CN109596576B - System and method for measuring nano optical field spin-orbit interaction - Google Patents

System and method for measuring nano optical field spin-orbit interaction Download PDF

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CN109596576B
CN109596576B CN201710944829.0A CN201710944829A CN109596576B CN 109596576 B CN109596576 B CN 109596576B CN 201710944829 A CN201710944829 A CN 201710944829A CN 109596576 B CN109596576 B CN 109596576B
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heterodyne interference
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孙琳
白本锋
张小萌
王佳
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Tsinghua University
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Abstract

A probe heterodyne interference device for rotation resolution, a nanometer optical field spin-orbit interaction measurement system and a method are provided. The probe heterodyne interference device comprises: the single-beam laser is divided into original measuring light and original reference light through the light splitting module; the difference frequency generating device carries out frequency modulation on the original measuring light and the original reference light and outputs the measuring light and the reference light with a preset frequency difference; the measuring light polarization control device is arranged in the transmission direction of the measuring light; the focusing and scanning device is arranged in the output direction of the reference light of the measuring light polarization control device to output the illumination light; the illumination light excites a sample to generate a nanometer light field, and the aperture type scanning near-field optical microscope device detects and collects the nanometer light field in a near field and outputs sample information light; the reference light polarization compensation device is arranged in the transmission direction of the reference light, and the reference light enters the reference light polarization compensation device to output polarization compensation light; the sample information light and the polarization compensation light are transmitted to the coupling device to generate interference to generate heterodyne interference light.

Description

System and method for measuring nano optical field spin-orbit interaction
Technical Field
The invention relates to the field of nano-optics and nano-photonics measurement, in particular to a rotation resolution probe heterodyne interference device, and a method and a system for measuring nano-optical field spin-orbit interaction.
Background
Light propagating in a medium simultaneously undergoes two rotations around the optical axis, one is the spin rotation in time due to the chirality/handedness (chirality) of photons, and the rotation based on the polarization of photons has a spin angular momentum (spin angular momentum). The other is derived from the rotation of the light intensity and phase on the spatial distribution, which has orbital angular momentum (orbital angular momentum). When photons or light propagate in a non-homogeneous optical medium or are refracted or reflected at an optical surface, the spin angular momentum and the orbital angular momentum of the photons are coupled and converted with each other, and photon spin-orbit interaction is generated.
The photon spin-orbit effect in the traditional geometric optical device is very weak and difficult to observe. And a nanostructured surface (metassurface) device in nano optics can be used as an effective functional device platform, and can enhance photon spin-orbit interaction to realize observation. In the conventional technology, a scanning near-field optical microscope based on a probe heterodyne interference technology can realize near-field measurement of phase-resolved super-diffraction optical resolution, but simultaneously, the direct realization of near-field measurement of rotation resolution is difficult, so that measurement research on the nano optical field spin-orbit interaction cannot be directly carried out in the near field.
Disclosure of Invention
In view of the foregoing, there is a need to provide a probe heterodyne interference apparatus, a nanometer optical field spin-orbit interaction measurement system and a method, which can simply and directly implement near field helicity and phase resolution on a mesoscale.
The invention provides a probe heterodyne interference device with rotation resolution, which comprises:
the single-beam laser is divided into original measuring light and original reference light through the light splitting module;
a difference frequency generating device, arranged in the transmission direction of the original measuring light and the original reference light, for performing frequency modulation on the original measuring light and the original reference light, outputting the measuring light and the reference light, and generating a predetermined frequency difference between the measuring light and the reference light;
the measurement light polarization control device is arranged in the transmission direction of the measurement light, and the polarization state of the measurement light is adjusted after the measurement light enters the measurement light polarization control device;
a focusing and scanning device which is arranged in the output direction of the reference light of the measuring light polarization control device, focuses the measuring light passing through the measuring light polarization control device to output illumination light, and finely adjusts the excitation position of the illumination light relative to the sample;
the aperture type scanning near-field optical microscope device excites the sample to generate a nanometer optical field, and the aperture type scanning near-field optical microscope device detects and collects the nanometer optical field in a near field and outputs sample information light;
the reference light polarization compensation device is arranged in the transmission direction of the reference light, and the reference light is incident to the reference light polarization compensation device and then outputs polarization compensation light;
and the sample information light and the polarization compensation light enter the coupling device to generate interference to generate heterodyne interference light.
In one embodiment, the difference frequency generating means comprises:
the first frequency shifter and the first diaphragm are sequentially arranged along the propagation direction of the original measuring light;
the second frequency shifter and the second diaphragm are sequentially arranged along the propagation direction of the original reference light;
the first frequency shifter and the second frequency shifter are acousto-optic frequency shifters or acousto-optic modulators.
In one embodiment, the measuring light polarization control device comprises a polarizer, a quarter wave plate or a spatial light modulator, which are arranged in sequence along the propagation direction of the measuring light.
In one embodiment, the focus scanning apparatus comprises:
the measuring light enters the focusing element to output weakly focused illuminating light after passing through the measuring light polarization control device;
a scanning element that fine-tunes an excitation position of the weakly focused illumination light relative to the sample.
