CN109612582A - A kind of device for low temperature spectra instrument focal plane adjustment - Google Patents

A kind of device for low temperature spectra instrument focal plane adjustment Download PDF

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Publication number
CN109612582A
CN109612582A CN201811621242.7A CN201811621242A CN109612582A CN 109612582 A CN109612582 A CN 109612582A CN 201811621242 A CN201811621242 A CN 201811621242A CN 109612582 A CN109612582 A CN 109612582A
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CN
China
Prior art keywords
axis
institute
translation stage
focal plane
substrate
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CN201811621242.7A
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Chinese (zh)
Inventor
韦跃峰
蔺超
刘磊
王龙
郑玉权
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN201811621242.7A priority Critical patent/CN109612582A/en
Publication of CN109612582A publication Critical patent/CN109612582A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention discloses a kind of devices for low temperature spectra instrument focal plane adjustment, belong to technical field of spectral detection, for solving traditional focus control in the prior art, structure is complicated, size is big, reliability and the low technical problem of accuracy under cryogenic, the present invention is provided with substrate, for being mounted on spectrometer frame;Displacement platform is overlapped for installing detector and adjusting the focal plane of the detector with the out-of-focus plane of spectrometer, and institute's translation stage is laid in the substrate top;Institute's translation stage is equipped with multiple actuators for being displaced along Z axis, X-axis and Y-axis and rotating along X-axis, Y-axis for adjusting institute's translation stage;The characteristics of institute's translation stage is laid with multiple sensors for being used to monitor spacing between institute's translation stage and the substrate in the Z-axis direction, and the present invention has structure simple, small in size, accuracy, high reliablity.

Description

A kind of device for low temperature spectra instrument focal plane adjustment
Technical field
The present invention relates to technical field of spectral detection more particularly to a kind of devices for low temperature spectra instrument focal plane adjustment.
Background technique
High spectral resolution survey meter refers to and is persistently detected on a surface target with very narrow and continuous spectrum channel The instrument of picture, in visible light to infrared band, its spectral resolution is up to nanometer scale, usually has the characteristics that wave band is more, light More than spectrum port number is up to tens of or even hundreds of, and it is often continuous between each spectrum channel, with the continuous hair of technology Exhibition, people are higher and higher to index requests such as the spectral resolution of spectrometer, radiometric resolution and signal-to-noise ratio, shortwave and middle long wave Infrared optical system needs work in 0 DEG C of low temperature environment below, this brings to spectrometer adjustment to meet These parameters Difficulty, in addition, extremely low environment temperature and compact space, which are also not suitable for staff, carries out focal plane adjustment.
With information-based continuous development, space remote sensing information has become important social economy's resource, wherein for red The demand of external spectrum information just grows stronger day by day, and the multi-field exploitation such as environmental monitoring, resource detection all be unable to do without high-resolution light Spectrometer, spectrometer focal plane adjustment is exactly that the target surface of planar array detector is enabled to be overlapped with the optimum dispersion focal plane of spectrometer, so that visiting It surveys device and receives the spectrum of high quality, to export accurate spectral information, for the spectrometer used under low temperature environment, adopt more With room temperature adjustment, its position of focal plane is adjusted under low temperature environment again later, eventually by modification focal plane gasket with compensate by The defocusing amount caused by the imbalance of spectrometer architecture size.
In the prior art, traditional low temperature focus control, mainly by pedestal, slide, worm and gear component, focusing motor, The composition such as feed screw nut component, inclined plane slide block component, encoder and vertical straight line guide rail causes traditional focus control structure multiple It is miscellaneous, size is big, moreover, under cryogenic, reducing the reliability and accuracy of traditional focus control.
Summary of the invention
The purpose of the present invention is overcoming defect of the existing technology, it is simple, small in size to provide a kind of structure, accuracy, The device for the focal plane adjustment of low temperature spectra instrument of high reliablity.
