CN109632840A - Terahertz micro imaging system and imaging method - Google Patents
Terahertz micro imaging system and imaging method Download PDFInfo
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Abstract
This application discloses a kind of terahertz imaging system and imaging methods, which includes: THz source, for emitting terahertz wave beam；Terahertz coded modulation unit, including projection arrangement, mask plate and be attached at mask plate by image forming medium, wherein, projection arrangement generates patterned modulation light beam and acts on mask plate generation mask coding pattern, so that mask plate allows at least partly terahertz wave beam to pass through and irradiate by image forming medium；Single point detector, for receiving by mask plate and by the terahertz wave beam after image forming medium；Signal processing unit carries out micro-imaging calculating to the THz wave beam energy that single point detector repeatedly receives using compression sensing inversion algorithm, realizes terahertz imaging.By the above-mentioned means, can be realized to the space encoding modulation of terahertz wave beam and the quick micro-imaging of Terahertz.
Description
Technical field
This application involves THz imaging technology fields, more particularly to a kind of Terahertz micro imaging system and imaging side
Method.
Background technique
THz wave refers to frequency in the coherent electromagnetic radiation of 0.1~10THz far infrared band, because it is in electromagnetic spectrum
Middle electronics has the unique properties such as perspectivity, safety, spectral resolution ability to the specific position of photonics transition,
With very important learning value and application prospect.
Existing Terahertz micro imaging system, can be roughly divided into two class one kind is the terahertz based on micron order diameter
Hereby probe or hollow aperture, the micro-imaging of micrometer resolution is realized in point by point scanning by image forming medium, another kind of to be based on atom
Simultaneously point by point scanning realizes the micro-imaging of nanometer resolution by image forming medium for force probe oscillation.
Both the above Terahertz micro imaging system, due to the method using scanning, face image taking speed is slow, probe with
The shortcomings that by the bad control of the distance of image forming medium and easily snapping off.And imaging signal processing system is also more complicated, hardware at
This valuableness, generally only scientific research institution undertake can play expense, far be unable to satisfy the demand of industrial detection.
Summary of the invention
The application provides a kind of Terahertz micro imaging system and imaging method, and it is aobvious to be able to solve Terahertz in the prior art
The problems such as image taking speed is slow in micro- imaging system, signal processing is complicated and hardware cost is high.
The technical solution that the application uses is: providing a kind of Terahertz micro imaging system, the imaging system packet
It includes: THz source, for emitting terahertz wave beam；Terahertz coded modulation unit, including projection arrangement, mask plate and be attached at
The mask plate by image forming medium, wherein the projection arrangement generates patterned modulation light beam and acts on the mask plate
Coding pattern is generated, so that the mask plate allows at least partly described terahertz wave beam to pass through and irradiates described by imaging Jie
Matter；Single point detector, for receiving at the mask plate and the terahertz wave beam by after image forming medium, signal
Unit is managed, the THz wave beam energy that the single point detector repeatedly receives is carried out using compression sensing inversion algorithm
Micro-imaging calculates, and realizes the terahertz imaging.
The technical solution that the application uses is: providing a kind of based on Terahertz micro-imaging described in any of the above embodiments
The terahertz imaging method of system, the imaging method include: to emit terahertz wave beam to the mask plate；Adjust the projection
Device is so that the projection arrangement generates patterned modulation light beam；The patterned modulation light beam is acted on into described cover
Template, so that the mask plate generates mask coding pattern, so that it is described to allow at least partly described terahertz wave beam to pass through
Mask plate；At least partly described terahertz wave beam and it is attached at being interacted by image forming medium for the mask plate；It receives
The energy of the terahertz wave beam after interaction realizes the terahertz imaging using compression sensing inversion algorithm.
The beneficial effect of the application is: a kind of Terahertz micro imaging system and imaging method is provided, by using projection
Device generates patterned modulation light beam and acts on mask plate, realizes the quick space coded modulation to terahertz wave beam, and
Reconstruct inversion algorithm, which is sensed, in conjunction with compression realizes the quick micro-imaging of Terahertz.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of one embodiment of the application Terahertz micro imaging system；
Fig. 2 is the schematic diagram of one embodiment of the application mask coding pattern；
Fig. 3 is the flow diagram of one embodiment of the application micro imaging method.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Site preparation description, it is clear that described embodiment is only a part of the embodiment of the application, instead of all the embodiments.It is based on
Embodiment in the application, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall in the protection scope of this application.
