CN109624111A - A kind of integrated circuit silicon chip splitting equipment - Google Patents
A kind of integrated circuit silicon chip splitting equipment Download PDFInfo
- Publication number
- CN109624111A CN109624111A CN201811221881.4A CN201811221881A CN109624111A CN 109624111 A CN109624111 A CN 109624111A CN 201811221881 A CN201811221881 A CN 201811221881A CN 109624111 A CN109624111 A CN 109624111A
- Authority
- CN
- China
- Prior art keywords
- chamber body
- sliding block
- gear
- hinged shaft
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Abstract
The present invention relates to a kind of integrated circuit silicon chip splitting equipments, including workbench, top plate, first sliding block, compression bar, pressing plate, transmission gear, motor, rack gear, first hinged shaft, sliding rail, second sliding block, rounding knife, connecting rod, second hinged shaft, connector, pinion, handle, fixed bracket and master gear, rack gear is slidably connected at left side inside the first chamber body by the first sliding block, transmission gear is installed on the output end of motor, compression bar is fixedly connected with the pressing plate, the design is instead of manual fixed, increase safety coefficient, it ensure that segmentation precision simultaneously, second sliding block is slidably connected at sliding rail right side, connecting rod is fixedly connected with rounding knife, connector both ends are rotatably connected on respectively on the first hinged shaft and the second hinged shaft, master gear is rotatably connected on fixed internal stent, handle is fixedly connected with master gear, the design increases The characteristic for moving racing, increases efficiency, it is determined that the motion profile of rounding knife, cutting accuracy are high.
Description
Technical field
The present invention relates to integrated circuit silicon chip processing equipment field, specially a kind of integrated circuit silicon chip splitting equipment.
Background technique
Chip made of silicon wafer is famous " miraculous foresight ", there is surprising operational capability.No matter how Fu Za mathematics
Problem, physical problem and engineering problem, the workload also no matter calculated have it is much, as long as staff pass through computer keyboard handle
Problem tells it, and assigns the thinking and instruction solved a problem, and computer can tell you answer in a very short period of time.In this way,
Those artificial calculating need the problem of spending several years, tens of years, and computer may only need a few minutes that can solve.Very
The problem of result can not be calculated to some manpowers, computer also can tell quickly you answer.
Silicon wafer belongs to part important on integrated circuit board, but different integrated circuit board sizes is different, needs at this time
Silicon wafer is divided, to reduce silicon wafer the space occupied, traditional silicon wafer dividing method is that staff holds rounding knife to silicon
Piece is split, and this method is excessively high to the firmly size accuracy requirement of staff, is not easy to operate, firmly conference makes silicon wafer
Vibration, it is firmly small that segmentation can be made to fail, secondary splitting is needed, another method is to utilize cylinder driving segmentation blade, this method
The shortcomings that be not have special pressing device, manual compression safety is low, in conclusion being now badly in need of a kind of integrated circuit silicon chip
Splitting equipment is come solve above-mentioned appearance and soil.
Summary of the invention
It is an object of the present invention to provide a kind of integrated circuit silicon chip splitting equipments, to solve biography mentioned above in the background art
The silicon wafer dividing method of system is that the hand-held rounding knife of staff is split silicon wafer, and this method is to the firmly big of staff
Small required precision is excessively high, is not easy to operate, and firmly conference shakes silicon wafer, firmly small that segmentation can be made to fail, and needs secondary splitting,
The shortcomings that another method is to divide blade using cylinder driving, this method is that do not have special pressing device, manual compression
The low problem of safety.
