CN109580759A - A kind of quadrupole mass spectrometer - Google Patents
A kind of quadrupole mass spectrometer Download PDFInfo
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- CN109580759A CN109580759A CN201710894187.8A CN201710894187A CN109580759A CN 109580759 A CN109580759 A CN 109580759A CN 201710894187 A CN201710894187 A CN 201710894187A CN 109580759 A CN109580759 A CN 109580759A
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- mass spectrometer
- quadrupole mass
- sampling pipe
- quadrupole
- gas
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/622—Ion mobility spectrometry
- G01N27/624—Differential mobility spectrometry [DMS]; Field asymmetric-waveform ion mobility spectrometry [FAIMS]
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- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The present invention discloses a kind of quadrupole mass spectrometer, constituent analysis for gas in vacuum system, including quadrupole mass spectrometer ontology, quadrupole rod and sampling pipe, quadrupole mass spectrometer ontology (1) CF flange is connect with sampling pipe (2), quadrupole rod (3) is built in sampling pipe (2), sampling pipe (2) top is provided with air inlet, and air inlet is connect with vacuum system to be analyzed (6), and sampling pipe (2) bottom end is connect with vacuum pump (7).Analyzed gas flows through the sample unit that quadrupole mass spectrometer quadrupole rod forms from the air inlet, relative to traditional method for shunting air inlet in quadrupole mass spectrometer bottom end, the sensitivity of gas sampling of the present invention is higher, the gas analysis ability that quadrupole mass spectrometer can be improved, is conducive to the quantitative analysis of gas componant.
Description
Technical field
The present invention relates to the vacuum system gas composition analysis of gas composition analysis technical field, especially quadrupole mass spectrometer
Technical field.
Background technique
Currently, well known quadrupole mass spectrometer sampling pipe, it is usually used cylinder type, sampling pipe is substantially and four-electrode spectrum
The quadrupole rod of meter is isometric, and top CF flanged joint quadrupole mass spectrometer, the quadrupole rod of quadrupole mass spectrometer is built in sampling pipe, adopts
Sample tube bottom end CF flanged joint to threeway, gas to be analyzed flows through threeway in vacuum system, and by being further separated into quadrupole
The sampling pipe of mass spectrograph, the quadrupole mass spectrometer quadrupole rod being built in sampling pipe carry out sampling analysis.Existing quadrupole mass spectrometer
Sampling pipe is as shown in Figure 1:
Quadrupole mass spectrometer is the ion according to different mass-to-charge ratioes whether direct current high frequency quadrupole analyzes the stabilization of motion profile in field
To realize mass separation.Quadrupole mass spectrometer sensitivity is usually made of three factors: ion collection efficiency, ion source it is sensitive
The transmission rate of degree, quadrupole field.Since the gas in vacuum system passes through the sampling pipe after distributing T-pipe into quadrupole mass spectrometer, gas
Ionic weight after volume ionization is smaller, and quadrupole mass spectrometer ion collection efficiency is low, causes quadrupole mass spectrometer sampling under existing method
Sensitivity is low.
Summary of the invention
Technical problems to be solved: for the disadvantage for overcoming existing quadrupole mass spectrometer sampling sensitivity low, the present invention is mentioned
The sensitivity of quadrupole mass spectrometer sampling can be improved using cylinder pipe side hatch frame for a kind of quadrupole mass spectrometer sampling pipe.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of quadrupole mass spectrometer, including quadrupole mass spectrometer ontology, quadrupole rod and sampling pipe, quadrupole mass spectrometer ontology (1) CF method
Orchid connect with sampling pipe (2), and quadrupole rod (3) is built in sampling pipe (2), and sampling pipe (2) top is provided with air inlet, air inlet and
Vacuum system (6) connection to be analyzed, sampling pipe (2) bottom end is connect with vacuum pump (7).
The air inlet of the sampling pipe (2) is connect by all-metal shut-off valve (5) with vacuum system to be analyzed (6).
The all-metal shut-off valve (5) and sampling pipe (2), vacuum system to be analyzed (6) pass through CF flanged joint.
Sampling pipe (2) bottom end is connect by all-metal angle valve (4) with vacuum pump (7).
The all-metal angle valve (4) and sampling pipe (2), vacuum pump (7) pass through CF flanged joint.
