CN109604400A - Grating curvature device and its curved raster system - Google Patents
Grating curvature device and its curved raster system Download PDFInfo
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- CN109604400A CN109604400A CN201811647634.0A CN201811647634A CN109604400A CN 109604400 A CN109604400 A CN 109604400A CN 201811647634 A CN201811647634 A CN 201811647634A CN 109604400 A CN109604400 A CN 109604400A
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- 238000005452 bending Methods 0.000 claims abstract description 35
- 230000001105 regulatory effect Effects 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims description 31
- 229910052710 silicon Inorganic materials 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 238000005266 casting Methods 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000011133 lead Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical class [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- KHKRWLZKHOQQCV-UHFFFAOYSA-N [GeH3][GeH2][GeH3] Chemical compound [GeH3][GeH2][GeH3] KHKRWLZKHOQQCV-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- SDKPSXWGRWWLKR-UHFFFAOYSA-M sodium;9,10-dioxoanthracene-1-sulfonate Chemical compound [Na+].O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2S(=O)(=O)[O-] SDKPSXWGRWWLKR-UHFFFAOYSA-M 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D11/00—Bending not restricted to forms of material mentioned in only one of groups B21D5/00, B21D7/00, B21D9/00; Bending not provided for in groups B21D5/00 - B21D9/00; Twisting
- B21D11/10—Bending specially adapted to produce specific articles, e.g. leaf springs
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Clamps And Clips (AREA)
Abstract
The invention discloses a kind of grating curvature device and its curved raster system, device includes bracket, the clamping device for clamping grating, and the clamping device is fixed on bracket by being bent regulating mechanism；The clamping device includes the clamping piece for being arranged in pairs and being bonded grating edge, and two clamping pieces are oppositely arranged to clamp grating, and the bending regulating mechanism drives clamping piece to the curvature of the mobile adjustment grating in center.System includes curved raster and curved raster system.The present invention provides a kind of grating curvature device, which can become curved raster for plane grating.The adjustable grating curvature degree of present system, structure are simple, easily manufactured.
Description
Technical field
The invention belongs to grating technology field, it is related to a kind of grating curvature device and its curved raster system.
Background technique
Since two thousand six, the X-ray phase contrast technology based on grating has obtained significantly developing, the phase of acquisition
Lining image and darkfield image can make up for it the deficiency that weakly absorbing material is imaged in common X-ray absorption image, so as to present
More complete substance internal information out.Currently, X-ray phase contrast laboratory complete some biologic-organ-tissues at
As the work of, material tests etc., just gradually from experiment development to application stage transition.
In practical application, the size of imaging viewing field largely affects the application field of the technology, such as leads in medicine
Domain needs the visual field of imaging system sufficiently large to check the larger organ-tissue in human body.In the cone-beam X-ray generally used
Under the premise of, near optical axis, X-ray laterally penetrates (i.e. perpendicular to the direction of grating strip on grating face) in traveling not to be surpassed
1 screen periods is crossed, and in grating edge, X-ray beam is in divergent shape, and lateral penetration depth is greater than 1 period, then grating pair
X-ray cannot play the role of Complete Bind, and therefore, the phase information missing at this causes visual field to be limited phenomenon.Therefore, should make
Grating strip adapts to the direction of propagation of X-ray, that is, needs to make curved raster.For one-dimensional X-ray phase contrast system, need
Make cylindrical bending grating.
Since silicon wafer quality is more crisp, silicon substrate grating is difficult to be bent, and the prior art is not directly by the way that silicon wafer to be bent
The curved raster of silicon substrate is made.
In the prior art, the production of curved raster is mainly in the following ways: production plane grating first.The prior art
LIGA (tri- German of Lithographie, Galvanoformung, Abformung are used in the production of middle mainstream plane grating
Word abbreviation) tens microns of titanium of thickness covers in substrate using silicon wafer as substrate, then implements LIGA technology again by technology
Plane grating is made, after plane grating completes, convenient for grating curvature, to need all to erode silicon base, so just
The grating using thin titanium layer as substrate is formd, flexibility is stronger than silicon base, therefore can be made into curved raster again.
