CN109632212A - A kind of quick-speed leak detection method and its device of Terahertz travelling-wave tubes - Google Patents
A kind of quick-speed leak detection method and its device of Terahertz travelling-wave tubes Download PDFInfo
- Publication number
- CN109632212A CN109632212A CN201811586288.XA CN201811586288A CN109632212A CN 109632212 A CN109632212 A CN 109632212A CN 201811586288 A CN201811586288 A CN 201811586288A CN 109632212 A CN109632212 A CN 109632212A
- Authority
- CN
- China
- Prior art keywords
- travelling
- wave tubes
- leak
- exhaust pipe
- leak detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/28—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds
- G01M3/2807—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for pipes
- G01M3/2815—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for pipes using pressure measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The invention discloses a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes, it include: pumping instrument pedestal, being evacuated instrument pedestal has perforative pedestal air flue from bottom to top, exhaust pipe is connected with by leak detector installation pad on pumping instrument pedestal, clip disk is set with outside exhaust pipe, the exhaust duct aperture that in the middle part of clip disk there are discharge hoses to pass through, clip disk carries out axial limiting to exhaust pipe, locking lid is set with outside clip disk, it is connected through a screw thread between locking lid and pumping instrument pedestal, clip disk is carried out axial compression by locking lid, leak detector installation pad has perforative installation cushion steam road, installation cushion steam road is connected to pedestal air flue, pedestal air flue is connected to the exhaust pipe air flue of exhaust pipe, exhaust pipe top is connect with travelling-wave tubes, pumping instrument base bottom is connected with leak detector, travelling-wave tubes and leakage detection apparatus can be completely embedded, and the exhaust pipe of leakage detection apparatus By stable connection, so that travelling-wave tubes be allow to be evacuated on leak detector for a long time, the sensitivity of leak detector leak rate is improved.
Description
Technical field
The present invention relates to vacuum electron device technical fields, more particularly to a kind of quick leak-checking side of Terahertz travelling-wave tubes
Method and its device.
Background technique
Terahertz Technology is shown in fields such as high-resolution Terahertz radar, remote high-speed communication and space explorations
Huge application potential, but need to provide the THz source with certain power and bandwidth requirement for it.Terahertz folds wave
Leading wave duct conforms exactly to this requirement, and obtains extensive concern and research.
The composition of Terahertz folded waveguide travelling-wave tubes includes electron gun, slow-wave structure, collector, input/output coupling knot
Structure and focusing system, as shown in Figure 3.
Its working principle is that: the electronics note of gun cathode transmitting is compressed and is accelerated between cathode and anode, electric after acceleration
The cross sectional shape that son remains certain in the case where focusing magnetic system passes through folded waveguide slow-wave structure；Slow-wave structure reduces electromagnetic wave
Phase velocity, reach synchronous with electron motion.After the electromagnetic field effect injected by signal, the electromagnetic wave of electronics and slow-wave structure into
Row sufficiently interaction, and electron energy is gradated as THz wave energy, amplified by output window output signal.Row
Entire electromagnetic wave interaction process in wave duct must carry out in the high environment of vacuum degree, otherwise will appear high pressure and beat
The phenomenon that fire and the poisoning of cathode cause electronics that can not emit.
Usually before Terahertz folded waveguide travelling-wave tubes is using work, the process being vented through overbaking is needed, so that terahertz
Vacuum degree when hereby folded waveguide travelling-wave tubes works can reach -7Pa magnitude.It usually needs to carry out before travelling-wave tubes baking exhaust whole
The process of pipe leak detection, when the vacuum leak rate shown on leak detector reaches -10Pa.m3/s magnitude, and is blown into helium, on leak detector
After the vacuum leak rate of display does not change, just can ensure that pipe is in gastight state, be travelling-wave tubes in electronics transmitting and
Normal operation is laid a good foundation.
But the usual folded waveguide slow-wave structure size of Terahertz travelling-wave tubes is smaller, internal most fine pore only has Φ
0.22mm, the most thin part of folded waveguide only have 0.15mm wide.Hunted leak using common common leak detector, vacuum pumping speed compared with
Slowly, general slow wave length dimension will at least spend 5 minutes or more time that could take out vacuum leak rate in the travelling-wave tubes of 50mm or more
To -9Pa.m3/s magnitude, it is longer to be extracted into the -10Pa.m3/s magnitude time spent, seriously constrains the production efficiency of tubulation.