To achieve the goals above, the invention provides the following technical scheme:
A kind of device for low temperature spectra instrument focal plane adjustment disclosed by the invention, comprising:
Substrate, for being mounted on spectrometer frame;
Displacement platform is overlapped for installing detector and adjusting the focal plane of the detector with the out-of-focus plane of spectrometer, Institute's translation stage is laid in the substrate top;
Institute's translation stage is equipped with multiple for adjusting institute's translation stage along the displacement of Z axis, X-axis and Y-axis and along X The actuator that axis, Y-axis rotate;
Institute's translation stage is laid with multiple between monitoring between institute's translation stage and the substrate in the Z-axis direction Away from sensor.
Further, institute's translation stage be formed in the middle part of X/Y plane optical path can by channel, the displacement Platform upper surface is connected to the substrate top by bolt assembly;
At least three actuators are laid on the top X/Y plane of institute's translation stage, it is flat for adjusting the displacement Platform is displaced along Z axis and rotates along X-axis and Y-axis;
The side XZ planar cloth of institute's translation stage is equipped at least one described actuator, the translation stage for adjusting It is displaced along Y-axis;
The side YZ planar cloth of institute's translation stage is equipped at least one and states actuator for adjusting institute's translation stage along X Axial displacement.
Further, the substrate be provided in the middle part of X/Y plane optical path can by gap, the substrate is flat in XY The upper surface in face is formed with multiple grooves, and the structure of groove is respectively pyramidal structure, V-structure and planar structure.
Further, the actuator is linear actuator, is contacted with spherical end surface with the groove.
Further, the bolt assembly includes spring and screw;
The spring is the compressed spring of trochoid spiral structure;
The screw is threadedly coupled through institute's translation stage and with the substrate.
Further, institute's translation stage is provided with the through-hole with screw clearances cooperation.
Further, the sensor is optical fibre displacement sensor, and the sensor is connected in institute's rheme by grip slipper Move the X/Y plane upper ground surface of platform.
In the above-mentioned technical solutions, a kind of device for low temperature spectra instrument focal plane adjustment provided by the invention, beneficial to effect Fruit:
1, the displacement platform that the present invention designs, by being laid with multiple actuator command displacement platforms in XY in displacement platform Rotate along Z axis displacement, along X-axis rotation, along Y-axis in plane and in XZ plane along Y-axis displacement, in YZ plane along X-axis position It moves, actuator and computer system connection, and displacement platform location information is passed into computer system, computer system Precisely, it reliably derives the position of focal plane information of detector, the focal plane and spectrometer of detector is made so as to adjust displacement platform Out-of-focus plane be overlapped, structure is simple, debugging is convenient.
2, the displacement platform that the present invention designs, respectively in the side of the first actuator, the second actuator and third actuator Laying optical fiber displacement sensor monitoring displacement platform is displaced in the Z-axis direction, further improves the position precision of displacement platform.
3, the displacement platform that designs of the present invention, displacement platform by bolt assembly can command displacement platform in X/Y plane Along Z axis displacement, rotates along X-axis rotation, along Y-axis and be displaced in XZ plane along Y-axis, is solid with displacement along X-axis in YZ plane It is connected in substrate top, bolt assembly includes spring and screw, and spring is the compressed spring of trochoid spiral structure, by using circular cone The compressed spring of helical structure makes displacement platform keep stablizing in movement or stationary state, effectively further improves displacement Position of platform precision.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, below will be to institute in embodiment Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some realities recorded in this Example is applied, for those of ordinary skill in the art, is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of axonometric drawing of device for low temperature spectra instrument focal plane adjustment disclosed by the invention;
Fig. 2 is a kind of top view of device for low temperature spectra instrument focal plane adjustment disclosed by the invention;
Fig. 3 is a kind of left view of device for low temperature spectra instrument focal plane adjustment disclosed by the invention;
Fig. 4 is a kind of substrate axonometric drawing of device for low temperature spectra instrument focal plane adjustment disclosed by the invention;
Fig. 5 is a kind of overall structure diagram of device for low temperature spectra instrument focal plane adjustment disclosed by the invention.