To achieve the above object, the invention provides the following technical scheme: a kind of integrated circuit silicon chip splitting equipment, including dress
Main body, clamp system and division mechanism are set, described device main body includes workbench, support rod and top plate, and the top plate passes through branch
Strut is fixed at workbench top, and the clamp system setting is under the top plate on the left of end face, and the clamp system includes the
End face under the top plate is arranged in one sliding block, the first chamber body, compression bar, pressing plate, transmission gear, motor and rack gear, first chamber body
Left side, the rack gear are slidably connected at left side inside the first chamber body by the first sliding block, and the motor is located at the first chamber body
Inside, the transmission gear are installed on the output end of motor, and the compression bar top is fixed on rack gear bottom end, and compression bar bottom end
It across the first chamber body lower end surface, and is fixedly connected with the pressing plate, the division mechanism is arranged on the right side of end face under the top plate, the segmentation
Mechanism include the first hinged shaft, the second chamber body, sliding rail, the second sliding block, rounding knife, connecting rod, the second hinged shaft, connector, pinion,
Handle, fixed bracket, master gear and connection frame, under the top plate on the right side of end face, the sliding rail setting exists for the second chamber body setting
Left side inside second Room body, second sliding block are slidably connected at sliding rail right side, and the connecting rod is fixed on the second sliding block
Lower end, and connecting rod extends to the second chamber body bottom face, and is fixedly connected by knife rest with rounding knife, first hinged shaft is fixed
It is arranged in pinion left side center, second hinged shaft is fixed on sliding block right side, and the connector both ends turn respectively
Dynamic to be connected on the first hinged shaft and the second hinged shaft, the fixed bracket is fixed on inside second Room body, and the master gear rotation connects
It connects in fixed internal stent, the master gear is flexibly connected by connection frame with right gear, the handle and the fixed company of master gear
It connects, and handle extends on the right side of the second chamber body.
Further, the edges and corners of the workbench lower end surface four are provided with stabilizer blade.
Further, the position that the workbench upper surface corresponds to rounding knife offers the cutter groove for rounding knife movement.
Further, second chamber body lower end surface is provided with the guide sleeve that stretching motion is done for connecting rod.
Further, the master gear is meshed with pinion, and the tooth socket of the transmission gear is mutually nibbled with the tooth socket of rack gear
It closes.
Further, the top plate top end face is provided with double control switch, and double control switch and motor are electrically connected.
Further, the pressing plate lower end surface is provided with the cushion for preventing silicon wafer from scratching.
Compared with prior art, the beneficial effects of the present invention are: because the present invention is added to the first sliding block, the first chamber body, pressure
Bar, pressing plate, transmission gear, motor and rack gear, the design using motor driving and gear transmission principle, driving pressing plate to
Under the fixation of position is carried out to silicon wafer, instead of manual fixed, increase safety coefficient, while ensure that segmentation precision；Yin Ben
Invention is added to the first hinged shaft, the second chamber body, sliding rail, the second sliding block, rounding knife, connecting rod, the second hinged shaft, connector, secondary tooth
Wheel, handle, fixed bracket, master gear and connection frame, the design are matched using slider-crank mechanism with gear movement pair, are driven
Cutter move up and down, and cut to silicon wafer, instead of original cylinder, increase the characteristic of movement racing, on the one hand may be used
To move back and forth, it is repeatedly performed cutting operation, increases efficiency, the motion profile of rounding knife, cutting essence has on the other hand been determined
Degree is high.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the structural schematic diagram of hold-down mechanism in the present invention；
Fig. 3 is the structural schematic diagram of division mechanism in the present invention；
Fig. 4 is the structural schematic diagram of master gear and pinion in division mechanism of the present invention.
In appended drawing reference: 1. workbench；2. support rod；3. clamp system；4. top plate；5. double control switch；6. division mechanism；
7. stabilizer blade；31. the first sliding block；32. the first chamber body；33. compression bar；34. cushion；35. pressing plate；36. transmission gear；37. motor；
38. rack gear；601. first hinged shafts；602. second chamber bodies；603. sliding rail；604. second sliding blocks；605. guide sleeve；606. rounding knife；
607. connecting rod；608. second hinged shafts；609. connector；610. pinion；611. handle；612. fixed brackets；613. main teeth
Wheel；614. connection frame.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts all other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-4 is please referred to, the present invention provides a kind of technical solution: a kind of integrated circuit silicon chip splitting equipment, including device
Main body, clamp system 3 and division mechanism 6, apparatus main body include workbench 1, support rod 2 and top plate 4, and top plate 4 passes through support rod 2
It is fixed at 1 top of workbench.