But titanium has the following problems as substrate: plane grating manufacture is to be not easy to be unfolded in common lab based on LIGA technology
Implement, and higher cost.
Summary of the invention
The technical problem to be solved in the present invention is that in view of the drawbacks of the prior art, providing a kind of grating based on silicon substrate
Plane grating can be become curved raster by bending apparatus, the device.
The present invention will further solve the problems, such as to be to provide that a kind of adjustable grating curvature degree, structure be simple, manufacturer
Just curved raster system.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of grating curvature device, including bracket, the clamping device for clamping grating, the clamping device passes through bending
Regulating mechanism is fixed on bracket；The clamping device includes the clamping piece for being arranged in pairs and clamping grating edge, and pairs of two
A clamping piece be oppositely arranged and the two to the center of grating active force on the straight line by raster center, it is described
It is bent the curvature that regulating mechanism drives clamping piece to the mobile adjustment grating of raster center.
Further, in the grating curvature device, the preferably described clamping piece is equipped with the card for clamping grating edge
Slot；The card slot shape and grating edge shape cooperate.
Further, in the grating curvature device, the preferably described bending regulating mechanism includes top-pressure part, the press
Part is arranged at clamping piece rear portion；
The top-pressure part and clamping piece are separately positioned, and the top-pressure part presses against the clamping piece rear portion；
Either the top-pressure part is fixed together with clamping piece integral structure or the two；
Or the top-pressure part and clamping piece are rotatablely connected；
Further, in the grating curvature device, the preferably described bracket is equipped with across hole, and the top-pressure part installs
It is passed through in hole described, and is equipped with locking piece between the top-pressure part and bracket, the top-pressure part after movement is locked in across hole
In；
Or the bracket is equipped with screw hole, the top-pressure part is screwed onto the screw hole；
Or the top-pressure part is cam, and is rotatably connected on bracket.
Further, in the grating curvature device, the preferably described bending regulating mechanism includes top-pressure part, the press
Part side by side or is set in together with clamping piece, and the top-pressure part is fixed on bracket, is equipped between the top-pressure part and clamping piece
For locking the locating piece of mutual alignment between the two.
Further, in the grating curvature device, the preferably described locating piece is to be fixed on top-pressure part front end or rear end
Band-type brake, the band-type brake holds clamping piece tightly and is locked, and the band-type brake opens so that clamping piece is relative to top under external force
Casting die is mobile to adjust grating curvature degree.
Further, in the grating curvature device, Guiding machine preferably is equipped in at least side of bending regulating mechanism
Structure.
Further, in the grating curvature device, the preferably described guiding mechanism includes guide part, guide rail, described to lead
Rail is fixed on bracket and parallel with the top-pressure part direction of motion, and the guide part is fixed on clamping piece side, and cooperates in guide rail
Upper movement.
A kind of curved raster system, including grating and above-mentioned grating curvature device, the clamping in the grating curvature device
Part is opposite to be clamped in grating two sides, and drives clamping piece to the bending of the mobile adjustment grating of raster center by bending regulating mechanism
Degree.
Further, in the curved raster system, the preferably described grating is silicon-base plane grating, the silicon of the grating
It is etched with the slot of high-aspect-ratio in base substrate, is filled with metal or alloy in the slot；
Or the grating is the plane grating that sheet metal is substrate.
Grating curvature device of the invention is applied by gripper mechanism grips grating two sides, then by the way that bending regulating mechanism is opposite
Plus-pressure, plane grating, which is squeezed and deformed, becomes the curved raster with certain curvature.The curvature of grating can be according to X-ray
The requirement of grating contrast image-forming system is adjusted, i.e., the distance that radius of curvature can be promoted from clamping device to centre determines.The present invention
Apparatus structure is simple, easily operated, is applicable not only to the bending of high-aspect-ratio silicon substrate grating, applies also for using sheet metal as base
The bending of the grating at bottom.
