pole；Corresponding target identification body and signal tracer are modified on gold plating, are such as marked with the glucose oxidase of the potassium ferricyanide.
When glucose exposure in the glucose oxidase of electrode surface and blood sample, gluconic acid and ferrocyanide are generated first
Potassium, potassium ferrocyanide is oxidized back the potassium ferricyanide again later, and the electron transfer generated in reaction is gold-plated surface induction, generates electricity
Chemical signal, then be digitized processor and be converted into readable data.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.It is noted that the technical characteristic being not described in detail in the present invention, it can be by appointing
One prior art is realized.
Claims (8)
1. a kind of production method of ceramic base sensing electrode surface fine-line, including ceramic matrix, which is characterized in that including with
Lower step:
S1. in ceramic matrix surface layout fine-line, the line width of the fine-line is 5-100 μm, line-spacing is 5-100 μm；
S2. in the porous gold of the surface finish nano of fine-line；
S3. by working electrode, reference electrode, the corresponding flat that ceramic matrix is integrated into electrode interdigital electrode on.
2. a kind of production method of ceramic base sensing electrode surface fine-line according to claim 1, which is characterized in that
The step S1 comprising the following specific steps
Step A: metalized is made on ceramic matrix surface；
Step B: high-conductive metal layer is obtained by electrical-chemistry method layers of copper；
Step C: fine layers of copper route is obtained using ultra-violet lithography；
Step D: the Gold plated Layer on high-conductive metal layer；
Step E: on the basis of lithography process, layer gold is thickeied to specified thickness.
3. a kind of production method of ceramic base sensing electrode surface fine-line according to claim 2, which is characterized in that
The metalized of the step A is sputtered titanium-tungsten ion on ceramic matrix.
4. a kind of production method of ceramic base sensing electrode surface fine-line according to claim 1, which is characterized in that
The step S2 comprising the following specific steps
Step 1): electrical-chemistry method Sn/Au eutectic is used in layer gold；
Step 2 removes tin by chemistry, obtains the interdigital electrode of nano-porous gold modification.
5. a kind of production method of ceramic base sensing electrode surface fine-line according to claim 1, which is characterized in that
In the step S3, working electrode is gold electrode, is platinum electrode to electrode, reference electrode is silver chloride electrode.
6. a kind of production method of ceramic base sensing electrode surface fine-line according to claim 5, which is characterized in that
The working electrode with to the distance between electrode be 50-100 μm.
7. a kind of production method of ceramic base sensing electrode surface fine-line according to claim 1, which is characterized in that
The ceramic matrix is aluminium nitride ceramics matrix.
8. a kind of production method of ceramic base sensing electrode surface fine-line according to claim 1, which is characterized in that
The sensing electrode further includes detecting instrument and data analysis module, and sensing electrode is connected to the input terminal of detecting instrument, detector
The output terminating data analysis module of device.
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