The pump drainage tracheae of general Terahertz travelling-wave tubes is a tube, and outer diameter is Φ 8mm, diameter of bore Φ 7.5mm；
Its oral area is easily installed on exhaust station and is evacuated in horn-like.When hunting leak on leak detector, usually exhaust pipe horn mouth
One end be placed on the valve rubber of leak detector bleeding point and carry out.It, can not since the contact area of horn mouth and valve rubber is smaller
It is fixed by self gravity.It is entire to fix by the strength of atmospheric pressure and artificial holding travelling-wave tubes when leak detector vacuumizes work
Pipe.Especially when the speed of exhaust is slow, time cost is longer, compares labor intensive.
Summary of the invention
It is an object of the invention to: overcome the above-mentioned problems in the prior art, proposes a kind of Terahertz travelling-wave tubes
Travelling-wave tubes and leakage detection apparatus can be completely embedded by quick-speed leak detection method and its device, and the exhaust pipe of leakage detection apparatus passes through company
Stabilization is connect, so that travelling-wave tubes be allow to be evacuated on leak detector for a long time, improves the sensitivity of leak detector leak rate, is also liberated
The help of manpower.
The purpose of the present invention is realized by following technical proposals:
A kind of fast leakage detection apparatus of Terahertz travelling-wave tubes, comprising: pumping instrument pedestal, the pumping instrument pedestal have under
And upper perforative pedestal air flue, exhaust pipe is connected with by leak detector installation pad on the pumping instrument pedestal, outside the exhaust pipe
It is set with clip disk, the exhaust duct aperture that in the middle part of the clip disk there are discharge hoses to pass through, the clip disk carries out exhaust pipe
Axial limiting, the clip disk is set with locking lid outside, is connected through a screw thread between the locking lid and pumping instrument pedestal, described
The clip disk is carried out axial compression by locking lid, and the leak detector installation pad has perforative installation cushion steam road, the installation
Cushion steam road is connected to pedestal air flue, and the pedestal air flue is connected to the exhaust pipe air flue of exhaust pipe, the exhaust pipe top and row
Wave duct connection, the pumping instrument base bottom are connected with leak detector.
A kind of fast leakage detection apparatus of Terahertz travelling-wave tubes of the invention, the exhaust pipe install pad one end close to leak detector
With funnelform exhaust pipe uncovered structure.
A kind of fast leakage detection apparatus of Terahertz travelling-wave tubes of the invention, the vertical cross-section of the clip disk are in the knot of falling T-shaped
Structure, the exhaust duct aperture bottom have the open cooperation chamfering matched with exhaust pipe uncovered structure.
A kind of fast leakage detection apparatus of Terahertz travelling-wave tubes of the invention, the clip disk are split type structure, the card
Vertically middle section separately includes right half of clip and left half of clip to hoop disk.
The fast leakage detection apparatus of a kind of Terahertz travelling-wave tubes of the invention, before having between the leak detector and pumping instrument pedestal
Grade mechanical pump.
A kind of fast leakage detection apparatus of Terahertz travelling-wave tubes of the invention is provided in the air inlet pipe of the prime mechanical pump
Vacuum meter.
A kind of fast leakage detection apparatus of Terahertz travelling-wave tubes of the invention, is arranged between the leak detector and prime mechanical pump
There is leak detector valve.
A kind of fast leakage detection apparatus of Terahertz travelling-wave tubes of the invention, the pumping instrument base top surface have to lower recess
For leak detector install pad installation rubber mat mounting groove.
A kind of fast leakage detection apparatus of Terahertz travelling-wave tubes of the invention, the pumping instrument base top surface have to lower recess
For leak detector install pad installation rubber mat mounting groove.