In curved raster system of the invention, not instead of as directlying adopt curved raster in the prior art, first select flat
Concave grating clamps grating by bending apparatus and squeezes in opposite directions, and the curvature of grating curvature, grating is adjustable, and whole device is stablized,
Grating can be using silicon substrate grating, the grating of metallic substrates.Optical-mechanical system of the invention adapts to the direction of propagation of X-ray, special
It is not to adapt to the X-ray of diverging in grating edge, so that X-ray lateral penetration is no more than 1 screen periods, grating edge phase
Position information no longer lacks, and visual field is completely unrestricted.In addition, since plane grating has positioning side structure, the positioning side and clamping
The card slot direction of part is parallel, the positioning side of grating can be fixed in the clamping piece being bonded with it, and realization stable position is simultaneously curved
Bent grating.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples, in attached drawing:
Fig. 1 is the structural schematic diagram of the embodiment of the present invention 1；
Fig. 2 is the structural schematic diagram of 1 bracket of the embodiment of the present invention；
Fig. 3 is first group of clamping device of the embodiment of the present invention 1 and the structural schematic diagram of bending regulating mechanism cooperation；
Fig. 4 is second group of clamping device of the embodiment of the present invention 1 and the structural schematic diagram of bending regulating mechanism cooperation；
Fig. 5 is that the clamping device of the embodiment of the present invention 1 and bending regulating mechanism cooperate the structure of second of embodiment to show
It is intended to；
Fig. 6 is that the clamping device of the embodiment of the present invention 1 and bending regulating mechanism cooperate the structure of the third embodiment to show
It is intended to；
Fig. 7 is bending apparatus and plane grating fit structure schematic diagram in the curved raster system of the embodiment of the present invention 2；
Fig. 8 is the structural schematic diagram in the curved raster system of the embodiment of the present invention 2 after grating curvature.
Fig. 9 is the grating side structure schematic diagram of the embodiment of the present invention 2；
Figure 10 is the grating pattern schematic diagram of the embodiment of the present invention 2.
Specific embodiment
For a clearer understanding of the technical characteristics, objects and effects of the present invention, now control attached drawing is described in detail
A specific embodiment of the invention.
Embodiment 1, as shown in Figure 1, a kind of grating curvature device, including bracket 100, the clamping for clamping grating 600
Mechanism 200, the clamping device 200 are fixed on bracket 100 by being bent regulating mechanism 300；The clamping device 200 includes
It is arranged in pairs and clamps the clamping piece 210 at 600 edge of grating, two pairs of clamping pieces 210 are oppositely arranged and the two is right
With on the straight line by raster center, the bending regulating mechanism 300 drives clamping piece 210 at the center of grating active force
To the curvature of the mobile adjustment grating 600 in center.Due to clamping piece 210 to the position of grating point-blank so that two
A 210 energy opposing compression grating of clamping piece, plane grating, which is squeezed and deformed, becomes the curved raster with certain curvature, grating
Curvature can be adjusted according to the requirement of X-ray grating phase contrast imaging system, i.e., radius of curvature can be pushed away from clamping device to centre
Into distance determine.