Clamp system 3 is arranged on the left of 4 lower end surface of top plate, and clamp system 3 includes the first sliding block 31, the first chamber body 32, pressure
Bar 33, pressing plate 34, transmission gear 35, motor 36 and rack gear 37, the first chamber body 32 are arranged on the left of 4 lower end surface of top plate, rack gear
37 are slidably connected at 32 inside left side of the first chamber body by the first sliding block 31, and motor 36 is located inside the first chamber body 32, pass
Moving gear 35 is installed on the output end of motor 36, and 33 top of compression bar is fixed on 37 bottom end of rack gear, and 33 bottom end of compression bar passes through
First chamber body, 32 lower end surface, and be fixedly connected with pressing plate 34, which utilizes the driving of motor and the transmission principle of gear, driving
Pressing plate 34 carries out downwards the fixation of position to silicon wafer, fixes instead of manual, increases safety coefficient, while ensure that segmentation essence
Degree.
Division mechanism 6 be arranged on the right side of 4 lower end surface of top plate, division mechanism 6 include the first hinged shaft 601, the second chamber body 602,
Sliding rail 603, the second sliding block 604, rounding knife 606, connecting rod 607, the second hinged shaft 608, connector 609, pinion 610, handle
611, fixed bracket 612, master gear 613 and connection frame 614, the second chamber body 602 are arranged on the right side of 4 lower end surface of top plate, sliding rail 603
It is arranged in 602 inside left side of the second chamber body, the second sliding block 604 is slidably connected at 603 right side of sliding rail, and connecting rod 607 is fixed
In 604 lower end of the second sliding block, and connecting rod 607 extends to 602 bottom face of the second chamber body, and solid by knife rest and rounding knife 606
Fixed connection, the first hinged shaft 601 are fixed at 610 left side center of pinion, and the second hinged shaft 608 is fixed on sliding block right end
Face, 609 both ends of connector are rotatably connected on respectively on the first hinged shaft 601 and the second hinged shaft 608, and fixed bracket 612 is fixed on the
Inside two chamber bodies 602, master gear 613 is rotatably connected on inside fixed bracket 612, and master gear 613 passes through connection frame 614 and right tooth
Wheel is flexibly connected, and handle 611 is fixedly connected with master gear 613, and handle 611 extends to 602 right side of the second chamber body, design benefit
It is matched with slider-crank mechanism with gear movement pair, driving cutter move up and down, and cut to silicon wafer, instead of original
Cylinder, increase movement racing characteristic, on the one hand can move back and forth, be repeatedly performed cutting operation, increase efficiency, separately
On the one hand it has been determined that the motion profile of rounding knife 606, cutting accuracy are high.
Workbench 1 lower end surface four edges and corners are provided with stabilizer blade 7, and 1 upper surface of workbench corresponds to the position of rounding knife 606
The cutter groove moved for rounding knife 606 is offered, 602 lower end surface of the second chamber body is provided with leads for 607 stretching motion of connecting rod
Set 605, master gear 613 is meshed with pinion 610, and the tooth socket of transmission gear 35 is meshed with the tooth socket of rack gear 37, and top plate 4 pushes up
End face is provided with double control switch 5, and double control switch 5 and motor 36 are electrically connected, and 34 lower end surface of pressing plate, which is provided with, prevents silicon wafer
The cushion 34 scratched.