A kind of quick-speed leak detection method of Terahertz travelling-wave tubes, comprising the following steps:
S1, exhaust pipe is welded on travelling-wave tubes, then carries out the assembling of leakage detection apparatus, leak detector is installed before leak detection
Pad upper and lower surface coats vacuum grease, makes the phenomenon that not having gas leakage between two part binding faces；
S2, pumping instrument pedestal is placed on the bleeding point of prime mechanical pump, instrument pedestal and prime mechanical pump will be evacuated
Binding face between bleeding point smears vacuum grease, convenient for sealing；
It after travelling-wave tubes is connect by S3 with fast leakage detection apparatus, is mounted on the bleeding point of prime mechanical pump, opens prime machine
Tool pump and vacuum meter, the pre- vacuum for taking out travelling-wave tubes；
After the vacuum degree shown on S4, gauge reaches 1Pa, leak detection valve is opened, starting leak detector (10) is further
The vacuum of travelling-wave tubes is taken out, and using the leak rate sensitivity indicated number on leak detector come leakage detection of hunting leak；
S5, when the leak rate sensitivity indicated on leak detector reaches -10Pa.m3/s, with spray gun toward the welding position of travelling-wave tubes
It sets and is blown into helium, if leak rate instruction changes, the position of gas leakage is just judged by being blown into the position of helium and carries out repair welding,
If leak rate instruction does not change, the position that this travelling-wave tubes does not leak air in the welding process is meant that, complete traveling wave
The entire leak detection process of pipe.
The quick-speed leak detection method of a kind of Terahertz travelling-wave tubes of the invention, it is characterised in that: in the step S4, such as truly
The vacuum degree shown on sky meter is unable to reach 1Pa, then the pad suspected on travelling-wave tubes is wrapped up using the cotton for having dipped in alcohol,
By the trend of the vacuum degree rise and fall shown on vacuum meter, to judge the leak source with scouting travelling-wave tubes, if on vacuum meter
The vacuum degree of display quickly reaches 1Pa, then opens leak detection valve and open leak detector, carry out the leak source for going through travelling-wave tubes.
According to the above technical scheme, the beneficial effects of the present invention are: proposing a kind of quick leak-checking side of Terahertz travelling-wave tubes
Travelling-wave tubes and leakage detection apparatus can be completely embedded by method and its device, and the exhaust pipe of leakage detection apparatus passes through stable connection, thus
It is evacuated travelling-wave tubes on leak detector for a long time, improves the sensitivity of leak detector leak rate, also liberated the help of manpower.
The method that this elder generation's scouting leak source is gone through again, can protect leak detector from the impact of atmospheric pressure in gas leakage, extend leak detector
Service life.
Detailed description of the invention
Fig. 1 is a kind of fast leakage detection apparatus schematic diagram of Terahertz travelling-wave tubes of the present invention；
Fig. 2 is that a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes of the present invention is further improved schematic diagram；
Fig. 3 is background technique Terahertz folded waveguide travelling-wave tubes composed structure schematic diagram.
Specific embodiment
The present invention is further illustrated with attached drawing combined with specific embodiments below.
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Such as the embodiment of quick-speed leak detection method and its device that Fig. 1-2 is a kind of Terahertz travelling-wave tubes of the present invention, Yi Zhongtai
The fast leakage detection apparatus of hertz travelling-wave tubes, comprising: pumping instrument pedestal 1, the pumping instrument pedestal 1 have perforative bottom from bottom to top
Seat air flue 11, is connected with exhaust pipe 4 by leak detector installation pad 2 on the pumping instrument pedestal 1, and the exhaust pipe 4 is set with outside
Clip disk 3, the exhaust duct aperture passed through in the middle part of the clip disk 3 with discharge hoses 4, the clip disk 3 carry out axis to exhaust pipe 4
To limit, it is set with locking lid 6 outside the clip disk 3, is connected through a screw thread between the locking lid 6 and pumping instrument pedestal 1, institute
It states locking lid 6 and the clip disk 3 is subjected to axial compression, the leak detector installation pad 2 has perforative installation cushion steam road 21, institute
It states installation cushion steam road 21 to be connected to pedestal air flue 11, the pedestal air flue 11 is connected to the exhaust pipe air flue 41 of exhaust pipe 4, described
4 top of exhaust pipe is connect with travelling-wave tubes 5, and 1 bottom of pumping instrument pedestal is connected with leak detector 10, and the exhaust pipe 4 is close to inspection
Leaking 2 one end of instrument installation pad has funnelform exhaust pipe uncovered structure 42, and the vertical cross-section of the clip disk 3 is in the structure of falling T-shaped,
The exhaust duct aperture bottom has the open cooperation chamfering 33 matched with exhaust pipe uncovered structure 42, and the clip disk 3 is point
Body formula structure, vertically middle section separately includes right half of clip 31 and left half of clip 32, the leak detector to the clip disk 3
There is prime mechanical pump 7 between 10 and pumping instrument pedestal 1, vacuum meter 8 is provided in the air inlet pipe of the prime mechanical pump 7, it is described
Leak detector valve 9 is provided between leak detector 10 and prime mechanical pump 7, pumping 1 top surface of instrument pedestal has to lower recess for inspection
The rubber mat mounting groove 12 that instrument installation pad 2 is installed is leaked, pumping 1 top surface of instrument pedestal, which has to installing for leak detector for lower recess, pads
The rubber mat mounting groove 12 of 2 installations.