As shown in Figs. 1-2, as bending apparatus foundation structure, bracket 100 is for clamping device 200, bending regulating mechanism
300 setting.Grating 600 is used as a laminated structure, and warp architecture needs carry out it in the opposite two sides of grating 600 curved
Song, therefore, bracket 100 need to be equipped with left and right or upper and lower structure on two sides, and grating 600 is arranged in middle position, the knot of bracket 100
Structure is not construed as limiting, and can be the arbitrary shape and structure for meeting above-mentioned condition, such as the scissor knot with opposite two clamping limbs
Structure, quadrilateral frame structure etc., the preferably described bracket 100 of the present embodiment are the frame body of quadrilateral frame composition, and quadrilateral frame structure refers to:
Frame is set on four direction up and down and encloses the frame structure covered, shape can be quadrilateral frame, circular frame,
Oval frame or other be suitble to quadrilateral frame structure of the invention.In the present embodiment, using quadrilateral frame, preferably square box
Frame.In quadrilateral frame, including two be oppositely arranged for be arranged be bent regulating mechanism 300 first side frame 110 and
Connect two second side frames 120 of two first side frames 110, the shape of first side frame 110 and second side frame 120 can
To be plate, column, strip, tubulose etc., cross-sectional shape is not construed as limiting, and can be arbitrary shape, in order to mitigate whole device
Weight, preferably tubular structure or light material, or hole is provided in first side frame 110 and second side frame 120.First side
The material of frame 110 and second side frame 120 can be any hard material that can bear radially outward force, such as: stainless steel, aluminium
Alloy, high molecular material etc..
As shown in Fig. 1,3-4, the clamping piece 210, since grating 600 is laminated structure, will lead to for clamping grating 600
It crosses clamping piece 210 and clamps grating 600, to form curved impetus, when grating 600 is bent, apply pressure relatively, then two folders
Gripping member 210 is symmetrical arranged, and the line of centres of preferably two clamping pieces 210 passes through the center of grating 600, i.e. two clamping pieces
210 center is all located on the straight line by 600 center of grating.It can be achieved with exerting a force relatively in this way, curve it.Equally
Since grating 600 is laminated structure, then preferred clamping piece 210 is equipped with the card slot 230 for clamping 600 edge of grating, card slot 230
Can be can be caught in 600 edge of grating, and preferably 230 width of card slot and 600 edge thickness of grating cooperate, and grating 600 blocks
Cooperate after entering without movement, preferably described 230 shape of card slot and 600 edge shape of grating, shape cooperation unanimously increases clamping piece
Contact area between 210 and grating 600 clamps more reliable and more stable.Such as grating 600 edge is arc, then card slot 230
Shape is also arc in slot, if clamping 600 edge of grating is straight flange, shape is straight trough in the slot of card slot 230.The straight flange is
The positioning side of grating 600, the positioning side is parallel with the direction of clamping piece card slot 230, the positioning side of grating 600 can be fixed on
In the clamping piece being bonded with it, stable position and curved raster are realized.Since silicon substrate grating 600 and clamping piece 210 are all hard
It is equipped with gasket or elastic component in material, preferably card slot 230, avoids during bending, damaging grating 600.Outside clamping piece 210
Shape and structure be not construed as limiting, can be and be suitble to arbitrary shape and structure of the invention.Clamping piece 210 and bending regulating mechanism
300 connection can be separately positioned, is also possible to integral structure or the two is fixed together, such as be flexibly connected,
The various modes such as clamping, suit.
Bending regulating mechanism 300 is separately fixed at the opposite sides of bracket 100.Specifically it is fixed on two first side frames
On 110, bending regulating mechanism 300 is used to apply grating 600 in two sides opposite pressure, and to the bending that grating 600 needs
Degree is adjusted.Being bent regulating mechanism 300 includes top-pressure part 310, and the top-pressure part 310 is arranged at 210 rear portion of clamping piece.
Top-pressure part 310 is connect with clamping piece 210 is divided into three kinds of embodiments, the first is that separation as shown in Figs 1-4 is set
It sets, the top-pressure part 310 presses against 210 rear portion of clamping piece.