The present invention is at work: silicon wafer being placed on workbench 1, the output end that dual control button controls motor 36 is passed through
Rotation band nutating gear 35 rotates, and the tooth socket of transmission gear 35 is meshed with the tooth socket of rack gear 37, and rack gear 37 passes engagement force
It is handed to the first sliding block 31,31 slide downward of the first sliding block, and is moved down with carry-over bar 37, rack gear 37 pushes pressure by compression bar 33
Plate 34 moves down, 34 cooperating platform 1 of pressing plate to silicon wafer carry out position fix, while cushion 34 prevent silicon wafer because friction by
Damage, manual swing handle 611, the rotation of handle 611 drive master gear 613 to rotate, and master gear 613 is meshed with pinion 610, secondary
Gear 610 rotates around master gear 613, and connector 609 is rotated by the first hinged shaft 601 and the second hinged shaft 608, works as pinion
610 when from top to bottom rotating, and applies a downward power to the second sliding block 604 by connector 609, pushes the second sliding block 604
Moved down in 603 right side of sliding rail, the second sliding block 604 by connecting rod 607 from guide sleeve 605 be oriented to push rounding knife 606 to
Lower movement, rounding knife 606 carries out cutting operation to silicon wafer, right by connector 609 when pinion 610 rotates from the bottom to top
Second sliding block 604 applies a upward power, pulls the second sliding block 604 to move up in 603 right side of sliding rail, the second sliding block
604 pull rounding knife 606 to move up by connecting rod 607, and thus back and forth, reusable, Loop partitioning, segmentation finishes
Afterwards, stop operating handle 611, and by 5 service meter 36 of double control switch, similarly, pressing plate 34 is separated with silicon wafer, and silicon wafer is taken
Out, so that solving traditional silicon wafer dividing method is that the hand-held rounding knife 606 of staff is split silicon wafer, this method
It is excessively high to the firmly size accuracy requirement of staff, it is not easy to operate, firmly conference shakes silicon wafer, firmly small to make to divide
The shortcomings that failure needs secondary splitting, and another method is to utilize cylinder driving rounding knife 606, this method is that do not have specially
The pressing device of door, the low problem of manual compression safety.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention, for this field skill
For art personnel, it is clear that invention is not limited to the details of the above exemplary embodiments, and without departing substantially from spirit of the invention or
In the case where essential characteristic, the present invention can be realized in other specific forms.Therefore, in all respects, should all incite somebody to action
Embodiment regards exemplary as, and is non-limiting, the scope of the present invention by appended claims rather than on state
Bright restriction, it is intended that including all changes that fall within the meaning and scope of the equivalent elements of the claims in the present invention
It is interior.Any reference signs in the claims should not be construed as limiting the involved claims.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (7)
1. a kind of integrated circuit silicon chip splitting equipment, including apparatus main body, clamp system (3) and division mechanism (6), feature exists
In: described device main body includes workbench (1), support rod (2) and top plate (4), and the top plate (4) is fixed by support rod (2)
It is arranged on workbench (1) top；
On the left of top plate (4) lower end surface, the clamp system (3) includes the first sliding block (31), for the clamp system (3) setting
One chamber body (32), compression bar (33), pressing plate (34), transmission gear (35), motor (36) and rack gear (37), first chamber body
(32) on the left of top plate (4) lower end surface, the rack gear (37) is slidably connected at the first chamber body by the first sliding block (31) for setting
(32) internal left side, the motor (36) are located at the first chamber body (32) inside, and the transmission gear (35) is installed on electronic
On the output end of machine (36), compression bar (33) top is fixed on rack gear (37) bottom end, and compression bar (33) bottom end passes through the first Room
Body (32) lower end surface, and be fixedly connected with pressing plate (34)；
The division mechanism (6) setting on the right side of top plate (4) lower end surface, the division mechanism (6) include the first hinged shaft (601),
Second chamber body (602), sliding rail (603), the second sliding block (604), rounding knife (606), connecting rod (607), the second hinged shaft (608),
Connector (609), pinion (610), handle (611), fixed bracket (612), master gear (613) and connection frame (614), it is described
Second chamber body (602) setting is on the right side of top plate (4) lower end surface, and sliding rail (603) setting is in the internal left end of the second chamber body (602)
Face, second sliding block (604) are slidably connected at sliding rail (603) right side, and the connecting rod (607) is fixed on the second sliding block
(604) lower end, and connecting rod (607) extends to the second chamber body (602) bottom face, and fixed by knife rest and rounding knife (606)
Connection, first hinged shaft (601) are fixed at pinion (610) left side center, and second hinged shaft (608) is solid
It is scheduled on sliding block right side, connector (609) both ends are rotatably connected on the first hinged shaft (601) and the second hinged shaft (608) respectively
On, the fixed bracket (612) is fixed on the second chamber body (602) inside, and the master gear (613) is rotatably connected on fixed bracket
(612) internal, the master gear (613) is flexibly connected by connection frame (614) with right gear, the handle (611) and main tooth
Wheel (613) is fixedly connected, and handle (611) extends on the right side of the second chamber body (602).