In one embodiment, the aperture-type scanning near-field optical microscope device includes:
the scanning platform is used for placing a sample, and the center of the scanning platform is provided with a light through hole penetrating through the scanning platform;
a scanning head disposed opposite the sample;
the optical fiber probe is linked with the scanning head and is connected with the coupling device, the nano optical field of the sample is detected by the near field of the needle point of the optical fiber probe, and the sample information light is transmitted to the coupling device through the optical fiber of the optical fiber probe;
the scanning near-field optical microscope controller is connected with the scanning head and the scanning platform and is used for synchronously controlling the scanning head and the scanning platform to realize micron-scale and nano-scale precision three-dimensional displacement;
the device comprises a video microscope and a CCD camera, wherein the video microscope is opposite to a sample carried by the scanning platform, and the CCD camera is fixed on the video microscope and used for assisting in imaging and feeding back the relative position of the optical fiber probe and the sample.
In one embodiment, the optical fiber probe is a bare optical fiber probe without a coating film or an aperture probe with a coating film, or a functional probe with a tip adhered with metal nanoparticles or a functional probe with an etched spiral chiral nanostructure.
In one embodiment, the reference light polarization compensation device includes:
the electric half-wave plate and the electric quarter-wave plate are used for electrically controlling and compensating the polarization state of the reference light and are sequentially arranged along the propagation direction of the reference light;
the optical fiber polarization controller is connected with the coupling device and used for adjusting the polarization state in the optical fiber of the optical fiber polarization controller and transmitting the polarization compensation light to the coupling device;
the optical fiber collimating coupler is arranged between the electric quarter-wave plate and the optical fiber polarization controller.
In one embodiment, the fiber collimating coupler is a low numerical aperture objective or a graded index lens for coupling spatial light into the fiber of the fiber polarization controller.
In one embodiment, the coupling device comprises a non-polarization maintaining fiber coupler.
In one embodiment, the probe heterodyne interference apparatus further includes:
in one embodiment, the light splitting module includes a polarization beam splitter and a mirror disposed in a light exit direction of the polarization beam splitter.
The invention also provides a method for measuring the nanometer optical field spin-orbit interaction, which is used for measuring the nanometer optical field spin-orbit interaction on a mesoscale and comprises the following steps:
by a reference light polarization compensation device and a coupling device, heterodyne interference light is generated and selective rotation or opposite rotation is obtained for resolution by a rotation resolution detection method;
and the performance of super-optical diffraction limit imaging and phase resolution is obtained by adopting a probe heterodyne interference method.
In one embodiment, the rotation-resolved detection method comprises:
obtaining circular polarization compensation light by adopting an orthogonal polarization calibration method, wherein the circular polarization compensation light and the sample information light interfere in the coupling device to generate heterodyne interference light;
and the rotation resolution detection of the nanometer optical field of the sample is realized by adjusting the reference light polarization compensation device to control and switch the rotation of the circular polarization compensation light.
In one embodiment, the orthogonal polarization calibration method comprises the following steps:
and standard left-handed or right-handed circularly polarized illumination light is incident to a non-structural area of the sample, and the reference light polarization compensation device is adjusted to enable heterodyne interference light output by the coupling device to reach an extinction state so as to obtain right-handed or left-handed circularly polarized compensation light.
In one embodiment, the probe heterodyne interference method includes:
the optical fiber probe collects near-field high spatial frequency information of a nanometer optical field of a sample and transmits the information to a far field so as to realize ultra-optical diffraction limit measurement;
the original reference light and the original measuring light pass through a difference frequency generating device, and the generated reference light and the measuring light have a preset frequency difference;
and the heterodyne interference light demodulation can realize the relative phase measurement of the nanometer optical field at the position of the optical fiber probe.
The invention also provides a measuring system for the nanometer optical field spin-orbit interaction, which comprises:
the laser generating device is used for outputting the original measuring light and the original reference light;
the probe heterodyne interference device is arranged in the light output direction of the laser generation device, adopts the probe heterodyne interference device and is used for generating heterodyne interference light;
and the data receiving and processing device is arranged in the output direction of the heterodyne interference light and is used for receiving the heterodyne interference light and analyzing heterodyne interference information.
In one embodiment, the laser generating apparatus includes:
the laser outputs single longitudinal mode laser with good coherence;
and the single longitudinal mode laser passes through the shaping unit to output laser of a single longitudinal mode and a single transverse mode.
In one embodiment, the shaping unit comprises:
the laser comprises a beam expanding device, a shaping device, a collimating device and a filtering device, wherein the beam expanding device, the shaping device, the collimating device and the filtering device are sequentially arranged along the light output transmission direction of the laser.
In one embodiment, the data reception processing apparatus includes:
the heterodyne interference light is incident to the photoelectric detector and then outputs an alternating current signal;
the phase-locked amplifier is electrically connected with the photoelectric detector;
the reference signal mixing module is electrically connected with the phase-locked amplifier and provides a reference frequency signal for the phase-locked amplifier, and the phase-locked amplifier performs phase locking and demodulation on the alternating current signal and outputs a phase-locked demodulation signal;
and the data acquisition module is electrically connected with the phase-locked amplifier and is used for acquiring the phase-locked demodulation signal.
In one embodiment, the system further comprises a calculation control terminal electrically connected with the aperture type probe heterodyne interference scanning near-field optical microscope device and the data receiving and processing device respectively.