310 front end of top-pressure part presses 210 rear portion of clamping piece, and 210 rear portion of clamping piece is preferably provided with top pressures groove 220, pushes up
310 front end of casting die presses against in top pressures groove 220, in favor of the positioning of 310 front end of top-pressure part, guarantees that top splenium deviates straight line, adjustment
Clamping piece 210 is mobile to 100 center of bracket；Based on this function, then being bent regulating mechanism 300, there are many separately positioned implementations to tie
Structure:
Top-pressure part 310 and the first the separately positioned implementation structure of clamping piece 210: bracket 100 is equipped with across hole 140, institute
State top-pressure part 310 be installed on it is described pass through in hole 140, locking piece is equipped between its rear end and bracket 100, by the press after movement
Part 310 is locked in hole 140；Specifically, top-pressure part 310 be rod-like structure or column structure, two first of bracket 100
Side frame 110 is provided with across hole 140, and preferably two first side frames 110 pass through hole 140 on same straight line, so that two
The opposite active force of a top-pressure part 310 point-blank, top-pressure part 310 and across hole 140 clearance fit or sliding match
It closes, top-pressure part 310 can be move freely along passing through in hole 140.Locking piece is arranged on bracket 100, is specifically located at the first side
On frame 110, the direction of motion and first side frame 110 of top-pressure part 310 are perpendicular or generally perpendicular, and locking piece can be a variety of knots
Structure, such as: locking piece is the bolt being arranged along first side frame 110, and multiple blind holes are continuously arranged on 310 side wall of top-pressure part,
The bolt direction of motion is vertical with top-pressure part 310, and bolt is inserted into a blind hole i.e. locking 310 position of top-pressure part.
Locking piece can also be elastic construction, i.e., is equipped with along first side frame 110 by the locking piece of elastic compression, locking piece
It can be set one, can also respectively be arranged one, under free state in 310 two sides of top-pressure part, locking piece under the effect of elasticity, is pressed
310 side wall of casting die is pressed closer, shallow slot is equipped with preferably on 310 side wall of top-pressure part, shallow slot continuously can axially be set in top-pressure part 310
It sets.Locking piece front end elasticity heads into shallow slot, and top-pressure part 310 is locked.External force recession locking piece, top-pressure part 310 move freely tune
Section, withdraws from external force, and locking piece spring return compresses top-pressure part 310.
Locking piece, which can also be, to be rotatably connected on first side frame 110, turns to top-pressure part 310, top-pressure part 310 is hooked
Locking reversely rotates locking piece, unlocks.
Top-pressure part 310 and separately positioned second of the implementation structure of clamping piece 210: bracket 100 is equipped with across hole 140, institute
State top-pressure part 310 be installed on it is described pass through in hole 140, it is screw hole, the press that the bracket 100 was equipped with, which passes through hole 140,
Part 310 is screwed onto the screw hole；Top-pressure part 310 rotates, and adjusts 310 outreach of top-pressure part, and it is curved to form grating 600 with press
Curvature.
Top-pressure part 310 and separately positioned the third of clamping piece 210 implement structure: the top-pressure part 310 is cam, and is rotated
It is connected on bracket 100.Top-pressure part 310 is the cam for the spiral structure that curvature is gradually increased, and rotation different location compresses top
Casting die 310 moves forward or back, to adjust curvature.
Second of embodiment that the top-pressure part 310 is connect with clamping piece 210 is as shown in Figure 5: the two integral structure
Or the two is fixed together, and in both fixed forms, top-pressure part 310 can be set up directly on clamping piece 210
Rear portion, top-pressure part 310 drive clamping piece 210 to move, identical with the first separately positioned implementation structure, i.e., set on bracket 100
Have across hole 140, the top-pressure part 310 be installed on it is described pass through in hole 140, locking piece is equipped between its rear end and bracket 100
400, the top-pressure part 310 after movement is locked in hole 140,400 specific structure of locking piece is also same as above, no longer superfluous herein
It states.
