CN107419240A - A kind of graphite boat fast fixture - Google Patents
A kind of graphite boat fast fixture Download PDFInfo
- Publication number
- CN107419240A CN107419240A CN201710689755.0A CN201710689755A CN107419240A CN 107419240 A CN107419240 A CN 107419240A CN 201710689755 A CN201710689755 A CN 201710689755A CN 107419240 A CN107419240 A CN 107419240A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- riser
- fixed
- fast fixture
- sliding floor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of graphite boat fast fixture, including：Fixed mechanism；And at least one set of clamp system being oppositely arranged with fixed mechanism, wherein, clamp system is mutually separated with a certain distance with fixed mechanism so as to form the clamping channel being located between the two, clamp system includes fixed bottom plate and slide assemblies, and the slide assemblies can be relatively fixed mechanism on bottom plate and reciprocatingly slide so as to which the graphite boat in the clamping channel selectively be clamped.According to the present invention, it can be fixed to graphite boat and accurately clamp, and prevent from being forbidden silicon chip and graphite boat are caused to damage due to positioning during being put into silicon chip and taking out silicon chip.
Description
Technical field
The present invention relates to solar silicon wafers manufacturing field, more particularly to a kind of graphite boat fast fixture.
Background technology
Graphite boat is graphite jig, is a kind of carrier, and it we can be needed to position or the raw material shaped and zero
Part is put in graphite jig high temperature sinter molding together.
There is one of program to be called PECVD plated films in the production and processing of solar silicon wafers, it is the sun for improving silicon chip that it, which is acted on,
Energy conversion ratio, needs to use graphite boat, its operation principle is in this process：Uncoated silicon chip is placed on to the card of graphite boat piece
On point, the silicon chip of fixed qty can be put on each boat piece, then graphite boat is placed on to the wall of PECVD vacuum coating equipments
It is interior, electric discharge plated film is carried out using pecvd process, after plated film terminates, graphite boat is taken out, silicon chip is unloaded from graphite boat and taken off.
In the prior art, above-mentioned steps use automated job, it is therefore desirable to graphite boat are fixed and accurately
Clamp, prevent from being forbidden silicon chip and graphite boat are caused to damage due to positioning during being put into silicon chip and taking out silicon chip.
The content of the invention
For the shortcomings of the prior art, it is an object of the invention to provide a kind of graphite boat Quick-clamped dress
Put, it can be fixed to graphite boat and accurately clamp, and prevent during being put into silicon chip and taking out silicon chip due to fixed
Position is inaccurate to cause to damage to silicon chip and graphite boat.
In order to realize above-mentioned purpose and other advantages according to the present invention, there is provided a kind of graphite boat fast fixture,
Including：
Fixed mechanism；And
At least one set of clamp system being oppositely arranged with fixed mechanism,
Wherein, clamp system is mutually separated with a certain distance with fixed mechanism and led to so as to form the clamping being located between the two
Road, clamp system include fixed bottom plate and slide assemblies, and it is reciprocal that the slide assemblies can be relatively fixed mechanism on bottom plate
Slide so as to which the graphite boat in the clamping channel selectively be clamped.
Preferably, the slide assemblies include：
Drive component；
Sliding floor；And
Clamp riser, its on the sliding floor and with sliding floor Joint,
Wherein, sliding floor can be under the driving of drive component closer or far from fixed mechanism.
Preferably, the side that mechanism is relatively fixed on clamping riser is provided with several thimbles, and thimble is vertical perpendicular to clamping
The surface of plate simultaneously can be reciprocating with respect to riser is clamped.
Preferably, it is arranged with returning spring between thimble and clamping riser, on thimble.
Preferably, thimble is sheathed on thimble in the T-shaped structure that end diameter is big, body diameter is small, returning spring
On body, and limited by the end of thimble and clamping riser.
Preferably, be provided with least one rail plate between sliding floor and bottom plate, the bearing of trend of rail plate with
The bearing of trend of the clamping channel is perpendicular, sliding floor can under the driving of drive component along rail plate closer or far from
Fixed mechanism.