A probe heterodyne interference device for rotation resolution, a method and a system for measuring the nano light field spin-orbit interaction adopt the probe heterodyne interference device, and adopt an orthogonal polarization calibration method, a rotation resolution detection method and a probe heterodyne interference method on the method, thereby realizing the rotation resolution of the super-diffraction optical diffraction limit and the near-field measurement of the phase resolution. The super-diffraction optical limit measurement can realize the representation under the mesoscopic scale, the rotation resolution measurement can realize the representation of the spinning angular momentum of the nano light field, and the phase resolution measurement can realize the representation of the orbital angular momentum of the nano light field, so the invention can finally realize the photon spinning-orbital interaction in the near-field direct measurement sample in the mesoscopic scale.
Drawings
FIG. 1 is a schematic structural diagram of a rotational resolution heterodyne probe interferometer according to an embodiment;
FIG. 2 is a block diagram of a difference frequency generation apparatus of a rotation-resolving heterodyne probe interference apparatus according to another embodiment;
FIG. 3 is a schematic diagram of an embodiment of a rotational resolution heterodyne probe interferometer;
FIG. 4 is a schematic structural diagram of a nanooptical field spin-orbit interaction measurement system according to an embodiment;
FIG. 5 is a schematic structural diagram of a nanooptical field spin-orbit interaction measurement system according to another embodiment;
FIG. 6 is a diagram of the structure of a surface element in a device with a super-structured surface according to an embodiment;
FIG. 7 is an electron micrograph of a device with a nanostructured surface according to an embodiment;
FIG. 8 is a schematic diagram of an actual structure of a nanometer optical field spin-orbit interaction measurement system according to an embodiment;
FIG. 9 is a schematic diagram of a rotational resolution detection according to an embodiment;
FIG. 10 is a measurement result of a nano optical field spin-orbit interaction measurement system of an embodiment;
FIG. 11 is a three-dimensional measurement of a nanooptical field spin-orbit interaction measurement system of an embodiment.
Description of the main elements
Spin-orbit interaction measurement system 10
Laser generating apparatus 100
Laser 110
Shaping unit 120
Probe heterodyne interference device 200
Light splitting module 210
Polarizing beam splitter and mirror 211
Difference frequency generating device 220
First frequency shifter 221
First diaphragm 222
Second frequency shifter 223
Second diaphragm 224
Measuring light polarization control device 230
Polarizer 231
Quarter wave plate or spatial light modulator 232
Focus scanning device 240
Focusing element 241
Scanning element 242
Aperture type scanning near field optical microscope device 250
Scanning stage 251
Scanning head 252
Fiber optic probe 253
Scanning near field optical microscope controller 254
Video microscope 255
CCD camera reference light polarization compensation device 256
Reference light polarization compensation device 260
Electric half-wave plate 261
Electric quarter wave plate 262
Fiber collimating coupler 263
Optical fiber polarization controller 264
Coupling device 270
Non-polarization maintaining fiber coupler 271
Data receiving and processing device 300
Photodetector 310
Phase locked amplifier 320
Reference signal mixing module 330
Data acquisition module 340
Computation control terminal 400
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1, the present embodiment provides a probe heterodyne interference apparatus 200 for rotational resolution, including: a light splitting module 210, a difference frequency generating device 220, a measuring light polarization control device 230, a focusing scanning device 240, an aperture type scanning near-field optical microscope device 250, a reference light polarization compensation device 260 and a coupling device 270. The single laser beam of the light splitting module 210 is split into the original measurement light and the original reference light by the light splitting module 210. The difference frequency generating device 220 performs frequency modulation on the original measuring light and the original reference light, and outputs the measuring light and the reference light with a predetermined frequency difference. The predetermined frequency difference may be Δ ω. And the measuring light polarization control device is arranged in the transmission direction of the measuring light. The focus scanning means 240 is disposed in the output direction of the reference light of the measuring light polarization control means 230. The measurement light enters the measurement light polarization control device 230, and then the polarization state of the measurement light is adjusted, and then the measurement light is focused by the focusing scanning device 240 to output illumination light. The illumination light excites a sample to generate a nano-optical field, and the aperture type scanning near-field optical microscope device 250 collects the nano-optical field and outputs sample information light in a near-field detection. The reference light polarization compensation device 260 is disposed in the transmission direction of the reference light. The reference light is incident on the reference light polarization compensation device 260 to output polarization compensation light. The sample information light and the polarization compensation light are transmitted to the coupling device 270 to generate interference to generate heterodyne interference light.
The probe heterodyne interference device provided by the invention has rotation resolution, and adopts an orthogonal polarization calibration method, a rotation resolution detection method and a probe heterodyne interference method. And the rotation resolution of the super-diffraction optical diffraction limit and the near-field measurement of the phase resolution are realized. The super-diffraction optical limit measurement can realize the representation under the mesoscopic scale, the rotation resolution measurement can realize the representation of the spinning angular momentum of the nano light field, and the phase resolution measurement can realize the representation of the orbital angular momentum of the nano light field, so the invention can finally realize the photon spinning-orbital interaction in the near-field direct measurement sample in the mesoscopic scale.
In one embodiment, the light splitting module 210 includes a polarization beam splitter and a reflecting mirror 211, and the reflecting mirror is disposed in a light exiting direction of the polarization beam splitter.
Referring to fig. 2, in an embodiment, the difference frequency generating device 220 includes: a first frequency shifter 221 and a first diaphragm 222, which are sequentially arranged along the propagation direction of the measurement light; and a second frequency shifter 223 and a second diaphragm 224 which are sequentially arranged along the propagation direction of the reference light. The first frequency shifter 221 and the second frequency shifter 223 are acousto-optic frequency shifters or acousto-optic modulators.