It is bent in regulating mechanism, the third embodiment that top-pressure part 310 is connect with clamping piece 210 are as follows: the top-pressure part
310 side by side or are set in together with clamping piece 210, and the top-pressure part 310 is fixed on bracket 100, the top-pressure part 310 and folder
The locating piece for locking mutual alignment between the two is equipped between gripping member 210.As shown in fig. 6,210 rear sleeve of clamping piece is mounted in
In top-pressure part 310, top-pressure part is fixed on bracket 100, can be equipped with locating piece therebetween and be positioned.The locating piece is
It is fixed on the band-type brake 700 of 310 front end of top-pressure part or rear end, the band-type brake 700 is held clamping piece 210 tightly and is locked, in outer masterpiece
It is opened with the lower band-type brake 700 so that clamping piece 210 adjusts grating curvature degree relative to the movement of top-pressure part 310.
The union that locating piece can also be fixed on top-pressure part 310 for limit, clamping piece 210 are externally provided with screw thread, rotate
Union adjusts position of the clamping piece 210 relative to top-pressure part 310.
In order to further ensure the movement of top-pressure part 310 is straight line, guiding mechanism is equipped at left and right sides of the bracket 100
500.There are many technical solutions for guiding mechanism 500, such as: perpendicular to the guide pipe of first side frame 110, top-pressure part 310 is set with
In guide pipe, front end is stretched out from guide pipe, and middle and back is directed to pipe restriction and can only move along a straight line.As shown in Figs. 1-2, originally
The embodiment that embodiment uses are as follows: the guiding mechanism 500 includes guide part 510, guide rail 520, and the setting of guide rail 520 exists
On bracket 100 and parallel with 310 direction of motion of top-pressure part, guide rail 520 is preferably provided on second side frame 120, second side
Frame 120 is parallel with the direction of motion of top-pressure part 310, and the guide part 510 is fixed on 210 side of clamping piece, and in guide rail 520
Movement.Guide rail 520 can be the single radial cut slot towards 210 1 side opening of clamping piece, is also possible to the through slot of both-side opening, leads
It is installed in guide rail 520 to part 510, is moved along guide rail 520.
Embodiment 2, as Figure 7-8, a kind of curved raster system, including grating 600 and embodiment 1 for being bent light
The grating curvature device of grid 600.Wherein shown in Fig. 7 is that grating does not carry out curved structural schematic diagram, after Fig. 8 is grating curvature
Structural schematic diagram.Curved raster system of the invention is to be curved it based on plane grating by grating curvature device,
Curved raster system is made, solves the problems, such as that silicon substrate grating is difficult to that curved shape is made.
As shown in figure 8, clamping grating 600, bending are adjusted the clamping piece 210 in the clamping device 200 of bending apparatus in opposite directions
Mechanism 300 pushes the clamping piece 210 of clamping device 200 to move towards, and to squeeze grating 600 to 600 center of grating, forces grating
600 bend to one side, form curved raster.Curved raster adapts to the direction of propagation of X-ray, especially in grating 600
Edge adapts to the X-ray of diverging, so that X-ray lateral penetration is no more than 1 screen periods, 600 edge phase information of grating
It no longer lacks, visual field is completely unrestricted.
It is the planar grating structure to form curved raster as shown in figs. 9-10.The grating 600 is silicon-base plane grating, or
Grating 600 described in person is using sheet metal as the plane grating of substrate.Sheet metal is that the plane grating of substrate can be using existing
Some products, the plane grating that need to only meet the sheet metal substrate that the present invention needs may be used to the present invention.