2. a kind of integrated circuit silicon chip splitting equipment according to claim 1, it is characterised in that: under the workbench (1)
The edges and corners of end face four are provided with stabilizer blade (7).
3. a kind of integrated circuit silicon chip splitting equipment according to claim 1, it is characterised in that: on the workbench (1)
The position that end face corresponds to rounding knife (606) offers the cutter groove for rounding knife (606) movement.
4. a kind of integrated circuit silicon chip splitting equipment according to claim 1, it is characterised in that: second chamber body
(602) lower end surface is provided with the guide sleeve (605) that stretching motion is done for connecting rod (607).
5. a kind of integrated circuit silicon chip splitting equipment according to claim 1, it is characterised in that: the master gear (613)
It is meshed with pinion (610), the tooth socket of the transmission gear (35) is meshed with the tooth socket of rack gear (37).
6. a kind of integrated circuit silicon chip splitting equipment according to claim 1, it is characterised in that: top plate (4) top
Face is provided with double control switch (5), and double control switch (5) and motor (36) are electrically connected.
7. a kind of integrated circuit silicon chip splitting equipment according to claim 1, it is characterised in that: pressing plate (34) lower end
Face is provided with the cushion (34) for preventing silicon wafer from scratching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811221881.4A CN109624111A (en) | 2018-10-19 | 2018-10-19 | A kind of integrated circuit silicon chip splitting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811221881.4A CN109624111A (en) | 2018-10-19 | 2018-10-19 | A kind of integrated circuit silicon chip splitting equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109624111A true CN109624111A (en) | 2019-04-16 |
Family
ID=66066459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811221881.4A Pending CN109624111A (en) | 2018-10-19 | 2018-10-19 | A kind of integrated circuit silicon chip splitting equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109624111A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112267983A (en) * | 2020-09-13 | 2021-01-26 | 何景安 | Reciprocating motion sliding gear rack pulling and rotating device |
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| CN204626140U (en) * | 2015-05-15 | 2015-09-09 | 周志花 | Weaving yarn cutting device |
| CN104999129A (en) * | 2015-07-15 | 2015-10-28 | 宁波大学 | Crank slider type bar hot shearing mechanism driven by deformed elliptical gears |
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| CN106363220A (en) * | 2016-10-15 | 2017-02-01 | 湖北喵喵智能物联网科技有限公司 | Energy-saving type convenient shear plate equipment |
| JP2017024419A (en) * | 2016-09-13 | 2017-02-02 | 三星ダイヤモンド工業株式会社 | Scribe device |
| CN207643454U (en) * | 2017-11-07 | 2018-07-24 | 中山市古镇爱飞朗光电科技厂 | A kind of cutter device of LED light LED wafer |
| CN108527697A (en) * | 2018-04-09 | 2018-09-14 | 绍兴文理学院 | A kind of photovoltaic panel silicon chip cutting device for processing |
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- 2018-10-19 CN CN201811221881.4A patent/CN109624111A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101352898A (en) * | 2008-09-01 | 2009-01-28 | 俞恒庆 | Apparatus and method for processing surface of stone |
| CN204626140U (en) * | 2015-05-15 | 2015-09-09 | 周志花 | Weaving yarn cutting device |
| CN104999129A (en) * | 2015-07-15 | 2015-10-28 | 宁波大学 | Crank slider type bar hot shearing mechanism driven by deformed elliptical gears |
| CN106239774A (en) * | 2016-08-29 | 2016-12-21 | 胡崇北 | A kind of food production quick shredding mechanism of waste plastic rubbish |
| JP2017024419A (en) * | 2016-09-13 | 2017-02-02 | 三星ダイヤモンド工業株式会社 | Scribe device |
| CN106363220A (en) * | 2016-10-15 | 2017-02-01 | 湖北喵喵智能物联网科技有限公司 | Energy-saving type convenient shear plate equipment |
| CN207643454U (en) * | 2017-11-07 | 2018-07-24 | 中山市古镇爱飞朗光电科技厂 | A kind of cutter device of LED light LED wafer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112267983A (en) * | 2020-09-13 | 2021-01-26 | 何景安 | Reciprocating motion sliding gear rack pulling and rotating device |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190416 |
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| RJ01 | Rejection of invention patent application after publication |