Referring to fig. 3, in one embodiment, the measuring light polarization control device 230 includes a polarizer 231, a quarter wave plate or a spatial light modulator 232, which are sequentially disposed along the propagation direction of the measuring light.
Wherein, in one embodiment, the focus scanning device 240 comprises a focusing element 241 and a scanning element 242. After the measurement light is weakly focused by the focusing element 241, the sample is illuminated by the scanning element 242, and the focus scanning and sample alignment are performed.
The focusing element 241 may be a low na objective lens or a long focal length lens, which can achieve weak focusing of incident light and maintain the polarization state of the incident light unchanged under an application of approximately normal incidence. The scanning element 242 includes a mirror and a mechanical control unit. The scanning element 242 may be integrated or separate. When the scanning element 242 is integrated, it may be a scanning galvanometer that integrates the mirror and the mechanical control. When the scanning element 242 is a separate type, the mechanical control unit can be separated from the mirror. It may take the form of a separate mirror that carries the focusing element 241 on a two-dimensional motorized displacement stage. The focusing and scanning device 240 can realize the scanning adjustment of the focusing illumination focus relative to the sample plane and the light field plane in the range of hundreds of micrometers, so as to be convenient for selecting the sample illumination area or the nanometer light field measurement area.
Wherein, in one embodiment, the aperture type scanning near field optical microscope device 250 comprises a scanning stage 251, a scanning head 252, a fiber optic probe 253, a scanning near field optical microscope controller 254, a video microscope 255, and a CCD camera 256. The scanning stage 251 is provided with a light through hole penetrating through the scanning stage 251 for placing a sample. The scanning head 252 is disposed opposite the sample. The optical fiber probe 253 is linked with the scanning head 252 and connected with the coupling device 270. The scanning head 252 controls the optical fiber probe 253 to be suspended at a position of several nanometers to several tens of nanometers above the sample during measurement, and the nano optical field detected in the near field is transmitted to the coupling device 270 through the conducting optical fiber of the optical fiber probe 253. The scanning near-field optical microscope controller 254 is electrically connected to the scanning stage 251 and the scanning head 252, and is configured to control the scanning stage 251 and the scanning head 252 to move. The video microscope 255 is disposed opposite to the sample mounted on the scanning stage 251. The CCD camera 256 is fixedly disposed on the video microscope 255. The video microscope 255 and the CCD camera 256 are used to observe and monitor the measurement field of view in real time.
The scanning stage 251 may be a three-dimensional micro-scale scanning stage based on a stepping motor, or a three-dimensional nano-scale scanning stage based on piezoelectric ceramics. The center of the scanning stage 251 needs to be light-transmitting, and a transmission illumination mode (the optical fiber probe 253 is used as a near-field nanometer light source) or a transmission collection mode (the optical fiber probe 253 is used as a near-field detector) is realized, so as to realize three-dimensional scanning measurement of a nanometer light field of the sample. The scanning head 252 may be a scanning head of a scanning near-field optical microscope. The scanning head 252 may be synchronized with the scanning near-field optical microscope controller 254 to achieve head scanning functions that precisely control the tip-sample spacing and three-dimensional nanometer-scale precision. The scanning head 252 may implement nanoscale tip-sample spacing control in either shear mode or tapping mode. The scanning head 252 may carry various types of fiber optic probes 253. The optical fiber probe 253 can be a coated optical fiber aperture probe, a bare optical fiber probe, or a functional probe decorated by a nano antenna. The optical fiber probe 253 is a bare optical fiber probe without coating or an aperture probe with a metal coating or a functional probe with a tip adhered with metal nanoparticles or a functional probe with an etched spiral chiral nano structure. The tip dimension of the fiber optic probe 243 is on the order of one-tenth of a wavelength.
Wherein, in one embodiment, the reference light polarization compensation device 260 comprises an electric half wave plate 261, an electric quarter wave plate 262, a fiber collimator/coupler 263 and a fiber polarization controller 264, which are arranged in sequence along the transmission direction of the reference light. The electric half-wave plate 261 and the electric quarter-wave plate 262 can precisely and electrically regulate the polarization state of the polarization compensation light. The fiber polarization controller 264 generates birefringence by applying stress to the fiber, and regulates and controls the polarization state of the optical field mode in the reference optical path transmission fiber. The fiber polarization controller 264 is in a manual control mode, and can statically and rapidly adjust the polarization state before the probe heterodyne interference apparatus 200 is stabilized. The fiber collimating coupler 263 couples spatial light into the fiber polarization controller 264. In one embodiment, the fiber collimating coupler 263 can be a low numerical aperture objective lens or a graded index lens for coupling spatial light into the fiber of the fiber polarization controller.
The electric half-wave plate 261 and the electric quarter-wave plate 262 are driven by a hollow rotating motor to control the rotation angle, and the change of the mode polarization state in the conducting fiber of the probe heterodyne interference device 200 is compensated by fine tuning the polarization state of the reference light in the space light. In the measurement process, the electric half-wave plate 261 and the electric quarter-wave plate 262 can perform rotation adjustment and compensation for polarization state change in real time through a feedback mechanism according to the contrast of the interference signal, and the interference signal is always kept at the optimal contrast.