Term " first ", " second ", " third " in the application are used for description purposes only, and should not be understood as instruction or dark
Show relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second ", " are defined as a result,
Three " feature can explicitly or implicitly include at least one of the features.In the description of the present application, the meaning of " plurality " is extremely
It is two few, such as two, three etc., unless otherwise specifically defined.
Refering to fig. 1, Fig. 1 is the structural schematic diagram of one embodiment of the application Terahertz micro imaging system, such as Fig. 1 institute
Show, the Terahertz micro imaging system 100 of the offer in the application includes THz source 110, Terahertz coded modulation unit
120, single point detector 130 and signal processing unit 140.
THz wave refers to frequency in the electromagnetic wave of 0.1~10THz range, be located at submillimeter wave and far infrared it
Between, the characteristic with microwave radiation and optical wavelength radiation has strong complementary characteristic, strong compared to the microwave THz wave of its all band
The characteristics such as time and spatial coherence, penetration capacity are strong, resolution ratio is high.THz source 110 is for emitting Terahertz in the application
Wave beam, and the THz source 110 that the application uses can specifically can be and partly lead to select narrowband or broadband terahertz emission source
Body material, photoconductive antenna, nonlinear electrooptical crystal, Terahertz free electron laser, Terahertz quantum cascaded laser, too
One kind of hertz parameter source or continuous wave THz source, is not especially limited herein.And it is generated in the application by THz source 110
Terahertz wave beam can for continuous terahertz wave beam may be pulse terahertz wave beam, be not especially limited herein.
Terahertz coded modulation unit 120 include projection arrangement 121, mask plate 122 and be attached at mask plate 122 by
As medium 123.
Wherein, projection arrangement 121 further comprises pump light source 1211, optical modulator 1212 and condenser lens 1213.
Optionally, the pump light source 1211 in the application can select sapphire laser pump light source, certainly in other embodiments,
It can also be other light sources, do not further limit herein.Wherein, pump light source 1211 is for sending pump light, pump light warp
Crossing production after optical modulator 1212 is modulated has patterned modulation light beam.This has patterned modulation light beam saturating by focusing
Mirror 1213 converges on the mask plate 122, so that mask plate 122 generates mask pattern, wherein the coding of mask plate 122
The pixel size of pattern depends on the resolution capabilities of projection arrangement 121, and the pixel size of coding pattern is generally less than
Terahertz wavelength.
Optionally, the optical modulator 1212 in the application can be digital microlens array (Digital Micromirror
Device, DMD) or spatial light modulator.The application is simply introduced by taking digital microlens array as an example in the present embodiment
Specific implementation principle.Wherein, DMD is by many small square reflecting optics (abbreviation micro mirror) by ranks close-packed arrays
It is attached to and is formed in the electronic nodes of one piece of silicon wafer together, each micro mirror corresponds to pixel list for generating image
Member, allows that pump light is handled and projected in a digital manner, controls each pixel list specifically by automatically controlled mode
The folding of member, thus it is possible to vary the picture element matrix on mask plate 122.
Specifically have, the pump light that pump light source 1211 generates passes through optical modulator 1212 (DMD), by controlling optical modulator
The folding of micro mirror passes through so that the on-off for controlling pump light generates patterned modulation light beam in digital microlens array on 1212
Over-focusing lens 1213 converge to formation mask coding pattern on mask plate 122, are the application mask code pattern in conjunction with Fig. 2, Fig. 2
The schematic diagram of one embodiment of case.Certain Fig. 2 is to show schematically a kind of mask pattern generated by DMD, at other
In embodiment, passing through for pump light can be controlled, different pattern is generated by the folding of different micro mirrors in change DMD
Light beam is modulated, is transmitted on mask plate 122 and forms different mask patterns, realizes and the spatial modulation of terahertz wave beam is acted on.