A kind of quick-speed leak detection method of Terahertz travelling-wave tubes, comprising the following steps:
S1, exhaust pipe 4 is welded on travelling-wave tubes 5, then carries out the assembling of leakage detection apparatus, pacifies leak detector before leak detection
Dress 2 upper and lower surfaces of pad coat vacuum grease, make the phenomenon that not having gas leakage between two part binding faces；
S2, pumping instrument pedestal 1 is placed on the bleeding point of prime mechanical pump 7, by pumping instrument pedestal 1 and prime mechanical pump
Binding face between 7 bleeding point smears vacuum grease, convenient for sealing；
It after travelling-wave tubes 5 is connect by S3 with fast leakage detection apparatus, is mounted on the bleeding point of prime mechanical pump 7, opens prime
Mechanical pump 7 and vacuum meter 8, the pre- vacuum for taking out travelling-wave tubes；
After the vacuum degree shown on S4, gauge reaches 1Pa, leak detection valve 9 is opened, starting leak detector 10 is further taken out
The vacuum of travelling-wave tubes 5, and using the leak rate sensitivity indicated number on leak detector come leakage detection of hunting leak；
S5, when the leak rate sensitivity indicated on leak detector 10 reaches -10Pa.m3/s, with spray gun toward the welding of travelling-wave tubes 5
Position is blown into helium, if leak rate instruction changes, the position of gas leakage is just judged by being blown into the position of helium and is mended
Weldering means that the position that this travelling-wave tubes does not leak air in the welding process if leak rate instruction does not change, and completes row
The entire leak detection process of wave duct.
The quick-speed leak detection method of a kind of Terahertz travelling-wave tubes, it is characterised in that: in the step S4, if vacuum
The vacuum degree shown on meter is unable to reach 1Pa, then the pad suspected on travelling-wave tubes is wrapped up using the cotton for having dipped in alcohol, leads to
The trend of the vacuum degree rise and fall shown on vacuum meter 8 is crossed, to judge the leak source with scouting travelling-wave tubes, if shown on vacuum meter
The vacuum degree shown quickly reaches 1Pa, then opens leak detection valve 9 and open leak detector 10, carry out the leak source for going through travelling-wave tubes.
Left one side of something clip 32 and right half of clip 31 are internally provided with open cooperation chamfering 33, opening cooperation chamfering 33 and row
Tracheae uncovered structure is the same.External screw thread is machined in pumping 1 outer circle of instrument pedestal, is locked and is machined with internal screw thread on lid 6, it in this way can be with
The two screw threads for fastening is got up.The upper interior step for determining lid 6 is just stuck in the T of left half of clip 32 and right half of clip 31
On the transverse part of character form structure.
Operation implementation method of the invention is as follows:
Firstly, exhaust pipe 4 is welded on travelling-wave tubes 5, the installation of leak detection tool equipment fixture is then carried out.It is needed before leak detection
Leak detector is installed into 2 upper and lower surfaces of pad and coats vacuum grease, in order to not have showing for gas leakage between two part binding faces
As.