Wherein, in one embodiment, the coupling device 270 comprises a non-polarization maintaining fiber coupler 271. The sample information light in the measurement light path and the polarization compensation light in the reference light path are overlapped in the non-polarization-maintaining fiber coupler 271 to generate heterodyne interference light.
The invention also provides a method for measuring the nanometer optical field spin-orbit interaction, which is used for realizing the nanometer optical field spin-orbit interaction on a mesoscale and comprises the following steps:
by a reference light polarization compensation device and a coupling device, heterodyne interference light is generated and selective rotation or opposite rotation is obtained for resolution by a rotation resolution detection method;
and the performance of super-optical diffraction limit imaging and phase resolution is obtained by adopting a probe heterodyne interference method.
In one embodiment, the rotation-resolved detection method comprises:
obtaining circular polarization compensation light by adopting an orthogonal polarization calibration method, wherein the circular polarization compensation light and the sample information light interfere in the coupling device to generate heterodyne interference light;
and the rotation resolution detection of the nanometer optical field of the sample is realized by adjusting the reference light polarization compensation device to control and switch the rotation of the circular polarization compensation light.
In one embodiment, the orthogonal polarization calibration method comprises the following steps:
and standard left-handed or right-handed circularly polarized illumination light is incident to a non-structural area of the sample, and the reference light polarization compensation device is adjusted to enable heterodyne interference light output by the coupling device to reach an extinction state so as to obtain right-handed or left-handed circularly polarized compensation light.
In one embodiment, the probe heterodyne interference method includes:
the optical fiber probe collects near-field high spatial frequency information of a nanometer optical field of a sample and transmits the information to a far field so as to realize ultra-optical diffraction limit measurement;
the original reference light and the original measuring light pass through a difference frequency generating device to generate a preset frequency difference between the reference light and the measuring light;
and the heterodyne interference light demodulation can realize the relative phase measurement of the nanometer optical field at the position of the optical fiber probe.
Referring to fig. 4, an embodiment of the invention provides a system 10 for measuring a nano-optical field spin-orbit interaction. The nano optical field spin-orbit interaction measurement system 10 includes: laser generating device 100, probe heterodyne interference device 200 and data receiving processing device 300. The laser generating device 100 is used for outputting primary measuring light and primary reference light. The probe heterodyne interference apparatus 200 is disposed in the light output direction of the laser generating apparatus 100. The probe heterodyne interference apparatus 200 adopts the probe heterodyne interference apparatus 200. The laser light is incident to the probe heterodyne interference device 200 for rotational resolution and is used for generating heterodyne interference light by interference. The data receiving and processing device 300 is disposed in the output direction of the heterodyne interference light, and is configured to receive and demodulate the heterodyne interference light.
Referring to fig. 5, in one embodiment, the laser generating apparatus 100 includes a laser 110 and a shaping unit 120. The laser 110 outputs single longitudinal mode laser light with good coherence. The single longitudinal mode laser outputs laser light of a single longitudinal mode and a single transverse mode through the shaping unit 120.
In one embodiment, the laser 110 is a frequency stabilized single longitudinal mode laser. The frequency stabilized laser may be a gas or solid state laser. In one embodiment, the shaping unit 120 includes: the laser comprises a beam expanding device, a shaping device, a collimating device and a filtering device, wherein the beam expanding device, the shaping device, the collimating device and the filtering device are sequentially arranged along the transmission direction of laser output by the laser 110.
In one embodiment, the data receiving and processing device 300 includes: a photodetector 310, a lock-in amplifier 320, a reference signal mixing module 330, and a data acquisition module 340. The photodetector 310 can convert the weak optical signal from the optical fiber coupler 271 into the ac electrical signal and perform pre-amplification. The photodetector 310 may be a photomultiplier tube or an avalanche diode. The lock-in amplifier 320 is electrically connected to the photodetector 310. The reference signal mixing module 330 is electrically connected to the lock-in amplifier 320. The reference signal mixing module 330 provides a reference frequency signal for the lock-in amplifier 320. The lock-in amplifier 320 locks and demodulates the alternating current signal and outputs a lock-in demodulated signal. The data acquisition module 340 is electrically connected to the lock-in amplifier 320, and is configured to acquire the lock-in demodulation signal.
In one embodiment, the nano optical field spin-orbit interaction measurement system 10 may further include a computational control terminal 400. The calculation control terminal 400 is electrically connected to the aperture type scanning near-field optical microscope device 250 and the data reception processing device 300, respectively. The calculation control terminal 400 can control the scanning head 252 to perform needle insertion and needle withdrawal and three-dimensional scanning of the fiber-optic probe 253 through the near-field optical microscope controller 254. The phase-locked demodulated signals acquired by the data acquisition module 340 can be processed by the computation control terminal 400 to obtain synchronous data of spatially distributed phases, amplitudes and morphologies.
In one embodiment, the sample may be a surface mount device (matesource). The super-structure surface device is a circular polarization sensitive structure based on geometric phase. By designing the structural parameters of the super-structure surface device, the light field spin-vortex conversion can be realized, and further a vortex light field with the topological charge number of 3 is generated under the illumination of circularly polarized light.