Beneficial effects of the present invention: in quadrupole mass spectrometer sampling pipe apical position design gas access, in vacuum system
Gas can all by the gas access pass through quadrupole mass spectrometer sample unit, more existing sampling pipe bottom end shunt method,
Ionic weight after gas ionization is big, and quadrupole mass spectrometer ion collection efficiency is high, and the sensitivity of quadrupole mass spectrometer sampling is improved,
Realize the constituent analysis of gas in vacuum system；The sampling pipe advanced design, it is structurally reasonable, the gas of quadrupole mass spectrometer can be improved
Analysis ability is conducive to the quantitative analysis of gas componant.
Detailed description of the invention
The existing quadrupole mass spectrometer sampling structure schematic diagram of Fig. 1；
Fig. 2 is structural schematic diagram of the invention.
In figure: 1, quadrupole mass spectrometer ontology, 2, sampling pipe, 3, quadrupole rod, 4, all-metal angle valve, 5, all-metal cut-off
Valve, 6, vacuum system to be analyzed, 7, vacuum pump.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The sampling pipe 2 of quadrupole mass spectrometer is concatenated into vacuum system, and vacuum pump 7 is when dredging empty in vacuum system 6 to be analyzed
Gas is flowed by 2 top of sampling pipe, and by the quadrupole rod 3 of quadrupole mass spectrometer, the gas of 3 pairs of quadrupole rod processes is ionized, and four
Pole mass spectrograph ontology 1 carries out quantitative analysis to the ion stream of different quality number gas, analyzes the ingredient of gas.
See that Fig. 2, the CF flanged joint to sampling pipe 2 of quadrupole mass spectrometer ontology 1, the quadrupole rod 3 of quadrupole mass spectrometer are built in
In sampling pipe 2, an air inlet is opened in 2 top higher position of sampling pipe, and with CF flanged joint to all-metal shut-off valve 5, entirely
The CF flange of metal shut-off valve 5 is connect with vacuum system 6 to be analyzed；2 bottom end of sampling pipe CF flanged joint to all-metal angle valve
4, the CF flanged joint to vacuum pump 7 of all-metal angle valve 4.
Open all-metal angle valve 4 and all-metal shut-off valve 5, sky dredged to vacuum system 6 to be analyzed using vacuum pump 7, when to
After analyzing the vacuum degree arrival quadrupole mass spectrometer working vacuum degree in vacuum system 6, quadrupole mass spectrometer is powered on, and carries out gas
It is divided into analysis.
All-metal angle valve 4 and all-metal shut-off valve 5 are closed when not in use in quadrupole mass spectrometer, keep adopting for quadrupole mass spectrometer
Sample component is in vacuum environment.
Claims (5)
1. a kind of quadrupole mass spectrometer, including quadrupole mass spectrometer ontology, quadrupole rod and sampling pipe, which is characterized in that quadrupole mass spectrometer
Ontology (1) is connect with CF flange with sampling pipe (2), and quadrupole rod (3) is built in sampling pipe (2), sampling pipe (2) top be provided with into
Port, air inlet are connect with vacuum system to be analyzed (6), and sampling pipe (2) bottom end is connect with vacuum pump (7).
2. a kind of quadrupole mass spectrometer according to claim 1, which is characterized in that the air inlet of the sampling pipe (2) passes through
All-metal shut-off valve (5) is connect with vacuum system to be analyzed (6).
3. a kind of quadrupole mass spectrometer according to claim 1, which is characterized in that the all-metal shut-off valve (5) and sampling
It manages (2), vacuum system to be analyzed (6) and passes through CF flanged joint.
4. a kind of quadrupole mass spectrometer according to claim 1, which is characterized in that sampling pipe (2) bottom end passes through full gold
Belong to angle valve (4) to connect with vacuum pump (7).