Description of symbols:
Substrate 1;Displacement platform 2;Actuator 3;Sensor 4;Grip slipper 5;Spring 6;Screw 7;Detector 100;Spectrometer Frame 200;Focal plane overlay region 300;
First groove 101;Second groove 102;Third groove 103;Gap 104;
Channel 201;
First actuator 301;Second actuator 302;Third actuator 303;4th actuator 304;5th actuator 305。
Specific embodiment
In order to make those skilled in the art more fully understand this technical solution, the present invention is made below in conjunction with attached drawing Further it is discussed in detail.
Referring to shown in Fig. 1-5;
Invent a kind of device for low temperature spectra instrument focal plane adjustment, comprising:
Substrate 1, for being mounted on spectrometer frame 200;
Displacement platform 2, for installing detector 100 and adjusting the focal plane of detector 100 and the out-of-focus plane weight of spectrometer It closes, displacement platform 2 is laid in 1 top of substrate;
Displacement platform 2 is equipped with multiple for adjusting displacement platform 2 along the displacement of Z axis, X-axis and Y-axis and along X-axis, Y-axis The actuator of rotation;
Displacement platform 2 is laid with multiple for monitoring the sensing of spacing between displacement platform 2 and substrate 1 in the Z-axis direction Device 4.
Preferably, displacement platform 2 be formed in the middle part of X/Y plane optical path can by channel 201, on displacement platform 2 Surface is connected to 1 top of substrate by bolt assembly;
At least three actuators are laid on the top X/Y plane of displacement platform 2, for adjusting displacement platform 2 along Z axis position It moves and is rotated along X-axis and Y-axis;
The side XZ planar cloth of displacement platform 2 is equipped at least one actuator, is displaced for adjusting displacement platform 2 along Y-axis;
The side YZ planar cloth of displacement platform 2 is equipped at least one and states actuator for adjusting displacement platform 2 along X-axis position It moves.
Preferably, substrate 1 be provided in the middle part of X/Y plane optical path can by gap 104, substrate 1 is in the upper of X/Y plane Surface is formed with multiple grooves, and the structure of groove is respectively pyramidal structure, V-structure and planar structure.
Preferably, actuator is linear actuator, is contacted with spherical end surface with groove.
Specifically, shown in Figure 5,200 top of spectrometer frame is fixed with substrate 1 by bolt in the structure, displacement Platform 2 can be in X/Y plane along Z axis displacement, along X-axis rotation, along Y-axis rotation and the edge in XZ plane by bolt assembly Y-axis displacement is connected in 1 top of substrate with displacement in YZ plane along X-axis, and 2 top of displacement platform is fixed with detector 100, light The light that enters of spectrometer system enters formation in displacement platform 2 by the gap 104 of substrate 1 and the channel 201 of displacement platform 2 Spectrometer out-of-focus plane, spectrometer out-of-focus plane is overlapped with the focal plane of detector 100 in focal plane overlay region 300, referring to Fig. 1 institute Show, multiple actuators, sensor 4, actuator and computer system connection is laid on displacement platform 2, and displacement is flat Platform location information passes to computer system, and sensor 4 is connected by grip slipper 5 and displacement platform 2;
Shown in Figure 4, substrate 1 is square structure, and upper surface center of the substrate 1 in coordinate system X/Y plane is provided with Gap 104, passes through for optical path, and in the surrounding arrangement of gap 104, there are three groove, the first grooves for the upper surface of substrate 1 101, the second groove 102 and third groove 103, the first groove 101 are the groove of planar structure, have one and are parallel to substrate 1 The bottom wall of upper surface, the second groove 102 are V-structure groove, and there are two inclined side wall, 102 length directions of the second groove for tool It extending along an axis X, third groove 103 is pyramidal structure groove, and specific tapered nest or pyramidal pits, structure is simple, compact, into And reduce the volume of the device of warm spectrometer focal plane adjustment;
Shown in Figure 1, displacement platform 2 is square structure, and the upper surface center in coordinate system X/Y plane is provided with Channel 201, passes through for optical path, and displacement platform 2 passes through connected 1 top of substrate of bolt assembly, it is preferred that bolt assembly includes bullet Spring 6 and screw 7, spring 6 are the compressed spring of trochoid spiral structure, spring 6 be sleeved on the outside of screw 7 and on displacement platform 2 Surface contact, screw 7 are threadedly coupled through displacement platform 2 and with substrate 1.Preferably, displacement platform 2 is provided with and 7 gap of screw The through-hole of cooperation.Displacement platform 2 is set to keep steady in movement or stationary state by using the compressed spring of trochoid spiral structure It is fixed, effectively improve displacement platform position precision;