The design of the cell structure in the nanostructured surface device is shown in fig. 6. The unit structure adopts the geometric form of a gold nanorod pair. The geometric form can improve the filling factor of the unit structure design, thereby increasing the scattering cross section of the super-structure surface device and improving the conversion efficiency of the super-structure surface device. The direction angles of all the unit structures in the super-structure surface device are arranged according to the following rule, and a vortex light field with the topological charge number of 3 can be generated under the illumination of circularly polarized light.
Figure 624355DEST_PATH_IMAGE001
Wherein the unit direction angle
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The phase position can be regulated and controlled independently,
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is the central coordinate of the ith cell and satisfies
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pThe size of the pixel of the super-structure surface device is shown in figure 7, the electron microscope photo of the super-structure surface device processed by the electron beam etching process is shown in figure 7, the size of the super-structure surface device is 7 microns × 7 microns, the insert at the upper left corner of figure 5 is a processing structure of a gold nanorod pair, and the length scale of the processing structure is 100 nm.
Fig. 8 is a schematic diagram of the spin-resolved detection of the spin-orbit interaction measurement system 10. In one embodiment, two light fields are generated upon illumination of the nanostructured surface device with left-handed circularly polarized measurement light: the left-handed circularly polarized plane wave and the right-handed vortex with a topological charge number of 3. The left-handed polarized light and the right vortex optical rotation perform heterodyne interference with circularly polarized reference light, so that rotation resolution detection of the left-handed polarized light and the right vortex optical rotation can be realized by controlling the rotation of the reference light. When the reference light is right-handed circularly polarized light, the right-handed reference light is orthogonal to the left-handed polarized light, and heterodyne interference cannot be generated; the dextrorotation reference light and the dextrorotation vortex light generate heterodyne interference, and then the complex amplitude distribution of the near-field dextrorotation component can be measured by the spin-orbit interaction measuring system, and at the moment, the 6 pi vortex phase distribution generated by spin-vortex conversion is obtained. When the reference light is left-handed circularly polarized light, the left-handed reference light and the right vortex are in optical rotation orthogonality, and heterodyne interference cannot be generated; the left-handed reference light and the left-handed polarized light generate heterodyne interference, and then the complex amplitude distribution of the near-field left-handed component can be measured by using the spin-orbit interaction measurement system 10, and at this time, planar wavefront distribution with the same phase is obtained.
In one embodiment, the key to the spin-orbit interaction measurement system 10 to achieve rotation-resolved detection is to generate circularly polarized compensation light using an orthogonal polarization calibration method. The orthogonal polarization calibration method adjusts the reference light polarization compensation device 260 based on the heterodyne interference light intensity of the coupling device 270, and adopts an orthogonal extinction mode to make reference light be circularly polarized light compensation light. Adjusting a polarizer 231 and a quarter wave plate 232 in the measurement light polarization control device 230 to make the measurement light be left-handed or right-handed circularly polarized light, and then incident to a non-structural area or a transparent blank area of a sample, and finely adjusting an electric half wave plate 261 and an electric quarter wave plate 262 in the reference light polarization compensation device 260 to make heterodyne interference light of the optical fiber coupler 271 reach extinction, so as to generate right-handed or left-handed circularly polarized compensation light.
The operation of the spin-orbit interaction measurement system 10 will now be described with reference to fig. 9. The laser 110 emits laser light to be incident on the shaping unit 120. The shaping unit 120 shapes the laser and then the laser is incident to the polarization beam splitter and the reflecting mirror 211 to be divided into two laser beams of a measuring light path and a reference light path. The measurement optical path laser light is sequentially incident on the first frequency shifter 221, the first diaphragm 222, the polarizer 231, and the quarter wave plate 232. The polarizer 231 and the quarter wave plate 232 adjust the polarization state of the measurement light according to the application, and then the measurement light enters the scanning element 242 after being weakly focused by the focusing element 241, illuminates the sample through the light through hole of the scanning stage 251, and performs focus scanning and sample alignment. Here, the sample is a nanostructured surface device. The video microscope 255 and the CCD camera 256 observe and monitor the measurement field of view in real time, and transmit the observation data to the calculation control terminal 400. The computer control terminal 400 is a computer. The computer gives instructions to the scanning near-field optical microscope controller 254 to control the three-dimensional nanometer precision movement of the scanning head 252. As the scanning head 252 moves, the tip of the optical fiber probe 253 detects a near-field nano optical field of a sample, and sample information light is obtained through optical fiber transmission of the optical fiber probe 253. The optical fiber probe 253 is an aperture type probe and has good circular symmetry, so that the optical fiber probe has a rotation maintaining capability for circularly polarized light measured in a near field. Meanwhile, the laser of the reference optical path passes through the second frequency shifter 223, the second diaphragm 224, the electric half-wave plate 261, the electric quarter-wave plate 262, the optical fiber collimator/coupler 263 and the optical fiber polarization controller 264 in sequence to obtain polarization compensation light. By adopting the orthogonal polarization calibration method, the electric half-wave plate 261 and the electric quarter-wave plate 262 are finely adjusted to obtain left-handed or right-handed circularly polarized compensation light, so as to realize the rotation resolution detection of the near field. Finally, the near-field information light and the circularly polarized compensation light with specific rotation property generate heterodyne interference light at the optical fiber coupler 271. The heterodyne interference light is incident on the photodetector 310 and then outputs an ac signal. The reference signal mixing module 330 provides a reference frequency signal for the lock-in amplifier 320, and performs lock-in demodulation on the ac signal to obtain a lock-in demodulation signal. The data acquisition module 340 acquires phase-locked demodulated signals, and the phase-locked demodulated signals are processed by the computer 400 to obtain synchronous data of the phase, amplitude and morphology of the near-field three-dimensional spatial distribution.