5. a kind of quadrupole mass spectrometer according to claim 1, which is characterized in that the all-metal angle valve (4) and sampling pipe
(2), vacuum pump (7) passes through CF flanged joint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710894187.8A CN109580759A (en) | 2017-09-28 | 2017-09-28 | A kind of quadrupole mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710894187.8A CN109580759A (en) | 2017-09-28 | 2017-09-28 | A kind of quadrupole mass spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109580759A true CN109580759A (en) | 2019-04-05 |
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ID=65912681
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710894187.8A Pending CN109580759A (en) | 2017-09-28 | 2017-09-28 | A kind of quadrupole mass spectrometer |
Country Status (1)
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| CN (1) | CN109580759A (en) |
Citations (13)
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| JPH07272671A (en) * | 1994-03-29 | 1995-10-20 | Ulvac Japan Ltd | Method and device for gas analysis |
| JPH08203468A (en) * | 1995-01-27 | 1996-08-09 | Hitachi Ltd | Atmospheric pressure ionization mass spectrometer |
| JP2004171859A (en) * | 2002-11-19 | 2004-06-17 | Japan Atom Energy Res Inst | Quadrupole type mass spectrometer |
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| CN101470101A (en) * | 2007-12-28 | 2009-07-01 | 中国航天科技集团公司第五研究院第五一〇研究所 | Relative sensitivity calibration system for quadrupole mass spectrometer |
| CN201773095U (en) * | 2010-06-08 | 2011-03-23 | 江苏天瑞仪器股份有限公司 | Chromatograph-mass spectrometer |
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| CN102576015A (en) * | 2009-07-28 | 2012-07-11 | 詹森生物科技公司 | Serum markers predicting clinical response to anti-TNF[alpha] antibodies in patients with psoriatic arthritis |
| CN105651854A (en) * | 2016-03-15 | 2016-06-08 | 中国原子能科学研究院 | System and method for quantitatively determining trace <3>He in tritium-containing aging sample |
| CN105973943A (en) * | 2016-05-30 | 2016-09-28 | 成都飞机工业（集团）有限责任公司 | Device and method for testing traveling wave inhibition performance of wave absorbing material |
| CN107045016A (en) * | 2017-02-05 | 2017-08-15 | 中国科学院地质与地球物理研究所 | A kind of objects outside Earth Atmospheric components and radioisotope gauge and measuring method |
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2017
- 2017-09-28 CN CN201710894187.8A patent/CN109580759A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07272671A (en) * | 1994-03-29 | 1995-10-20 | Ulvac Japan Ltd | Method and device for gas analysis |
| JPH08203468A (en) * | 1995-01-27 | 1996-08-09 | Hitachi Ltd | Atmospheric pressure ionization mass spectrometer |
| JP2004171859A (en) * | 2002-11-19 | 2004-06-17 | Japan Atom Energy Res Inst | Quadrupole type mass spectrometer |
| CN2828780Y (en) * | 2005-07-19 | 2006-10-18 | 黄文平 | Multi-gas leakage testing analyzing instrument |
| CN1779457A (en) * | 2005-10-19 | 2006-05-31 | 广州禾信自动化系统有限公司 | Gas-phase molecular ion reactor based on radio-frequency quard-polar rod, its realization and use |
| CN1996023A (en) * | 2006-12-22 | 2007-07-11 | 清华大学 | Moving type quick automatic monitoring system for water quality |
| CN101470101A (en) * | 2007-12-28 | 2009-07-01 | 中国航天科技集团公司第五研究院第五一〇研究所 | Relative sensitivity calibration system for quadrupole mass spectrometer |
| CN102308361A (en) * | 2009-02-05 | 2012-01-04 | 株式会社岛津制作所 | MS/MS mass spectrometer |
| CN102576015A (en) * | 2009-07-28 | 2012-07-11 | 詹森生物科技公司 | Serum markers predicting clinical response to anti-TNF[alpha] antibodies in patients with psoriatic arthritis |
| CN201773095U (en) * | 2010-06-08 | 2011-03-23 | 江苏天瑞仪器股份有限公司 | Chromatograph-mass spectrometer |
| CN105651854A (en) * | 2016-03-15 | 2016-06-08 | 中国原子能科学研究院 | System and method for quantitatively determining trace <3>He in tritium-containing aging sample |
| CN105973943A (en) * | 2016-05-30 | 2016-09-28 | 成都飞机工业（集团）有限责任公司 | Device and method for testing traveling wave inhibition performance of wave absorbing material |
| CN107045016A (en) * | 2017-02-05 | 2017-08-15 | 中国科学院地质与地球物理研究所 | A kind of objects outside Earth Atmospheric components and radioisotope gauge and measuring method |
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