CN109594047B - Preparation method of chiral metal micro-nano spiral structure - Google Patents
Preparation method of chiral metal micro-nano spiral structure Download PDFInfo
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- CN109594047B CN109594047B CN201811490925.3A CN201811490925A CN109594047B CN 109594047 B CN109594047 B CN 109594047B CN 201811490925 A CN201811490925 A CN 201811490925A CN 109594047 B CN109594047 B CN 109594047B
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- spiral structure
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 61
- 239000002184 metal Substances 0.000 title claims abstract description 61
- 238000002360 preparation method Methods 0.000 title claims abstract description 42
- 238000001704 evaporation Methods 0.000 claims description 92
- 239000004793 Polystyrene Substances 0.000 claims description 61
- 229920002223 polystyrene Polymers 0.000 claims description 61
- 239000011521 glass Substances 0.000 claims description 60
- 230000008020 evaporation Effects 0.000 claims description 48
- 239000011810 insulating material Substances 0.000 claims description 47
- 238000000034 method Methods 0.000 claims description 39
- 239000002356 single layer Substances 0.000 claims description 35
- 239000011324 bead Substances 0.000 claims description 27
- 239000008367 deionised water Substances 0.000 claims description 27
- 229910021641 deionized water Inorganic materials 0.000 claims description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 27
- 239000010410 layer Substances 0.000 claims description 21
- 238000007747 plating Methods 0.000 claims description 20
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 18
- 239000000243 solution Substances 0.000 claims description 18
- 239000007769 metal material Substances 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 15
- 230000008021 deposition Effects 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 238000009210 therapy by ultrasound Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000005566 electron beam evaporation Methods 0.000 claims description 6
- 239000011259 mixed solution Substances 0.000 claims description 6
- 239000000725 suspension Substances 0.000 claims description 6
- 238000005406 washing Methods 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 5
- 239000007888 film coating Substances 0.000 claims description 4
- 238000009501 film coating Methods 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 238000001771 vacuum deposition Methods 0.000 claims description 4
- 239000002390 adhesive tape Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 239000003599 detergent Substances 0.000 claims description 3
- 238000011049 filling Methods 0.000 claims description 3
- 239000012774 insulation material Substances 0.000 claims description 3
- 238000011068 loading method Methods 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 230000000379 polymerizing effect Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000009504 vacuum film coating Methods 0.000 claims 1
- 238000002983 circular dichroism Methods 0.000 abstract description 12
- 239000002086 nanomaterial Substances 0.000 abstract description 7
- 238000001878 scanning electron micrograph Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001142 circular dichroism spectrum Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Nanotechnology (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811490925.3A CN109594047B (en) | 2018-12-07 | 2018-12-07 | Preparation method of chiral metal micro-nano spiral structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811490925.3A CN109594047B (en) | 2018-12-07 | 2018-12-07 | Preparation method of chiral metal micro-nano spiral structure |
Publications (2)
Publication Number | Publication Date |
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CN109594047A CN109594047A (en) | 2019-04-09 |
CN109594047B true CN109594047B (en) | 2020-10-27 |
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CN201811490925.3A Expired - Fee Related CN109594047B (en) | 2018-12-07 | 2018-12-07 | Preparation method of chiral metal micro-nano spiral structure |
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CN (1) | CN109594047B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109946771B (en) * | 2019-05-05 | 2021-04-27 | 韩山师范学院 | Triangular chiral structure and preparation method thereof |
CN110095827A (en) * | 2019-05-08 | 2019-08-06 | 中山科立特光电科技有限公司 | A kind of micro-nano structure generating circularly polarized light |
CN110540170A (en) * | 2019-09-05 | 2019-12-06 | 陕西师范大学 | Metal micro-nano spiral structure and preparation method thereof |
CN110865428B (en) * | 2019-11-28 | 2021-08-24 | 陕西师范大学 | Preparation of strong-induction CD structure and preparation method thereof |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US7718574B2 (en) * | 2004-04-08 | 2010-05-18 | Superpower, Inc. | Biaxially-textured film deposition for superconductor coated tapes |
US9732427B2 (en) * | 2010-08-25 | 2017-08-15 | Rensselaer Polytechnic Institute | Tunable nanoporous films on polymer substrates, and method for their manufacture |
AR097076A1 (en) * | 2013-07-25 | 2016-02-17 | Hpo Assets Llc | ELECTROCROMIC FILMS AND THEIR RELATED METHODS |
US20170184497A1 (en) * | 2015-12-29 | 2017-06-29 | Hong Kong Baptist University | Plasmonic nanoparticles with hidden chiroptical activity |
CN105866039B (en) * | 2016-03-31 | 2018-08-17 | 陕西师范大学 | A kind of preparation of achirality structure that realizing circular dichroism and measurement method |
CN105967143B (en) * | 2016-05-06 | 2017-12-08 | 陕西师范大学 | A kind of chiral metal nanostructured for realizing circular dichroism and preparation method thereof |
CN106086793B (en) * | 2016-07-01 | 2018-09-04 | 陕西师范大学 | A kind of two dimension chiral metal-medium nanostructure and preparation method thereof |
CN106989969B (en) * | 2017-03-31 | 2019-06-07 | 陕西师范大学 | A kind of tilted metallic nanostructure and preparation method thereof |
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CN109594047A (en) | 2019-04-09 |
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Effective date of registration: 20221230 Address after: 276000 block a, innovation building, high tech Industrial Development Zone, Linyi City, Shandong Province Patentee after: Shandong Future City Construction Engineering Co.,Ltd. Address before: Room 1604-2, building 10, Shangbao apartment, Fudong Road, Lucheng District, Wenzhou City, Zhejiang Province 325000 Patentee before: WENZHOU YIRONG MACHINERY Co.,Ltd. |
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