CN109616726A - 一种滤波器及其制作方法 - Google Patents
一种滤波器及其制作方法 Download PDFInfo
- Publication number
- CN109616726A CN109616726A CN201910090637.7A CN201910090637A CN109616726A CN 109616726 A CN109616726 A CN 109616726A CN 201910090637 A CN201910090637 A CN 201910090637A CN 109616726 A CN109616726 A CN 109616726A
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- China
- Prior art keywords
- slot
- line
- resonant element
- silicon
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002360 preparation method Methods 0.000 title abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 202
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 202
- 239000010703 silicon Substances 0.000 claims abstract description 202
- 239000002184 metal Substances 0.000 claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 238000001465 metallisation Methods 0.000 claims abstract description 12
- 230000007547 defect Effects 0.000 claims description 58
- 238000001914 filtration Methods 0.000 claims description 22
- 238000010276 construction Methods 0.000 claims description 14
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000003491 array Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- 238000005530 etching Methods 0.000 description 6
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011536 re-plating Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000006880 cross-coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/207—Hollow waveguide filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/207—Hollow waveguide filters
- H01P1/208—Cascaded cavities; Cascaded resonators inside a hollow waveguide structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
- H01P11/007—Manufacturing frequency-selective devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
Abstract
Description
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910090637.7A CN109616726A (zh) | 2019-01-30 | 2019-01-30 | 一种滤波器及其制作方法 |
PCT/CN2019/111406 WO2020155670A1 (zh) | 2019-01-30 | 2019-10-16 | 滤波器及其制作方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910090637.7A CN109616726A (zh) | 2019-01-30 | 2019-01-30 | 一种滤波器及其制作方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN109616726A true CN109616726A (zh) | 2019-04-12 |
Family
ID=66019345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201910090637.7A Pending CN109616726A (zh) | 2019-01-30 | 2019-01-30 | 一种滤波器及其制作方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN109616726A (zh) |
WO (1) | WO2020155670A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020155670A1 (zh) * | 2019-01-30 | 2020-08-06 | 广东大普通信技术有限公司 | 滤波器及其制作方法 |
WO2021134997A1 (zh) * | 2019-12-30 | 2021-07-08 | 广东大普通信技术有限公司 | 一种滤波器及其制作方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108134166A (zh) * | 2017-12-25 | 2018-06-08 | 石家庄创天电子科技有限公司 | 基片集成波导滤波器以及谐振器 |
CN108461878A (zh) * | 2018-03-15 | 2018-08-28 | 昆山鸿永微波科技有限公司 | 一种带外选择性可调毫米波滤波器 |
CN209282363U (zh) * | 2019-01-30 | 2019-08-20 | 广东大普通信技术有限公司 | 一种滤波器 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2629035A1 (en) * | 2008-03-27 | 2009-09-27 | Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Industry, Through The Communications Research Centre Canada | Waveguide filter with broad stopband based on sugstrate integrated waveguide scheme |
CN105742768A (zh) * | 2014-11-28 | 2016-07-06 | 青岛海尔电子有限公司 | 一种带通滤波器及高阶带通滤波器及性能分析方法 |
CN108598632B (zh) * | 2018-04-10 | 2019-10-25 | 江南大学 | 一种具有双零点宽阻带的siw-cpw超宽带滤波器 |
CN109616726A (zh) * | 2019-01-30 | 2019-04-12 | 广东大普通信技术有限公司 | 一种滤波器及其制作方法 |
-
2019
- 2019-01-30 CN CN201910090637.7A patent/CN109616726A/zh active Pending
- 2019-10-16 WO PCT/CN2019/111406 patent/WO2020155670A1/zh active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108134166A (zh) * | 2017-12-25 | 2018-06-08 | 石家庄创天电子科技有限公司 | 基片集成波导滤波器以及谐振器 |
CN108461878A (zh) * | 2018-03-15 | 2018-08-28 | 昆山鸿永微波科技有限公司 | 一种带外选择性可调毫米波滤波器 |
CN209282363U (zh) * | 2019-01-30 | 2019-08-20 | 广东大普通信技术有限公司 | 一种滤波器 |
Non-Patent Citations (3)
Title |
---|
KAIDA DONG等: "Millimeter-wave Wideband Bandpass Filter Using Novel Slotted Substrate Integrated Waveguide", 《2015 ASIA-PACIFIC MICROWAVE CONFERENCE》, pages 1 - 3 * |
SAI-WAI WONG等: "U-Shape Slots Structure on Substrate Integrated Waveguide for 40-GHz Bandpass Filter Using LTCC Technology", 《IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY》, pages 128 - 133 * |
谭力: "基于SIW 技术的可重构滤波器的设计与研究", 《中国优秀硕士学位论文全文数据库》, 15 September 2018 (2018-09-15), pages 8 - 10 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020155670A1 (zh) * | 2019-01-30 | 2020-08-06 | 广东大普通信技术有限公司 | 滤波器及其制作方法 |
WO2021134997A1 (zh) * | 2019-12-30 | 2021-07-08 | 广东大普通信技术有限公司 | 一种滤波器及其制作方法 |
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WO2020155670A1 (zh) | 2020-08-06 |
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CB03 | Change of inventor or designer information |
Inventor after: Qiu Wencai Inventor after: Li Jin Inventor after: Liang Siwen Inventor before: Wan Jing Inventor before: Liang Xiaoxin Inventor before: Yan Yuepeng Inventor before: Wang Xiao Inventor before: Qiu Wencai |
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CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Qiu Wencai Inventor after: Tian Xuehong Inventor after: Lin Manyuan Inventor after: Liang Siwen Inventor before: Qiu Wencai Inventor before: Li Jin Inventor before: Liang Siwen |
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Address after: 523000 Room 401 and 402, building 5, No. 24, industrial East Road, Songshanhu Park, Dongguan City, Guangdong Province Applicant after: Guangdong daguangxin Technology Co.,Ltd. Address before: 523808 the first, second and third floors of building 16, small and medium-sized science and technology enterprise Pioneer Park, North Industrial City, Songshanhu high tech Industrial Development Zone, Dongguan City, Guangdong Province Applicant before: Guangdong Dapu Telecom Technology Co.,Ltd. |
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