Leak detector installation pad 2 after being painted with grease is placed into the rubber mat mounting groove 12 of pumping instrument pedestal 1, will be evacuated instrument bottom
Seat 1 is placed on the bleeding point of prime mechanical pump 7, it is also desirable to will be between pumping instrument pedestal 1 and the bleeding point of prime mechanical pump 7
Binding face smears vacuum grease, convenient for sealing.
It will first lock on 6 sets of air inlet-outlet pipes 4 of lid, then left half of clip 32 and right half of the two parts of clip 31 and row
The exhaust pipe uncovered structure 42 of tracheae 4 is combined together, and is kneaded into a circle with hand.Then by travelling-wave tubes 5 together with exhaust pipe 4
Vertical together to stand upside down, the exhaust pipe uncovered structure 42 of exhaust pipe 4 is downward.During pipe stands upside down, moment hand handle
Left one side of something clip 32 and right half of clip 31 are clutched, and are prevented two parts from separating, also to be prevented locking lid from falling from exhaust pipe 4
Out.
After pipe stands upside down, oral area of the exhaust pipe uncovered structure 42 to leak detector installation pad 2 is laid flat.Then it allows and locks lid 6
It hurtles down, before 31 two parts of left half of clip 2 and right half of clip separate not yet, just packs into left half of clip
Between 32 and right half of clip 31.Then quick spin locking lid 6 is threadedly engaged locking with pumping instrument pedestal 1.Left in this way half
Checkpost hoop 32 and right half of clip 31 would not separate again.After locking the locking of lid 6, related exhaust pipe 4 and travelling-wave tubes 5 are all locked
Tightly, it can be carried out hunting leak in this way.After this process, there is no need to manually help travelling-wave tubes, manpower is saved.
After leak detector improvement project, the method for entire process of hunting leak is as follows:
When travelling-wave tubes 5 and exhaust pipe 4 are installed along with the bleeding point on prime mechanical pump 7 together with leak detection fixing tool fixture
Afterwards, prime mechanical pump 7 and vacuum meter 8, the pre- vacuum for taking out travelling-wave tubes are opened.
After the vacuum degree for waiting several seconds for showing on kind of vacuum meter enters 1Pa, leak detection valve 9 is turned on, leak detector 10 is used
Take out the vacuum of travelling-wave tubes 5 again, and using the leak rate sensitivity indicated number on leak detector 10 come leakage detection of hunting leak.
If the vacuum degree shown on vacuum meter 8 cannot be introduced into 1Pa, can first be wrapped up with the cotton for having dipped in some alcohol
The pad suspected on travelling-wave tubes, by the trend of the vacuum degree rise and fall shown on vacuum meter 8, to judge and scouting traveling wave
The leak source of pipe.
If the vacuum degree shown on vacuum meter 8 enters 1Pa quickly, leak detection valve 9 is opened, leak detector 10 is opened, presses
" start to hunt leak " button on lower leak detector 10, carries out the leak source for going through travelling-wave tubes.
When the leak rate sensitivity indicated on leak detector 10 is to -10Pa.m3/s, just with spray gun toward the welding position of travelling-wave tubes 5
It sets and is blown into helium, if leak rate instruction changes, the position of gas leakage is just judged by being blown into the position of helium and is mended
Weldering.If leak rate instruction does not change, the position that this travelling-wave tubes 5 does not leak air in the welding process is meant that, complete
The entire leak detection process of travelling-wave tubes.