Optionally, it is converged on mask plate 122 when modulation light beam passes through condenser lens 1213, mask plate 122 can be made
Part terahertz wave beam is allowed to pass through and irradiate by image forming medium 123.Wherein, the selection of mask plate 122 need to meet to Terahertz
The transmitance of wave beam is good, and can meet to be excited by pump light simultaneously and generate electron-hole, so as to realize to THz wave
The modulation of beam.Optionally, the material of mask plate can use silicon wafer or semiconductive thin film in the application, cover in the present embodiment
Template 122 uses silicon wafer, and thickness range can be 4-10um, specifically can be 4um, 7um, 10um etc., does not make herein
It is specific to limit.
It is understood that may be implemented when having patterned modulation light beam to be transmitted on mask plate 122 to Terahertz
The spatial modulation of wave beam.Specifically have, when the conductance for its silicon wafer of region for having modulation light beam irradiation on mask plate 122 (silicon wafer)
Rate increases, to excite the carrier in the region on silicon wafer, to close THz wave beam passage, i.e., does not allow the region
Terahertz wave beam passes through, and the silicon wafer panel region for not modulating light beam irradiation allows terahertz wave beam to pass through, and inherently constitutes
The Terahertz spatial light modulator of one high pixel resolution.
Optionally, the front vertical of terahertz wave beam from mask plate 122 is incident, is attached at mask plate by image forming medium 123
122 back sides, and terahertz wave beam need to be completely covered by image forming medium 123.It is understood that being used in above embodiment
Terahertz wave beam realizes micro-imaging to by image forming medium, can avoid probe scanning avoid probe fracture and avoid probe with
Suitable image-forming range height is difficult to keep by image forming medium, improves micro-imaging speed, entire imaging system structure is relatively succinct.
Further, after patterned terahertz wave beam is encoded by mask plate 122 and by 123 phase interaction of image forming medium
With being subsequently transmitted to measure on single point detector 130.Wherein, single point detector 130 can also be selected too in the present embodiment
Hertz Quantum Well deep investigation device, can also select pyroelectric detector etc. to substitute in other embodiments, not do herein specific
It limits.And the transmission-type imaging mode used in the present embodiment, reflective substitution can also be used in other embodiments.
Further, and it is situated between after signal processing unit 140 is modulated to what is received for single point detector more than 130 times and by imaging
THz wave beam energy after the interaction of matter 123, which uses, compresses sensing inversion algorithm progress micro-imaging calculating, described in realization
Terahertz imaging.
The simple principle with regard to above-mentioned micro imaging system does simple introduction below:
The measured value that single point detector 130 receives is mask plate 122, by image forming medium 123 and terahertz wave beam synthesis
Effect as a result, and the measured value that receives of single point detector 130 and mask plate 122, by image forming medium 123 and terahertz wave beam
Between mathematical model meet:
Y=AX (1)
Wherein, Y indicates that the measured value that single point detector 130 receives, A indicate the graphical matrix of mask plate 122, the figure
Patterned shape has patterned modulation light beam by what pump light source 1211 in projection arrangement 121 emitted in shape matrix A
It determines, that is to say the folding of the different micro mirrors in the optical modulator 1212 by control projection arrangement 121, it can on mask plate 122
To obtain the mask pattern of different shapes, then the graphical matrix A of the available some column of mask plate 122, single point detector
130 can receive a series of measured value Y, and X is indicated by the image scene of image forming medium 123.Because of moving for terahertz wave beam
State space coding, can make single point detector 130 receive a series of measured value, may be implemented to be imaged by the measured value
The reconstruction of 123 image of medium.