As shown in fig. 10, the spin-orbit interaction measurement system 10 of the present invention can achieve spin-resolved and phase-resolved near-field measurements. Based on the orthogonal polarization calibration method, even under the condition that the conversion efficiency of the super-structure surface device is low, the measurement results of high signal-to-noise ratio and contrast can be obtained. The optical fiber probe carries out two-dimensional scanning measurement in the near field of the super-structure surface device, and by controlling the rotation of the circular polarization compensation light in the reference light path, the amplitude and phase near-field distribution data of a specific rotation component of a nano light field can be obtained point by point, so that the geometric phase distribution generated by photon spin-orbit interaction in the super-structure surface device is obtained.
As shown in fig. 11, spin-resolved and phase-resolved near-field three-dimensional tomographic measurements can be performed using the spin-orbit interaction measurement system 10 of the present invention. The distance between the optical fiber probe 253 and the sample is precisely controlled through nanoscale precision, so that the function of measuring a three-dimensional space section along the direction of an optical axis can be realized, the three-dimensional amplitude and phase distribution information of a near-field nanometer optical field can be obtained point by point in real time, and further the geometric phase distribution generated by photon spin-orbit interaction in a super-structure surface device and the dynamic phase distribution of rotation change obtained by optical field transmission can be obtained simultaneously.
The invention is also suitable for measuring and characterizing other types of transmissive super-structured surface devices. As for the nanostructured surface structure device, the invention can be extended to all other geometrical phase modulation based circularly polarization sensitive nanostructured surface structures. The nanostructured surface structure device unit geometry design may comprise nanorods, nanostars, nanodisk aggregates, and the like. The device material may include metal materials such as gold, silver, and aluminum, and may also include dielectric materials with a relatively high refractive index such as silicon and titanium dioxide. Device functions may include vortex rotation generation and inversion, photonic spin-hall effect devices, holographic multiplexing, and the like.
The above-mentioned embodiments only express several embodiments of the present invention, and it is more specific and detailed as the description thereof, but it should not be understood that the invention claims are limited thereby. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (19)

1. A probe heterodyne interference device for rotation resolution is characterized by comprising:
the single-beam laser is divided into original measuring light and original reference light through the light splitting module;
a difference frequency generating device, arranged in the transmission direction of the original measuring light and the original reference light, for performing frequency modulation on the original measuring light and the original reference light, outputting the measuring light and the reference light, and generating a predetermined frequency difference between the measuring light and the reference light;
the measurement light polarization control device is arranged in the transmission direction of the measurement light, and the polarization state of the measurement light is adjusted after the measurement light enters the measurement light polarization control device;
a focusing and scanning device which is arranged in the output direction of the reference light of the measuring light polarization control device, focuses the measuring light passing through the measuring light polarization control device to output illumination light, and finely adjusts the excitation position of the illumination light relative to the sample;
the aperture type scanning near-field optical microscope device excites the sample to generate a nanometer optical field, and the aperture type scanning near-field optical microscope device detects and collects the nanometer optical field in a near field and outputs sample information light;
the reference light polarization compensation device is arranged in the transmission direction of the reference light, and the reference light is incident to the reference light polarization compensation device and then outputs polarization compensation light;
and the sample information light and the polarization compensation light enter the coupling device to generate interference to generate heterodyne interference light.
2. The rotationally resolved probe heterodyne interference apparatus of claim 1, wherein the difference frequency generating means includes:
the first frequency shifter and the first diaphragm are sequentially arranged along the propagation direction of the original measuring light;
the second frequency shifter and the second diaphragm are sequentially arranged along the propagation direction of the original reference light;
the first frequency shifter and the second frequency shifter are acousto-optic frequency shifters or acousto-optic modulators.
3. The rotationally resolved probe heterodyne interference apparatus of claim 1, wherein the measurement light polarization control apparatus includes a polarizer and a quarter-wave plate or a spatial light modulator, which are sequentially arranged along a propagation direction of the measurement light.
4. The rotationally resolved probe heterodyne interferometry apparatus of claim 1, wherein the focus scanning apparatus comprises:
the measuring light enters the focusing element to output weakly focused illuminating light after passing through the measuring light polarization control device;
a scanning element that fine-tunes an excitation position of the weakly focused illumination light relative to the sample.
5. The gyresolventizing probe heterodyne interferometry device of claim 1, wherein the aperture-type scanning near-field optical microscope device comprises:
the scanning platform is used for placing a sample, and the center of the scanning platform is provided with a light through hole penetrating through the scanning platform;
a scanning head disposed opposite the sample;
the optical fiber probe is linked with the scanning head and is connected with the coupling device, the nano optical field of the sample is detected by the near field of the needle point of the optical fiber probe, and the sample information light is transmitted to the coupling device through the optical fiber of the optical fiber probe;
the scanning near-field optical microscope controller is connected with the scanning head and the scanning platform and is used for synchronously controlling the scanning head and the scanning platform to realize micron-scale and nano-scale precision three-dimensional displacement;
the device comprises a video microscope and a CCD camera, wherein the video microscope is opposite to a sample carried by the scanning platform, and the CCD camera is fixed on the video microscope and used for assisting in imaging and feeding back the relative position of the optical fiber probe and the sample.