The method entirely hunted leak introduces the process that prime mechanical pump 7 is taken out in advance, first carries out Rough Inspection, a part of traveling wave of screening
The big leak hole of pipe 5, then gone through by leak detector 10 goes through some small leakages using the advantages of 10 high sensitivity of leak detector
Hole.This method pumpdown time is fast, and there is finesse in sb.'s roughness, improves the production efficiency of travelling-wave tubes.This elder generation's scouting leak source is gone through again
Method, can protect leak detector from the impact of atmospheric pressure in gas leakage, extend the service life of leak detector.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes characterized by comprising pumping instrument pedestal (1), the pumping instrument
Pedestal (1) has perforative pedestal air flue (11) from bottom to top, is installed on the pumping instrument pedestal (1) by leak detector and pads (2)
It is connected with exhaust pipe (4), is set with clip disk (3) outside the exhaust pipe (4), there are discharge hoses in the middle part of the clip disk (3)
(4) exhaust duct aperture passed through, the clip disk (3) carry out axial limiting to exhaust pipe (4), are set with outside the clip disk (3)
Locking lid (6) is connected through a screw thread between the locking lid (6) and pumping instrument pedestal (1), and the locking covers (6) for the card
It binds round disk (3) and carries out axial compression, the leak detector installation pad (2) has perforative installation cushion steam road (21), the installation cushion steam
Road (21) is connected to pedestal air flue (11), and the pedestal air flue (11) is connected to the exhaust pipe air flue (41) of exhaust pipe (4), described
Exhaust pipe (4) top is connect with travelling-wave tubes (5), and pumping instrument pedestal (1) bottom is connected with leak detector (10).
2. a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes according to claim 1, it is characterised in that: the exhaust pipe
(4) there is funnelform exhaust pipe uncovered structure (42) close to leak detector installation pad (2) one end.
3. a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes according to claim 2, it is characterised in that: the clip disk
(3) vertical cross-section is in the structure of falling T-shaped, and the exhaust duct aperture bottom has the opening matched with exhaust pipe uncovered structure (42)
Cooperate chamfering (33).
4. a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes according to one of Claims 2 or 3, it is characterised in that: institute
Stating clip disk (3) is split type structure, and vertically middle section separately includes right half of clip (31) and left half to the clip disk (3)
Checkpost hoop (32).
5. a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes according to claim 4, it is characterised in that: the leak detector
(10) there are prime mechanical pump (7) between pumping instrument pedestal (1).
6. a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes according to claim 5, it is characterised in that: the prime machine
Vacuum meter (8) are provided in the air inlet pipe of tool pump (7).
7. a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes according to claim 5, it is characterised in that: the leak detector
(10) it is provided between prime mechanical pump (7) leak detector valve (9).
8. a kind of fast leakage detection apparatus of Terahertz travelling-wave tubes according to claim 1, it is characterised in that: the pumping instrument
Pedestal (1) top surface, which has to lower recess, installs the rubber mat mounting groove (12) that pad (2) is installed for leak detector.
9. a kind of quick-speed leak detection method of Terahertz travelling-wave tubes, which comprises the following steps:
S1, exhaust pipe (4) is welded on travelling-wave tubes (5), then carries out the assembling of leakage detection apparatus, pacifies leak detector before leak detection
Dress pad (2) upper and lower surface coats vacuum grease, makes the phenomenon that not having gas leakage between two part binding faces；
S2, pumping instrument pedestal (1) is placed on the bleeding point of prime mechanical pump (7), pumping instrument pedestal (1) and prime is mechanical
The binding face pumped between the bleeding point of (7) smears vacuum grease, convenient for sealing；
It after travelling-wave tubes (5) is connect by S3 with fast leakage detection apparatus, is mounted on the bleeding point of prime mechanical pump (7), opens prime
Mechanical pump (7) and vacuum meter (8), the pre- vacuum for taking out travelling-wave tubes；
After the vacuum degree shown on S4, gauge reaches 1Pa, leak detection valve (9) is opened, starting leak detector (10) is further taken out
The vacuum of travelling-wave tubes (5), and using the leak rate sensitivity indicated number on leak detector come leakage detection of hunting leak；
S5, when the leak rate sensitivity indicated on leak detector (10) reaches -10Pa.m3/s, with spray gun toward the welding of travelling-wave tubes (5)
Position is blown into helium, if leak rate instruction changes, the position of gas leakage is just judged by being blown into the position of helium and is mended
Weldering means that the position that this travelling-wave tubes does not leak air in the welding process if leak rate instruction does not change, and completes row
The entire leak detection process of wave duct.