Being connected on displacement platform 2, there are five actuator, the first actuator 301, the second actuator 302 and third actuators 303, the 4th actuator 304 and the 5th actuator 305, actuator are linear actuator, and there is spherical end surface to connect with groove Touching;
First actuator 301, the second actuator 302 and third actuator 303 are connected in the upper surface of displacement platform 2 and hang down It directly with X/Y plane is contacted with the groove of substrate 1, the first actuator 301 is contacted with the first groove 101 for command displacement platform 2 It is displaced in X/Y plane along X-axis and Y-axis;Second actuator 302 is contacted for command displacement platform 2 with the second groove 102 in XY It is displaced in plane along X-axis;Third actuator 303 is contacted with three grooves 103 of ground forbids position in X/Y plane for command displacement platform 2 It moves, when the movement of the first actuator 301, displacement platform 2 can be rotated around X-axis, when the first actuator 301 and the second actuator When 302 simultaneously operation, displacement platform 2 can be rotated around Y-axis, when the first actuator 301, the second actuator 302 and third promote When dynamic device 303 moves at the same time, displacement platform 2 can be displaced on Z axis;
4th actuator 304 is connected in 2 side surface of displacement platform and perpendicular to XZ plane, exists for command displacement platform 2 It is displaced in XZ plane along Y-axis;
5th actuator 305 is connected in 2 side surface of displacement platform and perpendicular to YZ plane, exists for command displacement platform 2 It is displaced in YZ plane along X-axis;
Actuator is connect with computer system, and when the temperature varies, displacement platform 2 is contacted with the first groove 101 First actuator 301, the second actuator 302 contacted with the second groove 102, the third actuator contacted with third groove 103 303, which expand with heat and contract with cold, generates flexible deformation, and flexible deformation information is fed back to computer system by actuator, to obtain displacement 2 change location of platform, by the first actuator 301, the second actuator 302 and 303 command displacement platform 2 of third actuator along Z Axial displacement is rotated along X-axis rotation, along Y-axis, and 304 command displacement platform 2 of the 4th actuator is displaced along Y-axis, the 5th actuator 305 Command displacement platform 2 is displaced along X-axis, and location information is passed to computer system, and computer system precisely, reliably derives The position of focal plane information of detector 100 out makes the focal plane of detector 100 and dissipating for spectrometer 200 so as to adjust displacement platform 2 Focal plane is overlapped.
It is shown in Figure 1;
Preferably, sensor 4 is optical fibre displacement sensor, and sensor 4 is connected in the XY of displacement platform 2 by grip slipper 5 Plane upper ground surface.
Specifically, sensor 4 is optical fibre displacement sensor in the structure, and first in 2 upper surface of displacement platform promotees The side of dynamic device 301, the second actuator 302 and third actuator 303 is laid with a sensor 4, and sensor 4 passes through clamping Seat 5 is connected with displacement platform 2, by laying in the side of the first actuator 301, the second actuator 302 and third actuator 303 Optical fibre displacement sensor 4 monitors displacement platform 2 and is displaced in the Z-axis direction, further improves the position precision of displacement platform 2.
In the above-mentioned technical solutions, a kind of device for low temperature spectra instrument focal plane adjustment provided by the invention, beneficial to effect Fruit:
1, the displacement platform that the present invention designs, by being laid with multiple actuator command displacement platforms in XY in displacement platform Rotate along Z axis displacement, along X-axis rotation, along Y-axis in plane and in XZ plane along Y-axis displacement, in YZ plane along X-axis position It moves, actuator and computer system connection, and displacement platform location information is passed into computer system, computer system Precisely, it reliably derives the position of focal plane information of detector, the focal plane and spectrometer of detector is made so as to adjust displacement platform Out-of-focus plane be overlapped, structure is simple, debugging is convenient.