Preferably, drive component includes：
Drive cylinder on bottom plate；And
The connecting plate of the clutch end Joint of one end and drive cylinder,
Wherein, the other end of connecting plate and sliding floor Joint.
Preferably, fixed mechanism includes：
At least two along column arranged in a straight line；And
Fixed board between adjacent two root posts,
Wherein, fixed board is parallel with clamping riser and is oppositely arranged to form the clamping channel, and fixed board is relative
The side for clamping riser is provided with some fixed columns.
Preferably, several the first lightening cores are offered on fixed board.
Preferably, clamp and at least a piece of ribs is connected between riser and sliding floor, clamp and offered on riser
Multiple second lightening cores.
Compared with prior art, its advantage is the present invention：
It can be fixed to graphite boat and accurately clamp, prevent be put into silicon chip and take out silicon chip during by
Forbidden silicon chip and graphite boat are caused to damage in positioning.
Brief description of the drawings
Fig. 1 is the stereogram according to graphite boat fast fixture of the present invention；
Fig. 2 is to be stood according to what graphite boat fast fixture of the present invention was engaged with the graphite boat being placed therein
Body figure.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings, foregoing end other objects of the invention, feature, side
Face and advantage will be apparent, to make those skilled in the art to implement according to this with reference to specification word.In the accompanying drawings,
For clarity, shape and size can be amplified, and will be indicated in all figures using identical reference identical
Or similar part.In the description, such as " front portion ", " rear portion ", " top ", " bottom ", " top " and " bottom " and its spread out
The relative terms of new word should be interpreted to refer to then as described in or such as the orientation shown in the accompanying drawing to come into question.This
A little relative terms are for convenience and are generally not intended as the specific orientation of needs.It is related to the art of attachment, connection etc.
Language (for example, " connection " and " attachment ") refers to the pass that these structures are fixed or are attached directly or indirectly to one another by intermediate structure
System and movable or rigidly attached or relation, unless otherwise clearly stating.
Reference picture 1, graphite boat fast fixture include：Clamp system 1 and fixed mechanism 2, wherein, clamp system 1 is set
There is at least one set, every group of clamp system 1 is oppositely arranged with fixed mechanism 2, and clamp system 1 is separated with necessarily with the phase of fixed mechanism 2
Distance be located at clamping channel between the two so as to form, clamp system 1 includes fixed bottom plate 11 and slide assemblies, institute
State slide assemblies can be relatively fixed on bottom plate 11 mechanism 2 reciprocatingly slide so as to by the clamping channel graphite boat selectivity
Clamp.In a preferred embodiment, clamp system 1 is provided with two groups, is respectively arranged on the front and rear sides of fixed mechanism 2, and close
It is symmetrical arranged in fixed mechanism 2.
Reference picture 1 and Fig. 2, the slide assemblies include：
Drive component 111；
Sliding floor 12；And
Clamp riser 121, its on the sliding floor 12 and with the Joint of sliding floor 12,
Wherein, sliding floor 12 can be under the driving of drive component 111 closer or far from fixed mechanism 2, so as to drive cunning
Clamping riser 121 on dynamic bottom plate 12 optionally clamps the graphite boat 2 in clamping channel.
Further, the side that mechanism 2 is relatively fixed on clamping riser 121 is provided with several thimbles 122, and thimble 122 hangs down
Directly in the surface for clamping riser 121 and can relative clamping riser 121 it is reciprocating.
Partial enlarged drawing A in reference picture 1 at a, it is arranged between thimble 122 and clamping riser 121, on thimble 122
Returning spring 1221.In one embodiment, thimble 122 replys bullet in the T-shaped structure that end diameter is big, body diameter is small
Spring 1221 is sheathed on the body of thimble 122, and is limited by the end of thimble and clamping riser 121.In preferable embodiment party
In formula, adjoint setting is some to thimble group so as to be formed two-by-two for thimble 122, so as to reduce the stress at single thimble 122
Concentrate, prevent the local deformation of graphite boat.
With continued reference to Fig. 1, at least one rail plate 112, rail plate 112 are provided between sliding floor 12 and bottom plate 11
Bearing of trend and the clamping channel bearing of trend it is perpendicular, sliding floor 12 can be in the driving lower edge of drive component 111
Rail plate 112 is closer or far from fixed mechanism 2.
Further, drive component 111 includes：
Drive cylinder 1111 on bottom plate 11；And
One end and the connecting plate 1113 of the Joint of clutch end 1112 of drive cylinder 1111,
Wherein, the other end of connecting plate 1113 and the Joint of sliding floor 12.In a preferred embodiment, connecting plate
1113 can adjust with one end of the Joint of sliding floor 12 with the degree that overlaps of sliding floor 12, can by adjusting the coincidence degree
Adjustment clamps the initial distance of riser 121 and fixed mechanism 2, to adapt to various sizes of graphite boat 2.
With continued reference to Fig. 1, fixed mechanism 2 includes：
At least two along column 21 arranged in a straight line；And
Fixed board 22 between adjacent two root posts 21,
Wherein, fixed board 22 is parallel with clamping riser 121 and is oppositely arranged to form the clamping channel, fixed board
The 22 relative sides for clamping riser 121 are provided with some fixed columns 221.
Further, several first lightening cores 222 are offered on fixed board 22.
Further, clamp and at least a piece of ribs 1212 is connected between riser 121 and sliding floor 12, clamp riser
Multiple second lightening cores 1211 are offered on 121.
Number of devices and treatment scale described herein are the explanations for simplifying the present invention.To the present invention application,
Modifications and variations will be readily apparent to persons skilled in the art.
Although embodiment of the present invention is disclosed as above, it is not limited in listed fortune in specification and embodiment
With it can be applied to various suitable the field of the invention completely, can be easily real for those skilled in the art
Now other modification, therefore under the universal limited without departing substantially from claim and equivalency range, the present invention is not limited to
Specific details and shown here as the legend with description.
Claims (10)
- A kind of 1. graphite boat fast fixture, it is characterised in that including：Fixed mechanism (2)；AndAt least one set of clamp system (1) being oppositely arranged with fixed mechanism (2),Wherein, clamp system (1) is mutually separated with a certain distance with fixed mechanism (2) and led to so as to form the clamping being located between the two Road, clamp system (1) include fixed bottom plate (11) and slide assemblies, and the slide assemblies can be relatively solid on bottom plate (11) Determine mechanism (2) to reciprocatingly slide so as to which the graphite boat in the clamping channel selectively be clamped.
- 2. graphite boat fast fixture as claimed in claim 1, it is characterised in that the slide assemblies include：Drive component (111)；Sliding floor (12)；AndClamp riser (121), its on the sliding floor (12) and with sliding floor (12) Joint,Wherein, sliding floor (12) can be under the driving of drive component (111) closer or far from fixed mechanism (2).
- 3. graphite boat fast fixture as claimed in claim 2, it is characterised in that clamp and be relatively fixed on riser (121) The side of mechanism (2) is provided with several thimbles (122), and thimble (122) is perpendicular to the surface for clamping riser (121) and relative can press from both sides Tight riser (121) is reciprocating.
- 4. graphite boat fast fixture as claimed in claim 3, it is characterised in that thimble (122) is with clamping riser (121) Between, on thimble (122) be arranged with returning spring (1221).
- 5. graphite boat fast fixture as claimed in claim 4, it is characterised in that thimble (122) in end diameter it is big, this The small T-shaped structure of body diameter, returning spring (1221) are sheathed on the body of thimble (122), and by the end of thimble and folder Tight riser (121) is limited.
- 6. graphite boat fast fixture as claimed in claim 2, it is characterised in that sliding floor (12) and bottom plate (11) it Between be provided with least one rail plate (112), the bearing of trend of rail plate (112) and the bearing of trend phase of the clamping channel Vertically, sliding floor (12) can under the driving of drive component (111) along rail plate (112) closer or far from fixed mechanism (2)。
- 7. graphite boat fast fixture as claimed in claim 2, it is characterised in that drive component (111) includes：Drive cylinder (1111) on bottom plate (11)；AndOne end and the connecting plate (1113) of clutch end (1112) Joint of drive cylinder (1111),Wherein, the other end of connecting plate (1113) and sliding floor (12) Joint.
- 8. graphite boat fast fixture as claimed in claim 2, it is characterised in that fixed mechanism (2) includes：At least two along column (21) arranged in a straight line；AndFixed board (22) between adjacent two root posts (21),Wherein, fixed board (22) is parallel with clamping riser (121) and is oppositely arranged to form the clamping channel, fixed board (22) the relative side for clamping riser (121) is provided with some fixed columns (221).
- 9. graphite boat fast fixture as claimed in claim 8, it is characterised in that offered on fixed board (22) some Individual first lightening core (222).
- 10. graphite boat fast fixture as claimed in claim 2, it is characterised in that clamp riser (121) and sliding floor (12) at least a piece of ribs (1212) is connected between, clamps and offers multiple second lightening cores (1211) on riser (121).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710689755.0A CN107419240A (en) | 2017-08-14 | 2017-08-14 | A kind of graphite boat fast fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710689755.0A CN107419240A (en) | 2017-08-14 | 2017-08-14 | A kind of graphite boat fast fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107419240A true CN107419240A (en) | 2017-12-01 |
Family
ID=60437917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710689755.0A Pending CN107419240A (en) | 2017-08-14 | 2017-08-14 | A kind of graphite boat fast fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107419240A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107993970A (en) * | 2017-12-29 | 2018-05-04 | 无锡市江松科技有限公司 | Silicon chip transport system |
| CN108004524A (en) * | 2018-01-15 | 2018-05-08 | 江苏微导纳米装备科技有限公司 | A kind of plated film carrier |
| CN115284412A (en) * | 2022-07-25 | 2022-11-04 | 西安鑫垚陶瓷复合材料股份有限公司 | Device and method for calibrating ceramic matrix composite workpiece based on RMI method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534564A (en) * | 2012-02-24 | 2012-07-04 | 湖南红太阳光电科技有限公司 | Graphite boat with electrode holes formed on double sides for PECVD (Plasma Enhanced Chemical Vapor Deposition) |
| CN202473887U (en) * | 2011-12-27 | 2012-10-03 | 江苏综艺光伏有限公司 | Soft surface supporting thimble |
| CN205011836U (en) * | 2015-08-12 | 2016-02-03 | 深圳丰盛装备股份有限公司 | Graphite boat positioner |
| CN205194678U (en) * | 2015-11-13 | 2016-04-27 | 深圳市捷佳伟创新能源装备股份有限公司 | Graphite boat positioning and clamping device |
-
2017
- 2017-08-14 CN CN201710689755.0A patent/CN107419240A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202473887U (en) * | 2011-12-27 | 2012-10-03 | 江苏综艺光伏有限公司 | Soft surface supporting thimble |
| CN102534564A (en) * | 2012-02-24 | 2012-07-04 | 湖南红太阳光电科技有限公司 | Graphite boat with electrode holes formed on double sides for PECVD (Plasma Enhanced Chemical Vapor Deposition) |
| CN205011836U (en) * | 2015-08-12 | 2016-02-03 | 深圳丰盛装备股份有限公司 | Graphite boat positioner |
| CN205194678U (en) * | 2015-11-13 | 2016-04-27 | 深圳市捷佳伟创新能源装备股份有限公司 | Graphite boat positioning and clamping device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107993970A (en) * | 2017-12-29 | 2018-05-04 | 无锡市江松科技有限公司 | Silicon chip transport system |
| CN107993970B (en) * | 2017-12-29 | 2024-07-19 | 无锡江松科技股份有限公司 | Silicon wafer conveying system |
| CN108004524A (en) * | 2018-01-15 | 2018-05-08 | 江苏微导纳米装备科技有限公司 | A kind of plated film carrier |
| CN115284412A (en) * | 2022-07-25 | 2022-11-04 | 西安鑫垚陶瓷复合材料股份有限公司 | Device and method for calibrating ceramic matrix composite workpiece based on RMI method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171201 |