Optionally, the theory that figure reconstruct is sensed according to compression, when the selection of graphical matrix A meets hadamard matrix,
It is optimal by the signal-to-noise ratio of the reconstructed image of image forming medium 123.Wherein, hadamard matrix is with the presence of negative value, in imaging systems without
Method is directly realized by, therefore 0 value and 1 value coding can only be directly realized by the graphical matrix A of mask plate 122.It that is to say, it will be graphical
All positive elements are classified as a matrix in matrix A, and all negative elements are classified as another matrix, take its absolute value, and organizing is one
Right, the data processing step for implementing the template containing negative element is as follows:
Y+=A+X (2)
Y-=A-X (3)
Y-=A-X (4)
Y=Y+-Y-=(A+-A-) X=AX (5)
In the present embodiment, with second order hadamard matrix H2For be introduced:
Second order hadamard matrix H2It can be indicated by following two matrixes:
Apparent available second order hadamard matrix meets H2=G-V, it is assumed that two groups of measured value amount vector Y1 and Y2, every group
Measured value vector uses one group of complementary mask, and meets:
Y1=GX Y2=VX (8)
It can be understood that the measured value that single point detector 130 receives meets:
Y=Y1-Y2=GX-VX (9)
It is understood that the coding pattern of change mask plate 122, single point detector can be passed through in above embodiment
130 can repeatedly receive by modulated THz wave beam energy (measured value).Signal processing unit 140 is using compression sensing inverting
Restructing algorithm carries out micro-imaging calculating to the THz wave beam energy received for single point detector more than 130 times, with obtain by
As the reconstruct terahertz image of medium 123.Optionally, using the terahertz image of compression sensing reconstruct, pixel in the application
Resolution ratio can specifically arrive 10um magnitude far more than the resolution ratio of Terahertz wavelength.
In above embodiment, patterned modulation light beam is generated by using pumping laser and is acted on mask plate, it is real
Now the space encoding of terahertz wave beam is modulated, and compression sensing restructing algorithm is combined to realize that 10um Terahertz below is quickly shown
Micro- imaging, the Terahertz micro imaging system of the application has the advantages that compared with the prior art
1, probe scanning can be avoided in imaging system, probe is can be avoided and fracture, and can avoid probe and be situated between by imaging
Distance and the inconsistent problem of height adjustment between matter, to improve micro-imaging speed, and the imaging system structure of the application
It is relatively succinct.
2, mask plate uses hadamard matrix, and the signal-to-noise ratio of reconstructed image can be improved.
3, using mature digital microlens array or spatial light modulator, modulation is radiated at the pump spot of mask plate,
To modulate terahertz wave beam on-off, avoid the problem of Terahertz frequency range lacks mature spatial light modulation technology, and except wanting
It asks except being attached on mask plate by image forming medium, is required without other by image forming medium.
4, solve the problems, such as that the Terahertz face battle array micro-imaging sensing device of 10um or less magnitude lacks, using single detection
Device detects modulated imaging beam energy, recycles compressed sensing algorithm reconstructed image, maximizes and plays existing mature system
The ability of hardware.
Referring to Fig. 3, Fig. 3 is the flow diagram of one embodiment of the application micro imaging method.In the present embodiment
Terahertz imaging method is can to combine Fig. 1, the Terahertz in the application together based on above-mentioned Terahertz micro imaging system
Imaging method includes at least THz source 110, Terahertz coded modulation unit 120 and the single point detector 130 in Fig. 1,
In, Terahertz coded modulation unit 120 is including projection arrangement 121, mask plate 122 and is attached at being situated between by imaging for mask plate 122
Matter 123, and the imaging method specifically comprises the following steps:
S100, transmitting terahertz wave beam to mask plate.
The terahertz wave beam that THz source 110 emits can be impulse wave or continuous terahertz wave beam, from front
Vertical incidence is to mask plate 122.
S110 adjusts projection arrangement so that projection arrangement generates patterned modulation light beam.
In conjunction with Fig. 1, projection arrangement 121 further comprises pump light source 1211, optical modulator 1212 and condenser lens
1213.Optionally, the pump light source 1211 in the application can select sapphire laser pump light source, can also select femtosecond light
Fibre laser beam-expanding collimation.The production after the modulation of optical modulator 1212 of its pump light issued has patterned modulation light
Beam.Wherein, optical modulator 1212 can may be spatial light modulator for digital microlens array, not limit specifically herein
It is fixed.
S120, the modulation light beam that will be patterned into act on mask plate, so that mask plate generates mask coding pattern, thus
At least partly terahertz wave beam is allowed to pass through mask plate.