10. a kind of quick-speed leak detection method of Terahertz travelling-wave tubes according to claim 9, it is characterised in that: the step
In S4, if the vacuum degree shown on vacuum meter is unable to reach 1Pa, is wrapped up on travelling-wave tubes and being cherished using the cotton for having dipped in alcohol
Doubtful pad, by the trend of the vacuum degree rise and fall shown on vacuum meter (8), to judge the leakage with scouting travelling-wave tubes
Point is opened leak detection valve (9) and is opened leak detector (10), carry out if the vacuum degree shown on vacuum meter quickly reaches 1Pa
Go through the leak source of travelling-wave tubes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811586288.XA CN109632212A (en) | 2018-12-25 | 2018-12-25 | A kind of quick-speed leak detection method and its device of Terahertz travelling-wave tubes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811586288.XA CN109632212A (en) | 2018-12-25 | 2018-12-25 | A kind of quick-speed leak detection method and its device of Terahertz travelling-wave tubes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109632212A true CN109632212A (en) | 2019-04-16 |
Family
ID=66077017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811586288.XA Pending CN109632212A (en) | 2018-12-25 | 2018-12-25 | A kind of quick-speed leak detection method and its device of Terahertz travelling-wave tubes |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109632212A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024175980A1 (en) * | 2023-02-22 | 2024-08-29 | Edwards Vacuum Llc | Magnetic assembly for a sputter ion pump |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104198131A (en) * | 2014-09-04 | 2014-12-10 | 安徽华东光电技术研究所 | Travelling wave tube leakage detection equipment and application method thereof |
| CN207367912U (en) * | 2017-06-14 | 2018-05-15 | 安徽华东光电技术研究所 | A kind of protecting tool set-up for the production of miniaturization helix line TWT slow wave |
-
2018
- 2018-12-25 CN CN201811586288.XA patent/CN109632212A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104198131A (en) * | 2014-09-04 | 2014-12-10 | 安徽华东光电技术研究所 | Travelling wave tube leakage detection equipment and application method thereof |
| CN207367912U (en) * | 2017-06-14 | 2018-05-15 | 安徽华东光电技术研究所 | A kind of protecting tool set-up for the production of miniaturization helix line TWT slow wave |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024175980A1 (en) * | 2023-02-22 | 2024-08-29 | Edwards Vacuum Llc | Magnetic assembly for a sputter ion pump |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208505546U (en) | Casing of relay clamp for detecting air tightness | |
| US5172583A (en) | Seal tester | |
| CN101408466A (en) | Method and device for detecting leakage of shell type heat exchanger | |
| CN106802218B (en) | Vacuum coating cavity leak detection system and leak detection method | |
| CN104296943A (en) | Vacuum type helium detecting equipment and method thereof | |
| CN109632212A (en) | A kind of quick-speed leak detection method and its device of Terahertz travelling-wave tubes | |
| CN103175662A (en) | Leak detecting method in production of large and medium-sized automobile air conditioner | |
| CN108982017A (en) | A kind of motor test device for air tightness suitable for polymorphic type | |
| CN205506312U (en) | Automatic leak hunting platform of bellows | |
| CN201368789Y (en) | Hydrogen fuel cell leakage detecting device | |
| CN110780145A (en) | Emission testing device of direct-current high-voltage type accelerator electron gun | |
| CN105240636B (en) | Vacuum helium-leakage detecting apparatus and its sealed joint pipe | |
| US2819609A (en) | Closure leak detection | |
| CN101710017B (en) | Leak detection method of vacuum system | |
| CN203811332U (en) | Shield positioning cover special for SF6 qualitative leak detector | |
| US3882715A (en) | Air leak detector | |
| CN208847420U (en) | A kind of lithium battery vacuum detecting head and the vacuum checking device for being equipped with this detector | |
| JP3817916B2 (en) | Leak test equipment | |
| RU2617567C1 (en) | Method and device for leakage check of the liquid-propellant rockets cylinder courses | |
| CN103759898A (en) | Shielding locating hood special for SF6 qualitative leak detector and detection method thereof | |
| CN208350300U (en) | A kind of lithium battery casing package seal checker | |
| CN114136552A (en) | Welding seam sealing detection tool and welding seam sealing detection method and system | |
| CN106505020A (en) | Vacuum packaging equipment | |
| CN104101479B (en) | PAR lamp fixed focus detection device and fixed focus detection method thereof | |
| RU181104U1 (en) | VACUUM INPUT FOR LEAKAGE DESIGN TESTS |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |