CN109596576A - Nanometer light field spin-orbit interaction measuring system and method - Google Patents
Nanometer light field spin-orbit interaction measuring system and method Download PDFInfo
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- CN109596576A CN109596576A CN201710944829.0A CN201710944829A CN109596576A CN 109596576 A CN109596576 A CN 109596576A CN 201710944829 A CN201710944829 A CN 201710944829A CN 109596576 A CN109596576 A CN 109596576A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
Abstract
A kind of probe difference interference device, nanometer light field spin-orbit interaction measuring system and method that rotation property is differentiated.The probe difference interference device includes: spectral module, and single beam laser is divided into former measurement light and former reference light by the spectral module；Difference frequency generating means carry out frequency modulation(PFM) to original measurement light and former reference light, export the measurement light and reference light of preset frequency difference；Measurement light polarization control device is arranged in the transmission direction of measurement light；It focuses and exports illumination light on the outbound course for the reference light that measurement light polarization control device is arranged in scanning means；Illumination light excites sample to generate nanometer light field, and aperture type optical microscope for scanning near field device detects collection nanometer light field near field and exports sample message light；Reference light polarization compensation device is arranged in the transmission direction of reference light, and reference light is incident on reference light polarization compensation device output polarization compensation light；Sample message light and polarization compensation optical transport to coupling device, which interfere, generates difference interference light.
Description
Technical field
The present invention relates to nanocomposite optical and nanophotonics fields of measurement more particularly to a kind of probe heterodynes that rotation property is differentiated
Interference device, nanometer light field spin-orbit interaction measurement method and system.
Background technique
Light exists simultaneously two kinds of rotations around optical axis when propagating in medium, one is the chirality/rotations for being derived from photon
Property (chirality and helicity) in time spin rotation, it is this based on photon polarization rotation have spin angular motion
It measures (spin angular momentum).Another kind is derived from the rotation of luminous intensity and phase in spatial distribution, this to be based on
The rotation of light spatial distribution has orbital angular momentum (orbit angular momentum).When photon or light are in non-homogeneous optics
Propagation or when refraction or reflection occur for optical surface, can be mutual between the spin angular momentaum and orbital angular momentum of photon
Coupling and conversion, generate spin of photon-rail interaction.
Spin of photon-rail effect in conventional geometric optical device is very faint to be difficult to observe.And in nanocomposite optical
Super structure surface (Metasurface) device can be used as a kind of effective function element platform, spin of photon-track can be enhanced
Interaction, to realize observation.It, can using the optical microscope for scanning near field based on probe difference interference technology in traditional technology
To realize the near field measurement of phase-resolved super-diffraction credit resolution, but it is directly realized by the near field measurement of rotation property resolution simultaneously very
Difficulty, therefore can not the measuring study of nanometer light field spin-orbit interaction directly be carried out near field.
Summary of the invention
Based on this, it is necessary to which in view of the above technical problems, providing one kind can simply directly realize on meso-scale
Near field rotation property and phase-resolved probe difference interference device, nanometer light field spin-orbit interaction measuring system and method.
The present invention provides a kind of probe difference interference device that rotation property is differentiated, comprising:
Spectral module, single beam laser are divided into former measurement light and former reference light by the spectral module；
Difference frequency generating means are arranged in the transmission direction of the former measurement light and former reference light, to original measurement light and original
Reference light carries out frequency modulation(PFM), output measurement light and reference light, and the measurement light and the reference light is made to generate preset frequency
Difference；
Light polarization control device is measured, is arranged in the transmission direction of the measurement light, the measurement light is incident on described
The polarization state of the measurement light is adjusted after measurement light polarization control device；
Scanning means is focused, is arranged on the outbound course of the reference light of the measurement light polarization control device, to process
Measurement light after the measurement light polarization control device is focused output illumination light, and finely tunes the illumination light relative to sample
Excitation position；
Aperture type optical microscope for scanning near field device, the illumination light excites the sample to generate nanometer light field, described
Aperture type optical microscope for scanning near field device collects the nanometer light field near field detection and exports sample message light；
Reference light polarization compensation device, is arranged in the transmission direction of the reference light, and the reference light is incident on described
Polarization compensation light is exported after reference light polarization compensation device；
Coupling device, the sample message light and the polarization compensation light are incident on the coupling device and interfere generation
Difference interference light.
In one embodiment, the difference frequency generating means include:
First frequency shifter and the first diaphragm, the direction of propagation along former measurement light are set gradually；
Second frequency shifter and the second diaphragm, the direction of propagation along former reference light are set gradually；
First frequency shifter and second frequency shifter are acousto-optic frequency shifters or acousto-optic modulator.
In one embodiment, the measurement light polarization control device includes the polarizer, quarter-wave plate or spatial light
Modulator, the direction of propagation along the measurement light are set gradually.
In one embodiment, the focusing scanning means includes:
Concentrating element, the measurement light are incident on the concentrating element output after the measurement light polarization control device
The illumination light of weak focus；
Scanning element, the scanning element finely tune excitation position of the illumination light relative to sample of the weak focus.
In one embodiment, the aperture type optical microscope for scanning near field device includes:
Scan table, for placing sample, the scan table center offers the light hole across the scan table；
Probe is oppositely arranged with the sample；
Optical fiber probe links with the probe and is arranged, and connect with the coupling device, the needle point of the optical fiber probe
Near field detects the nanometer light field of the sample and transmits the sample message light to the coupling by the optical fiber of the optical fiber probe
It attaches together and sets；
Optical microscope for scanning near field controller is connect with the probe and the scan table, is used for synchronously control institute
It states probe and the scan table realizes micron order and nano-precision three-D displacement；
Videomicroscopy and CCD camera, the sample that the videomicroscopy is carried with the scan table are oppositely arranged, institute
It states CCD camera and is fixed on the videomicroscopy, for aid imaging and feed back the phase of the optical fiber probe with the sample
To position.
In one embodiment, the optical fiber probe be not the bare fibre probe of plated film or the aperture probes of metal-coated membrane or
For the functional probe of needle point adhesiving metal nanoparticle or the functional probe of etching helix chirality nanostructure.
In one embodiment, the reference light polarization compensation device includes:
Electronic half-wave plate and electronic quarter-wave plate, the electronic half-wave plate and the quarter-wave plate are for automatically controlled
With the polarization state for compensating the reference light, the direction of propagation along the reference light is set gradually；
Optical fiber polarization controller is connect with the coupling device, and the optical fiber polarization controller adjusts the optical fiber polarisation
Polarization state in the optical fiber of controller simultaneously transmits the polarization compensation light to the coupling device；
Fiber optic collimator coupler, the fiber optic collimator coupler is placed in the electronic quarter-wave plate and the optical fiber is inclined
Between vibration controller.
In one embodiment, the fiber optic collimator coupler is low NA objective or gradual index lens, is used
In the optical fiber that space optical coupling is entered to the optical fiber polarization controller.
In one embodiment, the coupling device includes the fiber coupler of non-polarization-maintaining.
In one embodiment, the probe difference interference device further include:
In one embodiment, the spectral module includes polarizing beam splitter and reflecting mirror, and the reflecting mirror is arranged in institute
It states in the light exit direction of polarizing beam splitter.
The present invention also provides a kind of nanometer of light field spin-orbit interaction measurement methods, for surveying on meso-scale
Measure nanometer light field spin-orbit interaction, comprising:
Difference interference light is generated using rotation property resolved detection method by reference to light polarization compensation device and coupling device
And it obtains the rotation of selection or rotation property is differentiated；
Using probe difference interference method, super optical diffraction limit imaging and phase-resolved performance are obtained.
In one embodiment, the rotation property resolved detection method includes:
Circular polarization is obtained using cross-polarization scaling method and compensates light, the circular polarization compensation light and sample message light are in institute
It states to interfere in coupling device and generates the difference interference light；
The rotation that the circular polarization compensation light is controlled and switched by adjusting reference light polarization compensation device, is realized to described
The rotation resolved detection of the nanometer light field of sample.
In one embodiment, the cross-polarization scaling method includes:
It is incident to the non-structural region of sample using the illumination light of standard left or right rotation circular polarization, adjusts the reference light
Polarization compensation device makes the difference interference light of the coupling device output reach delustring state, inclined to obtain dextrorotation or left-handed circle
Vibration compensation light.
In one embodiment, the probe difference interference method includes:
The near field high spatial frequency information of the nanometer light field of optical fiber probe acquisition sample is simultaneously transmitted to far field, to realize ultraphotic
Learn diffraction limit measurement；
By difference frequency generating device, the reference light and measurement light of generation have preset frequency for former reference light and former measurement light
Difference；
The relative phase of the nanometer light field to the optical fiber probe position can be realized to the difference interference optical modulator
Measurement.
The present invention also provides a kind of nanometer of light field spin-orbit interaction measuring systems, comprising:
Generating device of laser, for exporting former measurement light and former reference light；
Probe difference interference device, be arranged on the generating device of laser light output direction, using probe above-mentioned outside
Poor interference device, for generating difference interference light；
Data receiver processing unit is arranged on the outbound course of the difference interference light, dry for receiving the heterodyne
It relates to light and analyzes difference interference information.
In one embodiment, the generating device of laser includes:
Laser, the good single longitudinal mode laser of the laser output coherence；
Shaping unit, the single longitudinal mode laser export the laser of single longitudinal mode and single transverse mode by the shaping unit.
In one embodiment, the shaping unit includes:
Device, shaping device, collimating element, filtering device are expanded, it is described to expand device, the shaping device, the standard
Straight device and the filtering device are set gradually along the light output transmission direction of the laser.
In one embodiment, the data receiver processing unit includes:
Photodetector, the difference interference light export ac signal after being incident on the photodetector；
Lock-in amplifier is electrically connected with the photodetector；
Reference signal frequency mixing module is electrically connected with the lock-in amplifier, and the reference signal frequency mixing module is the lock
Phase amplifier provides reference frequency signal, and the lock-in amplifier carries out locking phase and demodulation output locking phase to the ac signal
Demodulated signal；
Data acquisition module is electrically connected with the lock-in amplifier, for acquiring the demodulation of phase locking signal.
In one embodiment, it the system also includes controlling terminal is calculated, is done respectively with the aperture type probe heterodyne
Relate to optical microscope for scanning near field device and data receiver processing unit electrical connection.
Probe difference interference device, nanometer light field spin-orbit interaction measurement method and the system that rotation property is differentiated, are adopted
With probe difference interference device, cross-polarization scaling method, rotation property resolved detection method and probe are used in method
Difference interference method, the rotation for realizing super-diffraction diffraction limit is differentiated and phase-resolved near field measurement.Super-diffraction
Learning limit measurement may be implemented the characterization under meso-scale, and rotation property resolved measurement may be implemented to nanometer light field spin angular momentaum
Characterization, the characterization to nanometer light field orbital angular momentum may be implemented in phase-resolved measurement, so the present invention can finally be situated between
It sees scale and realizes that near field directly measures spin of photon-rail interaction in sample.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the heterodyne probe interference device that the rotation of one embodiment is differentiated；
Fig. 2 is the structure chart of the difference frequency generating means for the heterodyne probe interference device that the rotation of another embodiment is differentiated；
Fig. 3 is the structural schematic diagram for the heterodyne probe interference device that the rotation of one embodiment is differentiated；
Fig. 4 is the structural schematic diagram of the nanometer light field spin-orbit interaction measuring system of one embodiment；
Fig. 5 is the structural schematic diagram of the nanometer light field spin-orbit interaction measuring system of another embodiment；
Fig. 6 is that sample described in one embodiment is surface cell structure chart in super structure surface device；
Fig. 7 is the electromicroscopic photograph that sample described in one embodiment is super structure surface device；
Fig. 8 is the practical structures schematic diagram of the nanometer light field spin-orbit interaction measuring system of one embodiment；
Fig. 9 is the rotation resolved detection schematic diagram of one embodiment；
Figure 10 is the measurement result of the nanometer light field spin-orbit interaction measuring system of one embodiment；
Figure 11 is the three-dimensional measuring result of the nanometer light field spin-orbit interaction measuring system of one embodiment.
Main element symbol description
Spin-orbit interaction measuring system 10
Generating device of laser 100
Laser 110
Shaping unit 120
Probe difference interference device 200
Spectral module 210
Polarizing beam splitter and reflecting mirror 211
Difference frequency generating means 220
First frequency shifter 221
First diaphragm 222
Second frequency shifter 223
Second diaphragm 224
Measure light polarization control device 230
The polarizer 231
Quarter-wave plate or spatial light modulator 232
Focus scanning means 240
Concentrating element 241
Scanning element 242
Aperture type optical microscope for scanning near field device 250
Scan table 251
Probe 252
Optical fiber probe 253
Optical microscope for scanning near field controller 254
Videomicroscopy 255
CCD camera reference light polarization compensation device 256
Reference light polarization compensation device 260
Electronic half-wave plate 261
Electronic quarter-wave plate 262
Fiber optic collimator coupler 263
Optical fiber polarization controller 264
Coupling device 270
The fiber coupler 271 of non-polarization-maintaining
Data receiver processing unit 300
Photodetector 310
Lock-in amplifier 320
Reference signal frequency mixing module 330
Data acquisition module 340
Calculate controlling terminal 400
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, right with reference to the accompanying drawings and embodiments
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
It referring to Figure 1, include: light splitting the present embodiment provides a kind of probe difference interference device 200 that the rotation property is differentiated
Module 210, measurement light polarization control device 230, focuses scanning means 240, aperture type scanning near-field at difference frequency generating means 220
Optical microphotograph lens device 250, reference light polarization compensation device 260 and coupling device 270.210 single beam laser of spectral module passes through
The spectral module 210 divides for original measurement light and former reference light.220 pairs of the difference frequency generating means former measurement light and former reference light
Frequency modulation(PFM) is carried out, the measurement light and reference light of preset frequency difference are exported.Preset frequency difference can be Δ ω.The measurement light polarization
Control device is arranged in the transmission direction of the measurement light.The focusing scanning means 240 is arranged in the measurement light polarization
On the outbound course of the reference light of control device 230.The measurement light is incident on right after the measurement light polarization control device 230
The polarization state of the measurement light is adjusted, and focuses output illumination light using the focusing scanning means 240.The illumination light
Sample is excited to generate nanometer light field, the aperture type optical microscope for scanning near field device 250 is detected near field and received described in collection
Rice light field simultaneously exports sample message light.The reference light polarization compensation device 260 is arranged in the transmission direction of the reference light.
The reference light is incident on the reference light polarization compensation device 260 and exports polarization compensation light.The sample message light and described
Polarization compensation optical transport to the coupling device 270, which interferes, generates difference interference light.
There is probe difference interference device provided by the invention rotation property to differentiate, and use cross-polarization scaling method, rotation property
Resolved detection method and probe difference interference method.Realize super-diffraction diffraction limit rotation differentiate and it is phase-resolved
Near field measurement.The characterization under meso-scale may be implemented in super-diffraction limit measurement, and rotation property resolved measurement may be implemented
To the characterization of nanometer light field spin angular momentaum, the characterization to nanometer light field orbital angular momentum, institute is may be implemented in phase-resolved measurement
Finally it can realize that near field directly measures spin of photon-rail interaction in sample in meso-scale with the present invention.
In one embodiment, the spectral module 210 includes polarizing beam splitter and reflecting mirror 211, and the reflecting mirror is set
It sets in the light exit direction of the polarizing beam splitter.
Fig. 2 is referred to, in one embodiment, the difference frequency generating means 220 include: the first frequency shifter 221 and first
Diaphragm 222, the direction of propagation along the measurement light are set gradually；Second frequency shifter 223 and the second diaphragm 224, along the reference
The direction of propagation of light is set gradually.First frequency shifter 221 and second frequency shifter 223 are acousto-optic frequency shifters or acousto-optic tune
Device processed.
Fig. 3 is referred to, in one embodiment, the measurement light polarization control device 230 includes 231, four points of the polarizer
One of wave plate or spatial light modulator 232, along it is described measurement light the direction of propagation set gradually.
Wherein, in one embodiment, stating and focusing scanning means 240 includes concentrating element 241 and scanning element 242.It surveys
Measure light after 241 weak focus of concentrating element, then via the scanning element 242 illuminate sample and carry out focus scanning and
Sample alignment.
The concentrating element 241 can be low NA objective or long-focus lens, being capable of answering in approximate normal incidence
With the lower weak focus realized to incident light and maintain its polarization state constant.The scanning element 242 includes reflecting mirror and mechanical control
Unit processed.The scanning element 242 can be integrated form, be also possible to separate type.The scanning element 242 is integrated form
When, it can be the scanning galvanometer for integrating the reflecting mirror and the Mechanical course.The scanning element 242 is separation
When formula, the mechanical control unit can be separated with the reflecting mirror.Can be used by concentrating element 241 be loaded in two dimension it is electronic
Using the form of isolated reflecting mirror on displacement platform.The focusing scanning means 240 can be realized in hundred microns of range abilities
The scanning of the relatively described sample plane of focus illumination focus and light field plane adjusts, convenient for selecting the sample illumination region or receiving
Rice Optical field measurement region.
Wherein, in one embodiment, the aperture type optical microscope for scanning near field device 250 include scan table 251,
Probe 252, optical fiber probe 253, optical microscope for scanning near field controller 254, videomicroscopy 255 and CCD camera
256.The scan table 251 offers the light hole across the scan table 251, for placing sample.The probe 252 with
The sample is oppositely arranged.The optical fiber probe 253 connects with the probe 252 linkage setting and with the coupling device 270
It connects.The probe 252 controls the optical fiber probe 253 and is suspended in several nanometers to tens nanometers positions above the sample when measurement
Place is set, the nanometer light field that near field is detected is transmitted to the coupling device 270 via the conduction optical fiber of the optical fiber probe 253.
The optical microscope for scanning near field controller 254 is electrically connected with the scan table 251 and the probe 252, for controlling
The scan table 251 and the probe 252 are mobile.The sample phase that the videomicroscopy 255 is carried with the scan table 251
To setting.The CCD camera 256 is fixed on the videomicroscopy 255.Videomicroscopy 255 and CCD camera
256 for observing in real time and monitoring measurement visual field.
The scan table 251 can be three dimensional micron grade scan table based on stepper motor, be also possible to be made pottery based on piezoelectricity
The three-dimensional nanometer-grade scan table of porcelain.251 center of scan table needs light passing, realizes the transmission illumination modes (optical fiber probe
253 are used as near-field nanometer light source) or transmission collection mode (optical fiber probe 253 is used as near-field probe), to realize to institute
State the three-dimensional scanning measurement of the nanometer light field of sample.The probe 252 can be the probe of optical microscope for scanning near field.
The probe 252 can be synchronized with the optical microscope for scanning near field controller 254, to realize accurate control needle
The head scanning function of point-sample interval and three-dimensional manometer class precision.Shearing force mode or light may be implemented in the probe 252
The nanoscale tip-sample spacing of rapping formula controls.The probe 252 can load a plurality of types of optical fiber probes 253.Institute
Stating optical fiber probe 253 can be the functional probe that coated optical fibre aperture probes, bare fibre probe, nano-antenna are modified.The light
Fine probe 253 be not the bare fibre probe of plated film or the aperture probes of metal-coated membrane or be needle point adhesiving metal nanoparticle function
Energy probe or the functional probe for etching helix chirality nanostructure.The needle point scale of the optical fiber probe 243 is 1/10th
Wavelength magnitude.
Wherein, in one embodiment, the reference light polarization compensation device 260 includes electronic half-wave plate 261, electronic four
/ mono- wave plate 262, fiber optic collimator/coupler 263 and optical fiber polarization controller 264, along the reference light transmission direction according to
Secondary setting.The electronic half-wave plate 261 and the electronic quarter-wave plate 262 can polarization compensation light described in accurate electrical adjustable
Polarization state.The optical fiber polarization controller 264 generates birefringent, regulation reference path conduction light by applying stress to optical fiber
The polarization state of light field mode in fibre.The optical fiber polarization controller 264 is MANUAL CONTROL mode, can be in the probe difference interference
The static quickly adjustment polarization state before stablizing of device 200.Space optical coupling is entered the optical fiber by the fiber optic collimator coupler 263
Polarization Controller 264.In one embodiment, the fiber optic collimator coupler 263 can be low NA objective or gradual change
Index lens, for space optical coupling to be entered to the optical fiber of the optical fiber polarization controller.
The electronic half-wave plate 261 and the electronic quarter-wave plate 262 are by hollow rotating motor driven controllable rotating
Angle compensates the conduction optical fiber of the probe difference interference device 200 by the polarization state of the reference light in fine tuning spatial light
The variation of middle mode polarization state.In measurement process, the electronic half-wave plate 261 and the electronic quarter-wave plate 262 can be with
According to the contrast of interference signal by feedback mechanism real-time perfoming rotation adjustment and the variation of compensating polarizing state, interference is remained
Signal is in optimum contrast.
Wherein, in one embodiment, the coupling device 270 includes the fiber coupler 271 of non-polarization-maintaining.Optical path
In the sample information light be overlapped production in the fiber coupler 271 of the non-polarization-maintaining with the polarization compensation light in reference path
Raw difference interference light.
The present invention also provides a kind of nanometer of light field spin-orbit interaction measurement methods, in meso-scale
It realizes to nanometer light field spin-orbit interaction, comprising:
Difference interference light is generated using rotation property resolved detection method by reference to light polarization compensation device and coupling device
And it obtains the rotation of selection or rotation property is differentiated；
Using probe difference interference method, super optical diffraction limit imaging and phase-resolved performance are obtained.
In one embodiment, the rotation property resolved detection method includes:
Circular polarization is obtained using cross-polarization scaling method and compensates light, the circular polarization compensation light and sample message light are in institute
It states to interfere in coupling device and generates the difference interference light；
The rotation that the circular polarization compensation light is controlled and switched by adjusting reference light polarization compensation device, is realized to described
The rotation resolved detection of the nanometer light field of sample.
In one embodiment, the cross-polarization scaling method includes:
It is incident to the non-structural region of sample using the illumination light of standard left or right rotation circular polarization, adjusts the reference light
Polarization compensation device makes the difference interference light of the coupling device output reach delustring state, inclined to obtain dextrorotation or left-handed circle
Vibration compensation light.
In one embodiment, the probe difference interference method includes:
The near field high spatial frequency information of the nanometer light field of optical fiber probe acquisition sample is simultaneously transmitted to far field, to realize ultraphotic
Learn diffraction limit measurement；
By difference frequency generating device, generating reference light and measurement light has preset frequency poor for former reference light and former measurement light；
The relative phase of the nanometer light field to the optical fiber probe position can be realized to the difference interference optical modulator
Measurement.
Fig. 4 is referred to, the embodiment of the present invention provides a kind of nanometer of light field spin-orbit interaction measuring system 10.Institute
Stating a nanometer light field spin-orbit interaction measuring system 10 includes: generating device of laser 100, probe difference interference device 200
With data receiving and processing device 300.The generating device of laser 100 is for exporting former measurement light and former reference light.The probe
Difference interference device 200 is arranged on 100 light output direction of generating device of laser.The probe difference interference device 200
Using probe difference interference device 200 above-mentioned.The probe difference interference device that the laser light incident is differentiated to the rotation property
200, difference interference light is generated for interfering.The difference interference light is arranged in the data receiver processing unit 300
On outbound course, for receiving and demodulating the difference interference light.
Fig. 5 is referred to, in one embodiment, the generating device of laser 100 includes laser 110, shaping unit
120.Laser 110 exports the good single longitudinal mode laser of coherence.Single longitudinal mode laser exports single longitudinal mode and list by shaping unit 120
Transverse mode laser.
In one embodiment, the laser 110 is frequency stabilization single longitudinal mode laser.The frequency stabilized carbon dioxide laser can be gas
Body or solid state laser.In one embodiment, the shaping unit 120 include: expand device, shaping device, collimating element,
Filtering device, device, the shaping device, the collimating element and the filtering device of expanding is along the laser 110
The transmission direction of output laser is set gradually.
In one embodiment, the data receiver processing unit 300 includes: photodetector 310, lock-in amplifier
320, reference signal frequency mixing module 330 and data acquisition module 340.The photodetector 310 can will come from the optical fiber
The faint optical signal of coupler 271 switchs to the ac signal and carries out preposition amplification.The photodetector 310 can be
Photomultiplier tube or avalanche diode.The lock-in amplifier 320 is electrically connected with the photodetector 310.The reference letter
Number frequency mixing module 330 is electrically connected with the lock-in amplifier 320.The reference signal frequency mixing module 330 is locking phase amplification
Device 320 is to provide reference frequency signal.The lock-in amplifier 320 carries out locking phase to the ac signal and demodulates and export
Demodulation of phase locking signal.The data acquisition module 340 is electrically connected with the lock-in amplifier 320, for acquiring the locking phase solution
Adjust signal.
In one embodiment, the nanometer light field spin-orbit interaction measuring system 10 can also include calculating
Controlling terminal 400.The calculating controlling terminal 400 respectively with the aperture type optical microscope for scanning near field device 250 and institute
State the electrical connection of data receiver processing unit 300.The calculating controlling terminal 400 can be controlled by the near-field optical microscope
Device 254 controls the inserting needle withdraw of the needle and the 3-D scanning that the probe 252 carries out the optical fiber probe 253.The data acquisition module
The demodulation of phase locking signal that block 340 acquires can handle the phase for obtaining spatial distribution, vibration by the calculating controlling terminal 400
The synchrodata of width and pattern.
In one embodiment, the sample can be super structure surface (Matesurface) device.The super structure surface device
Part is the circular polarization sensitive structure based on geometric phase.By designing the structural parameters of the super structure surface device, it can be made
Realize that light field spin-vortex is converted and then generates topological charge number under circularly polarized light illumination as 3 vortex light field.
The design of cellular construction in the super structure surface device is referring to Fig. 6.The cellular construction is using gold nano
The geometric format of stick pair.The geometric format can promote the fill factor of the cellular construction design, to increase super structure table
The scattering section of face device, the transfer efficiency for promoting the super structure surface device.By the unit each in super structure surface device
The deflection of structure is arranged according to following rule, and the vortex light that topological charge number is 3 can be generated under circularly polarized light illumination
?.
Wherein, cell orientation angle θ can individually regulate and control phase, (xi,yi) it is the centre coordinate of i-th of unit, and meetP is the pixel dimension of super structure surface device.Fig. 7 is to be added using electron beam lithography technique
The electromicroscopic photograph for the super structure surface device that work goes out.The size of the super structure surface device is 7 μm of 7 μ m.The upper left corner Fig. 5 illustration is
The processing structure of gold nanorods pair, length scales 100nm.
Fig. 8 is the rotation resolved detection schematic diagram of the spin-orbit interaction measuring system 10.In one embodiment
In, two kinds of light fields: the plane of Left-hand circular polarization are generated after irradiating the super structure surface device using the measurement light of Left-hand circular polarization
The dextrorotation vortex light that wave and topological charge number are 3.The left-hand polarization light and the dextrorotation vortex light again with the reference light of circular polarization
Difference interference is carried out, so the rotation by control reference light can be realized to the left-hand polarization light and the dextrorotation vortex light
Rotation property resolved detection.When the reference light is right-hand circular polarization light, dextrorotation reference light is orthogonal with the left-hand polarization light, can not
Generate difference interference；Dextrorotation reference light and the dextrorotation vortex light generate difference interference, and then can use the spin-orbit
Interaction measuring system measures the COMPLEX AMPLITUDE of near field right hand component, obtains 6 π that spin-vortex conversion generates at this time
Vortex phase distribution.When the reference light is Left-hand circular polarization light, left-handed reference light is orthogonal with the dextrorotation vortex light, can not
Generate difference interference；Left-handed reference light and the left-hand polarization light generate difference interference, and then can use the spin-orbit
Interaction measuring system 10 measures the COMPLEX AMPLITUDE of the left-handed component near field, obtains the identical plane wave front point of phase at this time
Cloth.
In one embodiment, the spin-orbit interaction measuring system 10 realizes the key of rotation property resolved detection
It is that circular polarization compensation light is generated using cross-polarization scaling method.The cross-polarization scaling method, based on coupling device 270
Difference interference luminous intensity adjusts the reference light polarization compensation device 260, and the mode of orthogonal delustring is used to keep reference light circle inclined
The light that shakes compensates light.The polarizer 231 and quarter-wave plate 232 in the measurement light polarization control device 230 are adjusted, is made described
Light is measured to reenter the non-structural region or transparent blank region for being incident upon sample, intense adjustment after left or right rotation circularly polarized light
Electronic half-wave plate 261 and electronic quarter-wave plate 262 in the reference light polarization compensation device 260, make the optical fiber coupling
The difference interference light of clutch 271 reaches delustring, then generates dextrorotation or Left-hand circular polarization compensation light.
Below by taking Fig. 9 as an example, illustrate the course of work of the spin-orbit interaction measuring system 10.The laser
Device 110 emits laser light incident to the shaping unit 120.The shaping unit 120 is described to being incident on after laser progress shaping
Polarizing beam splitter and reflecting mirror 211 are divided to for two beam laser of optical path and reference path.Optical path laser is successively incident on institute
State the first frequency shifter 221, first diaphragm 222, the polarizer 231, the quarter-wave plate 232.The polarizer
231 and the quarter-wave plate 232 according to applicable cases adjust measurement light polarization state, then pass through the concentrating element
It is again incident on the scanning element 242 after 241 progress weak focus, sample described in the light passing Aperture Illumination by the scan table 251
And carry out focus scanning and sample alignment.Here, the sample is super structure surface device.And the videomicroscopy 255 and institute
The observation in real time of CCD camera 256 and monitoring measurement visual field are stated, and observation data are transferred to the calculating controlling terminal 400.Institute
Stating computer controlling terminal 400 is computer.Computer assigns instruction control to the optical microscope for scanning near field controller 254
It is mobile to make the 252 three-dimensional manometer class precision of probe.As the probe 252 is mobile, 253 needle point of optical fiber probe is visited
The near-field nanometer light field of sample, the optical fiber transmission through the optical fiber probe 253 obtain sample message light.The optical fiber probe
253 have good circular symmetry for aperture type probe, therefore there is the circularly polarized light arrived near field measurement rotation property to keep energy
Power.Meanwhile reference path laser successively passes through second frequency shifter 223, second diaphragm 224, the electronic half-wave plate
261, the electronic quarter-wave plate 262, the fiber optic collimator/coupler 263 and the optical fiber polarization controller 264 obtain
Polarization compensation light.Using the cross-polarization scaling method, electronic half-wave plate 261 described in intense adjustment and described electronic four/
One wave plate 262 can obtain the circular polarization compensation light of left or right rotation, for realizing the rotation resolved detection near field.Finally, close
Field information light and the circular polarization compensation light of specific rotation property generate difference interference light in the fiber coupler 271.It is described outer
Poor interference light exports ac signal after being incident on the photodetector 310.The reference signal frequency mixing module 330 is described
Lock-in amplifier 320 provides reference frequency signal, and carrying out demodulation of phase locking to the ac signal is demodulation of phase locking signal.Institute
It states the acquisition demodulation of phase locking signal of data acquisition module 340 and the phase of near field three-dimensional spatial distribution is obtained by the computer 400 processing
Position, amplitude and pattern synchrodata.
As shown in Figure 10, spin-orbit interaction measuring system 10 proposed by the present invention can realize the resolution of rotation property and phase
The near field measurement that position is differentiated.Based on cross-polarization scaling method, even if the feelings that the transfer efficiency of the super structure surface device is very low
Under condition, the measurement result for obtaining high s/n ratio and contrast is remained to.Optical fiber probe carries out in the near field of the super structure surface device
Two-dimensional scanning measurement is compensated the rotation of light by circular polarization described in control reference path, can obtain nanometer light field point by point
The amplitude and phase near field distribution data of specific rotation property component, and then it is mutual to obtain spin of photon-track in super structure surface device
The distribution of geometric phase caused by acting on.
As shown in figure 11, it can realize that rotation property is differentiated using spin-orbit interaction measuring system 10 proposed by the present invention
With phase-resolved near field three-dimensional laminar analysis measurement.The optical fiber probe 253 and the sample are accurately controlled by nano-precision
The distance between, it can be achieved that along optical axis direction three-dimensional space section gauge function, in real time point by point obtain near-field nanometer light
The three-dimensional amplitude and phase distribution information of field, and then obtain spin of photon in super structure surface device-rail interaction simultaneously and produce
The rotationally-varying dynamic phasing distribution that raw geometric phase distribution and light propagation obtain.
The present invention is also suitble to measurement and characterizes the super structure surface device of other kinds of transmission-type.Such as it is directed to super structure surface texture
Device, the present invention can extend to the super structure surface texture of other all circular polarization sensitivities based on geometric phase modulation.Super structure
The design of surface texture device cell geometry may include nanometer rods, nanometer star, nanometer plate condensate etc..Device material can be with
Comprising metal materials such as gold, silver, aluminium, the dielectric material of the high index such as siliceous, titanium dioxide also can wrap.Device function can
To include vortex photogenerated and conversion, spin of photon-Hall effect device, holographic multiplexing etc..
The embodiments described above only express several embodiments of the present invention, with the description thereof is more specific and detailed, but
It cannot be understood as the limitations to patent of invention range.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention
Protect range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (19)
1. a kind of probe difference interference device that rotation property is differentiated characterized by comprising
Spectral module, single beam laser are divided into former measurement light and former reference light by the spectral module；
Difference frequency generating means are arranged in the transmission direction of the former measurement light and original reference light, to original measurement light and former reference
Light carries out frequency modulation(PFM), output measurement light and reference light, and keeps the measurement light and reference light generation preset frequency poor；
Light polarization control device is measured, is arranged in the transmission direction of the measurement light, the measurement light is incident on the measurement
The polarization state of the measurement light is adjusted after light polarization control device；
Scanning means is focused, is arranged on the outbound course of the reference light of the measurement light polarization control device, described in process
Measurement light after measurement light polarization control device is focused output illumination light, and finely tunes the illumination light swashing relative to sample
Send out position；
Aperture type optical microscope for scanning near field device, the illumination light excite the sample to generate nanometer light field, the aperture
Type optical microscope for scanning near field device collects the nanometer light field near field detection and exports sample message light；
Reference light polarization compensation device, is arranged in the transmission direction of the reference light, and the reference light is incident on the reference
Polarization compensation light is exported after light polarization compensation device；
Coupling device, the sample message light and the polarization compensation light are incident on the coupling device and interfere generation heterodyne
Interference light.
2. the probe difference interference device that rotation property as described in claim 1 is differentiated, which is characterized in that the difference frequency generating means
Include:
First frequency shifter and the first diaphragm, the direction of propagation along former measurement light are set gradually；
Second frequency shifter and the second diaphragm, the direction of propagation along former reference light are set gradually；
First frequency shifter and second frequency shifter are acousto-optic frequency shifters or acousto-optic modulator.
3. the probe difference interference device that rotation property as described in claim 1 is differentiated, which is characterized in that the measurement light polarization control
Device processed includes the polarizer, quarter-wave plate or spatial light modulator, and the direction of propagation along the measurement light is set gradually.
4. the probe difference interference device that rotation property as described in claim 1 is differentiated, which is characterized in that the focusing scanning means
Include:
Concentrating element, it is weak poly- that the measurement light is incident on the concentrating element output after the measurement light polarization control device
Burnt illumination light；
Scanning element, the scanning element finely tune excitation position of the illumination light relative to sample of the weak focus.
5. the probe difference interference device that rotation property as described in claim 1 is differentiated, which is characterized in that the aperture type scanning is close
Field optical microscope device includes:
Scan table, for placing sample, the scan table center offers the light hole across the scan table；
Probe is oppositely arranged with the sample；
Optical fiber probe links with the probe and is arranged, and connect with the coupling device, the needle point near field of the optical fiber probe
It detects the nanometer light field of the sample and the sample message light to the coupling is transmitted by the optical fiber of the optical fiber probe and fill
It sets；
Optical microscope for scanning near field controller is connect with the probe and the scan table, for sweeping described in synchronously control
It retouches head and the scan table realizes micron order and nano-precision three-D displacement；
Videomicroscopy and CCD camera, the sample that the videomicroscopy is carried with the scan table is oppositely arranged, described
CCD camera is fixed on the videomicroscopy, and for aid imaging and to feed back the optical fiber probe opposite with the sample
Position.
6. the probe difference interference device that rotation property as claimed in claim 5 is differentiated, which is characterized in that the optical fiber probe is not
The bare fibre probe of plated film or the aperture probes of metal-coated membrane or functional probe or etching for needle point adhesiving metal nanoparticle
The functional probe of helix chirality nanostructure.
7. the probe difference interference device that rotation property as described in claim 1 is differentiated, which is characterized in that described to be mended with reference to light polarization
Repaying device includes:
Electronic half-wave plate and electronic quarter-wave plate, the electronic half-wave plate and the quarter-wave plate are for automatically controlled and benefit
The polarization state for repaying the reference light, the direction of propagation along the reference light are set gradually；
Optical fiber polarization controller is connect with the coupling device, and the optical fiber polarization controller adjusts the optical fiber polarisation control
Polarization state in the optical fiber of device simultaneously transmits the polarization compensation light to the coupling device；
Fiber optic collimator coupler, the fiber optic collimator coupler are placed in the electronic quarter-wave plate and the optical fiber polarisation control
Between device processed.
8. the probe difference interference device that rotation property as claimed in claim 7 is differentiated, which is characterized in that the fiber optic collimator coupling
Device is low NA objective or gradual index lens, for space optical coupling to be entered to the light of the optical fiber polarization controller
It is fine.
9. the probe difference interference device that rotation property as described in claim 1 is differentiated, which is characterized in that the coupling device includes
The fiber coupler of non-polarization-maintaining.
10. the probe difference interference device that rotation property as described in claim 1 is differentiated, which is characterized in that the spectral module packet
Polarizing beam splitter and reflecting mirror are included, the reflecting mirror is arranged in the light exit direction of the polarizing beam splitter.
11. a kind of nanometer of light field spin-orbit interaction measurement method, for measuring nanometer light field on meso-scale certainly
Rotation-rail interaction characterized by comprising
It generates difference interference light using rotation property resolved detection method by reference to light polarization compensation device and coupling device and obtains
It obtains the rotation of selection or rotation property is differentiated；
Using probe difference interference method, super optical diffraction limit imaging and phase-resolved performance are obtained.
12. as claimed in claim 11 nanometer of light field spin-orbit interaction measurement method, which is characterized in that the rotation
Property resolved detection method includes:
Circular polarization is obtained using cross-polarization scaling method and compensates light, the circular polarization compensation light and sample message light are in the coupling
It attaches together to interfere in setting and generates difference interference light；
The rotation that the circular polarization compensation light is controlled and switched by adjusting reference light polarization compensation device, is realized to the sample
Nanometer light field rotation resolved detection.
13. as claimed in claim 12 nanometer of light field spin-orbit interaction measurement method, which is characterized in that it is described just
Hand over polarizational labelling method include:
It is incident to the non-structural region of sample using the illumination light of standard left or right rotation circular polarization, adjusts described with reference to light polarization
Compensation device makes the difference interference light of the coupling device output reach delustring state, is mended with obtaining dextrorotation or left-handed circular polarization
Repay light.
14. as claimed in claim 11 nanometer of light field spin-orbit interaction measurement method, which is characterized in that the spy
Needle difference interference method includes:
The near field high spatial frequency information of the nanometer light field of optical fiber probe acquisition sample is simultaneously transmitted to far field, to realize that ultraphotic is spread out
Emitter-base bandgap grading limit measurement；
By difference frequency generating device, reference light and the measurement light of generation have preset frequency poor for former reference light and former measurement light；
Relative phase measurement to the nanometer light field of the optical fiber probe position can be realized to the difference interference optical modulator.
15. a kind of nanometer of light field spin-orbit interaction measuring system characterized by comprising
Generating device of laser, for exporting former measurement light and former reference light；
The probe difference interference device that rotation property is differentiated is arranged on the generating device of laser light output direction, using such as right
It is required that the probe difference interference device that rotation described in 1-10 is differentiated, for generating difference interference light；
Data receiver processing unit is arranged on the outbound course of the difference interference light, for receiving the difference interference light
And analyze difference interference information.
16. as claimed in claim 15 nanometer of light field spin-orbit interaction measuring system, which is characterized in that described to swash
Light generating apparatus includes:
Laser, the good single longitudinal mode laser of the laser output coherence；
Shaping unit, the single longitudinal mode laser export the laser of single longitudinal mode and single transverse mode by the shaping unit.
17. as claimed in claim 16 nanometer of light field spin-orbit interaction measuring system, which is characterized in that described whole
Shape unit includes:
Device, shaping device, collimating element, filtering device are expanded, it is described to expand device, the shaping device, the collimator
Part and the filtering device are set gradually along the light output transmission direction of the laser.
18. as claimed in claim 15 nanometer of light field spin-orbit interaction measuring system, which is characterized in that the number
Include: according to receiving and processing device
Photodetector, the difference interference light export ac signal after being incident on the photodetector；
Lock-in amplifier is electrically connected with the photodetector；
Reference signal frequency mixing module is electrically connected with the lock-in amplifier, and the reference signal frequency mixing module is that the locking phase is put
Big device provides reference frequency signal, and the lock-in amplifier carries out locking phase and demodulation output demodulation of phase locking to the ac signal
Signal；
Data acquisition module is electrically connected with the lock-in amplifier, for acquiring the demodulation of phase locking signal.
19. as claimed in claim 15 nanometer of light field spin-orbit interaction measuring system, which is characterized in that the system
System further includes calculating controlling terminal, respectively with the aperture type probe difference interference optical microscope for scanning near field device and described
The electrical connection of data receiver processing unit.
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