In step S120, which converges on mask plate 122 by condenser lens 1213, so that
Mask plate 122 generates mask pattern, so that at least partly terahertz wave beam be allowed to realize by mask plate 122 to THz wave
The spatial modulation of beam acts on.Wherein, the selection of mask plate 122 need to meet good to the transmitance of terahertz wave beam, and can be simultaneously
Meet to be excited by pump light and generate electron-hole, so as to realize the modulation to terahertz wave beam.Optionally, in the application
The material of mask plate can use silicon wafer or semiconductive thin film, and mask plate 122 uses silicon wafer, thickness in the present embodiment
It may range from 4-10um, specifically can be 4um, 7um, 10um etc., be not especially limited herein.
Optionally, it is transmitted on mask plate 122, is may be implemented to terahertz wave beam when with patterned modulation light beam
Spatial modulation.Specifically have, when the conductivity for its silicon wafer of region for having modulation light beam irradiation on mask plate 122 (silicon wafer) increases
Add, to excite the carrier in the region on silicon wafer, to close THz wave beam passage, i.e., does not allow the terahertz in the region
Hereby wave beam passes through, and the silicon wafer panel region for not modulating light beam irradiation allows terahertz wave beam to pass through, and inherently constitutes one
The Terahertz spatial light modulator of high pixel resolution.
S130, at least partly terahertz wave beam and it is attached at being interacted by image forming medium for mask plate.
S140, the terahertz wave beam after receiving interaction realize terahertz imaging using compression sensing inversion algorithm.
It is transmitted after interacting after patterned terahertz wave beam is encoded by mask plate 122 and by image forming medium 123
It is measured on to single point detector 130.
It is understood that the measured value that receives of single point detector 130 is mask plate 122, by image forming medium 123 and too
Hertz wave beam comprehensive function as a result, and the measured value that receives of single point detector 130 and mask plate 122, by image forming medium 123
And founding mathematical models between terahertz wave beam, and using inversion algorithm realize terahertz imaging, specifically may refer to it is above-mentioned too
Introduction in hertz micro imaging system embodiment, details are not described herein again.
In above embodiment, patterned modulation light beam is generated by using pumping laser and is acted on mask plate, it is real
Now the space encoding of terahertz wave beam is modulated, and compression sensing restructing algorithm is combined to realize the quick micro-imaging of Terahertz.
In conclusion it should be readily apparent to one skilled in the art that the application provide a kind of Terahertz micro imaging system and at
Image space method generates patterned modulation light beam by using pumping laser and acts on mask plate, realizes to terahertz wave beam
Space encoding modulation, and compression sensing restructing algorithm is combined to realize the quick micro-imaging of Terahertz.
The foregoing is merely presently filed embodiments, are not intended to limit the scope of the patents of the application, all to utilize this
Equivalent structure or equivalent flow shift made by application specification and accompanying drawing content, it is relevant to be applied directly or indirectly in other
Technical field similarly includes in the scope of patent protection of the application.
Claims (10)
1. a kind of Terahertz micro imaging system, which is characterized in that the imaging system includes:
THz source, for emitting terahertz wave beam；
Terahertz coded modulation unit, including projection arrangement, mask plate and be attached at the mask plate by image forming medium,
In, the projection arrangement generates patterned modulation light beam and acts on the mask plate generation mask coding pattern, so that institute
Stating mask plate allows at least partly described terahertz wave beam to pass through and irradiate described by image forming medium；
Single point detector, for receiving repeatedly by the mask plate and the THz wave beam energy by after image forming medium；
Signal processing unit, the THz wave that the single point detector is repeatedly received using compression sensing inversion algorithm
Beam energy carries out micro-imaging calculating, realizes the terahertz imaging.
2. micro imaging system according to claim 1, which is characterized in that the projection arrangement include pump light source and
Optical modulator；
Wherein, the pump light source generates pump beam and exposes to the optical modulator, and the optical modulator is to the pump light
Beam optics characteristic is adjusted, so that it generates patterned modulation light beam.
3. micro imaging system according to claim 2, which is characterized in that the optical modulator is digital microlens array
Or one kind of spatial light modulator.
4. micro imaging system according to claim 2, which is characterized in that the projection arrangement further includes condenser lens,
The condenser lens is used for the patterned modulation light beam convergence to the mask plate.
5. micro imaging system according to claim 1, which is characterized in that the measured value that the single point detector receives
And the mask plate, the satisfaction by between image forming medium and the terahertz wave beam:
Y=AX
Wherein, Y indicates that the measured value that the single point detector receives, A indicate the graphical matrix of the mask plate, X
Indicate the image scene by image forming medium.