6. The rotational resolution probe heterodyne interference apparatus of claim 5, wherein the optical fiber probe is a bare optical fiber probe without coating film or a metal-coated aperture probe or a functional probe with a tip adhered with metal nanoparticles or a functional probe with etched helical chiral nanostructure.
7. The rotation-resolving probe heterodyne interference apparatus of claim 1, wherein the reference light polarization compensation apparatus includes:
the electric half-wave plate and the electric quarter-wave plate are used for electrically controlling and compensating the polarization state of the reference light and are sequentially arranged along the propagation direction of the reference light;
the optical fiber polarization controller is connected with the coupling device and used for adjusting the polarization state in the optical fiber of the optical fiber polarization controller and transmitting the polarization compensation light to the coupling device;
the optical fiber collimating coupler is arranged between the electric quarter-wave plate and the optical fiber polarization controller.
8. The rotationally resolved probe heterodyne interference apparatus of claim 7, wherein the fiber collimating coupler is a low numerical aperture objective lens or a graded index lens for coupling spatial light into the fiber of the fiber polarization controller.
9. The rotation-resolving probe heterodyne interferometry apparatus of claim 1, wherein the coupling apparatus comprises a non-polarization-maintaining fiber coupler.
10. The rotational resolution probe heterodyne interference apparatus of claim 1, wherein the optical splitting module includes a polarizing beam splitter and a mirror disposed in a light exiting direction of the polarizing beam splitter.
11. A method for measuring nanometer optical field spin-orbit interaction, which adopts the gyrodynamic resolution probe heterodyne interference apparatus of any one of claims 1 to 10, and is used for measuring nanometer optical field spin-orbit interaction on mesoscopic scale, and is characterized by comprising the following steps:
by a reference light polarization compensation device and a coupling device, heterodyne interference light is generated and selective rotation or opposite rotation is obtained for resolution by a rotation resolution detection method;
and the performance of super-optical diffraction limit imaging and phase resolution is obtained by adopting a probe heterodyne interference method.
12. The method of claim 11, wherein the spin-resolved detection method comprises:
obtaining circular polarization compensation light by adopting an orthogonal polarization calibration method, wherein the circular polarization compensation light and the sample information light interfere in the coupling device to generate heterodyne interference light;
and the rotation resolution detection of the nanometer optical field of the sample is realized by adjusting the reference light polarization compensation device to control and switch the rotation of the circular polarization compensation light.
13. The method of claim 12, wherein the orthogonal polarization calibration method comprises:
and standard left-handed or right-handed circularly polarized illumination light is incident to a non-structural area of the sample, and the reference light polarization compensation device is adjusted to enable heterodyne interference light output by the coupling device to reach an extinction state so as to obtain right-handed or left-handed circularly polarized compensation light.
14. The method of claim 11, wherein the probe heterodyne interferometry comprises:
the optical fiber probe collects near-field high spatial frequency information of a nanometer optical field of a sample and transmits the information to a far field so as to realize ultra-optical diffraction limit measurement;
the original reference light and the original measuring light pass through a difference frequency generating device, and the generated reference light and the measuring light have a preset frequency difference;
and the heterodyne interference light demodulation can realize the relative phase measurement of the nanometer optical field at the position of the optical fiber probe.
15. A nano-optic field spin-orbit interaction measurement system, comprising:
the laser generating device is used for outputting the original measuring light and the original reference light;
the probe heterodyne interference device for rotational resolution is arranged in the light output direction of the laser generation device, and is used for generating heterodyne interference light by adopting the probe heterodyne interference device for rotational resolution of any one of claims 1 to 10;
and the data receiving and processing device is arranged in the output direction of the heterodyne interference light and is used for receiving the heterodyne interference light and analyzing heterodyne interference information.
16. The nano-optic field spin-orbit interaction measurement system of claim 15, wherein the laser generation device comprises:
the laser outputs single longitudinal mode laser with good coherence;
and the single longitudinal mode laser passes through the shaping unit to output laser of a single longitudinal mode and a single transverse mode.
17. The nano-optic field spin-orbit interaction measurement system of claim 16, wherein the shaping unit comprises:
the laser comprises a beam expanding device, a shaping device, a collimating device and a filtering device, wherein the beam expanding device, the shaping device, the collimating device and the filtering device are sequentially arranged along the light output transmission direction of the laser.
18. The nano-optic field spin-orbit interaction measurement system according to claim 15, wherein the data receiving and processing means comprises:
the heterodyne interference light is incident to the photoelectric detector and then outputs an alternating current signal;
the phase-locked amplifier is electrically connected with the photoelectric detector;
the reference signal mixing module is electrically connected with the phase-locked amplifier and provides a reference frequency signal for the phase-locked amplifier, and the phase-locked amplifier performs phase locking and demodulation on the alternating current signal and outputs a phase-locked demodulation signal;
and the data acquisition module is electrically connected with the phase-locked amplifier and is used for acquiring the phase-locked demodulation signal.
19. The nanoscopic optical field spin-orbit interaction measurement system of claim 15, wherein the system further comprises a computational control terminal electrically connected to the aperture type scanning near-field optical microscope device and the data receiving and processing device, respectively.
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