The grating 600 of the present embodiment is illustrated by taking silicon-base plane grating as an example:
Based on micro- casting preparing grating technology, silicon substrate micro-structure is made in silicon substrate, this silicon substrate micro-structure uses first
Light helps electrochemical etching technology to etch one-dimensional or two-dimensional structure high-aspect-ratio slot in the silicon substrate of N-shaped (100), micro- to silicon substrate
Structure, that is, grating substrate carries out surface modification treatment, and 1 surface of grating substrate and inner wall surface all obtain layer of silicon dioxide film
2, then infiltrated, infiltrating material is attached to grating substrate inner wall surface and forms soakage layer 4.Infiltrating material is that X-ray absorbs by force
Heavy metallic salt, it is preferably bismuth salt, lead salt or gold salt that X-ray, which absorbs by force heavy metallic salt,.Metal 3 is filled into high-aspect-ratio slot again,
The X-ray that grating substrate 1 immerses fusing is absorbed by force heavy metal, preferably bismuth metal, gold or lead.This grating 600 has height
Depth-to-width ratio slot, and metal is filled in slot, which improve the bending property of silicon substrate grating.
Silicon substrate grating is without architectural limitation, is all suitable for the present invention, and the silicon substrate micro-structure of high-aspect-ratio is specially adapted to this hair
Bright curved raster.
Claims (10)
1. a kind of grating curvature device, which is characterized in that including bracket, the clamping device for clamping grating, the clamping machine
Structure is fixed on bracket by being bent regulating mechanism；The clamping device includes the clamping for being arranged in pairs and clamping grating edge
Part, two pairs of clamping pieces be oppositely arranged and the two to the center of grating active force with passing through one of raster center
On straight line, the bending regulating mechanism drives clamping piece to the curvature of the mobile adjustment grating of raster center.
2. grating curvature device according to claim 1, which is characterized in that the clamping piece is equipped with for clamping grating side
The card slot of edge；The card slot shape and grating edge shape cooperate.
3. grating curvature device according to claim 1, which is characterized in that the bending regulating mechanism includes top-pressure part,
The top-pressure part is arranged at clamping piece rear portion；
The top-pressure part and clamping piece are separately positioned, and the top-pressure part presses against the clamping piece rear portion；
Either the top-pressure part is fixed together with clamping piece integral structure or the two；
Or the top-pressure part and clamping piece are rotatablely connected.
4. grating curvature device according to claim 3, which is characterized in that the bracket is equipped with across hole, the top
Casting die passes through in hole described in being installed on, and locking piece is equipped between the top-pressure part and bracket, and the top-pressure part after movement is locked
In passing through hole；
Or the bracket is equipped with screw hole, the top-pressure part is screwed onto the screw hole；
Or the top-pressure part is cam, and is rotatably connected on bracket.
5. grating curvature device according to claim 1, which is characterized in that the bending regulating mechanism includes top-pressure part,
The top-pressure part side by side or is set in together with clamping piece, and the top-pressure part is fixed on bracket, the top-pressure part and clamping piece
Between be equipped with locating piece for locking mutual alignment between the two.
6. grating curvature device according to claim 5, which is characterized in that the locating piece is to be fixed on top-pressure part front end
Or the band-type brake of rear end, the band-type brake are held clamping piece tightly and are locked, the band-type brake opens so that clamping piece phase under external force
Grating curvature degree is adjusted for top-pressure part movement.
7. grating curvature device according to claim 1, which is characterized in that be equipped in at least side of bending regulating mechanism
Guiding mechanism.
8. grating curvature device according to claim 7, which is characterized in that the guiding mechanism includes guide part, guide rail,
The guide rail is fixed on bracket and parallel with the top-pressure part direction of motion, and the guide part is fixed on clamping piece side, and cooperates
It is moved on guide rail.
9. a kind of curved raster system, which is characterized in that the grating curvature device including grating and claim 1-8, the light
Clamping piece in grid bending apparatus is clamped in grating two sides relatively, and drives clamping piece to raster center by bending regulating mechanism
The curvature of mobile adjustment grating.
10. curved raster system according to claim 9, which is characterized in that the grating is silicon-base plane grating, described
It is etched with the slot of high-aspect-ratio on the silicon-based substrate of grating, is filled with metal or alloy in the slot；
Or the grating is the plane grating that sheet metal is substrate.
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