6. micro imaging system according to claim 5, which is characterized in that the graphical matrix of the mask plate is hada
Ma matrix.
7. micro imaging system according to claim 1, which is characterized in that the THz source is semiconductor material, light
Conductance antenna, nonlinear electrooptical crystal, Terahertz free electron laser, Terahertz quantum cascaded laser, Terahertz parameter
One kind of source or continuous wave THz source.
8. a kind of Terahertz micro imaging method of Terahertz micro imaging system as described in claim 1, which is characterized in that
The imaging method includes:
Emit terahertz wave beam to the mask plate；
The projection arrangement is adjusted so that the projection arrangement generates patterned modulation light beam；
The patterned modulation light beam is acted on into the mask plate, so that the mask plate generates mask coding pattern,
To allow at least partly described terahertz wave beam to pass through the mask plate；
At least partly described terahertz wave beam and it is attached at being interacted by image forming medium for the mask plate；
The terahertz wave beam after receiving interaction realizes the terahertz imaging using compression sensing inversion algorithm.
9. imaging method according to claim 8, which is characterized in that the projection arrangement includes pump light source and light tune
Device processed；
Wherein, the pump light source generates pump beam and exposes to the optical modulator, and the optical modulator is to the pump light
Beam optics characteristic is adjusted, so that it generates patterned modulation light beam.
10. imaging method according to claim 9, which is characterized in that the optical modulator be digital microlens array or
One kind of spatial light modulator.
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| CN201811543201.0A CN109632840A (en) | 2018-12-17 | 2018-12-17 | Terahertz micro imaging system and imaging method |
| PCT/CN2019/121761 WO2020125373A1 (en) | 2018-12-17 | 2019-11-28 | Terahertz microscopic imaging system and imaging method |
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| WO2020125373A1 (en) * | 2018-12-17 | 2020-06-25 | 深圳市华讯方舟太赫兹科技有限公司 | Terahertz microscopic imaging system and imaging method |
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| RU2767156C1 (en) * | 2021-05-20 | 2022-03-16 | Федеральное государственное бюджетное учреждение науки Физико-технический институт им. А.Ф. Иоффе Российской академии наук | Terahertz subwave scanning microscope |
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| WO2020125373A1 (en) * | 2018-12-17 | 2020-06-25 | 深圳市华讯方舟太赫兹科技有限公司 | Terahertz microscopic imaging system and imaging method |
| CN111006764A (en) * | 2019-12-27 | 2020-04-14 | 青岛青源峰达太赫兹科技有限公司 | Method and system for improving signal-to-noise ratio of rapid terahertz spectrum system based on code modulation |
| CN111812672A (en) * | 2020-07-31 | 2020-10-23 | 广东工业大学 | Image reconstruction method and reflective terahertz ghost imaging system |
| CN111812672B (en) * | 2020-07-31 | 2023-02-10 | 广东工业大学 | Image reconstruction method and reflective terahertz ghost imaging system |
| CN112014329A (en) * | 2020-10-21 | 2020-12-01 | 季华实验室 | Imaging system and method for internal structure of semiconductor product |
| CN112014329B (en) * | 2020-10-21 | 2021-04-20 | 季华实验室 | Imaging system and method for internal structure of semiconductor product |
| CN113075132A (en) * | 2021-04-19 | 2021-07-06 | 广东工业大学 | Reflection type terahertz microscopic imaging system and method based on electro-optic effect |
| CN113281295A (en) * | 2021-05-12 | 2021-08-20 | 华南理工大学 | Amplitude type super-surface terahertz compression imaging system and method |
| WO2024109842A1 (en) * | 2022-11-25 | 2024-05-30 | 中国科学院深圳先进技术研究院 | Terahertz single-pixel real-time imaging method and system based on physical model |
| CN117215057A (en) * | 2023-10-16 | 2023-12-12 | 浙江昕微电子科技有限公司 | Intelligent microscopic imaging method and device based on sub-nanometer pattern and electronic equipment |
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| WO2020125373A1 (en) | 2020-06-25 |
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