2, the displacement platform that the present invention designs, respectively in the side of the first actuator, the second actuator and third actuator Laying optical fiber displacement sensor monitoring displacement platform is displaced in the Z-axis direction, further improves the position precision of displacement platform.
3, the displacement platform that designs of the present invention, displacement platform by bolt assembly can command displacement platform in X/Y plane Along Z axis displacement, rotates along X-axis rotation, along Y-axis and be displaced in XZ plane along Y-axis, is solid with displacement along X-axis in YZ plane It is connected in substrate top, bolt assembly includes spring and screw, and spring is the compressed spring of trochoid spiral structure, by using circular cone The compressed spring of helical structure makes displacement platform keep stablizing in movement or stationary state, effectively further improves displacement Position of platform precision.
It is above that certain exemplary embodiments of the invention are only described by way of explanation, undoubtedly, for ability The those of ordinary skill in domain without departing from the spirit and scope of the present invention can be with a variety of different modes to institute The embodiment of description is modified.Therefore, above-mentioned attached drawing and description are regarded as illustrative in nature, and should not be construed as to the present invention The limitation of claims.

Claims (7)

1. a kind of device for low temperature spectra instrument focal plane adjustment characterized by comprising
Substrate (1), for being mounted on spectrometer frame (200);
Displacement platform (2), for installing detector (100) and adjusting the focal plane of the detector (100) and defocusing for spectrometer Plane is overlapped, and institute's translation stage (2) is laid in the substrate (1) top;
Institute's translation stage (2) is equipped with multiple for adjusting institute's translation stage (2) along the displacement of Z axis, X-axis and Y-axis, Yi Jiyan The actuator that X-axis, Y-axis rotate;
Institute's translation stage (2) is laid with multiple for monitoring institute's translation stage (2) and the substrate (1) in the Z-axis direction Between spacing sensor (4).
2. a kind of device for low temperature spectra instrument focal plane adjustment according to claim 1, which is characterized in that the displacement Platform (2) be formed in the middle part of X/Y plane optical path can by channel (201), institute translation stage (2) upper surface passes through Bolt assembly is connected to the substrate (1) top;
At least three actuators are laid on the top X/Y plane of institute's translation stage (2), it is flat for adjusting the displacement Platform (2) is displaced along Z axis and rotates along X-axis and Y-axis;
The side XZ planar cloth of institute's translation stage (2) is equipped at least one described actuator, the translation stage for adjusting (2) it is displaced along Y-axis;
The side YZ planar cloth of institute's translation stage (2) is equipped at least one described actuator for adjusting institute's translation stage (2) it is displaced along X-axis.
3. a kind of device for low temperature spectra instrument focal plane adjustment according to claim 2, which is characterized in that the substrate (1) be provided in the middle part of X/Y plane optical path can by gap (104), the substrate (1) formed in the upper surface of X/Y plane There are multiple grooves, and the structure of groove is respectively pyramidal structure, V-structure and planar structure.
4. a kind of device for low temperature spectra instrument focal plane adjustment according to claim 3, which is characterized in that described to actuate Device is linear actuator, is contacted with spherical end surface with the groove.
5. a kind of device for low temperature spectra instrument focal plane adjustment, feature according to claim 2-4 any one exist In the bolt assembly includes spring (6) and screw (7);
The spring (6) is the compressed spring of trochoid spiral structure;
The screw (7) is threadedly coupled through institute's translation stage (2) and with the substrate (1).
6. a kind of device for low temperature spectra instrument focal plane adjustment according to claim 5, which is characterized in that the displacement Platform (2) is provided with the through-hole with the screw (7) clearance fit.
7. a kind of device for low temperature spectra instrument focal plane adjustment according to claim 1, which is characterized in that the sensing Device (4) is optical fibre displacement sensor, and the sensor (4) is connected in the X/Y plane of institute's translation stage (2) by grip slipper (5) Upper ground surface.
CN201811621242.7A 2018-12-28 2018-12-28 A kind of device for low temperature spectra instrument focal plane adjustment Pending CN109612582A (en)

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CN111766671A (en) * 2020-07-21 2020-10-13 上海航天控制技术研究所 Focal plane assembly adjusting device and method

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Application publication date: 20190412